A pure water supply and replenishment system and method based on online water quality monitoring

Abstract

The invention relates to the technical field of water replenishment and cleaning, and discloses a pure water supply and replenishment system and method based on online water quality monitoring. Before the system replenishes water, the system performs self-inspection on equipment, and then the system monitors the online water quality and transmits the data to the system PLC controller. The system compares the set parameter upper limit with the real-time water quality data. If the online water quality parameter is greater than the set parameter upper limit, it means that the on-site water quality does not meet the standard. At this time, the system starts the water replenishment function and monitors the line body water quality parameter in real time. When the line body water quality parameter is lower than the set lower limit of the water quality parameter, it means that the water quality meets the standard and the system stops replenishing water. During the water replenishment process, the system accumulates the water replenishment time. When the water replenishment time is equal to the set water replenishment time, the water replenishment is stopped to allow the line body circulation pump to fully mix the newly added cleaning water. After the water replenishment interval time is up, if the line body water quality parameter does not reach the parameter setting lower limit, the system continues to run, and the cycle is executed in this way until the line body water quality parameter meets the standard.

Description

Technical Field

[0001] The present invention relates to the technical field of water replenishment and cleaning, and in particular to a pure water supply and replenishment system and method based on online water quality monitoring. Background Art

[0002] With the rapid development of the electronics, semiconductor and precision machinery industries, especially in high-end manufacturing fields such as chips, integrated circuits, semiconductor devices, optoelectronic devices, etc., the requirements for water quality in the production process have reached an unprecedented level. The manufacturing process of these precision products involves a large number of cleaning steps to ensure the cleanliness and purity of the product surface, so as to avoid any tiny impurities from causing irreversible effects on product quality.

[0003] At present, these industries generally use pure water or ultrapure water for water replenishment and cleaning, and the ultrapure water has strict requirements for resistivity to reach more than 18 megohms to ensure that the water conductivity is extremely low and almost non-conductive. At the same time, the water is required to contain almost no metal ions and organic substances to avoid scratches or contamination on the surface of complex chips. However, this high standard of water quality has led to a huge consumption of water resources in the production process, increasing production costs and environmental burdens.

[0004] Traditional water-saving measures often rely on manual monitoring and manual adjustment, which are not only inefficient but also difficult to achieve precise control, resulting in excessive or insufficient water replenishment. Therefore, the present application proposes a pure water supply replenishment system and method based on online water quality monitoring. Summary of the invention

[0005] The purpose of the present invention is to provide a pure water supply and replenishment system and method based on online water quality monitoring to solve the above technical problems.

[0006] A pure water supply and replenishment system based on online water quality monitoring, the system comprising an execution unit and a control unit;

[0007] The execution unit comprises at least one cleaning tank 1, a water inlet is provided on one side of the top of the cleaning tank 1, and a water inlet electric valve, a water inlet conductivity sensor and a water inlet flow meter are provided at the water inlet;

[0008] When the execution unit further includes a second cleaning tank and a third cleaning tank, for the second cleaning tank and the third cleaning tank, a connecting tank overflow port is provided between the first cleaning tank and the second cleaning tank, and between the second cleaning tank and the third cleaning tank. The first cleaning tank is connected to the second cleaning tank through the connecting tank overflow port, and the second cleaning tank is connected to the third cleaning tank through the connecting tank overflow port.

[0009] A water overflow port and a water quality monitoring sensor are provided on one side of the top of the cleaning tank three;

[0010] The control unit includes a real-time data monitoring unit, an automatic control unit and a fault diagnosis unit;

[0011] The real-time monitoring unit is used to collect water quality parameters in real time through the built-in water quality monitoring sensor, analyze the collected data in real time, and transmit the monitoring data to the PLC controller in real time;

[0012] The automatic control unit is used to set the upper and lower limits of water quality parameters, the water replenishment time and time interval through the host computer, compare the real-time monitored water quality parameter data with the set upper and lower limits of water quality parameters, and realize pure water supply replenishment;

[0013] The fault diagnosis unit is used to perform a self-check on the execution unit equipment before the system is replenished with water.

[0014] As a further description of the solution of the present invention, the working process of the real-time monitoring unit includes:

[0015] Real-time monitoring of water conductivity through water quality monitoring sensors , total organic carbon content C, dissolved oxygen content O;

[0016] The conductivity of water , total organic carbon content C, dissolved oxygen content O are given weights, weighted fusion function is defined, mathematical model is constructed, and water quality coefficient is output. The expression is:

[0017] ;

[0018] In the formula, is the water quality coefficient, To monitor the conductivity of water quality , weight coefficients of total organic carbon content C and dissolved oxygen content O;

[0019] Monitor the conductivity of water during the set time period during the cleaning process , total organic carbon content C, dissolved oxygen content O as a function of time;

[0020] According to the conductivity of water in the set time period , total organic carbon content C, dissolved oxygen content O over time function respectively fit the conductivity of water quality in the set time period , total organic carbon content C, dissolved oxygen content O change curves over time;

[0021] Based on the obtained function curve, a mathematical model is constructed to output the potential water quality coefficient, which is expressed as:

[0022] ;

[0023] In the formula, is the potential water quality coefficient, The conductivity of water in the set time period The area enclosed by the time-varying curve and the corresponding preset threshold curve, It is the area enclosed by the curve of total organic carbon content C changing with time within the set time period and the corresponding preset threshold curve. It is the area enclosed by the curve of dissolved oxygen content O varying with time within the set time period and the corresponding preset threshold curve. , and They are The proportionality coefficient, is the influence function of water level on potential water quality coefficient, is the weight coefficient.

[0024] As a further description of the solution of the present invention, the working process of the automatic control unit includes:

[0025] Real-time monitoring of water conductivity , total organic carbon content C, dissolved oxygen content O are mapped to the conductivity range of the water quality set by the system , Total organic carbon content range and dissolved oxygen content range ;

[0026] If the water conductivity If any one of the total organic carbon content C and dissolved oxygen content O exceeds the upper limit of the corresponding set range, the water inlet electric valve will be immediately opened to replenish water to the cleaning tank, and clean water will enter from one end, while the other end will be monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0027] Set the water replenishment time T1 and the water replenishment interval T2 to monitor the conductivity of the water quality in real time , total organic carbon content C, dissolved oxygen content O, when the water conductivity , total organic carbon content C, dissolved oxygen content O are all lower than the corresponding set range lower limit, indicating that the water quality meets the standard, the system stops replenishing water, closes the water inlet electric valve, and monitors whether the electric valve is closed;

[0028] As a further description of the scheme of the present invention, during the water replenishment process, the system accumulates the water replenishment time T3, stops replenishing water when the water replenishment time T3 is equal to the set water replenishment time T1, and accumulates the stop water replenishment time T4 to fully mix the newly added cleaning water. After the water replenishment interval time T4 is equal to the set water replenishment interval time T2, if the conductivity of the water quality , total organic carbon content C, dissolved oxygen content O are not lower than the corresponding set interval lower limit, the system continues to operate, and the cycle is executed until the conductivity in the water quality , total organic carbon content C and dissolved oxygen content O meet the standards.

[0029] As a further description of the solution of the present invention, the working process of the automatic control unit also includes:

[0030] The water quality factor Mapped to the set water quality coefficient range ;

[0031] If the water quality coefficient Greater than the upper limit of the water quality coefficient range When the water quality is not up to standard, the water inlet electric valve is immediately opened to replenish the cleaning tank with water. Clean water enters from one end and the other end is monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system.

[0032] Set the water replenishment time T5 and the water replenishment interval time T6 to obtain the water quality coefficient in real time , when the water quality coefficient Below the lower limit of water quality coefficient range When the water quality reaches the standard, the system stops replenishing water, closes the water inlet electric valve, and monitors whether the electric valve is closed.

[0033] As a further description of the scheme of the present invention, during the water replenishment process, the system accumulates the water replenishment time T7, stops replenishing water when the water replenishment time T7 is equal to the set water replenishment time T5, and accumulates the stop water replenishment time T8 to fully mix the newly added cleaning water. After the water replenishment interval time T8 is equal to the set water replenishment interval time T6, if the water quality coefficient Not lower than the lower limit of the water quality coefficient range , the system continues to run, and the cycle continues until the water quality coefficient Below the lower limit of water quality coefficient range .

[0034] As a further description of the solution of the present invention, the working process of the automatic control unit also includes:

[0035] Potential water quality factor Mapped to the set potential water quality coefficient range ;

[0036] If the potential water quality factor Greater than the upper limit of the potential water quality coefficient range If the water quality is not up to standard, the electric water inlet valve should be opened immediately to replenish the cleaning tank with clean water from one end and monitor the other end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system.

[0037] Set the water replenishment time T9 and the water replenishment interval T10, and the real-time potential water quality coefficient , when the potential water quality coefficient Below the lower limit of the potential water quality coefficient range When the water quality is below the standard, it indicates that there is no potential for the water quality to be substandard. The system stops replenishing water, closes the water inlet electric valve, and monitors whether the electric valve is closed properly.

[0038] As a further description of the scheme of the present invention, during the water replenishment process, the system accumulates the water replenishment time T11, stops replenishing water when the water replenishment time T11 is equal to the set water replenishment time T9, and accumulates the stop water replenishment time T12 to fully mix the newly added cleaning water. After the water replenishment interval time T12 is equal to the set water replenishment interval time T10, if the potential water quality coefficient Not lower than the lower limit of the potential water quality coefficient range , the system continues to operate, and the cycle continues until the potential water quality coefficient Below the lower limit of the potential water quality coefficient range .

[0039] A pure water supply replenishment method based on online water quality monitoring, the method comprising the following steps:

[0040] Step S1: Before the system is replenished with water, the system performs a self-check on the equipment to check whether the source electric valve is normal and whether the water quality detection equipment is normal;

[0041] Step S2, the system monitors the online water quality, obtains the water quality coefficient and potential water quality coefficient according to the monitoring results, and transmits the data to the system PLC controller;

[0042] Step S3: The customer sets the upper and lower limits of relevant water quality parameters, water replenishment time and water replenishment interval on the system host computer;

[0043] Step S4, the system compares the set parameter upper limit with the real-time water quality data. If the online water quality parameter is greater than the set parameter upper limit, it means that the on-site water quality does not meet the standard. At this time, the system starts the water replenishment function and opens the water inlet electric valve to replenish water to the line body water tank. The system can be set up with multi-stage connected tanks, with clean water entering from the rear end and monitoring at the front end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0044] Step S5: monitor the water quality parameters of the line in real time. When the water quality parameters of the line are lower than the lower limit of the water quality parameters, it means that the water quality meets the standard and the system stops replenishing water;

[0045] Step S6, during the water replenishment process, the system accumulates the water replenishment time. When the water replenishment time is equal to the set water replenishment time, the water replenishment is stopped to allow the line circulation pump to fully mix the newly added cleaning water. After the water replenishment interval time is up, if the line water quality parameters do not reach the parameter setting lower limit, the system continues to run, and the cycle is executed until the line water quality parameters meet the standards.

[0046] Beneficial effects of the present invention:

[0047] The core of this system lies in its precise and efficient online water quality monitoring capability. By deploying a highly sensitive sensor network, it can achieve all-weather, high-precision monitoring of water quality, ensuring that every drop of water meets the strict water quality standards in the high-end manufacturing field. Combined with the powerful logic control function of the PLC controller, the system can automatically adjust the water replenishment strategy based on real-time water quality data and production needs, realize on-demand water supply and precise water replenishment, thereby greatly improving the efficiency of water resource utilization and reducing unnecessary waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The present invention will be further described below in conjunction with the accompanying drawings.

[0049] Figure 1 It is a schematic diagram of the structure of the execution unit of the pure water supply and replenishment system based on online water quality monitoring provided by the present invention.

[0050] Figure numerals: 1. Water inlet electric valve; 2. Water inlet conductivity sensor; 3. Water inlet flow meter; 4. Water inlet; 5. Cleaning tank one; 6. Cleaning tank two; 7. Cleaning tank three; 8. Water outlet overflow; 9. Water quality monitoring sensor; 10. Connecting tank overflow. DETAILED DESCRIPTION

[0051] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] See also Figure 1 As shown, the present invention is a pure water supply and replenishment system based on online water quality monitoring, and the system includes an execution unit and a control unit;

[0053] The execution unit comprises at least one cleaning tank 5, a water inlet 4 is provided on one side of the top of the cleaning tank 5, and a water inlet electric valve 1, a water inlet conductivity sensor 2 and a water inlet flow meter 3 are provided at the water inlet 4;

[0054] When the execution unit further includes a second cleaning tank 6 and a third cleaning tank 7, for the second cleaning tank 6 and the third cleaning tank 7, a connecting tank overflow port 10 is provided between the first cleaning tank 5 and the second cleaning tank 6, and between the second cleaning tank 6 and the third cleaning tank 7, the first cleaning tank 5 is connected with the second cleaning tank 6 through the connecting tank overflow port 10, and the second cleaning tank 6 is connected with the third cleaning tank 7 through the connecting tank overflow port 10;

[0055] A water overflow port 8 and a water quality monitoring sensor 9 are provided on one side of the top of the cleaning tank 3 7;

[0056] The control unit includes a real-time data monitoring unit, an automatic control unit and a fault diagnosis unit;

[0057] The real-time monitoring unit is used to collect water quality parameters in real time through the built-in water quality monitoring sensor 9, analyze the collected data in real time, and transmit the monitoring data to the PLC controller in real time;

[0058] The automatic control unit is used to set the upper and lower limits of water quality parameters, the water replenishment time and time interval through the host computer, compare the real-time monitored water quality parameter data with the set upper and lower limits of water quality parameters, and realize pure water supply replenishment;

[0059] The fault diagnosis unit is used to perform a self-check on the execution unit equipment before the system is replenished with water.

[0060] Through the above calculation scheme, before the system replenishes water, the system self-checks the equipment to see if the source electric valve is normal, whether the water quality detection equipment is normal, etc. Then the system monitors the online water quality and transmits the data to the system PLC controller. The customer sets the upper and lower limits of the relevant water quality parameters, the replenishment time and the replenishment interval on the system host computer. The system compares the set parameter upper limit with the real-time water quality data. If the online water quality parameter is greater than the set parameter upper limit, it means that the on-site water quality does not meet the standard. At this time, the system starts the replenishment function and opens the water inlet electric valve to replenish the line water tank. The system can set up multi-stage tanks, enter the clean water from the back end, and monitor the front end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system. At the same time, the line water quality parameters are monitored in real time. When the line water quality parameters are lower than the lower limit of the water quality parameter setting, it means that the water quality meets the standard and the system stops replenishing water. During the water replenishment process, the system accumulates the water replenishment time. When the water replenishment time is equal to the set water replenishment time, the water replenishment is stopped to allow the line circulation pump to fully mix the newly added cleaning water. After the water replenishment interval, if the line water quality parameters do not reach the parameter setting lower limit, the system continues to run, and the cycle is executed until the line water quality parameters meet the standards.

[0061] It should be noted that the execution unit in the present application is configured for multi-stage cleaning, where water is replenished from cleaning tank one 5, and gradually overflows to cleaning tank two 6 and cleaning tank three 7 through the connecting tank overflow port 10. Those skilled in the art can set the number of cleaning tanks as needed, and the water quality monitoring sensor 9 is arranged at the outlet of cleaning tank three 7. As long as the water quality of cleaning tank three 7 meets the requirements, the water quality of the entire tank body must meet the requirements. During cleaning, the equipment can be cleaned step by step from cleaning tank three 7, cleaning tank two 6, and cleaning tank one 5.

[0062] The working process of the real-time monitoring unit includes:

[0063] Real-time monitoring of water conductivity through water quality monitoring sensor 9 , total organic carbon content C, dissolved oxygen content O;

[0064] The conductivity of water , total organic carbon content C, dissolved oxygen content O are given weights, weighted fusion function is defined, mathematical model is constructed, and water quality coefficient is output. The expression is:

[0065] ;

[0066] In the formula, is the water quality coefficient, To monitor the conductivity of water quality , weight coefficients of total organic carbon content C and dissolved oxygen content O;

[0067] Monitor the conductivity of water during the set time period during the cleaning process , total organic carbon content C, dissolved oxygen content O as a function of time;

[0068] According to the conductivity of water in the set time period , total organic carbon content C, dissolved oxygen content O over time function respectively fit the conductivity of water quality in the set time period , total organic carbon content C, dissolved oxygen content O change curves over time;

[0069] Based on the obtained function curve, a mathematical model is constructed to output the potential water quality coefficient, which is expressed as:

[0070] ;

[0071] In the formula, is the potential water quality coefficient, The conductivity of water in the set time period The area enclosed by the time-varying curve and the corresponding preset threshold curve, It is the area enclosed by the curve of total organic carbon content C changing with time within the set time period and the corresponding preset threshold curve. It is the area enclosed by the curve of dissolved oxygen content O varying with time within the set time period and the corresponding preset threshold curve. , and They are The proportionality coefficient, is the influence function of water level on potential water quality coefficient, is the weight coefficient.

[0072] The working process of the automatic control unit includes:

[0073] Real-time monitoring of water conductivity , total organic carbon content C, dissolved oxygen content O are mapped to the conductivity range of the water quality set by the system , Total organic carbon content range and dissolved oxygen content range ;

[0074] If the water conductivity If any one of the total organic carbon content C and dissolved oxygen content O exceeds the upper limit of the corresponding set range, the water inlet electric valve 1 is immediately opened to replenish water to the cleaning tank, and clean water enters from one end, while the other end is monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0075] Set the water replenishment time T1 and the water replenishment interval T2 to monitor the conductivity of the water quality in real time , total organic carbon content C, dissolved oxygen content O, when the water conductivity , total organic carbon content C, dissolved oxygen content O are all lower than the corresponding set range lower limit, indicating that the water quality meets the standard, the system stops replenishing water, closes the water inlet electric valve 1, and monitors whether the electric valve is fully closed;

[0076] During the water replenishment process, the system accumulates water replenishment time T3. When the water replenishment time T3 equals the set water replenishment time T1, the water replenishment is stopped and the cumulative stop water replenishment time T4 is accumulated to fully mix the newly added cleaning water. After the water replenishment interval time T4 equals the set water replenishment interval time T2, if the conductivity of the water quality , total organic carbon content C, dissolved oxygen content O are not lower than the corresponding set interval lower limit, the system continues to operate, and the cycle is executed until the conductivity in the water quality , total organic carbon content C and dissolved oxygen content O meet the standards.

[0077] The working process of the automatic control unit also includes:

[0078] The water quality factor Mapped to the set water quality coefficient range ;

[0079] If the water quality coefficient Greater than the upper limit of the water quality coefficient range When the water quality is not up to standard, the water inlet electric valve 1 is immediately opened to replenish water to the cleaning tank, and clean water enters from one end, while the other end is monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0080] Set the water replenishment time T5 and the water replenishment interval time T6 to obtain the water quality coefficient in real time , when the water quality coefficient Below the lower limit of water quality coefficient range When , it indicates that the water quality meets the standard, the system stops replenishing water, closes the water inlet electric valve 1, and monitors whether the electric valve is closed.

[0081] During the water replenishment process, the system accumulates water replenishment time T7. When the water replenishment time T7 equals the set water replenishment time T5, the water replenishment is stopped and the cumulative stop water replenishment time T8 is accumulated to fully mix the newly added cleaning water. After the water replenishment interval time T8 equals the set water replenishment interval time T6, if the water quality coefficient Not lower than the lower limit of the water quality coefficient range , the system continues to run, and the cycle continues until the water quality coefficient Below the lower limit of water quality coefficient range .

[0082] The working process of the automatic control unit also includes:

[0083] Potential water quality factor Mapped to the set potential water quality coefficient range ;

[0084] If the potential water quality factor Greater than the upper limit of the potential water quality coefficient range When the water quality is not up to standard, the water inlet electric valve 1 is immediately opened to replenish the cleaning tank with clean water from one end and the other end is monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0085] Set the water replenishment time T9 and the water replenishment interval T10, and the real-time potential water quality coefficient , when the potential water quality coefficient Below the lower limit of the potential water quality coefficient range When , it indicates that there is no potential possibility that the water quality does not meet the standard. The system stops replenishing water, closes the water inlet electric valve 1, and monitors whether the electric valve is closed.

[0086] During the water replenishment process, the system accumulates the water replenishment time T11. When the water replenishment time T11 is equal to the set water replenishment time T9, the water replenishment is stopped and the cumulative stop water replenishment time T12 is accumulated to fully mix the newly added cleaning water. After the water replenishment interval T12 is equal to the set water replenishment interval T10, if the potential water quality coefficient Not lower than the lower limit of the potential water quality coefficient range , the system continues to operate, and the cycle continues until the potential water quality coefficient Below the lower limit of the potential water quality coefficient range .

[0087] Through the above technical solution, the water quality monitoring sensor 9 in this embodiment monitors the conductivity of the water in real time. , total organic carbon content C, dissolved oxygen content O. If any one of them exceeds the upper limit of the set threshold interval, water should be added immediately until all parameters are lower than the lower limit of the set threshold interval. If all parameters in the water quality belong to the set threshold interval, there is also a probability that the water quality does not meet the standard. All parameters are considered comprehensively to calculate the water quality coefficient. If the water quality coefficient exceeds the upper limit of the set threshold interval, water should be added immediately until the water quality coefficient is lower than the lower limit of the set threshold interval. If the water quality coefficient has been near the lower limit of the interval, but not lower than the lower limit of the interval, if this water quality is used to clean electronic products for a long time, It will affect the product quality. The cumulative values ​​of various parameters in the cleaning process are comprehensively considered to calculate the potential water quality coefficient. If the potential water quality coefficient exceeds the upper limit of the set threshold interval, water will be replenished immediately until the potential water quality coefficient is lower than the lower limit of the set threshold interval. During the replenishment process, the system accumulates the replenishment time. When the replenishment time is equal to the set replenishment time, the replenishment is stopped to allow the line circulation pump to fully mix the newly added cleaning water. After the replenishment interval time is up, if the line water quality parameters have not reached the parameter setting lower limit, the system continues to run, and the cycle is executed until the line water quality parameters meet the standards.

[0088] A pure water supply replenishment method based on online water quality monitoring, the method comprising the following steps:

[0089] Step S1: Before the system is replenished with water, the system performs a self-check on the equipment to check whether the source electric valve is normal and whether the water quality detection equipment is normal;

[0090] Step S2, the system monitors the online water quality, obtains the water quality coefficient and potential water quality coefficient according to the monitoring results, and transmits the data to the system PLC controller;

[0091] Step S3: The customer sets the upper and lower limits of relevant water quality parameters, water replenishment time and water replenishment interval on the system host computer;

[0092] Step S4, the system compares the set parameter upper limit with the real-time water quality data. If the online water quality parameter is greater than the set parameter upper limit, it means that the on-site water quality does not meet the standard. At this time, the system starts the water replenishment function and opens the water inlet electric valve to replenish water to the line body water tank. The system can be set up with multi-stage connected tanks, with clean water entering from the rear end and monitoring at the front end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system;

[0093] Step S5: monitor the water quality parameters of the line in real time. When the water quality parameters of the line are lower than the lower limit of the water quality parameters, it means that the water quality meets the standard and the system stops replenishing water;

[0094] Step S6, during the water replenishment process, the system accumulates the water replenishment time. When the water replenishment time is equal to the set water replenishment time, the water replenishment is stopped to allow the line circulation pump to fully mix the newly added cleaning water. After the water replenishment interval time is up, if the line water quality parameters do not reach the parameter setting lower limit, the system continues to run, and the cycle is executed until the line water quality parameters meet the standards.

[0095] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A pure water supply and replenishment system based on online water quality monitoring, characterized in that: The system comprises an execution unit and a control unit; The execution unit comprises at least one cleaning tank (5), a water inlet (4) is provided on one side of the top of the cleaning tank (5), and a water inlet electric valve (1), a water inlet conductivity sensor (2) and a water inlet flow meter (3) are provided at the water inlet (4); When the execution unit further includes a second cleaning tank (6) and a third cleaning tank (7), for the second cleaning tank (6) and the third cleaning tank (7), a connecting tank overflow port (10) is provided between the first cleaning tank (5) and the second cleaning tank (6), and between the second cleaning tank (6) and the third cleaning tank (7); the first cleaning tank (5) and the second cleaning tank (6) are connected via the connecting tank overflow port (10), and the second cleaning tank (6) and the third cleaning tank (7) are connected via the connecting tank overflow port (10); A water overflow port (8) and a water quality monitoring sensor (9) are provided on one side of the top of the cleaning tank three (7); The control unit includes a real-time monitoring unit, an automatic control unit and a fault diagnosis unit; The real-time monitoring unit is used to collect water quality parameters in real time through a built-in water quality monitoring sensor (9), perform real-time analysis on the collected data, and transmit the monitoring data to the PLC controller in real time; The automatic control unit is used to set the upper and lower limits of water quality parameters, the water replenishment time and time interval through the host computer, compare the real-time monitored water quality parameter data with the set upper and lower limits of water quality parameters, and realize pure water supply replenishment; The fault diagnosis unit is used to perform a self-check on the execution unit equipment before the system is replenished with water; The working process of the real-time monitoring unit includes: The water quality monitoring sensor (9) monitors the conductivity E, the total organic carbon content C, and the dissolved oxygen content O in the water in real time; Assign weights to the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality, define the weighted fusion function, build a mathematical model, and output the water quality coefficient. The expression is: ； In the formula, is the water quality coefficient, They are the weight coefficients for monitoring the conductivity E, total organic carbon content C, and dissolved oxygen content O in water quality; Monitor the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality over time within a set time period during the cleaning process; According to the time-varying functions of the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality in the set time period, the time-varying curves of the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality in the set time period are fitted respectively; Based on the obtained function curve, a mathematical model is constructed to output the potential water quality coefficient, which is expressed as: ； In the formula, is the potential water quality coefficient, The conductivity of water in the set time period The area enclosed by the time-varying curve and the corresponding preset threshold curve, It is the area enclosed by the curve of total organic carbon content C changing with time within the set time period and the corresponding preset threshold curve. It is the area enclosed by the curve of dissolved oxygen content O varying with time within the set time period and the corresponding preset threshold curve. , and They are The proportionality coefficient, is the influence function of water level on potential water quality coefficient, is the weight coefficient; The working process of the automatic control unit includes: The real-time monitoring of water conductivity E, total organic carbon content C, and dissolved oxygen content O are mapped to the water conductivity range set by the system. , Total organic carbon content range and dissolved oxygen content range ; If any one of the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water exceeds the upper limit of the corresponding set range, the water inlet electric valve (1) is immediately opened to replenish water in the cleaning tank, and clean water enters from one end, while monitoring is performed at the other end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system; Set the water replenishment time T1 and the water replenishment interval time T2, and monitor the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality in real time. When the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality are all lower than the corresponding set lower limits, it means that the water quality meets the standard, the system stops replenishing water, closes the water inlet electric valve (1), and monitors whether the electric valve is fully closed; During the water replenishment process, the system accumulates the replenishment time T3. When the replenishment time T3 is equal to the set replenishment time T1, the system stops replenishing water and accumulates the stop replenishment time T4 to fully mix the newly added cleaning water. After the stop replenishment time T4 is equal to the set replenishment interval time T2, if the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality are not lower than the corresponding set interval lower limit, the system continues to run, and the cycle is executed until the conductivity E, total organic carbon content C, and dissolved oxygen content O in the water quality meet the standards; The working process of the automatic control unit also includes: The water quality factor Map to the set water quality coefficient range ; If the water quality coefficient Greater than the upper limit of the water quality coefficient range When the water quality is not up to standard, the water inlet electric valve (1) is immediately opened to replenish water in the cleaning tank, and clean water enters from one end, while monitoring is performed at the other end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system; Set the water replenishment time T5 and the water replenishment interval time T6 to obtain the water quality coefficient in real time , when the water quality coefficient Below the lower limit of water quality coefficient range When the water quality reaches the standard, the system stops replenishing water, closes the water inlet electric valve (1), and monitors whether the electric valve is fully closed; During the water replenishment process, the system accumulates water replenishment time T7. When the water replenishment time T7 equals the set water replenishment time T5, the water replenishment is stopped and the cumulative stop water replenishment time T8 is accumulated to fully mix the newly added cleaning water. After the stop water replenishment time T8 equals the set water replenishment interval time T6, if the water quality coefficient Not lower than the lower limit of the water quality coefficient range , the system continues to run, and the cycle continues until the water quality coefficient Below the lower limit of water quality coefficient range ; The working process of the automatic control unit also includes: Potential water quality factor Mapped to the set potential water quality coefficient range ; If the potential water quality factor Greater than the upper limit of the potential water quality coefficient range When the water quality is not up to standard, the water inlet electric valve (1) is immediately opened to replenish the cleaning tank with clean water from one end and the other end is monitored to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system; Set the water replenishment time T9 and water replenishment interval T10, real-time potential water quality coefficient , when the potential water quality coefficient Below the lower limit of the potential water quality coefficient range When the water quality is below the standard, it indicates that there is no possibility that the water quality is not up to standard. The system stops replenishing water, closes the water inlet electric valve (1), and monitors whether the electric valve is fully closed. During the water replenishment process, the system accumulates the water replenishment time T11. When the water replenishment time T11 is equal to the set water replenishment time T9, the water replenishment is stopped and the cumulative stop water replenishment time T12 is accumulated to fully mix the newly added cleaning water. After the stop water replenishment time T12 is equal to the set water replenishment interval time T10, if the potential water quality coefficient Not lower than the lower limit of the potential water quality coefficient range , the system continues to operate, and the cycle continues until the potential water quality coefficient Below the lower limit of the potential water quality coefficient range .

2. A pure water supply and replenishment method based on online water quality monitoring, characterized in that: The method is applicable to the pure water supply and replenishment system based on online water quality monitoring according to claim 1, and the method comprises the following steps: Step S1: Before the system is replenished with water, the system performs a self-check on the equipment to check whether the source electric valve is normal and whether the water quality detection equipment is normal; Step S2, the system monitors the online water quality, obtains the water quality coefficient and potential water quality coefficient according to the monitoring results, and transmits the data to the system PLC controller; Step S3: The customer sets the upper and lower limits of relevant water quality parameters, water replenishment time and water replenishment interval on the system host computer; Step S4, the system compares the set parameter upper limit with the real-time water quality data. If the line water quality parameter is greater than the set parameter upper limit, it means that the on-site water quality does not meet the standard. At this time, the system starts the water replenishment function and opens the water inlet electric valve to replenish water to the line water tank. The system can be set up with multi-stage connected tanks, with clean water entering from the rear end and monitoring at the front end to ensure that the newly added cleaning water can be evenly distributed in the entire cleaning system; Step S5: monitor the water quality parameters of the line in real time. When the water quality parameters of the line are lower than the lower limit of the water quality parameters, it means that the water quality meets the standard and the system stops replenishing water; Step S6, during the water replenishment process, the system accumulates the water replenishment time. When the water replenishment time is equal to the set water replenishment time, the water replenishment is stopped to allow the line circulation pump to fully mix the newly added cleaning water. After the water replenishment interval time is up, if the line water quality parameters do not reach the parameter setting lower limit, the system continues to run, and the cycle is executed until the line water quality parameters meet the standards.

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