A membrane type surface stress sensor and analysis method thereof

Through the support of the piezoresistive element and the detection membrane structure of the membrane surface stress sensor, gas distinction is achieved using the resistance changes caused by the target gas, solving the problems of poor selectivity and low stability of traditional sensors, providing high recognition and stability, and simplifying The operation process was completed.

CN118817784BActive Publication Date: 2024-12-10QSI SEMICON (HANGZHOU) CO LTD
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Patent Information

Application Number
CN202411298689.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-18
Publication Date
2024-12-10
Estimated Expiration
2044-09-18

AI Technical Summary

Technical Problem

Existing gas sensors have poor selectivity, poor long-term stability, low accuracy, and are greatly affected by environmental factors such as temperature and humidity, making it difficult to distinguish and detect multiple gases.

Method used

A membrane-type surface stress sensor is designed, using a structure that combines the piezoresistive element and the detection membrane. The detection membrane is deformed by the combination of the target gas and the aptamer, changing the stress of the piezoresistive element, and measuring resistance changes to distinguish Different gases and gas detection and analysis are achieved through simple operating steps.

Benefits of technology

It improves the gas distinction recognition degree, reduces dependence on the environment, ensures the stability of the equipment and the convenience of operation, avoids the drift of traditional sensors, and enhances the selectivity and consistency of detection.

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Abstract

The present invention relates to the technical field of lithium batteries, and specifically to a membrane-type surface stress sensor, comprising a sensor substrate, a support table fixedly arranged at one end of the sensor substrate, a mounting groove being provided on the support table, guide slots being symmetrically provided at both ends of the mounting groove, and movable sockets being symmetrically provided on both sides of the support table, and connecting through holes being provided in the movable sockets, a power source being fixedly arranged at the other end of the sensor substrate, wires being respectively provided on both sides of the power source, and an electrical signal detector being connected to the wires on one side. The present invention also relates to a gas detection and analysis method, comprising the following steps: step one: opening a protective movable cover; step two: supporting a piezoresistive element to access a circuit; and step three: analyzing electrical signals.
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Description

Technical Field

[0001] The invention relates to the technical field of sensors, in particular to a membrane type surface stress sensor and an analysis method thereof. Background Art

[0002] In various fields such as food and medicine, there is an urgent need for gas detection and differentiation. In the field of gas detection and differentiation sensing technology, traditional gas sensors such as semiconductor or electrochemical are mainly used. However, since gas-sensitive elements are easily affected by various external factors such as temperature and humidity, in actual use, as long as the sensor responds to the gas, it will be considered to have issued an early warning for the gas. Therefore, in addition to responding to the target gas, it will also respond to other gases, which leads to poor selectivity and the inability to detect and differentiate multiple gases. Combined with the characteristics of the sensor itself, the existing gas sensors have the following main disadvantages:

[0003] First, the selectivity is poor. Traditional sensors can only detect gases indiscriminately and cannot deal with interfering gases that can respond to the sensor, resulting in poor selectivity.

[0004] Second, the long-term stability is poor. Traditional sensors have high operating temperatures, high energy consumption, and are greatly affected by the environment. Since the reaction of the sensitive layer contacting the gas surface is not a reversible process, drift may occur, resulting in poor long-term stability.

[0005] Third, the accuracy is low. The response of traditional sensors is affected by many factors, such as temperature, humidity and the presence of other gases, so the accuracy of the sensor will also be subject to certain limitations. Summary of the invention

[0006] The object of the present invention is to provide a membrane type surface stress sensor and an analysis method thereof to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] A membrane surface stress sensor comprises a sensor substrate, wherein a support plate is fixedly arranged at one end of the sensor substrate, a mounting groove is provided on the support plate, guide slots are symmetrically provided at both ends of the mounting groove, and movable sockets are symmetrically provided at both sides of the support plate, and a connecting through hole is provided in the movable socket, a power supply is fixedly arranged at the other end of the sensor substrate, wires are respectively provided at both sides of the power supply, and an electric signal detector is connected to the wire on one side, a conductive sleeve is fixedly connected to one end of the wire away from the power supply, and the conductive sleeve is fixedly arranged on an insulating carrier, the lower end of the insulating carrier is plugged into the movable socket, and a connecting rod is fixedly arranged on the insulating carrier, the connecting rod is plugged into the connecting through hole, and a joint matching strip is fixedly provided at one end of the connecting rod away from the insulating carrier, and the joint matching strip is located on the outer side of the support plate. The two ends of the lower side of the coupling strip are symmetrically fixed with coupling columns, and supporting and matching vertical plates are symmetrically fixedly arranged on both sides of the sensor substrate close to the supporting table plate, and a supporting cross beam plate is fixedly arranged between the supporting cross beam plates, and a movable matching hole is provided on the supporting cross beam plate, and positioning coupling strips are symmetrically fixedly arranged on both sides of the supporting cross beam plate, and a first positioning hole is provided on the positioning coupling strip, a second positioning hole is provided on the positioning coupling strip on the upper side of the first positioning hole, and a third positioning hole is provided on the positioning coupling strip on the upper side of the second positioning hole, and a first supporting rod is symmetrically fixedly arranged at both ends of the supporting and matching vertical plates, a limited end block is fixedly arranged on the end of the first supporting rod away from the supporting and matching vertical plate, and a second supporting rod is fixedly arranged on the supporting and matching vertical plate on the lower side of the first supporting rod, and a membrane-type convenient detection mechanism is provided on the sensor substrate.

[0009] Preferably, the membrane-type convenient detection mechanism includes a supporting piezoresistive element, a detection membrane, a movable carrier plate, a protective movable cover, a driving connecting plate and a movable connecting plate, the supporting piezoresistive element is inserted in the installation groove, and guide blocks are symmetrically fixed at both ends of the supporting piezoresistive element, the guide blocks are inserted in the guide slots, conductive columns are symmetrically fixed on both sides of the supporting piezoresistive element, and the supporting piezoresistive element is covered with a detection membrane.

[0010] Preferably, a supporting movable rod is fixedly provided at the lower end of the movable carrier plate, and the supporting movable rod is inserted into the movable matching hole, and a mounting socket is opened on the movable carrier plate, and the mounting socket passes through the supporting movable rod, and a limiting pressure ring is fixedly provided at the lower end of the supporting movable rod, and a connecting plate is fixedly provided on the limiting pressure ring, and the connecting plate is fixedly connected to the supporting movable rod, and the limiting pressure ring presses on the detection membrane when it plays a limiting role on the detection membrane and the supporting piezoresistive element.

[0011] Preferably, the movable carrier is symmetrically fixed with a bearing vertical plate, the bearing vertical plate is provided with a supporting socket, and the movable carrier is also symmetrically fixed with a matching vertical plate, the lower end of the matching vertical plate is fixed with a bearing matching rod, the bearing matching rod is fixed with a matching connecting strip, each end of the matching connecting strip is symmetrically fixed with matching connecting blocks, the lower end of the matching vertical plate is symmetrically hinged with an articulated connecting rod, and the upper end of the articulated connecting rod is hinged with a protective movable cover.

[0012] Preferably, a mating groove is provided at the upper end of the protective movable cover, and the mating groove cooperates with the supporting movable rod when the protective movable cover is in a closed state, and a mating channel is provided at the lower end of the protective movable cover, and a wire is inserted in the mating channel. Support connecting plates are symmetrically fixed on both sides of the protective movable cover, and support mating holes are provided on the support connecting plates, and a first supporting carrier rod is inserted in the support mating hole, and the support connecting plates are hinged to the hinged connecting rod.

[0013] Preferably, both ends of the mating connecting strip are respectively connected to a driving connecting plate, a plug-in movable hole is provided on the driving connecting plate, a second supporting rod is plugged into the plug-in movable hole, and a connecting vertical plate is fixedly provided at one end of the driving connecting plate, a mating inclined plate is symmetrically fixedly provided on the connecting vertical plate, a connecting slide is provided on the mating inclined plate, and a mating connecting block is plugged into the connecting slide.

[0014] Preferably, a stable connecting frame is fixedly provided on the driving connecting plate, a matching oblique frame is fixedly provided on the stable connecting frame, and a matching plug post is inserted in the stable connecting frame.

[0015] Preferably, the movable connecting plate is installed on the movable carrier plate, and a mounting rod is fixedly provided at the lower end of the movable connecting plate, the mounting rod is inserted into the mounting socket, and a connecting spring is sleeved on the mounting rod, and matching hinge rods are symmetrically hinged at both ends of the movable connecting plate, and a movable connecting frame is hinged at the upper end of the matching hinge rod.

[0016] Preferably, a guide plug rod is fixedly provided on the movable connecting frame, and the guide plug rod is inserted in the supporting socket, and a positioning movable plate is fixedly provided on the guide plug rod, and a positioning plug rod is fixedly provided on the positioning movable plate, and when the protective movable cover is closed together, the positioning plug rod is inserted in the first positioning hole.

[0017] A gas detection and analysis method comprises the following steps:

[0018] Step 1: Open the protective movable cover: push the movable connecting plate downward toward the movable carrier plate, and then pull the movable carrier plate upward to drive the protective movable cover to move back and forth to open;

[0019] Step 2: supporting the piezoresistive element to access the circuit: pulling up the movable carrier plate so that the positioning plug rod is plugged into the third positioning hole, and then the conductive sleeve can be driven to move so that it is sleeved on the conductive column on the supporting piezoresistive element to achieve circuit connectivity;

[0020] Step 3: Analysis of electrical signals: Different gases cause different deformations of the detection film, which in turn causes different stresses on the supporting piezoresistive element, causing its resistance to change. The electrical signal is detected by the electrical signal detector, and the gas is detected and analyzed through the changes in the electrical signal.

[0021] Compared with the prior art, the invention has the following advantages:

[0022] 1. The membrane surface stress sensor can deform the detection membrane by adsorbing the target onto the detection membrane, thereby changing the stress on the supporting piezoresistive element, and measuring the resistance change caused by the presence or absence of the target to distinguish and analyze different targets and the amount of the target. It has a high degree of recognition for different targets, that is, high selectivity; it does not require heating and can detect and analyze the target at room temperature. It is less affected by the environment and has good consistency.

[0023] 2. When the membrane type surface stress sensor is not in use, the protective movable cover can cover the supporting piezoresistive element and the detection film, thereby protecting both. At this time, the limit pressure ring is pressed on the detection film, which can fix the detection film and the supporting piezoresistive element and ensure the stability of both. When the membrane type surface stress sensor needs to be used, the protective movable cover can be moved and opened by pulling up the movable carrier plate, and when the positioning plug rod is inserted into the third positioning hole, the supporting piezoresistive element is connected to the circuit for detection. The operation is simple, convenient and fast.

[0024] 3. In addition, when the supporting piezoresistive element fails or is damaged, it needs to be replaced. At this time, the movable carrier plate is also pulled upward to drive the protective movable cover to move back and forth in an open state, and the positioning plug rod is inserted into the second positioning hole. At this time, the supporting piezoresistive element is not connected to the circuit, and the supporting piezoresistive element is no longer restricted, and it can be quickly removed for replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Schematic diagram of the sensor substrate assembly.

[0026] Figure 2 for Figure 1 A magnified schematic diagram of center A.

[0027] Figure 3 for Figure 1A magnified schematic diagram of point B in the middle.

[0028] Figure 4 Schematic diagram of the assembly of the sensor substrate and the supporting piezoresistive element.

[0029] Figure 5 for Figure 4 Enlarged schematic diagram of point C in the middle.

[0030] Figure 6 Schematic diagram of the structure of the sensor substrate.

[0031] Figure 7 It is a schematic diagram of the assembly of the movable carrier plate and the protective movable cover.

[0032] Figure 8 It is a structural schematic diagram of the movable carrier.

[0033] Fig. 9 It is a structural diagram of the drive connection board.

[0034] In the figure: 1. sensor substrate; 11. support table; 12. installation groove; 13. guide slot; 14. movable socket; 15. connection through hole; 16. power supply; 161. wire; 162. electric signal detector; 17. conductive sleeve; 18. insulating carrier; 181. connecting plug rod; 182. connecting and matching strip; 183. connecting and matching plug column; 19. supporting and matching vertical plate; 191. supporting crossbeam plate; 192. movable matching hole; 193. positioning matching strip; 194. first positioning hole; 195. second positioning hole; 196. third positioning hole; 197. first supporting carrier rod; 198. limiting end block; 199. second supporting carrier rod; 2. supporting piezoresistive element; 21. guide plug block; 22. conductive column; 3. detection membrane; 4. movable carrier ;41. Support movable rod;42. Mounting socket;43. Limiting pressure ring;44. Serial plate;45. Load-bearing vertical plate;46. Support socket;47. Matching vertical plate;48. Load-bearing matching rod;481. Matching connecting strip;482. Matching connecting block;49. Articulated connecting rod;5. Protective movable cover;51. Matching groove;52. Matching channel;53. Support connecting plate;54. Support matching hole;6. Drive connecting plate;61. Plug-in movable hole;62. Connecting vertical plate;63. Matching inclined plate;64. Connecting slideway;65. Stabilizing connecting frame;66. Matching inclined frame;7. Active connecting plate;71. Installing plug rod;72. Connecting spring;73. Matching hinge rod;74. Active connecting frame;75. Guide plug rod;76. Positioning movable plate;77. Positioning plug rod. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] See also Figures 1 to 9 , the present invention provides a technical solution:

[0037] A membrane type surface stress sensor comprises a sensor substrate 1, a support plate 11 is fixedly arranged at one end of the sensor substrate 1, a mounting groove 12 is provided on the support plate 11, guide slots 13 are symmetrically provided at both ends of the mounting groove 12, and movable sockets 14 are symmetrically provided at both sides of the support plate 11, and a connecting through hole 15 is provided in the movable socket 14, a power supply 16 is fixedly arranged at the other end of the sensor substrate 1, and wires 161 are respectively provided on both sides of the power supply 16, and one side of the wire 161 is connected to There is an electric signal detector 162, and the end of the wire 161 away from the power supply 16 is fixedly connected to the conductive sleeve 17, and the conductive sleeve 17 is fixedly installed on the insulating carrier 18. The lower end of the insulating carrier 18 is plugged into the movable socket 14, and a connecting rod 181 is fixedly provided on the insulating carrier 18, and the connecting rod 181 is plugged into the connecting through hole 15, and a connecting rod 182 is fixedly provided on the end of the connecting rod 181 away from the insulating carrier 18, and the connecting strip 182 is located on the outer side of the support plate 11, and the connecting strip 182 is located on the outer side of the support plate 11. The two ends of the lower side of the matching strip 182 are symmetrically fixed with connecting and matching pins 183, and the two sides of the sensor substrate 1 near the end of the support table 11 are symmetrically fixed with supporting matching vertical plates 19, and a supporting cross beam plate 191 is fixed between the supporting matching vertical plates 19, and a movable matching hole 192 is opened on the supporting cross beam plate 191, and positioning matching strips 193 are symmetrically fixed on both sides of the supporting cross beam plate 191, and a first positioning hole 194 is opened on the positioning matching strip 193, and the positioning hole 194 on the upper side of the first positioning hole 194 is fixedly provided. A second positioning hole 195 is provided on the matching strip 193, a third positioning hole 196 is provided on the positioning matching strip 193 above the second positioning hole 195, first supporting rods 197 are symmetrically fixedly provided at both ends of the supporting matching vertical plate 19, a limiting end block 198 is fixedly provided on one end of the first supporting rod 197 away from the supporting matching vertical plate 19, and a second supporting rod 199 is fixedly provided on the supporting matching vertical plate 19 below the first supporting rod 197, and a membrane-type convenient detection mechanism is provided on the sensor substrate 1.

[0038] The membrane-type convenient detection mechanism includes a supporting piezoresistive element 2, a detection membrane 3, a movable carrier plate 4, a protective movable cover 5, a driving connecting plate 6 and a movable connecting plate 7. The supporting piezoresistive element 2 is inserted in the installation groove 12, and guide plugs 21 are symmetrically fixedly arranged at both ends of the supporting piezoresistive element 2. The guide plugs 21 are inserted in the guide slots 13. Conductive columns 22 are symmetrically fixedly arranged on both sides of the supporting piezoresistive element 2, and the supporting piezoresistive element 2 is covered with a detection membrane 3. In addition, an adapter is arranged on the detection membrane 3. The adapter is a molecule that is combined with the target gas and fixed on the membrane. When the target gas is combined with the adapter, the detection membrane 3 will be deformed. When the detection membrane 3 is deformed, the stress of the supporting piezoresistive element 2 will also change. As the stress changes, the resistance of the supporting piezoresistive element 2 will change, and the resistance value of the supporting piezoresistive element 2 changes proportionally with the stress. The material of the detection membrane 3 is not limited, as long as the detection membrane 3 is deformed due to the combination of the target gas and the adapter, and the deformation will bring stress to the supporting piezoresistive element 2.

[0039] A supporting movable rod 41 is fixedly provided at the lower end of the movable carrier plate 4, and the supporting movable rod 41 is inserted into the movable matching hole 192, and a mounting socket 42 is opened on the movable carrier plate 4, and the mounting socket 42 penetrates into the supporting movable rod 41, and a limiting pressure ring 43 is fixedly provided at the lower end of the supporting movable rod 41, and a connecting plate 44 is fixedly provided on the limiting pressure ring 43, and the connecting plate 44 is fixedly connected to the supporting movable rod 41, and the limiting pressure ring 43 presses on the detection membrane 3 when it plays a limiting role on the detection membrane 3 and the supporting piezoresistive element 2.

[0040] A bearing vertical plate 45 is symmetrically fixedly arranged on the movable carrier 4, a supporting socket 46 is opened on the bearing vertical plate 45, and a matching vertical plate 47 is also symmetrically fixedly arranged on the movable carrier 4, a bearing matching rod 48 is fixedly arranged at the lower end of the matching vertical plate 47, a matching connecting strip 481 is fixedly arranged on the bearing matching rod 48, matching connecting blocks 482 are symmetrically fixedly arranged on both sides of each end of the matching connecting strip 481, a hinged connecting rod 49 is symmetrically hinged at the lower end of the matching vertical plate 47, and a protective movable cover 5 is hinged at the upper end of the hinged connecting rod 49, and the protective movable cover 5 is closed together when it plays a protective role for the detection membrane 3 and the supporting piezoresistive element 2.

[0041] A matching groove 51 is provided at the upper end of the protective movable cover 5, and the matching groove 51 matches with the supporting movable rod 41 in the closed state, and a matching channel 52 is provided at the lower end of the protective movable cover 5, in which a wire 161 is inserted, and support connecting plates 53 are symmetrically fixed on both sides of the protective movable cover 5, and support matching holes 54 are provided on the support connecting plates 53, in which the first supporting carrier rod 197 is inserted, and the support connecting plates 53 are hinged to the hinge connecting rod 49.

[0042] The two ends of the mating connecting strip 481 are respectively connected to a driving connecting plate 6, a plug-in movable hole 61 is provided on the driving connecting plate 6, a second supporting rod 199 is plugged into the plug-in movable hole 61, and a connecting vertical plate 62 is fixedly provided at one end of the driving connecting plate 6, a mating inclined plate 63 is symmetrically fixedly provided on the connecting vertical plate 62, a connecting slide 64 is provided on the mating inclined plate 63, a mating connecting block 482 is plugged into the connecting slide 64, and the mating connecting block 482 is in contact with the inner wall of the connecting slide 64.

[0043] A stabilizing connecting frame 65 is also fixedly provided on the driving connecting plate 6, a matching oblique frame 66 is fixedly provided on the stabilizing connecting frame 65, and a connecting matching plug 183 is inserted in the stabilizing connecting frame 65. In addition, the internal width of the stabilizing connecting frame 65 is equal to the internal width of the matching oblique frame 66, and the inner wall of the stabilizing connecting frame 65 is in contact with the connecting matching plug 183.

[0044] The movable connecting plate 7 is installed on the movable carrier plate 4, and a mounting rod 71 is fixedly provided at the lower end of the movable connecting plate 7. The mounting rod 71 is inserted into the mounting hole 42, and a connecting spring 72 is sleeved on the mounting rod 71. The two ends of the movable connecting plate 7 are symmetrically hinged with matching hinge rods 73, and the upper end of the matching hinge rod 73 is hinged with a movable connecting frame 74. In addition, the two ends of the connecting spring 72 are respectively fixed on the movable carrier plate 4 and the movable connecting plate 7.

[0045] A guide plug rod 75 is fixedly provided on the movable connecting frame 74, and the guide plug rod 75 is inserted in the supporting socket 46. A positioning movable plate 76 is fixedly provided on the guide plug rod 75, and a positioning plug rod 77 is fixedly provided on the positioning movable plate 76. When the protective movable cover 5 is closed together, the positioning plug rod 77 is inserted in the first positioning hole 194.

[0046] A gas detection and analysis method comprises the following steps:

[0047] Step 1: Open the protective movable cover 5: push the movable connecting plate 7 downward toward the movable carrier plate 4, and then pull the movable carrier plate 4 upward to drive the protective movable cover 5 to move back and forth to open;

[0048] Step 2: supporting the piezoresistive element 2 to connect to the circuit: pulling up the movable carrier plate 4 so that the positioning plug rod 77 is plugged into the third positioning hole 196, and then the conductive sleeve 17 can be moved to be sleeved on the conductive column 22 on the supporting piezoresistive element 2 to achieve circuit connectivity;

[0049] Step three: analysis of electrical signals: different gases cause different deformations of the detection film 3, thereby causing different stresses on the supporting piezoresistive element 2, causing its resistance to change. The electrical signal is detected by the electrical signal detector 162, and the gas is detected and analyzed through the changes in the electrical signal.

[0050] When performing gas detection and analysis, the movable carrier plate 4 is lowered to push the movable connecting plate 7, and the positioning plug rod 77 is withdrawn from the first positioning hole 194 under the action of the hinge rod 73, and then the movable carrier plate 4 is pulled upward. As the movable carrier plate 4 moves upward, the protective movable cover 5 is driven to move backward under the action of the hinge connecting rod 49, so that the protective movable cover 5 is opened, and the detection membrane 3 and the supporting piezoresistive element 2 are revealed. At the same time, as the movable carrier plate 4 moves upward, the limiting pressure ring 43 is no longer pressed on the detection membrane 3, until the positioning plug rod 77 reaches the position of the third positioning hole 196. At this time The movable connecting plate 7 is released, so that it is reset under the action of the connecting spring 72, thereby driving the positioning plug rod 77 to be plugged into the third positioning hole 196 to fix the movable carrier 4. In addition, in the process of the movable carrier 4 moving upward, the driving connecting plate 6 is moved away from the supporting table 11 under the cooperation of the matching connecting block 482 and the connecting slide 64. With the movement of the driving connecting plate 6, the stabilizing frame 65 and the connecting matching plug column 183 are also relatively moved. When the movable carrier 4 passes over the second positioning hole 195, the connecting matching plug column 183 is inserted into the third positioning hole 196. The movable carrier 4 is connected to the matching bevel frame 66. With the movement of the movable carrier 4, the matching plug 183 is driven to move under the action of the matching bevel frame 66, and then the insulating carrier 18 is driven to move, so that the conductive sleeve 17 is sleeved on the conductive column 22, so that the supporting piezoresistive element 2 is connected to the circuit, and the circuit is connected. In this way, when the target gas combines with the adapter, the detection membrane 3 is deformed, so that the stress on the supporting piezoresistive element 2 changes, and then the resistance of the supporting piezoresistive element 2 changes, and the electrical signal can be detected and analyzed by the electrical signal detector 162. This makes the deformation of the detection membrane 3 different, and thus makes the electrical signal different, so the detection and analysis of the gas can be achieved by analyzing the electrical signal, which is very convenient and easy to operate. In addition, when the supporting piezoresistive element 2 fails or is damaged and needs to be replaced, the movable carrier plate 4 is also pulled upward to make the positioning plug rod 77 plug into the second positioning hole 195, driving the protective movable cover 5 to separate, so that the detection membrane 3 and the supporting piezoresistive element 2 are no longer restricted by the limiting pressure ring 43, and the supporting piezoresistive element 2 will not be connected to the circuit, so that the supporting piezoresistive element 2 can be quickly replaced.

[0051] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A membrane-type surface stress sensor, comprising a sensor substrate (1), characterized in that: A support plate (11) is fixedly mounted on one end of the sensor substrate (1), a mounting groove (12) is provided on the support plate (11), guide slots (13) are symmetrically provided at both ends of the mounting groove (12), and movable sockets (14) are symmetrically provided on both sides of the support plate (11), and a connecting through hole (15) is provided in the movable socket (14), a power source (16) is fixedly mounted on the other end of the sensor substrate (1), wires (161) are respectively provided on both sides of the power source (16), and an electrical signal detector (162) is connected to the wire (161) on one side, and a conductive sleeve (17) is fixedly connected to the end of the wire (161) away from the power source (16), and the conductive sleeve (17) ) is fixedly mounted on an insulating carrier (18), the lower end of the insulating carrier (18) is plugged into the movable socket (14), and a connecting rod (181) is fixedly arranged on the insulating carrier (18), the connecting rod (181) is plugged into the connecting through hole (15), and a connecting rod (182) is fixedly arranged at one end of the connecting rod (181) away from the insulating carrier (18), the connecting rod (182) is located on the outer side of the supporting platform (11), and connecting rods (183) are symmetrically fixedly arranged at both ends of the lower side of the connecting rod (182), and supporting and matching vertical plates (19) are symmetrically fixedly arranged on both sides of one end of the sensor substrate (1) close to the supporting platform (11), and the supporting and matching vertical plates (19) A supporting crossbeam plate (191) is fixedly arranged between the supporting crossbeam plate (191), a movable matching hole (192) is provided on the supporting crossbeam plate (191), and positioning matching strips (193) are symmetrically fixedly arranged on both sides of the supporting crossbeam plate (191), a first positioning hole (194) is provided on the positioning matching strip (193), a second positioning hole (195) is provided on the positioning matching strip (193) on the upper side of the first positioning hole (194), and a third positioning hole (196) is provided on the positioning matching strip (193) on the upper side of the second positioning hole (195), and first supporting rods (197) are symmetrically fixedly arranged at both ends of the supporting matching vertical plate (19), and one end of the first supporting rod (197) away from the supporting matching vertical plate (19) is A limited end block (198) is fixedly arranged, and a second support rod (199) is fixedly arranged on the support matching vertical plate (19) at the lower side of the first support rod (197); a membrane-type convenient detection mechanism is arranged on the sensor substrate (1), and the membrane-type convenient detection mechanism comprises a support piezoresistive element (2), a detection membrane (3), a movable carrier plate (4), a protective movable cover (5), a drive connection plate (6) and a movable connection plate (7); the support piezoresistive element (2) is inserted into the installation groove (12), and guide plug blocks (21) are symmetrically fixedly arranged at both ends of the support piezoresistive element (2), and the guide plug blocks (21) are inserted into the guide slots (13); conductive columns (22) are symmetrically fixedly arranged on both sides of the support piezoresistive element (2);The supporting piezoresistive element (2) is covered with a detection film (3); a supporting movable rod (41) is fixedly provided at the lower end of the movable carrier plate (4); the supporting movable rod (41) is plugged into the movable matching hole (192); a mounting socket (42) is provided on the movable carrier plate (4); the mounting socket (42) penetrates the supporting movable rod (41); a limiting pressure ring (43) is fixedly provided at the lower end of the supporting movable rod (41); a connecting plate (44) is fixedly provided on the limiting pressure ring (43); the connecting plate (44) is fixedly connected to the supporting movable rod (41); a supporting vertical plate (45) is symmetrically fixedly provided on the movable carrier plate (44); a supporting socket (46) is provided on the supporting vertical plate (45); and the movable carrier plate ( 4) is also symmetrically fixedly provided with a matching vertical plate (47), a load-bearing matching rod (48) is fixedly provided at the lower end of the matching vertical plate (47), a matching connecting strip (481) is fixedly provided on the load-bearing matching rod (48), matching connecting blocks (482) are symmetrically fixedly provided on both sides of each end of the matching connecting strip (481), a hinged connecting rod (49) is symmetrically hingedly provided at the lower end of the matching vertical plate (47), a protective movable cover (5) is hingedly provided at the upper end of the hinged connecting rod (49), a matching groove (51) is provided at the upper end of the protective movable cover (5), the matching groove (51) of the protective movable cover (5) is matched with the supporting movable rod (41) in the closed state, and a matching channel (52) is provided at the lower end of the protective movable cover (5), A wire (161) is inserted into the matching channel (52), support connecting plates (53) are symmetrically fixedly arranged on both sides of the protective movable cover (5), and a support matching hole (54) is provided on the support connecting plate (53). The two ends of the matching connecting strip (481) are respectively connected to a driving connecting plate (6), and a plug-in movable hole (61) is provided on the driving connecting plate (6). A second supporting rod (199) is inserted into the plug-in movable hole (61), and a connecting vertical plate (62) is fixedly arranged at one end of the driving connecting plate (6), and a matching inclined plate (63) is symmetrically fixedly arranged on the connecting vertical plate (62). A stabilizing connecting frame (65) is also fixedly arranged on the driving connecting plate (6), and a matching connecting frame (65) is fixedly arranged on the stabilizing connecting frame (65). The movable connecting plate (7) is mounted on the movable carrier plate (4), and a mounting plug rod (71) is fixedly provided at the lower end of the movable connecting plate (7), the mounting plug rod (71) is inserted into the mounting socket (42), and a connecting spring (72) is sleeved on the mounting plug rod (71), the two ends of the movable connecting plate (7) are symmetrically hinged with matching hinge rods (73), the upper end of the matching hinge rod (73) is hinged with a movable connecting frame (74), the movable connecting frame (74) is fixedly provided with a guide plug rod (75), the guide plug rod (75) is inserted into the support socket (46), and a positioning movable plate (76) is fixedly provided on the guide plug rod (75),A positioning plug rod (77) is fixedly provided on the positioning movable plate (76).

2. A membrane type surface stress sensor according to claim 1, characterized in that: The limiting pressure ring (43) is pressed on the detection membrane (3) when it plays a limiting role on the detection membrane (3) and the supporting piezoresistive element (2).

3. A membrane type surface stress sensor according to claim 2, characterized in that: A first support rod (197) is inserted into the support matching hole (54), and the support connecting plate (53) is hingedly connected to the hinge connecting rod (49).

4. The membrane type surface stress sensor according to claim 3, characterized in that: The matching inclined plate (63) is provided with a connecting slideway (64), and a matching connecting block (482) is inserted into the connecting slideway (64).

5. The membrane type surface stress sensor according to claim 4, characterized in that: When the protective movable cover (5) is closed together, the positioning plug-in rod (77) is plugged into the first positioning hole (194).

6. A gas detection and analysis method, characterized in that: The gas detection and analysis method is applicable to the film-type surface stress sensor according to any one of claims 1 to 5, comprising the following steps: Step 1: Opening the protective movable cover (5): Pushing the movable connecting plate (7) downwards towards the movable carrier plate (4), and then pulling the movable carrier plate (4) upwards, thereby driving the protective movable cover (5) to move back and forth and open; Step 2: supporting the piezoresistive element (2) to connect to the circuit: pulling up the movable carrier plate (4) so ​​that the positioning plug rod (77) is plugged into the third positioning hole (196), thereby driving the conductive sleeve (17) to move so that it is sleeved on the conductive column (22) on the supporting piezoresistive element (2), thereby achieving circuit connectivity; Step 3: Analysis of electrical signals: Different gases cause the deformation of the detection film (3) to be different, thereby causing different stresses on the supporting piezoresistive element (2), causing its resistance to change. The electrical signal is detected by the electrical signal detector (162), and the gas is detected and analyzed through the changes in the electrical signal.