A single crystal silicon rod outer circle processing equipment

Abstract

The present invention discloses a single crystal silicon rod outer circle processing equipment, and relates to the technical field of silicon rod processing; the present invention comprises a distance adjustment mechanism, two movable ends of the distance adjustment mechanism are fixedly installed with a first adjustment mechanism, a silicon rod clamping mechanism for clamping the silicon rod is arranged inside the first adjustment mechanism, four second adjustment mechanisms distributed in a ring are installed on the distance adjustment mechanism, two groups of chamfering grinders and two groups of polishing grinders are respectively installed on the four second adjustment mechanisms, the present invention adjusts the positions of the two first adjustment mechanisms, adjacent chamfering grinders and adjacent polishing grinders through the distance adjustment mechanism, so that the two groups of chamfering grinders and the two groups of polishing grinders can be evenly arranged, and the mutual cooperation of the first adjustment mechanism and the second adjustment mechanism can enable the chamfering grinder and the polishing grinder to be moved to the outer circle of the single crystal silicon rod for processing, thereby improving the processing efficiency of processing the single crystal silicon rod into single crystal silicon wafers.

Description

Technical Field

[0001] The invention relates to the technical field of silicon rod processing, in particular to a single crystal silicon rod outer circle processing device. Background Art

[0002] Single crystal silicon rods are silicon single crystal rods that are shaped or pulled in a furnace through zone melting or direct pulling processes. Single crystal silicon rods are one of the most widely used materials in the semiconductor industry. The manufacture of single crystal silicon wafers requires a series of chemical treatments and mechanical processing to make single crystal silicon rods into corresponding single crystal silicon wafers.

[0003] Currently, most of the equipment for processing the outer circle of single crystal silicon rods uses polishing equipment to polish the outer circle of single crystal silicon rods, thereby removing the roughness and defects on the surface of the single crystal silicon rods, making their surface smoother and meeting the required quality standards. Currently, most of the equipment for polishing the outer circle of single crystal silicon rods only performs flatness processing on the outer circle of single crystal silicon rods. When the single crystal silicon rods are processed into single crystal silicon wafers, the outer circle of the new single crystal silicon wafers needs to be polished, thereby increasing the production process of processing single crystal silicon rods into single crystal silicon wafers. In view of the above problems, the inventor proposes a single crystal silicon rod outer circle processing equipment for solving the above problems. Summary of the invention

[0004] In order to solve the problem that most of the current single crystal silicon rod outer circle polishing equipment only performs flatness processing on the outer circle of the single crystal silicon rod, and the outer circle of the single crystal silicon wafer needs to be polished when the single crystal silicon rod is processed into a single crystal silicon wafer, thereby increasing the production process of processing the single crystal silicon rod into a single crystal silicon wafer; the purpose of the present invention is to provide a single crystal silicon rod outer circle processing equipment.

[0005] In order to solve the above technical problems, the present invention adopts the following technical scheme: a single crystal silicon rod outer circle processing equipment, including a distance adjustment mechanism, both movable ends of the distance adjustment mechanism are fixedly installed with a first adjustment mechanism, and the two first adjustment mechanisms are symmetrically distributed, a silicon rod clamping mechanism for clamping the silicon rod is arranged inside the first adjustment mechanism, and the two silicon rod clamping mechanisms are symmetrically distributed, four second adjustment mechanisms distributed in a ring shape are installed on the distance adjustment mechanism, and the four second adjustment mechanisms are located on the inner sides of the two first adjustment mechanisms, two groups of chamfering grinders and two groups of polishing grinders are respectively installed on the four second adjustment mechanisms, and the chamfering grinders and the polishing grinders are staggered.

[0006] Preferably, the distance adjustment mechanism includes a base, support brackets are fixedly installed on both sides of the top of the base, two sliding rods are fixedly installed between the two support brackets, a first screw and a drive shaft are rotatably provided on the two support brackets, and the thread on the first screw is a bidirectional thread, a first motor and a second motor are installed on the outer side of one of the support brackets, and the output ends of the first motor and the second motor are respectively connected to the first screw and one end of the drive shaft, two movable brackets are threaded on the first screw, and the two movable brackets are slidably arranged on the two sliding rods.

[0007] Preferably, the first adjustment mechanism includes an annular bracket, and the annular bracket is fixedly mounted on the movable bracket, a sleeve shaft is rotatably provided at the lower end of the annular bracket, and the sleeve shaft is slidably sleeved on the driving shaft, a plurality of sliders are fixedly mounted on the inner ring of the sleeve shaft, a plurality of sliding grooves are opened on the outer ring of the driving shaft, and a plurality of sliders are slidably arranged inside the plurality of sliding grooves respectively.

[0008] Preferably, an outer gear ring is rotatably provided inside the annular bracket, a first gear is fixedly installed on the outer ring of the sleeve shaft, and the first gear is meshed with the outer gear ring, four second screws distributed in a ring are rotatably provided on the annular bracket, and the thread on the second screw is a bidirectional thread, a second gear is fixedly installed on one end of the second screw, and the four second gears are all meshed with the outer gear ring.

[0009] Preferably, two moving blocks are threaded on the second screw, a guide column is fixedly installed on the side of the moving block away from the center of the annular bracket, and the guide column is slidably arranged on the annular bracket, and the two moving blocks on the second screw are respectively hingedly connected to the first swing arm and the second swing arm on the side close to the center of the annular bracket, and the other ends of the first swing arm and the second swing arm are hingedly connected to the same hinge seat.

[0010] Preferably, the silicon rod clamping mechanism includes a fixed bracket, and the fixed bracket is fixedly installed on the inner ring of the annular bracket, a clamping electric cylinder is fixedly installed at the center of the fixed bracket, a third motor is installed at the output end of the clamping electric cylinder, and a clamp for clamping the silicon rod is installed at the output end of the third motor.

[0011] Preferably, the second adjustment mechanism includes two sleeves, and the two sleeves are respectively fixedly mounted on two supporting brackets, a moving rod is slidably provided inside the sleeve, a plug-in socket is fixedly mounted on one end of the moving rod close to the center of the supporting bracket, two plug-in rods are inserted inside the two plug-in sockets, and the two plug-in rods are fixed inside the plug-in sockets by fastening screws, and the two plug-in rods are slidably inserted into the two hinged seats.

[0012] Preferably, a plurality of rectangular blocks distributed in a straight line are slidably provided between the two insertion rods, end blocks are provided at both ends of the rectangular block, and the two end blocks are set on the two insertion rods by ball rolling, the two end blocks are respectively fixedly installed at one end of the rectangular block close to the silicon rod clamping mechanism and rotatably arranged at the end of the rectangular block away from the silicon rod clamping mechanism, and the end block located at the end of the rectangular block away from the silicon rod clamping mechanism is connected to the rectangular block through a fastening screw, and a fixing column is fixedly installed on the end block located at the end of the rectangular block close to the silicon rod clamping mechanism, and a socket is fixedly installed at the other end of the fixing column.

[0013] Preferably, the two fixed columns located at both ends are rotatably provided with a first connecting arm and a second connecting arm, the several fixed columns located in the middle are rotatably provided with a first cross arm and a second cross arm, and the fixed column is located in the middle of the cross-distributed first cross arms and the second cross arms, the adjacent first cross arms and the second cross arms are hingedly connected, the first cross arms and the second cross arms located at the outermost sides are respectively hingedly connected to the first connecting arm and the second connecting arm on one side thereof, the two rectangular blocks located at both ends are fixedly installed with connecting rods, and the connecting rods are slidably arranged between the two insertion rods, and the other ends of the two connecting rods are respectively fixedly connected to the two hinge seats.

[0014] Preferably, a plurality of the chamfering tools and the polishing tools can be sleeved on the socket, and the chamfering tools and the polishing tools can be fixedly mounted on the socket by fastening screws.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention adjusts the positions of two first adjustment mechanisms, adjacent chamfering tools and adjacent polishing tools through a distance adjustment mechanism, so that the two groups of chamfering tools and the two groups of polishing tools can be evenly arranged, and the chamfering tools and the polishing tools can be replaced and adjusted in position according to use, which is convenient for processing a single crystal silicon rod into a single crystal silicon wafer of multiple specifications. The single crystal silicon rod is clamped by a silicon rod clamping mechanism and the single crystal silicon rod is rotated, which is convenient for processing the single crystal silicon rod. The first adjustment mechanism and the second adjustment mechanism cooperate with each other, so that the chamfering tool and the polishing tool can be moved to the outer circle of the single crystal silicon rod for processing, thereby improving the processing efficiency of processing the single crystal silicon rod into a single crystal silicon wafer;

[0017] 2. The present invention utilizes the rotation of the first screw to drive the two movable brackets thereon to move toward each other, thereby adjusting the distance between the two annular brackets, utilizing the movement of the annular bracket to drive the hinge seat thereon to move, and the movement of the two hinge seats drives the movement of several rectangular blocks therebetween, so that the fixed columns on the several rectangular blocks can be arranged at equal distances, thereby adjusting the distance between several chamfering abrasive tools distributed in a straight line and the distance between several polishing abrasive tools distributed in a straight line;

[0018] 3. The present invention utilizes the rotation of the driving shaft to drive the rotation of the sleeve shaft, the rotation of the sleeve shaft drives the rotation of the outer gear ring, the rotation of the outer gear ring drives a plurality of second screws to rotate, the rotation of the second screw drives the two moving blocks thereon to move toward each other, the movement of the two moving blocks drives the first swing arm and the second swing arm thereon to be hingedly connected at the other end to make a linear movement on the same hinged seat, the movement of the hinged seat drives the insertion rod inserted thereon to move, so that the rectangular block on the insertion rod moves, the movement of the rectangular block drives the chamfering grinder or polishing grinder thereon to move, so that the chamfering grinder or polishing grinder moves to the outside of the single crystal silicon rod, and cooperates with the rotation of the single crystal silicon rod to realize the processing of the outer circle of the single crystal silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the overall cross-sectional structure of the present invention.

[0022] Figure 3 It is a schematic diagram of the cross-sectional structure of the second adjustment mechanism and the chamfering grinding tool of the present invention.

[0023] Figure 4 It is a schematic diagram of the second adjustment mechanism and polishing tool structure of the present invention.

[0024] Figure 5 For the present invention Figure 2 A schematic diagram of the enlarged structure in the middle.

[0025] Figure 6 For the present invention Figure 2 Enlarged schematic diagram of the structure at point B in the middle.

[0026] Figure 7 For the present invention Figure 2 Enlarged schematic diagram of the structure at point C in the middle.

[0027] Figure 8 For the present invention Figure 2 Enlarged schematic diagram of the structure at point D in the middle.

[0028] Fig. 9 For the present invention Figure 3 Enlarged schematic diagram of the structure at point E in the middle.

[0029] Fig.10 For the present invention Figure 4Enlarged schematic diagram of the structure at F in the middle.

[0030] In the figure: 1. distance adjustment mechanism; 101. base; 102. support bracket; 103. slide rod; 104. first screw rod; 105. drive shaft; 106. first motor; 107. second motor; 108. mobile bracket; 2. first adjustment mechanism; 201. annular bracket; 202. sleeve shaft; 203. first gear; 204. outer gear ring; 205. second screw rod; 206. second gear; 207. mobile block; 208. guide column; 209. first swing arm; 210. second swing arm; 211. Articulated seat; 3. Silicon rod clamping mechanism; 301. Fixed bracket; 302. Clamping electric cylinder; 303. Third motor; 304. Clamp; 4. Second adjusting mechanism; 401. Sleeve; 402. Moving rod; 403. Plug-in seat; 404. Insert rod; 405. Rectangular block; 406. End block; 407. Fixed column; 408. Socket; 409. First connecting arm; 410. Second connecting arm; 411. First cross arm; 412. Second cross arm; 413. Connecting rod; 5. Chamfering grinder; 6. Polishing grinder. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Example: Figure 1-10 As shown, the present invention provides a single crystal silicon rod outer circle processing equipment, including a distance adjustment mechanism 1, two movable ends of the distance adjustment mechanism 1 are fixedly installed with a first adjustment mechanism 2, and the two first adjustment mechanisms 2 are symmetrically distributed, a silicon rod clamping mechanism 3 for clamping the silicon rod is arranged inside the first adjustment mechanism 2, and the two silicon rod clamping mechanisms 3 are symmetrically distributed, four second adjustment mechanisms 4 distributed in a ring shape are installed on the distance adjustment mechanism 1, and the four second adjustment mechanisms 4 are located on the inner sides of the two first adjustment mechanisms 2, two groups of chamfering grinders 5 and two groups of polishing grinders 6 are respectively installed on the four second adjustment mechanisms 4, and the chamfering grinders 5 and the polishing grinders 6 are staggered.

[0033] The distance adjustment mechanism 1 includes a base 101, and support brackets 102 are fixedly installed on both sides of the top of the base 101, and two sliding rods 103 are fixedly installed between the two support brackets 102. The two support brackets 102 are rotatably provided with a first screw rod 104 and a drive shaft 105, and the thread on the first screw rod 104 is a bidirectional thread. A first motor 106 and a second motor 107 are installed on the outer side of one of the support brackets 102, and the output ends of the first motor 106 and the second motor 107 are respectively connected to one end of the first screw rod 104 and the drive shaft 105, and two movable brackets 108 are threadedly provided on the first screw rod 104, and the two movable brackets 108 are slidably set on the two sliding rods 103.

[0034] By adopting the above technical solution, the two movable brackets 108 can move toward each other driven by the first screw rod 104 .

[0035] The first adjustment mechanism 2 includes an annular bracket 201, and the annular bracket 201 is fixedly installed on the movable bracket 108. The lower end of the annular bracket 201 is rotatably provided with a sleeve shaft 202, and the sleeve shaft 202 is slidably sleeved on the driving shaft 105. A plurality of sliders are fixedly installed on the inner ring of the sleeve shaft 202, and a plurality of sliding grooves are opened on the outer ring of the driving shaft 105, and a plurality of sliders are slidably set inside the plurality of sliding grooves respectively.

[0036] By adopting the above technical solution, the rotation of the driving shaft 105 can drive the sleeve shaft 202 to rotate.

[0037] An outer gear ring 204 is rotatably provided inside the annular bracket 201, a first gear 203 is fixedly installed on the outer ring of the sleeve shaft 202, and the first gear 203 is meshed with the outer gear ring 204, four second screw rods 205 distributed in a ring are rotatably provided on the annular bracket 201, and the threads on the second screw rods 205 are bidirectional threads, a second gear 206 is fixedly installed on one end of the second screw rod 205, and the four second gears 206 are all meshed with the outer gear ring 204.

[0038] By adopting the above technical solution, the rotation of the sleeve shaft 202 can drive the four second screw rods 205 to rotate simultaneously.

[0039] Two moving blocks 207 are threadedly provided on the second screw rod 205, and a guide column 208 is fixedly installed on the side of the moving block 207 away from the center of the annular bracket 201, and the guide column 208 is slidably set on the annular bracket 201. The two moving blocks 207 on the second screw rod 205 are respectively hingedly connected to the first swing arm 209 and the second swing arm 210 on the side close to the center of the annular bracket 201, and the other ends of the first swing arm 209 and the second swing arm 210 are hingedly connected to the same hinge seat 211.

[0040] By adopting the above technical solution, the rotation of the second screw rod 205 can drive the hinge seat 211 to move.

[0041] The silicon rod clamping mechanism 3 includes a fixed bracket 301, and the fixed bracket 301 is fixedly installed on the inner circle of the annular bracket 201. A clamping electric cylinder 302 is fixedly installed at the center of the fixed bracket 301. A third motor 303 is installed at the output end of the clamping electric cylinder 302. A clamp 304 for clamping the silicon rod is installed at the output end of the third motor 303.

[0042] By adopting the above technical solution, the silicon rod clamping mechanism 3 can clamp the single crystal silicon rod and drive the single crystal silicon rod to rotate.

[0043] The second adjustment mechanism 4 includes two sleeves 401, and the two sleeves 401 are respectively fixedly installed on the two supporting brackets 102, and a moving rod 402 is slidably provided inside the sleeve 401, and a plug-in socket 403 is fixedly installed at one end of the moving rod 402 close to the center of the supporting bracket 102, and two plug rods 404 are inserted inside the two plug-in sockets 403, and the two plug rods 404 are fixed inside the plug-in sockets 403 by fastening screws, and the two plug rods 404 are slidably inserted into the two hinged seats 211.

[0044] By adopting the above technical solution, the sleeve 401 can limit the moving direction of the insertion rod 404.

[0045] A plurality of rectangular blocks 405 distributed in a straight line are slidably provided between the two insertion rods 404, end blocks 406 are provided at both ends of the rectangular block 405, and the two end blocks 406 are set on the two insertion rods 404 by ball rolling, the two end blocks 406 are respectively fixedly installed at one end of the rectangular block 405 close to the silicon rod clamping mechanism 3 and rotatably set at the end of the rectangular block 405 away from the silicon rod clamping mechanism 3, and the end block 406 located at the end of the rectangular block 405 away from the silicon rod clamping mechanism 3 is connected to the rectangular block 405 through a fastening screw, and a fixing column 407 is fixedly installed on the end block 406 located at the end of the rectangular block 405 close to the silicon rod clamping mechanism 3, and a socket 408 is fixedly installed at the other end of the fixing column 407.

[0046] By adopting the above technical solution, the rectangular block 405 can slide between the two insertion rods 404 .

[0047] The two fixed columns 407 located at both ends are rotatably provided with a first connecting arm 409 and a second connecting arm 410, and the several fixed columns 407 located in the middle are rotatably provided with a first cross arm 411 and a second cross arm 412, and the fixed columns 407 are located in the middle of the cross-distributed first cross arms 411 and the second cross arms 412, and the adjacent first cross arms 411 and the second cross arms 412 are hingedly connected, and the first cross arms 411 and the second cross arms 412 located at the outermost sides are respectively hingedly connected to the first connecting arm 409 and the second connecting arm 410 on one side thereof, and the two rectangular blocks 405 located at both ends are fixedly installed with a connecting rod 413, and the connecting rod 413 is slidably set between the two insertion rods 404, and the other ends of the two connecting rods 413 are respectively fixedly connected to the two hinge seats 211.

[0048] By adopting the above technical solution, the two hinge seats 211 can move toward each other to drive a plurality of sockets 408 to be evenly distributed.

[0049] A plurality of the chamfering tools 5 and the polishing tools 6 can be sleeved on the socket 408 , and the chamfering tools 5 and the polishing tools 6 can be fixedly mounted on the socket 408 by fastening screws.

[0050] By adopting the above technical solution, the chamfering tool 5 and the polishing tool 6 can be replaced according to actual use conditions.

[0051] Working principle: When the present invention is used, the single crystal silicon rod is clamped by a mechanical arm and placed in the center position of four second adjustment mechanisms 4 distributed in a ring shape, and then the first motor 106 is used to drive the first screw 104 to rotate. The rotation of the first screw 104 drives the two movable brackets 108 thereon to move toward each other on the slide bar 103, and then the distance between the annular brackets 201 on the two movable brackets 108 is adjusted, so that the annular brackets 201 are located at appropriate positions at both ends of the single crystal silicon rod;

[0052] Then, the clamping electric cylinder 302 is used to drive the third motor 303 to move, and the movement of the third motor 303 drives the clamp 304 to move, so that the two clamps 304 can clamp the single crystal silicon rod, and the third motor 303 is used to drive the clamp 304 to rotate, thereby driving the single crystal silicon rod to rotate, to assist the processing of the single crystal silicon rod;

[0053] The two annular brackets 201 move to drive the two hinge seats 211 thereon to move toward each other, the hinge seats 211 move to drive the connecting rods 413 connected thereto to move, the connecting rods 413 move to drive the rectangular block 405 connected thereto to move, the rectangular block 405 moves to drive the first connecting arm 409 and the second connecting arm 410 hingedly connected on the fixed column 407 connected thereto to move, and the adjacent first cross arms 411 and the second cross arms 412 are hingedly connected, and the first cross arms 411 and the second cross arms 412 located at the outermost sides are respectively connected to the first connecting arm 409 and the second connecting arm 410 on one side thereof. 10 is hingedly connected, so that the movement of the first connecting arm 409 and the second connecting arm 410 can drive the first cross arm 411 and the second cross arm 412 to deflect and move, and the middle parts of the first cross arm 411 and the second cross arm 412 are rotated and connected to the corresponding fixed column 407, so that a plurality of fixed columns 407 distributed in a straight line can be arranged equidistantly, and the distance between the plurality of fixed columns 407 can be adjusted, and the end block 406 is set on the two insertion rods 404 by rolling with a ball, so that the rectangular block 405 can move smoothly between the two insertion rods 404, and the rectangular block 405 is limited;

[0054] The fixed column 407 moves to drive the socket 408 thereon to move, so that the position of the socket 408 can be adjusted, thereby adjusting the distance between the plurality of chamfering tools 5 distributed in a straight line and the distance between the plurality of polishing tools 6 distributed in a straight line;

[0055] The second motor 107 is used to drive the driving shaft 105 to rotate, the driving shaft 105 rotates to drive the sleeve shaft 202 to rotate, the sleeve shaft 202 rotates to drive the first gear 203 to rotate, the first gear 203 rotates to drive the outer gear ring 204 to rotate, the outer gear ring 204 rotates to drive a plurality of second gears 206 to rotate, the second gear 206 rotates to drive the second screw 205 to rotate, the second screw 205 rotates to drive the two moving blocks 207 thereon to move toward each other, the movement of the two moving blocks 207 respectively drives the first swing arm 209 and the second swing arm 210 hingedly connected thereto to deflect and move, thereby causing the same hinge seat 211 hingedly connected at the other ends of the first swing arm 209 and the second swing arm 210 to move linearly;

[0056] The movement of the articulated seat 211 drives the insertion rod 404 inserted thereon to move, so that the rectangular block 405 on the insertion rod 404 moves. The movement of the rectangular block 405 drives the chamfering grinder 5 or the polishing grinder 6 thereon to move, so that the chamfering grinder 5 or the polishing grinder 6 moves to the outside of the single crystal silicon rod, and cooperates with the rotation of the single crystal silicon rod to realize the processing of the outer circle of the single crystal silicon rod.

[0057] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A single crystal silicon rod outer circle processing device, comprising a distance adjustment mechanism (1), characterized in that: The two movable ends of the distance adjustment mechanism (1) are both fixedly mounted with a first adjustment mechanism (2), and the two first adjustment mechanisms (2) are symmetrically distributed; a silicon rod clamping mechanism (3) for clamping a silicon rod is arranged inside the first adjustment mechanism (2), and the two silicon rod clamping mechanisms (3) are symmetrically distributed; four second adjustment mechanisms (4) distributed in a ring shape are mounted on the distance adjustment mechanism (1), and the four second adjustment mechanisms (4) are located inside the two first adjustment mechanisms (2); two groups of chamfering tools (5) and two groups of polishing tools (6) are respectively mounted on the four second adjustment mechanisms (4), and the chamfering tools (5) and the polishing tools (6) are staggeredly distributed; The distance adjustment mechanism (1) comprises a base (101), support brackets (102) are fixedly installed on both sides of the top of the base (101), two slide bars (103) are fixedly installed between the two support brackets (102), a first screw rod (104) and a drive shaft (105) are rotatably provided on the two support brackets (102), and the thread on the first screw rod (104) is a bidirectional thread, a first motor (106) and a second motor (107) are installed on the outer side of one of the support brackets (102), and the output ends of the first motor (106) and the second motor (107) are respectively connected to one end of the first screw rod (104) and the drive shaft (105), two movable brackets (108) are threadedly provided on the first screw rod (104), and the two movable brackets (108) are slidably arranged on the two slide bars (103); The first adjustment mechanism (2) comprises an annular bracket (201), and the annular bracket (201) is fixedly mounted on the movable bracket (108); a sleeve shaft (202) is rotatably mounted on the lower end of the annular bracket (201), and the sleeve shaft (202) is slidably mounted on the driving shaft (105); a plurality of sliders are fixedly mounted on the inner ring of the sleeve shaft (202); a plurality of sliding grooves are opened on the outer ring of the driving shaft (105), and a plurality of sliders are slidably mounted inside the plurality of sliding grooves respectively; An outer gear ring (204) is rotatably mounted inside the annular bracket (201), a first gear (203) is fixedly mounted on the outer ring of the sleeve shaft (202), and the first gear (203) is meshed with the outer gear ring (204), four second screw rods (205) distributed in an annular pattern are rotatably mounted on the annular bracket (201), and the threads on the second screw rods (205) are bidirectional threads, a second gear (206) is fixedly mounted on one end of the second screw rod (205), and the four second gears (206) are all meshed with the outer gear ring (204); Two moving blocks (207) are threadedly provided on the second screw rod (205); a guide column (208) is fixedly installed on one side of the moving block (207) away from the center of the annular bracket (201); and the guide column (208) is slidably arranged on the annular bracket (201); a first swing arm (209) and a second swing arm (210) are respectively hingedly connected on one side of the two moving blocks (207) on the second screw rod (205) close to the center of the annular bracket (201); and the other ends of the first swing arm (209) and the second swing arm (210) are hingedly connected to the same hinge seat (211); The second adjustment mechanism (4) comprises two sleeves (401), and the two sleeves (401) are respectively fixedly mounted on the two support brackets (102), a moving rod (402) is slidably mounted inside the sleeve (401), a plug-in seat (403) is fixedly mounted on one end of the moving rod (402) close to the center of the support bracket (102), two insertion rods (404) are inserted inside the two plug-in seats (403), and the two insertion rods (404) are fixed inside the plug-in seats (403) by fastening screws, and the two insertion rods (404) are slidably inserted into the two hinge seats (211); A plurality of rectangular blocks (405) are slidably arranged between the two insertion rods (404) and are distributed in a straight line. End blocks (406) are arranged at both ends of the rectangular block (405), and the two end blocks (406) are arranged on the two insertion rods (404) by rolling with balls. The two end blocks (406) are respectively fixedly installed at one end of the rectangular block (405) close to the silicon rod clamping mechanism (3) and rotatably arranged at one end of the rectangular block (405) away from the silicon rod clamping mechanism (3), and the end block (406) located at the end of the rectangular block (405) away from the silicon rod clamping mechanism (3) is connected to the rectangular block (405) by a fastening screw, and a fixing column (407) is fixedly installed on the end of the rectangular block (405) close to the silicon rod clamping mechanism (3), and a socket (408) is fixedly installed on the other end of the fixing column (407); The two fixed columns (407) located at the two ends are rotatably provided with a first connecting arm (409) and a second connecting arm (410), and the several fixed columns (407) located in the middle are rotatably provided with a first cross arm (411) and a second cross arm (412), and the fixed column (407) is located in the middle of the cross-distributed first cross arms (411) and the second cross arms (412), and the adjacent first cross arms (411) and the second cross arms (412) are hingedly connected, and the first cross arms (411) and the second cross arms (412) located at the outermost sides are respectively hingedly connected to the first connecting arm (409) and the second connecting arm (410) on one side thereof, and the two rectangular blocks (405) located at the two ends are fixedly installed with a connecting rod (413), and the connecting rod (413) is slidably set between the two insertion rods (404), and the other ends of the two connecting rods (413) are respectively fixedly connected to the two hinge seats (211).

2. The single crystal silicon rod outer circle processing equipment according to claim 1, characterized in that: The silicon rod clamping mechanism (3) comprises a fixed support (301), and the fixed support (301) is fixedly mounted on the inner ring of the annular support (201), a clamping electric cylinder (302) is fixedly mounted at the center of the fixed support (301), a third motor (303) is mounted at the output end of the clamping electric cylinder (302), and a clamp (304) for clamping the silicon rod is mounted at the output end of the third motor (303).

3. The single crystal silicon rod outer circle processing equipment according to claim 1, characterized in that: A plurality of the chamfering tools (5) and the polishing tools (6) can be sleeved on the socket (408), and the chamfering tools (5) and the polishing tools (6) can be fixedly mounted on the socket (408) by means of a fastening screw.

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