Solar panel coating process and device thereof

Abstract

The invention discloses a solar panel coating process and a device thereof, and the solar panel coating process comprises the following coating steps: in a vacuum chamber, placing a solar panel at a cathode and an anode for discharging, and then introducing ammonia gas into the anode; after ammonia gas is introduced to react for a set time, silane, ammonia gas and laughing gas are introduced into the anode, and the reaction is continued; and after silane, ammonia gas and laughing gas are introduced to react for a set time, silane and ammonia gas are introduced into the anode, the reaction is continued, and the coating process is completed. According to the solar panel coating process, the reaction on the surface of the solar panel is sufficient, and the coating effect is good.

Description

Technical Field

[0001] The present invention relates to the technical field of solar panels, and more particularly to a solar panel coating process and a device thereof. Background Art

[0002] Ammonia Electron Beam Deposited (AECD) is a solar cell coating method that belongs to the category of amorphous deposition coating. The AECD method has advantages in low temperature and low cost, and is compatible with a variety of semiconductor materials, so it has high potential in the production of high-efficiency solar cells.

[0003] The basic principle of the AECD method is as follows: In a vacuum chamber, a solar cell is placed on a rotating cathode. By injecting ammonia gas on the anode, ionic bonding is generated between the cathode and the anode. When an ammonia molecule loses a hydrogen atom (proton) and turns into a free radical, ionization occurs on the anode. In this process, nitrogen atoms in the ammonia are released and form free electrons. The free electrons escape from the anode and are deposited on the cathode to form a thin film. This process is similar to evaporation and condensation, but without heating to high temperatures. After the deposition is completed, the film is subjected to subsequent treatments such as cleaning and annealing.

[0004] The main advantages of the AECD method are: it can achieve thin film deposition at a lower temperature (about 200-300 degrees Celsius), reducing energy consumption. It is compatible with a variety of semiconductor materials (such as silicon, copper indium gallium selenide telluride, etc.). It can achieve fast and continuous coating on the production line of large-area solar cells. It can effectively reduce the roughness and defects of the film interface and improve the light absorption efficiency and stability of solar cells.

[0005] However, the AECD method also has some limitations. When the gas is introduced for coating, the reaction is not sufficient and the coating effect is not good.

[0006] Therefore, it is an urgent problem for those skilled in the art to develop a solar panel coating process and device with sufficient reaction and good coating effect. Summary of the invention

[0007] In view of this, the present invention provides a solar panel coating process and a device thereof with sufficient reaction and good coating effect.

[0008] In order to achieve the above object, the present invention adopts the following technical solution:

[0009] A solar panel coating process includes the following coating steps:

[0010] S1, in a vacuum chamber, place the solar panel at the cathode, discharge the anode, and then introduce ammonia gas into the anode;

[0011] S2, after ammonia is introduced into the anode for a set reaction time, silane, ammonia and laughing gas are introduced into the anode to continue the reaction;

[0012] S3, after introducing silane, ammonia and laughing gas to react for a set time, silane and ammonia are introduced into the anode to continue the reaction to complete the coating process.

[0013] The beneficial effect of adopting the above technical solution is that in the present invention, the reaction is carried out by introducing the gas in batches, so that the reaction is more complete and the coating effect is improved.

[0014] Preferably, the temperature in the vacuum chamber is set at 200°C-300°C.

[0015] Preferably, the anode discharge in step S1 is intermittent discharge, discharging for 5 seconds, stopping for 5 seconds, discharging for 5 seconds, stopping for 5 seconds, and continuing the intermittent discharge for 30 seconds.

[0016] Preferably, after the reaction of introducing ammonia in step S1 is completed, the vacuum chamber is evacuated, and then silane, ammonia and nitrous oxide are introduced. When the reaction is completed, the vacuum chamber needs to be evacuated again, and then silane and ammonia are introduced for reaction.

[0017] Preferably, when the vacuum chamber is evacuated, intermittent evacuation is adopted, which can play a role of disturbing flow and improve the reaction effect.

[0018] Preferably, an air pressure sensor is provided in the vacuum chamber, and the pressure in the vacuum chamber is detected by the air pressure sensor.

[0019] A solar panel coating device comprises: a vacuum chamber, an air inlet pipe and a vacuum pump; the air inlet pipe and the vacuum pump are both connected to the vacuum chamber; the air inlet pipe comprises: a laughing gas air inlet pipe, an ammonia air inlet pipe and a silane air inlet pipe.

[0020] Preferably, the ammonia inlet pipe is connected to three ammonia inlet branch pipes, and the silane inlet pipe is connected to two silane inlet branch pipes; the ammonia inlet branch pipes and the silane inlet branch pipes are both connected to the vacuum chamber. The three ammonia inlet branch pipes can be connected to ammonia three times, and the two silane inlet branch pipes can be connected to silane twice.

[0021] Preferably, the laughing gas inlet pipe, the ammonia inlet branch pipe and the silane inlet branch pipe are all connected with a flow valve and a solenoid valve. The flow valve can control the inflow flow of the gas, and the solenoid valve controls the opening and closing of the pipeline.

[0022] Preferably, the vacuum chamber is connected to an exhaust gas exhaust pipe; the vacuum pump is connected to the exhaust gas exhaust pipe, and a one-way valve is provided at the connection between the vacuum pump and the exhaust gas exhaust pipe. The exhaust gas exhaust pipe can exhaust the gas extracted from the vacuum chamber and the vacuum pump.

[0023] It can be seen from the above technical solutions that, compared with the prior art, the present invention discloses a solar panel coating process and a device thereof, which has the following beneficial effects:

[0024] (1) The intermittent vacuuming in the present invention can play a role in disturbing the flow and improve the reaction effect;

[0025] (2) The amount of gas introduced each time is controlled by the flow valve. Each time ventilation is performed, it is sufficient to open the corresponding solenoid valve without adjusting the flow valve, which can improve the efficiency of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0027] Figure 1 This is a schematic structural diagram of the coating device provided by the present invention.

[0028] Among them, in the figure,

[0029] 1- vacuum chamber; 2- vacuum pump; 3- laughing gas inlet pipe; 4- ammonia inlet branch pipe; 5- silane inlet branch pipe; 6- flow valve; 7- solenoid valve; 8- tail gas exhaust pipe; 9- one-way valve. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The embodiment of the present invention discloses a solar panel coating process, comprising the following coating steps:

[0032] S1, in a vacuum chamber 1, a solar panel is placed at the cathode, the anode is discharged, and then ammonia gas is introduced into the anode;

[0033] S2, after ammonia is introduced into the anode for a set reaction time, silane, ammonia and laughing gas are introduced into the anode to continue the reaction;

[0034] S3, after introducing silane, ammonia and laughing gas to react for a set time, silane and ammonia are introduced into the anode to continue the reaction to complete the coating process.

[0035] In order to further optimize the above technical solution, the temperature in the vacuum chamber 1 is set at 200°C-300°C.

[0036] In order to further optimize the above technical solution, the anode discharge in step S1 is intermittent discharge, discharging for 5 seconds, stopping for 5 seconds, discharging for 5 seconds, stopping for 5 seconds, and continuing the intermittent discharge for 30 seconds.

[0037] In order to further optimize the above technical solution, after the reaction of introducing ammonia in step S1 is completed, the vacuum chamber 1 is evacuated, and then silane, ammonia and nitrous oxide are introduced. When the reaction is completed, the vacuum chamber 1 needs to be evacuated again, and then silane and ammonia are introduced for reaction.

[0038] In order to further optimize the above technical solution, an intermittent vacuuming method is used when vacuuming the vacuum chamber 1. Intermittent vacuuming is to vacuum for 5 seconds, stop for 5 seconds, vacuum for 10 seconds, stop for 5 seconds, vacuum for 20 seconds, stop for 5 seconds, until the air pressure sensor detects that the air pressure in the vacuum chamber 1 reaches the set value, that is, the vacuuming is completed, and the vacuuming is stopped at this time.

[0039] In order to further optimize the above technical solution, an air pressure sensor is provided in the vacuum chamber 1 , and the pressure in the vacuum chamber 1 is detected by the air pressure sensor.

[0040] A solar panel coating device comprises: a vacuum chamber 1, an air inlet pipe and a vacuum pump 2; the air inlet pipe and the vacuum pump 2 are both connected to the vacuum chamber 1; the air inlet pipe comprises: a laughing gas air inlet pipe 3, an ammonia air inlet pipe and a silane air inlet pipe.

[0041] In order to further optimize the above technical solution, the ammonia inlet pipe is connected to three ammonia inlet branch pipes 4, and the silane inlet pipe is connected to two silane inlet branch pipes 5; the ammonia inlet branch pipes 4 and the silane inlet branch pipes 5 are both connected to the vacuum chamber 1.

[0042] In order to further optimize the above technical solution, the laughing gas inlet pipe 3, the ammonia inlet branch pipe 4 and the silane inlet branch pipe 5 are all connected with a flow valve 6 and a solenoid valve 7.

[0043] In order to further optimize the above technical solution, the vacuum chamber 1 is connected to an exhaust pipe 8; the vacuum pump 2 is connected to the exhaust pipe 8, and a one-way valve 9 is provided at the connection between the vacuum pump 2 and the exhaust pipe 8. The one-way valve 9 can prevent the gas in the exhaust pipe 8 from flowing back into the vacuum pump 2.

[0044] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0045] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A solar panel coating process, characterized in that: The coating steps include: S1, in a vacuum chamber (1), a solar panel is placed at the cathode, the anode is discharged, and then ammonia gas is introduced into the anode; S2, after ammonia is introduced into the anode for a set reaction time, silane, ammonia and laughing gas are introduced into the anode to continue the reaction; S3, after introducing silane, ammonia and laughing gas to react for a set time, silane and ammonia are introduced into the anode to continue the reaction to complete the coating process.

2. A solar panel coating process according to claim 1, characterized in that: The temperature in the vacuum chamber (1) is set at 200°C-300°C.

3. A solar panel coating process according to claim 1, characterized in that: In step S1, the anode discharge is intermittent discharge, discharging for 5 seconds, stopping for 5 seconds, discharging for 5 seconds, and stopping for 5 seconds, and the intermittent discharge is continued for 30 seconds.

4. A solar panel coating process according to claim 1, characterized in that: After the reaction of introducing ammonia in step S1 is completed, the vacuum chamber (1) is evacuated, and then silane, ammonia and nitrous oxide are introduced. After the reaction is completed, the vacuum chamber (1) needs to be evacuated again, and then silane and ammonia are introduced to react.

5. A solar panel coating process according to claim 4, characterized in that: When evacuating the vacuum chamber (1), an intermittent evacuation method is adopted.

6. A solar panel coating process according to claim 1, characterized in that: An air pressure sensor is arranged in the vacuum chamber (1), and the pressure in the vacuum chamber (1) is detected by the air pressure sensor.

7. A solar panel coating device, characterized in that: include: A vacuum chamber (1), an air inlet pipe and a vacuum pump (2); the air inlet pipe and the vacuum pump (2) are both connected to the vacuum chamber (1); the air inlet pipe comprises: a laughing gas air inlet pipe (3), an ammonia air inlet pipe and a silane air inlet pipe.

8. A solar panel coating device according to claim 7, characterized in that: The ammonia gas inlet pipe is connected to three ammonia gas inlet branch pipes (4), and the silane gas inlet pipe is connected to two silane gas inlet branch pipes (5); the ammonia gas inlet branch pipes (4) and the silane gas inlet branch pipes (5) are both in communication with the vacuum chamber (1).

9. A solar panel coating device according to claim 8, characterized in that: The laughing gas inlet pipe (3), the ammonia inlet branch pipe (4) and the silane inlet branch pipe (5) are all connected with a flow valve (6) and a solenoid valve (7).

10. A solar panel coating device according to claim 9, characterized in that: The vacuum chamber (1) is connected to an exhaust gas exhaust pipe (8); the vacuum pump (2) is connected to the exhaust gas exhaust pipe (8), and a one-way valve (9) is provided at the connection between the vacuum pump (2) and the exhaust gas exhaust pipe (8).

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