A sewage treatment equipment based on semiconductor wafer grinding and cutting

Abstract

The invention relates to the technical field of semiconductor processing, and proposes a sewage treatment equipment based on semiconductor wafer grinding and cutting, comprising: a sewage treatment cylinder, a filter arc plate, a stirring cylinder, a stirring component, a driving component and a feeding component, wherein a water inlet pipe is connected to the top of the sewage treatment cylinder, a plurality of filter arc plates are rotatably installed inside the sewage treatment cylinder, a stirring cylinder is rotatably installed inside the sewage treatment cylinder, one end of the stirring cylinder penetrates the top of the sewage treatment cylinder and extends to the outside, the stirring cylinder is driven to rotate inside the sewage treatment cylinder by a rotating component, a plurality of stirring components are arranged between the plurality of filter arc plates for stirring and mixing sewage and a chemical treatment agent, a driving component is arranged inside the stirring cylinder, and the driving component is used to drive the stirring component to rotate between the plurality of filter arc plates, and the above technical scheme solves the problem that the sewage treatment cycle in the prior art is long, thereby leading to low sewage treatment efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, and in particular to sewage treatment equipment based on semiconductor wafer grinding and cutting. Background Art

[0002] Wafers are the basic materials for manufacturing semiconductor devices. Extremely high-purity semiconductors go through processes such as crystal pulling, slicing and grinding and are widely used in various electronic devices. During the grinding and cutting process of semiconductor wafers, the debris produced by grinding is cleaned with water.

[0003] During the process of water combined with semiconductor wafer grinding and cutting, the water will become sewage containing chemicals, debris and other impurities. In order to treat the sewage and recycle it, the sewage will be treated by sewage treatment equipment. When treating the sewage, it is generally filtered through a filtering device to filter out the debris and impurities in the sewage, and then the filtered sewage is discharged into a chemical treatment tank. Chemical treatment agents are poured into the chemical treatment tank, and then the chemical treatment agents and sewage are fully stirred for mixing treatment.

[0004] When treating sewage, it is usually discharged from the filter device into a sewage pool, which takes a certain amount of time. After the sewage in the sewage pool reaches a certain capacity, chemical treatment agents are poured in. This process takes a long time for the sewage treatment cycle and has a low sewage treatment efficiency. Summary of the invention

[0005] The present invention provides a sewage treatment device based on semiconductor wafer grinding and cutting, which solves the problem in the prior art that the sewage treatment cycle is long and thus leads to low sewage treatment efficiency.

[0006] The technical solution of the present invention is as follows: A sewage treatment device based on semiconductor wafer grinding and cutting, comprising:

[0007] The sewage treatment cylinder is provided with a water inlet pipe at the top thereof:

[0008] Filter arc plates, a plurality of filter arc plates are rotatably installed inside the sewage treatment cylinder;

[0009] A mixing cylinder, the mixing cylinder is rotatably mounted inside the sewage treatment cylinder, one end of the mixing cylinder passes through the top of the sewage treatment cylinder and extends to the outside, and the mixing cylinder is driven to rotate inside the sewage treatment cylinder by a rotating component;

[0010] A stirring assembly, wherein a plurality of the stirring assemblies are arranged between the plurality of the filter arc plates, and are used to stir and mix the sewage and the chemical treatment agent;

[0011] A driving assembly, wherein the driving assembly is arranged inside the mixing drum, and the driving assembly is used to drive the mixing assembly to rotate between the plurality of filtering arc plates;

[0012] A feed assembly is arranged on the stirring cylinder, an output end of the feed assembly is connected to a plurality of the stirring assemblies, and the feed assembly is used to inject a chemical treatment agent into the stirring assembly.

[0013] Furthermore, the plurality of filter arc plates are arranged in a cylindrical shape inside the sewage treatment cylinder, and a movable opening is left between every two of the filter arc plates, and the plurality of filter arc plates divide the sewage treatment cylinder into a filter chamber and a stirring chamber, wherein the stirring chamber is between the outer diameter of the filter arc plate and the inner wall of the sewage treatment cylinder.

[0014] Furthermore, the stirring assembly includes:

[0015] A stirring blade, the stirring blade is rotatably mounted between the movable openings through a connecting member;

[0016] A stirring blade, wherein the stirring blade is fixedly mounted on the stirring blade, and the stirring blade is in an inclined state on the stirring blade;

[0017] Wherein, the stirring blade is rotated between the movable openings through a pushing component.

[0018] Furthermore, the stirring blade is provided with a connecting cavity, and two connecting holes are provided on the lower side of the stirring blade, the stirring branch blade is provided with a mixing cavity, and a plurality of mixing holes are provided on the stirring branch blade, and a mixing cover is provided at both ends of the plurality of mixing holes.

[0019] As a further solution of the present invention, the connecting component includes:

[0020] A connecting rod, wherein the connecting rod is fixedly mounted on the mixing drum, one end of the connecting rod extends between the movable openings, and one end of the connecting rod is provided with a connecting opening;

[0021] A torsion spring, wherein the two connecting holes are fixedly installed with the torsion spring, and the other ends of the two torsion springs are connected to the inner wall of the connecting opening;

[0022] Sealing gasket, two of the sealing gaskets are fixedly installed on one end of the connecting rod, and the two sealing gaskets are located between the stirring blade and the filter arc plate.

[0023] On the basis of the above solution, preferably, the driving assembly includes:

[0024] A fixed chute, wherein the fixed chute is fixedly mounted on the stirring blade;

[0025] A pushing block, the pushing block is slidably mounted on the fixed sliding groove;

[0026] A push rod, wherein the push rod is slidably mounted on the mixing drum, and one end of the push rod is rotationally matched with the push block, and a reset plate is fixedly mounted on the push rod;

[0027] Springs, the reset plate and the interior of the mixing cylinder are connected by a plurality of the springs.

[0028] Furthermore, the driving assembly includes:

[0029] A cylinder, a fixed plate is rotatably mounted inside the mixing cylinder, and the cylinder is mounted on the fixed plate;

[0030] A driving rod, wherein the output end of the cylinder passes through the fixing plate and is connected to the driving rod.

[0031] Furthermore, the rotating component includes:

[0032] A fixed bracket, wherein the fixed bracket is fixedly mounted on the sewage treatment cylinder;

[0033] Motor 1, the motor 1 is installed on the fixed bracket, and the output end of the motor 1 passes through the fixed bracket and is connected to the mixing drum.

[0034] Furthermore, the feed assembly comprises:

[0035] A feed pipe, the feed pipe is connected to the stirring blade and extends to the outside through the stirring cylinder;

[0036] A feed ring is provided at the top of the feed pipe, and an injection pipe is provided on the feed ring.

[0037] Preferably, a driving opening is provided on the driving rod, the driving opening is in an inclined state, and the driving opening is in contact with and cooperates with the pushing rod.

[0038] The working principle and beneficial effects of the present invention are:

[0039] 1. In the present invention, the driving assembly and the connecting component are installed to drive the stirring blades to rotate between the multiple filter arc plates, so that the multiple filter arc plates and the sewage treatment cylinder are divided into a filter chamber and a stirring chamber, so that the sewage can be filtered and the wastewater treatment agent is stirred and mixed in one sewage treatment cylinder in turn, and the cylinder drives the driving rod to move downward in the stirring cylinder. When the driving rod moves downward, because the driving opening is in an inclined state, the driving rod moves downward, and the push rod drives the push block to slide on the fixed slide groove. At this time, the spring will be compressed, which is convenient for the subsequent spring to push the reset plate and the push rod to reset, and the push block pushes the fixed slide groove and the stirring blade to rotate on the connecting rod, so that the stirring blade is perpendicular to the movable opening. When the stirring blade rotates, the torsion spring will generate torsion, which is convenient for the subsequent torsion spring to drive the stirring blade to reset. The stirring cylinder, the stirring blade and the stirring support blade are driven to rotate by the motor, so that the sewage and the chemical treatment agent are stirred and mixed, thereby improving the mixing efficiency and shortening the sewage treatment cycle.

[0040] 2. In the present invention, by installing the feed assembly, the chemical treatment agent is injected into the feed ring through the injection pipe, the chemical treatment agent is discharged into the mixing chamber through the feed pipe and the connecting chamber, the chemical treatment agent is discharged into the sewage through the mixing hole, and the sewage passes through the mixing hole and is fully mixed with the sewage treatment agent, thereby improving the mixing efficiency;

[0041] 3. In the present invention, by installing filter arc plates, stirring blades, connecting components, drive components and feed components to cooperate with each other, the problem of long sewage treatment cycle in the prior art, which leads to low sewage treatment efficiency, is solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0043] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0044] Figure 2 It is a schematic diagram of the structure of a partial cross-section of the present invention;

[0045] Figure 3 It is a schematic diagram of the structure of the coordination of multiple filter arc plates of the present invention;

[0046] Figure 4 It is a schematic diagram of the structure of the filter arc plate and the sewage treatment cylinder of the present invention;

[0047] Figure 5 This is a schematic diagram of the structure of the mixing cylinder, mixing blades and filter arc plate of the present invention;

[0048] Figure 6 It is a schematic diagram of the structure of the exploded connecting member and the stirring blade of the present invention;

[0049] Figure 7 This is a schematic diagram of the structure of the driving assembly and the stirring blade of the present invention;

[0050] Figure 8 It is a schematic diagram of the structure of the feed assembly and the stirring blade of the present invention;

[0051] Fig. 9 It is a schematic diagram of the structure of the filter arc plate and the dust collection assembly of the present invention;

[0052] Fig.10 For the present invention Figure 6 A schematic diagram of the structure with a partial enlargement at the center;

[0053] Fig.11 For the present invention Figure 7 A schematic diagram of the structure with a partial enlargement at B in the middle;

[0054] Fig.12 For the present invention Fig. 9 Schematic diagram of the partially enlarged structure at point C in the middle.

[0055] In the figure: 1. Sewage treatment cylinder; 2. Filter arc plate; 3. Mixing cylinder; 4. Filter chamber; 5. Mixing chamber; 6. Mixing blade; 7. Mixing blade; 8. Mixing cover; 9. Connecting rod; 10. Torsion spring; 11. Sealing gasket; 12. Fixed slide; 13. Push block; 14. Push rod; 15. Spring; 16. Cylinder; 17. Drive rod; 18. Fixed bracket; 19. Motor 1; 20. Feed pipe; 21. Feed ring; 22. Dust cover; 23. Sewage hose; 24. Motor 2; 25. Threaded rod. DETAILED DESCRIPTION

[0056] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] like Figures 1 to 12As shown, this embodiment proposes a sewage treatment equipment based on semiconductor wafer grinding and cutting, including: a sewage treatment cylinder 1, a filter arc plate 2, a stirring cylinder 3, a stirring component, a driving component and a feeding component. The top of the sewage treatment cylinder 1 is connected with a water inlet pipe, a plurality of filter arc plates 2 are rotatably installed inside the sewage treatment cylinder 1, and the stirring cylinder 3 is rotatably installed inside the sewage treatment cylinder 1. One end of the stirring cylinder 3 passes through the top of the sewage treatment cylinder 1 and extends to the outside. The stirring cylinder 3 is driven to rotate inside the sewage treatment cylinder 1 by a rotating component. A plurality of stirring components are arranged between the plurality of filter arc plates 2 for stirring and mixing sewage and chemical treatment agents. The driving component is arranged inside the stirring cylinder 3, and the driving component is used to drive the stirring component to rotate between the plurality of the filter arc plates 2.

[0058] Specifically, the feed assembly is arranged on the stirring cylinder 3, the output end of the feed assembly is connected to a plurality of stirring assemblies, and the feed assembly is used to inject a chemical treatment agent into the interior of the stirring assembly.

[0059] Correspondingly, multiple filter arc plates 2 are surrounded by a cylindrical shape inside the sewage treatment cylinder 1, and a movable opening is left between every two filter arc plates 2, and multiple filter arc plates 2 divide the sewage treatment cylinder 1 into a filter chamber 4 and a stirring chamber 5, wherein the stirring chamber 5 is between the outer diameter of the filter arc plate 2 and the inner wall of the sewage treatment cylinder 1.

[0060] Specifically, the stirring assembly includes: a stirring blade 6 and a stirring branch blade 7, the stirring blade 6 is rotatably installed between the movable openings through a connecting component, the stirring branch blade 7 is fixedly installed on the stirring blade 6, and the stirring branch blade 7 is in an inclined state on the stirring blade 6, wherein the stirring blade 6 is rotated between the movable openings through a pushing component.

[0061] Correspondingly, the stirring blade 6 is provided with a connecting cavity, and two connecting holes are provided on the lower side of the stirring blade 6. The stirring branch blade 7 is provided with a mixing cavity, and a plurality of mixing holes are provided on the stirring branch blade 7. A mixing cover 8 is provided at both ends of the plurality of mixing holes.

[0062] Specifically, the connecting components include: a connecting rod 9, a torsion spring 10 and a sealing gasket 11. The connecting rod 9 is fixedly installed on the mixing drum 3. One end of the connecting rod 9 extends between the movable openings, and a connecting opening is opened at one end of the connecting rod 9. Torsion springs 10 are fixedly installed in two connecting holes. The other ends of the two torsion springs 10 are connected to the inner wall of the connecting opening. Two sealing gaskets 11 are fixedly installed at one end of the connecting rod 9. The two sealing gaskets 11 are located between the mixing blade 6 and the filter arc plate 2.

[0063] Correspondingly, the driving assembly includes: a fixed slide groove 12, a pushing block 13, a pushing rod 14 and a spring 15. The fixed slide groove 12 is fixedly installed on the stirring blade 6, the pushing block 13 is slidably installed on the fixed slide groove 12, the pushing rod 14 is slidably installed on the stirring drum 3, and one end of the pushing rod 14 is rotatably matched with the pushing block 13. A reset plate is fixedly installed on the pushing rod 14, and the reset plate and the inside of the stirring drum 3 are connected by multiple springs 15.

[0064] Specifically, the driving assembly includes: a cylinder 16 and a driving rod 17. A fixed plate is rotatably installed inside the mixing barrel 3, and the cylinder 16 is installed on the fixed plate. The output end of the cylinder 16 passes through the fixed plate and is connected to the driving rod 17, wherein a driving opening is opened on the driving rod 17, and the driving opening is in an inclined state, and the driving opening is in contact with the push rod 14.

[0065] Correspondingly, the rotating component includes: a fixed bracket 18 and a motor 19, the fixed bracket 18 is fixedly mounted on the sewage treatment cylinder 1, the motor 19 is mounted on the fixed bracket 18, and the output end of the motor 19 passes through the fixed bracket 18 and is connected to the mixing cylinder 3.

[0066] Specifically, the feed assembly includes: a feed pipe 20 and a feed ring 21. The feed pipe 20 is connected and arranged on the stirring blade 6. The feed pipe 20 passes through the stirring cylinder 3 and extends to the outside. The top of the feed pipe 20 is connected and arranged with a feed ring 21. The feed ring 21 is connected and arranged with an injection pipe.

[0067] In this embodiment, the working principle of the sewage treatment equipment based on semiconductor wafer grinding and cutting is as follows: when filtering sewage, the sewage is discharged into the filter chamber 4 through the water inlet pipe, and the motor 19 is started at the same time, and the motor 19 drives the stirring cylinder 3 to rotate. When the stirring cylinder 3 rotates, the push rod 14 and the connecting rod 9 drive the filter arc plate 2 to rotate, and the filter gasket is used to prevent the debris and other impurities in the sewage from flowing out of the filter chamber 4. Through the rotation of multiple filter arc plates 2, the debris and other impurities in the filter chamber 4 will be affected by the centrifugal force and stick to the filter arc plate 2;

[0068] After the sewage is filtered, the cylinder 16 is started, and the cylinder 16 drives the driving rod 17 to move downward in the mixing cylinder 3. When the driving rod 17 moves downward, because the driving opening is in an inclined state, the driving rod 17 moves downward, and the push rod 14 is pushed to drive the push block 13 to slide on the fixed slide groove 12. At this time, the spring 15 will be compressed, which is convenient for the subsequent spring 15 to push the reset plate and the push rod 14 to reset. At the same time, the push block 13 pushes the fixed slide groove 12 and the stirring blade 6 to rotate on the connecting rod 9, so that the stirring blade 6 is perpendicular to the movable opening. When the stirring blade 6 rotates, the torsion spring 10 will generate torsion, which is convenient for the subsequent torsion spring 10 to drive the stirring blade 6 to reset. Then, the chemical treatment agent is injected into the feed ring 21 through the injection pipe, and the chemical treatment agent is discharged into the mixing chamber through the feed pipe 20 and the connecting chamber. The chemical treatment agent is discharged into the sewage through the mixing hole, and then the motor 19 is started, and the mixing cylinder 3, the stirring blade 6 and the stirring branch blade 7 are driven to rotate by the motor 19 to stir and mix the sewage and the chemical treatment agent.

[0069] Embodiment 2: In order to better stir the sewage and the sewage treatment agent, a plurality of dust suction components are further provided in the sewage treatment cylinder 1, and the plurality of dust suction components correspond to the plurality of filter arc plates 2 one by one, wherein the dust suction components include:

[0070] A dust hood 22 is disposed in the filter chamber 4, and the input end of the dust hood 22 is in contact with the inner diameter of the filter arc plate 2. A sewage hose 23 is connected to the dust hood 22, and one end of the sewage hose 23 passes through the bottom of the sewage treatment cylinder 1 and extends to the outside.

[0071] Motor 2 24, motor 2 24 is installed at the bottom of the sewage treatment cylinder 1;

[0072] The output end of the motor 24 passes through the bottom of the sewage treatment cylinder 1 and is connected with the threaded rod 25 , and the dust cover 22 is installed on the threaded rod 25 .

[0073] After the sewage is filtered, the sewage hose 23 is connected to the exhaust fan, and the motor 24 is started at the same time. The motor 24 drives the threaded rod 25 to rotate, and the dust hood 22 rises and falls in the sewage treatment cylinder 1 as the threaded rod 25 rotates. While the dust hood 22 rises and falls, the exhaust fan generates suction to absorb debris and other impurities on the filter arc plate 2.

[0074] It should be added that, in order to prevent the threaded rod 25 from being damaged in the sewage treatment cylinder 1, waterproof cloth can be installed on the upper and lower sides of the dust hood 22 to protect the threaded rod 25.

[0075] In this embodiment, in order to allow the cylinder 16 to be used normally inside the mixing drum 3, a heat dissipation opening should be opened on the mixing drum 3, and the output end of the sewage hose 23 is connected to an output pipe, and a one-way valve is installed on the output end. Correspondingly, a one-way valve is installed on the pipe used for discharge in the present invention.

[0076] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A sewage treatment device based on semiconductor wafer grinding and cutting, characterized in that: include: A sewage treatment cylinder (1), wherein the top of the sewage treatment cylinder (1) is connected to a water inlet pipe: Filter arc plates (2), a plurality of the filter arc plates (2) being rotatably mounted inside the sewage treatment cylinder (1); A mixing cylinder (3), the mixing cylinder (3) being rotatably mounted inside the sewage treatment cylinder (1), one end of the mixing cylinder (3) passing through the top of the sewage treatment cylinder (1) and extending to the outside, the mixing cylinder (3) being driven to rotate inside the sewage treatment cylinder (1) by a rotating component; A stirring assembly, wherein a plurality of the stirring assemblies are arranged between the plurality of filter arc plates (2) and are used to stir and mix the sewage and the chemical treatment agent; A driving assembly, the driving assembly being arranged inside the stirring drum (3), the driving assembly being used to drive the stirring assembly to rotate between the plurality of filtering arc plates (2); A feed assembly, the feed assembly being arranged on the stirring cylinder (3), the output end of the feed assembly being in communication with a plurality of the stirring assemblies, the feed assembly being used to inject a chemical treatment agent into the interior of the stirring assembly; The plurality of filter arc plates (2) are arranged inside the sewage treatment cylinder (1) to form a cylindrical shape, and a movable opening is left between every two of the filter arc plates (2), and the plurality of filter arc plates (2) divide the sewage treatment cylinder (1) into a filter chamber (4) and a stirring chamber (5), wherein the stirring chamber (5) is formed between the outer diameter of the filter arc plates (2) and the inner wall of the sewage treatment cylinder (1); The stirring assembly comprises: A stirring blade (6), the stirring blade (6) being rotatably mounted between the movable openings via a connecting component; A stirring blade (7), wherein the stirring blade (7) is fixedly mounted on the stirring blade (6), and the stirring blade (7) is in an inclined state on the stirring blade (6); Wherein, the stirring blade (6) is rotated between the movable openings by a pushing component; The stirring blade (6) is provided with a connecting cavity, and two connecting holes are provided on the lower side of the stirring blade (6); the stirring branch blade (7) is provided with a mixing cavity, and a plurality of mixing holes are provided on the stirring branch blade (7); and a mixing cover (8) is provided at both ends of the plurality of mixing holes. The connecting component comprises: A connecting rod (9), the connecting rod (9) being fixedly mounted on the mixing drum (3), one end of the connecting rod (9) extending between the movable openings, and one end of the connecting rod (9) being provided with a connecting opening; A torsion spring (10), wherein the torsion spring (10) is fixedly installed in the two connecting holes, and the other ends of the two torsion springs (10) are connected to the inner wall of the connecting opening; Sealing gaskets (11), two of the sealing gaskets (11) being fixedly mounted on one end of the connecting rod (9), and the two sealing gaskets (11) being located between the stirring blade (6) and the filter arc plate (2); The drive assembly comprises: A fixed slide groove (12), wherein the fixed slide groove (12) is fixedly mounted on the stirring blade (6); A pushing block (13), the pushing block (13) being slidably mounted on the fixed slide groove (12); A push rod (14), the push rod (14) being slidably mounted on the mixing drum (3), and one end of the push rod (14) being rotationally engaged with the push block (13), and a reset plate being fixedly mounted on the push rod (14); Springs (15), the reset plate and the interior of the mixing drum (3) are connected via a plurality of springs (15); The drive assembly comprises: A cylinder (16), wherein a fixed plate is rotatably mounted inside the mixing cylinder (3), and the cylinder (16) is mounted on the fixed plate; A driving rod (17), wherein the output end of the cylinder (16) passes through the fixing plate and is connected to the driving rod (17).

2. The sewage treatment equipment based on semiconductor wafer grinding and cutting according to claim 1 is characterized in that: The rotating component comprises: A fixed bracket (18), the fixed bracket (18) being fixedly mounted on the sewage treatment cylinder (1); A motor (19) is mounted on the fixed bracket (18), and an output end of the motor (19) passes through the fixed bracket (18) and is connected to the mixing drum (3).

3. The sewage treatment equipment based on semiconductor wafer grinding and cutting according to claim 2 is characterized in that: The feed assembly comprises: a feed pipe (20), the feed pipe (20) being arranged in communication with the stirring blade (6), the feed pipe (20) penetrating the stirring cylinder (3) and extending to the outside; A feed ring (21) is provided at the top of the feed pipe (20) in communication with the feed ring (21), and an injection pipe is provided on the feed ring (21).

4. The sewage treatment equipment based on semiconductor wafer grinding and cutting according to claim 3 is characterized in that: The driving rod (17) is provided with a driving opening, the driving opening is in an inclined state, and the driving opening is in contact with and cooperates with the pushing rod (14).

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