A linear evaporation source unit and a multi-evaporation source interval evaporation device

Abstract

The present invention discloses a vacuum evaporation device technical field, and particularly relates to a linear evaporation source unit and a multi-evaporation source interval evaporation device, wherein the linear evaporation source unit comprises a plurality of linear evaporation sources, the linear evaporation source is L-shaped, comprises a body, a plurality of nozzles arranged linearly, and an evaporation neck for connecting the body and the nozzle; a crucible is arranged in the body, and is used to form evaporation materials into vapor; the evaporation neck is arranged at the top of the body, and extends upward along the side of the body, and is provided with an air guide channel connecting the body and the nozzle; the bodies of the plurality of linear evaporation sources are stacked in sequence from bottom to top, and the evaporation necks of all the linear evaporation sources are located on the same side. The linear evaporation source unit can evaporate a variety of materials at the same time, and has a compact structure, which can meet the needs of a multi-evaporation source interval evaporation device.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation devices, and in particular to a linear evaporation source unit and a multi-evaporation source interval evaporation device. Background Art

[0002] OLED displays have many advantages over LCD displays, such as good color reproduction, short response time, good low-temperature characteristics, and can be thinner, lighter, and more flexible. OLED displays are widely used in mobile phones, watches, and other displays.

[0003] Most of the mass-produced organic film coatings of OLED display screens are obtained by evaporation using linear evaporation sources. In the prior art, in order to increase the evaporation rate, a Chinese invention patent with publication number CN118064842A discloses a multi-evaporation source spaced evaporation device and a coating method. The multi-evaporation source spaced evaporation device is provided with a plurality of parallel linear evaporation sources and a mask plate with a plurality of openings and shielding portions. Each linear evaporation source is reciprocated between two adjacent shielding portions to complete the evaporation of the substrate, which can greatly increase the evaporation rate. However, although the multi-evaporation source interval evaporation device has a high evaporation efficiency, it still has the following defects: since the linear evaporation source needs to be moved to the bottom of the shielding part when not evaporating, it is shielded by the shielding part, and in order to prevent the linear evaporation source from spraying to the opening when not evaporating, the width of the linear evaporation source vapor coverage is required to be smaller than the width of the shielding part, and the narrower the better. This results in that when evaporating multiple materials, since multiple crucibles of different materials are required, the width of the linear evaporation source group formed by the multiple materials is wider, and the steam spray range formed is also increased, which causes the steam sprayed by the linear evaporation source group to easily cover the opening when not evaporating. In this regard, the multi-evaporation source interval evaporation device with publication number CN118064842A separates the crucible from the steam spray structure by setting an external crucible and a pipe-type connector, and connects multiple crucibles to the linear spray structure through the connector, so as to meet the requirement that when evaporating multiple materials, the steam width of the spray structure is smaller than the width of the shielding part. However, the linear evaporation source of this structure is prone to uneven distribution of vapor in the injection structure, which ultimately leads to uneven film thickness, because the vapor formed in the crucible relies on the transmission of pipe-type connectors. Secondly, in order to transmit the vapor to both ends of the injection structure and ensure that the evaporation rate meets the requirements, the heating temperature must be higher. However, high temperature will cause organic materials to deteriorate, especially when heated for a long time during production, which directly leads to a decrease in the performance of OLED devices, such as efficiency and life. It can be seen that the existing technology still needs to be improved and enhanced. Summary of the invention

[0004] In view of the above-mentioned deficiencies in the prior art, an object of the present invention is to provide a linear evaporation source unit and a multi-evaporation source interval evaporation device, aiming to solve the defects of the existing multi-evaporation source interval evaporation device when evaporating multiple materials, such as uneven film thickness and poor quality.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A linear evaporation source unit, comprising a plurality of linear evaporation sources; the linear evaporation source is L-shaped, comprising a main body, a plurality of nozzles arranged in a linear manner, and an evaporation neck for connecting the main body and the nozzles; a crucible is arranged in the main body for forming vapor from an evaporation material; the evaporation neck is arranged at the top of the main body and extends upward along the side of the main body, and an air guide channel connecting the main body and the nozzles is arranged in the evaporation neck; the main bodies of the plurality of linear evaporation sources are stacked in sequence from bottom to top, and the evaporation necks of all the linear evaporation sources are located on the same side.

[0007] In the linear evaporation source unit, a vapor rate regulating mechanism is provided in the evaporation neck.

[0008] In the linear evaporation source unit, the vapor rate adjustment mechanism includes an adjustment plate, a rotating shaft, and a first driving device. The length and width of the adjustment plate are adapted to the length and width of the evaporation neck, and the adjustment plate is arranged in the air guide channel through the rotating shaft. One end of the rotating shaft passes through the side wall of the evaporation neck and is transmission-connected to the first driving device.

[0009] In the linear evaporation source unit, both ends of the rotating shaft are provided with external threads, and the side wall of the evaporation neck is provided with threaded holes.

[0010] In the linear evaporation source unit, a driving gear is provided at the output end of the first driving device, and a driven gear is provided at one end of the rotating shaft that is transmission-connected to the first driving device. The driving gear meshes with the driven gear, and the diameter of the driving gear is smaller than that of the driven gear.

[0011] In the linear evaporation source unit, the evaporation neck and the adjustment plate are both provided with a heating mechanism.

[0012] In the linear evaporation source unit, the outer side of the body and the evaporation neck is coated with a heat insulation layer.

[0013] In the linear evaporation source unit, the nozzles of the plurality of linear evaporation sources are symmetrically arranged, and the nozzles on both sides are relatively inclined.

[0014] In the linear evaporation source unit, limiting plates are further provided on the outer sides of the nozzles on both sides.

[0015] A multi-evaporation source interval evaporation device comprises a plurality of groups of linear evaporation source units as described above.

[0016] Beneficial effects: The first aspect of the present invention provides a linear evaporation source unit, which is composed of a plurality of linear evaporation sources stacked together, which can meet the needs of vaporizing a variety of materials at the same time, and by stacking a plurality of main bodies, the structure is compact, and the width of the plurality of main bodies in the horizontal direction can be reduced, thereby meeting the requirement that in an interval evaporation device, when the space under the shielding part is narrow, a linear evaporation source unit with the function of vaporizing a variety of materials can still be set; secondly, since this evaporation unit structure does not require an external crucible, the vapor can be quickly transported to the nozzle through the evaporation neck, so there is no need to overheat in order to ensure the temperature of the vapor during the long-distance transportation process, thereby avoiding material deterioration caused by high temperature; furthermore, by providing a narrow and flat evaporation neck, it occupies a small space, so as to facilitate The volume of the main body stacked on top does not shrink too much, so that multiple linear evaporation sources can be stacked, and the narrow and long air guide channel in the evaporation neck allows the material vapor to be fully diffused in the linear direction of the linear evaporation source, which plays a role in homogenization, and can make the vapor concentration of the nozzles located at both ends of the linear evaporation source the same as that located in the middle, thereby improving the quality of the evaporated film; further, by arranging multiple evaporation necks on the same side, the distance between multiple columns of nozzles in the same unit can be reduced, and the mixed vapor sprayed by the formed nozzle group has a narrower spray width, which meets the needs of the multi-evaporation source interval evaporation device; in addition, when evaporating multiple materials, the ratio of each material is not exactly 1:1, and the volumes of the main bodies stacked up and down are different, which can better adapt to multiple materials with different ratios and reduce energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a linear evaporation source unit (having three linear evaporation sources) provided by the present invention.

[0018] Figure 2 Schematic diagram of the structure of a linear evaporation source unit (having two linear evaporation sources).

[0019] Figure 3 Schematic diagram of the structure of the linear evaporation source.

[0020] Figure 4 A schematic diagram of a structure for setting a steam rate regulating mechanism in an air guide channel Figure 1 .

[0021] Figure 5 A schematic diagram of a structure for setting a steam rate regulating mechanism in an air guide channel Figure 2 .

[0022] Figure 6 It is a structural schematic diagram of a rotating shaft provided with external threads.

[0023] Figure 7 It is a multi-evaporation source interval evaporation device.

[0024] Markings in the accompanying drawings: 1-linear evaporation source unit, 2-linear evaporation source, 3-main body, 4-nozzle, 5-evaporation neck, 6-crucible, 7-heating mechanism, 8-limiting plate, 9-adjusting plate, 10-rotating shaft, 11-first driving device, 12-driven gear, 13-driving gear, 15-external thread, 16-thermal insulation layer, 17-mask plate, 18-driving mechanism, 19-shielding portion, 20-opening portion, 21-cooling plate, 22-substrate. DETAILED DESCRIPTION

[0025] The present invention provides a linear evaporation source unit and a multi-evaporation source interval evaporation device. In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail by the following embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0026] See also Figure 1-3 A first aspect of the present invention provides a linear evaporation source unit, which is composed of a plurality of linear evaporation sources 2. For example, when two materials are evaporated, the unit is composed of two linear evaporation sources 2, and each linear evaporation source 2 evaporates one material; when three materials are evaporated, the unit is composed of three linear evaporation sources 2; when more materials are evaporated, more linear evaporation sources 2 can be set, which can be determined according to the types of the evaporated materials. All linear evaporation sources 2 have an L-shaped structure, including a main body 3, a plurality of nozzles 4 arranged in a linear manner, and an evaporation neck 5 for connecting the main body 3 and the nozzle 4, wherein the main body 3 is a rectangular structure with a cavity provided therein, the cavity being used to accommodate a crucible 6, a heating mechanism 7 being provided outside or inside the side wall of the main body 3, preferably the heating mechanism 7 being provided on the outside of the side wall of the main body, the heating mechanism 7 being used to heat the evaporation material in the crucible 6 to form vapor; the evaporation neck 5 is provided at the top of the main body 3 and extends upward along one of the side panels of the main body 3, the evaporation neck 5 is narrow in width, and is a long and narrow flat structure, a long and narrow air guide channel being provided therein, the air guide channel being used to connect the internal cavity of the main body 3 and the nozzle 4, so as to lead the vapor generated by the crucible 6 to the nozzle 4. In the linear evaporation source unit 1, the main bodies 3 of multiple linear evaporation sources 2 are stacked in sequence from bottom to top, and the volume of the main bodies 3 is reduced in sequence from bottom to top, so that after all the main bodies 3 are stacked, the projected areas of all the main bodies 3 do not exceed the cross-sectional area of ​​the main body 3 located at the bottom; at the same time, after all the main bodies 3 are stacked, the evaporation necks 5 of all the linear evaporation sources 2 are located on the same side, and the top surfaces of all the evaporation necks 5 are flush, so that the mixed vapor sprayed from the nozzle group formed by the nozzle combination of all the linear evaporation sources 2 has a narrower width, thereby preventing the mixed vapor from exceeding the width of the shielding portion 19.

[0027] In this embodiment, multiple bodies 3 are stacked to reduce the width of the multiple bodies 3 in the horizontal direction, so as to meet the requirement that in the interval evaporation device, multiple linear evaporation sources 2 can be arranged under each shielding portion to evaporate multiple materials and realize the evaporation of a composite film; since this evaporation unit structure does not require the crucible 6 to be placed externally, there is no need to overheat in order to ensure the temperature of the steam during the transportation process, thereby avoiding material deterioration caused by high temperature; at the same time, by providing a narrow and long evaporation neck 5, the space occupied can be reduced, so that multiple linear evaporation sources 2 can be stacked, and the narrow and long air guide channel in the evaporation neck 5 can accelerate the flow of steam and has the function of homogenizing the steam, which can ensure that the steam concentration of each nozzle 4 is more uniform; by arranging multiple evaporation necks 5 on the same side, the distance between multiple columns of nozzles 4 in the same unit can be reduced, and the mixed steam sprayed from the formed nozzle group has a narrow spray width, which meets the needs of the interval evaporation device. In addition, when vapor-depositing multiple materials, the ratio of each material is not exactly 1:1, and the volumes of the stacked bodies are different, which can better adapt to multiple materials with different ratios. For example, generally there is less Dopant material, so it can be placed in the crucible of the body located at the upper part and with a smaller volume, while there is more Host material, which can be placed in the crucible of the body located at the lower part and with a larger volume. Bodies of different volumes are used to place vapor-deposited materials of different weight ratios. Such distribution can reduce energy consumption.

[0028] In order to make the width of the vapor sprayed by the nozzle group of the linear evaporation source unit 1 narrower, the inclination angle of the nozzle 4 can be adjusted when the nozzle 4 is set, so that the sprayed vapor is more concentrated, preferably, the vapor sprayed by multiple rows of nozzles 4 intersects on the same line, and the intersection line just falls on the substrate 22 to be evaporated. For example, Figure 2 As shown, when the linear evaporation source unit 1 is composed of two linear evaporation sources 2, it has two rows of nozzles 4, and the two rows of nozzles 4 are relatively inclined so that the two rows of vapors are intersected and form a cross line at the intersection, and the cross line is located on the substrate 22 to be evaporated. As another example, Figure 1 As shown, when the linear evaporation source unit 1 is composed of three linear evaporation sources 2, the nozzle 4 of one of the linear evaporation sources 2 is located in the middle and vertically upward, and the nozzles 4 of the other two linear evaporation sources 2 are symmetrically arranged and relatively inclined, and the vapors ejected from the two columns of nozzles 4 on both sides and the vapors ejected from the nozzles 4 in the middle column intersect on the same intersection line, and the intersection line just falls on the substrate 22 to be evaporated.

[0029] In addition, in order to better limit the width of the mixed vapor, a limiting plate 8 is provided, and the limiting plate 8 is arranged on both sides of the nozzle group. For example, when the linear evaporation source unit 1 is composed of two linear evaporation source units 1, the limiting plate 8 is arranged on the outside of the two rows of nozzles 4, such as Figure 2As shown; for example, when the linear evaporation source unit 1 is composed of three linear evaporation source units 1, the limiting plate 8 is arranged on the outside of the two rows of nozzles 4 on both sides, such as Figure 3 As shown, by limiting the limit plate 8, the mixed vapor ejected from the nozzle group can move upward within the limited area to reach the substrate, while the mixed vapor moving toward the limit plate will be intercepted by the limit plate and condensed on the surface of the limit plate 8.

[0030] Since the ratio of each evaporation material is different when evaporating different composite films, it is necessary to adjust the ratio of each material vapor. The prior art usually controls the rate of vapor formation of each evaporation material by adjusting the temperature, and then adjusts the ratio of the vapor, but this adjustment method has the disadvantages of slow adjustment speed and large ratio deviation. In this regard, in a preferred embodiment, in addition to setting up a temperature control mechanism, a vapor rate adjustment mechanism is also provided in the evaporation neck 5, that is, in the air guide channel. The rate adjustment mechanism can adjust the opening of the air guide channel, thereby controlling the speed and flow rate of the steam output.

[0031] As a specific implementation structure (but not limited to this implementation structure), Figure 4 As shown, the steam rate regulating mechanism includes an adjusting plate 9, a rotating shaft 10 and a first driving device 11. The length and width of the adjusting plate 9 are adapted to the length and width of the evaporation neck 5, and the adjusting plate 9 is arranged in the air guide channel through the rotating shaft 10. The inclination angle thereof can be adjusted by the rotating shaft 10. When the adjusting plate 9 is in a horizontal state, the air guide channel can be closed, and when it is rotated to a vertical state, the air guide channel can be completely opened; one end of the rotating shaft 10 is rotatably connected to the side wall of the evaporation neck 5, and the other end passes through the other opposite side wall of the evaporation neck 5 and extends out of the evaporation neck 5, and is connected to the first driving device 11 in a transmission manner. Therefore, when the first driving device 11 is working, the rotating shaft 10 can be driven to rotate, and the rotating shaft 10 drives the adjusting plate 9 to rotate or swing with the rotating shaft 10 as the axis. During the swinging process, the distance between the adjusting plate 9 and the side wall of the air guide channel changes, forming different openings, thereby changing the flow rate of the steam. In addition, the adjusting plate in the air guide channel can also play a role in further homogenizing the steam.

[0032] Since the output end of the first driving device 11 is directly connected to the rotating shaft 10, the rotation angle of the output end of the first driving device 11 is the same as the rotation angle of the rotating shaft 10 and the adjusting plate 9. Since the swing angle of the adjusting plate 9 is 0-90°, this leads to very high precision requirements for the first driving device 11, especially when the adjustment angle is very small, which increases the difficulty and precision of adjusting the ratio of the evaporation material. In this regard, in a preferred embodiment, as Figure 5As shown, a driving gear 13 is provided at the output end of the first driving device 11, and a driven gear 12 is also provided at the end of the rotating shaft 10, the driving gear 13 is meshed with the driven gear 12, and the diameter of the driving gear 13 is smaller than the diameter of the driven gear 12. Therefore, when working, the driving gear 13 of the first driving device 11 rotates one circle, but the driven gear 12 and the rotating shaft 10 do not necessarily rotate one circle, which is equivalent to amplifying the swing angle of the adjustment plate 9, so the opening of the air guide channel can be better controlled by the first driving device 11.

[0033] In addition, the first driving device 11 and the driving gear can also be disengaged from the driven gear 12. When adjustment is required, the first driving device 11 and the driving gear move to engage with the driven gear 12. After the adjustment is completed, the first driving device 11 and the driving gear leave the driven gear 12, so that the evaporation source unit can move freely for scanning.

[0034] In addition, since the rotating shaft 10 needs to pass through the side wall of the evaporation neck 5 and needs to rotate, a gap is likely to exist between the rotating shaft 10 and the side wall of the evaporation neck 5, causing steam to overflow from the gap. In this regard, in one embodiment, a sealing ring is provided on the rotating shaft 10 and sealed using the sealing ring.

[0035] For better sealing, as a further improvement, such as Figure 6 As shown, both ends of the rotating shaft 10 are provided with external threads 15, and the side wall of the evaporation neck 5 connected to the two ends of the rotating shaft 10 is provided with a matching threaded hole or a threaded groove. Through the threaded connection, the flow resistance can be increased, the air tightness is better, and the steam can be better prevented from overflowing. In the specific implementation process, the external threads 15 at both ends of the rotating shaft 10 and the internal threads on the threaded holes are fine threads, and the finer the better, so that the rotating shaft 10 can be rotated at an angle of 90°, and the distance it moves along the axial direction is very small, so that the gap between the two ends of the adjustment plate 9 and the side wall of the evaporation neck 5 is small.

[0036] Since the main bodies 3 of the plurality of linear evaporation sources 2 are stacked in sequence from bottom to top, the evaporation neck 5 of the lowest linear evaporation source 2 is relatively high. In order to ensure that the temperature of the steam does not decrease when passing through the evaporation neck 5 and to avoid condensation, a temperature sensor and a heating mechanism 7, such as a heating wire or a heating plate, are provided on the evaporation neck 5 and the adjustment plate 9 to replenish heat for the steam in time, thereby ensuring that the temperature of the steam passing through the evaporation neck 5 does not decrease.

[0037] Since the adjacent bodies 3 and evaporation necks 5 are close to each other, the temperatures between the adjacent bodies 3 and the adjacent evaporation necks 5 will affect each other. In this regard, in some embodiments, the bodies 3 and evaporation necks 5 are provided with a heat insulation layer 16, such as Figure 3As shown, the heat insulating layer 16 can prevent heat from being transferred outward from the body 3 and the evaporation neck 5, thereby reducing the mutual influence between the body 3 and the evaporation neck 5, and also has a heat preservation effect, thereby reducing the energy consumption of heating.

[0038] In addition, a cooling plate 21 is also provided on the outer side of the linear evaporation source unit 1. Figure 2 As shown, the cooling plate can prevent the heat radiation of the evaporation source unit from affecting other components such as the substrate, and facilitate the cooling of the linear evaporation source unit.

[0039] The second aspect of the present invention also provides a multi-evaporation source interval evaporation device, such as Figure 7 As shown, the spaced evaporation device can evaporate a composite film with multiple materials, which includes multiple groups of linear evaporation source units 1, mask plates 17, and second driving mechanisms 18 as described above, wherein each group of the linear evaporation source units 1 has multiple linear evaporation sources 2, and thus can evaporate multiple materials to form a composite film; the mask plate 17 is provided with multiple shielding portions 19 and opening portions 20 that are spaced apart from each other, wherein the width of the shielding portion 19 is greater than the width of the linear evaporation source unit 1, and the width of the mixed vapor formed by the linear evaporation source unit 1 is less than the width of the shielding portion 19; the second driving mechanism 18 is used for multiple groups of linear evaporation source units 1 to reciprocate between two adjacent shielding portions 19, or the second driving mechanism 18 is used to drive the mask plate 17 and the substrate to reciprocate in combination, so that the linear evaporation source unit 1 moves back and forth relative to two adjacent shielding portions 19.

[0040] In the present embodiment, a plurality of linear evaporation source units 1 are provided so that one or more materials can be evaporated according to actual needs during evaporation. Since the linear evaporation source unit 1 adopts the aforementioned linear evaporation source unit 1, a plurality of linear evaporation sources 2 are stacked and arranged, and the vapor is led out by using the evaporation neck 5. When evaporation of multiple materials is realized, the linear evaporation source unit 1 has a smaller width and can be completely covered by the shielding portion 19 when no evaporation is performed. Moreover, compared with the existing method of placing a plurality of crucibles 6 externally, the provided linear evaporation source unit 1 can ensure better uniformity of the vapor and better quality of the evaporated film. In addition, the use of a plurality of linear evaporation source units 1 can also avoid the problem of material degradation caused by increasing the heating temperature when the linear evaporation source 2 is transported remotely, thereby improving the quality of the evaporated film.

[0041] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "up", "down", "left", "right", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invented product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, it should be noted that, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, an indirect connection through an intermediate medium, or a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] It is understandable that those skilled in the art can make equivalent substitutions or changes based on the technical solution and inventive concept of the present invention, and all these changes or substitutions should fall within the protection scope of the claims attached to the present invention.

Claims

1. A linear evaporation source unit, characterized in that: The linear evaporation source is L-shaped and includes a body, a plurality of nozzles arranged linearly, and an evaporation neck for connecting the body and the nozzles. A crucible is provided in the body for converting the evaporation material into vapor. The evaporation neck is arranged at the top of the body and extends upward along the side of the body, and an air guide channel connecting the body and the nozzles is provided therein. The bodies of the plurality of linear evaporation sources are stacked in sequence from bottom to top, and the evaporation necks of all the linear evaporation sources are located on the same side.

2. The linear evaporation source unit according to claim 1, characterized in that: A steam rate regulating mechanism is arranged in the evaporation neck.

3. The linear evaporation source unit according to claim 2, characterized in that: The steam rate regulating mechanism includes an adjusting plate, a rotating shaft, and a first driving device. The length and width of the adjusting plate are adapted to the length and width of the evaporation neck, and the adjusting plate is arranged in the air guide channel through the rotating shaft. One end of the rotating shaft passes through the side wall of the evaporation neck and is transmission-connected to the first driving device.

4. The linear evaporation source unit according to claim 3, characterized in that: Both ends of the rotating shaft are provided with external threads, and the side wall of the evaporation neck is provided with threaded holes.

5. The linear evaporation source unit according to claim 3, characterized in that: The output end of the first driving device is provided with a driving gear, and the end of the rotating shaft that is transmission-connected with the first driving device is provided with a driven gear. The driving gear meshes with the driven gear, and the diameter of the driving gear is smaller than that of the driven gear.

6. The linear evaporation source unit according to claim 5, characterized in that: The evaporation neck and the regulating plate are both provided with heating mechanisms.

7. The linear evaporation source unit according to claim 1, characterized in that: The outer sides of the main body and the evaporation neck are covered with a heat insulation layer.

8. The linear evaporation source unit according to claim 1, characterized in that: The nozzles of the plurality of linear evaporation sources are symmetrically arranged, and the nozzles on both sides are relatively inclined.

9. The linear evaporation source unit according to claim 8, characterized in that: Restriction plates are also provided on the outer sides of the nozzles at both sides.

10. A multi-evaporation source interval evaporation device, characterized in that: It comprises a plurality of groups of linear evaporation source units as described in any one of claims 1 to 9.

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