A silicon wafer flower basket with adjustment function

Abstract

The present invention discloses a silicon wafer flower basket with an adjustment function, which relates to the technical field of silicon wafer flower baskets, including an end plate, a bearing portion provided on the end plate, a first distance adjusting portion provided on the end plate, the distance adjusting portion being electrically connected to the control device, and further including a connecting portion, a connecting rod provided between the connecting portions on different end plates, a second distance adjusting portion provided on the bearing portion, and a blocking portion provided on two end plates. The device is provided with the first distance adjusting portion, which facilitates the staff to place the silicon wafers to be stored into the silicon wafer slot on the connecting rod, and the second distance adjusting portion is provided, so that the silicon wafers can be inserted into the silicon wafer slot, thereby avoiding the silicon wafers being separated from the silicon wafer slot due to the rotation of the connecting rod during transportation of the installed silicon wafer flower basket, thereby causing damage to the silicon wafers. Through the cooperation between the first distance adjusting portion and the second distance adjusting portion, the silicon wafer flower basket can be applied to silicon wafers of different sizes, thereby improving the flexibility and efficiency of the production line.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a silicon wafer flower basket with an adjustment function. Background Art

[0002] In the semiconductor manufacturing process, silicon wafers need to be transferred between various devices, such as cleaning, etching, deposition and other process steps. With the development of semiconductor technology, the demand for silicon wafer sizes has become more and more diversified, which requires a basket that can adapt to silicon wafers of different sizes to improve the flexibility and efficiency of the production line. However, traditional silicon wafer baskets are usually designed as fixed structures that can only accommodate silicon wafers of specific specifications and cannot be used for silicon wafers of different sizes. Therefore, improvements are urgently needed. Summary of the invention

[0003] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a silicon wafer flower basket with an adjustment function, aiming to solve the above technical problems.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A silicon wafer basket with an adjustment function comprises an end plate, two end plates are provided, and a control device is fixedly provided on any end plate, two groups of symmetrical first distance adjustment grooves are respectively provided on the two end plates, and bearing parts respectively matched with the two groups of first distance adjustment grooves are provided on the end plates, and a first distance adjustment part for adjusting the distance between the two groups of bearing parts on the same end plate is provided on the end plates, and the distance adjustment part is electrically connected to the control device, and further comprises:

[0006] A connecting portion is arranged on the bearing portion, and two sets of connecting portions are arranged on the same bearing portion;

[0007] A connecting rod is arranged between the connecting parts on different end plates, and a plurality of silicon wafer grooves arranged at equal distances are opened on the connecting rod;

[0008] A second distance adjusting portion, disposed on the bearing portion and electrically connected to the control device, the second distance adjusting portion being used to adjust the distance between two connecting rods on the same connecting portion;

[0009] The blocking parts have two groups, and the two groups of blocking parts are respectively arranged on the two end plates. The two blocking parts are also respectively provided with two groups of symmetrical connecting parts, and a blocking rod is arranged between the connecting parts on different blocking parts. The blocking rod is also provided with a plurality of silicon wafer grooves arranged at equal distances.

[0010] Preferably, the number of the first pitch adjusting grooves in each group is three, and fixing rods are provided in the first pitch adjusting grooves on both sides of the first pitch adjusting grooves in the same group, and the fixing rods are fixedly connected to the end plates.

[0011] Preferably, the bearing portion comprises:

[0012] A sliding block is arranged in the first distance adjusting grooves located on both sides of the first distance adjusting grooves in the same group, and the sliding block is slidably connected to the fixing rod;

[0013] A threaded block is slidably disposed in a first spacing groove located in the middle of the first spacing grooves of the same group;

[0014] The bearing block is arranged on the opposite side surfaces of the threaded block on the two end plates and is fixedly connected to the sliding block. The opposite side surfaces of the bearing blocks arranged on the two end plates are provided with two symmetrically arranged second distance adjustment grooves. The opposite side surfaces of the two bearing blocks arranged on the same end plate are provided with connecting grooves, and the two connecting grooves are respectively connected to adjacent second distance adjustment grooves. The opposite side surfaces of the bearing blocks arranged on the two end plates are provided with second motor grooves, and the second motor groove is located between the two second distance adjustment grooves on the same bearing block.

[0015] Preferably, the first distance adjusting portion comprises:

[0016] A connecting frame is arranged on surfaces of the two end plates that are away from each other, and the connecting frame is fixedly connected to the end plates, the interior of the connecting frame is communicated with the first pitch adjusting groove located in the middle of the first pitch adjusting groove of the same group, the connecting frame is slidably connected to the threaded block, and a first motor groove is opened on the connecting frame;

[0017] A first motor is located in the first motor slot and is detachably fixedly connected to the connection frame, and the first motor is electrically connected to the control device;

[0018] A double-headed screw is rotatably arranged on the connection frame, and one end of the double-headed screw close to the first motor is fixedly connected to the output end of the first motor. The threads on both sides of the double-headed screw have opposite rotation directions, and the double-headed screw is threadedly connected to the thread block.

[0019] Preferably, the connecting portion comprises:

[0020] A connecting block, disposed in the second distance adjusting groove and slidably connected to the bearing block;

[0021] A slot is provided on the connecting block;

[0022] An insert rod, disposed in the slot and slidably connected to the connecting block;

[0023] A connecting sleeve, which is arranged on the plug rod and fixedly connected to the plug rod, and the connecting sleeve is fixedly connected to the connecting rod;

[0024] A disassembly and assembly portion, arranged on the connecting block, for facilitating the disassembly and assembly of the connecting rod;

[0025] The auxiliary part is located in the second distance adjusting groove. The auxiliary part is arranged on the connecting block and is used to reduce the resistance encountered by the connecting block when it moves in the second distance adjusting groove.

[0026] Preferably, the disassembly and assembly portion comprises:

[0027] There are multiple groups of placement slots, and the multiple groups of placement slots are equidistantly arranged on the slot;

[0028] There are multiple groups of card slots, and the multiple groups of card slots are equidistantly arranged on the insertion rod, and the placement slots correspond to adjacent card slots;

[0029] A return spring is arranged in the placement slot, and one end of the return spring away from the slot axis is fixedly connected to the connection block;

[0030] The card column is slidably arranged in the placement groove, and the end of the card column close to the return spring is fixedly connected to the return spring. The end of the card column close to the axis of the slot is set to a hemispherical shape. When the insertion rod is inserted into the slot, the card column is inserted into the adjacent card slot under the action of the return spring to fix the insertion rod.

[0031] Preferably, the auxiliary part comprises:

[0032] A wheel plate, disposed on the connecting block and fixedly connected to the connecting block;

[0033] A wheel axle, disposed on the wheel plate and rotatably connected to the wheel plate;

[0034] The auxiliary wheel is arranged on the wheel axle and is fixedly connected to the wheel axle.

[0035] Preferably, the second distance adjusting portion comprises:

[0036] A second motor is disposed in the second motor slot and is detachably fixedly connected to the bearing block, and the second motor is electrically connected to the control device;

[0037] A driving shaft is rotatably disposed on the bearing block, and one end of the driving shaft close to the second motor is fixedly connected to an output end of the second motor;

[0038] A driving gear, disposed on the driving shaft and fixedly connected to an end of the driving shaft away from the second motor;

[0039] The transmission parts have two groups, and both groups of transmission parts are arranged on the bearing block, and the transmission parts are used to drive the connecting block to slide in the second distance adjusting groove.

[0040] Preferably, the transmission part comprises:

[0041] A connecting plate is arranged on the bearing block and is slidably connected to the connecting groove, and one end of the connecting plate close to the connecting block is fixedly connected to the connecting block;

[0042] The tooth plate is arranged on the connecting plate and is fixedly connected to an end of the connecting plate away from the connecting block, and the tooth plate is meshed with the driving gear.

[0043] Preferably, the blocking portion comprises:

[0044] A connecting plate, disposed on the end plate and fixedly connected to the end plate;

[0045] The cushion block is arranged on the connecting plate and fixedly connected to the connecting plate, and the cushion block is fixedly connected to the connecting blocks at both ends of the blocking rod.

[0046] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0047] 1. The device is provided with a first distance adjusting part, so that the device can adjust the distance between the connecting rods on the bearing blocks on both sides of the same end plate, so that the staff can put the silicon wafers to be stored into the silicon wafer grooves on the connecting rods. The second distance adjusting part is provided, so that the device can adjust the distance between the connecting rods on the same side of the two end plates, so that the silicon wafers can be inserted into the silicon wafer grooves on the connecting rods, thereby fixing the silicon wafers to avoid the silicon wafers being separated from the silicon wafer grooves due to the rotation of the connecting rods during transportation of the installed silicon wafer basket, thereby causing damage to the silicon wafers. Through the cooperation between the first distance adjusting part and the second distance adjusting part, the silicon wafer basket can be suitable for silicon wafers of different sizes, thereby improving the flexibility and efficiency of the production line.

[0048] 2. The silicon wafer basket is provided with a disassembly and assembly part, so that the staff can easily disassemble and assemble the silicon wafer basket. At the same time, a plurality of clamping columns are provided, so that the insertion rod can be fixed after being inserted into the slot, and then the connecting rod fixedly connected to the connecting sleeve is fixed, thereby preventing the silicon wafer from being separated from the silicon wafer slot due to the rotation of the connecting rod during transportation of the installed silicon wafer basket, thereby causing damage to the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0050] Figure 1 A schematic diagram of the three-dimensional structure of a silicon wafer flower basket with an adjustment function is shown.

[0051] Figure 2 A front view of a silicon wafer flower basket with adjustment function is shown.

[0052] Figure 3 A side view of a silicon wafer basket with adjustment function is shown.

[0053] Figure 4 Shows Figure 3 Sectional view of AA.

[0054] Figure 5 A top view of a silicon wafer flower basket with adjustment function is shown.

[0055] Figure 6 A partial structural exploded diagram of a silicon wafer flower basket with adjustment function is shown.

[0056] Figure 7 Shows Figure 6 Exploded view of part of the structure.

[0057] Figure 8 Shows Figure 4 A schematic diagram of the enlarged local structure at point A in the middle.

[0058] Fig. 9 Shows Figure 6 A magnified schematic diagram of the local structure at point B in the middle.

[0059] Legend:

[0060] 1. End plate; 2. Control device; 3. First pitch-adjusting slot; 4. Connecting rod; 5. Silicon wafer slot; 6. Blocking rod; 7. Fixed rod; 8. Sliding block; 9. Threaded block; 10. Bearing block; 11. Second pitch-adjusting slot; 12. Connecting slot; 13. Second motor slot; 14. Connecting frame; 15. First motor slot; 16. First motor; 17. Double-headed screw; 18. Connecting block; 19. Slot; 20. Inserting rod; 21. Connecting sleeve; 22. Placement slot; 23. Clamping slot; 24. Reset spring; 25. Clamping column; 26. Wheel plate; 27. Wheel axle; 28. Auxiliary wheel; 29. ​​Second motor; 30. Driving shaft; 31. Active gear; 32. Connecting plate; 33. Tooth plate; 34. Connecting plate; 35. Pad. DETAILED DESCRIPTION

[0061] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0062] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0063] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0064] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0065] Reference Figures 1 to 9 An embodiment of a silicon wafer flower basket with an adjustment function of the present invention is further described.

[0066] A silicon wafer basket with an adjustment function comprises an end plate 1, wherein two end plates 1 are provided, and a control device 2 is fixedly provided on any end plate 1, and two groups of symmetrical first pitch adjustment grooves 3 are respectively provided on the two end plates 1, and the number of the first pitch adjustment grooves 3 in each group is three, and fixing rods 7 are provided in the first pitch adjustment grooves 3 on both sides of the same group of first pitch adjustment grooves 3, and the fixing rods 7 are fixedly connected to the end plates 1, and the end plates 1 are provided with bearing parts respectively matched with the two groups of first pitch adjustment grooves 3, and the bearing parts include:

[0067] A sliding block 8 is disposed in the first distance adjusting slots 3 located on both sides of the first distance adjusting slots 3 in the same group, and the sliding block 8 is slidably connected to the fixing rod 7;

[0068] A threaded block 9 is slidably disposed in a first spacing groove 3 located in the middle of the first spacing groove 3 in the same group;

[0069] The bearing block 10 is arranged on the opposite side surfaces of the threaded block 9 on the two end plates 1 and is fixedly connected to the sliding block 8. Two symmetrically arranged second distance adjusting grooves 11 are opened on the opposite side surfaces of the bearing block 10 arranged on the two end plates 1. Connecting grooves 12 are opened on the opposite side surfaces of the two bearing blocks 10 arranged on the same end plate 1. The two connecting grooves 12 are respectively connected to the adjacent second distance adjusting grooves 11. Second motor grooves 13 are opened on the opposite side surfaces of the bearing blocks 10 arranged on the two end plates 1, and the second motor groove 13 is located between the two second distance adjusting grooves 11 on the same bearing block 10.

[0070] The end plate 1 is provided with a first distance adjusting portion for adjusting the distance between two groups of bearing portions on the same end plate 1, and the distance adjusting portion is electrically connected to the control device 2, and the first distance adjusting portion includes:

[0071] A connecting frame 14 is provided on surfaces of the two end plates 1 that are away from each other, and the connecting frame 14 is fixedly connected to the end plates 1, the interior of the connecting frame 14 is communicated with the first pitch adjusting groove 3 located in the middle of the first pitch adjusting groove 3 of the same group, the connecting frame 14 is slidably connected to the threaded block 9, and a first motor groove 15 is opened on the connecting frame 14;

[0072] A first motor 16 is located in the first motor slot 15 and is detachably fixedly connected to the connection frame 14. The first motor 16 is electrically connected to the control device 2;

[0073] The double-headed screw 17 is rotatably arranged on the connecting frame 14, and one end of the double-headed screw 17 close to the first motor 16 is fixedly connected to the output end of the first motor 16, the threads on both sides of the double-headed screw 17 have opposite rotation directions, and the double-headed screw 17 is threadedly connected to the thread block 9.

[0074] During operation, the spacing between the two groups of bearing parts on the same end plate 1 is adjusted according to the size of the silicon wafers to be stored. Specifically, the first motor 16 is started by the control device 2, so that the double-headed screw 17 fixedly connected to the output end of the first motor 16 rotates, and the double-headed screw 17 cooperates with the threaded transmission between the two threaded blocks 9 on the double-headed screw 17, so that the two threaded blocks 9 are moved closer to or farther away from each other in the first distance adjustment groove 3, so that the two bearing blocks 10 arranged on the two threaded blocks 9 are moved closer to or farther away from each other, so that the connecting blocks 18 on both sides of the bearing blocks 10 are moved closer to or farther away from each other, and then the connecting rods 4 fixedly connected to the connecting sleeves 21 are moved closer to or farther away from each other, until the spacing between the connecting rods 4 on the bearing blocks 10 on both sides of the same end plate 1 is adjusted to adapt to the size of the silicon wafers to be stored, so that it is convenient for the staff to place the silicon wafers in the silicon wafer slots 5 on the connecting rods 4;

[0075] Reference Figures 1 to 9, a silicon wafer flower basket with adjustment function, further comprising:

[0076] A connecting portion is arranged on the bearing portion, and two sets of connecting portions are arranged on the same bearing portion;

[0077] The connecting portion comprises:

[0078] A connecting block 18 is disposed in the second distance adjusting groove 11 and is slidably connected to the bearing block 10;

[0079] A slot 19 is provided on the connecting block 18;

[0080] The insertion rod 20 is disposed in the slot 19 and is slidably connected to the connection block 18;

[0081] A connecting sleeve 21 is provided on the insert rod 20 and is fixedly connected to the insert rod 20. The connecting sleeve 21 is fixedly connected to the connecting rod 4;

[0082] A disassembly portion, provided on the connecting block 18, for facilitating the disassembly and assembly of the connecting rod 4;

[0083] The disassembly and assembly part comprises:

[0084] There are multiple groups of placement slots 22, and the multiple groups of placement slots 22 are equidistantly arranged on the slot 19;

[0085] The card slots 23 have multiple groups, and the multiple groups of card slots 23 are equidistantly arranged on the insertion rod 20, and the placement slots 22 correspond to adjacent card slots 23;

[0086] A return spring 24 is disposed in the placement groove 22, and one end of the return spring 24 away from the axis of the slot 19 is fixedly connected to the connection block 18;

[0087] The clamping column 25 is slidably set in the placement groove 22, and the end of the clamping column 25 close to the return spring 24 is fixedly connected to the return spring 24. The end of the clamping column 25 close to the axis of the slot 19 is set to be hemispherical, and is used for when the insertion rod 20 is inserted into the slot 19, the clamping column 25 is inserted into the adjacent clamping slot 23 under the action of the return spring 24 to fix the insertion rod 20.

[0088] It should be noted that when the present silicon wafer flower basket is needed, the staff only needs to hold the connecting rod 4 and move the connecting sleeve 21 fixedly connected to the connecting rod 4 toward the direction of the connecting block 18 until the insertion rod 20 fixedly connected to the connecting sleeve 21 is inserted into the slot 19. During the insertion of the insertion rod 20 into the slot 19, the hemispherical end of the clamping column 25 is inserted into the clamping groove 23 on the insertion rod 20 under the action of the return spring 24, thereby completing the installation of a single connecting rod 4. The remaining connecting rods 4 and the blocking rod 6 can be installed through the above process. When disassembling, the staff only needs to hold the connecting rod 4 and pull out the insertion rod 20 fixedly connected to the connecting sleeve 21 from the connecting block 18 to complete the disassembly of the silicon wafer flower basket.

[0089] The silicon wafer basket is provided with a disassembly and assembly part, so that the staff can easily disassemble and assemble the silicon wafer basket. At the same time, a plurality of clamping columns 25 are provided, so that the insertion rod 20 can be fixed after being inserted into the slot 19, and then the connecting rod 4 fixedly connected to the connecting sleeve 21 is fixed, thereby preventing the silicon wafer from being separated from the silicon wafer slot 5 due to the rotation of the connecting rod 4 during transportation of the installed silicon wafer basket, thereby causing damage to the silicon wafer.

[0090] Reference Figures 1 to 9 , an auxiliary part, located in the second pitch-adjusting slot 11, the auxiliary part is arranged on the connecting block 18, and is used to reduce the resistance encountered by the connecting block 18 when moving in the second pitch-adjusting slot 11;

[0091] The auxiliary part includes:

[0092] The wheel plate 26 is disposed on the connecting block 18 and fixedly connected to the connecting block 18;

[0093] A wheel axle 27 is disposed on the wheel plate 26 and is rotatably connected to the wheel plate 26;

[0094] The auxiliary wheel 28 is disposed on the wheel axle 27 and fixedly connected to the wheel axle 27 .

[0095] It should be noted that when the connecting block 18 moves in the second pitch adjusting groove 11, the auxiliary wheel 28 also rolls in the second pitch adjusting groove 11, thereby converting part of the sliding friction force encountered by the connecting block 18 when sliding in the second pitch adjusting groove 11 into rolling friction force, thereby reducing the resistance encountered by the connecting block 18 when moving to a certain extent, thereby improving the smoothness of the movement of the connecting block 18 to a certain extent.

[0096] A connecting rod 4 is arranged between connecting parts on different end plates 1, and a plurality of silicon wafer grooves 5 arranged at equal distances are opened on the connecting rod 4;

[0097] A second distance adjusting portion, disposed on the bearing portion and electrically connected to the control device 2, the second distance adjusting portion being used to adjust the distance between two connecting rods 4 on the same connecting portion;

[0098] The second distance adjusting part comprises:

[0099] A second motor 29 is disposed in the second motor slot 13 and is detachably fixedly connected to the bearing block 10 . The second motor 29 is electrically connected to the control device 2 .

[0100] A driving shaft 30 is rotatably disposed on the bearing block 10, and one end of the driving shaft 30 close to the second motor 29 is fixedly connected to the output end of the second motor 29;

[0101] A driving gear 31 is disposed on the driving shaft 30 and fixedly connected to an end of the driving shaft 30 away from the second motor 29;

[0102] The transmission part has two groups, and both groups of transmission parts are arranged on the bearing block 10, and the transmission part is used to drive the connecting block 18 to slide in the second distance adjusting groove 11;

[0103] The transmission part comprises:

[0104] A connecting plate 32 is disposed on the bearing block 10 and is slidably connected to the connecting groove 12. One end of the connecting plate 32 close to the connecting block 18 is fixedly connected to the connecting block 18.

[0105] The tooth plate 33 is disposed on the connecting plate 32 and fixedly connected to an end of the connecting plate 32 away from the connecting block 18 . The tooth plate 33 is meshed with the driving gear 31 .

[0106] After the spacing between the connecting rods 4 on the bearing blocks 10 on both sides of the end plate 1 is adjusted, the spacing between the two connecting rods 4 on the bearing blocks 10 on the same side of the end plate 1 is adjusted. Specifically, the control device 2 controls the second motor 29 to start, so that the driving shaft 30 fixedly connected to the output end of the second motor 29 rotates, thereby driving the driving gear 31 fixedly connected to the driving shaft 30 to rotate, and through the meshing between the driving gear 31 and the two toothed plates 33, the two toothed plates 33 are brought closer to or away from each other, driving the two connecting plates respectively fixedly connected to the two toothed plates 33 to approach or move away from each other, thereby making the connecting blocks 18 respectively fixedly connected to the two connecting plates approach or move away from each other, and then making the connecting rods 4 fixedly connected to the connecting sleeves 21 on the same side of the two end plates 1 approach or move away from each other, until the spacing between the connecting rods 4 on the same side of the two end plates 1 is adjusted to adapt to the size of the silicon wafers to be stored, so that the silicon wafer grooves 5 on the connecting rods 4 can fix the silicon wafers;

[0107] It should be noted that, by providing a first distance adjusting portion, the device can adjust the distance between the connecting rods 4 on the two side bearing blocks 10 on the same end plate 1, so that the staff can put the silicon wafers to be stored into the silicon wafer slots 5 on the connecting rods 4. By providing a second distance adjusting portion, the device can adjust the distance between the connecting rods 4 on the same side of the two end plates 1, so that the silicon wafers can be inserted into the silicon wafer slots 5 on the connecting rods 4, thereby fixing the silicon wafers to avoid the connection rods 4 rotating during transportation of the installed silicon wafer basket, causing the silicon wafers to detach from the silicon wafer slots 5 and cause damage to the silicon wafers. Through the cooperation between the first distance adjusting portion and the second distance adjusting portion, the silicon wafer basket can be suitable for silicon wafers of different sizes, thereby improving the flexibility and efficiency of the production line.

[0108] Reference Figures 1 to 9 The blocking part has two groups, and the two groups of blocking parts are respectively arranged on the two end plates 1, and the two blocking parts are also respectively provided with two groups of symmetrical connecting parts, and a blocking rod 6 is arranged between the connecting parts on different blocking parts, and the blocking rod 6 is also provided with a plurality of silicon wafer grooves 5 arranged at equal distances;

[0109] The blocking portion comprises:

[0110] A connecting plate 34 is disposed on the end plate 1 and fixedly connected to the end plate 1;

[0111] The cushion block 35 is disposed on the connecting plate 34 and fixedly connected to the connecting plate 34 . The cushion block 35 is fixedly connected to the connecting blocks 18 at both ends of the blocking rod 6 .

[0112] When in use, the silicon wafers to be stored are first placed in the silicon wafer grooves 5 on the blocking rods 6 to prevent the silicon wafers from slipping out of the silicon wafer basket. It should be noted that the stability of the end plate 1 is improved to a certain extent by providing the connecting plate 34, and the pad 35 is provided to provide support for the connecting block 18 close to the connecting plate 34.

[0113] Working principle: Refer to Figures 1 to 9When working, the spacing between the two groups of bearing parts on the same end plate 1 is adjusted according to the size of the silicon wafers to be stored. Specifically, the first motor 16 of the control device 2 is started, so that the double-headed screw 17 fixedly connected to the output end of the first motor 16 rotates, and the double-headed screw 17 cooperates with the threaded transmission between the two threaded blocks 9 on the double-headed screw 17, so that the two threaded blocks 9 are close to or away from each other in the first distance adjustment groove 3, so that the two bearing blocks 10 arranged on the two threaded blocks 9 are close to or away from each other, so that the connecting blocks 18 on both sides of the bearing blocks 10 are close to or away from each other, and then the connecting rods 4 fixedly connected to the connecting sleeves 21 are close to or away from each other, until the spacing between the connecting rods 4 on the bearing blocks 10 on both sides of the same end plate 1 is adjusted to adapt to the size of the silicon wafers to be stored, so that it is convenient for the staff to place the silicon wafers in the silicon wafer slots 5 on the connecting rods 4;

[0114] After the spacing between the connecting rods 4 on the bearing blocks 10 on both sides of the end plate 1 is adjusted, the spacing between the two connecting rods 4 on the bearing blocks 10 on the same side of the end plate 1 is adjusted. Specifically, the control device 2 controls the second motor 29 to start, so that the driving shaft 30 fixedly connected to the output end of the second motor 29 rotates, thereby driving the driving gear 31 fixedly connected to the driving shaft 30 to rotate, and through the meshing between the driving gear 31 and the two toothed plates 33, the two toothed plates 33 are brought closer to or away from each other, driving the two connecting plates respectively fixedly connected to the two toothed plates 33 to approach or move away from each other, thereby making the connecting blocks 18 respectively fixedly connected to the two connecting plates approach or move away from each other, and then making the connecting rods 4 fixedly connected to the connecting sleeves 21 on the same side of the two end plates 1 approach or move away from each other, until the spacing between the connecting rods 4 on the same side of the two end plates 1 is adjusted to adapt to the size of the silicon wafers to be stored, so that the silicon wafer grooves 5 on the connecting rods 4 can fix the silicon wafers;

[0115] It should be noted that when the connecting block 18 moves in the second pitch adjusting groove 11, the auxiliary wheel 28 also rolls in the second pitch adjusting groove 11, thereby converting part of the sliding friction force encountered by the connecting block 18 when sliding in the second pitch adjusting groove 11 into rolling friction force, thereby reducing the resistance encountered by the connecting block 18 when moving to a certain extent, thereby improving the smoothness of the movement of the connecting block 18 to a certain extent.

[0116] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A silicon wafer basket with an adjustment function, comprising an end plate (1), wherein two end plates (1) are provided, and a control device (2) is fixedly provided on any end plate (1), characterized in that: Two groups of symmetrical first pitch adjustment grooves (3) are respectively formed on the two end plates (1), the number of the first pitch adjustment grooves (3) in each group is three, and the first pitch adjustment grooves (3) located on both sides of the same group of first pitch adjustment grooves (3) are provided with fixing rods (7), the fixing rods (7) are fixedly connected to the end plates (1), and the end plates (1) are provided with bearing parts respectively matched with the two groups of first pitch adjustment grooves (3), and the bearing parts include: A sliding block (8) is arranged in the first distance adjusting slots (3) located on both sides of the first distance adjusting slots (3) in the same group, and the sliding block (8) is slidably connected to the fixing rod (7); A threaded block (9) is slidably disposed in a first spacing groove (3) located in the middle of the first spacing grooves (3) in the same group; The bearing blocks (10) are arranged on opposite side surfaces of the threaded blocks (9) on the two end plates (1) and are fixedly connected to the sliding blocks (8); two symmetrically arranged second distance adjusting grooves (11) are provided on opposite side surfaces of the bearing blocks (10) on the two end plates (1); connecting grooves (12) are provided on opposite side surfaces of the two bearing blocks (10) on the same end plate (1); the two connecting grooves (12) are respectively connected to adjacent second distance adjusting grooves (11); second motor grooves (13) are provided on opposite side surfaces of the bearing blocks (10) on the two end plates (1); and the second motor groove (13) is located between the two second distance adjusting grooves (11) on the same bearing block (10); the end plates (1) are provided with first distance adjusting portions for adjusting the distance between two groups of bearing portions on the same end plate (1); the first distance adjusting portions are electrically connected to the control device (2); and further include: A connecting portion is arranged on the bearing portion, and two sets of connecting portions are arranged on the same bearing portion; A connecting rod (4) is arranged between connecting portions on different end plates (1), and a plurality of silicon wafer grooves (5) arranged at equal distances are formed on the connecting rod (4); a second distance adjusting portion, arranged on the bearing portion and electrically connected to the control device (2), the second distance adjusting portion being used to adjust the distance between two connecting rods (4) on the same connecting portion; The blocking parts have two groups, and the two groups of blocking parts are respectively arranged on the two end plates (1), and the two blocking parts are also respectively provided with two groups of symmetrical connecting parts, and a blocking rod (6) is arranged between the connecting parts on different blocking parts, and the blocking rod (6) is also provided with a plurality of silicon wafer grooves (5) arranged at equal distances.

2. The silicon wafer flower basket with adjustment function according to claim 1, characterized in that: The first distance adjusting part comprises: A connecting frame (14) is arranged on surfaces of the two end plates (1) that are away from each other, and the connecting frame (14) is fixedly connected to the end plates (1), the interior of the connecting frame (14) is communicated with a first pitch adjusting groove (3) located in the middle of the first pitch adjusting grooves (3) of the same group, the connecting frame (14) is slidably connected to the threaded block (9), and a first motor groove (15) is provided on the connecting frame (14); A first motor (16) is located in the first motor slot (15) and is detachably fixedly connected to the connection frame (14); the first motor (16) is electrically connected to the control device (2); A double-headed screw (17) is rotatably disposed on the connection frame (14), and one end of the double-headed screw (17) close to the first motor (16) is fixedly connected to the output end of the first motor (16), the threads on both sides of the double-headed screw (17) have opposite rotation directions, and the double-headed screw (17) is threadedly connected to the thread block (9).

3. The silicon wafer flower basket with adjustment function according to claim 2, characterized in that: The connecting portion comprises: A connecting block (18) is disposed in the second distance adjusting groove (11) and is slidably connected to the bearing block (10); A slot (19) is provided on the connecting block (18); An insertion rod (20) is disposed in the slot (19) and is slidably connected to the connection block (18); A connecting sleeve (21) is arranged on the insert rod (20) and is fixedly connected to the insert rod (20); the connecting sleeve (21) is fixedly connected to the connecting rod (4); A disassembly and assembly portion, arranged on the connecting block (18), for facilitating the disassembly and assembly of the connecting rod (4); An auxiliary portion is located in the second distance adjusting groove (11), and the auxiliary portion is arranged on the connecting block (18) and is used to reduce the resistance encountered by the connecting block (18) when moving in the second distance adjusting groove (11).

4. The silicon wafer flower basket with adjustment function according to claim 3, characterized in that: The disassembly and assembly part comprises: There are multiple groups of placement slots (22), and the multiple groups of placement slots (22) are equidistantly arranged on the slot (19); The card slots (23) have a plurality of groups, and the plurality of groups of card slots (23) are equidistantly arranged on the insertion rod (20), and the placement slots (22) correspond to adjacent card slots (23); A return spring (24) is disposed in the placement groove (22), and one end of the return spring (24) away from the axis of the slot (19) is fixedly connected to the connection block (18); A clamping column (25) is slidably disposed in the placement groove (22), and one end of the clamping column (25) close to the return spring (24) is fixedly connected to the return spring (24), and one end of the clamping column (25) close to the axis of the slot (19) is configured to be hemispherical, so that when the insertion rod (20) is inserted into the slot (19), the clamping column (25) is inserted into the adjacent clamping groove (23) under the action of the return spring (24) to fix the insertion rod (20).

5. The silicon wafer flower basket with adjustment function according to claim 4, characterized in that: The auxiliary part includes: A wheel plate (26) is disposed on the connecting block (18) and is fixedly connected to the connecting block (18); A wheel axle (27) is disposed on the wheel plate (26) and is rotatably connected to the wheel plate (26); An auxiliary wheel (28) is disposed on the wheel axle (27) and is fixedly connected to the wheel axle (27).

6. The silicon wafer flower basket with adjustment function according to claim 5, characterized in that: The second distance adjusting part comprises: a second motor (29) disposed in the second motor slot (13) and detachably fixedly connected to the bearing block (10), the second motor (29) being electrically connected to the control device (2); A drive shaft (30) is rotatably disposed on the bearing block (10), and one end of the drive shaft (30) close to the second motor (29) is fixedly connected to an output end of the second motor (29); A driving gear (31) is disposed on the driving shaft (30) and is fixedly connected to an end of the driving shaft (30) away from the second motor (29); The transmission parts have two groups, and both groups of transmission parts are arranged on the bearing block (10), and the transmission parts are used to drive the connecting block (18) to slide in the second distance adjustment groove (11).

7. The silicon wafer flower basket with adjustment function according to claim 6, characterized in that: The transmission part comprises: A connecting plate (32) is disposed on the bearing block (10) and is slidably connected to the connecting groove (12); one end of the connecting plate (32) close to the connecting block (18) is fixedly connected to the connecting block (18); The tooth plate (33) is disposed on the connecting plate (32) and is fixedly connected to an end of the connecting plate (32) away from the connecting block (18); the tooth plate (33) is meshed with the driving gear (31).

8. The silicon wafer flower basket with adjustment function according to claim 7, characterized in that: The blocking portion comprises: A connecting plate (34) is disposed on the end plate (1) and fixedly connected to the end plate (1); A cushion block (35) is disposed on the connecting plate (34) and fixedly connected to the connecting plate (34); the cushion block (35) is fixedly connected to the connecting blocks (18) at both ends of the blocking rod (6).

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