A magnetic levitation transportation device and a magnetic levitation transportation system

Abstract

The present application provides a maglev transport device and a maglev transport system, wherein the maglev transport device comprises a stator platform, a mover, a charging seat and a discharge seat. The mover comprises a mover body, an electrostatic chuck and a charge and discharge plug for charging and discharging the electrostatic chuck. The mover body is suspended and moves on the stator platform in a moving iron type magnetic levitation manner, the electrostatic chuck is installed on the upper surface of the mover body, and the charge and discharge plug is installed on the side of the mover. The charging seat and the discharge seat are arranged at the peripheral position of the stator platform. During operation, the mover is driven by the stator platform to move close to the charging seat or the discharge seat, and the charge and discharge plug is docked with the charging seat so that the electrostatic chuck is charged to obtain electrostatic adsorption ability, and the charge and discharge plug is docked with the discharge seat so that the electrostatic chuck is discharged to lose or weaken the electrostatic adsorption ability. The mover of the maglev transport device of the present application can adsorb objects through electrostatic adsorption, thereby improving the stability of the mover in transporting items under high-speed dynamic conditions.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a magnetic levitation transportation device and a magnetic levitation transportation system. Background Art

[0002] With the continuous improvement of chip precision, the chip manufacturing equipment in the semiconductor industry, such as lithography machines, wafer cutting machines, chip bonding equipment, wafer heat treatment equipment, etc., and chip detection equipment, such as wafer film thickness detection equipment, wafer defect detection equipment, etc., have higher and higher requirements for moving parts, so high-precision ultra-precision positioning systems play an increasingly important role in the semiconductor field. Magnetic levitation technology has gradually been used in the semiconductor industry with its superior performance. Compared with traditional motion platforms, magnetic levitation motion platforms have the following advantages: no mechanical contact and friction, meeting the requirements of ultra-clean manufacturing environment, low maintenance cost, long service life, suitable for vacuum environment, etc. The motion platform based on magnetic levitation planar motor is widely used in semiconductor equipment and is one of the most important moving parts in lithography machines. It can not only achieve contactless motion in six degrees of freedom, but also perform large-stroke motion in two dimensions, with good positioning accuracy and motion accuracy.

[0003] There are two main types of magnetic levitation planar motors: one uses magnets as stators and coils as movers, i.e., the moving coil type; the other uses coils as stators and magnets as movers, i.e., the moving iron type. In some application scenarios in the semiconductor industry, in order to avoid disturbance and friction of cables, it is usually required that the movers must not have cables. Moving iron type magnetic levitation planar motors can achieve complete cable-free operation on the movers, and do not require additional batteries.

[0004] However, when the magnetic levitation planar motor in the prior art transports objects, there is a risk of the load being unstable during high deceleration or high acceleration, and there is a risk of the objects falling. Summary of the invention

[0005] The purpose of the embodiments of the present application is to provide a magnetic levitation transportation device and a magnetic levitation transportation system, wherein the mover of the magnetic levitation transportation device can adsorb objects through electrostatic adsorption, thereby improving the stability of the mover in transporting objects under high-speed dynamic conditions. At the same time, in the magnetic levitation transportation system, the stator platform that generates more heat is designed to be placed outside the sealed cavity, thereby avoiding the problem of heat not being able to be effectively discharged in a vacuum environment, thereby ensuring the stable operation of the entire magnetic levitation transportation system.

[0006] In a first aspect, the present application provides a magnetic levitation transportation device, including a stator platform, a mover, a charging seat and a discharging seat.

[0007] Among them, the mover includes a mover body, an electrostatic chuck and a charging and discharging plug for charging and discharging the electrostatic chuck; the mover body is suspended on the stator platform in a moving iron type magnetic levitation manner, the electrostatic chuck is installed on the upper surface of the mover body, and the charging and discharging plug is installed on the side of the mover.

[0008] The charging seat is set at a predetermined position around the stator platform and is higher than the upper surface of the stator platform; when working, the mover is driven by the stator platform to move to a position close to the charging seat so that the charging and discharging plugs of the electrostatic chuck can be docked with the charging seat, and the electrostatic chuck can be charged to obtain electrostatic adsorption capacity. The discharge seat is set at a predetermined position around the stator platform and is higher than the upper surface of the stator platform; when working, the mover is driven by the stator platform to move to a position close to the discharge seat so that the charging and discharging plugs of the electrostatic chuck can be docked with the discharge seat, and the electrostatic chuck can be discharged to lose or weaken its electrostatic adsorption capacity.

[0009] In an practicable solution, the number of the charging and discharging plugs is one or more. When the number of the charging and discharging plugs is greater than or equal to two, all the charging and discharging plugs are evenly distributed in a circle around the center of the mover.

[0010] In an implementable solution, the edge of the electrostatic chuck exceeds the edge of the mover body; the charge and discharge plug is installed on the bottom surface of the electrostatic chuck and is located in the area where the edge of the electrostatic chuck exceeds the edge of the mover body. Or the charge and discharge plug is installed on the side wall of the mover body.

[0011] In an implementable solution, at least one loading area and at least one unloading area are provided on the stator platform; a charging seat is provided around the stator platform near the loading area; and a discharging seat is provided around the stator platform near the unloading area.

[0012] In an implementable solution, the stator platform includes a sub-platform, or the stator platform is formed by splicing a plurality of sub-platforms in the same horizontal plane; each sub-platform has the ability to drive the mover body to perform magnetic levitation motion.

[0013] In a second aspect, the present application provides a magnetic levitation transportation system, comprising a sealed cavity, a stator platform, a mover, a charging seat and a discharging seat, wherein the sealed cavity maintains a vacuum state, and its bottom surface is a flat bottom plate with uniform thickness.

[0014] The stator platform is arranged outside the sealed cavity and located on the lower side of the flat bottom plate. The mover is arranged inside the sealed cavity and located on the upper side of the flat bottom plate. The mover includes a mover body, an electrostatic chuck and a charging and discharging plug for charging and discharging the electrostatic chuck. The mover body is suspended on the stator platform in a magnetic levitation manner of a moving iron type. The electrostatic chuck is installed on the upper surface of the mover body, and the charging and discharging plug is installed on the side of the mover.

[0015] The charging seat is installed on the inner side wall of the sealed cavity close to the edge of the stator platform; when working, the mover is driven by the stator platform to move to a position close to the charging seat, so that the charging and discharging plug of the electrostatic chuck docks with the charging seat, and the electrostatic chuck charges to obtain electrostatic adsorption capacity. The discharge seat is installed on the inner side wall of the sealed cavity close to the edge of the stator platform; when working, the mover is driven by the stator platform to move to a position close to the discharge seat, so that the charging and discharging plug of the electrostatic chuck docks with the discharge seat, and the electrostatic chuck discharges and loses or weakens its electrostatic adsorption capacity.

[0016] In an implementable solution, the magnetic levitation transportation system includes a vacuum pumping device, which is connected to the sealed cavity.

[0017] In an implementable solution, the upper surface of the stator platform is fixedly mounted in close contact with the lower surface of the flat bottom plate of the sealing cavity.

[0018] In an implementable solution, the magnetic levitation transportation system includes a first lifting mechanism, and the sealed cavity is installed on the first lifting mechanism; and / or the magnetic levitation transportation system includes a second lifting mechanism, and the stator platform is installed on the second lifting mechanism.

[0019] In an implementable solution, the stator platform includes a sub-platform, or the stator platform is formed by splicing a plurality of sub-platforms in the same horizontal plane; each sub-platform has the ability to drive the mover body to perform magnetic levitation motion.

[0020] In an implementable solution, a projection boundary of the stator platform onto the surface of the flat bottom plate does not exceed a boundary of the flat bottom plate.

[0021] In an practicable solution, the maglev transportation system further includes a transition chamber connected to the sealed cavity, a first seal door that can be opened and closed is provided at the connection between the transition chamber and the sealed cavity, and a second seal door that can be opened and closed is provided between the transition chamber and the outside. The maglev transportation system further includes a first vacuum pumping device and a second vacuum pumping device, the first vacuum pumping device is connected to the sealed cavity, and the second vacuum pumping device is connected to the transition chamber.

[0022] In an implementable solution, the number of the charging and discharging plugs is one or more; when the number of the charging and discharging plugs is greater than or equal to two, all the charging and discharging plugs are evenly distributed in a circle around the center of the mover.

[0023] In an implementable solution, the edge of the electrostatic chuck exceeds the edge of the mover body; the charge and discharge plug is installed on the bottom surface of the electrostatic chuck and is located in the area where the edge of the electrostatic chuck exceeds the edge of the mover body. Or the charge and discharge plug is installed on the side wall of the mover body.

[0024] In an practicable solution, at least one loading area and at least one unloading area are provided on the stator platform; a charging seat is provided on the inner side wall of the sealed cavity near the loading area; and a discharging seat is provided on the inner side wall of the sealed cavity near the unloading area.

[0025] Compared with the prior art, the beneficial effects of the present application include at least the following:

[0026] When the magnetic levitation transport device of the present application is working, the suspension movement of the mover body is realized by controlling the power supply of the stator platform. The mover body does not directly carry the object, but the electrostatic suction cup installed on the mover body adsorbs the carried object. The electrostatic suction cup can provide additional adsorption force when the mover moves at high speed. This adsorption force is particularly significant when the mover body is subjected to high acceleration or high deceleration operations. It ensures that the objects (such as wafers) are firmly attached during the movement of the mover body, effectively avoiding the falling of the objects, thereby significantly improving the stability of the mover in transporting objects under high-speed dynamic conditions.

[0027] In addition, in the magnetic levitation transportation system of the present application, the stator platform that generates more heat is designed to be placed outside the sealed cavity. This design cleverly avoids the problem of heat not being effectively discharged in a vacuum environment, ensuring the stable operation of the entire magnetic levitation transportation system. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a schematic structural diagram of a magnetic levitation transportation device according to an embodiment of the present application.

[0030] Figure 2 for Figure 1 Schematic diagram of the top view of the structure of the medium magnetic levitation transport device.

[0031] Figure 3 The figure is a schematic top view of a mover with two charging and discharging plugs according to an embodiment of the present application.

[0032] Figure 4 The figure is a schematic top view of a mover with four charging and discharging plugs according to an embodiment of the present application.

[0033] Figure 5 and Figure 6 It is a schematic side view of a mover according to an embodiment of the present application.

[0034] Figure 7 It is a side view schematic diagram of a magnetic levitation transportation device in which a stator platform is formed by splicing multiple sub-platforms.

[0035] Figure 8 It is a top view schematic diagram of a magnetic levitation transportation device in which a stator platform is formed by splicing multiple sub-platforms.

[0036] Fig. 9 It is a schematic structural diagram of a magnetic levitation transportation system according to an embodiment of the present application.

[0037] Fig.10 It is a schematic structural diagram of a magnetic levitation transportation device with a cooling pipeline according to an embodiment of the present application.

[0038] Fig.11 It is a schematic structural diagram of a magnetic levitation transportation device with a vacuum pumping device according to an embodiment of the present application.

[0039] Fig.12 It is a structural schematic diagram of a maglev transportation system in which a stator platform is formed by splicing multiple sub-platforms.

[0040] Fig.13 It is a schematic structural diagram of a magnetic levitation transportation system with a sealed cavity that can be raised and lowered according to an embodiment of the present application.

[0041] Fig.14 It is a schematic structural diagram of a magnetic levitation transportation system with a liftable stator platform according to an embodiment of the present application.

[0042] Fig.15 It is a schematic structural diagram of a magnetic levitation transportation system in which both a sealed cavity and a stator platform can be raised and lowered according to an embodiment of the present application.

[0043] Fig.16 It is a schematic structural diagram of a magnetic levitation transportation system with a transition chamber according to an embodiment of the present application.

[0044] In the figure: 1. stator platform; 11. sub-platform; 2. mover; 21. mover body; 22. electrostatic suction cup; 23. charging and discharging plug; 3. charging seat; 4. discharge seat; 10. sealed cavity; 101. flat bottom plate; 20. vacuum pumping device; 30. first lifting mechanism; 40. second lifting mechanism; 50. transition chamber; 501. first sealing door; 502. second sealing door; 60. first vacuum pumping device; 70. second vacuum pumping device; 80. cooling pipeline. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0047] like Figure 1 As shown, the present application first provides a magnetic levitation transportation device, including a stator platform 1, a mover 2, a charging seat 3 and a discharging seat 4.

[0048] The mover 2 includes a mover body 21, an electrostatic chuck 22, and a charge-discharge plug 23 for charging and discharging the electrostatic chuck 22. The mover body 21 is suspended on the stator platform 1 in a magnetic levitation manner of a moving iron type, the electrostatic chuck 22 is installed on the upper surface of the mover body 21, and the charge-discharge plug 23 is installed on the side of the mover 2.

[0049] The charging seat 3 is arranged at a predetermined position around the stator platform 1 and is higher than the upper surface of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the charging seat 3 so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the charging seat 3, and the electrostatic chuck 22 is charged to obtain electrostatic adsorption capability.

[0050] The discharge seat 4 is arranged at a predetermined position around the stator platform 1 and is higher than the upper surface of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the discharge seat 4 so that the charge and discharge plug 23 of the electrostatic chuck 22 is docked with the discharge seat 4, and the electrostatic chuck 22 is discharged to lose or weaken the electrostatic adsorption ability.

[0051] When the magnetic levitation transport device of the present application is working, the suspension movement of the mover body 21 is realized by controlling the power supply of the stator platform 1. The mover body 21 does not directly carry objects, but the electrostatic suction cup 22 installed on the mover body 21 adsorbs the carried objects. The electrostatic suction cup 22 can provide additional adsorption force when the mover 2 moves at high speed. This adsorption force is particularly significant when the mover body 21 is subjected to high acceleration or high deceleration operations. It ensures that the objects (such as wafers) are firmly attached in the process of following the movement of the mover body, effectively avoiding the falling of the objects, thereby significantly improving the stability of the mover 2 in transporting objects under high-speed dynamic conditions.

[0052] In addition, in the magnetic levitation transportation system of the present application, the charging and discharging operation of the electrostatic chuck 22 is flexibly realized by docking with the charging seat 3 or the discharging seat 4. This design cleverly avoids installing an independent power supply device on the mover 2, thereby maintaining the passive characteristics of the mover 2. The docking mechanism of the charging and discharging plug 23 and the charging seat 3 or the discharging seat 4 not only simplifies the structure of the mover 2, but also effectively reduces its weight.

[0053] This design without the need for an independent power supply means that Mover 2 can be lighter and more efficient when performing charging and discharging tasks. The reduced weight is of great significance to improving the carrying capacity and transportation efficiency of Mover 2. Without the burden of additional power supply, Mover 2 can more easily carry and transport items, especially in application scenarios that require quick response and frequent operation. At the same time, this design also reduces the complexity and maintenance costs of the system. Since Mover 2 does not require a built-in power supply, its structure is simpler and reduces potential failure points, thereby improving the reliability of the system and the convenience of maintenance. In addition, the passive design also helps to reduce energy consumption.

[0054] If a person skilled in the art considers replacing the electrostatic suction cup 22 in the present application with other types of mechanical clamping mechanisms, although such a design can also achieve the clamping of objects and keep them stable and not fall during transportation, the problems that follow are obvious. Mechanical clamping mechanisms usually need to be equipped with additional drive mechanisms and power supply devices to ensure their normal operation, which will undoubtedly increase the overall structural complexity of the mover 2. More importantly, these additional components will significantly increase the weight of the mover 2, which will not only affect the performance of its suspension movement, but may also reduce transportation efficiency, especially in situations where objects need to be moved quickly and frequently. Therefore, although a mechanical clamping mechanism may be a viable alternative in some cases, in the long run, it may have a negative impact on the efficiency and reliability of the entire transportation system.

[0055] In general, the magnetic levitation transportation device of the present application represents an innovative fusion of magnetic levitation technology and electrostatic adsorption technology. The suspension movement of the mover 2 on the stator platform 1 through the moving iron magnetic levitation technology not only significantly reduces friction, but also greatly improves the speed and efficiency of transportation. On this basis, the mover 2 further integrates the electrostatic suction cup 22, and realizes precise control of the electrostatic adsorption force through the intelligent docking of the charging and discharging plug 23 with the charging seat 3 and the discharge seat 4. This design not only enhances the stability of the items during transportation, but also further improves the efficiency and reliability of the entire transportation system. Through this pioneering technology integration, the magnetic levitation transportation device of the present application provides a new solution for high-speed and high-precision logistics transportation.

[0056] like Fig. 9As shown, the present application also provides a magnetic levitation transportation system, including a sealed cavity 10, a stator platform 1, a mover 2, a charging seat 3 and a discharging seat 4. The sealed cavity 10 maintains a vacuum state, and its bottom surface is a flat bottom plate 101 with uniform thickness.

[0057] The stator platform 1 is arranged outside the sealed cavity 10 and is located on the lower side of the flat bottom plate 101. The mover 2 is arranged inside the sealed cavity 10 and is located on the upper side of the flat bottom plate 101. The mover 2 includes a mover body 21, an electrostatic chuck 22, and a charge-discharge plug 23 for charging and discharging the electrostatic chuck 22. The mover body 21 is suspended on the stator platform 1 in a magnetic levitation manner of a moving iron type, the electrostatic chuck 22 is installed on the upper surface of the mover body 21, and the charge-discharge plug 23 is installed on the side of the mover 2.

[0058] The charging seat 3 is installed on the inner wall of the sealed cavity 10 close to the edge of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the charging seat 3, so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the charging seat 3, and the electrostatic chuck 22 is charged to obtain electrostatic adsorption ability. The discharge seat 4 is installed on the inner wall of the sealed cavity 10 close to the edge of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the discharge seat 4, so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the discharge seat 4, and the electrostatic chuck 22 is discharged to lose or weaken the electrostatic adsorption ability.

[0059] In the maglev transportation system of the present application, a new thermal management strategy is adopted, that is, the stator platform 1 that generates more heat is designed to be placed outside the sealed cavity 10. This design cleverly avoids the problem that heat cannot be effectively discharged in a vacuum environment, ensuring the stable operation of the entire maglev transportation system.

[0060] By placing the stator platform 1 outside the sealed cavity 10, good heat dissipation can be achieved through the heat dissipation channel provided on the stator platform 1 by air cooling or liquid cooling. In this way, the heat generated by the stator platform 1 during operation can be quickly dissipated, thereby avoiding the accumulation of heat in the vacuum environment. This solution of externalizing the heat source not only improves the heat dissipation efficiency, but also reduces the impact on the internal environment of the vacuum sealed cavity 10, and keeps the working environment of each component within a suitable temperature range.

[0061] In addition, this design also brings a series of additional benefits. First, because the heat source is external, the heat is effectively controlled and managed, and the structural materials of the stator platform 1 and the mover 2 will not degrade due to long-term high temperature, thereby extending the service life of the equipment. Secondly, a suitable temperature environment helps to improve the operating efficiency of the maglev transportation system and reduce energy loss caused by overheating. Furthermore, the external heat source can also help reduce the maintenance cost and frequency of the equipment, because high temperature is often one of the main causes of equipment failure.

[0062] In summary, by placing the stator platform 1 outside the sealed cavity 10, the heat source externalization solution solves the problem of heat dissipation in a vacuum environment, and provides an efficient, stable and economical thermal management strategy for the maglev transportation system. This strategy not only ensures the long-term stable operation of the equipment, but also provides a solid foundation for the reliability and safety of the entire system.

[0063] In order to explain the structure and working principle of the magnetic levitation transportation device and the magnetic levitation transportation system in more detail, the present application provides the following embodiments. It should be noted that the technical features and technical solutions in the following embodiments can be used in combination with each other without conflict.

[0064] Embodiment 1

[0065] like Figure 1 and Figure 2 As shown, this embodiment provides a magnetic levitation transportation device, including a stator platform 1, a mover 2, a charging seat 3 and a discharging seat 4.

[0066] The mover 2 includes a mover body 21, an electrostatic chuck 22 and a charge and discharge plug 23 for charging and discharging the electrostatic chuck 22; the mover body 21 is suspended on the stator platform 1 in a moving iron type magnetic levitation manner, the electrostatic chuck 22 is installed on the upper surface of the mover body 21, and the charge and discharge plug 23 is installed on the side of the mover 2.

[0067] The charging seat 3 is arranged at a predetermined position around the stator platform 1 and is higher than the upper surface of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the charging seat 3 so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the charging seat 3, and the electrostatic chuck 22 is charged to obtain electrostatic adsorption capability. The discharge seat 4 is arranged at a predetermined position around the stator platform 1 and is higher than the upper surface of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the discharge seat 4 so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the discharge seat 4, and the electrostatic chuck 22 is discharged to lose or weaken the electrostatic adsorption capability.

[0068] Among them, the suspension movement of the mover body 21 on the stator platform 1 includes but is not limited to displacement along the surface parallel to the stator platform 1, lifting and lowering along the surface perpendicular to the stator platform 1, rotation around an axis perpendicular to the stator platform 1, and the mover body 21 itself tilting at a certain angle.

[0069] It should be noted that the mover body 21 is suspended on the stator platform 1 in a moving iron type magnetic levitation manner, that is, the mover body 21 and the stator platform 1 form a moving iron type magnetic levitation planar motor. The structural feature of the moving iron type magnetic levitation planar motor is that the coil array is arranged on the stator platform 1, and there is no electrical connection on the mover body 21, which makes it easier to dissipate heat and is conducive to improving the motion performance of the system.

[0070] Among them, the stator platform 1 and the mover body 21 can refer to the stator and mover structure of the moving iron type magnetic levitation planar motor in the prior art. For example, a plurality of coils are generally installed in the stator platform 1, and these coils are designed to have a structure of one or more layers of coils. These coils can be energized to generate a magnetic field, and the coils are designed to extend in a specific direction to form a coil trace. When the coils in the stator platform 1 are energized, they interact with the magnets on the mover body 21, thereby realizing the suspension motion control of the mover body 21.

[0071] The mover body 21 can be composed of a plurality of magnets arranged in a certain pattern, and each magnet has its own magnetization direction, forming an array with a specific magnetization direction. The design of the magnet array enables them to respond and move in the magnetic field generated by the stator platform 1. The magnets can be made of permanent magnetic materials, such as neodymium iron boron (NdFeB), samarium cobalt (SmCo) and neodymium iron (NdFe). The magnets can also be made of soft magnetic materials, such as silicon steel sheets, nickel-iron alloys, etc. Magnets can also be made of magnetic composite materials, which combine magnetic particles and polymer matrices, and can customize magnetic properties such as magnetic permeability and magnetic saturation as needed.

[0072] In addition, the stator platform 1 is generally provided with a sensor array, which is like a grid array of sensors that can sense small changes in the magnetic field. They are arranged in rows and columns to form a two-dimensional array. The sensors can be, but are not limited to, Hall effect sensors, magnetoresistive sensors, magnetostrictive sensors, etc.

[0073] The coils in the stator platform 1 are connected to the controller. The controller detects the magnetic field changes caused by the magnet array on the mover body 21 through the sensor array of the stator platform 1. The controller receives information from the sensor array, processes this information, obtains the position, speed, posture, etc. of the mover body 21, and controls the direction and size of the current flowing through the coil in the stator platform 1 according to the next action requirements, generates sufficient magnetic field to drive the mover body 21 to move to the desired position or make the desired posture change, thereby achieving precise control of the mover body 21.

[0074] It should be noted that the electrostatic chuck 22 may also be referred to as an electrostatic chuck or an electrostatic adsorption device, which is a tool that uses the principle of electrostatic adsorption to fix an object. The electrostatic chuck 22 of this embodiment includes an electrode and a temporary energy storage device, and the temporary energy storage device is used to power the electrode so that the electrode generates an electric field, so that the upper surface of the electrostatic chuck 22 can adsorb a thin object (such as a wafer) through electrostatic adsorption. The temporary energy storage device can be a traditional capacitor, a double-layer capacitor (also known as a supercapacitor) or other energy storage device that can be quickly charged and discharged. The electrostatic chuck 22 can be a single-electrode type or a dual-electrode type, and a dual-electrode electrostatic chuck is preferably used.

[0075] The charge and discharge plug 23 of the electrostatic chuck 22 is plugged into the charging seat 3, so that the temporary energy storage device of the electrostatic chuck 22 is charged, and the temporary energy storage device supplies power to the electrode, and the electrode is energized, which will generate a strong electric field around the electrode. When an object, such as an electronic component or a thin plate material (such as a wafer), is placed on the surface of the chuck, the electric field will redistribute the surface charge of the object, generating a static charge layer opposite to the electric field of the chuck. These static charges generate an attractive force with the charges on the chuck, thereby firmly adsorbing the object on the surface of the electrostatic chuck 22.

[0076] When you want to release the object, you only need to connect the charge and discharge plug 23 to the discharge seat 4. The electric energy of the temporary energy storage device will be released, the electrode will lose power, the electric field will disappear, and the adsorption force of the electrostatic suction cup 22 will disappear. The object adsorbed on the surface of the electrostatic suction cup 22 can be easily removed. Or, for example, when the temporary energy storage device is a capacitor, you can connect the charge and discharge plug 23 to the discharge seat 4, and pass a reverse voltage to neutralize the charge in the capacitor. In this way, the charge on the electrode is neutralized, and the electric field strength is reduced to zero, thereby losing the adsorption ability, so that the object adsorbed on the suction cup can be safely removed. Specifically, Figure 1As shown, when the magnetic levitation transport device of this embodiment is used to transport wafers, the stator platform 1 is powered on and interacts with the mover body 21 to move the mover 2 to a position close to the charging seat 3, and the current flowing through the coil in the stator platform 1 is adjusted to make the charging and discharging plug 23 on the side of the mover 2 and the charging seat 3 have the same height. After that, the stator platform 1 drives the mover body 2 to move so that the charging and discharging plug 23 is connected and disconnected with the charging seat 3. At this time, the electrostatic chuck 22 generates an electric field, and the wafer is firmly adsorbed by the electrostatic effect after being placed on the surface of the electrostatic chuck 22.

[0077] Afterwards, according to the position where the wafer needs to be transported, the current in the stator platform 1 is adjusted to drive the mover 2 to move to the target position, and the charging and discharging plug 23 located on the side of the mover 2 is plugged into the discharge seat 4, so that the electrostatic suction cup 22 is de-energized or partially de-energized, and the electrostatic adsorption force of the electrostatic suction cup 22 disappears or weakens. At this time, the wafer can be taken away by a robot at the target position.

[0078] It should be noted that when the charge-discharge plug 23 is connected to the discharge seat 4 for discharge, the discharge may not be complete, which may cause the surface of the electrostatic chuck 22 to still have a weak electrostatic adsorption ability, but this weak electrostatic adsorption ability may not affect the removal of the object from the chuck. Alternatively, the electrostatic adsorption ability of the electrostatic chuck 22 can be adjusted by controlling the charge amount or the discharge amount.

[0079] When the magnetic levitation transport device of this embodiment is working, the suspension movement of the mover body 21 is realized by controlling the power supply of the stator platform 1. The mover body 21 does not directly carry the object, but the electrostatic suction cup 22 installed on the mover body 21 adsorbs the carried object. The electrostatic suction cup 22 can provide additional adsorption force when the mover 2 moves at high speed. This adsorption force is particularly significant when the mover body 21 is subjected to high acceleration or high deceleration operations. It ensures that the objects (such as wafers) are firmly attached in the process of following the movement of the mover body, effectively avoiding the falling of the objects, thereby significantly improving the stability of the mover 2 in transporting objects under high-speed dynamic conditions.

[0080] In addition, in the magnetic levitation transportation system of the present application, the charging and discharging operation of the electrostatic chuck 22 is flexibly realized by docking with the charging seat 3 or the discharging seat 4. This design cleverly avoids installing an independent power supply device on the mover 2, thereby maintaining the passive characteristics of the mover 2. The docking mechanism of the charging and discharging plug 23 and the charging seat 3 or the discharging seat 4 not only simplifies the structure of the mover 2, but also effectively reduces its weight.

[0081] This design without the need for an independent power supply means that Mover 2 can be lighter and more efficient when performing charging and discharging tasks. The reduced weight is of great significance to improving the carrying capacity and transportation efficiency of Mover 2. Without the burden of additional power supply, Mover 2 can more easily carry and transport items, especially in application scenarios that require quick response and frequent operation. At the same time, this design also reduces the complexity and maintenance costs of the system. Since Mover 2 does not require a built-in power supply, its structure is simpler and reduces potential failure points, thereby improving the reliability of the system and the convenience of maintenance. In addition, the passive design also helps to reduce energy consumption.

[0082] In this embodiment, the upper surface of the mover body 21 is generally provided with mounting holes, and the electrostatic chuck 22 is fixed in the mounting holes of the mover body 21 by fasteners such as screws and bolts. Alternatively, the upper surface of the mover body 21 can be connected to the lower surface of the electrostatic chuck 22 by a snap-fit ​​structure (not shown in the figure).

[0083] In this embodiment, if Figure 1 and Figure 2 As shown, the number of the charge-discharge plug 23 can be one, that is, the charge-discharge plug 23 can be used for both charging and discharging.

[0084] In this embodiment, if Figure 3 and Figure 4 As shown, the number of the charge and discharge plugs 23 can be more than one. When the number of the charge and discharge plugs 23 is greater than or equal to two, all the charge and discharge plugs 23 can be evenly distributed in a circle around the center of the mover 2 .

[0085] Among them, multiple charging and discharging plugs 23 are evenly distributed in a circle around the center of the mover 2. On the one hand, the balance of the mover 2 body can be better. On the other hand, the design of multiple charging and discharging plugs 23 can dock with the nearest charging and discharging plug 23 when docking with the charging seat 3 or the discharging seat 4, reducing unnecessary posture adjustments of the mover 2, which is conducive to improving transportation efficiency and reducing docking error rate.

[0086] In this embodiment, if Figure 5 As shown, the edge of the electrostatic chuck 22 can extend beyond the edge of the mover body 21 , and the charge and discharge plug 23 can be installed on the bottom surface of the electrostatic chuck 22 and located in the area where the edge of the electrostatic chuck 22 extends beyond the edge of the mover body 21 .

[0087] In this embodiment, if Figure 6 As shown, the charge and discharge plug 23 can also be installed on the side wall of the mover body 21 and electrically connected to the electrostatic chuck 22.

[0088] In this embodiment, the stator platform 1 can be manufactured into an integral structure according to the loading position and unloading position of the mover 2 and the motion trajectory involved. Figure 7 As shown in FIG. 8 , the stator platform 1 may include a sub-platform 11, or may be formed by splicing a plurality of sub-platforms 11 in the same horizontal plane, and each sub-platform 11 has the ability to drive the mover body 21 to perform magnetic levitation motion. Adjacent sub-platforms 11 may be structurally spliced ​​by means of limiters, fasteners, etc., and the signal interface and power interface of the sub-platform 11 are both arranged on the bottom side of the sub-platform 11, and the signal interface and power interface between adjacent sub-platforms 11 are both connected to the controller, and all sub-platforms 11 are controlled by the controller to generate a magnetic field that drives the mover 2 to suspend motion.

[0089] In this embodiment, at least one loading area and at least one unloading area can be provided on the stator platform 1, and a charging seat 3 is provided around the stator platform 1 near the loading area, and a discharge seat 4 is provided around the stator platform 1 near the unloading area.

[0090] like Figure 8 As shown, the position marked A is the loading area, and a charging seat 3 is arranged near the loading area. The positions marked B1, B2, and B3 are the unloading areas, and a discharge seat 4 is arranged near the unloading areas. If the object transported by the mover 2 is a wafer, the unloading areas B1, B2, and B3 may correspond to multiple different parallel processing stations.

[0091] Embodiment 2

[0092] like Fig. 9 As shown, this embodiment provides a magnetic levitation transportation system, including a sealed cavity 10, a stator platform 1, a mover 2, a charging seat 3 and a discharging seat 4. The sealed cavity 10 is kept in a vacuum state, and its bottom surface is a flat bottom plate 101 with uniform thickness.

[0093] The stator platform 1 is arranged outside the sealed cavity 10 and is located on the lower side of the flat bottom plate 101. The mover 2 is arranged inside the sealed cavity 10 and is located on the upper side of the flat bottom plate 101. The mover 2 includes a mover body 21, an electrostatic chuck 22, and a charge-discharge plug 23 for charging and discharging the electrostatic chuck 22. The mover body 21 is suspended on the stator platform 1 in a magnetic levitation manner of a moving iron type, the electrostatic chuck 22 is installed on the upper surface of the mover body 21, and the charge-discharge plug 23 is installed on the side of the mover 2.

[0094] The charging seat 3 is installed on the inner wall of the sealed cavity 10 close to the edge of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the charging seat 3, so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the charging seat 3, and the electrostatic chuck 22 is charged to obtain electrostatic adsorption ability. The discharge seat 4 is installed on the inner wall of the sealed cavity 10 close to the edge of the stator platform 1. During operation, the mover 2 is driven by the stator platform 1 to move to a position close to the discharge seat 4, so that the charging and discharging plug 23 of the electrostatic chuck 22 is docked with the discharge seat 4, and the electrostatic chuck 22 is discharged to lose or weaken the electrostatic adsorption ability.

[0095] The structures and working principles of the stator platform 1 , the mover body 21 , and the electrostatic chuck 22 may refer to the contents in the first embodiment.

[0096] In the maglev transportation system of the present application, the stator platform 1 that generates more heat is designed to be placed outside the sealed cavity 10, which cleverly avoids the problem of heat not being effectively discharged in a vacuum environment and ensures the stable operation of the entire maglev transportation system.

[0097] By placing the stator platform 1 outside the sealed cavity 10, the air in the external environment can be used as a natural heat dissipation medium. In this way, the heat generated by the stator platform 1 during operation can be quickly dissipated through natural convection of the air, thereby avoiding the accumulation of heat in the vacuum environment. This solution of placing the heat source externally not only improves the heat dissipation efficiency, but also reduces the impact on the internal environment of the vacuum sealed cavity 10, and keeps the working environment of each component within a suitable temperature range.

[0098] In addition, this design also brings a series of additional benefits. First, because the heat source is external, the heat is effectively controlled and managed, and the structural materials of the stator platform 1 and the mover 2 will not degrade due to long-term high temperature, thereby extending the service life of the equipment. Secondly, a suitable temperature environment helps to improve the operating efficiency of the maglev transportation system and reduce energy loss caused by overheating. Furthermore, the external heat source can also help reduce the maintenance cost and frequency of the equipment, because high temperature is often one of the main causes of equipment failure.

[0099] In order to further improve the heat dissipation efficiency, air cooling or liquid cooling can be used to perform good heat dissipation through the heat dissipation channels provided on the stator platform 1 to ensure that the stator platform 1 can maintain a stable temperature under various working conditions.

[0100] In this embodiment, the flat bottom plate 101 of the sealed cavity 10 can be made of materials such as aviation aluminum and 316 stainless steel. In order to ensure structural stability and surface flatness, the thickness of the flat bottom plate 101 can be 1-2 mm.

[0101] In addition, in this embodiment, the spacing between the mover body 21 and the stator platform 1 can be adjusted within the range of 0.1-4 mm. However, in order to make the mover body 21 frictionless with the inner surface of the flat bottom plate 101, it is necessary to control the mover body 21 to always have a certain gap with the flat bottom plate 101 after suspension.

[0102] In this embodiment, if Fig.10 As shown, a cooling pipeline 80 may be provided in the stator platform 1 , and a cooling medium is circulated in the cooling pipeline 80 to further accelerate the dissipation of heat generated by the stator platform 1 and achieve faster temperature control.

[0103] In this embodiment, if Fig.10 and Fig.11 As shown, the magnetic levitation transportation system may include a vacuum pumping device 20, which is connected to the sealed cavity 10. The vacuum pumping device 20 can adjust the vacuum degree of the sealed cavity 10.

[0104] In this embodiment, if Fig. 9 As shown, the upper surface of the stator platform 1 can be fixedly installed in close contact with the lower surface of the flat bottom plate 101 of the sealed cavity 10. For example, the sealed cavity 10 is fixed at a certain height, and the stator platform 1 can also be installed on a base (not shown in the figure), and the stator platform 1 is supported by the base so that the upper surface of the stator platform 1 is closely attached to the lower surface of the flat bottom plate 101.

[0105] In this embodiment, the stator platform 1 can be manufactured into an integral structure according to the loading position and unloading position of the mover 2 and the motion trajectory involved. Fig.12 As shown, the stator platform 1 may include a sub-platform 11, or be formed by splicing multiple sub-platforms 11 in the same horizontal plane, and each sub-platform 11 has the ability to drive the mover body 21 to perform magnetic levitation motion. Adjacent sub-platforms 11 can be structurally spliced ​​by limiters, fasteners, etc., and the signal interface and power interface of the sub-platform 11 are both arranged on the bottom side of the sub-platform 11. The signal interface and power interface between adjacent sub-platforms 11 are connected to the controller, and all sub-platforms 11 are controlled by the controller to generate a magnetic field that drives the mover 2 to suspend motion.

[0106] In this embodiment, the projection boundary of the stator platform 1 onto the surface of the flat bottom plate 101 does not exceed the boundary of the flat bottom plate 101 , that is, the flat bottom plate 101 of the sealed cavity 10 does not limit the movement range of the mover 2 on the stator platform 1 .

[0107] In this embodiment, the configuration of the charge and discharge plug 23 can refer to the description in the first embodiment. Figure 1 and Figure 2As shown, the number of the charge and discharge plug 23 can be one, that is, the charge and discharge plug 23 can be used for both charging and discharging. Figure 3 and Figure 4 As shown, the number of charge and discharge plugs 23 can be multiple. When the number of charge and discharge plugs 23 is greater than or equal to two, all charge and discharge plugs 23 can be evenly distributed in a circle around the center of the mover 2. Among them, multiple charge and discharge plugs 23 are evenly distributed in a circle around the center of the mover 2. On the one hand, the balance of the mover 2 body can be better. On the other hand, the design of multiple charge and discharge plugs 23 can dock with the nearest charge and discharge plug 23 when docking with the charging seat 3 or the discharge seat 4, reducing unnecessary posture adjustments of the mover 2, which is conducive to improving transportation efficiency and reducing docking error rate.

[0108] Similar to the first embodiment, at least one loading area and at least one unloading area can be provided on the stator platform 1, and a charging seat 3 is provided on the inner wall of the sealed cavity 10 near the loading area, and a discharge seat 4 is provided on the inner wall of the sealed cavity 10 near the unloading area.

[0109] Embodiment 3

[0110] like Fig.13 , Fig.14 and Fig.15 As shown, this embodiment also provides a magnetic levitation transportation system. The difference from the second embodiment is that the magnetic levitation transportation system of this embodiment also includes a first lifting mechanism 30 and / or a second lifting mechanism 40 for changing the height of the sealed cavity 10 and / or the stator platform 1, while the height and the distance between the sealed cavity 10 and the stator platform 1 in the second embodiment are fixed.

[0111] Specifically, Fig.13 As shown, the magnetic levitation transportation system may only include the first lifting mechanism 30, the sealed cavity 10 is mounted on the first lifting mechanism 30, and the height of the sealed cavity 10 is adjusted by the first lifting mechanism 30 to adjust the distance between the flat bottom plate 101 of the sealed cavity 10 and the stator platform 1. In addition, multiple first lifting mechanisms 30 may be arranged at different positions around the sealed cavity 10, and the horizontality of the flat bottom plate 101 of the sealed cavity 10 may be adjusted by the multiple first lifting mechanisms 30.

[0112] like Fig.14 As shown, the magnetic levitation transportation system may only include the second lifting mechanism 40, the stator platform 1 is mounted on the second lifting mechanism 40, and the height of the stator platform 1 is adjusted by the second lifting mechanism 40 to adjust the distance between the stator platform 1 and the flat bottom plate 101 of the sealed cavity 10. In addition, a plurality of second lifting mechanisms 40 may be arranged at different positions below the stator platform 1, and the horizontality of the stator platform 1 may be adjusted by the plurality of second lifting mechanisms 40.

[0113] like Fig.15 As shown, the magnetic levitation transportation system can include a first lifting mechanism 30 and a second lifting mechanism 40 at the same time, and the first lifting mechanism 30 and the second lifting mechanism 40 can be respectively provided with a plurality of them, the sealed cavity 10 is installed on the first lifting mechanism 30, and the stator platform 1 is installed on the second lifting mechanism 40. In this way, the height and levelness of the flat bottom plate 101 of the sealed cavity 10 can be adjusted, and the height and levelness of the stator platform 1 can also be adjusted, so that the adjustment has better flexibility.

[0114] Embodiment 4

[0115] like Fig.16 As shown, this embodiment also provides a magnetic levitation transportation system. The difference from the second embodiment or the third embodiment is that the magnetic levitation transportation system of this embodiment is further provided with a transition chamber 50 .

[0116] Specifically, the magnetic levitation transportation system of this embodiment may further include a transition chamber 50 connected to the sealed cavity 10, a first sealed door 501 that can be opened and closed is provided at the connection between the transition chamber 50 and the sealed cavity 10, and a second sealed door 502 that can be opened and closed is provided between the transition chamber 50 and the outside. The magnetic levitation transportation system also includes a first vacuum pumping device 60 and a second vacuum pumping device 70, the first vacuum pumping device 60 is connected to the sealed cavity 10, and the second vacuum pumping device 70 is connected to the transition chamber 50.

[0117] A transfer device for transfer, such as a linear displacement space module, a multi-degree-of-freedom manipulator, etc., may be provided in the transition chamber 50 .

[0118] For example, in the process of placing the wafer outside the sealed cavity 10 into the sealed cavity 10, the first sealed door 501 is kept sealed and closed, the second sealed door 502 is opened, the transfer device in the transition chamber 50 receives the wafer, and then the second sealed door 502 is closed. After that, the first vacuum pumping device 60 works to vacuum the transition chamber 50, so that the vacuum degree of the transition chamber 50 is basically equivalent to the vacuum degree in the sealed cavity 10. After that, the first sealed door 501 is opened, the transfer device in the transition chamber 50 places the wafer on the electrostatic chuck 22 of the mover 2, the transfer device is retracted into the transition chamber 50, and then the first sealed door 501 is closed. If the vacuum degree in the sealed cavity 10 does not meet the requirements, the second vacuum pumping device 70 can be used to adjust the vacuum.

[0119] For another example, in the process of transferring the wafer inside the sealed cavity 10 to the outside of the sealed cavity 10, the mover 2 carrying the wafer moves to a position close to the transition chamber 50. The second sealed door 502 is kept sealed and closed, and the first vacuum pumping device 60 works to vacuum the transition chamber 50, so that the vacuum degree of the transition chamber 50 is basically equivalent to the vacuum degree in the sealed cavity 10. The first sealed door 501 is opened, and the transfer device in the transition chamber 50 takes the wafer from the electrostatic suction cup 22 of the mover 2 and returns it to the transition chamber 50, and then the first sealed door 501 is closed. After that, the second sealed door 502 is opened, and the transfer device in the transition chamber 50 transports the wafer from the transition chamber 50 to the outside, and the transfer device returns to the transition chamber 50, and then the second sealed door 502 is closed.

[0120] It can be seen from this that through the transition chamber 50, the first sealing door 501, the second sealing door 502, the first vacuum pumping device 60 and the second vacuum pumping device 70 provided in this embodiment, objects can be allowed to enter and exit the sealed cavity 10 while ensuring that the vacuum degree of the sealed cavity 10 remains basically unchanged, and the environment in the sealed cavity 10 can be basically protected from external pollution.

[0121] In this embodiment, a transition chamber 50, a first sealing door 501, a second sealing door 502 and a first vacuum pumping device 60 can be arranged at the positions of the loading area and the unloading area corresponding to the sealed cavity 10 to facilitate the objects to enter and exit the sealed cavity 10.

[0122] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A magnetic levitation transportation system, characterized in that: include: A sealed cavity (10), the inner cavity of which is kept in a vacuum state, and the bottom surface of which is a flat bottom plate (101) with uniform thickness; A stator platform (1) is arranged outside the sealed cavity (10) and is located below the flat bottom plate (101); A mover (2) is arranged inside the sealed cavity (10) and located on the upper side of the flat bottom plate (101), the mover (2) comprising a mover body (21), an electrostatic chuck (22) and a charge-discharge plug (23) for charging and discharging the electrostatic chuck (22); the mover body (21) moves in suspension on the stator platform (1) in a moving iron type magnetic levitation manner, the electrostatic chuck (22) is mounted on the upper surface of the mover body (21), and the charge-discharge plug (23) is mounted on the side of the mover (2); A charging seat (3) is installed on the inner side wall of the sealed cavity (10) near the edge of the stator platform (1); when in operation, the mover (2) is driven by the stator platform (1) to move to a position close to the charging seat (3) so that the charging and discharging plug (23) of the electrostatic chuck (22) is docked with the charging seat (3), and the electrostatic chuck (22) is charged to obtain electrostatic adsorption capability; The discharge seat (4) is mounted on the inner side wall of the sealed cavity (10) near the edge of the stator platform (1); when in operation, the mover (2) is driven by the stator platform (1) to move to a position close to the discharge seat (4) so ​​that the charging and discharging plug (23) of the electrostatic chuck (22) is docked with the discharge seat (4), and the electrostatic chuck (22) is discharged to lose or weaken its electrostatic adsorption capacity; The magnetic levitation transportation system further comprises a transition chamber (50) connected to the sealed chamber (10), a first seal door (501) that can be opened and closed is provided at the connection point between the transition chamber (50) and the sealed chamber (10), and a second seal door (502) that can be opened and closed is provided between the transition chamber (50) and the outside world; The magnetic levitation transportation system further comprises a first vacuum pumping device (60) and a second vacuum pumping device (70), wherein the first vacuum pumping device (60) is connected to the sealed cavity (10), and the second vacuum pumping device (70) is connected to the transition chamber (50).

2. The magnetic levitation transportation system according to claim 1, characterized in that: The magnetic levitation transportation system comprises a vacuum pumping device (20), and the vacuum pumping device (20) is connected to the sealed cavity (10).

3. The magnetic levitation transportation system according to claim 1, characterized in that: The upper surface of the stator platform (1) is fixedly mounted in close contact with the lower surface of the flat bottom plate (101) of the sealed cavity (10).

4. The magnetic levitation transportation system according to claim 1, characterized in that: The magnetic levitation transportation system comprises a first lifting mechanism (30), the sealed cavity (10) being mounted on the first lifting mechanism (30); and / or The magnetic levitation transportation system comprises a second lifting mechanism (40), and the stator platform (1) is mounted on the second lifting mechanism (40).

5. The magnetic levitation transportation system according to claim 1, characterized in that: The stator platform (1) comprises a sub-platform (11), or the stator platform (1) is formed by splicing a plurality of sub-platforms (11) in the same horizontal plane; Each of the sub-platforms (11) has the ability to drive the mover body (21) to perform magnetic levitation movement.

6. The magnetic levitation transportation system according to claim 5, characterized in that: The projection boundary of the stator platform (1) onto the surface of the flat bottom plate (101) does not exceed the boundary of the flat bottom plate (101).

7. The magnetic levitation transportation system according to any one of claims 1 to 6, characterized in that: The number of the charging and discharging plugs (23) is one or more; when the number of the charging and discharging plugs (23) is greater than or equal to two, all the charging and discharging plugs (23) are evenly distributed in a circle around the center of the mover (2).

8. The magnetic levitation transportation system according to any one of claims 1 to 6, characterized in that: The edge of the electrostatic chuck (22) exceeds the edge of the mover body (21); the charging and discharging plug (23) is installed on the bottom surface of the electrostatic chuck (22) and is located in a region where the edge of the electrostatic chuck (22) exceeds the edge of the mover body (21); Or the charging and discharging plug (23) is installed on the side wall of the mover body (21).

9. The magnetic levitation transportation system according to any one of claims 1 to 6, characterized in that: The stator platform (1) is provided with at least one loading area and at least one unloading area; The charging seat (3) is arranged on the inner wall of the sealed cavity (10) close to the loading area; The discharge seat (4) is arranged on the inner side wall of the sealed cavity (10) close to the material discharge area.

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