A terahertz imaging mirror mirror processing device

Abstract

The present invention relates to a terahertz imaging reflector mirror processing equipment, and relates to the technical field of parabolic mirror processing equipment, including a deflection main frame, on the deflection axis of the deflection main frame, a plurality of rotating spindles that follow the deflection movement are arranged annularly at intervals, the rotating spindle can locate a plurality of continuous processing stations distributed at equal intervals, a coaxial clamping assembly is installed at one end of the rotating spindle, the coaxial clamping assembly can limit the relative station where the axis of the off-axis parabolic mirror surface of the workpiece is coaxial with the rotation center of the rotating spindle; on the radial outer side of the deflection axis, a calibration distance measuring assembly, a variable grinding assembly, a cleaning assembly, and a secondary polishing assembly that match the plurality of continuous processing stations positioned by the rotating spindle and can continuously process the off-axis parabolic mirror surface are also arranged annularly at intervals. The present invention can continuously and uninterruptedly perform batch off-axis parabolic mirror processing, thereby improving processing efficiency and processing quality.

Description

Technical Field

[0001] The invention relates to the technical field of parabolic mirror surface processing equipment, and in particular to a terahertz imaging reflector mirror surface processing equipment. Background Art

[0002] Terahertz technology is a cutting-edge scientific field that mainly studies electromagnetic waves with frequencies between 100 GHz and 10,000 GHz. Electromagnetic waves in this frequency band have unique properties, such as being able to penetrate certain non-metallic materials and are used for imaging, detecting explosives, biomedical research, etc. With the improvement of the performance of terahertz quantum cascade lasers, they can be used more widely. For example, terahertz quantum cascade lasers can be used as imaging devices. Compared with microwaves, terahertz waves have a shorter wavelength, higher energy, and stronger penetration, making the imaging clearer. In addition, terahertz radar has gradually become an important device for target detection and identification because of its advantages of large signal bandwidth and high resolution. The off-axis parabolic reflector is a type of aspheric mirror with a parabolic mirror curve. It is an indispensable aspheric laser lens in the construction of a terahertz imaging system. Parabolic reflectors have the advantages of correcting optical system aberrations, improving imaging quality, simplifying optical system structure, reducing instrument size and weight, and reducing the number of lenses. Off-axis parabolic reflectors can transform plane waves into spherical waves and spherical waves into plane waves. They are indispensable aspheric mirrors in high-resolution spectrometers and astronomical observation optical devices.

[0003] With the improvement of optical system performance, the surface accuracy and surface roughness of the reflector have also improved accordingly. Thanks to the progress of mechanical manufacturing and computer numerical control processing technology, the processing accuracy of aspheric mirrors has been significantly improved. In addition, with the development of ultra-precision processing technology, machine tool technology has also made great progress. Among them, the emergence of a series of new technologies such as linear motor drive has greatly improved ultra-precision lathes. The emergence of slow tool servo technology makes ultra-precision cutting of complex surfaces possible, and its multi-axis linkage function is widely used in complex surface turning. However, in the existing processing technology, although the ultra-precision single-point diamond turning machine based on slow tool servo technology can realize the mirror processing of different off-axis parabolic reflectors, it is limited by the movement speed and single-line process movement mode, resulting in high processing cost and slow processing speed. Usually, it can only complete the processing of a single workpiece in a single working cycle, and cannot perform batch processing operations continuously, resulting in low comprehensive processing efficiency when used for batch processing.

[0004] For example, the patent document with authorization number CN107838725B discloses a fixture that can simultaneously process multiple parabolic reflectors. The transmission assembly is installed in the fixture housing through bearings. There are 8 ball screws distributed in a circular array. Each ball screw is connected to a small bevel gear. Each ball screw is connected to a ball nut. A disk cover is fixedly installed on the fixture housing. The inner ring gear in the transmission assembly is fixedly connected to the lower side of the disk cover. The fine-tuning knob is installed on the upper end of the planetary carrier. 8 fixture slider assemblies are fixedly connected to the corresponding guide rail sliders of the disk cover in a circular array and are connected to the ball nuts on the lower side thereof. The fixture slider assembly is provided with a V-shaped block, a locking device, a fixture slider fixing groove, etc., which can position and clamp the workpiece. However, the fixture only provides a synchronous clamping structure, which can only clamp multiple workpieces at the same time. Although the processing equipment can be used to continuously perform mirror processing on multiple workpieces, it is still impossible to achieve the synchronization of processing operations and clamping operations. It is still necessary to stop the machine regularly to disassemble and assemble the workpieces, and the multiple workstations it defines are interconnected, and it is impossible to directly replace some of the processed workpieces according to demand. The equipment only provides a clamping structure, and it does not make any improvements to the mirror processing structure of the parabolic reflector, resulting in the mirror processing structure still using the existing coaxial turning method or slow tool servo turning method for mirror grinding processing. It is impossible to avoid the defects of poor processing accuracy and low processing quality caused by the inability of the existing coaxial turning method to effectively adapt to the specific surface contour of the off-axis parabolic mirror, and it is also impossible to solve the problems of high processing cost, slow processing speed and low comprehensive processing efficiency of the slow tool servo turning method. In particular, the existing mirror processing structure cannot compensate for the wear of the polished part during the grinding process, and it is very easy to have defects such as uneven grinding and poor grinding accuracy, which reduces the overall grinding quality. Finally, the existing processing equipment is independent of each other and cannot continuously process the workpiece clamped by the same clamping structure. Frequent disassembly and assembly operations are required to position the workpiece at different processing stations. Frequent disassembly and assembly operations can easily introduce more positioning errors and structural wear, resulting in a decrease in the smoothness of the mirror surface, affecting the mirror processing quality during batch processing. Summary of the invention

[0005] The purpose of the present invention is to provide a terahertz imaging reflector mirror processing equipment that can continuously and uninterruptedly perform batch off-axis parabolic mirror processing and can construct a polished surface with different surface contours according to the actual surface contour of the off-axis parabolic mirror. The present invention solves the problems that the existing conventional rotary polishing structure is only applicable to workpieces with coaxial parabolic mirrors and cannot efficiently process workpieces with off-axis parabolic mirrors, and the existing rotary polishing structure cannot effectively adapt to the parabolic mirror, cannot compensate for the contact error of the pressing contact and the wear amount during the polishing process, and is prone to uneven mirror polishing and poor polishing quality. It also makes up for the fact that the polishing surface of the existing rotary polishing structure is set in advance and the polishing surface cannot be reconstructed according to actual processing requirements, which greatly reduces the scope of application. In addition, the existing fixed abrasive parabolic grinding equipment has a layout gap in the polishing tiles, resulting in the annular area corresponding to the gap position cannot be effectively polished, resulting in annular surface polishing deviation of the parabolic mirror and inconsistent overall polishing degree. In addition, the grinding tile cannot fully adapt to the parabola, resulting in an uneven distribution of the abutting pressure it provides, which leads to the defect of uneven grinding of the grinding process of a single grinding tile, seriously affecting the grinding uniformity of the entire parabolic mirror. The existing clamping structure of the off-axis parabolic reflector can only clamp the off-axis parabolic reflector of a single off-axis amount, and cannot be adjustably adapted to the off-axis parabolic reflector of multiple off-axis amounts. Finally, the conventional grinding processing of the existing off-axis parabolic reflector usually uses a slow tool servo turning method, which has the defects of low processing efficiency and slow grinding speed, and it also needs to set complex grinding feed programs and paths according to the inclination of different parabolic mirror surfaces, resulting in the problem of high comprehensive processing costs.

[0006] The technical solution adopted by the present invention is: a terahertz imaging reflector mirror processing equipment, including a deflection main frame capable of driving a rotating spindle to perform deflection movement, a plurality of rotating spindles are arranged circumferentially at intervals on the deflection axis of the deflection main frame, and the rotating spindle positions a plurality of equally spaced continuous processing stations in a manner that can follow the deflection axis for synchronous deflection, a coaxial clamping assembly capable of adjusting the station of an off-axis parabolic mirror surface of a workpiece is detachably mounted on one end of the rotating spindle, and the coaxial clamping assembly can limit a relative station where the axis of the off-axis parabolic mirror surface is coaxial with the rotation center of the rotating spindle; and a calibration distance measuring assembly, a variable grinding assembly, a cleaning assembly and a secondary polishing assembly are also arranged circumferentially at intervals on the radial outer side of the deflection axis, which match the plurality of continuous processing stations positioned by the rotating spindle and can continuously process the off-axis parabolic mirror surface. Its advantage is that the deflection axis provided in the present application can drive multiple rotating spindles to deflect synchronously, realize the continuous driving and processing of the workpiece, so that the off-axis parabolic mirror surface of the workpiece can complete multiple processes in sequence and continuously during the intermittent deflection movement, ensure the effect and efficiency of the off-axis parabolic mirror surface processing, and multiple workpieces can be continuously processed without interruption, reducing the time cost of workpiece downtime and disassembly, reducing the error amount that may be introduced by frequent disassembly and assembly of the same workpiece, and improving the processing quality and the overall efficiency of batch processing. The coaxial clamping assembly provided in the present application can clamp workpieces of different sizes according to needs, and the coaxial clamping assembly can also adjust the clamped state of the workpiece, so that it can effectively locate the coaxial workstation of the off-axis parabolic mirror surface of the workpiece, which is convenient for the efficient grinding of the workpiece with the off-axis parabolic mirror surface under the cooperation of the rotating spindle and the variable grinding assembly, greatly improving the grinding range, grinding efficiency and grinding quality, and meeting the needs of batch processing.

[0007] According to a preferred embodiment, the calibration and ranging assembly is positioned directly above the deflection axis by installing a ring plate, so that it can collect the initial surface parameters of the off-axis parabolic mirror; the variable grinding assembly constructs a grinding surface matching the off-axis parabolic mirror according to the initial surface parameters acquired by the calibration and ranging assembly; when the workpiece moves to the grinding station following the deflection of the rotating spindle, the variable grinding assembly presses the constructed grinding surface against the off-axis parabolic mirror of the workpiece by means of adjustable lateral displacement and multi-point pressure, and when the workpiece rotates following the rotating spindle, the variable grinding assembly performs full coverage and uniform grinding on the off-axis parabolic mirror by forming multiple offset and overlapping grinding annular surfaces. The advantage is that the calibration distance measurement component provided by the present application can obtain the precise surface data and relative position data of the off-axis parabolic mirror in advance, so that the variable polishing component can accurately construct a polishing surface that fits the off-axis parabolic mirror. The several polishing tiles of the variable polishing component can polish the off-axis parabolic mirror with uniform polishing amount and consistent polishing degree when the workpiece rotates around the axis of the off-axis parabolic mirror, which reduces the polishing difficulty and polishing cost, and improves the polishing efficiency and polishing accuracy. The variable polishing component provided by the present application can variably construct polishing surfaces with different surface profiles according to demand, so that it can adapt to a variety of different off-axis parabolic mirrors, greatly improving its scope of application.

[0008] According to a preferred embodiment, the variable grinding assembly includes a first hydraulic lateral displacement main rod, a support disc, a second forming support mechanism, an adjustable cylinder and a grinding piece, wherein the first hydraulic lateral displacement main rod is detachably mounted on the mounting ring plate, and the moving end of the first hydraulic lateral displacement main rod is connected to the support disc whose axial projection can cover the off-axis parabolic mirror surface of the workpiece; a plurality of the second forming support mechanisms that can cooperate with each other to construct a variable curved surface profile are inserted in a lattice on the support disc, and the moving end of the second forming support mechanism close to the off-axis parabola is connected to the grinding piece through the adjustable cylinder that is arranged in the same lattice as the second forming support mechanism and can compensate for the positioning error of the second forming support mechanism. The advantage is that the adjustable cylinder provided in the present application can effectively compensate for a variety of position errors and pressure deviations, thereby improving the uniformity and accuracy of grinding.

[0009] According to a preferred embodiment, the polishing piece includes an elastic strip, a polishing tile and a pressure detection unit, wherein a plurality of the pressure detection units are arranged at intervals on the elastic strip, and the polishing tile is arranged on the side of the pressure detection unit away from the elastic strip, and the polishing tiles on two adjacent elastic strips are staggered. The polishing tiles provided in the present application can ensure the polishing coverage while providing a roughly uniform polishing capacity, thereby improving the overall polishing quality.

[0010] According to a preferred embodiment, the first mounting base plate of the calibration and ranging assembly is detachably connected to the mounting ring plate, and an infrared ranging unit coaxial with the rotation center of the rotating spindle is arranged on the lower surface of the first mounting base plate; two mirror profile scanning units are symmetrically arranged on both sides of the infrared ranging unit.

[0011] According to a preferred embodiment, a table is connected to the base of the coaxial clamping assembly, and a sliding plate capable of adjustable lateral movement is installed on the table; a deflection clamp is rotatably connected to the sliding plate, and an angle adjustment member capable of limiting the inclination angle of the deflection clamp on the sliding plate is arranged on the side of the deflection clamp, and the angle adjustment member is slidably connected to the sliding plate in a manner capable of directional translation.

[0012] According to a preferred embodiment, the sliding plate can cooperate with the angle adjustment member to correct the position of the workpiece clamped by the deflection clamping member so that the axis of the off-axis parabolic mirror surface of the workpiece coincides with the rotation center of the rotating spindle.

[0013] According to a preferred embodiment, the cleaning component includes an ultrasonic cleaning tank, a reciprocating suction mechanism and a dehumidification mechanism, wherein the reciprocating suction mechanism and the dehumidification mechanism are respectively arranged on both sides of the ultrasonic cleaning tank, and the reciprocating suction mechanism is connected to the ultrasonic cleaning tank, so that the reciprocating suction mechanism periodically changes the liquid level height in the ultrasonic cleaning tank in a manner of adjustably sucking or refilling the cleaning liquid.

[0014] According to a preferred embodiment, the dehumidification mechanism is moved into the ultrasonic cleaning tank in a manner that can be linked with the reciprocating suction mechanism, so that the dehumidification mechanism can blow and dry the off-axis parabolic mirror.

[0015] According to a preferred embodiment, the secondary polishing assembly includes a mounting seat mounted on the mounting ring plate and a parabolic magnetorheological polishing unit detachably disposed on the mounting seat.

[0016] The beneficial effects of the present invention are:

[0017] The deflection axis provided in the present application can drive multiple rotating spindles to deflect synchronously, realizing continuous processing of workpieces, so that the off-axis parabolic mirror surface of the workpiece can complete multiple processes in sequence and continuously during the intermittent deflection movement, ensuring the effect and efficiency of the off-axis parabolic mirror surface processing, and multiple workpieces can be processed continuously and uninterruptedly, reducing the time cost of workpiece downtime and disassembly, reducing the amount of error that may be introduced by frequent disassembly and assembly of the same workpiece, and improving the processing quality and the overall efficiency of batch processing. The coaxial clamping assembly provided in the present application can clamp workpieces of different sizes according to needs, and adjust the clamping state of the workpiece, effectively locate the coaxial workstation of the off-axis parabolic mirror surface of the workpiece, and facilitate the efficient grinding of the workpiece with the off-axis parabolic mirror surface under the cooperation of the rotating spindle and the variable grinding assembly, greatly improving the grinding range, grinding efficiency and grinding quality, and meeting the needs of batch processing. The calibration distance measuring component provided in the present application can obtain the precise surface data and relative position data of the off-axis parabolic mirror in advance, so that the variable polishing component can accurately construct a polishing surface that fits the off-axis parabolic mirror. The several polishing tiles of the variable polishing component can polish the off-axis parabolic mirror with uniform polishing amount and consistent polishing degree when the workpiece rotates around the axis of the off-axis parabolic mirror, thereby reducing the polishing difficulty and polishing cost. The variable polishing component provided in the present application can variably construct polishing surfaces with different surface profiles according to demand, so that it can adapt to a variety of different off-axis parabolic mirrors, greatly improving its scope of application. The adjustable cylinder of the variable polishing component can also dynamically compensate for the positioning error of the polishing tile and dynamically adjust the size of the pressure exerted by the polishing tile, ensuring that several polishing tiles can effectively abut on the off-axis parabolic mirror under the condition of having the same pressure, thereby achieving uniform polishing of the off-axis parabolic mirror. The adjustable cylinder can compensate for the wear of the grinding parts during the grinding process, ensure the uniformity of force on the grinding contact surface, and improve the overall grinding quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0019] Figure 2 It is a structural schematic diagram of a coaxial clamping assembly of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0020] Figure 3 It is a schematic plan view of a deflection clamping member of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0021] Figure 4 It is a structural schematic diagram of a variable polishing component of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0022] Figure 5 It is a structural schematic diagram of a second forming support mechanism of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0023] Figure 6 It is a structural schematic diagram of an adjustable cylinder of a preferred terahertz imaging reflector mirror processing device proposed by the present invention;

[0024] Figure 7 It is a schematic diagram of the plane layout of a polishing part of a preferred terahertz imaging reflector mirror processing equipment proposed by the present invention;

[0025] Figure 8 It is a structural schematic diagram of a preferred cleaning component of a terahertz imaging reflector mirror processing device proposed by the present invention when sucking cleaning liquid;

[0026] Fig. 9 It is a structural schematic diagram of a preferred cleaning component of a terahertz imaging reflector mirror processing equipment proposed by the present invention during ultrasonic cleaning.

[0027] Reference numerals list

[0028] 1: Deflection main frame; 2: Rotating main shaft; 3: Coaxial clamping assembly; 4: Calibration and ranging assembly; 5: Variable grinding assembly; 6: Cleaning assembly; 7: Secondary polishing assembly; 11: Deflection shaft; 12: Mounting ring plate; 13: Deflection motor; 14: Radial connecting rod; 31: Base; 32: Table plate; 33: Sliding plate; 34: Deflection clamping piece; 35: Angle adjusting piece; 341: C-shaped plate frame; 342: First triangular positioning plate; 343: Second triangular positioning plate; 344: Third screw; 345: Guide rod; 346: Round shaft; 351: Triangular plate; 352: Longitudinal plate; 353: Transverse movement drive rod; 354: Positioning vertical plate; 355: Inclined strip groove; 41: First mounting bottom plate; 42: Infrared ranging unit; 43: Mirror profile scanning unit; 51: First hydraulic transverse main rod; 52: Support disc; 53: Second forming support mechanism; 54: Adjustable cylinder; 55: Grinding piece; 531: Lifting threaded rod; 532: Internal thread sleeve; 533: External tooth ring; 534: Rotation drive unit; 535: Guide plug board; 541: Cylinder body; 542: Piston support column; 543: Air inlet pipe; 544: Exhaust pipe; 545: Inlet solenoid valve; 546: Exhaust solenoid valve; 547: Pressurized air chamber; 548: Pressurized air pump; 549: Main air delivery pipe; 551: Elastic strip board; 552: Grinding tile; 553: Pressure detection unit; 61: Ultrasonic cleaning tank; 62: Reciprocating suction mechanism; 63: Dehumidification mechanism; 611: Notch groove; 612: Baffle; 621: Suction piston cylinder; 622: Suction hydraulic column; 623: Linking rod; 631: Exhaust disc; 632: Baffle plate; 71: Mounting seat; 72: Parabolic magnetorheological polishing unit. Detailed implementation mode

[0029] The following is a detailed description with reference to the accompanying drawings.

[0030] This application provides a mirror surface processing device for terahertz imaging mirrors, which includes a deflection main frame 1, a rotating main shaft 2, a coaxial clamping assembly 3, a calibration and ranging assembly 4, a variable grinding assembly 5, a cleaning assembly 6, and a secondary polishing assembly 7.

[0031] According to Figure 1In a specific embodiment shown, the deflection main frame 1 can drive the rotating main shaft 2 to perform deflection movement. A plurality of rotating main shafts 2 are arranged circumferentially and spaced apart on the deflection axis 11 of the deflection main frame 1. A plurality of rotating main shafts 2 are positioned on the same vertical annular surface in a manner that they can deflect synchronously with the deflection axis 11 to form a plurality of equally spaced continuous processing stations. The assembly end of the rotating main shaft 2 away from the deflection main frame 1 is detachably mounted with a coaxial clamping assembly 3 capable of adaptively adjusting the station of the off-axis parabolic mirror of the workpiece, and the coaxial clamping assembly 3 can limit the relative station where the axis of the off-axis parabolic mirror is coaxial with the rotation center of the rotating main shaft 2. A calibration distance measuring assembly 4, a variable grinding assembly 5, a cleaning assembly 6 and a secondary polishing assembly 7 matching the plurality of continuous processing stations positioned on the rotating main shaft 2 are also arranged circumferentially and spaced apart on the radial outer side of the deflection axis 11. In the process of intermittent deflection movement following different rotating spindles 2, multiple workpieces sequentially pass through the disassembly and assembly station, grinding station, cleaning station and polishing station, so that multiple workpieces use the calibration distance measuring component 4, the variable grinding component 5, the cleaning component 6 and the secondary polishing component 7 to complete the continuous processing of the off-axis parabolic mirror surface. The calibration distance measuring component 4, the variable grinding component 5, the cleaning component 6 and the secondary polishing component 7 are annularly spaced and installed on the mounting ring plate 12 of the deflection main frame 1 in a one-to-one correspondence with the processing stations defined by the four rotating spindles 2. The calibration distance measuring component 4 is positioned directly above the deflection axis 11 through the mounting ring plate 12, so that it can periodically collect the initial surface parameters of the off-axis parabolic mirror surface of the workpiece assembled to the rotating spindle 2 through the coaxial clamping component 3 and in the disassembly and assembly station. The variable grinding component 5 can adaptively construct a grinding surface matching the off-axis parabolic mirror surface according to the initial surface parameters obtained by the calibration distance measuring component 4. When the workpiece follows the rotation spindle 2 to deflect and move to the grinding station, the variable grinding component 5 presses the grinding surface it constructs against the off-axis parabolic mirror surface of the workpiece by means of adjustable lateral displacement and multi-point pressure, and in the process of the workpiece following the rotation spindle 2, the variable grinding component 5 completes the grinding of the off-axis parabolic mirror surface by forming multiple offset overlapping grinding annuli. After the workpiece is polished by the variable grinding component 5, the workpiece follows the rotation spindle 2 to further deflect, so that the workpiece moves into the ultrasonic cleaning tank 61 of the cleaning component 6, and the ultrasonic cleaning tank 61 uses a cleaning liquid to clean the polished off-axis parabolic mirror surface. The cleaned workpiece can follow the rotation spindle 2 to deflect again, so that the workpiece moves to the polishing station, and the off-axis parabolic mirror surface is polished with high precision by the secondary polishing component 7. The polished workpiece is deflected again following the rotating spindle 2, so that the workpiece returns to the disassembly and assembly station. The operator or the robot disassembles the clamped workpiece and transfers the disassembled workpiece, which is convenient for overall cleaning and inspection of the mirror-finished workpiece.

[0032] The deflection shaft 11 provided in the present application can drive multiple rotating spindles 2 to deflect synchronously, realize continuous processing of workpieces, so that the off-axis parabolic mirror surface of the workpiece can complete multiple processes in sequence and continuously during the intermittent deflection movement, ensure the effect and efficiency of off-axis parabolic mirror processing, and multiple workpieces can be processed continuously and uninterruptedly, reducing the time cost of workpiece downtime and disassembly, reducing the error amount that may be introduced by frequent disassembly and assembly of the same workpiece, and improving the processing quality and the overall efficiency of batch processing. The coaxial clamping assembly 3 provided in the present application can clamp workpieces of different sizes according to needs, and adjust the clamping state of the workpiece, effectively locate the coaxial workstation of the off-axis parabolic mirror surface of the workpiece, facilitate the efficient grinding of the workpiece with the off-axis parabolic mirror surface under the cooperation of the rotating spindle and the variable grinding assembly, greatly improve the grinding range, grinding efficiency and grinding quality, and meet the needs of batch processing. The calibration distance measuring component 4 provided in the present application can obtain the precise surface data and relative position data of the off-axis parabolic mirror in advance, so that the variable polishing component 5 can accurately construct a polishing surface that fits the off-axis parabolic mirror. The polishing tiles 552 on the polishing surface can polish the off-axis parabolic mirror with uniform polishing amount and consistent polishing degree when the workpiece rotates around the axis of the off-axis parabolic mirror, thereby reducing the polishing difficulty and polishing cost, and improving the polishing efficiency and polishing accuracy. The variable polishing component 5 provided in the present application can variably construct a polishing surface with different surface profiles according to demand, so that it can adapt to a variety of different off-axis parabolic mirrors, greatly improving its scope of application. The adjustable cylinder 54 of the variable polishing assembly 5 can also dynamically compensate for the positioning error of the polishing tile 552 and dynamically adjust the pressure of the polishing tile 552, ensuring that a plurality of polishing tiles 552 can effectively abut on the off-axis parabolic mirror surface with the same pressure, thereby achieving uniform polishing of the off-axis parabolic mirror surface. The adjustable cylinder 54 can compensate for the wear of the polishing member 55 during the polishing process, ensure the uniformity of the force on the polishing contact surface, and improve the overall polishing quality.

[0033] Preferably, the deflection main frame 1 comprises a deflection shaft 11, a mounting ring plate 12, a deflection motor 13 and radial connecting rods 14. The deflection shaft 11 is mounted on the power output end of the deflection motor 13. The deflection motor 13 is connected to the mounting ring plate 12 via radial connecting rods 14 circumferentially arranged on the side wall thereof, so that the center of the mounting ring plate 12 coincides with the axis of the deflection shaft 11.

[0034] Preferably, the rotating main shaft 2 centrally clamps and coaxially clamps the coaxial clamping assembly 3 by arranging a three-jaw chuck structure same as that of a conventional machine tool at one end thereof away from the deflection shaft 11. Preferably, the rotation center of the rotating main shaft 2 is the central axis during its rotation, and the specific structural composition of the rotating main shaft 2 can refer to the existing machine tool spindle module. The rotating main shaft 2 can effectively drive the coaxial clamping assembly 3 and the workpiece to rotate at high speed around the axis.

[0035] As Figure 2 shown, the coaxial clamping assembly 3 includes a base 31, a platen 32, a sliding plate 33, a deflection clamping member 34 and an angle adjusting member 35. Preferably, a platen 32 is connected to the columnar base 31. A sliding plate 33 capable of performing adjustable lateral movement is installed on the platen 32. A deflection clamping member 34 is pivotally connected to the sliding plate 33 through a rotating shaft. Preferably, an angle adjusting member 35 for defining the inclination angle of the deflection clamping member 34 on the sliding plate 33 is arranged on the side of the deflection clamping member 34. Preferably, the angle adjusting member 35 is slidably rail-connected to the sliding plate 33 in a manner capable of performing directional translation. The sliding plate 33 can cooperate with the angle adjusting member 35 to correct the position of the workpiece clamped by the deflection clamping member 34, so that the axis of the off-axis parabolic mirror surface of the workpiece coincides with the rotation center of the rotating main shaft 2.

[0036] As Figure 3 shown, the deflection clamping member 34 includes a U-shaped plate frame 341, a first triangular positioning plate 342 and a second triangular positioning plate 343. Preferably, the first triangular positioning plate 342 and the second triangular positioning plate 343 are arranged opposite to each other in the U-shaped plate frame 341. Further preferably, the first triangular positioning plate 342 is fixedly connected to the inner side wall of the U-shaped plate frame 341. The second triangular positioning plate 343 is connected to the U-shaped plate frame 341 through a third screw 344 rotatably connected to its surface. The third screw 344 is threadedly inserted through the side wall of the U-shaped plate frame 341. Further preferably, a guide rod 345 capable of defining its movement direction and penetrating through the side wall of the U-shaped plate frame 341 is further connected to the surface of the second triangular positioning plate 343. Specifically, the guide rod 345 is parallel to the third screw 344. During use, the distance between the first triangular positioning plate 342 and the second triangular positioning plate 343 is changed by screwing the third screw 344, so that the first triangular positioning plate 342 and the second triangular positioning plate 343 clamp the workpiece to be processed in an opposing manner. Preferably, circular shafts 346 are arranged on both sides of the U-shaped plate frame 341. The partial shaft rods of the circular shafts 346 away from the U-shaped plate frame 341 are movably inserted into inclined strip grooves 355 formed in a triangular plate 351.

[0037] Preferably, the angle adjusting member 35 includes a triangular plate 351 with a sliding rail connected to the sliding plate 33, a longitudinal plate 352 connected to two parallel triangular plates 351, a transverse movement driving rod 353 rotatably connected to the longitudinal plate 352, and a positioning vertical plate 354 supported on the sliding plate 33. Among them, the transverse movement driving rod 353 is threadedly inserted through the positioning vertical plate 354. Preferably, the transverse movement driving rod 353 positions the working position of the triangular plate 351 on the sliding plate 33 by changing its relative position with the positioning vertical plate 354. Further preferably, an inclined strip groove 355 is formed on the plate surface of the triangular plate 351 facing the U-shaped plate frame 341, and the circular shaft 346 is relatively slidably inserted into the inclined strip groove 355. When the triangular plate 351 undergoes directional translation, relative movement occurs between the circular shaft 346 and the inclined strip groove 355, causing the circular shaft 346 to drive the U-shaped plate frame 341 to deflect under the drive of the inclined strip groove 355.

[0038] Preferably, the calibration and ranging assembly 4 includes a first mounting base plate 41, an infrared ranging unit 42, and a mirror profile scanning unit 43. Preferably, the first mounting base plate 41 is detachably connected to the mounting ring plate 12, and the infrared ranging unit 42 is provided on the lower surface of the first mounting base plate 41 and is coaxial with the rotation center of the rotating main shaft 2. Specifically, being coaxial with the rotation center of the rotating main shaft 2 means coinciding with the central axis of the rotating main shaft 2 during rotation. The infrared ranging unit 42 irradiates the infrared light to the focus of the off-axis parabolic mirror surface of the workpiece in such a way that the infrared light emitted by it coincides with the rotation center axis of the rotating main shaft 2, so as to accurately obtain the distance between the off-axis parabolic mirror surface and the infrared ranging unit 42. In addition, after the coaxial clamping assembly 3 and the workpiece are installed, the operator can also confirm the accuracy of the installation position of the workpiece by observing the coincidence degree of the infrared light emitted and reflected by the infrared ranging unit 42, so that the operator can adjust the relative position between the workpiece clamped by the coaxial clamping assembly 3 and the rotating main shaft 2 according to whether the emission path and the reflection path of the infrared light emitted by the infrared ranging unit 42 coincide. In this application, the infrared ranging unit 42 is used to verify and assist in correcting the alignment accuracy of the clamping position of the coaxial clamping assembly 3, improving the clamping and positioning accuracy of the workpiece. Preferably, two mirror profile scanning units 43 are symmetrically arranged on both sides of the infrared ranging unit 42. Specifically, the mirror profile scanning unit 43 can obtain the surface profile information of the off-axis parabolic mirror surface through methods such as profile scanning. This surface profile information is the initial surface parameter of the workpiece, and the two mirror profile scanning units 43 improve the accuracy of the initial surface parameter by means of mutual compensation and correction, ensuring the accuracy of the data.

[0039] As Figure 5As shown, the variable grinding assembly 5 includes a first hydraulic lateral movement main rod 51, a support disc 52, a second forming support mechanism 53, an adjustable cylinder 54 and a grinding piece 55. The first hydraulic lateral movement main rod 51 is detachably mounted on the mounting ring plate 12. The moving end of the first hydraulic lateral movement main rod 51 is connected to a support disc 52 whose axial projection can cover the off-axis parabolic mirror surface of the workpiece. The first hydraulic lateral movement main rod 51 can be extended and retracted according to the spacing data obtained by the infrared ranging unit 42, thereby realizing the adjustable lateral movement of the variable grinding assembly 5 and effectively positioning the relative position between the grinding piece 55 and the off-axis parabolic mirror surface. A plurality of second forming support mechanisms 53 are inserted in a dot matrix on the support disc 52. The plurality of second forming support mechanisms 53 can cooperate with each other and can be reconfigured to form a variable curved surface profile that matches different off-axis parabolic mirror surfaces. Specifically, the variable curved surface profile refers to a non-flat contour surface that can change the point parameters of the contour surface according to the needs and has the same surface lattice parameters as the corresponding off-axis parabola. The non-flat contour surface referred to by the variable curved surface profile is constructed by connecting a number of point coordinates. The adjustable cylinder 54 is arranged in a lattice on the moving end of the second forming support mechanism 53 close to the off-axis parabola in a one-to-one correspondence with the second forming support mechanism 53. The end of the adjustable cylinder 54 away from the second forming support mechanism 53 supports a grinding piece 55, and the adjustable cylinder 54 can compensate for the positioning error of the second forming support mechanism 53, so that the grinding piece 55 can be accurately positioned and obtain equal support force at multiple points. Multiple grinding pieces 55 are installed on the arrayed adjustable cylinders 54 at intervals in a manner that matches the local area contours of the off-axis parabola. Preferably, the adjustable cylinder 54 can independently adjust the point pressure strength while compensating for the support positioning error generated by the second forming support mechanism 53. The present application can ensure that the abutment pressure existing at several contact points between the grinding piece 55 and the off-axis parabolic mirror is equal by setting an adjustable cylinder 54, so as to achieve the effect that the grinding degree and grinding efficiency of different areas of the parabola are roughly equal. Specifically, multi-point equal pressurization means that several grinding tiles 552 of multiple grinding pieces 55 can contact with the off-axis parabolic mirror while maintaining equal abutment pressure, so as to achieve uniform grinding treatment of the off-axis parabolic mirror. Further preferably, several adjustable cylinders 54 can work independently, and the grinding unit composed of multiple grinding pieces 55 can work alternately at intervals. Preferably, the adjustable cylinder 54 changes its support length and support strength by adjusting the inflation amount, so that several grinding tiles 552 corresponding thereto can abut against the off-axis parabolic mirror under the condition of equal abutment pressure. Preferably, a grating distance measuring fixed ruler and a grating distance measuring moving ruler are respectively provided on the fixed-length rod body and the supporting disc 52 of the first hydraulic transverse main rod 51. The grating distance measuring unit can accurately obtain the translational elongation generated by the variable grinding assembly 5, so as to accurately control the transverse elongation distance and assist in positioning the grinding station where the variable grinding assembly 5 abuts against the off-axis parabolic mirror.

[0040] like Figure 5 As shown, the second forming support mechanism 53 includes a lifting threaded rod 531, an internal threaded sleeve 532, an external toothed ring 533, a rotation drive unit 534 and a guide plug plate 535. A plurality of lifting threaded rods 531 are arranged on the support disc 52 in a staggered array in a manner corresponding to the polishing tile 552. The internal threaded sleeve 532 is threadedly sleeved on the lifting threaded rod 531, and the internal threaded sleeve 532 is rotatably connected to the support disc 52. An external toothed ring 533 is also fixedly sleeved on the tube body of the internal threaded sleeve 532. The external toothed ring 533 is meshed with a transmission gear of a rotation drive unit 534 embedded in the support disc 52. The external toothed ring 533 drives the internal threaded sleeve 532 to deflect around its own axis under the drive of the rotation drive unit 534. Preferably, the guide plug plate 535 is detachably mounted on the surface of the support disc 52 away from the internal threaded sleeve 532. The guide plug plate 535 movably inserts part of its plate body into the guide groove provided on the side wall of the lifting threaded rod 531 in a manner that the plate body and the axis of the lifting threaded rod 531 are coplanar, so that the guide plug plate 535 can limit the movement direction of the lifting threaded rod 531. Preferably, the lifting threaded rod 531 can undergo axial translation under the rotation drive of the internal threaded sleeve 532 and the guide limit of the guide plug plate 535, so that the axial translation distance of the lifting threaded rod 531 can be highly accurately limited by controlling the rotation amount of the rotation drive unit 534, so that the rod ends of the plurality of lifting threaded rods 531 arranged in a staggered array can construct a curved surface profile by positioning a plurality of coordinate points.

[0041] like Figure 6As shown, the adjustable cylinder 54 includes a cylinder body 541, a piston support column 542, an air intake pipe 543, an exhaust pipe 544, an air intake solenoid valve 545, an exhaust solenoid valve 546, a pressurized gas chamber 547, a pressurized air pump 548 and a gas delivery main pipe 549. Preferably, the piston support column 542 is inserted in the cylinder body 541 so as to be axially movably. The inner cavity space of the cylinder body 541 that is not filled by the piston support column 542 is the gas chamber for accommodating pressurized gas. The piston support column 542 can be partially moved out of the cylinder body 541 under the push of the pressurized gas in the gas chamber, and the supporting force of the piston support column 542 is also provided by the pressurized gas. An air intake pipe 543 and an exhaust pipe 544, both of which are connected to the gas chamber, are inserted on both sides of the cylinder body 541. An air intake solenoid valve 545 is provided in the air intake pipe 543 to limit the gas input into the gas chamber. An exhaust solenoid valve 546 for limiting the gas from being discharged from the gas chamber is provided in the exhaust pipe 544. Preferably, a plurality of cylinder bodies 541 are installed at the end of the lifting threaded rod 531 in a one-to-one correspondence with the lifting threaded rods 531 arranged in a staggered array. Further preferably, the air intake pipes 543 respectively connected to different cylinder bodies 541 are connected to the gas supply main pipe 549 in parallel. The gas supply main pipe 549 is connected to the pressurized gas chamber 547 through the air guide pipeline of the pressurized air pump 548, so that the gas supply main pipe 549 can maintain the air pressure state of its lumen by using the pressurized air pump 548 that delivers pressurized gas to its lumen. Further preferably, the pressurized gas chamber 547 is also connected to a plurality of exhaust pipes 544 in parallel, so that the pressurized gas chamber 547 can also recover the gas output from the exhaust pipe 544. Further preferably, both the air intake solenoid valve 545 and the exhaust solenoid valve 546 are one-way air guide valves. Specifically, the air pressure strength in the gas supply main pipe 549 is always associated with the magnitude of the pressing force of the grinding tile 552 during operation, so that the supporting force provided by the gas in the cylinder body 541 can ensure that the grinding tile 552 is pressed against the off-axis parabolic mirror surface effectively and with a constant force. The adjustable cylinder 54 provided in the present application can effectively improve the positioning accuracy and grinding quality of the grinding tile 552, improve the grinding efficiency, and reduce the production time and production cost.

[0042] Preferably, when the gas in the cylinder body 541 is not sufficient to push the piston support column 542 to move out of the cylinder body 541 to a specific length and / or cannot provide sufficient supporting force for the piston support column 542, the intake solenoid valve 545 arranged in the intake pipe 543 is opened, so that the pressurized gas in the gas supply main pipe 549 is continuously input into the cylinder body 541, thereby increasing the gas pressure intensity in the cylinder body 541, forcing the piston support column 542 to move further out, and the increase in the gas pressure in the cylinder body 541 also increases the size of the supporting force possessed by the piston support column 542. Preferably, when the second forming support mechanism 53 has been positioned at the working position, the position error is compensated by increasing or decreasing the amount of gas in the gas chamber defined by the cylinder body 541, so that the second forming support mechanism 53 and the adjustable cylinder 54 cooperate to pressurize the polishing piece 55 against the off-axis parabolic mirror to be polished in a multi-point equal pressurization manner, that is, the multiple piston support columns 542 are pushed by the gas in the cylinder body 541 to adjust the specific positions of the polishing tiles 552 in a one-to-one correspondence with the multiple polishing tiles 552, thereby effectively compensating for the position error of the polishing tiles 552, so that the multiple polishing tiles 552 can maintain effective abutment contact with different points of the off-axis parabolic mirror in a staggered point matrix distribution and have equal abutment pressure, and the multiple polishing tiles 552 can maintain a roughly equal polishing capacity, thereby improving the polishing accuracy of the polishing tiles 552, reducing repeated invalid polishing and secondary compensatory polishing, and improving the polishing efficiency and quality. The present application increases the gas pressure in the gas chamber so that the gas chamber can maintain an isobaric state with the gas supply main pipe 549. The piston support column 542 partially moves out of the cylinder body 541 under the action of the high-pressure gas in the gas chamber. The piston support column 542 limits the grinding position of the grinding piece 55 in a manner that can provide a stable supporting force, thereby achieving a micro-adjustment compensation for the position error of the grinding piece 55, and ensuring the accuracy of the support positioning and the stability of the supporting force. The positioning error refers to the error amount of the extension length provided by the support structure and the wear amount during the grinding feed process. The adjustable cylinder 54 provided in the present application can adjust the positioning error in real time, ensuring the accuracy of the working positioning of the grinding tile 552.

[0043] Further preferably, a positioning spring capable of positioning the piston support column 542 at the initial position inside the cylinder body 541 is provided, and the positioning spring can limit the initial length dimension of the adjustable cylinder 54. Further preferably, the piston support column 542 includes a metal support column and a piston head sleeved on the insertion front end of the metal support column. Preferably, when performing actual work, a plurality of grinding tiles 552 are firstly pressed against the off-axis parabolic mirror surface in a staggered array distribution manner. The adjustable cylinder 54 compensates for the lateral movement error of the first hydraulic lateral movement main rod 51 and the curved surface forming error of the second forming support mechanism 53 by means of pressurization and displacement or decompression and retraction, ensuring that the grinding tiles 552 at different points can effectively press against the off-axis parabolic mirror surface of the workpiece to be polished, and the adjustable cylinder 54 also ensures the consistency of the pressurization force, so that the grinding ability and grinding effect of the plurality of grinding tiles 552 under the pressurization state remain roughly equal, avoiding the problem of insufficient or excessive local polishing.

[0044] like Figure 4 and Figure 7As shown, the polishing member 55 includes an elastic strip 551, a polishing tile 552 and a pressure detection unit 553. A plurality of pressure detection units 553 are arranged at intervals on the elastic strip 551. Specifically, a polishing tile 552 with a micro-arc surface is arranged on the side of the pressure detection unit 553 away from the elastic strip 551. Preferably, the polishing tile 552 is arranged in a manner corresponding to the adjustable cylinder 54. Further preferably, a plurality of elastic strips 551 are arranged annularly at intervals on the polishing surface. The polishing tile 552 is arranged in an annular staggered array on the polishing surface corresponding to the variable surface contour defined by the second forming support mechanism 53, so that a plurality of polishing tiles 552 in the same annular surface area can perform multiple polishing on the off-axis parabolic mirror surface within a certain rotation period, thereby improving the overall polishing efficiency. Specifically, the polishing tiles 552 correspond to the adjustable cylinders 54 one by one, and the polishing tiles 552 can be independently moved and pressed against each other under the drive of the adjustable cylinders 54, so that the polishing tiles 552 with micro-arc surfaces can be adjusted to effectively press against the off-axis parabolic mirror surface. Further preferably, the side of the elastic strip 551 away from the pressure detection unit 553 is connected to an adjustable cylinder 54 co-distributed with the pressure detection unit 553. The elastic strip 551 can be reconfigured to form an arc strip profile that matches the off-axis parabolic mirror surface of different curvatures under the telescopic drive of the adjustable cylinder 54, ensuring the co-linear distribution and resettable movement of a plurality of polishing tiles 552 on the same elastic strip 551. The pressure detection unit 553 provided in the present application can monitor the abutment pressure of the corresponding grinding tile 552 respectively, so that the control module can adjust the opening and closing of the air intake solenoid valve 545 associated with the cylinder 541 at the corresponding point according to the pressure data of the pressure detection unit 553, thereby adjusting the inflation volume and gas pressure in the cylinder 541, and achieving equalization of the abutment force of several grinding tiles 552. It is ensured that several grinding tiles 552 working at the same time can perform grinding processing with the same friction intensity or cutting intensity at the same time by providing the same abutment pressure, thereby improving the grinding uniformity and the quality of mirror grinding.

[0045] The variable polishing assembly 5 provided in the present application can adjust the positions of a plurality of polishing tiles 552 according to the off-axis parabolic mirror profile data obtained by the calibration distance measuring assembly 4, so that a plurality of polishing tiles 552 construct a polishing surface matching the off-axis parabolic mirror in a manner with an axial position deviation. The variable polishing assembly 5 can adjustably construct a polishing surface matching the off-axis parabolic mirror, so that a plurality of polishing tiles 552 can abut on the off-axis parabolic mirror of the workpiece in a manner of multi-point abutment contact and equal abutment pressure. When the workpiece rotates following the rotating spindle 2, a plurality of polishing tiles 552 and the off-axis parabolic mirror generate sliding friction, so that the polishing tiles 552 can continuously polish the off-axis parabolic mirror.

[0046] Preferably, the several grinding tiles 552 on two adjacent elastic strips 551 are staggered, and the two adjacent elastic strips 551 and the grinding tiles 552 form a group of grinding units. Specifically, the multiple grinding tiles 552 belonging to two adjacent grinding pieces 55 included in a group of grinding units are staggered on two radius lines of the same grinding circular surface or two radius lines of a grinding curved surface with a circular outer contour, so that the grinding annular surfaces corresponding to the several grinding tiles 552 can cover the entire off-axis parabolic mirror surface to be processed in a partially overlapping manner. Further preferably, two adjacent groups of grinding units grind the off-axis parabolic mirror surfaces of the same workpiece or different workpieces in an alternating manner. Figure 7 As shown, 12 grinding pieces 55 are supported in an annular interval on the support disk 52, wherein the midpoints of the grinding tiles 552 of two adjacent grinding pieces 55 are respectively on different circumferential lines, and the two adjacent grinding pieces 55 are set as a group of grinding units; the circumferential lines where the midpoints of the grinding tiles 552 set by the two adjacent groups of grinding units are located overlap, and the two adjacent groups of grinding units can be set to work alternately. The above content defines that the 12 grinding pieces 55 constitute 6 grinding units arranged in an annular interval, and two adjacent grinding units work alternately in multiple continuous grinding cycles, that is, a single grinding cycle uses three equally spaced grinding units for grinding, and the next grinding cycle uses another three equally spaced grinding units for grinding, which ensures full coverage of the entire off-axis parabolic mirror surface and improves the grinding uniformity and grinding efficiency of the entire off-axis parabolic mirror surface. The present application develops a working mechanism in which multiple groups of grinding units work alternately. While continuously grinding a number of workpieces using the variable grinding assembly 5, intermittent cooling buffering of the multiple groups of grinding units can be achieved, thereby effectively avoiding overheating and strain that may occur to the grinding piece 55 during the continuous grinding process, and reducing the risk of decreased grinding efficiency due to overheating and strain.

[0047] Preferably, a special-shaped polishing tile 552 capable of polishing the face center area of ​​the off-axis parabolic mirror is provided at one end of the elastic strip 551 close to the center of the polishing curved surface, so that the special-shaped polishing tiles 552 arranged at intervals in the annular direction can ensure the polishing coverage of the off-axis parabolic mirror in a manner without position conflict and effectively covering the face center area of ​​the off-axis parabolic mirror. In a preferred embodiment, there is no special-shaped polishing tile 552 on the elastic strip 551, and a separate strip-shaped polishing tile 552 is supported at the face center position of the support disc 52 by the second forming support mechanism 53 and the adjustable cylinder 54, and the polishing tile 552 is used to polish the face center area of ​​the off-axis parabolic mirror. Specifically, the length direction of the strip-shaped polishing tile 552 does not overlap with the length direction of the elastic strip 551, and there is no position interference between them.

[0048] Preferably, multiple staggered and overlapping polishing annular surfaces refer to polishing annular surfaces defined by several polishing tiles 552 on two adjacent elastic strips 551, and there is partial overlap of the annular surface areas, that is, the inner diameter of the polishing annular surface defined by one polishing tile 552 is smaller than the outer diameter of the polishing annular surface defined by another polishing tile 552 located radially inside thereof, and the outer diameter of the polishing annular surface defined by the polishing tile 552 is larger than the inner diameter of the polishing annular surface defined by another polishing tile 552 located outside thereof, so that the multiple polishing annular surfaces defined by several polishing tiles 552 cover the entire off-axis parabolic mirror surface in a partially overlapping manner, thereby ensuring the uniformity and completeness of the polishing of the off-axis parabolic mirror surface.

[0049] like Figure 8 As shown, the cleaning assembly 6 includes an ultrasonic cleaning tank 61, a reciprocating suction mechanism 62 and a dehumidifying mechanism 63. Preferably, a reciprocating suction mechanism 62 and a dehumidifying mechanism 63 are respectively arranged on both sides of the ultrasonic cleaning tank 61. The reciprocating suction mechanism 62 is connected to the tank cavity of the ultrasonic cleaning tank 61, so that the reciprocating suction mechanism 62 periodically changes the liquid level in the ultrasonic cleaning tank 61 in a manner that can be adjusted to suck or refill the cleaning liquid. The dehumidifying mechanism 63 periodically moves into the ultrasonic cleaning tank 61 in a manner that can be linked with the reciprocating suction mechanism 62, that is, the reciprocating suction mechanism 62 can be arranged in linkage with the dehumidifying mechanism 63, and the dehumidifying mechanism 63 is synchronously moved into the ultrasonic cleaning tank 61 while the reciprocating suction mechanism 62 extracts the cleaning liquid. The dehumidifying mechanism 63 blows and dries the off-axis paraboloid of the workpiece in the ultrasonic cleaning tank 61 and above the cleaning liquid by directional external exhaust of dry airflow.

[0050] like Figure 8 and Fig. 9As shown, notch grooves 611 are provided on both sides of the ultrasonic cleaning tank 61 for the coaxial clamping assembly 3 and the workpiece to move in and out of the groove cavity in the process of following the deflection movement of the rotating main shaft 2. A baffle 612 that can adjustably shield the notch groove 611 is also slidably connected to the side groove wall of the ultrasonic cleaning tank 61. After the workpiece passes through the notch groove 611 and enters the groove cavity of the ultrasonic cleaning tank 61, the reciprocating suction mechanism 62 injects cleaning liquid into the ultrasonic cleaning tank 61, and the liquid level in the ultrasonic cleaning tank 61 rises, so that the cleaning liquid submerges the off-axis parabolic mirror surface of the workpiece. In the process of the reciprocating suction mechanism 62 re-injecting the cleaning liquid into the ultrasonic cleaning tank 61, the reciprocating suction mechanism 62 also synchronously drives the baffle 612 to move horizontally, so that the baffle 612 shields the notch groove 611 to prevent the cleaning liquid with the rising liquid level from leaking from the notch groove 611. After the cleaning operation is completed, the reciprocating suction mechanism 62 works again to suck and transfer part of the cleaning liquid in the ultrasonic cleaning tank 61, and the liquid level of the cleaning liquid in the ultrasonic cleaning tank 61 drops, exposing the off-axis parabolic mirror surface again, and the off-axis parabolic mirror surface is blown and dried by the dehumidification mechanism 63 linked to the suction action of the reciprocating suction mechanism 62. In the process of the reciprocating suction mechanism 62 sucking the cleaning liquid, the baffle 612 removes the shielding of the notch groove 611 by synchronous movement, so that the coaxial clamping assembly 3 and the workpiece can be moved out of the ultrasonic cleaning tank 61 when further deflection movement occurs.

[0051] like Figure 8 and Fig. 9As shown, the reciprocating suction mechanism 62 includes a suction piston cylinder 621, a suction hydraulic column 622 and a linkage rod 623. The port of the suction piston cylinder 621 is connected to the tank cavity of the ultrasonic cleaning tank 61, and the piston column of the suction piston cylinder 621 is connected to the suction hydraulic column 622. The piston column of the suction piston cylinder 621 can move into or out of the cylinder cavity of the suction piston cylinder 621 under the drive of the suction hydraulic column 622, and the cylinder cavity volume of the suction piston cylinder 621 can be adjusted to change, so as to realize the suction and injection of the cleaning liquid, and effectively change the liquid level height in the ultrasonic cleaning tank 61. Further preferably, the moving end of the suction hydraulic column 622 is connected to a linkage rod 623, and the linkage rod 623 is also connected to the baffle 612 and the dehumidification mechanism 63, so that the baffle 612 and the dehumidification mechanism 63 move synchronously with the suction hydraulic column 622. The exhaust disc 631 of the dehumidification mechanism 63 is connected to the linkage rod 623, and a baffle 632 is provided on one side of the exhaust disc 631 close to the reciprocating suction mechanism 62. The baffle 632 can adjustably block the through-port in the process of following the reciprocating translation of the exhaust disc 631. The through-port is provided on the wall of the ultrasonic cleaning tank 61, and is used for the exhaust disc 631 to be adjustable to move in or out of the ultrasonic cleaning tank 61. Preferably, a plurality of exhaust nozzles are arranged in an array on the exhaust disc 631 to facilitate the directional output of the purge airflow, so that the dry airflow from bottom to top can take away the residual cleaning liquid of the off-axis parabolic mirror. Preferably, the exhaust nozzle arranged on the exhaust disc 631 is connected to the external gas warehouse through the air supply pipeline, and a one-way solenoid valve is provided in the air supply pipeline, and the one-way solenoid valve can be opened under the control of the control module to output the dry airflow in a directional manner.

[0052] Preferably, the secondary polishing assembly 7 comprises a mounting seat 71 mounted on the mounting ring plate 12 and a parabolic magnetorheological polishing unit 72 detachably disposed on the mounting seat 71. Preferably, the parabolic magnetorheological polishing unit 72 can directly select an existing roller-type magnetorheological polishing device capable of curved surface processing, which can polish the parabolic mirror surface during the rotation of the workpiece.

[0053] Preferably, the terahertz imaging reflector mirror processing equipment provided by the present application is also connected to a control module. The control module is connected to the data of the functional components of the present application, and it can adjust the motion state and motion parameters of the functional components. The control module controls different components to perform different movements in different time periods according to the data information fed back or collected by the functional components. Specifically, the control module can control the deflection motor 13 to perform intermittent deflection according to a pre-set motion cycle, and drive the rotating spindle 2 to perform deflection movement synchronously. The control module can drive the driving rotating spindle 2 in the grinding station to rotate, so that the workpiece can rotate when the variable grinding assembly 5 is against the off-axis parabolic mirror surface, realizing the relative movement between the workpiece and the variable grinding assembly 5, so that the variable grinding assembly 5 can effectively grind the off-axis parabolic mirror surface. The control module can also adjust the working state of the calibration distance measuring component 4, so that the infrared distance measuring unit 42 can perform the workpiece station calibration and measure the distance between it and the workpiece when the coaxial clamping component 3 holding the workpiece is installed on the rotating spindle 2, and the spacing data is fed back to the control module; the control module controls the two mirror profile scanning units 43 to perform dual-station image acquisition to obtain the initial surface parameters of the off-axis parabolic mirror. The control module can use the spacing data and the initial surface parameters to control the telescopic translation of the first hydraulic lateral displacement main rod 51 and the second forming support mechanism 53 respectively, and define the grinding surface that can be against the off-axis parabolic mirror. In addition, the control module can also control the inflation action or exhaust action of the adjustable cylinder 54, so that the gas chambers defined by different cylinder bodies 541 are inflated at equal pressure at the same stage or different stages, so as to realize the compensation of the station error of the grinding piece 55 by the adjustable cylinder 54 or the alternating operation of adjacent grinding units.

[0054] The present invention is not limited to the above optional implementation modes. Anyone can derive other various forms of products under the enlightenment of the present invention. However, no matter what changes are made in the shape or structure, all technical solutions that fall within the scope of the claims of the present invention fall within the protection scope of the present invention. Those skilled in the art should understand that the specification of the present invention and its drawings are illustrative and do not constitute limitations on the claims. The scope of protection of the present invention is defined by the claims and their equivalents. Throughout the text, the features guided by "preferably" are only an optional method and should not be understood as having to be set. Therefore, the applicant reserves the right to abandon or delete the relevant preferred features at any time.

Claims

1. A terahertz imaging mirror surface processing device, including a deflection main frame (1) capable of driving a rotating main shaft (2) to perform a deflection movement, characterized in that a plurality of the rotating main shafts (2) are circumferentially and spacedly arranged around the deflection axis (11) of the deflection main frame (1), and the rotating main shafts (2) are positioned in a manner that can follow the synchronous deflection of the deflection axis (11) to define a plurality of continuously processed workstations evenly distributed at equal intervals; at one end of the rotating main shaft (2), a coaxial clamping assembly (3) capable of adjusting the workstations of the off-axis parabolic mirror surface of the workpiece is detachably installed, and the coaxial clamping assembly (3) can define the relative workstations where the axis of the off-axis parabolic mirror surface is coaxial with the rotation center of the rotating main shaft (2); a table board (32) is connected to the base (31) of the coaxial clamping assembly (3), and a sliding plate (33) capable of performing adjustable lateral movement is installed on the table board (32); a deflection clamping member (34) is pivotally connected to the sliding plate (33), and an angle adjusting member (35) capable of defining the inclination angle of the deflection clamping member (34) on the sliding plate (33) is arranged on the side of the deflection clamping member (34). The angle adjusting member (35) is slidably rail-connected to the sliding plate (33) in a manner that can perform directional translation. The sliding plate (33) can cooperate with the angle adjusting member (35) to correct the workstations of the workpiece clamped by the deflection clamping member (34), so that the axis of the off-axis parabolic mirror surface of the workpiece coincides with the rotation center of the rotating main shaft (2); the angle adjusting member (35) includes a triangular plate (351) slidably rail-connected to the sliding plate (33), a longitudinal plate (352) connected to the two parallel triangular plates (351), a transverse movement driving rod (353) rotatably connected to the longitudinal plate (352), and a positioning vertical plate (354) supported on the sliding plate (33). Among them, the transverse movement driving rod (353) is threadedly inserted through the positioning vertical plate (354); the transverse movement driving rod (353) positions the working position of the triangular plate (351) on the sliding plate (33) by changing its relative position with the positioning vertical plate (354). An inclined strip groove (355) is formed on the plate surface of the triangular plate (351) facing the U-shaped plate frame (341), and a round shaft (346) is slidably inserted into the inclined strip groove (355). Thus, when the triangular plate (351) performs directional translation, relative movement occurs between the round shaft (346) and the inclined strip groove (355), so that the round shaft (346) drives the U-shaped plate frame (341) to perform a deflection movement under the drive of the inclined strip groove (355); on the radially outer side of the deflection axis (11), a calibration ranging assembly (4), a variable grinding assembly (5), a cleaning assembly (6), and a secondary polishing assembly (7) that are circumferentially and spacedly arranged and are matched with the plurality of continuously processed workstations positioned by the rotating main shaft (2) and can continuously process the off-axis parabolic mirror surface are also provided; The calibration distance measuring component (4) is positioned directly above the deflection axis (11) via a mounting ring plate (12), so that it can collect initial surface parameters of the off-axis parabolic mirror; The variable grinding component (5) constructs a grinding curved surface that matches the off-axis parabolic mirror surface according to the initial surface parameters obtained by the calibration distance measuring component (4); when the workpiece follows the rotation spindle (2) to deflect and move to the grinding station, the variable grinding component (5) presses the constructed grinding curved surface against the off-axis parabolic mirror surface of the workpiece by means of adjustable lateral displacement and multi-point pressure, and when the workpiece follows the rotation spindle (2), the variable grinding component (5) uniformly grinds the off-axis parabolic mirror surface in a fully covered manner by forming a plurality of offset and overlapping grinding annular surfaces; The variable grinding assembly (5) comprises a first hydraulic traverse main rod (51), a support disc (52), a second forming support mechanism (53), an adjustable cylinder (54) and a grinding piece (55), wherein: The first hydraulic traverse main rod (51) is detachably mounted on the mounting ring plate (12), and the moving end of the first hydraulic traverse main rod (51) is connected to the supporting disc (52) whose axial projection can cover the off-axis parabolic mirror surface of the workpiece; A plurality of second forming support mechanisms (53) capable of cooperating to construct a variable curved surface profile are inserted in a lattice on the support disc (52); the moving end of the second forming support mechanism (53) close to the off-axis parabola is connected to the grinding piece (55) via the adjustable cylinder (54) which is arranged in the same lattice as the second forming support mechanism (53) and is capable of compensating for the positioning error of the second forming support mechanism (53).

2. The terahertz imaging mirror surface processing device according to claim 1, characterized in that: The polishing member (55) comprises an elastic strip (551), a polishing tile (552) and a pressure detection unit (553), wherein: A plurality of the pressure detection units (553) are arranged at intervals on the elastic strip plate (551), and a polishing tile (552) is arranged on a side of the pressure detection unit (553) away from the elastic strip plate (551), and a plurality of the polishing tiles (552) on two adjacent elastic strip plates (551) are staggered.

3. The terahertz imaging mirror surface processing device according to claim 2, characterized in that: The first mounting base plate (41) of the calibration distance measuring assembly (4) is detachably connected to the mounting ring plate (12), and an infrared distance measuring unit (42) coaxial with the rotation center of the rotating spindle (2) is provided on the lower surface of the first mounting base plate (41); Two mirror profile scanning units (43) are symmetrically arranged on both sides of the infrared distance measuring unit (42).

4. The terahertz imaging reflector mirror processing device according to claim 3, characterized in that: The cleaning component (6) comprises an ultrasonic cleaning tank (61), a reciprocating suction mechanism (62) and a dehumidification mechanism (63), wherein: The reciprocating suction mechanism (62) and the dehumidification mechanism (63) are respectively arranged on both sides of the ultrasonic cleaning tank (61); the reciprocating suction mechanism (62) is connected to the ultrasonic cleaning tank (61), so that the reciprocating suction mechanism (62) periodically changes the liquid level in the ultrasonic cleaning tank (61) by adjusting the suction or refilling of the cleaning liquid.

5. The terahertz imaging reflector mirror processing device according to claim 4, characterized in that: The dehumidification mechanism (63) is moved into the ultrasonic cleaning tank (61) in a manner that can be linked with the reciprocating suction mechanism (62), so that the dehumidification mechanism (63) can blow air to dry the off-axis parabolic mirror surface.

6. The terahertz imaging reflector mirror processing device according to claim 5, characterized in that: The secondary polishing assembly (7) comprises a mounting seat (71) mounted on the mounting ring plate (12) and a parabolic magnetorheological polishing unit (72) detachably arranged on the mounting seat (71).

Images