A semiconductor polishing liquid supply and delivery device

Abstract

The present invention belongs to the field of semiconductor grinding technology, and discloses a semiconductor grinding liquid supply and delivery device, including a base, a grinding groove is opened in the middle of the upper surface of the base, the inner wall of the grinding groove is fixedly connected to a fixed clamping seat, a plurality of telescopic rods are fixedly installed on the upper surface of the base, and the telescopic ends of the plurality of telescopic rods are fixedly connected to a fixed liquid ring. The present invention uses a floating strong magnetic block to float on the surface of the grinding liquid. When the grinding liquid inside the liquid storage shell is consumed, the floating strong magnetic block will move downward with the liquid surface, thereby driving the strong magnet to move downward, and the indication of the pointer will change, thereby displaying the remaining amount of the grinding liquid in real time, thereby solving the problem that the chemical additives contained in the existing grinding liquid are corrosive and will corrode the material of the liquid level sensor, and the grinding particles will also block the detection part or connecting pipe of the sensor, affecting the normal operation of the sensor, and seriously causing the sensor to fail directly.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor polishing, and in particular relates to a semiconductor polishing liquid supply and delivery device. Background Art

[0002] Chemical Mechanical Polishing (CMP), also known as Chemical Mechanical Planarization, is one of the methods for flattening the wafer surface. Chemical Mechanical Polishing can greatly reduce the roughness of the wafer surface to achieve a high-precision flattening effect. During chemical mechanical polishing, the polishing liquid supply system will output the polishing liquid to the polishing area in the CMP machine, and the polishing liquid can effectively reduce the unevenness of the wafer surface.

[0003] Semiconductor polishing fluid is often stored in a light-proof sealed container to prevent oxidation by air and decomposition by light. In order to observe the remaining amount of polishing fluid after being pumped out of the light-proof sealed container by the liquid pump, a liquid level sensor is often installed at the bottom. However, since the chemical additives contained in the polishing fluid are corrosive, they will corrode the material of the sensor. The abrasive particles in the polishing fluid will also block the detection part of the sensor or the connecting pipe, affecting the normal operation of the sensor, and in severe cases, causing the sensor to fail directly. Secondly, the supply pressure of the polishing fluid needs to be kept stable and avoid fluctuations to ensure the uniform distribution of the polishing fluid. However, as the polishing fluid inside the container is consumed, the inlet pressure of the liquid pump will decrease, which will seriously affect the actual supply pressure of the pump. The decrease in supply pressure will lead to a decrease in the polishing rate and a worse polishing effect. Summary of the invention

[0004] The object of the present invention is to provide a semiconductor polishing liquid supply and delivery device to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a semiconductor polishing liquid supply and delivery device, comprising a base, a polishing groove is opened in the middle of the upper surface of the base, a fixed clamping seat is fixedly connected to the inner wall of the polishing groove, a plurality of telescopic rods are fixedly installed on the upper surface of the base, a plurality of telescopic ends of the telescopic rods are fixedly connected to a fixed liquid ring, a plurality of connecting plates are fixedly connected to the inner side of the fixed liquid ring, a motor is fixedly installed on the inner end of the connecting plate, a polishing head is fixedly connected to the bottom end of the motor output shaft, a liquid outlet pipe is connected to the lower surface of the fixed liquid ring, and the liquid outlet pipe The lower end of the base is movably sleeved with a spray head, the left side of the base is fixedly connected to a liquid storage shell, the left side of the liquid storage shell is fixedly installed with a liquid inlet pipe, the back side of the liquid storage shell is connected to a liquid supply pipe, the right end of the liquid supply pipe is connected to a liquid pump, the upper surface of the liquid pump is fixedly connected to a connecting hose, the upper surface of the liquid storage shell is fixedly connected to an air storage cavity, a one-way valve is fixedly installed between the liquid storage shell and the air storage cavity, the front side of the air storage cavity is connected to an air outlet pipe, the lower end of the air outlet pipe is fixedly connected to a control mechanism, the front side of the liquid storage shell is connected to two connecting pipes, and the right end of the connecting pipe is connected to a connecting cavity.

[0006] Preferably, a floating strong magnetic block is slidably connected to the middle part of the connecting cavity, two limit plates are fixedly connected to the inside of the connecting cavity, a sliding groove is fixedly connected to the right side of the connecting cavity, a strong magnet is slidably connected to the middle part of the sliding groove, a pointer is fixedly connected to the right side of the strong magnet, a conductive plate is fixedly connected to the lower surface of the pointer, and an alarm is fixedly installed on the front bottom end of the connecting cavity.

[0007] Preferably, the control mechanism includes a rectangular block, a sliding block is slidably connected inside the rectangular block, two compression springs are fixedly connected to the right side of the sliding block, the compression springs are fixedly connected to the inner wall of the rectangular block, a C-shaped tube is fixedly connected to the left side of the rectangular block, a fixing ring is fixedly connected to the lower end of the C-shaped tube, an I-shaped rod is slidably connected to the middle part of the fixing ring, the sliding block is slidably connected to the upper end of the C-shaped tube, the middle part of the rectangular block is fixedly connected to the liquid storage shell and communicated with the interior thereof, and the C-shaped tube is fixedly connected to the liquid storage shell.

[0008] Preferably, a waste liquid chamber is provided inside the base, a plurality of through holes are provided at the bottom of the grinding tank, and the connecting chamber is fixedly connected to the base.

[0009] Preferably, the connecting hose is communicated with the fixed liquid ring, the connecting hose is made of rubber material, and the liquid pump is fixedly connected to the back side of the base.

[0010] Preferably, the floating strong magnetic block absorbs the strong magnet and the upper surface is in the same horizontal plane, the front of the connecting cavity is engraved with a liquid level scale line, and the opening direction of the one-way valve is from the liquid storage shell to the air storage cavity.

[0011] Preferably, the lower end of the C-shaped tube penetrates into the liquid storage shell, the C-shaped tube between the left side of the rectangular block and the I-shaped rod is filled with hydraulic oil, and a circular hole is opened in the middle of the sliding block.

[0012] The beneficial effects of the present invention are as follows:

[0013] 1. The present invention has a floating strong magnetic block that will float on the surface of the grinding liquid. When the grinding liquid inside the liquid storage shell is consumed, the floating strong magnetic block will move downward with the liquid surface, thereby driving the strong magnet to move downward, causing the indication of the pointer to change, thereby displaying the remaining amount of the grinding liquid in real time. When the pointer is at the bottom, the upper end of the alarm will contact the conductive plate, causing the alarm to sound an alarm, and the liquid pump will stop working at the same time, thereby solving the problem that the chemical additives contained in the existing grinding liquid are corrosive and will corrode the material of the liquid level sensor, and the grinding particles will also block the detection part or connecting pipe of the sensor, affecting the normal operation of the sensor, and seriously causing the sensor to fail directly.

[0014] 2. When the grinding liquid inside the liquid storage shell of the present invention is consumed, the pressure on the right end of the I-shaped rod will decrease, and the compression spring will push the sliding block to move leftward. The hydraulic oil inside the C-shaped tube will push the I-shaped rod to move rightward, and the sliding block will move leftward. The opening formed by the circular hole of the sliding block and the rectangular block connects the air outlet pipe with the liquid storage shell, so that the protective gas inside the air storage cavity enters the liquid storage shell, thereby increasing the pressure at the right end of the I-shaped rod to the initial value, that is, the pressure of the grinding liquid at the left end of the liquid supply pipe remains unchanged, thereby solving the problem that as the grinding liquid inside the container is consumed, the inlet pressure of the liquid pump will decrease, thereby seriously affecting the actual liquid supply pressure of the pump, and the decrease in supply pressure will lead to a decrease in grinding rate and a deterioration in grinding effect.

[0015] 3. In the present invention, as the grinding liquid enters the interior of the liquid storage shell, the floating strong magnetic block will move upward. At the same time, the pressure of the protective gas above the interior of the liquid storage shell is greater than the initial pressure on the right end of the I-shaped rod. No opening will be formed between the circular hole of the sliding block and the rectangular block, but the one-way valve will be opened, so that the protective gas above the interior of the liquid storage shell enters the interior of the gas storage cavity, thereby realizing the recycling of the protective gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structural appearance of the present invention;

[0017] Figure 2 It is a schematic top view of the structure of the present invention;

[0018] Figure 3 A half-section schematic diagram of the air storage chamber of the present invention;

[0019] Figure 4 A half-section schematic diagram of the control mechanism of the present invention;

[0020] Figure 5 It is a half-section schematic diagram of the communicating cavity of the present invention.

[0021] In the figure: 1. base; 2. grinding groove; 3. fixed clamping seat; 4. telescopic rod; 5. fixed liquid ring; 6. connecting plate; 7. motor; 8. grinding head; 9. liquid outlet pipe; 10. nozzle; 11. liquid storage shell; 12. liquid inlet pipe; 13. liquid supply pipe; 14. liquid pump; 15. connecting hose; 16. air storage chamber; 17. one-way valve; 18. air outlet pipe; 19. control mechanism; 191. rectangular block; 192. sliding block; 193. compression spring; 194. C-shaped tube; 195. fixed ring; 196. I-shaped rod; 20. connecting pipe; 21. connecting chamber; 22. floating strong magnetic block; 23. limit plate; 24. sliding groove; 25. strong magnet; 26. pointer; 27. conductive plate; 28. alarm. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] like Figures 1 to 5As shown, an embodiment of the present invention provides a semiconductor polishing liquid supply and delivery device, including a base 1, a polishing groove 2 is opened in the middle of the upper surface of the base 1, a fixed clamping seat 3 is fixedly connected to the inner wall of the polishing groove 2, a plurality of telescopic rods 4 are fixedly installed on the upper surface of the base 1, a fixed liquid ring 5 is fixedly connected to the telescopic ends of the plurality of telescopic rods 4, a plurality of connecting plates 6 are fixedly connected to the inner side of the fixed liquid ring 5, a motor 7 is fixedly installed on the inner end of the connecting plate 6, a polishing head 8 is fixedly connected to the bottom end of the output shaft of the motor 7, a liquid outlet pipe 9 is connected to the lower surface of the fixed liquid ring 5, a nozzle 10 is movably sleeved at the lower end of the liquid outlet pipe 9, a liquid storage shell 11 is fixedly connected to the left side of the base 1, a liquid inlet pipe 12 is fixedly installed on the left side of the liquid storage shell 11, a liquid supply pipe 13 is connected to the back side of the liquid storage shell 11, a liquid pump 14 is connected to the right end of the liquid supply pipe 13, and a connecting hose is fixedly connected to the upper surface of the liquid pump 14 15. The upper surface of the liquid storage shell 11 is fixedly connected with an air storage chamber 16, and a one-way valve 17 is fixedly installed between the liquid storage shell 11 and the air storage chamber 16. The front side of the air storage chamber 16 is connected with an air outlet pipe 18, and the lower end of the air outlet pipe 18 is fixedly connected with a control mechanism 19. The front of the liquid storage shell 11 is connected with two connecting pipes 20, and the right end of the connecting pipe 20 is connected with a connecting chamber 21. The function of the present invention is that the floating strong magnetic block 22 moves upward as the grinding liquid enters the interior of the liquid storage shell 11 through the liquid inlet pipe 12. At the same time, the pressure of the protective gas above the interior of the liquid storage shell 11 is greater than the initial pressure on the right end of the I-shaped rod 196. No opening will be formed between the circular hole of the sliding block 192 and the rectangular block 191, but the one-way valve 17 will be opened, so that the protective gas above the interior of the liquid storage shell 11 enters the interior of the air storage chamber 16, thereby realizing the recycling of the protective gas.

[0024] Among them, a floating strong magnetic block 22 is slidably connected to the middle of the connecting cavity 21, two limit plates 23 are fixedly connected inside the connecting cavity 21, a sliding groove 24 is fixedly connected to the right side of the connecting cavity 21, a strong magnet 25 is slidably connected to the middle of the sliding groove 24, a pointer 26 is fixedly connected to the right side of the strong magnet 25, a conductive plate 27 is fixedly connected to the lower surface of the pointer 26, and an alarm 28 is fixedly installed at the bottom of the front side of the connecting cavity 21. Its function is that the floating strong magnetic block 22 will float on the surface of the grinding liquid, and when the grinding liquid inside the liquid storage shell 11 is consumed, the floating strong magnetic block 22 will follow As the liquid surface moves downward, the strong magnet 25 is driven to move downward, and the indication of the pointer 26 will change, thereby displaying the remaining amount of the grinding liquid in real time. When the pointer 26 is at the lowest point, the upper end of the alarm 28 will contact the conductive plate 27, causing the alarm 28 to sound an alarm, and the liquid pump 14 will stop working at the same time, thereby solving the problem that the chemical additives contained in the existing grinding liquid are corrosive and will corrode the material of the liquid level sensor. The grinding particles will also block the detection part of the sensor or the connecting pipe, affecting the normal operation of the sensor, and in serious cases, causing the sensor to fail directly.

[0025] The control mechanism 19 includes a rectangular block 191, a sliding block 192 is slidably connected inside the rectangular block 191, two compression springs 193 are fixedly connected to the right side of the sliding block 192, the compression spring 193 is fixedly connected to the inner wall of the rectangular block 191, a C-shaped tube 194 is fixedly connected to the left side of the rectangular block 191, a fixing ring 195 is fixedly connected to the lower end of the C-shaped tube 194, an I-shaped rod 196 is slidably connected to the middle part of the fixing ring 195, the sliding block 192 is slidably connected to the upper end of the C-shaped tube 194, the middle part of the rectangular block 191 is fixedly connected to the liquid storage shell 11 and communicated with the interior thereof, the C-shaped tube 194 is fixedly connected to the liquid storage shell 11, the lower end of the C-shaped tube 194 penetrates into the interior of the liquid storage shell 11, the C-shaped tube 194 between the left side of the rectangular block 191 and the I-shaped rod 196 is filled with hydraulic oil, and the middle of the sliding block 192 is fixedly connected to the liquid storage shell 11. A circular hole is provided in the part, and its function is that when the grinding liquid inside the liquid storage shell 11 of the present invention is consumed, the pressure on the right end of the I-shaped rod 196 will decrease, and the compression spring 193 will push the sliding block 192 to move to the left, and the hydraulic oil inside the C-shaped tube 194 will push the I-shaped rod 196 to move to the right, and the sliding block 192 will move to the left. The opening formed by the circular hole of the sliding block 192 and the rectangular block 191 connects the air outlet pipe 18 with the liquid storage shell 11, so that the protective gas inside the air storage chamber 16 enters the liquid storage shell 11, so that the pressure at the right end of the I-shaped rod 196 increases to the initial value, that is, the pressure of the grinding liquid at the left end of the liquid supply pipe 13 remains unchanged, thereby solving the problem that as the grinding liquid inside the container is consumed, the inlet pressure of the liquid pump will decrease, thereby seriously affecting the actual liquid supply pressure of the pump, and the decrease in supply pressure will lead to a decrease in grinding rate and a deterioration in grinding effect.

[0026] Among them, a waste liquid chamber is opened inside the base 1, a plurality of through holes are opened at the bottom of the grinding tank 2, the connecting chamber 21 is fixedly connected to the base 1, the connecting hose 15 is connected to the fixed liquid ring 5, the connecting hose 15 is made of rubber material, and the liquid pump 14 is fixedly connected to the back of the base 1. Its function is that the used grinding liquid will flow into the waste liquid chamber through the through holes, thereby recovering the used grinding liquid.

[0027] Among them, the floating strong magnetic block 22 absorbs the strong magnet 25 and the upper surface is in the same horizontal plane, the front of the connecting cavity 21 is engraved with a liquid level scale line, and the opening direction of the one-way valve 17 is from the liquid storage shell 11 to the air storage cavity 16. Its function is that the floating strong magnetic block 22 will float on the liquid surface of the grinding liquid. When the liquid level of the grinding liquid changes, the floating strong magnetic block 22 will slide, and the floating strong magnetic block 22 absorbs the strong magnet 25, thereby causing the pointer to move up and down, and then causing the pointer reading to change. When the pointer 26 is at the bottom, the two ends of the alarm 28 will contact the conductive plate 27, so that the alarm 28 will sound an alarm, and the liquid pump 14 will stop working at the same time.

[0028] Working principle:

[0029] Before the present invention is used, a proper amount of semiconductor polishing liquid is injected into the liquid storage shell 11 through the liquid inlet pipe 12, and the maximum amount is that the floating strong magnetic block 22 contacts the upper limit plate 23. The remaining space inside the liquid storage shell 11 is filled with a protective gas with a certain pressure, and the interior of the gas storage cavity 16 is filled with a protective gas with a pressure greater than that inside the liquid storage shell 11. The pressure at the bottom of the liquid storage shell 11 is relatively large, pushing the I-shaped rod 196 to move leftward and squeezing the hydraulic oil inside the C-shaped tube 194. The hydraulic oil pushes the sliding block 192 to move rightward to put the compression spring 193 in a compressed state;

[0030] When the present invention is used, the semiconductor to be ground is placed in the notch of the fixed clamping seat 3, the fixed clamping seat 3 clamps it, the angle of the nozzle 10 is adjusted to a suitable position, the motor 7 rotates to drive the grinding head 8 to rotate, and at the same time the telescopic rod 4 shortens to drive the fixed liquid ring 5 to move downward, so that the grinding head 8 slowly moves downward and contacts the semiconductor to be ground directly below. When it is about to contact, the liquid pump 14 works to suck out the semiconductor grinding liquid inside the liquid storage shell 11 through the liquid supply pipe 13, and then pumps it into the inside of the fixed liquid ring 5 through the connecting hose 15, and finally enters the liquid outlet pipe 9. The nozzle 10 opens the semiconductor grinding liquid and sprays it on the semiconductor and the grinding head 8. When the grinding head 8 grinds the semiconductor, the grinding liquid will accelerate the grinding efficiency.

[0031] When the grinding liquid in the liquid storage shell 11 is consumed, the pressure on the right end of the I-shaped rod 196 will decrease, and the compression spring 193 will push the sliding block 192 to move to the left. The hydraulic oil in the C-shaped tube 194 will push the I-shaped rod 196 to move to the right, and the sliding block 192 will move to the left. The opening formed by the circular hole of the sliding block 192 and the rectangular block 191 will open the air outlet pipe 18 and the liquid storage shell 11, so that the protective gas in the air storage cavity 16 enters the liquid storage shell 11, thereby increasing the pressure on the right end of the I-shaped rod 196 to the initial value. During the process, the sliding block 192 will move to the right, and the I-shaped When the pressure on the right end of the rod 196 is the initial value, the opening formed by the circular hole of the sliding block 192 and the rectangular block 191 disappears, so that the air outlet pipe 18 and the liquid storage shell 11 are no longer connected, preventing the I-shaped rod 196 from being subjected to excessive pressure, and keeping the pressure of the grinding liquid at the left end of the liquid supply pipe 13 unchanged; when the grinding liquid in the liquid storage shell 11 is uniformly extracted by the liquid pump 14, the opening formed by the circular hole of the sliding block 192 and the rectangular block 191 is a fixed amount, so that the protective gas in the gas storage chamber 16 continuously enters the liquid storage shell 11, thereby keeping the pressure of the grinding liquid at the left end of the liquid supply pipe 13 unchanged;

[0032] As the grinding liquid in the liquid storage shell 11 is consumed, the floating strong magnetic block 22 will move downward with the liquid surface, thereby driving the strong magnet 25 to move downward, and the indication of the pointer 26 will change, thereby displaying the remaining amount of the grinding liquid in real time. When the pointer 26 is at the bottom, the upper end of the alarm 28 will contact the conductive plate 27, so that the alarm 28 will sound an alarm, and the liquid pump 14 will stop working.

[0033] When the interior of the liquid storage shell 11 needs to be filled with grinding liquid again, the liquid storage shell 11 is filled with grinding liquid through the liquid inlet pipe 12. As the grinding liquid enters the interior of the liquid storage shell 11, the floating strong magnetic block 22 will move upward. At the same time, the pressure of the protective gas above the interior of the liquid storage shell 11 is greater than the initial pressure on the right end of the I-shaped rod 196. No opening will be formed between the circular hole of the sliding block 192 and the rectangular block 191, but the one-way valve 17 will be opened, so that the protective gas above the interior of the liquid storage shell 11 enters the interior of the gas storage chamber 16, thereby realizing the recovery of the protective gas.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor polishing liquid supply and delivery device, comprising a base (1), a polishing groove (2) is provided in the middle of the upper surface of the base (1), a fixed clamping seat (3) is fixedly connected to the inner wall of the polishing groove (2), a plurality of telescopic rods (4) are fixedly installed on the upper surface of the base (1), a fixed liquid ring (5) is fixedly connected to the telescopic ends of the plurality of telescopic rods (4), a plurality of connecting plates (6) are fixedly connected to the inner side of the fixed liquid ring (5), a motor (7) is fixedly installed on the inner end of the connecting plate (6), a polishing head (8) is fixedly connected to the bottom end of the output shaft of the motor (7), a liquid outlet pipe (9) is connected to the lower surface of the fixed liquid ring (5), and a nozzle (10) is movably sleeved at the lower end of the liquid outlet pipe (9), characterized in that: The left side of the base (1) is fixedly connected to a liquid storage shell (11), the left side of the liquid storage shell (11) is fixedly installed with a liquid inlet pipe (12), the back side of the liquid storage shell (11) is connected to a liquid supply pipe (13), the right end of the liquid supply pipe (13) is connected to a liquid pump (14), the upper surface of the liquid pump (14) is fixedly connected to a connecting hose (15), the upper surface of the liquid storage shell (11) is fixedly connected to an air storage chamber (16), a one-way valve (17) is fixedly installed between the liquid storage shell (11) and the air storage chamber (16), and the air storage chamber (16) is fixedly connected to the liquid storage shell (11). The front side of the cavity (16) is connected to an air outlet pipe (18), the lower end of the air outlet pipe (18) is fixedly connected to a control mechanism (19), the front side of the liquid storage shell (11) is connected to two connecting pipes (20), the right end of the connecting pipe (20) is connected to a connecting cavity (21); the middle part of the connecting cavity (21) is slidably connected to a floating strong magnetic block (22), the interior of the connecting cavity (21) is fixedly connected to two limit plates (23), the right side of the connecting cavity (21) is fixedly connected to a sliding groove (24), the sliding groove (24) is A strong magnet (25) is slidably connected to the middle part, a pointer (26) is fixedly connected to the right side of the strong magnet (25), a conductive plate (27) is fixedly connected to the lower surface of the pointer (26), and an alarm (28) is fixedly installed at the bottom end of the front side of the connecting cavity (21); the control mechanism (19) comprises a rectangular block (191), a sliding block (192) is slidably connected to the inside of the rectangular block (191), and two compression springs (193) are fixedly connected to the right side of the sliding block (192), and the compression springs (193) are connected to the The inner wall of the rectangular block (191) is fixedly connected, the left side of the rectangular block (191) is fixedly connected to a C-shaped tube (194), the lower end of the C-shaped tube (194) is fixedly connected to a fixing ring (195), the middle part of the fixing ring (195) is slidably connected to an I-shaped rod (196), the sliding block (192) is slidably connected to the upper end of the C-shaped tube (194), the middle part of the rectangular block (191) is fixedly connected to the liquid storage shell (11) and communicates with the interior thereof, and the C-shaped tube (194) is fixedly connected to the liquid storage shell (11).

2. A semiconductor polishing liquid supply and delivery device according to claim 1, characterized in that: A waste liquid chamber is provided inside the base (1), a plurality of through holes are provided at the bottom of the grinding tank (2), and the connecting chamber (21) is fixedly connected to the base (1).

3. A semiconductor polishing liquid supply and delivery device according to claim 2, characterized in that: The connecting hose (15) is in communication with the fixed liquid ring (5), the connecting hose (15) is made of a rubber material, and the liquid pump (14) is fixedly connected to the back side of the base (1).

4. A semiconductor polishing liquid supply and delivery device according to claim 3, characterized in that: The floating strong magnetic block (22) absorbs the strong magnet (25) and the upper surface is in the same horizontal plane. The front side of the connecting cavity (21) is engraved with a liquid level scale line. The opening direction of the one-way valve (17) is from the liquid storage shell (11) to the gas storage cavity (16).

5. A semiconductor polishing liquid supply and delivery device according to claim 4, characterized in that: The lower end of the C-shaped tube (194) penetrates into the interior of the liquid storage shell (11), the interior of the C-shaped tube (194) between the left side of the rectangular block (191) and the I-shaped rod (196) is filled with hydraulic oil, and a circular hole is opened in the middle of the sliding block (192).

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