A cylindrical MO source cylinder

Abstract

The present invention discloses a cylindrical MO source steel cylinder, and specifically relates to the field of MO source packaging containers. The cylindrical MO source steel cylinder includes a steel cylinder body for accommodating MO source, and the two sides of the upper end of the steel cylinder body are respectively fixedly plugged with an air inlet pipe and an air outlet pipe, and the bottom of the inner side of the steel cylinder body is fixedly connected with a liquid collecting bucket, and the middle part of the liquid collecting bucket is a straight pipe part vertically arranged downward. When the liquid MO source in the steel cylinder body is sufficient, the present invention allows the carrier gas to be discharged from the air outlet, and the carrier gas is evenly distributed inside the steel cylinder body, so as to ensure that the gaseous MO source can be fully carried out. When the liquid MO source in the steel cylinder body is less, the carrier gas pipe is inserted into the inside of the straight pipe part, and the carrier gas is sprayed upward from the gap between the carrier gas pipe and the straight pipe part, increasing the contact with the gas inside the steel cylinder body, and quickly absorbing heat and evaporating to form a gaseous MO source, so as to ensure that the concentration of the gaseous MO source carried by the carrier gas is maintained at a normal level.

Description

Technical Field

[0001] The present invention relates to the technical field of MO source packaging containers, and more specifically, to a cylindrical MO source steel cylinder. Background Art

[0002] MO source is a high-purity metal organic compound with strong volatility. It is a key material for manufacturing LED chips and other semiconductor applications such as power devices. It includes liquid trimethylaluminum, trimethylgallium, triethylgallium and solid trimethylindium, bismuth magnesium, and gallium trichloride.

[0003] MO source cylinders are mainly used to seal high-purity metal organic compounds, and are generally available in 0.5L, 1L, 3L and other specifications. MO source cylinders mainly include cylinder body, air inlet pipe, air inlet valve, air outlet pipe, air outlet valve, and pressure sensor. For liquid MO source cylinders, the air inlet pipe is directly inserted into the liquid. When in use, it is placed in a constant temperature water bath, and the carrier gas (such as hydrogen or nitrogen) is passed into the liquid to produce a bubbling effect, thereby carrying out the gaseous MO source.

[0004] In the later period of using the MO source cylinder, as the MO source decreases, some MO source is distributed around the bottom of the bottle, and the gaseous MO source generated by evaporation cannot fully convect with the carrier gas. Therefore, the bottom is usually set to an arc shape, and the outlet of the air inlet pipe is aligned with the middle of the bottom of the bottle. In this way, in the later period of using, the MO source gathers in the middle of the bottom of the bottle, so that it can form convection with the gaseous MO source. However, due to the reduction of MO source, its evaporation surface is also reduced, and the gaseous MO source generated is insufficient, resulting in the problem of reduced concentration. Therefore, in order to ensure the concentration, a part of the MO source will remain unusable during use, thus resulting in the problem of reduced utilization of the MO source. Summary of the invention

[0005] The present invention provides a cylindrical MO source cylinder to solve the problem that in the later stage of use of the existing MO source cylinder, the evaporation surface is reduced and the generated gaseous MO source is insufficient. In order to ensure the concentration, a part of the MO source will remain unusable during use, resulting in a problem of reduced MO source utilization.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a cylindrical MO source cylinder, comprising a cylinder body for accommodating the MO source, an air inlet pipe and an air outlet pipe are fixedly inserted on both sides of the upper end of the cylinder body, a liquid collecting bucket is fixedly connected to the bottom of the inner side of the cylinder body, the middle part of the liquid collecting bucket is a straight pipe part vertically arranged downward, a carrier gas pipe is vertically arranged inside the cylinder body, the upper end of the carrier gas pipe is connected with the air inlet pipe, and the lower end of the carrier gas pipe points to the straight pipe part; a fixed sleeve is provided on the outer side of the carrier gas pipe, and a fixed pipe is fixedly connected to the circumferential direction of the fixed sleeve, and a plurality of air outlet holes are opened on the side wall of the fixed pipe; a driving assembly is provided on the cylinder body, and the driving assembly is used to drive the carrier gas pipe to move vertically, when the carrier gas pipe is at the highest point, the carrier gas pipe is connected with the interior of the fixed pipe, when the carrier gas pipe is at the lowest point, the carrier gas pipe is disconnected from the interior of the fixed pipe, and the bottom of the carrier gas pipe extends into the interior of the straight pipe part.

[0007] In a preferred embodiment, a guide groove is provided on the inner wall of the fixed sleeve, and the guide groove includes an upper straight groove, an inclined groove and a lower straight groove arranged in sequence from top to bottom. A slider is fixedly connected to the outer wall of the gas carrier tube, and the slider slides inside the upper straight groove, the inclined groove and the lower straight groove. When the slider is located inside the upper straight groove, the gas carrier tube is connected with the interior of the fixed tube.

[0008] In a preferred embodiment, a fixing rod is provided inside the cylinder body, the upper end of the fixing rod is fixedly connected to the top of the cylinder body, the fixing rod is inserted into the inside of the gas carrier tube, and a sealing block is fixedly connected to the bottom end of the fixing rod. The bottom of the gas carrier tube has a narrow opening, and the inner diameter of the narrow opening is smaller than the inner diameter of the gas carrier tube. When the sealing block is located inside the narrow opening, the narrow opening is blocked.

[0009] In a preferred embodiment, a connector is provided at the upper end of the carrier gas pipe, and a metal hose is provided between the air inlet pipe and the connector. The two ends of the metal hose are respectively connected to the lower end of the air inlet pipe and the upper end of the connector, and the upper end of the carrier gas pipe is rotatably connected to the connector.

[0010] In a preferred embodiment, the fixing rod passes through the connecting head from the upper end thereof and extends to the inside of the carrier gas tube, and the fixing rod and the connecting head are vertically slidably mounted.

[0011] In a preferred embodiment, the drive assembly includes a drive rod, the upper end of the connector is fixedly connected to a connection block, the lower end of the drive rod is fixedly connected to the connection block, and the upper end of the drive rod extends upward to the upper end of the cylinder body.

[0012] In a preferred embodiment, the upper end of the driving rod is rotatably connected to a driving ring, convex shafts are fixedly connected on both sides of the driving ring, the upper end of the cylinder body is fixedly connected to a power component, the output end of the power component is fixedly connected to a fork, and a sliding groove is provided at the end of the fork away from the power component, and the convex shaft slides inside the sliding groove.

[0013] In a preferred embodiment, the upper end of the liquid collecting hopper is a conical surface, and the inner diameter of the straight tube portion is larger than the outer diameter of the gas carrier tube.

[0014] In a preferred embodiment, an isolating head is fixedly connected to the top of the cylinder body, the isolating head is located at the bottom of the gas outlet pipe, and the upper end of the isolating head is connected to the gas outlet pipe, and a serpentine channel is arranged inside the isolating head.

[0015] In a preferred embodiment, an air inlet valve is installed at the upper end of the air inlet pipe, an air outlet valve is installed at the upper end of the air outlet pipe, and a pressure sensor is installed at the upper end of the cylinder body, and the pressure sensor is used to detect the pressure inside the cylinder body.

[0016] Technical effects and advantages of the present invention: When the liquid MO source in the cylinder body is sufficient, the carrier gas is discharged from the air outlet, and the carrier gas is evenly distributed inside the cylinder body, thereby ensuring that the gaseous MO source can be fully carried out. When the liquid MO source in the cylinder body is less, the carrier gas tube is inserted into the straight tube part, and the carrier gas is sprayed upward from the gap between the carrier gas tube and the straight tube part to carry the liquid MO source, thereby increasing the contact with the gas inside the cylinder body and quickly absorbing heat and evaporating to form a gaseous MO source, thereby ensuring that the concentration of the gaseous MO source carried by the carrier gas is maintained at a normal level. Compared with the prior art, the cylindrical MO source cylinder has a higher utilization rate of the liquid MO source, and only a small part cannot be used. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0018] Figure 2 It is a top view of the present invention.

[0019] Figure 3 For the present invention Figure 2 Cross-sectional view at CC.

[0020] Figure 4 It is a schematic diagram of the internal structure of the present invention.

[0021] Figure 5 For the present invention Figure 3 A magnified view of the local structure at point A.

[0022] Figure 6 It is a schematic diagram of the installation of the gas carrier tube, the fixing sleeve and the fixing tube of the present invention.

[0023] Figure 7 For the present invention Figure 6 The explosion Figure 1 .

[0024] Figure 8 For the present invention Figure 6 The explosion Figure 2 .

[0025] Fig. 9 It is a schematic diagram of the structure of the driving assembly of the present invention.

[0026] Fig.10 For the present invention Figure 3 A magnified view of the local structure at point B in the middle.

[0027] The accompanying drawings are marked as follows: 1. cylinder body; 10. pressure sensor; 11. liquid collecting bucket; 12. straight pipe; 2. air inlet pipe; 21. air inlet valve; 3. air outlet pipe; 31. air outlet valve; 4. gas carrier pipe; 41. narrow mouth; 42. slider; 5. fixing sleeve; 51. fixing pipe; 511. air outlet hole; 52. guide groove; 521. upper straight groove; 522. inclined groove; 523. lower straight groove; 6. fixing rod; 61. blocking block; 7. connecting head; 71. metal hose; 8. connecting block; 9. driving assembly; 91. driving rod; 92. driving ring; 921. cam; 93. power component; 94. shift fork; 941. slide groove; 100. isolation head; 101. serpentine channel. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] Refer to the instruction manual Figure 1-Figure 10 A cylindrical MO source cylinder includes a cylinder body 1 for containing MO source, the cylinder body 1 is cylindrical, an air inlet pipe 2 and an air outlet pipe 3 are fixedly connected on both sides of the upper end of the cylinder body 1, an air inlet valve 21 is installed on the upper end of the air inlet pipe 2, an air outlet valve 31 is installed on the upper end of the air outlet pipe 3, and a pressure sensor 10 is installed on the upper end of the cylinder body 1. The pressure sensor 10 is used to detect the pressure inside the cylinder body 1. The gas enters the interior of the cylinder body 1 through the air inlet valve 21 and the air inlet pipe 2, and is discharged through the air outlet pipe 3 and the air outlet valve 31.

[0030] A liquid collecting bucket 11 is fixedly connected to the bottom of the inner side of the cylinder body 1, and the middle part of the liquid collecting bucket 11 is a straight pipe part 12 arranged vertically downward. A gas carrier pipe 4 is vertically arranged inside the cylinder body 1, and the upper end of the gas carrier pipe 4 is connected with the air inlet pipe 2, and the lower end of the gas carrier pipe 4 points to the straight pipe part 12; a fixed sleeve 5 is provided on the outer side of the gas carrier pipe 4, and a fixed pipe 51 is fixedly connected to the fixed sleeve 5 in the circumferential direction, and a plurality of air outlet holes 511 are opened on the side wall of the fixed pipe 51; a driving assembly 9 is provided on the cylinder body 1, and the driving assembly 9 is used to drive the gas carrier pipe 4 to move vertically. When the gas carrier pipe 4 is at the highest point, the gas carrier pipe 4 is connected with the interior of the fixed pipe 51, and when the gas carrier pipe 4 is at the lowest point, the gas carrier pipe 4 is disconnected from the interior of the fixed pipe 51, and the bottom of the gas carrier pipe 4 extends into the interior of the straight pipe part 12.

[0031] In this embodiment, if Figure 6-Figure 8 As shown, a guide groove 52 is opened on the inner wall of the fixed sleeve 5, and the guide groove 52 includes an upper straight groove 521, an inclined groove 522 and a lower straight groove 523 which are arranged in sequence from top to bottom. A slider 42 is fixedly connected to the outer wall of the gas carrier tube 4, and the slider 42 slides inside the upper straight groove 521, the inclined groove 522 and the lower straight groove 523. When the slider 42 is located in the upper straight groove 521, the gas carrier tube 4 is connected to the interior of the fixed tube 51.

[0032] It should be noted that a hole is provided on the side wall of the gas carrier tube 4. When the slider 42 is located inside the upper straight groove 521, the end of the fixed tube 51 is aligned with the hole, so that the fixed tube 51 is connected to the inside of the gas carrier tube 4. When the gas carrier tube 4 moves downward, the slider 42 slides downward from the upper straight groove 521, the inclined groove 522 and the lower straight groove 523 in sequence. When passing through the inclined groove 522, the gas carrier tube 4 rotates, so that the end of the fixed tube 51 is offset from the hole, so that the fixed tube 51 is disconnected from the gas carrier tube 4.

[0033] In this embodiment, if Figure 3-Figure 5 As shown, a fixing rod 6 is provided inside the cylinder body 1, the upper end of the fixing rod 6 is fixedly connected to the top of the cylinder body 1, the fixing rod 6 is inserted into the inside of the gas carrier tube 4, and a blocking block 61 is fixedly connected to the bottom end of the fixing rod 6. The bottom of the gas carrier tube 4 has a narrow opening 41, and the inner diameter of the narrow opening 41 is smaller than the inner diameter of the gas carrier tube 4. When the blocking block 61 is located inside the narrow opening 41, the narrow opening 41 is blocked.

[0034] It should be noted that when the gas carrier tube 4 is at the highest point, the blocking block 61 is located inside the narrow opening 41 to block the narrow opening 41 , and when the gas carrier tube 4 is at the lowest point, the blocking block 61 detaches from the narrow opening 41 and enters the inside of the gas carrier tube 4 , thereby opening the narrow opening 41 .

[0035] In this embodiment, if Figure 3As shown, a connector 7 is provided at the upper end of the gas carrier pipe 4, and a metal hose 71 is provided between the air inlet pipe 2 and the connector 7. The two ends of the metal hose 71 are respectively connected to the lower end of the air inlet pipe 2 and the upper end of the connector 7, and the upper end of the gas carrier pipe 4 is rotatably connected to the connector 7.

[0036] It should be noted that the metal hose 71 is made of stainless steel, which has strong corrosion resistance. Through the soft connection of the metal hose 71, the driving assembly 9 can drive the connector 7 to drive the carrier gas pipe 4 to move downward. The carrier gas pipe 4 is rotatably connected to the connector 7, so that during the rotation of the carrier gas pipe 4, the connector 7 is not affected by the rotation.

[0037] In this embodiment, if Figure 1 , Figure 4 and Fig. 9 As shown, the driving assembly 9 includes a driving rod 91, the upper end of the connecting head 7 is fixedly connected to the connecting block 8, the lower end of the driving rod 91 is fixedly connected to the connecting block 8, and the upper end of the driving rod 91 extends upward to the upper end of the cylinder body 1.

[0038] Furthermore, the upper end of the driving rod 91 is rotatably connected to the driving ring 92, and the two sides of the driving ring 92 are fixedly connected to the convex shaft 921, the upper end of the cylinder body 1 is fixedly connected to the power component 93, and the output end of the power component 93 is fixedly connected to the fork 94, and the end of the fork 94 away from the power component 93 is provided with a slide groove 941, and the convex shaft 921 slides inside the slide groove 941.

[0039] It should be noted that the shift fork 94 is a "Y" shaped structure. Fig. 9 As shown, both sides of the end are provided with slide grooves 941, and the convex shafts 921 on both sides of the driving ring 92 slide inside the two slide grooves 941 respectively. When the power component 93 drives the fork 94 to swing downward, the fork 94 drives the driving rod 91 to move downward through the driving ring 92. At this time, the convex shaft 921 slides inside the slide groove 941. When the power component 93 drives the fork 94 to swing upward, the fork 94 drives the driving rod 91 to move upward through the driving ring 92. The driving rod 91 can drive the connecting block 8, the connecting head 7 and the carrier gas tube 4 to move upward or downward at the same time. Among them, the power component 93 is a motor.

[0040] In this embodiment, if Figure 3 As shown, the upper end of the liquid collecting bucket 11 is a conical surface, and the inner diameter of the straight tube portion 12 is larger than the outer diameter of the gas carrier tube 4.

[0041] It should be noted that, through the setting of the conical surface, when the liquid MO source is small, it can flow along the conical surface toward the inside of the straight tube portion 12. The inner diameter of the straight tube portion 12 is larger than the outer diameter of the carrier tube 4. The purpose is to allow the gas to be sprayed upward from the gap between the carrier tube 4 and the straight tube portion 12.

[0042] In this embodiment, the implementation method is specifically as follows: the MO source stored in the steel cylinder body 1 is a liquid MO source, such as trimethylaluminum, trimethylgallium, and triethylgallium. In the initial state, the driving rod 91, the connector 7, and the carrier tube 4 are at the highest point, the slider 42 is located inside the upper straight groove 521, the fixed tube 51 is connected to the inside of the carrier tube 4, and the blocking block 61 at the bottom of the fixed rod 6 is located inside the narrow mouth 41, blocking the narrow mouth 41. When in use, the steel cylinder body 1 is placed in a constant temperature water bath, and the liquid MO source in the steel cylinder body 1 evaporates to form a gaseous MO source. A carrier gas, such as hydrogen or nitrogen, is introduced into the interior of the steel cylinder body 1 from the air inlet valve 21 and the air inlet pipe 2. The carrier gas enters the fixed tube 51 from the hole on the side wall of the fixed sleeve 5 and is discharged from the fixed tube 51. After entering the liquid MO source, a bubbling effect is generated, and the gaseous MO source is discharged from the outlet pipe 3 and the outlet valve 31 to the production line to participate in the production. As production proceeds, the liquid MO source in the cylinder body 1 gradually decreases. When it decreases to the point where the liquid surface contacts the liquid collecting bucket 11, if it continues to decrease, the area of ​​the MO source liquid surface will decrease, the heat absorbed will decrease, and the evaporated gaseous MO source will decrease. In order to ensure the concentration of the gaseous MO source, the driving component 9 drives the carrier tube 4 to move downward. During the movement, the slider 42 enters the inclined groove 522 and the lower straight groove 523 from the upper straight groove 521 in turn. Under the guidance of the inclined groove 522, the carrier tube 4 rotates, so that the hole on the side wall of the carrier tube 4 is offset from the end of the fixed tube 51, so that the carrier tube 4 is disconnected from the fixed tube 51, and the fixed rod 6 is stationary, and then the blocking block 61 enters the carrier tube 4. Tube 4 breaks away from the narrow mouth 41 and enters the interior of the carrier gas tube 4, so that the narrow mouth 41 is opened, and the bottom of the carrier gas tube 4 is inserted into the straight tube portion 12. The difference between the inner diameter of the straight tube portion 12 and the outer diameter of the carrier gas tube 4 is controlled to be about 0.5 mm. When the carrier gas passes from the carrier gas tube 4 into the cylinder body 1, the carrier gas is ejected upward from the gap between the straight tube portion 12 and the carrier gas tube 4. Since the gap is small, the carrier gas will carry the liquid MO source and spray upward, increasing the contact between the liquid MO source and the gas inside the cylinder body 1, so as to make it quickly absorb heat and evaporate to form a gaseous MO source, so as to ensure that the concentration of the gaseous MO source carried by the carrier gas is maintained at a normal level. When the liquid MO source in the liquid collecting bucket 11 is less, stop using it.

[0043] According to the above technical solution, when the liquid MO source in the cylinder body 1 is sufficient, the carrier gas is discharged from the gas outlet 511, and the carrier gas is evenly distributed inside the cylinder body 1, thereby ensuring that the gaseous MO source can be fully carried out. When the liquid MO source in the cylinder body 1 is less, the carrier gas tube 4 is inserted into the straight tube portion 12, and the carrier gas carries the liquid MO source upward from the gap between the carrier gas tube 4 and the straight tube portion 12 to spray, increase the contact with the gas inside the cylinder body 1, and quickly absorb heat and evaporate to form a gaseous MO source, thereby ensuring that the concentration of the gaseous MO source carried by the carrier gas is maintained at a normal level. Compared with the prior art, the cylindrical MO source cylinder has a higher utilization rate of the liquid MO source.

[0044] In this embodiment, if Figure 3 As shown, the fixing rod 6 passes through the connecting head 7 from the upper end thereof and extends to the inside of the carrier gas tube 4 , and the fixing rod 6 and the connecting head 7 are vertically slidably installed.

[0045] It should be noted that the fixing rod 6 is coaxial with the gas carrier tube 4 . When the gas carrier tube 4 moves vertically, the fixing rod 6 remains stationary, and the connector 7 slides on the fixing rod 6 .

[0046] In this embodiment, if Fig.10 As shown, an isolation head 100 is fixedly connected to the top of the cylinder body 1, the isolation head 100 is located at the bottom of the gas outlet pipe 3, and the upper end of the isolation head 100 is connected to the gas outlet pipe 3, and a serpentine channel 101 is arranged inside the isolation head 100.

[0047] It should be noted that, by setting the serpentine channel 101, it is possible to prevent the liquid MO source sprayed upward from entering the air outlet pipe 3.

[0048] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A cylindrical MO source cylinder, characterized in that: It comprises a steel cylinder body (1) for containing an MO source, an air inlet pipe (2) and an air outlet pipe (3) are fixedly plugged into the two sides of the upper end of the steel cylinder body (1), a liquid collecting bucket (11) is fixedly connected to the bottom of the inner side of the steel cylinder body (1), the middle part of the liquid collecting bucket (11) is a straight pipe part (12) arranged vertically downward, a gas carrier pipe (4) is vertically arranged inside the steel cylinder body (1), the upper end of the gas carrier pipe (4) is connected to the air inlet pipe (2), and the lower end of the gas carrier pipe (4) points to the straight pipe part (12); A fixing sleeve (5) is sleeved on the outer side of the gas carrier tube (4), a fixing tube (51) is fixedly connected to the fixing sleeve (5) in the circumferential direction, and a plurality of gas outlet holes (511) are opened on the side wall of the fixing tube (51); The cylinder body (1) is provided with a driving assembly (9), and the driving assembly (9) is used to drive the gas carrier tube (4) to move vertically; A fixing rod (6) is arranged inside the cylinder body (1), the upper end of the fixing rod (6) is fixedly connected to the top of the cylinder body (1), the fixing rod (6) is inserted into the inside of the carrier gas pipe (4), and a blocking block (61) is fixedly connected to the bottom end of the fixing rod (6), the bottom of the carrier gas pipe (4) has a narrow opening (41), the inner diameter of the narrow opening (41) is smaller than the inner diameter of the carrier gas pipe (4), and the blocking block (61) blocks the narrow opening (41) when it is located inside the narrow opening (41); When the carrier gas tube (4) is at the highest point, the fixed tube (51) is connected to the inside of the carrier gas tube (4), and the blocking block (61) is located inside the narrow opening (41) to block the narrow opening (41), thereby preventing the carrier gas tube (4) from being connected to the straight tube portion (12); when the carrier gas tube (4) is at the lowest point, the hole on the side wall of the carrier gas tube (4) is offset from the end of the fixed tube (51), thereby disconnecting the carrier gas tube (4) from the fixed tube (51), and the blocking block (61) is separated from the narrow opening (41) and enters the inside of the carrier gas tube (4), thereby opening the narrow opening (41), and the bottom of the carrier gas tube (4) is inserted into the inside of the straight tube portion (12) and connected to the straight tube portion (12); The inner diameter of the straight tube portion (12) is greater than the outer diameter of the gas carrier tube (4).

2. A cylindrical MO source cylinder according to claim 1, characterized in that: A guide groove (52) is provided on the inner side wall of the fixed sleeve (5), and the guide groove (52) comprises an upper straight groove (521), an inclined groove (522), and a lower straight groove (523) which are arranged in sequence from top to bottom. A slider (42) is fixedly connected to the outer side wall of the gas carrier tube (4), and the slider (42) slides inside the upper straight groove (521), the inclined groove (522), and the lower straight groove (523). When the slider (42) is located inside the upper straight groove (521), the gas carrier tube (4) is connected to the inside of the fixed tube (51).

3. The cylindrical MO source cylinder according to claim 1, characterized in that: A connector (7) is provided at the upper end of the carrier gas pipe (4), a metal hose (71) is provided between the air inlet pipe (2) and the connector (7), two ends of the metal hose (71) are respectively connected to the lower end of the air inlet pipe (2) and the upper end of the connector (7), and the upper end of the carrier gas pipe (4) is rotatably connected to the connector (7).

4. A cylindrical MO source cylinder according to claim 3, characterized in that: The fixing rod (6) passes through the connecting head (7) from the upper end of the connecting head (7) and extends to the inside of the gas carrier tube (4). The fixing rod (6) and the connecting head (7) are vertically slidably mounted.

5. The cylindrical MO source cylinder according to claim 3, characterized in that: The driving assembly (9) comprises a driving rod (91), the upper end of the connecting head (7) is fixedly connected to a connecting block (8), the lower end of the driving rod (91) is fixedly connected to the connecting block (8), and the upper end of the driving rod (91) extends upward to the upper end of the cylinder body (1).

6. A cylindrical MO source cylinder according to claim 5, characterized in that: The upper end of the driving rod (91) is rotatably connected to a driving ring (92), and both sides of the driving ring (92) are fixedly connected to convex shafts (921). The upper end of the cylinder body (1) is fixedly connected to a power component (93), and the output end of the power component (93) is fixedly connected to a shift fork (94), and a sliding groove (941) is formed at one end of the shift fork (94) away from the power component (93), and the convex shaft (921) slides inside the sliding groove (941).

7. The cylindrical MO source cylinder according to claim 1, characterized in that: The upper end of the liquid collecting hopper (11) is a conical surface.

8. The cylindrical MO source cylinder according to claim 1, characterized in that: The top of the cylinder body (1) is fixedly connected to an isolating head (100), the isolating head (100) is located at the bottom of the gas outlet pipe (3), and the upper end of the isolating head (100) is in communication with the gas outlet pipe (3), and a serpentine channel (101) is provided inside the isolating head (100).

9. The cylindrical MO source cylinder according to claim 1, characterized in that: An air inlet valve (21) is installed at the upper end of the air inlet pipe (2), an air outlet valve (31) is installed at the upper end of the air outlet pipe (3), and a pressure sensor (10) is installed at the upper end of the cylinder body (1). The pressure sensor (10) is used to detect the pressure inside the cylinder body (1).

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