A cooling mechanism for double-sided polishing machine

Abstract

The present invention discloses a cooling mechanism for a double-sided polishing machine, and relates to the technical field of double-sided polishing machines. The present invention comprises a base, one side of which is symmetrically fixed with a lower polishing motor and an upper polishing motor, and the other side of the base is fixed with lifting devices at positions corresponding to the lower polishing motor and the upper polishing motor; a liquid collecting bin is fixed on the base and located between the two lifting devices, and a liquid discharge port is provided on one side of the liquid collecting bin; an upper polishing assembly and a lower polishing assembly are rotatably arranged on the two lifting devices, respectively; and a cooling assembly is fixed in the liquid collecting bin. The present invention can clamp a plurality of circular workpieces through an auxiliary cooling assembly, and can preliminarily cool the polishing disc through the upper polishing assembly and the lower polishing assembly, and can secondarily cool the polishing disc through the auxiliary cooling assembly, and finally can cool the workpiece through the second cooling assembly, thereby greatly improving the cooling effect.

Description

Technical Field

[0001] The invention relates to the technical field of double-sided polishing machines, in particular to a cooling mechanism for double-sided polishing machines. Background Art

[0002] The double-sided polishing machine is a high-precision and high-efficiency double-sided polishing processing equipment used for semiconductor silicon wafers, magnetic materials, sapphire, optical glass, metal materials and other hard and brittle materials. The machine adopts the four-motion polishing principle; two motors respectively drive the upper and lower polishing discs, the sun gear, and the inner ring gear; PLC adjustment setting control; color NT display human-machine interface system.

[0003] However, the cooling mechanism of the current double-sided polishing machine is relatively simple. It only cools down by spraying polishing liquid on the polishing disc, resulting in poor cooling effect. In addition, opening holes on the polishing wheel to discharge liquid will affect the polishing effect. In addition, the dust after polishing is easy to accumulate in the hole and cause blockage. It is also difficult to clamp the round workpiece when polishing, affecting the polishing efficiency.

[0004] In view of the above problems, the present invention provides a cooling mechanism for a double-sided polishing machine to solve the above problems. Summary of the invention

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a cooling mechanism for a double-sided polishing machine, comprising: a base, one side of which is symmetrically fixed with a lower polishing motor and an upper polishing motor, and the other side of the base is fixed with lifting devices at positions corresponding to the lower polishing motor and the upper polishing motor; a liquid collecting bin is fixed on the base and located between the two lifting devices, and one side of the liquid collecting bin is provided with a liquid drain port; an upper polishing assembly and a lower polishing assembly are rotatably arranged on the two lifting devices respectively;

[0006] A cooling component is fixed in the liquid collecting bin; wherein the cooling component includes a main cooling component and an auxiliary cooling component, the main cooling component and the auxiliary cooling component are coaxially arranged, the main cooling component is used to cool the workpiece, and the auxiliary cooling component is used to clamp the workpiece and to assist in cooling the upper polishing component and the lower polishing component.

[0007] Further, preferably, the upper polishing assembly and the lower polishing assembly have the same structure, and both include: a connecting plate rotatably arranged in the lifting device; a cooling plate coaxially fixed on the connecting plate; a spiral groove opened on an end surface of the cooling plate away from the connecting plate; a cooling port 1 connected to the side wall of the cooling plate and connected to one end of the spiral groove; and a polishing plate fixed on the cooling plate.

[0008] Further, preferably, a cooling outlet is provided in the middle of the cooling plate, and the other end of the spiral groove is connected to the cooling outlet, and a plurality of liquid outlets are obliquely provided at positions corresponding to the cooling outlet on the connecting plate in the lower polishing assembly.

[0009] Further, preferably, the main cooling component includes: a fixed ring, which is fixed in the liquid collecting bin by a plurality of columns, and the fixed ring is provided with avoidance openings at corresponding positions of the upper polishing component and the lower polishing component; a sliding groove, which is symmetrically opened on the upper and lower end surfaces of the fixed ring; and at least two cooling nozzles, which are symmetrically slidably arranged in the two sliding grooves, and the number of the cooling nozzles in the two sliding grooves is the same.

[0010] Further, preferably, the auxiliary cooling component includes: a connecting column, fixed in the liquid collecting bin, and a rotating motor is fixed on its lower end surface; a lifting cylinder body, fixed on a side of the liquid collecting bin away from the lower polishing component, and a placement plate is fixed on the output end of the lifting cylinder body; a rotating shaft, rotatably arranged in the connecting column and driven by the rotating motor; a rotating plate, fixed on the rotating shaft, and provided with a plurality of clamping grooves; a limiting assembly, which is configured into a plurality of ones corresponding to the clamping grooves one by one and installed on the rotating plate.

[0011] Further, preferably, the clamping groove corresponds to the placement plate, and when the workpiece is placed on the placement plate, the upper and lower end surfaces of the workpiece are at the same distance from the clamping groove.

[0012] Further, preferably, the limit assembly comprises: a rotation groove, which is provided on the rotation disk and is coaxial with the clamping groove, and a plurality of positioning grooves are provided at the bottom of the rotation groove; a limit ring, which is rotatably arranged in the rotation groove, and a plurality of limit holes are provided on the limit ring, and a limit column is slidably arranged in one of the limit holes, and the limit column is plugged into the positioning groove for limiting; a limit block, which is configured as a plurality of blocks and is circumferentially fixed on the lower end surface of the limit ring; a clamping assembly, which is configured as a plurality of blocks, which correspond to the limit blocks one by one, are slidably arranged in the clamping groove, and a tension spring is provided between the limit ring and the rotation disk;

[0013] The cooling pipes are configured in multiple numbers, fixed on the lower end surface of the rotating disk, and arranged in one-to-one correspondence with the clamping grooves.

[0014] Further, preferably, the clamping assembly includes: a clamping column, which is slidably arranged in the clamping groove and extends into the rotating groove, and a limiting groove is provided on one side of the rotating groove; a second cooling port, which is configured as two and is symmetrically and obliquely arranged on the clamping column; and a clamping plate, which is fixed on one end of the clamping column away from the limiting groove.

[0015] Further, preferably, the cooling pipe includes a main pipe and a branch pipe, wherein the main pipe is connected to an external liquid supply device, and the branch pipe is configured in plurality and connected to the clamping columns in a one-to-one correspondence.

[0016] Compared with the prior art, the present invention provides a cooling mechanism for a double-sided polishing machine, which has the following beneficial effects:

[0017] In the present invention, the height of the workpiece can be adjusted by lifting the cylinder body, so that workpieces of different thicknesses are located in the middle position of the clamping groove, which is convenient for clamping and polishing. When clamping, the limit column is pulled to rotate the limit ring, so that the clamping column is pressed to clamp the workpiece, and then the limit column is inserted into the positioning groove for limiting, and the clamping is completed, which is convenient for clamping circular workpieces of various sizes. After the clamping is completed, cooling water can be sprayed on the upper and lower surfaces of the workpiece through the main cooling component according to needs, so as to adjust the temperature of the workpiece before polishing. During polishing, the coolant can enter through the spiral groove to transfer and initially cool the polishing disc to avoid opening holes on the polishing disc, and during polishing, the polishing disc can also be tilted and sprayed with polishing liquid through the second cooling port, which not only can perform secondary cooling on the polishing disc, but also can clean the dust on the polishing disc by tilting spraying, so as to avoid dust entering between the polishing disc and the workpiece and affecting the polishing effect. After the polishing is completed, the upper and lower surfaces of the workpiece can be sprayed with cooling water by the main cooling component again for cooling and cleaning, thereby improving the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of a cooling mechanism for a double-sided polishing machine;

[0019] Figure 2 It is a structural schematic diagram of an upper polishing assembly of a cooling mechanism for a double-sided polishing machine;

[0020] Figure 3 It is a structural schematic diagram of a cooling component of a cooling mechanism for a double-sided polishing machine;

[0021] Figure 4 It is a structural schematic diagram of a limit assembly of a cooling mechanism for a double-sided polishing machine;

[0022] Figure 5 It is a structural schematic diagram of a clamping assembly of a cooling mechanism for a double-sided polishing machine;

[0023] In the figure: 1, base; 2, lower polishing motor; 3, upper polishing motor; 31, lifting device; 4, liquid collecting tank; 41, drain port; 5, upper polishing assembly; 6, lower polishing assembly; 7, main cooling assembly; 8, auxiliary cooling assembly; 51, connecting plate; 52, cooling plate; 53, spiral groove; 54, cooling port 1; 55, polishing plate; 71, fixing ring; 72, sliding groove; 73, cooling nozzle; 81, connecting column; 82, lifting cylinder; 83 , placing plate; 84, rotating shaft; 85, rotating plate; 86, limiting assembly; 87, workpiece; 861, rotating groove; 862, limiting ring; 863, limiting hole; 864, limiting column; 865, limiting block; 866, clamping assembly; 867, tension spring; 868, cooling pipe; 8661, clamping column; 8662, limiting groove; 8663, cooling port 2; 8664, clamping plate; 8681, main pipeline; 8682, branch pipe. DETAILED DESCRIPTION

[0024] Reference Figure 1-Figure 5 The present invention provides a technical solution: a cooling mechanism for a double-sided polishing machine, comprising: a base 1, on one side of which a lower polishing motor 2 and an upper polishing motor 3 are symmetrically fixed, and on the other side of the base 1, a lifting device 31 is fixed at positions corresponding to the lower polishing motor 2 and the upper polishing motor 3; a liquid collecting bin 4, fixed on the base 1 and located between the two lifting devices 31, and a drain port 41 is provided on one side of the liquid collecting bin 4; an upper polishing assembly 5 and a lower polishing assembly 6, which are rotatably arranged on the two lifting devices 31 respectively; a cooling assembly, fixed in the liquid collecting bin 4; wherein the cooling assembly comprises a main cooling assembly 7 and an auxiliary cooling assembly 8, the main cooling assembly 7 and the auxiliary cooling assembly 8 are coaxially arranged, the main cooling assembly 7 is used to cool a workpiece 87, and the auxiliary cooling assembly 8 is used to clamp the workpiece 87 and to perform auxiliary cooling on the upper polishing assembly 5 and the lower polishing assembly 6.

[0025] It should be noted that the lifting device 31 can lift the upper polishing assembly 5 and the lower polishing assembly 6, thereby facilitating double-sided polishing of workpieces 87 of different thicknesses.

[0026] In this embodiment, the upper polishing assembly 5 and the lower polishing assembly 6 have the same structure, and both include: a connecting plate 51, rotatably arranged in the lifting device 31; a cooling plate 52, coaxially fixed on the connecting plate 51; a spiral groove 53, which is provided on an end surface of the cooling plate 52 away from the connecting plate 51;

[0027] The cooling port 1 54 is connected to the side wall of the cooling plate 52 and communicated with one end of the spiral groove 53 ; the polishing plate 55 is fixed on the cooling plate 52 .

[0028] As a preferred embodiment, a cooling outlet is opened in the middle of the cooling plate 52, and the other end of the spiral groove 53 is connected to the cooling outlet. The connecting plate 51 in the lower polishing assembly 6 is inclined to open multiple liquid outlets at positions corresponding to the cooling outlet.

[0029] It should be noted that the liquid entering the spiral groove 53 is coolant, the liquid entering the main cooling component 7 is cooling water, and the liquid entering the auxiliary cooling component 8 is cooled polishing liquid. During polishing, first move the upper polishing component 5 and the lower polishing component 6 away from the workpiece, and rotate the polishing disk 55. At this time, coolant begins to enter the spiral groove 53, and the auxiliary cooling component 8 sprays polishing liquid on the surface of the polishing disk 55, thereby doubly cooling the polishing disk before starting the polishing operation.

[0030] In this embodiment, the main cooling component 7 includes: a fixed ring 71, which is fixed in the liquid collecting bin 4 by a plurality of columns, and the fixed ring 71 is provided with avoidance openings at corresponding positions to the upper polishing component 5 and the lower polishing component 6; sliding grooves 72, which are symmetrically arranged on the upper and lower end surfaces of the fixed ring 71; and at least two cooling nozzles 73, which are symmetrically slidably arranged in the two sliding grooves 72, and the number of the cooling nozzles 73 in the two sliding grooves 72 is the same.

[0031] It should be noted that the cooling water sprayed by the cooling nozzle 73 can clean and cool the surface of the workpiece 87 to prevent impurities on the workpiece 87 from scratching the workpiece 87 during polishing, and when the workpiece 87 needs to be cleaned and cooled in advance, the number of cooling nozzles 73 is four, two of which are located at the position of the workpiece 87 to be polished, and the other two are located at the position of the workpiece 87 after polishing is completed.

[0032] In this embodiment, the auxiliary cooling component 8 includes: a connecting column 81, which is fixed in the liquid collecting bin 4 and has a rotating motor fixed on its lower end surface; a lifting cylinder body 82, which is fixed on the side of the liquid collecting bin 4 away from the lower polishing component 6, and a placement plate 83 is fixed on the output end of the lifting cylinder body 82; a rotating shaft 84, which is rotatably arranged in the connecting column 81 and driven by the rotating motor; a rotating plate 85, which is fixed on the rotating shaft 84 and has a plurality of clamping grooves thereon; a limiting component 86, which is configured as a plurality of components, corresponding one to one with the clamping grooves, and installed on the rotating plate 85.

[0033] As a preferred embodiment, the clamping groove corresponds to the placement plate 83, and when the workpiece 87 is placed on the placement plate 83, the upper and lower end surfaces of the workpiece 87 are at the same distance from the clamping groove.

[0034] That is to say, the height of the workpiece 87 can be adjusted by the lifting cylinder 82, so that workpieces 87 of different thicknesses are located in the middle position of the clamping groove, which is convenient for clamping and polishing. It should be noted that the thickness of the workpiece 87 needs to be greater than the thickness of the rotating disk 85.

[0035] As a preferred embodiment, the limit assembly 86 includes: a rotating groove 861, which is opened on the rotating disk 85 and is coaxial with the clamping groove, and a plurality of positioning grooves are opened at the bottom of the rotating groove 861; a limit ring 862, which is rotatably arranged in the rotating groove 861, and a plurality of limit holes 863 are opened on the limit ring 862, in which a limit column 864 is slidably arranged in one of the limit holes 863, and the limit column 864 is plugged into the positioning groove for limiting; a limit block 865, which is configured as a plurality of blocks and is circumferentially fixed on the lower end surface of the limit ring 862; a clamping assembly 866, which is configured as a plurality of blocks and corresponds to the limit blocks 865 one by one, is slidably arranged in the clamping groove, and a tension spring 867 is arranged between the rotating disk 85; a cooling tube 868, which is configured as a plurality of blocks and is fixed on the lower end surface of the rotating disk 85 and is arranged one by one with the clamping grooves.

[0036] As a preferred embodiment, the clamping assembly 866 includes: a clamping column 8661, which is slidably arranged in the clamping groove and extends into the rotating groove 861, and a limiting groove 8662 is provided on one side of the rotating groove 861; a cooling port 8663, which is configured as two and is symmetrically and obliquely arranged on the clamping column 8661; and a clamping plate 8664, which is fixed on one end of the clamping column 8661 away from the limiting groove 8662.

[0037] Among them, when clamping the workpiece 87, first adjust the height of the workpiece 87 by using the lifting cylinder 82, then manually pull the limit column 864 to make the limit ring 862 out of the limit state, and then manually rotate the limit ring 862, so that the limit block 865 rotates with the limit ring 862, and when the limit block 865 contacts the limit groove 8662, the limit block 865 presses the limit groove 8662 of the clamping column 8661, so that the limit block 865 pushes the clamping column 8661 to slide, and clamps the workpiece 87, and then the limit column 864 is inserted into the positioning groove for limiting, and the clamping is completed.

[0038] As a preferred embodiment, the cooling pipe 868 includes a main pipe 8681 and a branch pipe 8682, wherein the main pipe 8681 is connected to an external liquid supply device, and the branch pipe 8682 is configured in multiple numbers and connected to the clamping columns 8661 one by one.

[0039] Specifically, first, the height of the workpiece 87 is adjusted by the lifting cylinder 82, and then the limiting ring 862 is rotated by pulling the limiting column 864, so as to press the clamping column 8661 to clamp the workpiece 87, and then the limiting column 864 is inserted into the positioning groove for limiting, and the clamping is completed, which is convenient for clamping circular workpieces of various sizes. After the clamping is completed, cooling water can be sprayed on the upper and lower surfaces of the workpiece 87 through the main cooling component 7 according to needs, so as to adjust the temperature of the workpiece 87 before polishing. During polishing, the coolant can enter through the spiral groove 53. The polishing disc 55 is initially cooled by transfer to avoid drilling operations on the polishing disc 55, and the polishing liquid can be sprayed on the polishing disc 55 at an angle through the cooling port 8663 during polishing. Not only can the polishing disc 55 be cooled for a second time, but dust on the polishing disc 55 can also be cleaned by the inclined spraying to avoid dust entering between the polishing disc 55 and the workpiece 87 and affecting the polishing effect. After polishing is completed, cooling water can be sprayed on the upper and lower surfaces of the workpiece 87 again through the main cooling component 7 for cooling and cleaning, thereby improving the cooling effect.

[0040] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A cooling mechanism for a double-sided polishing machine, characterized in that: include: A base (1), on one side of which a lower polishing motor (2) and an upper polishing motor (3) are symmetrically fixed, and on the other side of the base (1) a lifting device (31) is fixed at positions corresponding to the lower polishing motor (2) and the upper polishing motor (3); A liquid collecting bin (4) is fixed on the base (1) and is located between the two lifting devices (31); a liquid discharge port (41) is provided on one side of the liquid collecting bin (4); An upper polishing assembly (5) and a lower polishing assembly (6) are rotatably mounted on the two lifting devices (31) respectively; A cooling component, fixed in the liquid collecting bin (4); The cooling component comprises a main cooling component (7) and an auxiliary cooling component (8); the main cooling component (7) and the auxiliary cooling component (8) are coaxially arranged; the main cooling component (7) is used to cool the workpiece (87); and the auxiliary cooling component (8) is used to clamp the workpiece (87) and to assist in cooling the upper polishing component (5) and the lower polishing component (6); The upper polishing assembly (5) and the lower polishing assembly (6) have the same structure, and both comprise: A connecting plate (51) rotatably disposed in the lifting device (31); A cooling disk (52) coaxially fixed on the connecting disk (51); A spiral groove (53) is formed on an end surface of the cooling disk (52) away from the connecting disk (51); A cooling port 1 (54) connected to the side wall of the cooling plate (52) and in communication with one end of the spiral groove (53); A polishing plate (55) fixed on the cooling plate (52); The auxiliary cooling component (8) comprises: A connecting column (81) is fixed in the liquid collecting bin (4), and a rotating motor is fixed on its lower end surface; A lifting cylinder body (82) is fixed on a side of the liquid collecting bin (4) away from the lower polishing assembly (6), and a placement plate (83) is fixed to an output end of the lifting cylinder body (82); A rotating shaft (84) rotatably disposed in the connecting column (81) and driven by the rotating motor; A rotating disk (85) is fixed on the rotating shaft (84) and is provided with a plurality of clamping grooves; a plurality of limiter assemblies (86) arranged in one-to-one correspondence with the clamping grooves and mounted on the rotating disk (85); The limiting component (86) comprises: A rotating groove (861) is provided on the rotating disk (85) and is coaxial with the clamping groove, and a plurality of positioning grooves are provided at the bottom of the rotating groove (861); A limiting ring (862) is rotatably disposed in the rotating groove (861), and a plurality of limiting holes (863) are provided on the limiting ring (862), wherein a limiting post (864) is slidably disposed in one of the limiting holes (863), and the limiting post (864) is plugged into the positioning groove for limiting position; A plurality of limit blocks (865) are configured and circumferentially fixed on the lower end surface of the limit ring (862); A clamping assembly (866) is configured in a plurality, corresponds to the limit blocks (865) one by one, is slidably disposed in the clamping groove, and has a tension spring (867) disposed between the clamping assembly and the rotating disk (85); A plurality of cooling tubes (868) are arranged, fixed to the lower end surface of the rotating disk (85), and arranged in one-to-one correspondence with the clamping grooves; The clamping assembly (866) comprises: A clamping column (8661) is slidably disposed in the clamping groove and extends into the rotating groove (861), and a limiting groove (8662) is provided on one side of the rotating groove (861); The second cooling port (8663) is configured as two and is symmetrically and obliquely arranged on the clamping column (8661); The clamping plate (8664) is fixed to one end of the clamping column (8661) away from the limiting groove (8662).

2. A cooling mechanism for a double-sided polishing machine according to claim 1, characterized in that: A cooling outlet is provided in the middle of the cooling plate (52), and the other end of the spiral groove (53) is connected to the cooling outlet. A plurality of liquid outlets are provided obliquely on the connecting plate (51) in the lower polishing assembly (6) at positions corresponding to the cooling outlet.

3. A cooling mechanism for a double-sided polishing machine according to claim 1, characterized in that: The main cooling component (7) comprises: A fixed ring (71) is fixed in the liquid collecting bin (4) by using a plurality of columns, and avoidance openings are provided at positions corresponding to the fixed ring (71) and the upper polishing assembly (5) and the lower polishing assembly (6); Sliding grooves (72) are symmetrically arranged on the upper and lower end surfaces of the fixing ring (71); There are at least two cooling nozzles (73) which are symmetrically slidably arranged in the two sliding grooves (72), and the number of the cooling nozzles (73) in the two sliding grooves (72) is the same.

4. A cooling mechanism for a double-sided polishing machine according to claim 1, characterized in that: The clamping groove corresponds to the placement plate (83), and when the workpiece (87) is placed on the placement plate (83), the upper and lower end surfaces of the workpiece (87) are at the same distance from the clamping groove.

5. The cooling mechanism for a double-sided polishing machine according to claim 1, characterized in that: The cooling pipe (868) includes a main pipe (8681) and a branch pipe (8682), wherein the main pipe (8681) is connected to an external liquid supply device, and the branch pipe (8682) is configured in multiple numbers and connected to the clamping columns (8661) in a one-to-one correspondence.

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