A suction nozzle pressure testing device and method

Abstract

The present invention discloses a nozzle pressure testing device, and discloses a nozzle pressure testing method with a nozzle pressure testing device, wherein a nozzle pressure testing device includes a workbench, a carrier, a force measuring mechanism, a motion control module, a force measuring control module and a data processing module, wherein the carrier is used to position and install the nozzle cantilever assembly; the force measuring mechanism includes a slider, a drive assembly and a force measuring sensor, and the force measuring sensor can abut the nozzle of the nozzle cantilever assembly; the motion control module is used to collect the position coordinate information of the slider; the force measuring control module is used to collect the pressure value of the force measuring sensor; the data processing module is used to process data and output the nozzle pressure at the moment when the limit screw is separated from the cantilever. A nozzle pressure testing device of the present invention can accurately measure the nozzle thrust at the moment when the limit screw is separated from the cantilever, that is, accurately measure the nozzle pressure, ensure the contact thrust measurement accuracy and consistency of different nozzles, and improve the quality of the nozzle cantilever assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductors, and in particular to a nozzle pressure testing device and method. Background Art

[0002] In the linear structure of semiconductor sorting equipment, the contact force of the nozzle affects chip sorting, so the nozzle needs to be pressure tested.

[0003] like Figure 1 In the related art, the nozzle cantilever assembly 100 includes a base 110, a cantilever 120 and a nozzle 130. One end of the cantilever 120 is connected to the base 110 through a spring 140, and the nozzle 130 is installed at the other end of the cantilever 120. A spring 150 is also arranged between the cantilever 120 and the base 110. The spring 150 drives the cantilever 120 to swing in a direction away from the base 110. An adjusting screw 160 and an adjusting locking nut 170 are also arranged on the base 110. The adjusting screw 160 and the adjusting locking nut 170 cooperate to adjust the elastic force of the spring 150. A limiting screw 180 and a limiting locking nut 190 are also arranged between the cantilever 120 and the base 110. The limiting screw 180 and the limiting locking nut 190 are located on the side of the spring 150 close to the nozzle 130, and the limiting screw 180 and the limiting locking nut 190 cooperate to limit the cantilever 120.

[0004] Furthermore, two cantilevers 120 are disposed on the base 110 , and suction nozzles 130 are disposed on the two cantilevers 120 . The two cantilevers 120 are symmetrically disposed along the center of the base 110 .

[0005] For the pressure test of the suction nozzle 130, a hand-held thrust gauge is currently used to push the suction nozzle 130, and the pressure of the suction nozzle 130 when it moves is visually observed. The thrust P when the suction nozzle 130 moves the most, that is, the thrust of the suction nozzle 130 when the limit screw 180 and the cantilever 120 are separated, is the suction nozzle 130 pressure we need to measure.

[0006] However, although the method is simple to measure, it is visually inspected and the measurement is inaccurate. When such a nozzle cantilever assembly 100 is installed on the whole machine, the sorting pressure between different nozzles 130 will be inconsistent, resulting in unstable suction force on the chip. Summary of the invention

[0007] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a nozzle pressure testing device that can accurately measure the nozzle thrust at the moment when the limit screw is separated from the cantilever, that is, accurately measure the nozzle pressure, ensure the contact thrust measurement accuracy and consistency of different nozzles, and improve the quality of the nozzle cantilever assembly.

[0008] The present invention also provides a nozzle pressure testing method having the nozzle pressure testing device.

[0009] A nozzle pressure testing device according to an embodiment of the first aspect of the present invention includes a workbench, a carrier, a force measuring mechanism, a motion control module, a force measuring control module and a data processing module, wherein the carrier is arranged on the workbench and is used to position and install the nozzle cantilever assembly; the force measuring mechanism includes a slider slidably arranged on the workbench, a driving assembly driving the slider to approach and move away from the carrier, and a force measuring sensor arranged on the slider, wherein the force measuring sensor can abut against the nozzle of the nozzle cantilever assembly; the motion control module is electrically connected to the driving assembly and is used to control the driving action of the driving assembly and collect the position coordinate information of the slider; the force measuring control module is electrically connected to the force measuring sensor and is used to collect the pressure value of the force measuring sensor; the data processing module is electrically connected to the motion control module and the force measuring control module and is used to process the data collected by the motion control module and the force measuring control module and output the nozzle pressure at the moment when the limit screw is separated from the cantilever.

[0010] A nozzle pressure testing device according to an embodiment of the present invention has at least the following beneficial effects:

[0011] 1. The present invention can automatically collect data and calculate the nozzle pressure at the moment the limit screw is separated from the cantilever by setting a motion control module, a force measurement control module and a data processing module. Therefore, the nozzle thrust at the moment the limit screw is separated from the cantilever can be accurately measured, that is, the nozzle pressure can be accurately measured, the contact pressure measurement accuracy and consistency of different nozzles can be ensured, and the quality of the nozzle cantilever assembly can be improved.

[0012] According to some embodiments of the present invention, the force measuring mechanism further includes an origin photoelectric switch, and the origin photoelectric switch is used to locate the origin position of the slider.

[0013] According to some embodiments of the present invention, the driving assembly includes a first motor and a first screw rod, the first screw rod is threadedly connected to the slider, the first motor is used to drive the first screw rod to rotate, and the first screw rod rotates to drive the slider to slide.

[0014] According to some embodiments of the present invention, the workbench and the sliding block are respectively provided with a guide bar and a guide groove, and the guide bar and the guide groove cooperate for guiding.

[0015] According to some embodiments of the present invention, the force measuring mechanism further includes two limit photoelectric switches, and the two limit photoelectric switches are respectively used to detect the maximum sliding position of the slider.

[0016] According to some embodiments of the present invention, a second motor is disposed on the workbench, the carrier is rotatably disposed on the workbench, and the second motor is used to drive the carrier to rotate.

[0017] According to some embodiments of the present invention, a rotation position photoelectric switch is further provided on the workbench, and the rotation position photoelectric switch is used to locate the rotation origin of the carrier.

[0018] A nozzle pressure testing method according to an embodiment of the second aspect of the present invention is applied to a nozzle pressure testing device according to the embodiment of the second aspect, comprising the following steps:

[0019] Data collection steps: Set a force value as the contact judgment, and the drive component drives the force sensor to move toward the nozzle. When the pressure measured by the force sensor is greater than the contact judgment force value, the motion control module starts to record the slider position coordinate w. At the same time, the measurement control module starts to record the pressure P at the corresponding slider position. A series of P and w data are obtained and the Pw curve is drawn from the beginning of the contact between the force sensor and the nozzle to the end of the contact between the limit screw and the cantilever. And the Pw curve after the limit screw and cantilever are out of contact ;

[0020] Data processing steps: construct the Pw curve formula based on a series of P and w data collected;

[0021] for , use the least square method to calculate the slope K of the P and w series data and the slider coordinate deviation C when i is 0 to n;

[0022] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0023] ;

[0024] Pick Substitute one set of sampling data of the curve into Formula Value, build formula;

[0025] for , use the least square method to calculate the slope K of the P and w series data and the slider coordinate deviation C when i is j to m;

[0026] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0027] ;

[0028] Pick Substitute one set of sampling data of the curve into Formula Value, build formula;

[0029] Constructing a system of equations , ;

[0030] The solution of the nozzle pressure P when the limit screw and the cantilever are separated critically is obtained from the equation group. .

[0031] A nozzle pressure testing method according to an embodiment of the present invention has at least the following beneficial effects:

[0032] 1. The present invention improves work efficiency by automatically testing, collecting data and calculating, replacing manual rough measurements, making the test results more accurate, ensuring the measurement accuracy and consistency of contact pressures of different nozzles, and improving the quality of the nozzle cantilever assembly.

[0033] According to some embodiments of the present invention, the data processing step further includes The correlation of the curve sampling data is judged by using the least square method to calculate the correlation coefficient R of the P and w series data when i is 0 to n;

[0034] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0035] The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

[0036] According to some embodiments of the present invention, the data processing step further includes The correlation of the curve sampling data is judged by using the least square method to calculate the correlation coefficient R of the P and w series data when i is j to m;

[0037] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0038] The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

[0039] According to some embodiments of the present invention, a preparation step is further included, and the preparation step is arranged before the data collection step. The preparation step is that the second motor drives the carrier to rotate and passes through and identifies the rotation position photoelectric switch to set the rotation origin, and the first motor drives the slide to move back and forth and passes through and identifies two limit photoelectric switches and the origin photoelectric switch to set the slider origin position and the maximum sliding position.

[0040] According to some embodiments of the present invention, a clamping step is further included. The clamping step is arranged before the data acquisition step. The clamping step is to install the nozzle cantilever assembly on a carrier and rotate the carrier to align the nozzle with the force sensor.

[0041] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 It is a schematic structural diagram of a nozzle cantilever assembly according to an embodiment of the present invention;

[0044] Figure 2 It is a structural schematic diagram of a nozzle pressure testing device according to an embodiment of the present invention;

[0045] Figure 3 It is a schematic structural diagram of a nozzle pressure testing device according to an embodiment of the present invention after clamping a nozzle cantilever assembly;

[0046] Figure 4 It is a schematic diagram of the stress state of the suction nozzle cantilever assembly of the suction nozzle in the unstressed state according to the embodiment of the present invention;

[0047] Figure 5It is a schematic diagram of the stress state of the nozzle cantilever assembly in which the nozzle is stressed but the cantilever and the limit screw are not separated according to an embodiment of the present invention;

[0048] Figure 6 It is a schematic diagram of the stress state of the nozzle cantilever assembly in which the nozzle is stressed and the cantilever is separated from the limit screw according to an embodiment of the present invention;

[0049] Figure 7 A schematic diagram of a cantilever model of a suction nozzle in an unstressed state according to an embodiment of the present invention;

[0050] Figure 8 A schematic diagram of a cantilever model in which a suction nozzle is subjected to force but the cantilever and the limit screw are not separated according to an embodiment of the present invention;

[0051] Fig. 9 It is a schematic diagram of a cantilever model in which a suction nozzle is subjected to force and the cantilever is separated from the limit screw according to an embodiment of the present invention;

[0052] Fig.10 Schematic diagram of a Pw curve according to an embodiment of the present invention;

[0053] Fig.11 The present invention is a flowchart of a nozzle pressure testing method according to an embodiment of the present invention.

[0054] Figure markings: 100-suction nozzle cantilever assembly, 110-base, 120-cantilever, 130-suction nozzle, 140-spring, 150-spring, 160-adjusting screw, 170-adjusting locking nut, 180-limiting screw, 190-limiting locking nut, 200-carrier, 210-slider, 220-driving assembly, 230-force sensor, 240-limiting photoelectric switch, 250-origin photoelectric switch, 260-first motor, 270-first screw rod, 280-workbench, 290-guide bar, 300-guide groove, 310-second motor, 320-rotational position photoelectric switch. DETAILED DESCRIPTION

[0055] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0056] In the description of the present invention, it is necessary to understand that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0057] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of first and second, this is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0058] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation, connection and connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] A nozzle pressure testing device and method according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0060] The present invention aims to provide an embodiment of a nozzle pressure testing device and method.

[0061] Example 1

[0062] Reference Figure 2 and Figure 3 In this embodiment, a nozzle pressure testing device mainly includes a workbench 280, a carrier 200, a force measuring mechanism, a motion control module, a force measuring control module and a data processing module.

[0063] The carrier 200 is disposed on the workbench 280 and is used to position and install the nozzle cantilever assembly 100 , thereby facilitating the nozzle cantilever assembly 100 to be fixed on the carrier 200 and facilitating the force measuring mechanism to apply pressure to the nozzle 130 of the nozzle cantilever assembly 100 .

[0064] As for the force measuring mechanism, the force measuring mechanism includes a slider 210 slidably arranged on the workbench 280, a driving component 220 driving the slider 210 to approach and move away from the carrier 200, and a force sensor 230 arranged on the slider 210, and the force sensor 230 can abut the suction nozzle 130 of the suction nozzle cantilever assembly 100.

[0065] It can be understood that by placing the force sensor 230 against the nozzle 130 of the nozzle cantilever assembly 100 and applying pressure to the nozzle 130 , the pressure when the nozzle cantilever assembly 100 contacts the chip is simulated.

[0066] As for the motion control module, the motion control module is electrically connected to the driving component 220, and the motion control module is used to control the driving action of the driving component 220 and collect the position coordinate information of the slider 210, so that the motion control module can automatically collect the position coordinate information of the slider 210, thereby improving the accuracy of the position coordinate information of the slider 210.

[0067] As for the force measurement control module, the force measurement control module is electrically connected to the force measurement sensor 230, and the force measurement control module is used to collect the pressure value of the force measurement sensor 230, so that the force measurement control module can automatically collect the pressure value of the force measurement sensor 230, thereby improving the accuracy of the pressure collection data.

[0068] The data processing module is electrically connected to the motion control module and the force measurement control module, and is used to process the data collected by the motion control module and the force measurement control module and output the nozzle 130 pressure at the moment when the limit screw 180 is separated from the cantilever 120.

[0069] It can be understood that this embodiment, by setting up a motion control module, a force measurement control module and a data processing module, can automatically collect data and calculate the pressure of the suction nozzle 130 at the moment when the limit screw 180 is separated from the cantilever 120. Therefore, it is possible to accurately measure the thrust of the suction nozzle 130 at the moment when the limit screw 180 is separated from the cantilever 120, that is, accurately measure the pressure of the suction nozzle 130, ensure the measurement accuracy and consistency of the contact pressure of different suction nozzles 130, and improve the quality of the suction nozzle cantilever assembly 100.

[0070] In some specific embodiments, the force measuring mechanism further includes an origin photoelectric switch 250, and the origin photoelectric switch 250 is used to locate the origin position of the slider 210, thereby facilitating setting the origin position of the slider 210 and making the sliding position coordinates of the slider 210 more accurate.

[0071] In some specific embodiments, the driving component 220 includes a first motor 260 and a first screw rod 270. The first screw rod 270 is threadedly connected to the slider 210. The first motor 260 is used to drive the first screw rod 270 to rotate. The first screw rod 270 rotates to drive the slider 210 to slide. Thus, the slider 210 is driven to slide by the threaded cooperation between the first screw rod 270 and the slider 210, so that the driving component 220 can control the sliding position of the slider 210 more accurately.

[0072] In some specific embodiments, the workbench 280 and the slider 210 are respectively provided with a guide bar 290 and a guide groove 300, and the guide bar 290 and the guide groove 300 cooperate to guide, so that the sliding of the slider 210 on the workbench 280 is smoother, and the slider 210 is prevented from deviating from the correct sliding trajectory when the driving component 220 drives the slider 210 to slide.

[0073] In some specific embodiments, the force measuring mechanism also includes two limit photoelectric switches 240, which are respectively used to detect the maximum sliding position of the slider 210, thereby preventing the slider 210 from sliding beyond the maximum sliding position and damaging the nozzle pressure testing device or the nozzle cantilever assembly 100.

[0074] In some specific embodiments, a second motor 310 is disposed on the workbench 280 , and the carrier 200 is rotatably disposed on the workbench 280 . The second motor 310 is used to drive the carrier 200 to rotate.

[0075] It can be understood that by rotating the carrier 200, on the one hand, the suction nozzle 130 can be adjusted to be aligned with the force sensor 230, and on the other hand, after testing the pressure of one suction nozzle 130 in the suction nozzle cantilever assembly 100, the other suction nozzle 130 of the suction nozzle cantilever assembly 100 can be aligned with the force sensor 230 by rotating the carrier 200, thereby eliminating the need to re-clamp and adjust the position of the suction nozzle cantilever assembly 100, thereby improving the test efficiency.

[0076] In some specific embodiments, a rotation position photoelectric switch 320 is also provided on the workbench 280, and the rotation position photoelectric switch 320 is used to locate the rotation origin of the carrier 200, thereby facilitating the setting of the rotation origin position of the carrier 200, and further improving the position accuracy of the carrier 200 driving the suction nozzle 130 of the suction nozzle cantilever assembly 100 to align with the force sensor 230.

[0077] In some specific embodiments, a data storage module is also packaged, and the data storage module includes a local data storage unit. The local data storage unit is used to store data collected by the motion control module and the force measurement control module and data processing results of the data processing module, so as to facilitate the next process call.

[0078] Furthermore, the data storage module also includes a remote data storage unit, which is used to store data collected by the motion control module and the force measurement control module and data processing results of the data processing module, thereby facilitating remote viewing of the collected data and data processing results.

[0079] Example 2

[0080] In order to better describe a nozzle pressure testing method of the present invention, in this embodiment, the nozzle cantilever assembly 100 is analyzed and a mathematical model of the nozzle cantilever assembly 100 is introduced.

[0081] Under normal circumstances, after the nozzle 130 contacts the chip, the chip continues to move a small distance under the action of the ejector pin, and the force exerted by the nozzle 130 on the chip has a great influence on the suction force between the nozzle 130 and the chip. Therefore, a force sensor 230 is used to measure and control the nozzle 130 in the control of the nozzle 130 component.

[0082] Specifically, the nozzle 130 is installed on the cantilever 120. The limit screw 180 on the cantilever 120 acts with a force F1 to limit the cantilever 120 from rotating outward. A spring 150 is provided below to push the cantilever 120. The cantilever 120 is installed through the spring 140 and the base 110. According to the force, the cantilever 120 can be divided into the following: Figure 4 , Figure 5 and Figure 6 There are three states, among which P is the thrust of the force sensor 230 on the suction nozzle 130, F1 is the force of the limit screw 180 on the cantilever 120, F2 is the force of the spring 150 on the cantilever 120, M1 is the force of the spring 140 on the cantilever 120, L0 is the height distance between the spring 150 and the spring 140, L1 is the height distance between the limit screw 180 and the spring 140, and L3 is the height distance between the suction nozzle 130 and the spring 140.

[0083] exist Figure 4 In the moment balance, the formula can be constructed .

[0084] exist Figure 5 In the process, the force sensor 230 starts to apply a thrust P to the suction nozzle 130. When the cantilever 120 and the limit screw 180 are not separated, P gradually increases and F1 gradually decreases. The formula can be constructed. .

[0085] exist Figure 6 In the process, the thrust P is large enough, the torque formed gradually becomes larger than F1, and the cantilever 120 rotates inward, so that the limit screw 180 and the cantilever 120 are separated, forming a new force balance state, and the formula can be constructed: .

[0086] From the perspective of material mechanics, the nozzle cantilever assembly 100 is Figure 7 , Figure 8 and Fig. 9 Force analysis.

[0087] exist Figure 7 In the embodiment, the suction nozzle 130 is not subjected to force, that is, P=0.

[0088] exist Figure 8In the figure, the suction nozzle 130 is subjected to force P, and the deformation rotation fulcrum of the cantilever 120 is at the contact point below the limit screw 180. According to the cantilever 120 beam formula principle of material mechanics, the relationship between the position deformation (deflection w) of the suction nozzle 130 and the force P can be calculated.

[0089] Assume that the equivalent elastic modulus of the structure is , the equivalent moment of inertia is , Also called equivalent bending stiffness, the following formula can be used:

[0090] .

[0091] definition , then the formula Abbreviated as .

[0092] In the actual curve recording, there is a deviation in the coordinate recording of the deflection direction , so record it according to the following formula:

[0093] ; When the curve passes through zero, .

[0094] Similarly, for Fig. 9 , the following formula can be used:

[0095] .

[0096] Assume that the equivalent elastic modulus of the structure is , the equivalent moment of inertia is , Also called equivalent bending stiffness.

[0097] definition , then you can Abbreviated as , also due to the deviation of the coordinate record in the deflection direction , so record it according to the following formula:

[0098] .

[0099] From the formula and formula Before the limit screw 180 and the cantilever 120 are out of contact, P and w satisfy Curve, when the limit screw 180 and the cantilever 120 are separated, P and w meet curve, therefore, when the limit screw 180 and the cantilever 120 are separated, the and curve; and, ,Right now , so we can solve and The force at the intersection of the two curves is the force on the suction nozzle 130 at the moment when the limit screw 180 and the cantilever 120 are separated.

[0100] It can be understood from the above analysis that the first motor 260 is used to drive the slider 210 to approach the carrier 200, and the slider 210 drives the force sensor 230 to apply a thrust P to the nozzle 130, and at the same time, the pulse of the first motor 260 or the coordinate of the slider 210 is recorded instead of the deflection w. After measurement, the following can be obtained: Fig.10 The curve of and formula Can get Fig.10 The curve is two straight lines and intersect.

[0101] In some specific embodiments, the point spacing on the motion coordinates of the slider 210 needs to be set according to the actual product, and can be set to be equidistant or unequal. Small spacing, Large spacing, or Large spacing, in Small spacing, etc.

[0102] Example 3

[0103] Reference Fig.11 In this embodiment, a nozzle pressure testing method is provided, comprising the following steps:

[0104] Data collection steps: Set a force value as the contact judgment, and the driving component 220 drives the force sensor 230 to move toward the suction nozzle 130. When the pressure measured by the force sensor 230 is greater than the contact judgment force value, the motion control module starts to record the position coordinate w of the slider 210. At the same time, the measurement control module starts to record the pressure P at the position of the slider 210, and obtains a series of P and w data and draws a Pw curve from the beginning of the contact between the force sensor 230 and the suction nozzle 130 to the end of the contact between the limit screw 180 and the cantilever 120. And the Pw curve after the limit screw 180 and the cantilever 120 are out of contact ;

[0105] Data processing steps: construct the Pw curve formula based on a series of P and w data collected;

[0106] for , using the least square method, calculate the slope K of the P and w series data and the coordinate deviation C of the slider 210 when i is 0 to n;

[0107] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0108] ;

[0109] Pick Substitute one set of sampling data of the curve into Formula Value, build formula;

[0110] for , using the least square method, calculate the slope K of the P and w series data and the coordinate deviation C of the slider 210 when i is j to m;

[0111] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0112] ;

[0113] Pick Substitute one set of sampling data of the curve into Formula Value, build formula;

[0114] Constructing a system of equations , ;

[0115] The solution of the pressure P of the nozzle 130 when the limit screw 180 and the cantilever 120 are separated critically is obtained from the equation group: .

[0116] It can be understood that this embodiment improves work efficiency by automatically testing data collection and calculation, replacing manual rough measurements, making the test results more accurate, ensuring the measurement accuracy and consistency of contact pressure of different suction nozzles 130, and improving the quality of the suction nozzle cantilever assembly 100.

[0117] In some specific embodiments, in the data collection step, the set end value of the data collection is greater than the qualified value, and no less than 3 sets of data need to be collected between the set end value and the qualified value of the data collection, thereby ensuring that the collected data can contain Curve and curve.

[0118] In some specific embodiments, the data processing step further includes The correlation of the curve sampling data is judged by using the least square method to calculate the correlation coefficient R of the P and w series data when i is 0 to n;

[0119] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0120] The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

[0121] It is understandable that by measuring The correlation coefficient R of the curve is calculated The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more likely it is that The more accurate the sampling data of the curve is, the When it is less than the set value, it means The sampling data of the curve deviates Curve, with The correlation of the curve is poor, so it can be judged that The more accurate the sampling data of the curve is, the more accurate the nozzle pressure test device can be. When the pressure is less than the set value, an alarm will be triggered to remind the tester that the sampling data of this test is inaccurate, so as to avoid affecting the accuracy of the pressure test results due to inaccurate sampling data.

[0122] In some specific embodiments, the data processing step further includes The correlation of the curve sampling data is judged by using the least square method to calculate the correlation coefficient R of the P and w series data when i is j to m;

[0123] ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve;

[0124] The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

[0125] It is understandable that by measuring The correlation coefficient R of the curve is calculated The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more likely it is that The more accurate the sampling data of the curve is, the When it is less than the set value, it means The sampling data of the curve deviates Curve, with The correlation of the curve is poor, so it can be judged that The more accurate the sampling data of the curve is, the more accurate the nozzle pressure test device can be. When the pressure is less than the set value, an alarm will be triggered to remind the tester that the sampling data of this test is inaccurate, so as to avoid affecting the accuracy of the pressure test results due to inaccurate sampling data.

[0126] In some specific embodiments, according to some embodiments of the present invention, a preparation step is further included, and the preparation step is arranged before the data collection step. The preparation step is that the second motor 310 drives the carrier 200 to rotate and passes through and identifies the rotation position photoelectric switch 320 to set the rotation origin, and the first motor 260 drives the slide to move back and forth and passes through and identifies the two limit photoelectric switches 240 and the origin photoelectric switch 250 to set the origin position of the slider 210 and the maximum sliding position. Therefore, on the one hand, the position coordinates of the slider 210 are made more accurate, and on the other hand, the rotation angle position of the carrier 200 is made more accurate, so that the carrier 200 can drive the suction nozzle 130 to align with the force sensor 230.

[0127] In some specific embodiments, a clamping step is further included. The clamping step is arranged before the data acquisition step. The clamping step is to install the nozzle cantilever assembly 100 on the carrier 200, and rotate the carrier 200 to align the nozzle 130 with the force sensor 230, so that the nozzle 130 is aligned with the force sensor 230.

[0128] In some specific embodiments, after testing the pressure of one nozzle 130 of the nozzle cantilever assembly 100, the second motor 310 drives the carrier 200 to rotate 180 degrees, repeats the data acquisition step and the data processing step, and measures the pressure P of the nozzle 130 when the limit screw 180 and the cantilever 120 of the other nozzle 130 of the nozzle cantilever assembly 100 are critically separated. Thus, the pressure test of the two nozzles 130 can be completed through one clamping, eliminating the need for secondary clamping and improving efficiency.

[0129] In some specific embodiments, for the nozzle cantilever assembly 100 whose calculated P exceeds the qualified range, the elastic force of the spring 150 can be adjusted by adjusting the screw 160, and then measurement can be performed until the measurement result is qualified, and then the next nozzle cantilever assembly 100 can be replaced.

[0130] In some specific embodiments, the data collected in the data collection step and the results of the data processing step are stored in a local data storage unit and a remote data storage unit, thereby facilitating the next process call.

[0131] A nozzle pressure testing method according to an embodiment of the present invention has at least the following beneficial effects:

[0132] 1. Use the nozzle pressure test device to automatically collect data and calculate results, replacing manual measurement, improving measurement efficiency and the accuracy of measurement results.

[0133] 2. The use of nozzle pressure testing device combined with other automatic feeding mechanisms can realize batch automatic measurement and improve measurement efficiency.

[0134] 3. Combine programming and computer calculation to realize intuitive display of data and make the measurement data more accurate.

[0135] 4. Data storage and remote sharing provide reference for the next process and whole machine assembly, effectively reducing the probability of rework.

[0136] In the description of this specification, the description with reference to the terms "one embodiment, some embodiments, illustrative embodiments, examples, specific examples or some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0137] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A nozzle pressure testing device, characterized in that: include: Workbench (280); A carrier (200), arranged on the workbench (280), and used for positioning and installing the nozzle cantilever assembly (100); A force measuring mechanism, comprising a slider (210) slidably arranged on the workbench (280), a driving assembly (220) driving the slider (210) to approach and move away from the carrier (200), and a force measuring sensor (230) arranged on the slider (210), wherein the force measuring sensor (230) is capable of abutting against a suction nozzle (130) of the suction nozzle cantilever assembly (100); The driving assembly (220) comprises a first motor (260) and a first screw rod (270); the first screw rod (270) is threadedly connected to the slider (210); the first motor (260) is used to drive the first screw rod (270) to rotate; the first screw rod (270) rotates to drive the slider (210) to slide; The force measuring mechanism further comprises two limit photoelectric switches (240), and the two limit photoelectric switches (240) are respectively used to detect the maximum sliding position of the slider (210); A second motor (310) is disposed on the workbench (280), the carrier (200) is rotatably disposed on the workbench (280), and the second motor (310) is used to drive the carrier (200) to rotate; A rotation position photoelectric switch (320) is also provided on the workbench (280), and the rotation position photoelectric switch (320) is used to locate the rotation origin of the carrier (200); A motion control module, electrically connected to the driving component (220), used to control the driving action of the driving component (220) and collect position coordinate information of the slider (210); a force measurement control module, electrically connected to the force measurement sensor (230) and used to collect a pressure value of the force measurement sensor (230); A data processing module is electrically connected to the motion control module and the force measurement control module, and is used to process the data collected by the motion control module and the force measurement control module and output the suction nozzle (130) pressure at the moment when the limit screw (180) is separated from the cantilever (120).

2. A nozzle pressure testing device according to claim 1, characterized in that: The force measuring mechanism further comprises an origin photoelectric switch (250), wherein the origin photoelectric switch (250) is used to locate the origin position of the slider (210).

3. A nozzle pressure testing device according to claim 1, characterized in that: The workbench (280) and the sliding block (210) are respectively provided with a guide bar (290) and a guide groove (300), and the guide bar (290) and the guide groove (300) cooperate for guidance.

4. A nozzle pressure testing method, characterized in that: A nozzle pressure testing device as claimed in any one of claims 1 to 3, comprising the following steps: Data collection steps: a force value is set as a contact judgment, the driving component (220) drives the force sensor (230) to move toward the suction nozzle (130), when the pressure measured by the force sensor (230) is greater than the contact judgment force value, the motion control module starts to record the position coordinate w of the slider (210), and at the same time, the measurement control module starts to record the pressure P at the position corresponding to the slider (210), and a series of P and w data are obtained and a Pw curve is drawn from the time when the force sensor (230) and the suction nozzle (130) start to contact to the time when the limit screw (180) and the cantilever (120) are separated from contact. And the Pw curve after the limit screw (180) and the cantilever (120) are out of contact ; Data processing steps: construct the Pw curve formula based on a series of P and w data collected; for , using the least squares method, calculate the slope of the P and w series data when i is 0 to n Coordinate deviation from slider (210) ; ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve; ； Pick Substitute one set of sampling data of the curve into Formula Value, build formula; for , using the least squares method, calculate the slope of the P and w series data when i is j to m Coordinate deviation from slider (210) ; ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve; ； Pick Substitute one set of sampling data of the curve into Formula Value, build formula; Constructing a system of equations , ; The pressure of the nozzle (130) at the critical separation of the limit screw (180) and the cantilever (120) is obtained by solving the equation group: Solution .

5. A nozzle pressure testing method according to claim 4, characterized in that: The data processing step also includes The correlation of the curve sampling data is judged by using the least squares method to calculate the correlation coefficient of the P and w series data when i is 0 to n. ; ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve; The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

6. A nozzle pressure testing method according to claim 4, characterized in that: The data processing step also includes The correlation of the curve sampling data is judged by using the least squares method to calculate the correlation coefficient of the P and w series data when i is j to m. ; ,in yes The average value of all collected data w values ​​in the curve, yes The average value of P values ​​of all collected data in the curve; The closer it is to 1, The stronger the correlation of the sampling data of the curve, the more accurate the sampling data. When it is less than the set value, the nozzle pressure test device alarms.

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