Interference system

Abstract

The present application discloses an interference system, which includes a reference seat, a measuring objective lens, a beam splitter, a first adjustment component, a reference objective lens, a second adjustment component, a reflector mounting seat, a reference reflector and a third adjustment component. The second adjustment component includes an objective lens rotation adjustment member, the reference objective lens is connected to the objective lens rotation adjustment member, the objective lens rotation adjustment member has at least two adjustment layers, an adjustment gap is formed between adjacent adjustment layers, the adjustment gap has an opening side and a deformation side that are relatively arranged, the opening side has an opening that separates adjacent adjustment layers, and the deformation side is provided with a deformation part that connects adjacent adjustment layers. The deformation part can be deformed under the action of an external force so that adjacent adjustment layers are close to and away from each other on the opening side, and drive the reference objective lens to rotate. The adjacent adjustment layers are made close to and away from each other on the opening side by the force deformation of the deformation part, so as to achieve the adjustment of the rotational freedom of the reference objective lens.

Description

Technical Field

[0001] The present application relates to the technical field of optical instruments, and in particular to an interference system. Background Art

[0002] In the Linnik interferometer system, the alignment of the optical path and the control of the optical path difference between the main objective lens and the reference objective lens are crucial. When adjusting the optical path of the Linnik interferometer system, it is usually necessary to precisely adjust the position of the lens, generally including the adjustment of the X, Y, Z, Tx, Ty and other dimensions, and the adjusted position needs to be fixed after the adjustment. In addition, due to the limitations of the equipment space, the lens adjustment device should also be compact. Therefore, designing a compact multi-dimensional lens adjustment device is very important for the debugging of the Linnik interferometer system. Summary of the invention

[0003] The main object of the present invention is to provide an interferometric system which is compact and capable of adjusting a lens in multiple translational and rotational dimensions.

[0004] In one embodiment, an interference system is provided, comprising:

[0005] Base seat;

[0006] A measuring objective lens, the measuring objective lens being connected to the reference seat;

[0007] A beam splitter prism, the beam splitter prism is movably disposed in the reference seat;

[0008] A first adjustment component, the first adjustment component is used to drive the beam splitter prism to move linearly to adjust the position of the beam splitter prism, and drive the beam splitter prism to rotate to adjust the direction of the beam splitter prism;

[0009] Reference objective lens;

[0010] a second adjustment component, the second adjustment component is movably arranged on the reference seat, the second adjustment component comprises an objective lens rotation adjustment member, the reference objective lens is connected to the objective lens rotation adjustment member, the objective lens rotation adjustment member has at least two adjustment layers, an adjustment gap is formed between adjacent adjustment layers, the adjustment gap has an opening side and a deformation side which are arranged oppositely, the opening side has an opening for separating adjacent adjustment layers, and the deformation side is provided with a deformation part for connecting adjacent adjustment layers; the deformation part can be deformed under the action of an external force, so that adjacent adjustment layers are moved closer to or farther from each other on the opening side, and drive the reference objective lens to rotate;

[0011] Reflector mount;

[0012] A reference reflector, the reference reflector is movably disposed on the reflector mounting seat and is disposed opposite to the reference objective lens;

[0013] and a third adjusting component, wherein the third adjusting component is used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the orientation of the reference reflector.

[0014] In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis;

[0015] The adjustment layer comprises a first adjustment layer, a second adjustment layer and a third adjustment layer which are sequentially stacked along the second axis, the adjustment gap between the first adjustment layer and the second adjustment layer is a first adjustment gap, and the adjustment gap between the second adjustment layer and the third adjustment layer is a second adjustment gap;

[0016] The opening side and the deformation side of the first adjustment gap are arranged along the third axis, and the first adjustment layer and the second adjustment layer drive the reference objective lens to rotate around the first axis when the opening side of the first adjustment gap approaches and moves away from each other; the opening side and the deformation side of the second adjustment gap are arranged along the first axis, and the second adjustment layer and the third adjustment layer drive the reference objective lens to rotate around the third axis when the opening side of the second adjustment gap approaches and moves away from each other.

[0017] In one embodiment, the objective lens rotation adjustment member also includes a rotation fine-tuning screw group, the rotation fine-tuning screw group includes a first fine-tuning screw and a second fine-tuning screw, the first fine-tuning screw and the second fine-tuning screw are movably connected; the two adjacent adjustment layers have screw holes on the opening side, the fine-tuning screw group passes through the two screw holes, and the first fine-tuning screw and the second fine-tuning screw are threadedly connected to the two screw holes one by one, so as to drive the adjacent adjustment layers to move closer to and away from each other on the opening side.

[0018] In one embodiment, the first fine-tuning screw has a first abutting portion, and the adjustment layer opposite to the first abutting portion has a first abutting groove, the first abutting portion abuts against the first abutting groove, and the contact surface between the first abutting portion and the first abutting groove includes at least a portion of a spherical surface; the second fine-tuning screw has a second abutting portion, and the first fine-tuning screw has a second abutting groove, the second abutting portion abuts against the second abutting groove, and the contact surface between the second abutting portion and the second abutting groove includes at least a portion of a spherical surface.

[0019] In one embodiment, the second adjustment assembly further includes an objective lens mounting tube and an objective lens pressure ring, the objective lens rotation adjustment member and the reference objective lens are arranged in the objective lens mounting tube, and the objective lens pressure ring is used to position the reference objective lens.

[0020] In one embodiment, the second adjustment assembly further includes an objective lens translation adjustment member, wherein the objective lens translation adjustment member and the objective lens rotation adjustment member are stacked along the second axis, and the translation adjustment member is used to drive the reference objective lens to translate along the first axis and / or the third axis.

[0021] In one embodiment, the objective lens translation adjustment member has a first side and a second side that are relatively arranged, the first side is provided with a fixed pin, and the second side is provided with two relatively arranged objective lens translation fine-adjustment screws; the objective lens translation fine-adjustment screws are used to drive the objective lens translation adjustment member to rotate around the fixed pin, so as to drive the middle part of the objective lens translation adjustment member to translate along the first axis and / or the third axis, and to position the objective lens translation fine-adjustment screws.

[0022] In one embodiment, the objective lens translation adjustment member includes a first objective lens translation adjustment member and a second objective lens translation adjustment member, and the first objective lens translation adjustment member and the second objective lens translation adjustment member are stacked in sequence along the second axis; the first objective lens translation adjustment member is used to drive the reference objective lens to translate along the third axis, and the second objective lens translation adjustment member is used to drive the reference objective lens to translate along the first axis.

[0023] In one embodiment, the third adjustment layer and the first objective lens translation adjustment member are configured as the same structural member.

[0024] In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis;

[0025] The first adjustment component can drive the beam splitter prism to move linearly along the first axis, and drive the beam splitter prism to rotate around the first axis, the second axis and the third axis; the third adjustment component can drive the reference reflector to move linearly along the second axis, and drive the reference reflector to rotate around the first axis and the third axis.

[0026] According to the interference system of the above embodiment, the interference system includes a reference seat, a measuring lens, a beam splitter prism, a first adjustment component, a reference lens, a second adjustment component, a reflector mounting seat, a reference reflector and a third adjustment component. The measuring lens is connected to the reference seat. The beam splitter prism is movably arranged in the reference seat. The first adjustment component is used to drive the beam splitter prism to move linearly to adjust the position of the beam splitter prism, and to drive the beam splitter prism to rotate to adjust the direction of the beam splitter prism. The second adjustment component is movably arranged on the reference seat, and the second adjustment component includes an objective lens rotation adjustment member, and the reference objective lens is connected to the objective lens rotation adjustment member. The objective lens rotation adjustment member has at least two adjustment layers, and an adjustment gap is formed between adjacent adjustment layers. The adjustment gap has an opening side and a deformation side that are relatively arranged, and the opening side has an opening that separates adjacent adjustment layers, and the deformation side is provided with a deformation part that connects adjacent adjustment layers. The deformation part can be deformed under the action of an external force, so that adjacent adjustment layers are close to and away from each other on the opening side, and drive the reference objective lens to rotate. The reference reflector is movably arranged on the reflector mounting seat and is arranged relative to the reference objective lens. The third adjustment component is used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the direction of the reference reflector. When adjusting the reference mirror adjustment mechanism, the staff can adjust the position and direction of the beam splitter prism through the first adjustment component, adjust the direction of the reference objective lens through the second adjustment component, and adjust the position and direction of the reference reflector through the third adjustment component. When the staff uses the second adjustment component to adjust the direction of the reference objective lens, they can apply a force to the adjustment layer on the opening side so that the deformation part is deformed under the action of external force, so that the adjacent adjustment layers are close to and away from each other on the opening side, thereby driving the reference objective lens to rotate. On the one hand, the cooperation of the first adjustment component, the second adjustment component and the third adjustment component realizes the multi-dimensional adjustment of the beam splitter prism, the reference objective lens and the reference reflector. On the other hand, the force deformation of the deformation part makes the adjacent adjustment layers close to and away from each other on the opening side, thereby realizing the adjustment of the rotational freedom of the reference objective lens. Compared with the traditional solution of utilizing the position changes of multiple supporting points to drive the adjustment plate to rotate, the structure is more simple and compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure of an interference system in an embodiment of the present application;

[0028] Figure 2 A cross-sectional view of an interference system from a top view in an embodiment of the present application;

[0029] Figure 3 This is a schematic diagram of the structure of a prism translation adjustment member and a prism rotation adjustment member in a top-down perspective in an embodiment of the present application;

[0030] Figure 4This is a schematic structural diagram of a prism translation adjustment member, a precision electric translation stage, and a beam splitter prism in one embodiment of the present application;

[0031] Figure 5 This is a schematic diagram of the structure of the prism translation adjustment member and the reference seat slidingly cooperating in one embodiment of the present application;

[0032] Figure 6 This is a schematic structural diagram of the stereoscopic viewing angle of a reference objective lens and a second adjustment component in one embodiment of the present application;

[0033] Figure 7 This is a schematic structural diagram of the reference objective lens and the front view angle of the second adjustment component in one embodiment of the present application;

[0034] Figure 8 This is a schematic diagram of the structure of the objective lens rotation adjustment member in one embodiment of the present application at two viewing angles a and b;

[0035] Fig. 9 A cross-sectional view of an objective lens rotation adjustment member in one embodiment of the present application;

[0036] Fig.10 This is a schematic diagram of the working principle of the objective lens translation adjustment member in one embodiment of the present application;

[0037] Fig.11 This is a structural schematic diagram of a reflector mounting seat and a third adjustment component in one embodiment of the present application;

[0038] Fig.12 This is a schematic structural diagram of a reflector mounting seat, a reference reflector, and a third adjustment component in one embodiment of the present application;

[0039] 1. Reference suffix: 100, reference seat; 110, first guide groove; 120, second guide groove; 200, measuring objective lens; 300, dichroic prism; 400, first adjustment assembly; 410, prism translation adjustment member; 411, first protrusion; 412, second protrusion; 420, prism translation fine adjustment screw; 430, precision electric displacement stage; 440, prism rotation adjustment member; 450, first prism rotation fine adjustment screw; 460, second prism rotation fine adjustment screw; 500, reference objective lens; 600, second adjustment assembly; 610, objective lens rotation adjustment member; 611, adjustment layer; 6111, first adjustment layer; 6112, second adjustment layer; 6113, third adjustment layer; 6114, first abutment groove; 612, adjustment gap; 6121, opening side; 6122, deformation side; 6123, third An adjustment gap; 6124, a second adjustment gap; 613, a deformation part; 620, an objective lens translation adjustment member; 621, a first objective lens translation adjustment member; 622, a second objective lens translation adjustment member; 630, a fixed pin; 640, an objective lens translation fine-tuning screw; 650, a rotation fine-tuning screw group; 651, a first fine-tuning screw; 6511, a first abutting portion; 6512, a second abutting groove; 652, a second fine-tuning screw; 6521, a second abutting portion; 660, an objective lens mounting tube; 670, an objective lens pressure ring; 700, a reflector mounting seat; 800, a reference reflector; 900, a third adjustment component; 910, a reflector translation adjustment member; 920, a reflector rotation adjustment member; 930, a reflector translation fine-tuning screw; 940, a reflector rotation fine-tuning screw; 950, a pre-tightening tension spring; 1000, an object to be measured. DETAILED DESCRIPTION

[0040] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0041] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0042] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0043] This embodiment provides an interference system.

[0044] Please refer to Figure 1-12 The interference system includes a reference seat 100, a measuring objective lens 200, a beam splitter prism 300, a first adjustment component 400, a reference objective lens 500, a second adjustment component 600, a reflector mounting seat 700, a reference reflector 800 and a third adjustment component 900.

[0045] Please refer to Figure 1 , 2 6-10, the measuring objective lens 200 is connected to the reference seat 100. The beam splitter prism 300 is movably arranged in the reference seat 100. The first adjustment component 400 is used to drive the beam splitter prism 300 to move linearly to adjust the position of the beam splitter prism 300, and drive the beam splitter prism 300 to rotate to adjust the orientation of the beam splitter prism 300. The second adjustment component 600 is movably arranged on the reference seat 100, and the second adjustment component 600 includes an objective lens rotation adjustment member 610, and the reference objective lens 500 is connected to the objective lens rotation adjustment member 610, and the objective lens rotation adjustment member 610 has at least two adjustment layers 611, and an adjustment gap 612 is formed between adjacent adjustment layers 611, and the adjustment gap 612 has an opening side 6121 and a deformation side 6122 that are arranged oppositely, and the opening side 6121 has an opening that separates adjacent adjustment layers 611, and the deformation side 6122 is provided with a deformation portion 613 that connects adjacent adjustment layers 611. The deformation portion 613 can be deformed under the action of an external force, so that the adjacent adjustment layers 611 are moved closer to or farther from each other at the opening side 6121, and the reference objective lens 500 is driven to rotate. The reference reflector 800 is movably disposed on the reflector mounting seat 700, and is disposed opposite to the reference objective lens 500. The third adjustment component 900 is used to drive the reference reflector 800 to move linearly to adjust the position of the reference reflector 800, and to drive the reference reflector 800 to rotate to adjust the orientation of the reference reflector 800.

[0046] When adjusting the interference system, the staff can adjust the position and orientation of the beam splitter prism 300 through the first adjustment component 400, adjust the orientation of the reference objective lens 500 through the second adjustment component 600, and adjust the position and orientation of the reference reflector 800 through the third adjustment component 900. When the staff uses the second adjustment component 600 to adjust the orientation of the reference objective lens 500, they can apply a force to the adjustment layer 611 at the opening side 6121, so that the deformation part 613 is flexibly deformed under the action of the external force, so that the adjacent adjustment layers 611 are moved closer to or farther from each other at the opening side 6121, thereby driving the reference objective lens 500 to rotate. On the one hand, the cooperation of the first adjustment component 400, the second adjustment component 600 and the third adjustment component 900 realizes the multi-dimensional adjustment of the beam splitter prism 300, the reference objective lens 500 and the reference reflector 800. On the other hand, the flexible deformation of the deformation part 613 after being stressed makes the adjacent adjustment layers 611 approach and move away from each other at the opening side 6121, thereby realizing the adjustment of the rotational freedom of the reference objective lens 500. Compared with the traditional solution of driving the rotation of the adjustment plate by the position change of multiple support points, the structure is more simple and compact.

[0047] Please refer to Figure 1 , 2 6-10, in one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism 300 and the measuring objective lens 200 are arranged along the first axis, and the dichroic prism 300 and the reference objective lens 500 are arranged along the second axis. The adjustment layer 611 includes a first adjustment layer 6111, a second adjustment layer 6112 and a third adjustment layer 6113 which are sequentially stacked along the second axis, the adjustment gap 612 between the first adjustment layer 6111 and the second adjustment layer 6112 is the first adjustment gap 6123, and the adjustment gap 612 between the second adjustment layer 6112 and the third adjustment layer 6113 is the second adjustment gap 6124. The opening side 6121 and the deformation side 6122 of the first adjustment gap 6123 are arranged along the third axis, and when the first adjustment layer 6111 and the second adjustment layer 6112 approach and move away from each other at the opening side 6121 of the first adjustment gap 6123, the reference objective lens 500 is driven to rotate around the first axis. The opening side 6121 and the deformation side 6122 of the second adjustment gap 6124 are arranged along the first axis. When the second adjustment layer 6112 and the third adjustment layer 6113 approach and move away from each other at the opening side 6121 of the second adjustment gap 6124, the reference objective lens 500 is driven to rotate around the third axis.

[0048] When it is necessary to adjust the rotational freedom of the reference objective lens 500, the staff can make the first adjustment layer 6111 and the second adjustment layer 6112 move closer to or farther from each other at the opening side 6121 of the first adjustment gap 6123, so as to drive the reference objective lens 500 to rotate around the first axis. The staff can also make the second adjustment layer 6112 and the third adjustment layer 6113 move closer to or farther from each other at the opening side 6121 of the second adjustment gap 6124, so as to drive the reference objective lens 500 to rotate around the third axis. It should be noted that, in this embodiment, the first axis is Figure 1 The X axis in the figure, the second axis is Figure 1 The Z axis in the diagram, the third axis is Figure 1 That is, the rotational freedom RX of the reference objective lens 500 around the X axis can be adjusted by the relative movement of the first adjustment layer 6111 and the second adjustment layer 6112 at the opening side 6121 of the first adjustment gap 6123, and the rotational freedom RY of the reference objective lens 500 around the Y axis can be adjusted by the relative movement of the second adjustment layer 6112 and the third adjustment layer 6113 at the opening side 6121 of the second adjustment gap 6124.

[0049] Specifically, the extension direction of the opening side 6121 of the first adjustment gap 6123 is parallel to the first axis, and the extension direction of the opening side 6121 of the second adjustment gap 6124 is parallel to the third axis, that is, the extension direction of the opening side 6121 of the first adjustment gap 6123 is perpendicular to the extension direction of the opening side 6121 of the second adjustment gap 6124, so that the first adjustment gap 6123 and the second adjustment gap 6124 can be used to respectively realize the rotation adjustment of the reference objective lens 500 in two perpendicular rotation directions. Of course, in other embodiments, the number of the adjustment gaps 612 is not limited to the first adjustment gap 6123 and the second adjustment gap 6124. For example, an additional fourth adjustment layer can be stacked to form a third adjustment gap between the fourth adjustment layer and the third adjustment layer 6113.

[0050] Since any one of the first adjustment gap 6123 and the second adjustment gap 6124 can be used to adjust a single rotational degree of freedom of the reference objective lens 500, the user can more specifically adjust the single rotational degree of freedom of the reference objective lens 500, thereby facilitating improved accuracy of adjustment. At the same time, by stacking a plurality of adjustment layers 611 and adjustment gaps 612, it is also ensured that the user can adjust the reference objective lens 500 in a plurality of rotational directions, thereby ensuring the comprehensiveness of the rotational adjustment direction of the reference objective lens 500.

[0051] In addition, since each adjustment gap 612 of the stacked setting can be adjusted independently, the user can flexibly select one or more corresponding adjustment gaps 612 according to actual needs to realize the rotational adjustment of the reference objective lens 500, which is beneficial to improving the flexibility of user operation and adaptability to different application scenarios.

[0052] Specifically, in order to make the deformation portion 613 more easily flexibly deformed under the action of external force, the deformation portion 613 may be weakened, for example, by opening a groove or a partial through hole on the deformation portion 613 or reducing the thickness of the deformation portion 613 .

[0053] It should be noted that in the prior art, when it is necessary to adjust the distance between two components, a single screw is usually used to adjust the distance. For example, the two components are a first component and a second component, and a single screw is movably connected to the first component and is threadedly connected to the second component, so that when the screw is tightened, the first component is squeezed by the end of the screw, thereby changing the distance between the first component and the second component. The disadvantage of this is that the end of the single screw only applies an adjustment force and a limiting force to the first component from one side of the first component, which limits the adjustment accuracy when adjusting the distance, and the stability of keeping the distance unchanged after the adjustment is completed is poor. However, the interference system requires that the optical path can accurately and stably pass through the designated areas of various lenses during operation, and the requirements for adjustment accuracy and stability after adjustment are very high, making it difficult for the existing single screw spacing adjustment solution to meet the requirements.

[0054] To solve the above problems, please refer to Figure 1 , 2 6-10, in one embodiment, the objective lens rotation adjustment member 610 further includes a rotation fine adjustment screw group 650, the rotation fine adjustment screw group 650 includes a first fine adjustment screw 651 and a second fine adjustment screw 652, and the first fine adjustment screw 651 is movably sleeved with the second fine adjustment screw 652. Two adjacent adjustment layers 611 have screw holes on the opening side 6121, the fine adjustment screw group passes through the two screw holes, and the first fine adjustment screw 651 and the second fine adjustment screw 652 are threadedly connected to the two screw holes in a one-to-one correspondence, so as to drive the adjacent adjustment layers 611 to move closer to or farther from each other on the opening side 6121.

[0055] The advantage of doing so is that the first fine-tuning screw 651 and the second fine-tuning screw 652 are threadedly connected to the two screw holes in a one-to-one correspondence through the movable sleeve, so that the force exerted on the two adjustment layers 611 by rotating the fine-tuning screw group 650 is ultimately transmitted through the threaded structure, and the use of two screws makes it easy to apply force to the adjustment layer 611 from two opposite directions. Compared with the traditional solution of adjusting and maintaining the spacing by unilateral extrusion force, this is beneficial to improving the accuracy of adjusting the spacing on the one hand, and on the other hand, it is also beneficial to improving the stability of maintaining the spacing unchanged after adjustment.

[0056] When it is necessary to adjust the rotational freedom of the reference objective lens 500, the staff can drive the adjacent adjustment layers 611 to move closer to or farther from each other at the opening side 6121 by rotating the fine adjustment screw set 650, thereby driving the reference objective lens 500 to rotate. Specifically, the staff can respectively turn the first fine adjustment screw 651 and the second fine adjustment screw 652 according to actual adjustment needs, and use the force between the first fine adjustment screw 651 and the second fine adjustment screw 652 and the adjustment layer 611 threadedly connected, and the abutment force between the first fine adjustment screw 651 and the second fine adjustment screw 652 to drive the adjacent adjustment layers 611 to move closer to or farther from each other at the opening side 6121.

[0057] For example, see Fig. 9 , when the staff adjusts the first fine adjustment screw 651 relative to Fig. 9 Tighten the first adjustment layer 6111 in the middle and upper part, and move the second fine adjustment screw 652 relative to Fig. 9 When the second adjustment layer 6112 in the middle and lower part is loosened, the first adjustment layer 6111 is driven to move away from the second adjustment layer 6112 at the opening side 6121 of the first gap. Fig. 9 The first adjustment layer 6111 in the middle upper part is loosened, and the second fine adjustment screw 652 is relatively Fig. 9 When the second adjustment layer 6112 in the middle and lower part is tightened, the first adjustment layer 6111 is driven to move closer to the second adjustment layer 6112 at the opening side 6121 of the first gap.

[0058] Please refer to Fig. 9 In one embodiment, the first fine-adjusting screw 651 has a first abutting portion 6511, and the adjusting layer 611 opposite to the first abutting portion 6511 has a first abutting groove 6114, the first abutting portion 6511 abuts against the first abutting groove 6114, and the contact surface between the first abutting portion 6511 and the first abutting groove 6114 includes at least a portion of a spherical surface. The second fine-adjusting screw 652 has a second abutting portion 6521, and the first fine-adjusting screw 651 has a second abutting groove 6512, the second abutting portion 6521 abuts against the second abutting groove 6512, and the contact surface between the second abutting portion 6521 and the second abutting groove 6512 includes at least a portion of a spherical surface.

[0059] Since the contact surface between the first abutting portion 6511 and the first abutting groove 6114 includes at least a part of a spherical surface, and the contact surface between the second abutting portion 6521 and the second abutting groove 6512 includes at least a part of a spherical surface, when there is a certain angle between two adjacent adjustment layers 611, it is still possible to ensure that the first abutting portion 6511 and the first abutting groove 6114, as well as the second abutting portion 6521 and the second abutting groove 6512 are pressed in a surface contact manner, thereby facilitating the improvement of the locking stability of the first fine-adjusting screw 651 and the second fine-adjusting screw 652. Preferably, the contact surface between the first abutting portion 6511 and the first abutting groove 6114 can be a hemispherical surface, and the contact surface between the second abutting portion 6521 and the second abutting groove 6512 can also be a hemispherical surface.

[0060] Please refer to Figure 6-9 In one embodiment, the second adjustment component 600 also includes an objective lens mounting tube 660 and an objective lens pressure ring 670, the objective lens rotation adjustment member 610 and the reference objective lens 500 are arranged in the objective lens mounting tube 660, and the objective lens pressure ring 670 is used to position the reference objective lens 500.

[0061] The objective lens rotation adjustment member 610 and the reference objective lens 500 are accommodated by the space in the objective lens mounting tube 660, and the reference objective lens 500 is positioned in the objective lens mounting tube 660 by the objective lens pressure ring 670, thereby achieving the installation and positioning of the objective lens rotation adjustment member 610 and the reference objective lens 500.

[0062] Please refer to Figure 1 , 2 And 10, in one embodiment, the second adjustment component 600 also includes an objective lens translation adjustment member 620, and the objective lens translation adjustment member 620 and the objective lens rotation adjustment member 610 are stacked along the second axis, and the translation adjustment member is used to drive the reference objective lens 500 to translate along the first axis and / or the third axis.

[0063] Since the objective lens translation adjustment member 620 is added, the reference objective lens 500 can be driven to translate along the first axis and / or the third axis by the objective lens translation adjustment member 620. That is, the translational degree of freedom dx of the reference objective lens 500 along the X axis and / or the translational degree of freedom dy of the reference objective lens 500 along the Y axis can be adjusted by the objective lens translation adjustment member 620. Specifically, the objective lens translation adjustment member 620 can be configured to translate only along the first axis, the objective lens translation adjustment member 620 can also be configured to translate only along the second axis, and the objective lens translation adjustment member 620 can also be configured to have displacement on both the first axis and the third axis.

[0064] Please refer to Figure 1 , 2In one embodiment, the objective lens translation adjustment member 620 has a first side and a second side that are oppositely disposed, the first side is provided with a fixed pin 630, and the second side is provided with two oppositely disposed objective lens translation fine adjustment screws 640. The objective lens translation fine adjustment screws 640 are used to drive the objective lens translation adjustment member 620 to rotate around the fixed pin 630, so as to drive the middle part of the objective lens translation adjustment member 620 to translate along the first axis and / or the third axis, and to position the objective lens translation fine adjustment screws 640.

[0065] When it is necessary to drive the reference objective lens 500 to move in translation, the staff can drive the objective lens translation adjustment member 620 to rotate around the fixed pin 630 as the rotation center by translating the fine adjustment screw, thereby driving the middle part of the objective lens translation adjustment member 620 to move in translation. And because the middle part of the objective lens translation adjustment member 620 is usually used to connect with the reference objective lens 500, it can drive the reference objective lens 500 to move in translation. It should be noted that in this embodiment, the translational movement of the middle part of the objective lens translation adjustment member 620 on the first axis and the third axis is coupled, that is, the middle part of the objective lens translation adjustment member 620 moves on both the first axis and the third axis. For details, please refer to Fig.10 , when the motion trajectory of the second side of the objective lens translation adjustment member 620 is A-A', the middle part of the objective lens translation adjustment member 620 will produce a displacement of O-O'. However, considering that in actual application scenarios, when the motion arc of the middle part of the objective lens translation adjustment member 620 is shorter and the arc is smaller, the movement of the middle part of the objective lens translation adjustment member 620 can be approximately regarded as a linear motion, that is, the movement of the middle part of the objective lens translation adjustment member 620 can be approximately regarded as a translational motion only along the first axis or the third axis.

[0066] Compared with the conventional translation adjustment structure, the objective lens translation adjustment member 620 in this embodiment is more compact and has higher precision. In particular, considering that the reference objective lens 500 needs to be translated to a smaller amplitude, the objective lens translation adjustment member 620 in this embodiment is more suitable for adjusting the reference objective lens 500 in the translation direction. Of course, in other embodiments, the objective lens translation adjustment member 620 may also adopt a conventional solution, for example, screws are arranged around the plate-shaped adjustment member to promote the translation movement of the plate-shaped adjustment member.

[0067] Please refer to Figure 1 , 2 In one embodiment, the objective lens translation adjustment member 620 includes a first objective lens translation adjustment member 621 and a second objective lens translation adjustment member 622, and the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 are sequentially stacked along the second axis. The first objective lens translation adjustment member 621 is used to drive the reference objective lens 500 to translate along the third axis, and the second objective lens translation adjustment member 622 is used to drive the reference objective lens 500 to translate along the first axis.

[0068] When the translation position of the reference objective lens 500 needs to be adjusted, the reference objective lens 500 is mainly driven to translate along the third axis by the first objective lens translation adjustment member 621, and the reference objective lens 500 is mainly driven to translate along the first axis by the second objective lens translation adjustment member 622, thereby realizing the translation position adjustment of the reference objective lens 500 in two dimensions of the first axis and the third axis.

[0069] Since the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 can be adjusted independently, the user can flexibly select one or more corresponding objective lens translation adjustment members 620 according to actual needs to achieve translation adjustment of the reference objective lens 500, which is beneficial to improving the flexibility of user operation and adaptability to different application scenarios.

[0070] At the same time, the stacked multiple objective lens translation adjustment members 620 also ensure that the user can adjust the reference objective lens 500 in multiple translation directions, thereby ensuring the comprehensiveness of the translation adjustment direction of the reference objective lens 500. Of course, the stacked number of objective lens translation adjustment members 620 is not limited to the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 mentioned above. For example, a third objective lens translation adjustment member can also be stacked. Please refer to Figure 1 , 2 and 6-10, in one embodiment, the third adjustment layer 6113 and the first objective lens translation adjustment member 621 are configured as the same structural member.

[0071] The functions of the third adjustment layer 6113 and the first objective lens translation adjustment member 621 are realized by the same structural member, which is beneficial to simplifying the structure of the interference system and improving the structural compactness of the interference system. Specifically, a second adjustment gap 6124 is formed between the structural member and the second adjustment layer 6112, and a fixed pin 630 and an objective lens translation fine adjustment screw 640 are provided on the structural member, so that the structural member has the functions of the third adjustment layer 6113 and the first objective lens translation adjustment member 621. Of course, in other embodiments, the third adjustment layer 6113 and the first objective lens translation adjustment member 621 can also be configured as two independent structural members.

[0072] Please refer to Figure 1-5, 11 and 12, in one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the beam splitter 300 and the measuring objective lens 200 are arranged along the first axis, and the beam splitter 300 and the reference objective lens 500 are arranged along the second axis. The first adjustment component 400 can drive the beam splitter 300 to move linearly along the first axis, and drive the beam splitter 300 to rotate around the first axis, the second axis and the third axis. The third adjustment component 900 can drive the reference reflector 800 to move linearly along the second axis, and drive the reference reflector 800 to rotate around the first axis and the third axis.

[0073] On the one hand, the staff can drive the beam splitter 300 to move linearly along the first axis through the first adjustment component 400 to adjust the translation position of the beam splitter 300 along the first axis, and the staff can drive the beam splitter 300 to rotate around the first axis, the second axis and the third axis through the first adjustment component 400 to achieve the adjustment of the three rotational degrees of freedom of the beam splitter 300. On the other hand, the staff can drive the reference reflector 800 to move linearly along the second axis through the third adjustment component 900 to adjust the translation position of the reference reflector 800 along the second axis, and the staff can drive the reference reflector 800 to rotate around the first axis and the third axis through the third adjustment component 900 to achieve the adjustment of the two rotational degrees of freedom of the reference reflector 800.

[0074] It should be noted that, in this embodiment, the first axis is Figure 1 The X axis in the figure, the second axis is Figure 1 The Z axis in the figure, the third axis is Figure 1 In other words, on the one hand, the first adjustment component 400 is used to adjust the translational freedom dx of the beam splitter 300 along the X axis, and the first adjustment component 400 is used to adjust the rotational freedom RX around the X axis, the rotational freedom RZ around the Z axis, and the rotational freedom RY around the Y axis of the beam splitter 300. On the other hand, the third adjustment component 900 is used to adjust the translational freedom dz of the reference reflector 800 along the Z axis, and the third adjustment component 900 is used to adjust the rotational freedom RX around the X axis and the rotational freedom RY around the Y axis of the reference reflector 800. Specifically, the specific adjustment structures of the first adjustment component 400 and the third adjustment component 900 can select corresponding translational adjustment structures and rotational adjustment structures. For example, the translational adjustment structure can select a translational adjustment structure with threaded advancement, and the rotational adjustment structure can select a rotational adjustment structure that drives the adjustment plate to rotate by changing the positions of multiple support points.

[0075] Please refer to Figure 1-5In one embodiment, the first adjustment component 400 includes a prism translation adjustment member 410, a prism translation fine adjustment screw 420 and a precision electric translation stage 430. The beam splitter 300 is connected to the precision electric translation stage 430, and the precision electric translation stage 430 is connected to the prism translation adjustment member 410. The precision electric translation stage 430 is used to drive the beam splitter 300 to translate along the first axis. The reference seat 100 has a first guide groove 110 and a second guide groove 120, both of which are parallel to the first axis, the cross section of the first guide groove 110 is a rectangle, and the cross section of the second guide groove 120 is an inverted triangle. The prism translation adjustment member 410 has a first protrusion 411 and a second protrusion 412. The first protrusion 411 matches the shape of the first guide groove 110 and is movably disposed in the first guide groove 110. The second protrusion 412 matches the shape of the second guide groove 120 and is movably disposed in the second guide groove 120 to guide the dichroic prism 300 to translate along the first axis.

[0076] On the one hand, when it is necessary to adjust the translation position of the beam splitter 300 on the first axis, the beam splitter 300 can be driven to translate along the first axis by the precision electric translation stage 430. The cooperation between the first protrusion 411 and the first guide groove 110 and the cooperation between the second protrusion 412 and the second guide groove 120 guides the translation of the beam splitter 300 along the first axis, thereby facilitating the improvement of the linearity of the movement of the beam splitter 300. On the other hand, the selection of a rectangular cross section of the first guide groove 110 and the first protrusion 411 is conducive to ensuring the stability of the active cooperation between the first protrusion 411 and the first guide groove 110, thereby facilitating the improvement of the stability of the beam splitter 300 when it translates along the first axis. The selection of an inverted triangular cross section of the second guide groove 120 and the second protrusion 412 is conducive to improving the accuracy of the center positioning of the second protrusion 412 and the second guide groove 120, thereby facilitating the improvement of the movement accuracy and linearity of the beam splitter 300 when it translates along the first axis.

[0077] Please refer to Figure 1-5 In one embodiment, the first adjustment component 400 also includes two prism translation fine-tuning screws 420, and the two prism translation fine-tuning screws 420 are respectively arranged on opposite sides of the prism translation adjustment member 410 along the first axis to drive the prism translation adjustment member 410 to move linearly along the first axis.

[0078] The staff can drive the prism translation adjustment member 410 to translate along the first axis through the two prism translation fine adjustment screws 420, thereby achieving manual adjustment of the translation freedom dx of the beam splitter prism 300 along the X axis.

[0079] Please refer to Figure 1-5In one embodiment, the first adjustment assembly 400 further includes a prism rotation adjustment member 440, three first prism rotation fine adjustment screws 450 and two second prism rotation fine adjustment screws 460, and the beam splitter 300 is connected to the prism rotation adjustment member 440. The three first prism rotation fine adjustment screws 450 are distributed in a triangular shape on the prism rotation adjustment member 440 to drive the prism rotation adjustment member 440 to rotate around the first axis and the second axis. The two second prism rotation fine adjustment screws 460 are distributed on one side of the prism rotation adjustment member 440 to drive the prism rotation adjustment member 440 to rotate around the third axis.

[0080] The staff can drive the beam splitter prism 300 to rotate by cooperating the three first prism rotation fine adjustment screws 450 with the prism rotation adjustment member 440, thereby adjusting the beam splitter prism 300 in the rotational freedom RX around the X axis and the rotational freedom RZ around the Z axis. The staff can drive the beam splitter prism 300 to rotate by cooperating the two second prism rotation fine adjustment screws 460 with the prism rotation adjustment member 440, thereby adjusting the beam splitter prism 300 in the rotational freedom RY around the Y axis.

[0081] Please refer to Figure 1 , 2 , 11 and 12, in one embodiment, the third adjustment assembly 900 includes a reflector translation adjustment member 910, a reflector rotation adjustment member 920, a reflector translation fine adjustment screw 930, a reflector rotation fine adjustment screw 940 and a pre-tension spring 950, the reflector translation adjustment member 910 is movably disposed on the reflector mounting seat 700, and the reflector translation fine adjustment screw 930 is used to drive the reflector translation adjustment member 910 to translate along the second axis on the reflector mounting seat 700. The reference reflector 800 is connected to the reflector rotation adjustment member 920, and the reflector rotation adjustment member 920 is movably disposed on the reflector translation adjustment member 910. The reflector rotation adjustment member 920 is triangular, and the reflector rotation fine adjustment screw 940 is configured in three numbers, and is respectively disposed corresponding to the three vertices of the reflector rotation adjustment member 920, so as to drive the corresponding vertices to move close to and away from the reflector translation adjustment member 910. The pre-tightening tension spring 950 is used to provide a pre-tightening tension to the reflector rotation adjusting member 920 , so that the reflector rotation adjusting member 920 and the reflector rotation fine adjustment screw 940 are pressed tightly.

[0082] When it is necessary to adjust the translational freedom dz of the reference reflector 800 along the Z axis, the staff can turn the reflector translation fine adjustment screw 930, and drive the reflector translation adjustment member 910 to move along the second axis on the reflector mounting seat 700 through the reflector translation fine adjustment screw 930, thereby driving the reference reflector 800 to make a linear motion along the second axis. When it is necessary to adjust the rotational freedom RX around the X axis and the rotational freedom RY around the Y axis of the reference reflector 800, the staff can respectively turn the three reflector rotation fine adjustment screws 940 to drive the three corresponding vertices of the reflector rotation adjustment member 920 to move closer to and away from the reflector translation adjustment member 910, thereby realizing the adjustment of the reflector rotation adjustment member 920 in the two rotational freedoms RX and RY, and then driving the reference reflector 800 to realize the adjustment in the two rotational freedoms RX and RY through the reflector rotation adjustment member 920.

[0083] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. An interference system, characterized in that: include: Base seat; A measuring objective lens, the measuring objective lens being connected to the reference seat; A beam splitter prism, the beam splitter prism is movably disposed in the reference seat; A first adjustment component, the first adjustment component is used to drive the beam splitter prism to move linearly to adjust the position of the beam splitter prism, and drive the beam splitter prism to rotate to adjust the direction of the beam splitter prism; Reference objective lens; a second adjustment component, the second adjustment component is movably arranged on the reference seat, the second adjustment component comprises an objective lens rotation adjustment member, the reference objective lens is connected to the objective lens rotation adjustment member, the objective lens rotation adjustment member has at least two adjustment layers, an adjustment gap is formed between adjacent adjustment layers, the adjustment gap has an opening side and a deformation side which are arranged oppositely, the opening side has an opening for separating adjacent adjustment layers, and the deformation side is provided with a deformation part for connecting adjacent adjustment layers; the deformation part can be deformed under the action of an external force, so that adjacent adjustment layers are moved closer to or farther from each other on the opening side, and drive the reference objective lens to rotate; Reflector mount; A reference reflector, the reference reflector is movably disposed on the reflector mounting seat and is disposed opposite to the reference objective lens; and a third adjusting component, the third adjusting component being used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the orientation of the reference reflector; The first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis; The adjustment layer comprises a first adjustment layer, a second adjustment layer and a third adjustment layer which are sequentially stacked along the second axis, the adjustment gap between the first adjustment layer and the second adjustment layer is a first adjustment gap, and the adjustment gap between the second adjustment layer and the third adjustment layer is a second adjustment gap; The opening side and the deformation side of the first adjustment gap are arranged along the third axis, and the first adjustment layer and the second adjustment layer drive the reference objective lens to rotate around the first axis when the opening side of the first adjustment gap approaches and moves away from each other; the opening side and the deformation side of the second adjustment gap are arranged along the first axis, and the second adjustment layer and the third adjustment layer drive the reference objective lens to rotate around the third axis when the opening side of the second adjustment gap approaches and moves away from each other.

2. The interference system according to claim 1, characterized in that The objective lens rotation adjustment member also includes a rotation fine-tuning screw group, which includes a first fine-tuning screw and a second fine-tuning screw, and the first fine-tuning screw and the second fine-tuning screw are movably connected; the two adjacent adjustment layers have screw holes on the opening side, and the fine-tuning screw group passes through the two screw holes, and the first fine-tuning screw and the second fine-tuning screw are threadedly connected to the two screw holes one by one, so as to drive the adjacent adjustment layers to move closer to and away from each other on the opening side.

3. The interference system according to claim 2, characterized in that The first fine-tuning screw has a first abutting portion, and the adjustment layer opposite to the first abutting portion has a first abutting groove, the first abutting portion abuts against the first abutting groove, and the contact surface between the first abutting portion and the first abutting groove includes at least a portion of a spherical surface; the second fine-tuning screw has a second abutting portion, and the first fine-tuning screw has a second abutting groove, the second abutting portion abuts against the second abutting groove, and the contact surface between the second abutting portion and the second abutting groove includes at least a portion of a spherical surface.

4. The interference system according to claim 1, characterized in that The second adjustment assembly also includes an objective lens mounting tube and an objective lens pressing ring. The objective lens rotation adjustment member and the reference objective lens are arranged in the objective lens mounting tube. The objective lens pressing ring is used to position the reference objective lens.

5. The interference system according to claim 1, characterized in that The second adjustment assembly also includes an objective lens translation adjustment member, which is stacked with the objective lens rotation adjustment member along the second axis, and the translation adjustment member is used to drive the reference objective lens to translate along the first axis and / or the third axis.

6. The interference system according to claim 5, characterized in that The objective lens translation adjustment member has a first side and a second side that are relatively arranged, the first side is provided with a fixed pin, and the second side is provided with two relatively arranged objective lens translation fine-adjustment screws; the objective lens translation fine-adjustment screws are used to drive the objective lens translation adjustment member to rotate around the fixed pin, so as to drive the middle part of the objective lens translation adjustment member to translate along the first axis and / or the third axis, and to position the objective lens translation fine-adjustment screws.

7. The interference system according to claim 6, characterized in that The objective lens translation adjustment member includes a first objective lens translation adjustment member and a second objective lens translation adjustment member, and the first objective lens translation adjustment member and the second objective lens translation adjustment member are stacked in sequence along the second axis; the first objective lens translation adjustment member is used to drive the reference objective lens to translate along the third axis, and the second objective lens translation adjustment member is used to drive the reference objective lens to translate along the first axis.

8. The interference system according to claim 7, characterized in that The third adjustment layer and the first objective lens translation adjustment member are configured as the same structural member.

9. The interference system according to any one of claims 1 to 8, characterized in that: The first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis; The first adjustment component can drive the beam splitter prism to move linearly along the first axis, and drive the beam splitter prism to rotate around the first axis, the second axis and the third axis; the third adjustment component can drive the reference reflector to move linearly along the second axis, and drive the reference reflector to rotate around the first axis and the third axis.

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