Testing device for measuring influence capability of TVOC (total volatile organic compound)

Abstract

The invention provides a testing device for determining TVOC (total volatile organic compound) influence capability, which comprises a sampling assembly, the sampling assembly comprises a testing cabin, a conveying cabin and a sampling port, and a first valve is arranged between the testing cabin and the conveying cabin. The first valve is used for communicating or isolating the testing cabin and the conveying cabin. The test cabin is used for placing a sample, the conveying cabin is used for placing an experimental reagent, and the experimental reagent can slowly release TVOC. After the first valve is opened, the TVOC in the conveying cabin can flow into the testing cabin, so that the sample is in contact with the TVOC. And the sampling port is arranged on the test cabin and is used for detecting the TVOC concentration in the test cabin. According to the device, through the double-cavity design, the operation process can be simplified, the single variable principle during sample testing is ensured, and then the testing accuracy of the testing device is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a testing device for measuring TVOC impact capability. Background Art

[0002] During the wafer preparation process, if the concentration of total volatile organic compounds (TVOC) in the wafer manufacturing environment is too high, it will cause many defects in the wafer, thereby reducing the production yield of the wafer. The degree of influence of different concentrations of TVOC on the wafer needs to be measured by a dedicated test device.

[0003] Existing testing devices generally only have a single chamber. During the test, the product and the experimental reagent that can produce TVOC are placed in the chamber. After waiting for a set time, the TVOC concentration in the chamber is sampled, and the test product is tested and analyzed to obtain the degree of influence of different concentrations of TVOC on the product.

[0004] In the actual test of the existing test device, if the TVOC concentration in the chamber needs to be increased, the chamber needs to be opened and TVOC experimental reagents of different concentrations need to be re-added. Since the TVOC background value in the chamber is different after each opening, and the change of the TVOC background value is uncontrollable, the TVOC concentration in the chamber changes randomly compared with the preset value after each opening and adding different amounts of experimental reagents, thus affecting the test effect of the product. Summary of the invention

[0005] The purpose of the present invention is to provide a testing device for determining the impact of TVOC. The device can simplify the operation process through a double-chamber design, ensure the single variable principle during sample testing, and thus improve the accuracy of the test of the testing device.

[0006] To achieve the above-mentioned purpose, the present invention provides a test device for determining the impact ability of TVOC, including a sampling component, the sampling component including a test chamber, a conveying chamber and a sampling port, a first valve is arranged between the test chamber and the conveying chamber, the first valve is used to connect or isolate the test chamber and the conveying chamber; the test chamber is used to place samples, and the conveying chamber is used to place experimental reagents, and the experimental reagents can slowly release TVOC; after the first valve is opened, the TVOC in the conveying chamber can flow into the test chamber, so that the sample contacts the TVOC; the sampling port is arranged on the test chamber, and is used to detect the TVOC concentration in the test chamber.

[0007] Optionally, the test cabin and / or the transport cabin uses a silicone sealing strip to seal the cabin door, and the TVOC test value of the silicone sealing strip is lower than a preset value.

[0008] Optionally, the preset value is 5ug / m3 .

[0009] Optionally, the test chamber and / or the transport chamber are made of stainless steel plates.

[0010] Optionally, the first valve is a flange gate valve, and the flange gate valve is arranged between the bulkheads of the test cabin and the conveying cabin which are arranged opposite to each other.

[0011] Optionally, there are multiple sampling ports, a portion of which are arranged on the test chamber and used to detect the TVOC concentration in the test chamber; another portion of the sampling ports are arranged on the transport chamber and used to detect the TVOC concentration in the transport chamber.

[0012] Optionally, the testing device for determining the TVOC impact capacity further includes an exhaust port, and the exhaust port is provided on both the testing cabin and the transport cabin.

[0013] Optionally, the testing device for determining the impact of TVOC further includes an exhaust pipe, wherein the exhaust pipe is used to be connected to the exhaust port, and a second valve is provided on the exhaust pipe, and the second valve is used to open or close the exhaust pipe.

[0014] Optionally, an observation port is provided on the test cabin and / or the transport cabin.

[0015] Optionally, the testing device for determining the impact of TVOC also includes a cart, which is used to carry and move the sampling assembly.

[0016] The present invention provides a testing device for measuring the impact of TVOC, which comprises a testing chamber and a conveying chamber. The testing chamber is used to place samples, and the conveying chamber is used to place experimental reagents. During actual testing, the operator can add experimental reagents into the conveying chamber while keeping the testing chamber sealed, and can open a first valve to allow TVOC in the conveying chamber to flow into the testing chamber, so as to increase the TVOC concentration in the testing chamber.

[0017] Since the test chamber is not opened during the entire test process, the TVOC background value of the test chamber does not change. And each time the TVOC concentration in the test chamber is increased, a controllable volume of TVOC is transported to the test chamber through the transport chamber, so it can be ensured that the TVOC concentration in the test chamber always increases in proportion, and the single variable principle during sample testing is guaranteed. This setting can simplify the operating process, reduce the consumption of experimental reagents, and improve the accuracy of the test device test.

[0018] In addition, the test chamber and / or the transport chamber are sealed with a special silicone sealing strip. Since the TVOC background value of the silicone sealing strip is small, the impact of the sealing strip on the TVOC background value in the test chamber and / or the transport chamber can be reduced, thereby improving the accuracy of the test.

[0019] In addition, to ensure the sealing of the test chamber and the transport chamber, the test chamber and / or the transport chamber are made of stainless steel plates. Since stainless steel plates do not produce TVOC, they will not affect the TVOC background value of the test chamber. At the same time, since the stainless steel plates have good sealing after welding, the experimental reagents will not leak out and cause environmental pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of a testing device for measuring the impact of TVOC in a preferred embodiment of the present invention;

[0021] Figure 2 It is a front view structural schematic diagram of a testing device for measuring the impact of TVOC in a preferred embodiment of the present invention;

[0022] Figure 3 It is a schematic diagram of the top view of the structure of a testing device for measuring the impact of TVOC in a preferred embodiment of the present invention.

[0023] In the figure:

[0024] Test chamber 1; transport chamber 2; sampling port 3; first valve 4; exhaust port 5. DETAILED DESCRIPTION

[0025] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the accompanying drawings are in very simplified form and in non-precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0026] The orientation or position relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or position relationship shown in the drawings and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred mechanism or element must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the present invention.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or a connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The present invention is described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the absence of conflict, the following embodiments and features in the embodiments may complement or be combined with each other.

[0029] Reference Figure 1 to Figure 3 As shown, a preferred embodiment of the present invention provides a test device for determining the impact ability of TVOC, including a sampling component, and the sampling component includes a test chamber 1, a conveying chamber 2 and a sampling port 3. A first valve 4 is provided between the test chamber 1 and the conveying chamber 2, and the first valve 4 is used to connect or isolate the test chamber 1 and the conveying chamber 2. The test chamber 1 is used to place samples, and the conveying chamber 2 is used to place experimental reagents, and the experimental reagents can slowly release TVOC. After the first valve 4 is opened, the TVOC in the conveying chamber 2 can flow into the test chamber 1 so that the sample is in contact with the TVOC. The sampling port 3 is provided on the test chamber 1, and is used to detect the TVOC concentration in the test chamber 1.

[0030] The present application does not limit the type of samples, which include but are not limited to wafers. Samples can be set as any product that needs to be tested for TVOC as needed.

[0031] The test device in the prior art generally has only one chamber. In actual testing, the sample and the experimental reagent are first placed in the chamber. After a set time, the TVOC concentration in the chamber is detected, and the sample is observed and tested to obtain the effect of TVOC at this concentration on the sample. When it is necessary to detect the effect of a higher concentration of TVOC on the sample, it is necessary to open the chamber and place the sample and a larger volume of experimental reagent. Then the above steps need to be repeated to obtain the effect of a higher concentration of TVOC on the sample.

[0032] Since the TVOC concentration in the chamber is equal to the sum of the TVOC background value in the chamber and the TVOC concentration released by the experimental reagent, and each time the chamber is opened, the TVOC background value in the chamber changes randomly, resulting in changes in the TVOC background value in the chamber and the TVOC concentration released by the experimental reagent each time the chamber is opened. In this case, the increment of the TVOC concentration in the chamber is uncontrollable, thus affecting the test effect of the sample.

[0033] The present application provides a testing device for measuring the impact of TVOC, which comprises a testing chamber 1 and a conveying chamber 2, wherein the testing chamber 1 is used to place samples, and the conveying chamber 2 is used to place experimental reagents. During the actual test, the operator can add experimental reagents into the conveying chamber 2 while keeping the testing chamber 1 sealed, and can open the first valve 4 to allow the TVOC in the conveying chamber 2 to flow into the testing chamber 1, so as to increase the TVOC concentration in the testing chamber 1.

[0034] Since the test chamber 1 is not opened during the entire test process, the TVOC background value of the test chamber 1 does not change. And each time the TVOC concentration in the test chamber 1 is increased, a controllable volume of TVOC is transported to the test chamber 1 through the transport chamber 2, so it can be ensured that the TVOC concentration in the test chamber 1 always increases in proportion, and the single variable principle during sample testing is guaranteed (that is, only the TVOC concentration in the test chamber 1 is changed through the input of the transport chamber 2, without changing the TVOC background value of the test chamber 1). Such a setting can simplify the operation process, reduce the consumption of experimental reagents, and improve the accuracy of the test device test.

[0035] Furthermore, the device can close the first valve 4 when the TVOC concentrations in the test chamber 1 and the conveying chamber 2 are substantially the same. Then, the TVOC concentration in the test chamber 1 is obtained in real time through the sampling port 3, and by observing and testing the sample, it is determined whether the sample has defects, thereby obtaining a test result of whether the TVOC concentration has an impact on the sample.

[0036] It should be noted that after the first valve 4 is opened, the TVOC in the transport chamber 2 can flow into the test chamber 1 through the first valve 4. The flow of TVOC usually takes a long time (for example, 6 to 8 hours) to make the TVOC concentrations in the test chamber 1 and the transport chamber 2 basically the same.

[0037] It should also be noted that before the test, the amount of experimental reagents needs to be accurately calculated according to the preset value of TVOC concentration so that the TVOC concentration in the test chamber 1 can reach 5ug / m 3 , 10ug / m 3 , 15ug / m 3 , 25ug / m 3 and 50ug / m 3 , and then measure 5ug / m 3 , 10ug / m 3 , 15ug / m 3 , 25ug / m 3 and 50ug / m 3 The influence of TVOC concentration value on the sample.

[0038] Reference Figure 1 and Figure 2As shown, in one example, the first valve 4 is a flange gate valve, which is arranged between the bulkheads of the test cabin 1 and the conveying cabin 2 that are arranged opposite to each other. At this time, one end of the flange gate valve is connected to the test cabin 1, and the other end is connected to the conveying cabin 2. In this way, the flange gate valve can be used to achieve communication or isolation between the test cabin 1 and the conveying cabin 2.

[0039] Reference Figure 1 and Figure 2 As shown, in one example, the test chamber 1 and the transport chamber 2 can be interconnected and sealed by two flange-connected hand-operated gate valves, thereby making the TVOC concentrations in the test chamber 1 and the transport chamber 2 basically consistent within a specific time.

[0040] The present application does not limit the number of the first valves 4. In this embodiment, the number of the first valves 4 can be set to 2 (see Figure 1 ). In other embodiments, the number of the first valves 4 may also be set to 1, 3 or more.

[0041] It should be noted that the number of first valves 4 can be designed according to the time required for the TVOC concentrations in the test chamber 1 and the delivery chamber 2 to be substantially consistent. For example, in this embodiment, two first valves 4 can be set between the test chamber 1 and the delivery chamber 2 to achieve the consistency of TVOC concentrations in the test chamber 1 and the delivery chamber 2 within 8 hours.

[0042] In the prior art, in order to ensure the tightness of the chamber door, a common sealing ring or adhesive seal is usually used to seal the chamber. Since a common sealing ring or adhesive seal will produce a large amount of TVOC, the TVOC background value in the chamber will be high. If the concentration of TVOC produced by a common sealing ring or adhesive seal is greater than 5ug / m 3 , that is, the background value of TVOC in the cavity is greater than 5ug / m 3 If the TVOC concentration is low (e.g. 5ug / m 3 The impact of ) on the sample.

[0043] In addition, in each test, the TVOC concentration generated by ordinary sealing rings or adhesive seals is different, that is, the TVOC background value in the cavity is slightly different in each test. Therefore, in each test, even if the same volume of experimental reagents is placed in the cavity, the TVOC concentration in the cavity is different, which will interfere with the test results of the sample and thus affect the accuracy of the sample test.

[0044] In order to reduce the impact of the sealing ring or adhesive seal of the chamber on the test, in a preferred embodiment, the test cabin 1 and / or the conveying cabin 2 use a silicone sealing strip to seal the cabin door, and the TVOC test value of the silicone sealing strip is lower than the preset value. That is to say, before injecting TVOC into the test cabin 1 and / or the conveying cabin 2, the TVOC background value in the test cabin 1 and / or the conveying cabin 2 is less than the preset value.

[0045] The test chamber 1 and / or the transport chamber 2 are sealed with a special silicone sealing strip. Since the TVOC background value of the silicone sealing strip is small, the influence of the sealing strip on the TVOC background value in the test chamber 1 and / or the transport chamber 2 can be reduced, thereby improving the accuracy of the test.

[0046] As a preferred embodiment, the preset value is 5ug / m 3 That is, the TVOC test value of the silicone seal is less than 5ug / m 3 This setting can make the silicone seal produce as little TVOC as possible, so as to avoid the influence of the seal on the test as much as possible. At the same time, the TVOC test value of the silicone seal is controlled at 5ug / m 3 Within the TVOC concentration of 5ug / m 3 The samples are tested in an environment so that the impact of low concentration TVOC values ​​on the samples can be tested.

[0047] Furthermore, in the prior art, since the chamber sealing of the test device does not meet the standard, it is generally unable to meet the specific requirement of the dual chambers being connected.

[0048] In order to ensure the sealing of the test chamber 1 and the conveying chamber 2, the test chamber 1 and / or the conveying chamber 2 are made of stainless steel plates. On the one hand, the stainless steel plates do not produce TVOC, so they will not affect the TVOC background value of the test chamber 1; on the other hand, the stainless steel plates have good sealing after welding, and will not cause the leakage of experimental reagents to cause environmental pollution.

[0049] Furthermore, since the test chamber 1 is independent of the transport chamber 2 and has good sealing performance, the environment in the test chamber 1 will not be affected when the experimental reagent is placed in the transport chamber 2, thereby ensuring the accuracy of the test results of the test device.

[0050] In a specific embodiment, a plurality of stainless steel plates may be welded to form the test chamber 1 and / or the delivery chamber 2. In this way, when the first valve body 4 is in a closed state, the test chamber 1 and / or the delivery chamber 2 can remain sealed, thereby preventing TVOC leakage.

[0051] It should be noted that, with the above configuration, the effective sealing time of the test chamber 1 and / or the transport chamber 2 in the isolated state can be greater than 36 hours. At the same time, after the test is completed, purging the test chamber 1 and the transport chamber 2 will not produce substances that increase the TVOC background value in the chamber.

[0052] Continue to refer to Figure 1 to Figure 3 As shown, the test device for determining the impact of TVOC also includes an exhaust port 5, and both the test chamber 1 and the conveying chamber 2 are provided with an exhaust port 5. The exhaust port 5 is used to discharge the TVOC in the test chamber 1 and the conveying chamber 2 during or after the test. After all the TVOC in the test chamber 1 and the conveying chamber 2 are discharged, the test chamber 1 can be opened and the sample can be taken out.

[0053] As a specific embodiment, the test device for determining the impact of TVOC further includes an exhaust pipe (not shown), which is used to connect the exhaust port 5. At this time, the TVOC in the test chamber 1 and the transport chamber 2 can be discharged through the exhaust pipe. A second valve (not shown) is preferably provided on the exhaust pipe, and the second valve is used to open or close the exhaust pipe.

[0054] Specifically, the second valve can be closed during the process of contact between the sample and TVOC to place the sample in a TVOC environment; and after the sample test is completed, the second valve needs to be opened to discharge the TVOC in the test chamber 1 and the transport chamber 2 through the exhaust pipe under negative pressure.

[0055] It should be explained that since the cabin bodies of the test cabin 1 and the transport cabin 2 are set as stainless steel plates, the exhaust pipe under negative pressure will not cause the cavity to deform due to pressure loss when discharging exhaust gas, thereby improving the durability of the cavity.

[0056] In a preferred case, there are multiple sampling ports 3, some of which are arranged on the test chamber 1 and used to detect the TVOC concentration in the test chamber 1, and the other sampling ports 3 are arranged on the transport chamber 2 and used to detect the TVOC concentration in the transport chamber 2.

[0057] Reference Figure 2 and Figure 3 As shown, in one example, the number of sampling ports 3 is 8, of which 4 sampling ports 3 are arranged at the four corner edges of the test chamber 1, and 4 sampling ports 3 are arranged at the four corner edges of the conveying chamber 2. The advantage of this is that the TVOC concentration values ​​in the test chamber 1 and the conveying chamber 2 can be detected through multiple sampling ports 3 to prevent uneven distribution of TVOC in the test chamber 1 and the conveying chamber 2 from affecting the detection results, thereby ensuring the accuracy of TVOC concentration detection in the test chamber 1 and the conveying chamber 2.

[0058] Preferably, a third valve (not shown) may be provided on the sampling port 3, and the third valve can close the sampling port 3 when the TVOC concentration does not need to be detected to ensure the sealing of the test chamber 1 and the conveying chamber 2. The third valve can also open the sampling port 3 when the TVOC concentration needs to be detected to complete the detection.

[0059] In a preferred embodiment, an observation port (not shown) is provided on the test chamber 1 and / or the transport chamber 2 . The observation port is used to observe the conditions in the test chamber 1 and / or the transport chamber 2 .

[0060] Specifically, the observation port on the test chamber 1 can be used to observe the sample to see whether TVOC at a set concentration causes defects on the sample surface. The observation port on the transport chamber 2 can be used to observe the remaining amount of the experimental reagent to obtain the test progress.

[0061] Further preferably, the testing device for determining the impact of TVOC also includes a cart (not shown), which is used to carry and move the sampling assembly. Since the sampling assembly is heavy, it is preferred that the sampling assembly be placed on the cart to achieve convenient movement of the sampling assembly.

[0062] In a non-limiting embodiment, the test device for determining the impact of TVOC includes the following test process:

[0063] First, close the first valve 4, put the sample into the test chamber 1, and put the experimental reagent into the transport chamber 2. Wait for a certain time (for example, 4h to 8h) until the TVOC concentration in the transport chamber 2 reaches the set value. Then open the first valve 4 to connect the test chamber 1 and the transport chamber 2. At this time, the TVOC in the transport chamber 2 will gradually flow into the test chamber 1 to gradually increase the TVOC concentration in the test chamber 1. Wait for a certain time (for example, 6h to 8h) until the TVOC concentrations in the test chamber 1 and the transport chamber 2 are basically the same, and then close the first valve 4.

[0064] Then, the TVOC concentration in the test chamber 1 and the transport chamber 2 is detected through the sampling port 3. At this time, the TVOC concentration in the test chamber 1 is basically close to the preset value. Then, the defects of the sample are observed through the observation port to obtain the influence of the preset concentration of TVOC environment on the sample.

[0065] When it is necessary to measure the effect of a higher concentration of TVOC on the sample, first close the first valve 4, and open the exhaust port 5 to discharge the TVOC in the transport cabin 2. Then open the transport cabin 2, and add the experimental reagent into the transport cabin 2. Then close the transport cabin 2, open the first valve 4, and repeat the above operation to obtain the degree of effect of a higher concentration of TVOC on the sample.

[0066] The above test process is repeated until the degree of defects caused to the sample under different preset concentrations of TVOC environment is obtained, and then the degree of influence of different preset concentrations of TVOC environment on the sample is obtained.

[0067] In summary, the present invention provides a test device for determining the impact of TVOC, which comprises a test chamber 1 and a conveying chamber 2. The test chamber 1 is used to place samples, and the conveying chamber 2 is used to place experimental reagents. During the actual test, the operator can add experimental reagents into the conveying chamber 2 while keeping the test chamber 1 sealed, and can open the first valve 4 to allow the TVOC in the conveying chamber 2 to flow into the test chamber 1, so as to increase the TVOC concentration in the test chamber 1. The device can ensure that the TVOC concentration in the test chamber 1 always increases in proportion, and ensure the single variable principle during sample testing, thereby simplifying the operating process, reducing the consumption of experimental reagents, and improving the accuracy of the test device test.

[0068] In addition, the test chamber 1 and / or the transport chamber 2 are sealed with a special silicone sealing strip. Since the TVOC background value of the silicone sealing strip is small, the impact of the sealing strip on the TVOC background value in the test chamber 1 and / or the transport chamber 2 can be reduced, thereby improving the accuracy of the test.

[0069] Furthermore, to ensure the sealing of the test chamber 1 and the conveying chamber 2, the test chamber 1 and / or the conveying chamber 2 are made of stainless steel plates. Since the stainless steel plates do not produce TVOC, they will not affect the TVOC background value of the test chamber. At the same time, since the stainless steel plates have good sealing after welding, the experimental reagents will not leak out and cause environmental pollution.

[0070] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the protection scope of the present invention.

Claims

1. A testing device for determining the impact of TVOC, characterized in that: The invention comprises a sampling component, wherein the sampling component comprises a test chamber, a conveying chamber and a sampling port, wherein a first valve is arranged between the test chamber and the conveying chamber, and the first valve is used to connect or isolate the test chamber and the conveying chamber; the test chamber is used to place samples, and the conveying chamber is used to place experimental reagents, and the experimental reagents can slowly release TVOC; after the first valve is opened, the TVOC in the conveying chamber can flow into the test chamber, so that the sample contacts the TVOC; the sampling port is arranged on the test chamber, and is used to detect the TVOC concentration in the test chamber.

2. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: The test cabin and / or the transport cabin uses a silicone sealing strip to seal the cabin door, and the TVOC test value of the silicone sealing strip is lower than a preset value.

3. The testing device for measuring the impact of TVOC according to claim 2, characterized in that: The preset value is 5ug / m 3 .

4. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: The test chamber and / or the transport chamber are made of stainless steel plates.

5. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: The first valve is a flange gate valve, and the flange gate valve is arranged between the bulkheads of the test cabin and the conveying cabin which are arranged opposite to each other.

6. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: There are multiple sampling ports, some of which are arranged on the test chamber and used to detect the TVOC concentration in the test chamber; the other sampling ports are arranged on the transport chamber and used to detect the TVOC concentration in the transport chamber.

7. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: It also includes an exhaust port, and both the test cabin and the transport cabin are provided with the exhaust port.

8. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: It also includes an exhaust pipe, which is used to connect the exhaust port. A second valve is arranged on the exhaust pipe, and the second valve is used to open or close the exhaust pipe.

9. The testing device for measuring the impact of TVOC according to claim 1, characterized in that: The test cabin and / or the transport cabin is provided with an observation port.

10. The testing device for measuring the impact of TVOC according to any one of claims 1 to 9, characterized in that: Also included is a cart, which is used to carry and move the sampling assembly.

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