Substrate storage container
By using a locking mechanism made of resin forming materials in the substrate storage container of a semiconductor factory, high strength and sealing without metallization are achieved, and the problem of insufficient strength and sealing after metallization is solved, and semiconductors are prevented wafer pollution and quality decline.
Patent Information
- Application Number
- CN202380022982.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2022-02-25
- Filing Date
- 2023-01-20
- Publication Date
- 2024-12-10
AI Technical Summary
The substrate storage container locking mechanism used in existing semiconductor factories cannot guarantee sufficient strength and sealing after the metallization is not modified, resulting in a decrease in pollution and quality of semiconductor wafers.
The locking claws, connecting rods, cam protrusions and resin pins made of a prescribed resin forming material are used to realize the direct movement and swing movement of the locking claws through the design of the guide member to ensure the sealing and smooth movement of the cover body.
The high strength and durability of the metallization-free locking mechanism are achieved, which prevents semiconductor wafer contamination, improves wafer quality, and reduces the loss of parts and pulling force.
Smart Images
Figure CN119110987A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a substrate storage container used in a micro-environment semiconductor factory to transport or store semiconductor wafers, and more particularly to an improvement in a locking mechanism for locking a cover. Background Art
[0002] In semiconductor factories, a substrate storage container called a FOUP (Front Opening Unified Pod) is used for transporting and storing φ300 mm semiconductor wafers. Fig.19 As shown in the figure, it comprises: a container body 1 for storing a plurality of semiconductor chips; a cover body, which is embedded in the front face 2 of the opening of the container body 1; and a pair of locking mechanisms, which lock the cover body embedded in the front face 2 of the container body 1; a pair of locking mechanisms are built into the cover body, and the pair of locking mechanisms are standardized by the SEMI standard for the cover body opening and closing machine operation (refer to patent documents 1, 2, 3).
[0003] The cover is formed into a roughly box-shaped body that can be detachably fitted in the open front face 2 of the container body 1. A required number of a pair of openings for the locking mechanism are bored in the peripheral wall thereof, and a ring-shaped sealing gasket that is deformed by being pressed against the inner periphery of the front face of the container body is fitted in the peripheral edge of the back face. In addition, each locking mechanism is composed of the following components: an operating reel that is supported by the cover and rotated by a key operated from the outside of the cover opening and closing mechanism; a pair of forward and backward movement rods 34A that move forward and backward in the vertical direction by the rotation of each operating reel; and a pair of swingable locking claws 40A that are linked to the forward movement of each forward and backward movement rod 34A, protrude from the opening of the cover and are locked in the locking pockets 4 on the inner periphery of the front face of the container body 1.
[0004] Each locking claw 40A is formed in a substantially inverted T-shaped cross section, and the back surface of the lower portion is pivotally supported via a connecting pin 60 to the front end portion of the forward and backward movement rod 34A so as to be swingable, and the surface of the lower portion is pivotally supported via a supporting pin 61 near the exit and retraction port in the cover body so as to be swingable, and a pressing roller 50A that is in sliding contact with the locking recess 4 on the inner periphery of the front surface of the container body 1 is pivotally supported at the front end portion via a roller pin 62. For example, a φ1.0 mm SUS pin having excellent strength is used for the connecting pin 60, the supporting pin 61, and the roller pin 62.
[0005] In the above, when the cover is fitted in the front face 2 of the opening of the container body 1 and locked, the cover opening and closing machine fits the cover in the front face 2 of the opening of the container body 1, and the operating key of the cover opening and closing machine rotates the operating reels of each locking mechanism at a predetermined angle. Then, as the operating reels rotate, each forward and backward movement rod 34A moves forward in the direction of the peripheral wall of the cover, and as the forward and backward movement rod 34A moves forward, each locking claw 40A swings and protrudes from the cover body through the exit and retraction port to the outside of the cover body, and the swinging and protruding locking claw 40A is locked in the locking recess of the container body 1, and the cover fitted in the front face 2 of the container body 1 is pulled in and locked by the locking claw 40A.
[0006] In contrast, when the cover is unlocked and removed from the front face 2 of the container body 1, the operating key of the cover opening and closing machine rotates the operating reels of the locking mechanisms to the original reference position. As the operating reels rotate back, the advancing and retreating rods 34A retreat back to the original reference position of the cover, and as the advancing and retreating rods 34A retreat back, the protruding locking claws 40A swing back from the locking recesses 4 of the container body 1 through the exit and retract into the cover. The swinging and returning of the locking claws 40A allows the cover fitted in the front face 2 of the container body 1 to be removed, and the cover is pulled out and removed from the front face 2 of the container body 1 by the cover opening and closing machine.
[0007] However, in recent years, it has been desired to use a metal-free material in the locking mechanism of the substrate storage container from the viewpoint of eliminating various adverse effects on the semiconductor wafers stored in the container body 1. In view of this, it has been studied to make the connecting pin 60, the support pin 61 and the roller pin 62 of the locking claw 40A not SUS pins but resin pins.
[0008] Prior art literature
[0009] Patent Literature
[0010] Patent Document 1: Japanese Patent Application Publication No. 2000-058633
[0011] Patent Document 2: Japanese Patent Application Publication No. 2021-028936
[0012] Patent Document 3: Japanese Patent Application Publication No. 2017-130548 Summary of the invention
[0013] Problems to be solved by the invention
[0014] However, even if a resin pin of the same diameter is simply used instead of the SUS pin, sufficient strength and durability cannot be ensured, and there is a concern that the resin pin may be damaged due to eccentricity, etc. As a means to eliminate this concern, a method of enlarging the diameter of the resin pin to make it thicker can be cited, but in the case of adopting this method, since the pressing roller 50A of the locking claw 40A is also thickened, it becomes difficult to return the newly protruding locking claw 40A.
[0015] As a means to solve such a problem, the swing center of the locking claw 40A can be set in the thickness direction of the cover body, the inner and outer directions ( Fig.19 However, when this method is adopted, since the locking claw 40A is no longer sufficiently locked in the locking recess 4 of the container body 1, the appropriate deformation of the sealing gasket of the cover body can no longer be expected. As a result, the sealing performance of the cover body deteriorates, causing contamination of the semiconductor wafer in the container body, and a new major problem of deterioration of the quality of the semiconductor wafer occurs.
[0016] The present invention has been made in view of the above, and an object of the present invention is to provide a substrate storage container that can realize metal-free locking mechanism, and can make the locking claw of the locking mechanism operate smoothly while fully ensuring the airtightness of the cover.
[0017] Means used to solve problems
[0018] In the present invention, in order to solve the above-mentioned problems, the substrate storage container comprises: a cover body, which is embedded in the opening of the container body capable of storing the substrate; and a locking mechanism, which locks the embedded cover body, characterized in that the cover body comprises: a cover body, which is embedded in the opening of the container body; and a plurality of guide members for the locking mechanism, which are installed on the cover body; a plurality of exits and retracts that can be opposed to the locking recesses on the inner periphery of the opening of the container body are provided on the peripheral edge of the cover body; the plurality of guide members for the locking mechanism are opposed to each other and cam grooves are formed on their opposing surfaces; the locking mechanism comprises: a plurality of advance and retreat moving members, which are advanced and retreated in the inner and outer directions of the cover body by the rotation of the operating member supported by the cover body of the cover body; and a plurality of locking claws, which protrude from the exit and retract opening of the cover body and are embedded in the locking recesses of the container body when the advance and retreat moving members are advanced, and return from the locking recesses of the container body to the exit and retract opening of the cover body when the advance and retreat moving members are retreated; the locking claws comprise: a locking block, which is clamped between the plurality of locking mechanisms of the cover body The locking block is formed integrally with the plurality of connecting rods and the plurality of cam protrusions by a molding material containing a specified resin; a concave portion is formed in the locking block and a resin pin is provided between both sides thereof; a resin roller that contacts the locking concave portion of the container body is embedded in the resin pin, and a plurality of flat surfaces are formed on the circumference of the cam protrusion at specified intervals; the cam groove of the locking mechanism guide component is divided into a linear groove for linear motion and a circular arc groove for swinging, the linear groove for linear motion contacts the plurality of flat surfaces of the cam protrusion of the locking claw to limit the swinging of the locking claw, and the circular arc groove for swinging is formed with a wide width at the end of the linear groove for linear motion to enable the swinging of the locking claw.
[0019] In addition, the container body can be formed into a front-opening box that can accommodate multiple semiconductor chips, and the cover body can be freely and detachably engaged on the front side of the opening, and a plurality of locking mechanism guide components can be installed near the peripheral edge of the cover body of the cover body, and the locking mechanism guide components close to the side of the cover body among the plurality of locking mechanism guide components are integrated with the door guide part.
[0020] In addition, when the locking mechanism locks the cover body engaged on the front side of the container body and pulls it into the container body, the cam protrusion of the locking claw can be located near the extension line of the inner surface of the front wall that divides the locking recess of the container body.
[0021] In addition, it is possible to form setting areas for the locking mechanism on both sides of the surface of the cover body of the cover body, install a cover plate covering the locking mechanism on the cover body, bend the forward and backward moving parts of the locking mechanism in the thickness direction of the cover body, and form strength ensuring ribs on at least one of the front and back surfaces of the forward and backward moving parts.
[0022] Furthermore, it is preferable that a plurality of connecting claws are formed in a substantially semicircular arc shape in cross section on both sides of the front end portion of the forward and backward moving member of the locking mechanism, and the plurality of connecting claws are fitted with a plurality of connecting rods of the locking claw.
[0023] In addition, preferably, the locking block comprises: a plate with a bulging front end and a curved back side; and a protrusion formed on the back side of the plate; the locking block is formed into a roughly triangular shape in a side view; and connecting rods protrude from both sides of the protrusion, forming a gap for connecting claws between the plate and the protrusion.
[0024] In addition, cam protrusions close to the connecting rod may protrude from both sides of the end portion of the plate of the locking block, a recess may be formed at the front end of the plate, and a resin pin close to the cam protrusion may be provided between both sides.
[0025] Furthermore, it is preferable that the locking block of the locking claw, the plurality of connecting rods, and the plurality of cam protrusions are integrally molded from a molding material containing at least one of a polybutylene terephthalate resin and a polyetheretherketone resin.
[0026] Furthermore, it is preferable that the resin pin and the resin roller of the upper locking claw are molded from a molding material containing at least one of a polyetheretherketone resin and a polybutylene terephthalate resin.
[0027] Furthermore, it is preferred that a direct-acting engagement starting groove is formed at the end of the direct-acting linear groove of the cam groove, which is located on the opposite side of the swinging arc groove and engages with the cam protrusion of the locking claw, so that multiple flat surfaces of the cam protrusion contact with the direct-acting engagement starting groove to limit the swinging of the locking claw.
[0028] Here, the substrate in the technical solution includes at least a semiconductor wafer, a glass substrate, a mask substrate, etc. When the substrate is a semiconductor wafer, the semiconductor wafer includes at least a silicon wafer of φ300 mm and φ450 mm. In addition, the container body and the cover body and the cover plate of the cover body can be transparent, opaque, or translucent. They can be either existing types or new structures.
[0029] The container body is mainly a front-opening box type, but it can also be a top-opening box type. The extension line and the vicinity of the extension line are all included in the vicinity of the extension line of the locking recess of the container body. In addition, the guide component for the locking mechanism of the cover body and the door guide part are preferably integrated, but they can also be separate. The term "swinging" of the locking claw must be understood substantially, including rotation and rotation. Furthermore, the substrate storage container related to the present invention can be either a FOUP based on the SEMI standard or a FOSB for shipping.
[0030] According to the present invention, since the locking claw of the locking mechanism is resin-made and metal-free, the connecting rod, cam protrusion, resin pin, and resin roller of the locking claw can be made thicker. In addition, since the locking claw is made to move linearly in the inner and outer directions relative to the cover body in addition to the swinging movement relative to the thickness direction of the cover body, the protruding locking claw and resin roller can be smoothly returned to the exit. In addition, when the locking mechanism is locked, the locking claw does not simply swing and protrude in the thickness direction of the cover body, but swings after moving linearly in the inner direction of the locking recess of the container body, so the locking claw can be fully embedded in the locking recess regardless of the depth of the locking recess.
[0031] Effects of the Invention
[0032] According to the present invention, there is an effect of being able to realize the non-metallization of the locking mechanism. In addition, there is an effect of being able to make the locking claw of the locking mechanism move smoothly and fully ensure the airtightness of the cover.
[0033] According to the invention described in technical solution 2, since the locking mechanism can be metal-free, the contamination of the semiconductor wafer in the container body can be prevented, and the quality of the semiconductor wafer can be prevented from being reduced. In addition, since the locking mechanism guide component and the door guide part are not separate bodies, but are integrated, the number of parts can be reduced.
[0034] According to the invention described in technical solution 3, when the locking mechanism locks the cover body, the cam protrusion of the locking claw is embedded in the swinging arc groove of the cam groove, and the cam protrusion is located in the inner and outer directions of the cover body at the contact portion between the inner surface of the front wall that divides the locking recess of the container body and the resin roller, so the force in the left and right directions of the locking recess is easily transmitted. Therefore, when the cover body fitted on the front surface of the container body is pulled into the container body, the loss of the pulling force can be reduced.
[0035] According to the invention described in claim 4, the strength and rigidity of the forward and backward moving member can be improved by the strength ensuring rib.
[0036] According to the invention described in technical solution 5, since the locking claws are swingably engaged and supported by the plurality of connecting claws of the forward and backward moving component, it is not necessary to connect the front end of the forward and backward moving component and the connecting claws with separate metal pins, and the number of parts can be expected to be reduced.
[0037] According to the invention described in technical solution 6, if the gap between the plate of the locking block and the connecting rod is utilized, the connecting rod can be easily engaged with the connecting claw of the forward and backward moving component and the connecting claw is not easy to fall off.
[0038] According to the invention described in claim 7, since the connecting rod of the locking block is close to the cam protrusion, and the cam protrusion is close to the resin pin, the locking claw can be miniaturized and its operating range can be reduced.
[0039] According to the invention described in claim 8, by utilizing the translation engagement start groove of the cam groove, the cam protrusion of the locking claw can be easily fitted into the cam groove, so the locking mechanism guide member and the locking claw can be easily combined. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] Figure 1 It is an overall perspective explanatory view schematically showing an embodiment of a substrate storage container according to the present invention.
[0041] Figure 2 It is a partial cross-sectional explanatory view schematically showing the relationship between the locking recess of the container body and the locking claw of the locking mechanism in the embodiment of the substrate storage container according to the present invention.
[0042] Figure 3 It is an explanatory diagram schematically showing a state of the upper locking claw during translation in the embodiment of the substrate storage container according to the present invention.
[0043] Figure 4 This is an explanatory diagram schematically showing a state in which the locking claw is capable of swinging and immediately before swinging in the embodiment of the substrate storage container according to the present invention.
[0044] Figure 5 It is an explanatory diagram schematically showing a state of the upper locking claw during swinging in the embodiment of the substrate storage container according to the present invention.
[0045] Figure 6 It is a perspective explanatory view schematically showing a lid body in an embodiment of a substrate storage container according to the present invention.
[0046] Figure 7 This is a front explanatory view schematically showing a cover body peripheral wall, a door guide cylinder, and a rotation suppressing cylinder of a cover body in an embodiment of a substrate storage container according to the present invention.
[0047] Figure 8It is a perspective explanatory view schematically showing a combined state of an advance / retract movement rod and a locking claw of a locking mechanism in an embodiment of a substrate storage container according to the present invention.
[0048] Fig. 9 It is a perspective explanatory view schematically showing a guide block for a locking mechanism and a rotation inhibiting cylinder in an embodiment of a substrate storage container according to the present invention.
[0049] Fig.10 It is a perspective explanatory view schematically showing a guide block for a locking mechanism and a door guide in an embodiment of a substrate storage container according to the present invention.
[0050] Fig.11 It is an explanatory diagram schematically showing a cam groove of a guide block for a locking mechanism in an embodiment of a substrate storage container according to the present invention.
[0051] Fig.12 It is a perspective explanatory view schematically showing an advance / retract movement rod in an embodiment of a substrate storage container according to the present invention.
[0052] Fig.13 This is a front explanatory view schematically showing an advance / retract movement rod in an embodiment of a substrate storage container according to the present invention.
[0053] Fig.14 It is a side view explanatory diagram schematically showing an advance / retract movement rod in an embodiment of a substrate storage container according to the present invention.
[0054] Fig.15 It is an exploded perspective view schematically showing a locking block, a resin pin, and a resin pressing roller in an embodiment of a substrate storage container according to the present invention.
[0055] Fig.16 It is a perspective view schematically showing a locking block in a fallen state in an embodiment of a substrate storage container according to the present invention.
[0056] Fig.17 It is a side explanatory view schematically showing a locking block in a fallen state in an embodiment of a substrate storage container according to the present invention.
[0057] Fig.18 It is a front explanatory diagram schematically showing a locking block in an embodiment of a substrate storage container according to the present invention.
[0058] Fig.19 This is a partial cross-sectional explanatory view schematically showing the relationship between a container body of a conventional substrate storage container and a locking claw of a locking mechanism. DETAILED DESCRIPTION
[0059] Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. Figures 1 to 18 As shown, it is a FOUP based on the SEMI standard, and the FOUP comprises: a container body 1, which can neatly arrange and store multiple semiconductor chips; a detachable cover body 10, which is embedded in the front face 2 of the opening of the container body 1; and a pair of locking mechanisms 30, which lock the cover body 10 embedded in the front face 2 of the container body 1; the locking claws 40 of each locking mechanism 30 are non-metallized, so that the locking claws 40 can perform linear motion and swing motion to lock or unlock, thereby contributing to the achievement of Goal 9 of SDGs (the United Nations' international goals for sustainable development, a sustainable development goal composed of 17 global goals and 169 indicators (achievement benchmarks)) adopted by the United Nations Summit.
[0060] The semiconductor wafer is not shown in the figure, but is composed of a thin, fragile, high-quality silicon wafer of, for example, φ300 mm. The silicon wafer is formed into a disk with a circuit pattern formed on the surface, and is accommodated in the container body 1 and 25 wafers are arranged in a regular pattern in the vertical direction at predetermined intervals.
[0061] The container body 1 and the cover body 10 are formed by injection molding a plurality of parts of a molding material containing a desired resin and by combining the plurality of parts. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyetherketone (PEK) resin, polyetheretherketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymers, and alloys thereof.
[0062] To these resins, conductive materials such as carbon fiber, carbon powder, carbon nanotube, conductive polymer, etc., and various antistatic agents such as anion, cation, and nonion are added as needed. In addition, ultraviolet absorbers such as benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine are added, and glass fiber and carbon fiber are selectively added to improve rigidity.
[0063] Container body 1 Figure 1 , Figure 2As shown, a front-opening box is formed by injection molding with a front side 2 opened horizontally, and a pair of left and right teeth for horizontally supporting a semiconductor wafer are arranged opposite to each other on the inner surfaces of the two side walls, and the left and right pairs of teeth are arranged at a predetermined interval in the vertical direction, and each tooth is formed as a slender plate extending in the front-back direction. The front side 2 of the container body 1 is formed by bending and extending outward in the width direction from the peripheral wall of the container body 1 through a step portion, and the flat shoulder surface of the step portion divides the sealing forming surface 3 for the cover body 10. Locking recesses 4 for the locking mechanism 30 are respectively formed on the upper and lower sides of the inner periphery of the front side of the container body 1, and each locking recess 4 is formed as a substantially rectangular hole.
[0064] Cover 10 as Figure 1 , Figure 2 , Figure 6 , Figure 7 As shown, it is an existing type that has a roughly rectangular front cover body 11 that can be freely and detachably engaged in the front face 2 of the opening of the container body 1, a plurality of guide blocks 16 for locking mechanisms arranged on the cover body 11, and a pair of cover plates 21 that cover the surface (front face) of the cover body 11 and expose it to the outside, and a pair of locking mechanisms 30 are sandwiched between the cover body 11 and the pair of cover plates 21.
[0065] The cover body 11 is formed, for example, in a box-shaped cross section with a shallow bottom (also in a tray-shaped cross section), and an inlet and outlet 12 for a locking mechanism 30 facing the plurality of locking recesses 4 of the container body 1 is respectively penetrated on both upper and lower sides of the peripheral wall, and a longitudinal front retainer for horizontally holding the peripheral front of the semiconductor wafer with an elastic sheet is mounted on the central part of the back side facing the back wall of the container body 1. The cover body 11 is provided with a frame-shaped fitting groove around the peripheral edge of the back side, and an elastically deformable frame-shaped sealing gasket pressed against the sealing forming surface 3 of the container body 1 is fitted in the fitting groove.
[0066] The center of the surface of the cover body 11 is formed higher, and the two sides of the surface are formed lower, and the two sides of the surface are respectively divided into installation areas 13 for the locking mechanism 30. Each installation area 13 is formed in a vertically long rectangular shape, and a door guide cylinder 14 and a rotation suppression cylinder 14A close to the two sides of the exit and retracting opening 12 are respectively installed in the upper and lower parts. Figure 7 , Figure 8 , Fig.10 As shown in FIG. 1 , the cover body 11 is formed into a bottomed cylindrical shape, and a pair of plates 15 are formed to protrude from the outer peripheral surface at intervals of 90° and to contact the peripheral wall near the corner of the cover body 11. In contrast, the rotation suppression cylinder 14A is as shown in FIG. Figures 7 to 9 As shown, it is formed into a bottomed cylindrical shape, and a plate 15A is formed protruding from the outer peripheral surface and directed toward the upper part or the lower part of the peripheral wall of the cover body 11, and is opposed to the door guide cylinder 14 on the outside from the horizontal lateral inside.
[0067] Multiple locking mechanisms use guide blocks 16 such as Figures 6 to 8 As shown in FIG. 1 , the guide blocks 16 for the locking mechanisms are arranged at the upper and lower parts of the respective installation areas 13, and are integrated with the door guide cylinder 14 and the rotation inhibiting cylinder 14A, and are mutually opposed in the left-right width direction of the cover body 11. Figures 9 to 11 As shown, it is formed as a longitudinal block, and a cam groove 17 for the locking mechanism 30 is cut out in the longitudinal direction on the opposite surface opposite to the adjacent locking mechanism guide block 16. By being integrated with the outer peripheral side of the door guide cylinder 14 or the rotation suppression cylinder 14A, it functions to help reduce the number of parts.
[0068] A pair of cover plates 21 such as Figure 1 , Figure 6 As shown, a pair of setting areas 13 of the cover body 11 are covered to function to protect the locking mechanism 30 from the outside. Each cover plate 21 is formed as a vertically long transparent plate, and is screwed to a plurality of door guide cylinders 14 and rotation inhibition cylinders 14A via fasteners. An operation port 22 for the locking mechanism 30 is provided near the central portion of the cover plate 21, and a T-shaped operation key of a cover body opening and closing machine standardized according to the SEMI standard penetrates the operation port 22. By rotating the operation key at a predetermined rotation angle, the locking mechanism 30 is operated to perform a locking action or an unlocking action.
[0069] Each locking mechanism 30 is as follows Figure 1 , Figure 2 , Figure 6 , Figure 8 As shown, it comprises: an operating reel 31, which is supported by the cover body 11 of the cover body 10 and rotated by a key operation from the outside of the cover body opening and closing machine; an upper and lower pair of forward and backward movement rods 34, which move forward and backward in the inside and outside and up and down directions of the cover body 11 through the rotation of the operating reel 31; and an upper and lower pair of locking claws 40, which protrude from the exit and retract opening 12 of the cover body 11 and are embedded in the locking recess 4 of the container body 1 when each forward and backward movement rod 34 moves forward, and return from the locking recess 4 of the container body 1 to the exit and retract opening 12 of the cover body 11 when each forward and backward movement rod 34 moves backward; each locking mechanism 30 is arranged in the setting area 13 of the cover body 11.
[0070] The operating reel 31 and the upper and lower forward and backward movement rods 34 of each locking mechanism 30 are injection molded by a molding material containing a desired resin. The predetermined resin of the molding material is not particularly limited, and examples thereof include polyetheretherketone resins having excellent heat resistance, flame retardancy, wear resistance, mechanical properties, etc., polybutylene terephthalate resins having excellent heat resistance, wear resistance, durability, polycarbonate resins having excellent impact resistance, heat resistance, dimensional stability, wear resistance, etc., polyacetal resins having excellent impact resistance, wear resistance, etc., polyetherimide (PEI) resins having excellent chemical resistance, water resistance, electrical properties, weather resistance, etc., polyethersulfone (PES) resins having excellent heat resistance, creep resistance, dimensional stability, flame retardancy, etc., polyphenylene sulfide (PPS) resins having excellent chemical resistance, creep resistance, weather resistance, etc., polyamideimide (PAI) resins having excellent heat resistance, mechanical strength, etc., or alloys thereof.
[0071] Among these resins, at least one of polyetheretherketone resin and polybutylene terephthalate resin is preferred. In addition, in addition to the predetermined resin, lightweight carbon having excellent strength, rigidity, etc., specifically carbon nanotubes, carbon fibers, etc., are added to the molding material as needed.
[0072] Operation reel 31 as Figure 1 , Figure 6 As shown, a generally convex circular plate is formed in which the reel cover 10 is mounted via a rotary bearing at the center of the reel body of the circular plate, and is rotatably supported near the center of the setting area 13 of the cover body 11. The central portion 32 of the operating reel 31, which is formed by the reel cover protruding toward the cover plate 21, is placed opposite to the operating port 22 of the cover plate 21, and the operating key of the cover body opening and closing machine that penetrates the operating port 22 is inserted, and the operating reel 31 is automatically rotated at a specified rotation angle. Near the peripheral portion of the operating reel 31, a pair of curved grooves 33 are provided at intervals of 180°, each curved groove 33 is curved in a semicircular arc shape, and the terminal end of the forward and backward movement rod 34 is connected to the curved groove 33.
[0073] A pair of upper and lower forward and backward motion rods 34 are Figure 1 , Figure 6 As shown in FIG. 1 , the cover body 11 is provided in a region 13 so as to be slidable via a plurality of guide ribs 35 and arranged in the vertical direction of the operation reel 31. Figure 8 , Figure 12 to Figure 14As shown, the longitudinal plate is formed with a plurality of long guide holes 36, and the vicinity of the central portion thereof is bent in the thickness direction of the cover body 10 and the cover main body 11, and a pair of strength ensuring ribs 37 are arranged on the back side to be non-contacted with the installation area 13 of the cover main body 11, and a pair of strength ensuring ribs 37 are arranged on the surface to be opposed to the cover plate 21. Each strength ensuring rib 37 is a slender rib extending in the longitudinal direction of the forward and backward movement rod 34, which improves the strength of the forward and backward movement rod 34.
[0074] At the rear end of the forward and backward movement rod 34, as shown in FIG. Fig.14 As shown, a cylindrical latch hub 38 is integrally formed to be able to be slidably loosely fitted in the curved groove 33 of the operating reel 31. By loosely fitting the latch hub 38, the forward and backward movement rod 34 is linked to the rotation of the operating reel 31, and the forward and backward movement rod 34 is guided by the guide rib 35 of the setting area 13 while moving forward and backward in the vertical direction. In addition, on both sides of the front end of the forward and backward movement rod 34, as shown in FIG. Figure 12 to Figure 14 As shown, a pair of connecting claws 39 are formed in parallel to support the locking claw 40 in a swingable manner, and each connecting claw 39 is bent into a thin-walled substantially semicircular arc shape in cross section, in other words, a substantially J-shape.
[0075] Each upper locking claw 40 is as Figure 8 , Figures 15 to 18 As shown, it comprises: a locking block 41, which is clamped between a pair of guide blocks 16 for the locking mechanism of the cover body 10, and can move linearly in the inner and outer and upper and lower directions of the cover body 11, and can swing in the thickness direction of the cover body 10 and the cover body 11; a pair of connecting rods 44, which protrude from the locking block 41 and are connected to the forward and backward movement rod 34 of the locking mechanism 30; and a pair of cam hubs 46, which protrude from the locking block 41 and are embedded in the cam grooves 17 of a pair of guide blocks 16 for the locking mechanism; these locking blocks 41, a pair of connecting rods 44 and a pair of cam hubs 46 are integrally formed by a molding material containing a specified resin.
[0076] The molding material of the locking claw 40 is the same as that of the operating reel 31 and the forward and backward movement rod 34, but from the viewpoint of attaching importance to wear resistance, the prescribed resin is preferably at least one of polybutylene terephthalate resin and polyetheretherketone resin. In addition to the prescribed resin, lightweight carbon having excellent strength and rigidity, specifically carbon nanotubes, carbon fibers, etc., are added to the molding material as needed.
[0077] Locking block 41 Fig.16 , Fig.17As shown, it comprises: a horizontally long plate 42 with a bulging front end and a curved back side; and a protrusion 43, which is integrated near the central part of the back side of the plate 42 and is located on the side of the cover body 11. The locking block 41 is formed into a roughly isosceles triangle in a side view, and cylindrical connecting rods 44 protrude horizontally from both sides of the protrusion 43. The pair of connecting rods 44 can be swingably engaged with a pair of connecting claws 39 supported on the forward and backward movement rod 34.
[0078] A gap 45 for attaching the connecting claw is formed between the pair of connecting rods 44 and the plate 42, but the gap 45 is adjusted to a size / length that does not allow the connecting claw 39 to fall off in consideration of the wall thickness of the connecting claw 39 of the forward and backward movement rod 34. From the viewpoint of achieving non-metallization and improving strength and durability, each connecting rod 44 is formed to have a diameter of φ1.5 mm or more and φ5.5 mm or less, preferably φ2 mm or more and φ5 mm or less, and more preferably φ3 mm or so, which is thicker than the conventional example.
[0079] The cylindrical cam bosses 46 protrude horizontally from both sides of the end of the plate 42 of the locking block 41, and are closer to the connecting rod 44 than in the conventional example. The protruding pair of cam bosses 46 are slidably inserted into the cam groove 17 of the guide block 16 for the locking mechanism. Each cam boss 46 is basically formed in a cylindrical shape, and is formed to a diameter of φ1.5 mm or more and φ5.5 mm or less, preferably φ2 mm or more and φ5 mm or less, and more preferably φ4 mm or so, which is thicker than in the conventional example from the viewpoint of achieving non-metallization and improving strength and durability. On the peripheral surface of the cam boss 46, a pair of flat surfaces 47 are formed in parallel at intervals of 180° to allow the locking claw 40 to perform only a direct motion.
[0080] When the locking mechanism 30 locks the cover 10 fitted on the front face 2 of the container body 1 and pulls it into the container body 1, the cam boss 46 is located on the extension line EL extending from the inner surface of the front wall 5 dividing the locking recess 4 of the container body 1, and the connecting rod 44 is located near the extension line EL extending from the inner surface of the rear wall dividing the locking recess 4 (see FIG. Figure 2 ).
[0081] A recess 48 is formed in the center of the front end of the plate 42 of the locking block 41, and a resin pin 49 is horizontally supported between the two sides. A cylindrical resin pressing roller 50 located in the recess 48 is rotatably supported by the resin pin 49, and functions to make the resin pressing roller 50 slide in contact with the locking recess 4 of the container body 1. The molding material of the resin pin 49 and the resin pressing roller 50 is the same as that of the locking claw 40, but from the perspective of emphasizing wear resistance, the prescribed resin is preferably at least one of polyetheretherketone resin and polybutylene terephthalate resin. In addition to the prescribed resin, lightweight carbon, specifically carbon nanotubes, carbon fibers, etc., which are excellent in strength and rigidity, are selectively added to the molding material.
[0082] The resin pin 49 is formed to be thicker than the conventional example in terms of achieving non-metallization and improving strength and durability, with a diameter of φ1.5 mm or more and φ5.5 mm or less, preferably φ2 mm or more and φ5 mm or less, and more preferably φ3 mm or more and φ3.06 mm or less, and is closer to the cam hub 46 than the conventional example. In addition, the outer diameter of the pushing resin roller 50 is formed to be expanded to φ6 mm or more and φ7 mm or less, preferably φ6.55 mm or so, and the inner diameter is formed to be φ3 mm or more and φ3.05 mm or less, so that it can be rotatably slidably contacted with the inner surface of the front wall 5 of the locking recess 4, thereby suppressing the generation of particles.
[0083] In addition, the locking claw 40 is required to reliably fit into and be locked in the locking recess 4 regardless of the depth of the locking recess 4 of the container body 1 and to achieve smooth movement. When the locking mechanism 30 is locked, it is required to perform a linear motion and then a swing motion, and when the locking mechanism 30 is unlocked, it is required to perform a swing motion and then a linear motion. In order to perform these movements, the cam groove 17 of each locking mechanism guide block 16 is formed into a shape that combines a straight line and a circle.
[0084] That is, the cam groove 17 is as Figures 9 to 11 As shown, it is divided into: a direct-acting engagement start groove 18, which is engaged with the cam wheel hub 46 of the locking claw 40; a direct-acting linear groove 19, which is formed continuously with the end of the direct-acting engagement start groove 18 and is in sliding contact with a pair of flat surfaces 47 of the cam wheel hub 46; and a swinging circular arc groove 20, which is formed with a wide width at the end of the direct-acting linear groove 19; the direct-acting engagement start groove 18 is located near the operating reel 31 on the opposite side of the swinging circular arc groove 20, and the swinging circular arc groove 20 is located near the peripheral wall of the cover body 11.
[0085] The linear engagement start groove 18 extends from the end of the locking mechanism guide block 16 in the longitudinal direction ( Fig.11The upper portion of the cover body 11 is formed into a rectangular shape and is in sliding contact with a pair of flat surfaces 47 of the cam boss 46 to control the posture of the upper locking claw 40, thereby limiting the swing of the upper locking claw 40 in the thickness direction relative to the cover body 11 and providing an opportunity for proper insertion during assembly. In addition, the linear groove 19 for direct motion is formed into a rectangular shape having the same width as the linear engagement start groove 18, and controls the posture of the upper locking claw 40 to allow the upper locking claw 40 to perform direct motion, thereby limiting the swing of the upper locking claw 40 in the thickness direction relative to the cover body 11. In contrast, the circular arc groove 20 for swinging is formed into a substantially circular shape with a larger diameter than the cam boss 46, and a gap is formed between the pair of flat surfaces 47 of the cam boss 46 to release the posture control of the upper locking claw 40, thereby functioning to allow the upper locking claw 40 to perform swing motion.
[0086] In the above structure, when the cover body 10 to be inserted into the front side 2 of the container body 1 is locked, after the cover body 10 is inserted, the operating key of the cover body opening and closing machine rotates the operating reel 31 of each locking mechanism 30 in one direction at an angle of 90°, and through the rotation of the operating reel 31, each forward and backward movement rod 34 moves forward from the reference position toward the peripheral wall direction of the cover body 11.
[0087] When the forward / retractable movement rod 34 advances from the reference position toward the peripheral wall direction of the cover body 11, each locking claw 40 is guided at a stage where the pair of flat surfaces 47 of the cam boss 46 and the linear groove 19 for direct motion of the cam groove 17 are in sliding contact with each other (see Figure 3 ) is linearly moved toward the outside of the cover body, so that the partially exposed push resin roller 50 is completely exposed, and the pair of flat surfaces 47 of the cam hub 46 become able to swing in the stage where the gap is divided between the pair of flat surfaces 47 of the cam hub 46 and the swing arc groove 20 of the cam groove 17 (refer to Figure 4 ), swinging from the cover body 11 side toward the cover plate 21 (refer to Figure 5 ), the resin pressing roller 50 is inserted into the locking recess 4 of the container body 1 (refer to Figure 2 ).
[0088] At this time, the locking claw 40 does not swing while protruding toward the outside of the cover body, but swings after moving directly toward the deepest part 6 of the locking recess 4 of the container body 1, so the swing range of the locking claw 40 can be reduced to a minimum, and the locking claw 40 can be properly embedded and locked in the deepest part 6 of the locking recess 4.
[0089] By such an embedded locking of the locking claw 40, the cover body 10 is pulled in and pressed into a predetermined position in the front face of the container body 1 with good precision, and is locked in a state where the cover plate 21 matches the front face 2 of the container body 1. During this pulling in, the cam hub 46 is embedded in the swinging arc groove 20 of the cam groove 17 and is located on the extension line EL of the inner surface of the front wall 5 that divides the locking recess 4 of the container body 1. In other words, since the cam hub 46 is located in the inner and outer directions of the cover body at the contact portion between the inner surface of the front wall 5 that divides the locking recess 4 and the pushing resin roller 50, the left and right directions ( Figure 2 The force in the depth direction is easily transmitted, which can reduce the loss of pulling force.
[0090] Relative to the case where the above-mentioned cover body 10 is locked, when the locking mechanism 30 is unlocked and the cover body 10 is removed from the front face 2 of the container body 1, the operating key of the cover body opening and closing machine rotates the operating reel 31 of each locking mechanism 30 in the other direction at an angle of 90°. Through the rotation of the operating reel 31, each forward and backward movement rod 34 retreats from the forward position to the original reference position.
[0091] If the forward and backward movement rod 34 retreats from the forward position to the original reference position, each locking claw 40 swings back from the direction of the cover plate 21 to the cover body 11 side during the stage in which a pair of flat surfaces 47 of the cam hub 46 demarcate a gap with the swinging arc groove 20 of the cam groove 17, so that the pushing resin roller 50 leaves the locking recess 4 of the container body 1, and during the stage in which a pair of flat surfaces 47 of the cam hub 46 are in sliding contact with the straight-moving linear groove 19 of the cam groove 17 and is guided, the pushing resin roller 50 moves linearly in the direction of the exit and entry opening 12 of the cover body 10, so that a part of the fully exposed pushing resin roller 50 retreats into the exit and entry opening 12.
[0092] At this time, since the locking claw 40 does not swing back into the cover body 10, but moves straight after swinging, the swing range of the locking claw 40 can be reduced to a minimum and the return action of the locking claw 40 can be smoothed. By the return of the locking claw 40, the cover body 10 engaged with the front face 2 of the container body 1 can be removed, and the cover body 10 is pulled out from the front face 2 of the container body 1 by the cover body opening and closing machine and removed.
[0093] According to the above, since the locking claw 40 can be made metal-free, various adverse effects on the semiconductor wafer accommodated in the container body 1 can be eliminated. In addition, since the connecting rod 44, the cam hub 46, the resin pin 49, and the pushing resin roller 50 of the locking claw 40 can be made thicker, sufficient strength and durability can be ensured, and the worry of damage to the connecting rod 44, the cam hub 46, and the resin pin 49 can be eliminated. In addition, since a pair of connecting rods 44 and cam hubs 46 are used instead of a single long connecting rod 44 and cam hub 46, they can be formed shorter to prevent shrinkage (sink) during forming.
[0094] In addition, since the swing range of the locking claw 40 is reduced, the swing center of the locking claw 40 is closer to the cover body side than in the previous example, the swing center of the locking claw 40 can be located near the upper and lower contact parts of the locking recess 4 and the pushing resin roller 50, and the loss of pulling force during locking can be prevented by this position change.
[0095] Furthermore, since the locking claw 40 swings after the linear motion during locking, even if the locking recess 4 of the container body 1 is deep, the locking claw 40 can be inserted and locked in the deepest part 6 of the locking recess 4. Therefore, it is possible to prevent the locking claw 40 from being insufficiently locked in the locking recess 4 of the container body 1, and there is no situation in which the sealing performance of the cover 10 deteriorates and the semiconductor wafer in the container body 1 is contaminated, and it is expected to greatly prevent the quality of the semiconductor wafer from being reduced. In addition, since it is not necessary to form the locking recess 4 deeply, the freedom of design of the container body 1 can be improved.
[0096] In addition, since the locking claw 40 moves linearly after swinging when unlocking, it is possible to prevent the protruding locking claw 40 and the pushing resin roller 50 from returning to their original position. In addition, since the connecting rod 44 of the locking block 41 is close to the cam hub 46, and the connecting rod 44 is close to the pushing resin roller 50, the locking claw 40 can be miniaturized and its range of motion can be reduced, and the transmission of force becomes easy. Furthermore, since the same cam hub 46 is embedded in the linear groove 19 for linear motion and the circular arc groove 20 for swinging instead of the separate cam hubs 46, the cam groove 17 can be shortened.
[0097] In addition, a robot flange for ceiling transportation can be detachably mounted on the central part of the ceiling of the container body 1 in the above-mentioned embodiment, and an operating handle for holding can be detachably mounted on the outer surface of the two side walls of the container body 1. In addition, in the above-mentioned embodiment, the surface of the cover body 11 is covered with a pair of cover plates 21, but it can also be covered with a single cover plate 21. In addition, in the above-mentioned embodiment, the cam groove 17 for the locking mechanism 30 is cut out on the opposite surface of the guide block 16 for the locking mechanism, but it is not limited to this. For example, a retainer that is roughly square tube (square tube) in top view can be embedded in the front end of each forward and backward movement rod 34 and the locking claw 40, and the two side walls of the retainer can be used as guide parts for the locking mechanism. In addition, the linear engagement start groove 18 of the cam groove 17 can be omitted and divided into a linear groove 19 for direct motion and a circular arc groove 20 for swinging.
[0098] In addition, a required number of strength ensuring ribs 37 may be formed on the surface or back of the forward and backward movement rod 34. In addition, as required, by making the required number of strength ensuring ribs 37 slidably contact the setting area 13 of the cover body 11 and the cover plate 21, the forward and backward movement rod 34 can move forward and backward smoothly without tilting in the thickness direction of the cover body 10. In addition, in the above-mentioned embodiment, the resin pin 49 is fixedly mounted between the two sides of the recessed portion 48 of the locking block 41, but the resin pin 49 may also be rotatably mounted. Furthermore, the peripheral surface of the resin pin 49 may also be cut out of a pair of step portions located near the two ends of the push resin roller 50, but it is not limited at all and may also be a surface without a step portion.
[0099] Industrial Applicability
[0100] The substrate storage container according to the present invention is used in the manufacturing fields of electric, electronic, precision equipment, semiconductors, and the like.
[0101] Description of Reference Numerals
[0102] 1 Container body
[0103] 2 Front (opening)
[0104] 4 Locking pockets
[0105] 5 Anterior wall
[0106] 6 deepest part
[0107] 10 Cover
[0108] 11 Cover body
[0109] 12 Exit
[0110] 13 Setting Area
[0111] 14 Door guide cylinder (door guide part)
[0112] 14A Rotating Suppression Cylinder
[0113] 16 Guide block for locking mechanism (guide component for locking mechanism)
[0114] 17 Cam groove
[0115] 18 Insertion start groove for linear motion
[0116] 19 Linear groove for direct motion
[0117] 20 Arc groove for swing
[0118] 21 Cover plate
[0119] 30 Locking mechanism
[0120] 31 Operating reel (operating part)
[0121] 34 Forward and backward motion rod (forward and backward motion component)
[0122] 37 Strength ensuring rib
[0123] 39 Link Claw
[0124] 40 Locking claw
[0125] 41 Locking block
[0126] 42 Plates
[0127] 43 protrusion
[0128] 44 Connecting rod
[0129] 45 Gap
[0130] 46 Cam hub (cam protrusion)
[0131] 47 Flat surface
[0132] 48 recess
[0133] 49 Resin Pin
[0134] 50 Pushing resin roller (resin roller)
[0135] EL extension cord
Claims
1. A substrate storage container, comprising: a cover body, which is fitted into an opening of a container body capable of storing substrates; and a locking mechanism, which locks the fitted cover body, characterized in that: The cover body comprises: a cover body, which is fitted into the opening of the container body; and a plurality of guide members for locking mechanisms, which are installed on the cover body; a plurality of inlet and outlet openings are provided on the peripheral edge of the cover body, which can be opposed to the locking recesses on the inner periphery of the opening of the container body; the plurality of guide members for locking mechanisms are opposed to each other and cam grooves are formed on the opposing surfaces thereof; The locking mechanism includes: a plurality of advancing and retreating moving parts, which move forward and backward in the inner and outer directions of the cover body by rotating the operating part supported by the cover body of the cover body; and a plurality of locking claws, which protrude from the inlet and outlet opening of the cover body and are embedded in the locking recesses of the container body when the advancing and retreating moving parts move forward, and return from the locking recesses of the container body to the inlet and outlet opening of the cover body when the advancing and retreating moving parts move backward; The locking claw includes: a locking block, which is sandwiched between a plurality of locking mechanism guide components of the cover body and can move straightly in the inward and outward directions of the cover body and can swing in the thickness direction of the cover body; a plurality of connecting rods, which protrude from the locking block and are connected to the forward and backward moving components of the locking mechanism; and a plurality of cam protrusions, which protrude from the locking block and are embedded in the cam grooves of the plurality of locking mechanism guide components; the locking block, the plurality of connecting rods and the plurality of cam protrusions are integrally formed by a molding material containing a specified resin; a recess is formed in the locking block and a resin pin is provided between the two sides thereof; a resin roller that contacts the locking recess of the container body is embedded in the resin pin, and a plurality of flat surfaces are formed at specified intervals on the circumferential surface of the cam protrusion; The cam groove of the locking mechanism guide component is divided into a linear groove for direct motion and an arc groove for swinging. The linear groove for direct motion contacts multiple flat surfaces of the cam protrusion of the locking claw to limit the swing of the locking claw, and the arc groove for swinging is widely formed at the end of the linear groove for direct motion to enable the locking claw to swing.
2. The substrate storage container according to claim 1, wherein: The container body is formed into a front-opening box capable of accommodating multiple semiconductor chips, and the cover body can be freely and detachably engaged on the front side of the opening. A plurality of locking mechanism guide components are installed near the peripheral edge of the cover body of the cover body, and the locking mechanism guide components close to the side of the cover body among the plurality of locking mechanism guide components are integrated with the door guide part.
3. The substrate storage container according to claim 2, wherein: When the locking mechanism locks the cover body fitted on the front surface of the container body and pulls it into the container body, the cam protrusion of the locking claw is located near the extension line of the inner surface of the front wall that divides the locking recess of the container body.
4. The substrate storage container according to claim 1, 2 or 3, characterized in that: Setting areas for the locking mechanism are formed on both sides of the surface of the cover body of the cover, a cover plate covering the locking mechanism is installed on the cover body, the forward and backward moving parts of the locking mechanism are bent in the thickness direction of the cover body, and strength ensuring ribs are formed on at least one of the front and back surfaces of the forward and backward moving parts.
5. The substrate storage container according to any one of claims 1 to 4, wherein: A plurality of connecting claws are formed into a substantially semicircular arc cross section on both sides of the front end portion of the forward and backward moving member of the locking mechanism, and the plurality of connecting claws are engaged with a plurality of connecting rods of the locking claw.
6. The substrate storage container according to claim 5, wherein: The locking block comprises: a plate with a bulging front end and a curved back side; and a protrusion formed on the back side of the plate; the locking block is formed into a roughly triangular shape in a side view; connecting rods protrude from both sides of the protrusion, forming a gap for connecting claws between the plate and the protrusion.
7. The substrate storage container according to claim 6, wherein: Cam protrusions close to the connecting rod are made to protrude from both sides of the end portion of the plate of the locking block, a recess is formed at the front end of the plate, and a resin pin close to the cam protrusion is bridged between the two sides.
8. The substrate storage container according to any one of claims 1 to 7, wherein: At the end of the direct-acting linear groove of the cam groove, a direct-acting engagement starting groove is formed, which is located on the opposite side of the swinging arc groove and engages with the cam protrusion of the locking claw, so that multiple flat surfaces of the cam protrusion contact with the direct-acting engagement starting groove to limit the swing of the locking claw.