Positioning mechanism, positioning method and wafer detection device

Abstract

The present application relates to a positioning mechanism, a positioning method and a wafer detection device. The positioning mechanism includes: a first mounting plate, a second mounting plate and a plurality of positioning components, the second mounting plate is arranged on one side of the first mounting plate, and the second mounting plate has a plurality of mounting holes; the positioning components include positioning pins and positioning guide sleeves, a plurality of positioning pins of the plurality of positioning components are arranged at intervals on the side of the first mounting plate facing the second mounting plate and are arranged around the outer periphery of the second mounting plate, a plurality of positioning pins are arranged one-to-one with a plurality of mounting holes, the positioning guide sleeve can be detachably arranged on the second mounting plate, the positioning guide sleeve is used to be sleeved on the outer periphery of the positioning pin and transitionally cooperate with the positioning pin to achieve the alignment of the first mounting plate and the second mounting plate, the maximum radial dimension of the positioning pin is less than or equal to the inner diameter of the positioning guide sleeve; the outer diameter of the positioning guide sleeve is less than the radial dimension of the mounting hole. The positioning mechanism has high positioning accuracy and is easy to install and position.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a positioning mechanism, a positioning method and a wafer detection device. Background Art

[0002] In various links such as mechanical processing, manufacturing, and testing, it is generally necessary to temporarily dock two parts of a mechanical mechanism and then separate them after completing the corresponding process. In order to ensure consistency, there are often high requirements for the docking accuracy of the two parts of the mechanical mechanism. Therefore, a special positioning mechanism is designed to assist in the positioning of the two parts of the mechanical mechanism. However, it is difficult for existing positioning mechanisms to simultaneously meet the requirements of high precision and easy installation and positioning.

[0003] Specifically, the common positioning mechanism is composed of a positioning pin and a pin guide sleeve. The positioning pin and the pin guide sleeve are respectively fixedly arranged on the two parts of the mechanical mechanism that need to be connected. After the positioning pin is inserted into the pin guide sleeve, the freedom of relative displacement of the two parts of the mechanical mechanism can be limited. If reliable positioning is required, at least five degrees of freedom of relative movement of the two parts of the mechanical mechanism should be limited, and the remaining degree of freedom in one direction is the degree of freedom in the direction of gravity, which can be constrained by the gravity of the mechanical mechanism connected by the pin guide sleeve. In order to achieve the restriction of five degrees of freedom, at least two sets of positioning pins and guide sleeves are required. One set of positioning pins and guide sleeves is used to constrain the degrees of freedom of the two parts of the mechanical mechanism on the plane, that is, the freedom of movement in the X direction, the freedom of movement in the Y direction, the freedom of rotation around the X axis and the freedom of rotation around the Y axis. The other set of positioning pins and guide sleeves is used to constrain the freedom of rotation around the Z axis. The freedom of movement in the Z direction can be constrained by the gravity or screws of the mechanical mechanism connected by the pin guide sleeve.

[0004] In order to make the positioning mechanism meet the requirements of high precision and easy installation and positioning during the docking process of the two parts of the mechanical mechanism, the usual practice is to use two sets of positioning pins and guide sleeves, one set of positioning pins is set in a cylindrical shape, which is tightly matched with the guide sleeve, and the other set of positioning pins is set with diamond cut edges on the basis of the cylindrical shape, so that the positioning pins and the guide sleeve are partially in contact and matched, so as to ensure the accuracy and reduce the difficulty of installation and positioning. However, when the size of the two parts of the mechanical structure is large, such a positioning mechanism cannot guarantee the rigidity and reliability of the docking of the two parts of the mechanical structure. Summary of the invention

[0005] In view of this, the present application provides a positioning mechanism, a positioning method and a wafer detection device, wherein the positioning mechanism has high positioning accuracy and is easy to install and position.

[0006] The present application provides a positioning mechanism, which includes: a first mounting plate, a second mounting plate and multiple groups of positioning components, the second mounting plate is arranged on one side of the first mounting plate, and the second mounting plate has multiple mounting holes; the positioning components include positioning pins and positioning guide sleeves, the multiple positioning pins of the multiple groups of positioning components are spaced apart on the side of the first mounting plate facing the second mounting plate and are arranged around the outer circumference of the second mounting plate, the multiple positioning pins are arranged one-to-one with the multiple mounting holes, the positioning guide sleeves can be detachably arranged on the second mounting plate, the positioning guide sleeves are used to be sleeved on the outer circumference of the positioning pins and transitionally cooperate with the positioning pins to achieve alignment of the first mounting plate and the second mounting plate, the maximum radial dimension of the positioning pins is less than or equal to the inner diameter of the positioning guide sleeve; the outer diameter of the positioning guide sleeve is smaller than the radial dimension of the mounting hole.

[0007] Furthermore, the positioning pin includes a first positioning portion and a second positioning portion that are connected to each other, the first positioning portion is arranged closer to the first mounting plate than the second positioning portion, and the radial dimension of the first positioning portion is greater than the radial dimension of the second positioning portion; when the positioning pin and the positioning guide sleeve are used in conjunction with each other to position the first mounting plate and the second mounting plate, the positioning guide sleeve is sleeved on the outer periphery of the first positioning portion, and the positioning guide sleeve and the first positioning portion are transitionally matched to position the relative positions of the first mounting plate, the second mounting plate and the positioning guide sleeve.

[0008] Furthermore, the positioning mechanism also includes a height adjustment component, which is arranged between the first mounting plate and the second mounting plate and is used to adjust the distance between the first mounting plate and the second mounting plate.

[0009] Furthermore, the difference between the radial dimension D1 of the first positioning portion and the radial dimension D2 of the second positioning portion is in the range of 0.02 mm ≤ D1 - D2 ≤ 0.1 mm.

[0010] Furthermore, the positioning pin also includes a guide portion, which is bent and connected to the second positioning portion and is arranged farther away from the first mounting plate than the second positioning portion. The radial dimension of the second positioning portion is greater than or equal to the radial dimension of the guide portion, and the radial dimension of the guide portion gradually decreases from one end connected to the second positioning portion to an end away from the second positioning portion.

[0011] Furthermore, the guide portion has a central axis, and the range of the angle α between the outer peripheral side wall of the guide portion and the central axis is: 3°≤α≤15°.

[0012] Furthermore, the first mounting plate has a plurality of recessed grooves arranged at intervals facing the second mounting plate, a plurality of positioning pins are correspondingly arranged in the plurality of recessed grooves, and the positioning pins have through holes, and the positioning assembly also includes a first locking piece, which is sequentially passed through the through holes and the first mounting plate to install the positioning pins on the first mounting plate.

[0013] Furthermore, the positioning assembly also includes a plurality of second locking members. When the positioning guide sleeve can be movably inserted into the mounting hole and sleeved on the outer periphery of the first positioning portion, the second locking members are used to lock the positioning guide sleeve to the second mounting plate to limit the relative position of the second mounting plate and the positioning guide sleeve.

[0014] Furthermore, the positioning guide sleeve includes a connected flange portion and a boss portion, the flange portion presses against the surface of the second mounting plate away from the first mounting plate, the boss portion can be movably inserted into the mounting hole and the boss portion is sleeved on the outer periphery of the positioning pin; the aperture of the mounting hole is D3, and the outer diameter of the boss portion is D4, then the relationship is satisfied: 0.4mm≤D3-D4≤0.6mm.

[0015] Further, the height adjustment assembly includes a first adjusting member and a second adjusting member, the first adjusting member is fixedly arranged on the surface of the first mounting plate facing the second mounting plate, the second adjusting member is sequentially penetrated through the first adjusting member and the first mounting plate, the end of the second adjusting member facing away from the first adjusting member abuts against the second mounting plate, the second adjusting member is threadedly connected to the first adjusting member and the first mounting plate respectively, and the second adjusting member can rotate relative to the first adjusting member to adjust the height of the second adjusting member, thereby adjusting the distance between the first mounting plate and the second mounting plate.

[0016] The present application also provides a positioning method, which includes: forming a first mounting assembly, the first mounting assembly including a first mounting plate and a plurality of positioning pins, the plurality of positioning pins being spaced apart on one side of the first mounting plate; forming a second mounting assembly, the second mounting assembly including a second mounting plate and a plurality of positioning guide sleeves, the second mounting plate having a plurality of mounting holes spaced apart, the plurality of positioning guide sleeves being detachably disposed in the plurality of mounting holes; stacking the second mounting plate on a side of the first mounting plate having the plurality of positioning pins, and allowing the plurality of positioning pins to be passed through the plurality of mounting holes one by one; and allowing the plurality of positioning guide sleeves to be passed through the plurality of mounting holes one by one and sleeved on the outer periphery of the plurality of positioning pins, and fixing the plurality of positioning guide sleeves to the second mounting plate so that the first mounting plate and the second mounting plate have a first relative position.

[0017] Further, the positioning pin includes a first positioning portion, a second positioning portion and a guide portion that are connected to each other, the first positioning portion is arranged closer to the first mounting plate than the second positioning portion, the second positioning portion is arranged closer to the first mounting plate than the guide portion, the radial dimension of the first positioning portion is greater than the radial dimension of the second positioning portion, the radial dimension of the second positioning portion is greater than or equal to the radial dimension of the guide portion, and the radial dimension of the guide portion gradually decreases from an end connected to the second positioning portion to an end away from the second positioning portion; the first mounting assembly also includes a plurality of height adjustment assemblies, the plurality of height adjustment assemblies and the plurality of positioning pins are arranged on the same side of the first mounting plate, and the plurality of height adjustment assemblies are arranged at intervals, The height adjustment assembly includes a first adjusting member and a second adjusting member, the first adjusting member is fixedly arranged on the surface of the first mounting plate facing the second mounting plate, the second adjusting member is sequentially penetrated through the first adjusting member and the first mounting plate, the end of the second adjusting member facing away from the first adjusting member abuts against the second mounting plate, and the second adjusting member is threadedly connected to the first adjusting member and the first mounting plate respectively; the positioning method also includes: moving the second adjusting member in a direction away from the first adjusting member to push the second mounting plate to move in a direction away from the first mounting plate, so that the second mounting plate is arranged corresponding to the second positioning portion, so that the first mounting plate and the second mounting plate have a second relative position.

[0018] Furthermore, the first mounting assembly also includes a first locking member, the first mounting plate has a plurality of recessed grooves arranged at intervals facing the second mounting plate, the positioning pins have through holes, and the plurality of positioning pins are arranged at intervals on one side of the first mounting plate, including: respectively arranging the plurality of positioning pins in the plurality of recessed grooves; and sequentially through the first locking member in the through holes of the positioning pins and the first mounting plate, so as to arrange the plurality of positioning pins at intervals on one side of the first mounting plate.

[0019] The present application provides a wafer detection device, which includes: a positioning mechanism, a probe card, a test bench panel and a test machine provided in the present application, wherein the first mounting plate is fixedly arranged on the test bench panel, and the test bench panel is used to carry the probe card; the second mounting plate is fixedly connected to the test machine, and the test machine is used to achieve electrical connection with the probe card; the positioning mechanism is used to align the relative positions of the test bench panel and the test machine.

[0020] In the present application, the multiple positioning pins are arranged at intervals on the first mounting plate. In the process of positioning the relative positions of the first mounting plate and the second mounting plate, the positioning guide sleeve can be detachably arranged in the mounting hole and the positioning guide sleeve is sleeved on the outer periphery of the positioning pin. The maximum radial dimension of the positioning pin is less than or equal to the inner diameter of the positioning guide sleeve, so that the positioning guide sleeve and the positioning pin can be accurately positioned, and the positioning pin and the positioning guide sleeve can achieve transition fit to ensure the positioning accuracy of the positioning pin and the positioning guide sleeve. Furthermore, the plurality of positioning pins are arranged at intervals on the first mounting plate and are arranged around the outer circumference of the second mounting plate. When the plurality of positioning pins and the plurality of positioning guide sleeves are arranged one by one, the plurality of positioning pins limit the relative positions between the plurality of positioning guide sleeves, and the mounting holes of the second mounting plate may have precision errors during the processing, and each of the positioning guide sleeves is respectively inserted into the plurality of mounting holes, and the outer diameter of the positioning guide sleeve is smaller than the radial dimension of the mounting hole, so that the positioning guide sleeve and the second mounting plate have a certain installation margin and activity margin, so that after the positioning guide sleeve and the positioning pin are positioned, the positioning guide sleeve can still be quickly fixed in the relative position with the mounting hole, thereby realizing the relative positioning of the positioning pin, the positioning guide sleeve and the second mounting plate, and then realizing the positioning of the first mounting plate and the second mounting plate. In the present application, the maximum radial dimension of the locating pin is less than or equal to the inner diameter of the locating guide sleeve; the outer diameter of the locating guide sleeve is smaller than the radial dimension of the mounting hole, so that the first mounting plate and the second mounting plate have a higher positioning accuracy, and the installation and positioning are less difficult and have a higher positioning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the structure of a positioning mechanism according to an embodiment of the present application;

[0023] Figure 2 This is a schematic diagram of the exploded structure of a positioning mechanism according to an embodiment of the present application;

[0024] Figure 3 A schematic diagram of a top view of a positioning mechanism according to an embodiment of the present application;

[0025] Figure 4 For along Figure 3 Sectional view in the AA direction;

[0026] Figure 5 This is a schematic structural diagram of a positioning guide sleeve according to an embodiment of the present application;

[0027] Figure 6 This is a side structural schematic diagram of a positioning guide sleeve according to an embodiment of the present application;

[0028] Figure 7 This is a schematic diagram of the top view of the second mounting plate of an embodiment of the present application;

[0029] Figure 8 This is a schematic structural diagram of a positioning pin according to an embodiment of the present application;

[0030] Fig. 9 This is a schematic cross-sectional structure diagram of a positioning pin according to an embodiment of the present application;

[0031] Fig.10 This is a schematic side view of the positioning pin according to an embodiment of the present application;

[0032] Fig.11 for Figure 2 The enlarged view of the dashed box in C;

[0033] Fig.12 for Figure 4 The enlarged view of the dashed box in D;

[0034] Fig.13 for Figure 4 Enlarged view of the dashed box in E;

[0035] Fig.14 A schematic diagram of a flow chart of a positioning method according to an embodiment of the present application;

[0036] Fig.15 Schematic diagram of the structure of a wafer inspection device according to an embodiment of the present application.

[0037] Description of reference numerals:

[0038] 100-positioning mechanism, 110-first mounting plate, 1101-sink, 120-second mounting plate, 121-mounting hole, 130-positioning assembly, 131-positioning pin, 1311-first positioning portion, 1312-guide portion, 1313-through hole, 1314-second positioning portion, 132-positioning guide sleeve, 1321-flange portion, 1322-boss portion, 133-first locking member, 134-second locking member, 140-height adjustment assembly, 141-first adjustment member, 142-second adjustment member, 200-wafer detection device, 210-probe card, 220-test bench panel, 230-testing machine. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0040] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0041] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0042] In various links such as mechanical processing, manufacturing, and testing, it is generally necessary to temporarily dock two parts of a mechanical mechanism and then separate them after completing the corresponding process. In order to ensure consistency, there are often high requirements for the docking accuracy of the two parts of the mechanical mechanism. Therefore, a special positioning mechanism is designed to assist in the positioning of the two parts of the mechanical mechanism. However, it is difficult for existing positioning mechanisms to simultaneously meet the requirements of high precision and easy installation and positioning.

[0043] Specifically, the common positioning mechanism is composed of a positioning pin and a pin guide sleeve. The positioning pin and the pin guide sleeve are respectively fixedly arranged on the two parts of the mechanical mechanism that need to be connected. After the positioning pin is inserted into the pin guide sleeve, the freedom of relative displacement of the two parts of the mechanical mechanism can be limited. If reliable positioning is required, at least five degrees of freedom of relative movement of the two parts of the mechanical mechanism should be limited, and the remaining degree of freedom in one direction is the degree of freedom in the direction of gravity, which can be constrained by the gravity of the mechanical mechanism connected by the pin guide sleeve. In order to achieve the restriction of five degrees of freedom, at least two sets of positioning pins and guide sleeves are required. One set of positioning pins and guide sleeves is used to constrain the degrees of freedom of the two parts of the mechanical mechanism on the plane, that is, the freedom of movement in the X direction, the freedom of movement in the Y direction, the freedom of rotation around the X axis and the freedom of rotation around the Y axis. The other set of positioning pins and guide sleeves is used to constrain the freedom of rotation around the Z axis. The freedom of movement in the Z direction can be constrained by the gravity or screws of the mechanical mechanism connected by the pin guide sleeve. In order to achieve reliable positioning, the positioning pins and the pin guide sleeves are usually transitionally matched, so that after a portion of the positioning pins are inserted into the pin guide sleeves of the mechanical mechanism, due to the error in machining accuracy, the remaining portions of the positioning pins are difficult to insert into other pin guide sleeves of the mechanical mechanism for positioning, which increases the difficulty of installation and positioning. Among them, the X direction, Y direction and Z direction represent the directions of the horizontal axis, vertical axis and vertical axis in three-dimensional space, respectively. The X direction ‌ usually represents the horizontal direction or horizontal direction, the Y direction ‌ represents the vertical direction or front-to-back direction, and the Z direction ‌ represents the vertical direction.

[0044] In addition, in order to make the positioning mechanism meet the requirements of high precision and easy installation and positioning during the process of docking the two parts of the mechanical mechanism, it is usually practiced to use two sets of positioning pins and guide sleeves, one set of positioning pins is set to a cylindrical shape, which fits tightly with the guide sleeve, and the other set of positioning pins is set with diamond cut edges on the basis of the cylindrical shape, so that the positioning pins and the guide sleeve are partially in contact and matched, so as to reduce the difficulty of installation and positioning while ensuring accuracy. However, when the size of the two parts of the mechanical structure is large, such a positioning mechanism cannot guarantee the rigidity and reliability of the docking of the two parts of the mechanical structure. Furthermore, when multiple sets of different mechanical mechanisms are docked with each other, it is often necessary to ensure the docking accuracy while facilitating the separation of the two parts of the mechanical mechanism.

[0045] See also Figures 1 to 4The present application provides a positioning mechanism 100, the positioning mechanism 100 comprising: a first mounting plate 110, a second mounting plate 120 and a plurality of positioning components 130, the second mounting plate 120 being arranged on one side of the first mounting plate 110, the second mounting plate 120 having a plurality of mounting holes 121; the positioning components 130 comprising positioning pins 131 and positioning guide sleeves 132, the plurality of positioning pins 131 of the plurality of positioning components 130 being arranged at intervals on one side of the first mounting plate 110 facing the second mounting plate 120 and surrounding the second mounting plate 120. The outer periphery of the mounting plate 120 is arranged, and the plurality of positioning pins 131 are arranged one-to-one correspondingly to the plurality of mounting holes 121. The positioning guide sleeve 132 can be detachably arranged on the second mounting plate 120. The positioning guide sleeve 132 is used to be sleeved on the outer periphery of the positioning pin 131 and transitionally fit with the positioning pin 131 to achieve the alignment of the first mounting plate 110 and the second mounting plate 120. The maximum radial dimension of the positioning pin 131 is less than or equal to the inner diameter of the positioning guide sleeve 132; the outer diameter of the positioning guide sleeve 132 is smaller than the radial dimension of the mounting hole 121.

[0046] It can be understood that the plurality of positioning pins 131 are arranged in one-to-one correspondence with the plurality of mounting holes 121 , and each positioning pin 131 may be arranged in one mounting hole 121 , and different positioning pins 131 may be arranged in different mounting holes 121 .

[0047] It can be understood that the positioning guide sleeve 132 and the positioning pin 131 have a transition fit, which can be, in some embodiments, an interference fit between the positioning guide sleeve 132 and the positioning pin 131; in other embodiments, a clearance fit between the positioning guide sleeve 132 and the positioning pin 131.

[0048] It can be understood that the positioning guide sleeve 132 can be detachably disposed on the second mounting plate 120, and the outer diameter of the positioning guide sleeve 132 is smaller than the radial dimension of the mounting hole 121, so that the relative position of the positioning guide sleeve 132 and the second mounting plate 120 can be adjusted.

[0049] It can be understood that, in the process of positioning the first mounting plate 110 and the second mounting plate 120 , the positioning guide sleeve 132 is disposed at the portion of the positioning pin 131 having the largest radial dimension.

[0050] In the terminology of the present application, "plurality" means greater than or equal to two, and may be but is not limited to two, three, four, five or six, etc.

[0051] It can be understood that in actual use of the positioning mechanism 100, the first mounting plate 110 is installed on the first target object, and the second mounting plate 120 is installed on the second target object, and multiple groups of the positioning components 130 realize the positioning of the first mounting plate 110 and the second mounting plate 120, that is, realize the positioning of the first target object and the second target object.

[0052] It can be understood that the positioning guide sleeve 132 can be detachably arranged on the second mounting plate 120. It can be that during the assembly process of the positioning mechanism 100, the positioning guide sleeve 132 is firstly passed through the mounting hole 121 of the second mounting plate 120, and the positioning guide sleeve 132 is sleeved on the positioning pin 131 and transitionally matched with the positioning pin 131, and then the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed.

[0053] In this embodiment, the multiple positioning pins 131 are arranged at intervals on the first mounting plate 110. In the process of positioning the relative positions of the first mounting plate 110 and the second mounting plate 120, the positioning guide sleeve 132 can be detachably arranged in the mounting hole 121 and the positioning guide sleeve 132 is sleeved on the outer periphery of the positioning pin 131. The maximum radial dimension of the positioning pin 131 is less than or equal to the inner diameter of the positioning guide sleeve 132, so that the positioning guide sleeve 132 and the positioning pin 131 can be accurately positioned, and the positioning pin 131 and the positioning guide sleeve 132 can achieve transition fit to ensure the positioning accuracy of the positioning pin 131 and the positioning guide sleeve 132. Furthermore, the plurality of positioning pins 131 are arranged at intervals on the first mounting plate 110 and around the outer periphery of the second mounting plate 120. When the plurality of positioning pins 131 are arranged one by one with the plurality of positioning guide sleeves 132, the plurality of positioning pins 131 restrict the relative positions between the plurality of positioning guide sleeves 132. The mounting holes 121 of the second mounting plate 120 may have precision errors during the processing. Each of the positioning guide sleeves 132 is respectively inserted into the plurality of mounting holes 121. The outer diameter of the positioning guide sleeve 132 is smaller than the outer diameter of the positioning guide sleeve 132. The radial dimension of the mounting hole 121 is such that the positioning guide sleeve 132 and the second mounting plate 120 have a certain installation margin and activity margin, so that after the positioning guide sleeve 132 and the positioning pin 131 are positioned, the positioning guide sleeve 132 can still be quickly fixed to the relative position of the mounting hole 121, thereby realizing the relative positioning of the positioning pin 131, the positioning guide sleeve 132, and the second mounting plate 120, and then realizing the positioning of the first mounting plate 110 and the second mounting plate 120. In this embodiment, the maximum radial dimension of the positioning pin 131 is less than or equal to the inner diameter of the positioning guide sleeve 132; the outer diameter of the positioning guide sleeve 132 is less than the radial dimension of the mounting hole 121, so that the first mounting plate 110 and the second mounting plate 120 have a higher positioning accuracy, and the difficulty of installation and positioning is relatively small, and the positioning efficiency is relatively high. In addition, multiple positioning pins 131 of multiple groups of the positioning assemblies 130 are arranged at intervals on the first mounting plate 110, and each of the positioning pins 131 is transitionally matched with the positioning guide sleeve 132, so that the positioning between the first mounting plate 110 and the second mounting plate 120 has high rigidity and reliability. When the first mounting plate 110 is fixedly arranged on the test bench panel 220, and the second mounting plate 120 is fixedly connected to the test machine 230, the size of the test machine 230 is large and the weight is large, and the positioning between the first mounting plate 110 and the second mounting plate 120 has high rigidity and reliability, then the test machine 230 can be stably arranged on one side of the test bench panel 220.

[0054] If the positioning guide sleeve 132 is directly fixed on the second mounting plate 120, then when the positioning guide sleeve 132 is sleeved on the outer periphery of the positioning pin 131 and fixedly matched with the positioning pin 131, the positioning of the first mounting plate 110 and the second mounting plate 120 is achieved; however, in this solution, multiple positioning pins 131 limit the relative positions between multiple positioning guide sleeves 132, and the mounting hole 121 of the second mounting plate 120 may have precision errors during the processing, making the installation more difficult. In the present embodiment, the positioning guide sleeve 132 can be separately arranged in the mounting hole 121. Then, in the positioning mechanism 100, the first mounting plate 110 and the second mounting plate 120 are not directly positioned, but the positioning pin 131 on the first mounting plate 110 is first positioned with the positioning guide sleeve 132, that is, the positioning of the first mounting plate 110 and the positioning guide sleeve 132 is realized; further, the multiple positioning guide sleeves 132 are respectively positioned one by one with the multiple mounting holes 121 of the second mounting plate 120, and the multiple positioning guide sleeves 132 are independent of each other, and each of the positioning guide sleeves 132 has a movable margin with the mounting hole 121, so as to realize the positioning between the positioning guide sleeve 132 and the second mounting plate 120, that is, to realize the positioning between the first mounting plate 110 and the second mounting plate 120. The positioning mechanism 100 provided in this embodiment improves the flexibility of the alignment of the first mounting plate 110 and the second mounting plate 120, reduces the difficulty of installation, and each positioning pin 131 achieves transition fit and full contact with the positioning guide sleeve 132, while ensuring the alignment accuracy of the first mounting plate 110 and the second mounting plate 120, while improving the rigidity and reliability of the alignment of the first mounting plate 110 and the second mounting plate 120.

[0055] Preferably, in some embodiments, the number of groups of the positioning components 130 is four, and the four groups of the positioning components 130 are arranged around the periphery of the second mounting plate 120 ; further preferably, the four groups of the positioning components 130 are symmetrically arranged relative to the center of the second mounting plate 120 .

[0056] In this embodiment, four groups of the positioning components 130 are arranged around the outer periphery of the second mounting plate 120, which is conducive to distributing the weight of the second mounting plate 120 more evenly to the four groups of the positioning components 130, so as to avoid the second mounting plate 120 from tilting during the positioning of the first mounting plate 110 and the second mounting plate 120, which makes it difficult for the positioning guide sleeve 132 to be sleeved on the outer periphery of the positioning pin 131 with the maximum radial dimension, thereby reducing the difficulty of aligning the positioning guide sleeve 132 with the mounting hole 121 and improving the positioning efficiency of the positioning mechanism 100. In addition, the cooperation of the four groups of positioning components 130 also ensures the rigidity and reliability of the docking of the first mounting plate 110 and the second mounting plate 120. Specifically, the four groups of positioning components 130 can prevent the second target object connected to the second mounting plate 120 from twisting and deforming, so that the second target object connected to the second mounting plate 120 is stably supported on one side of the first mounting plate 110.

[0057] See also Figures 5 to 7 In some embodiments, the positioning guide sleeve 132 includes a connected flange portion 1321 and a boss portion 1322, the flange portion 1321 presses against the surface of the second mounting plate 120 away from the first mounting plate 110, the boss portion 1322 can be movably inserted into the mounting hole 121 and the boss portion 1322 is sleeved on the outer periphery of the positioning pin 131; the aperture of the mounting hole 121 is D3, and the outer diameter of the boss portion 1322 is D4, then the relationship is satisfied: 0.4mm≤D3-D4≤0.6mm.

[0058] Specifically, the value of D3-D4 may be, but is not limited to, 0.4 mm, 0.42 mm, 0.43 mm, 0.45 mm, 0.47 mm, 0.49 mm, 0.5 mm, 0.52 mm, 0.55 mm, 0.58 mm, 0.59 mm, and 0.6 mm, etc.

[0059] In this embodiment, the positioning guide sleeve 132 includes a connected flange portion 1321 and a boss portion 1322. During the process of positioning the relative positions of the first mounting plate 110 and the second mounting plate 120, the flange portion 1321 presses against the surface of the second mounting plate 120 away from the first mounting plate 110, and the boss portion 1322 can be movably inserted into the mounting hole 121. During the positioning process of the boss portion 1322 and the positioning pin 131, the flange portion 1321 can keep the boss portion 1322 always in the mounting hole 121 to prevent the boss portion 1322 from falling off from the mounting hole 121. Further, the boss portion 1322 is sleeved on the outer periphery of the positioning pin 131, and when the aperture D3 of the mounting hole 121 and the outer diameter D4 of the boss portion 1322 satisfy the relationship: 0.4mm≤D3-D4≤0.6mm, the difference between the aperture of the mounting hole 121 and the outer diameter of the boss is within a reasonable range. When the plurality of boss portions 1322 are sleeved on the outer periphery of the plurality of positioning pins 131 one by one, the plurality of positioning pins 131 define the relative positions of the plurality of boss portions 1322, and there is a certain installation margin and activity margin between the mounting hole 121 and the boss, which is conducive to the boss portion 1322 remaining in the mounting hole 121 and being able to be fixed in the relative position with the mounting hole 121 after being positioned relative to the positioning pin 131, so as to avoid the relative positions of the plurality of positioning pins 131, the plurality of positioning guide sleeves 132 and the second mounting plate 120 abutting against each other, thereby increasing the difficulty of installation and positioning. In addition, the value of D3-D4 is not too large to reduce the positioning accuracy of the first mounting plate 110 and the second mounting plate 120, so that the positioning mechanism 100 has both high positioning accuracy and positioning efficiency. When the value of D3-D4 is too large, the movable margin of the boss in the mounting hole 121 is too large. After the relative positions of the positioning pin 131 and the positioning guide sleeve 132 are positioned, if the relative positions of the positioning guide sleeve 132 and the mounting hole 121 may be greatly offset, the positioning accuracy of the second mounting plate 120 and the positioning pin 131 is reduced, thereby reducing the positioning accuracy of the first mounting plate 110 and the second mounting plate 120. When the value of D3-D4 is too small, the movable margin of the boss in the mounting hole 121 is too small. During the alignment of the first mounting plate 110 and the second mounting plate 120, the positioning guide sleeve 132 may be difficult to be sleeved on the outer periphery of the positioning pin 131 when it is inserted into the mounting hole 121, that is, the positioning guide sleeve 132 and the positioning pin 131 are difficult to be coaxially arranged, which increases the installation difficulty and positioning difficulty of the positioning mechanism 100 and reduces the positioning efficiency of the positioning mechanism 100.

[0060] See also Figure 8In some embodiments, the positioning pin 131 includes a first positioning portion 1311 and a second positioning portion 1314 that are connected to each other. The first positioning portion 1311 is arranged closer to the first mounting plate 110 than the second positioning portion 1314, and the radial dimension of the first positioning portion 1311 is greater than the radial dimension of the second positioning portion 1314; when the positioning pin 131 is used in conjunction with the positioning guide sleeve 132 to position the first mounting plate 110 and the second mounting plate 120, the positioning guide sleeve 132 is sleeved on the outer periphery of the first positioning portion 1311, and the positioning guide sleeve 132 is transitionally matched with the first positioning portion 1311 to position the relative positions of the first mounting plate 110, the second mounting plate 120 and the positioning guide sleeve 132.

[0061] In this embodiment, the positioning pin 131 includes a first positioning portion 1311 and a second positioning portion 1314 connected to each other, and the first positioning portion 1311 is arranged closer to the first mounting plate 110 than the second positioning portion 1314, and the radial dimension of the first positioning portion 1311 is larger than the radial dimension of the second positioning portion 1314, so when the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched to achieve precise alignment, there is a gap between the positioning guide sleeve 132 and the second positioning portion 1314. Specifically, during the positioning of the first mounting plate 110 and the second mounting plate 120, firstly, the positioning guide sleeve 132 is sleeved on the outer periphery of the positioning pin 131 from one end of the second positioning portion 1314 away from the first positioning portion 1311, and when the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched, the first positioning portion 1311 and the positioning guide sleeve 132 are fully in contact, thereby achieving the accuracy and reliability of the positioning of the first mounting plate 110 and the second mounting plate 120. In this process, the radial dimension of the second positioning portion 1314 is smaller than the radial dimension of the first positioning portion 1311, so that the positioning guide sleeve 132 is conveniently sleeved on the second positioning portion 1314 and the first positioning portion 1311 in sequence, and the difficulty of positioning the positioning guide sleeve 132 and the second mounting plate 120 is reduced. Further, when the positioning guide sleeve 132 is at the outer periphery of the first positioning portion 1311 and transitionally matched with the first positioning portion 1311, the positioning guide sleeve 132 is fixedly connected to the second mounting plate 120, so that the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed; further, the distance between the first mounting plate 110 and the second mounting plate 120 is adjusted, so that the positioning guide sleeve 132 is sleeved on the outer periphery of the second positioning portion 1314, and there is a certain gap between the positioning guide sleeve 132 and the second positioning portion 1314, so that the first mounting plate 110 and the second mounting plate 120 are easily separated.

[0062] In the positioning mechanism 100 provided in the present embodiment, the position of the second mounting plate 120 is moved, and after the positioning guide sleeve 132 is transitionally matched with the first positioning portion 1311 at the periphery of the first positioning portion 1311, the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed. On the one hand, it can simplify the difficulty of stacking the second mounting plate 120 on one side of the first mounting plate 110 and installing it with multiple positioning pins 131. On the other hand, it can ensure the accuracy of positioning the positioning guide sleeve, the second mounting plate 120 and the first mounting plate 110, that is, the relative position of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction is fixed, and the freedom of changing the relative position of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction is limited, so that the positioning mechanism 100 can be suitable for positioning multiple groups of second target objects and first target objects. Further, in the subsequent positioning of multiple groups of second target objects and the first target object, by adjusting the relative position of the second mounting plate 120 and the first mounting plate 110, so that the second mounting plate 120 is sleeved on the outer periphery of the second positioning portion 1314, the relative position of the second mounting plate 120 and the positioning pin 131 in the horizontal direction remains unchanged, and the second mounting plate 120 still maintains a high positioning accuracy with the first mounting plate 110. At the same time, the positioning guide sleeve 132 and the second positioning portion 1314 are clearance-matched, which facilitates the separation of the positioning guide sleeve 132 and the second positioning portion 1314, that is, the separation of the second mounting plate 120 and the first mounting plate 110. Therefore, the positioning mechanism 100 provided in this embodiment has the characteristics of easy installation and positioning, high precision and easy separation, and can be applied to the positioning of multiple groups of second target objects and the first target object.

[0063] Optionally, the inner peripheral sidewall of the boss portion 1322 of the positioning guide sleeve 132 is a cylindrical surface, and the first positioning portion 1311 and the second positioning portion 1314 are both cylindrical. In other words, the peripheral side surface of the first positioning portion 1311 and the peripheral side surface of the second positioning portion 1314 are both cylindrical surfaces.

[0064] In this embodiment, the first positioning portion 1311 and the second positioning portion 1314 are cylinders. When the positioning guide sleeve 132 is sleeved on the outer periphery of the first positioning portion 1311 or the second positioning portion 1314, the peripheral side surface of the first positioning portion 1311 or the peripheral side surface of the second positioning portion 1314 abuts against the inner peripheral side wall of the boss portion 1322 of the positioning guide sleeve 132, and the inner peripheral side wall is a cylindrical surface, and the first positioning portion 1311 and the second positioning portion 1314 are cylinders. Then, the boss portion 1322 of the positioning guide sleeve 132 and the first positioning portion 1311 can fully fit during transitional fit, and the boss portion 1322 can also fully fit when sleeved on the outer periphery of the second positioning portion 1314, thereby improving the rigidity and stability of the positioning guide sleeve 132 and the positioning pin 131, and further improving the rigidity and stability of the first mounting plate 110 and the second mounting plate 120.

[0065] See also Fig. 9 In some embodiments, the difference between the radial dimension D1 of the first positioning portion 1311 and the radial dimension D2 of the end of the second positioning portion 1314 away from the first positioning portion 1311 is in the range of 0.02mm≤D1-D2≤0.1mm.

[0066] Specifically, the value of D1-D2 may be, but is not limited to, 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, 0.06 mm, 0.07 mm, 0.08 mm, 0.09 mm, and 0.1 mm, etc.

[0067] In this embodiment, the difference between the radial dimension D1 of the first positioning portion 1311 and the radial dimension D2 of the second positioning portion 1314 satisfies the range of 0.02mm≤D1-D2≤0.1mm, and the difference between the radial dimension of the first positioning portion 1311 and the minimum radial dimension of the second positioning portion 1314 is within a reasonable range to ensure that the positioning guide sleeve 132 has a certain amount of activity when passing through the second positioning portion 1314, so as to reduce the difficulty of assembling multiple positioning guide sleeves 132 simultaneously sleeved on multiple positioning pins 131, which is beneficial to improving the efficiency of positioning the first mounting plate 110 and the second mounting plate 120. Furthermore, when the second mounting plate 120 moves to the same height as the first positioning portion 1311, the positioning guide sleeve 132 realizes a transition fit with the first positioning portion 1311 to realize the relative positioning of the first mounting plate 110, the second mounting plate 120 and the positioning guide sleeve 132 in the horizontal direction. Furthermore, after the relative positions of the positioning guide sleeve 132 and the second mounting plate 120 are fixed, the second mounting plate 120 is moved to a height flush with the second positioning portion 1314 to achieve clearance fit between the positioning guide sleeve 132 and the second positioning portion 1314. At this time, the clearance between the positioning guide sleeve 132 and the second positioning portion 1314 is within a reasonable range, which can avoid the relative position of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction from being offset, and make the first mounting plate 110 and the second mounting plate 120 easy to separate, so that the positioning mechanism 100 has the characteristics of easy installation and positioning, high precision and easy separation, and can be used for the positioning of multiple groups of second target objects and first target objects. When the value of D1-D2 is too large, the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched, and after the first mounting plate 110, the second mounting plate 120 and the positioning guide sleeve 132 are positioned, the gap between the positioning guide sleeve 132 and the second positioning portion 1314 is large, and the relative position of the positioning guide sleeve 132 and the positioning pin 131 in the horizontal direction may be offset, thereby reducing the positioning accuracy of the positioning guide sleeve 132 and the positioning pin 131, thereby reducing the positioning accuracy of the first mounting plate 110 and the second mounting plate 120. When the value of D1-D2 is too small, the movable margin between the positioning guide sleeve 132 and the second positioning portion 1314 is too small. Since the relative positions of the multiple positioning pins 131 are fixed, in the process of the positioning guide sleeve 132 passing through the first positioning portion 1311 from the end of the second positioning portion 1314 away from the first positioning portion 1311, the resistance and difficulty of the multiple positioning guide sleeves 132 respectively passing through the multiple second positioning portions 1314 are increased, thereby reducing the efficiency of positioning the first mounting plate 110 and the second mounting plate 120.

[0068] Optionally, the difference between the inner diameter D5 of the positioning guide sleeve 132 and the radial dimension D2 of the second positioning portion 1314 is in the range of: 0.01 mm≤D5-D2≤0.05 mm.

[0069] It can be understood that when the positioning guide sleeve 132 is arranged corresponding to the second positioning portion 1314 , there is a movable gap between the positioning guide sleeve 132 and the second positioning portion 1314 .

[0070] Specifically, the value of D5-D2 may be, but is not limited to, 0.01 mm, 0.015 mm, 0.02 mm, 0.025 mm, 0.03 mm, 0.035 mm, 0.04 mm, 0.045 mm, and 0.05 mm, etc.

[0071] In this embodiment, when the difference in radial dimensions between the positioning guide sleeve 132 and the second positioning portion 1314 satisfies the range of 0.01mm≤D5-D2≤0.05mm, the difference in radial dimensions between the positioning guide sleeve 132 and the second positioning portion 1314 is small, and the positioning accuracy of the first mounting plate 110 and the second mounting plate 120 is not reduced. In addition, the movable margin between the positioning guide sleeve 132 and the second positioning portion 1314, and the movable margin between the positioning guide sleeve 132 and the second mounting plate 120 cooperate with each other, so that when the relative positions of the plurality of positioning pins 131 are determined, the difficulty of positioning the second mounting plate 120 and the first mounting plate 110 is reduced, which is conducive to improving the positioning accuracy of the first mounting plate 110 and the second mounting plate 120 while improving the positioning efficiency.

[0072] Optionally, the positioning pin 131 also includes a guide portion 1312, which is bent and connected to the second positioning portion 1314 and is arranged farther away from the first mounting plate 110 than the second positioning portion 1314. The radial dimension of the second positioning portion 1314 is greater than or equal to the radial dimension of the guide portion 1312, and the radial dimension of the guide portion 1312 gradually decreases from one end connected to the second positioning portion 1314 to an end away from the second positioning portion 1314.

[0073] It can be understood that, in a direction from the first mounting plate 110 to the second mounting plate 120 , the first positioning portion 1311 , the second positioning portion 1314 and the guiding portion 1312 are sequentially arranged.

[0074] It can be understood that the radial dimension of the guide portion 1312 gradually decreases from one end connected to the second positioning portion 1314 to the end away from the second positioning portion 1314, and the minimum radial dimension of the guide portion 1312 is the radial dimension of the end of the guide portion 1312 away from the second positioning portion 1314.

[0075] In this embodiment, the maximum radial dimension of the guide portion 1312 is smaller than the radial dimension of the first positioning portion 1311, so the guide portion 1312 has a large margin of movement in the positioning guide sleeve 132, which is convenient for the sleeve of the positioning guide sleeve 132 and reduces the difficulty of sleeve-mounting the positioning guide sleeve 132 on the outer periphery of the positioning pin 131. In addition, the positioning guide sleeve 132 passes through the guide portion 1312, the second positioning portion 1314 and the first positioning portion 1311 in sequence, and the guide portion 1312 can provide a guiding function for the positioning guide sleeve 132 to penetrate into the second positioning portion 1314, thereby preventing the positioning guide sleeve 132 from deviating during the positioning process, thereby improving the accuracy of the positioning mechanism 100 in positioning the first mounting plate 110 and the second mounting plate 120. Furthermore, in the process of separating the first mounting plate 110 and the second mounting plate 120, the positioning guide sleeve 132 disengages from the first positioning portion 1311 and the second positioning portion 1314 to the guide portion 1312, and the radial dimension of the guide portion 1312 is relatively small, which helps to reduce the resistance of the positioning guide sleeve 132 to disengage from the positioning pin 131, thereby reducing the separation resistance of the first mounting plate 110 and the second mounting plate 120.

[0076] See also Fig.10 In some embodiments, the guide portion 1312 has a central axis (eg Fig.10 (as shown by the dotted line in B), the range of the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis is: 3°≤α≤15°.

[0077] Specifically, the value of the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis can be but is not limited to 3°, 4°, 5°, 6°, 7°, 8°, 9°, 10°, 11°, 12°, 13°, 14° and 15°, etc.

[0078] It can be understood that the guide portion 1312 is a frustum.

[0079] In this embodiment, when the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis satisfies the range of 3°≤α≤15°, when the difference between the radial dimension of the second positioning portion 1314 and the radial dimension of one end of the guide portion 1312 away from the second positioning portion 1314 is determined, the length of the guide portion 1312 is within a reasonable range, so that the guide portion 1312 can guide the positioning guide sleeve 132 to penetrate into the guide portion 1312 and correspond to the second positioning portion 1314 to achieve positioning with the second positioning portion 1314; and the length of the guide portion 1312 is not too long to reduce the efficiency of positioning the positioning guide sleeve 132 and the positioning pin 131. When the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis is too large, when the positioning guide sleeve 132 is sleeved on the guide portion 1312, the inclination of the guide portion 1312 is relatively gentle, so that the positioning guide sleeve 132 still has a large resistance when being sleeved on the positioning pin 131, which reduces the efficiency of positioning the positioning guide sleeve 132 and the guide portion 1312. When the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis is too small, when the difference between the radial dimension of the second positioning portion 1314 and the radial dimension of the end of the guide portion 1312 away from the second positioning portion 1314 is determined, the length of the guide portion 1312 is too long, which also reduces the efficiency of the positioning guide sleeve 132 moving to the second positioning portion 1314 and transitionally matching with the second positioning portion 1314.

[0080] Preferably, the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis is in the range of 3°≤α≤10°.

[0081] More preferably, the value of the angle α between the outer peripheral side wall of the guide portion 1312 and the central axis is 4°.

[0082] Optionally, in some embodiments, the concentricity of the first positioning portion 1311 and the second positioning portion 1314 is less than or equal to 0.003 mm.

[0083] It can be understood that the concentricity value of the first positioning portion 1311 and the second positioning portion 1314 is less than or equal to 0.003 mm, that is, the distance between the center of the first positioning portion 1311 and the center of the second positioning portion 1314 is less than or equal to 0.003 mm.

[0084] Specifically, the concentricity values ​​of the first positioning portion 1311 and the second positioning portion 1314 may be, but are not limited to, 0 mm, 0.001 mm, 0.002 mm, 0.003 mm, etc.

[0085] In this embodiment, when the concentricity of the first positioning portion 1311 and the second positioning portion 1314 is less than or equal to 0.003 mm, the first positioning portion 1311 and the second positioning portion 1314 are coaxially arranged or the offset of the central axis of the first positioning portion 1311 and the second positioning portion 1314 is very small. When the positioning guide sleeve 132 is sleeved on the outer periphery of the positioning pin 131 from the end of the guide portion 1312 and the second positioning portion 1314 away from the first positioning portion 1311, even if there is a certain amount of play between the inner diameter of the second positioning portion 1314 and the positioning guide sleeve 132, the second positioning portion 1314 can still guide the positioning guide sleeve 132 to move to the first positioning portion 1311 and transitionally cooperate with the first positioning portion 1311, so as to achieve precise alignment between the first mounting plate 110 and the second mounting plate 120. Similarly, after the relative positions of the positioning guide sleeve 132 and the second mounting plate 120 are fixed, when the second mounting plate 120 drives the positioning guide sleeve 132 to move from the first positioning portion 1311 to the second positioning portion 1314, the relative positions of the positioning guide sleeve 132 and the positioning pin 131 in the horizontal direction remain unchanged, so that there is a movable margin between the positioning guide sleeve 132 and the second positioning portion 1314 in time, and the positioning guide sleeve 132 and the second positioning portion 1314 still have high precision, and the movable margin between the second positioning portion 1314 and the positioning guide sleeve 132 enables the positioning guide sleeve 132 to be smoothly disengaged from the second positioning portion 1314, so as to reduce the resistance to the separation of the positioning guide sleeve 132 and the positioning pin 131, and realize the smooth separation of the first mounting plate 110 and the second mounting plate 120.

[0086] See also Fig. 9 , Fig.11 and Fig.12 In some embodiments, the first mounting plate 110 has a plurality of recessed grooves 1101 spaced apart from each other facing the second mounting plate 120, a plurality of positioning pins 131 are correspondingly disposed in the plurality of recessed grooves 1101, and the positioning pins 131 have through holes 1313, the positioning assembly 130 further includes a first locking member 133, and the first locking member 133 is sequentially through the through holes 1313 and the first mounting plate 110 to install the positioning pins 131 on the first mounting plate 110.

[0087] It can be understood that one of the sink grooves 1101 is used to set one of the positioning pins 131 , and different sink grooves 1101 are used to set different positioning pins 131 .

[0088] It can be understood that the penetration hole 1313 is a through hole, and the first locking member 133 is penetrated by the penetration hole 1313 .

[0089] In this embodiment, the first mounting plate 110 has a plurality of recessed grooves 1101 arranged at intervals, and a plurality of positioning pins 131 are correspondingly arranged in the plurality of recessed grooves 1101. Compared with the solution of manually finding points and fixing the positioning pins 131 directly on the first mounting plate 110, the first mounting plate 110 of the embodiment of the present application is directly provided with recessed grooves 1101, which is conducive to improving the accuracy of positioning the positioning pins 131 on the first mounting plate 110. Furthermore, the positioning assembly 130 also includes a first locking member 133, which is sequentially penetrated through the penetration hole 1313 and the first mounting plate 110 to install the positioning pin 131 on the first mounting plate 110, thereby improving the structural stability of the positioning pin 131 set on the first mounting plate 110, and facilitating the subsequent positioning accuracy of the second mounting plate 120 and the first mounting plate 110.

[0090] Optionally, there are multiple first locking members 133 , and each of the multiple first locking members 133 corresponds to one positioning pin 131 .

[0091] Optionally, the recessed groove 1101 is transitionally matched with the positioning pin 131 .

[0092] In some embodiments, the positioning assembly 130 also includes a plurality of second locking members 134. When the positioning guide sleeve 132 can be movably inserted into the mounting hole 121 and sleeved on the outer periphery of the first positioning portion 1311, the second locking members 134 are used to lock the positioning guide sleeve 132 to the second mounting plate 120 to limit the relative position of the second mounting plate 120 and the positioning guide sleeve 132.

[0093] In this embodiment, the positioning guide sleeve 132 and the mounting hole 121 have a certain amount of movable margin. When the positioning guide sleeve 132 is sleeved on the positioning pin 131 from one end of the guide portion 1312 away from the second positioning portion 1314, and is sleeved on the outer periphery of the first positioning portion 1311, the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched, and the positioning guide sleeve 132 and the first positioning portion 1311 are precisely positioned. Furthermore, although the positioning guide sleeve 132 and the second mounting plate 120 have a certain amount of movable margin, the movable margin is small. At this time, the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed by the second locking member 134, so that the first The relative positions of the two mounting plates 120 and the positioning pins 131 are limited to limit the relative positions of the first mounting plate 110 and the second mounting plate 120, thereby improving the stability of the relative positions of the first mounting plate 110 and the second mounting plate 120, and the relative positions of the first mounting plate 110, the second mounting plate 120, the positioning pins 131 and the positioning guide sleeve 132 in the horizontal direction are limited, so that when the second mounting plate 120 is installed at the height of the second positioning portion 1314, although there is a gap between the positioning guide sleeve 132 and the second positioning portion 1314, a high positioning accuracy is still maintained and it is easy to separate, thereby improving the performance of the positioning mechanism 100.

[0094] It can be understood that when the second locking member 134 locks the positioning guide sleeve 132 to the second mounting plate 120 , the second locking member 134 is sequentially penetrated through the flange portion 1321 of the positioning guide sleeve 132 and the second mounting plate 120 .

[0095] Optionally, the positioning mechanism 100 also includes a height adjustment component 140, which is disposed between the first mounting plate 110 and the second mounting plate 120, and one end of the height adjustment component 140 facing away from the first mounting plate 110 abuts against the second mounting plate 120; along the arrangement direction of the first mounting plate 110 and the second mounting plate 120, the height of the height adjustment component 140 is adjustable to adjust the distance between the first mounting plate 110 and the second mounting plate 120.

[0096] In this embodiment, the height adjustment component 140 is arranged between the first mounting plate 110 and the second mounting plate 120, and the end of the height adjustment component 140 facing away from the first mounting plate 110 abuts against the second mounting plate 120. During the positioning process of the first mounting plate 110 and the second mounting plate 120, the height adjustment component 140 provides support for the second mounting plate 120 so that the second mounting plate 120 and the first positioning portion 1311 of the positioning pin 131 can achieve transition fit and precise positioning. Furthermore, the height of the height adjustment component 140 is adjustable. When the height of the height adjustment component 140 increases, the distance between the first mounting plate 110 and the second mounting plate 120 increases, thereby driving the second mounting plate 120 to move in a direction away from the first mounting plate 110, so that the second mounting plate 120 is set corresponding to the second positioning portion 1314, and there is a certain amount of movable margin between the second positioning portion 1314 and the positioning guide sleeve 132, so that there is a certain amount of movable margin between the second positioning portion 1314 and the second mounting plate 120. When it is necessary to separate the first mounting plate 110 and the second mounting plate 120, the separation resistance of the second mounting plate 120 and the first mounting plate 110 can be greatly reduced. In addition, due to the self-weight of the second mounting plate 120 and the self-weight of the second target object connected to the second mounting plate 120, the relative position restrictions of the plurality of positioning pins 131, and the relative position of the positioning guide sleeve 132 and the first positioning portion 1311 is fixed after the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched, and the relative position restrictions, the height adjustment component 140 adjusts the height and drives the second mounting plate 120 to move away from the first mounting plate 110, and the relative position of the second mounting plate 120 and the first mounting plate 110 in the horizontal direction remains unchanged, that is, the first mounting plate 110 and the second mounting plate 120 can maintain a high positioning accuracy. The height adjustment component 140 provided by the positioning mechanism 100 of the present application enables the positioning mechanism 100 to achieve easy separation of the first mounting plate 110 and the second mounting plate 120 while maintaining a high positioning accuracy, thereby improving the performance of the positioning mechanism 100.

[0097] Optionally, the height adjustment component 140 may be, but is not limited to, a component of various combinations of adjustment bolts, spacers, etc.

[0098] See also Figure 2 and Fig.13In some embodiments, the positioning mechanism 100 also includes a height adjustment component 140, and the height adjustment component 140 includes a first adjustment member 141 and a second adjustment member 142. The first adjustment member 141 is fixedly arranged on the surface of the first mounting plate 110 facing the second mounting plate 120, and the second adjustment member 142 is sequentially penetrated through the first adjustment member 141 and the first mounting plate 110, and the end of the second adjustment member 142 facing away from the first adjustment member 141 abuts against the second mounting plate 120. The second adjustment member 142 is threadedly connected to the first adjustment member 141 and the first mounting plate 110 respectively, and the second adjustment member 142 can rotate relative to the first adjustment member 141 to adjust the height of the second adjustment member 142, thereby adjusting the distance between the first mounting plate 110 and the second mounting plate 120.

[0099] In this embodiment, the first adjusting member 141 is fixedly arranged on the surface of the first mounting plate 110 facing the second mounting plate 120, and the second adjusting member 142 is sequentially penetrated through the first adjusting member 141 and the first mounting plate 110. During the positioning of the first mounting plate 110 and the second mounting plate 120, the end of the second adjusting member 142 away from the first adjusting member 141 always abuts against the second mounting plate 120, so that the second mounting plate 120 is set corresponding to the first positioning portion 1311 and the positioning guide sleeve 132 is transitionally matched with the first positioning portion 1311, and finally the precise positioning of the first mounting plate 110 and the second mounting plate 120 is achieved. Furthermore, the second adjusting member 142 can be rotated relative to the first adjusting member 141 to adjust the height of the second adjusting member 142, thereby adjusting the distance between the first mounting plate 110 and the second mounting plate 120. Specifically, the second adjusting member 142 moves relative to the first adjusting member 141 in a direction away from the first mounting plate 110 to increase the height of the second adjusting member 142. The end of the second adjusting member 142 away from the first adjusting member 141 always abuts against the second mounting plate 120 to drive the second mounting plate 120 to move in a direction away from the first mounting plate 110, so that the second mounting plate 120 is arranged corresponding to the position where the second positioning portion 1314 is located, and a certain amount of movable margin is provided between the second positioning portion 1314 and the positioning guide sleeve 132, so that a certain amount of movable margin is provided between the second positioning portion 1314 and the second mounting plate 120. When it is necessary to separate the first mounting plate 110 and the second mounting plate 120, the separation resistance of the second mounting plate 120 and the first mounting plate 110 can be greatly reduced. In addition, due to the weight of the second mounting plate 120 and the weight of the second target object connected to the second mounting plate 120, the relative position restrictions of the plurality of positioning pins 131, and the positioning guide sleeve 132 and the first positioning portion 1311 are fixed after the transition fit is achieved, when the second adjustment member 142 moves in a direction away from the first mounting plate 110 relative to the first adjustment member 141, the relative positions of the second mounting plate 120 and the first mounting plate 110 in the horizontal direction remain unchanged, that is, the first mounting plate 110 and the second mounting plate 120 can maintain a high positioning accuracy. The positioning mechanism 100 of the present application realizes the easy separation of the first mounting plate 110 and the second mounting plate 120 while maintaining a high positioning accuracy, thereby improving the performance of the positioning mechanism 100.

[0100] It can be understood that the positioning mechanism 100 provided in the present application is applicable to the positioning method provided in the present application.

[0101] See also Fig.14 The present application also provides a positioning method, the positioning method comprising:

[0102] S101 , forming a first installation assembly, wherein the first installation assembly includes a first installation plate 110 and a plurality of positioning pins 131 , wherein the plurality of positioning pins 131 are spaced apart and arranged on one side of the first installation plate 110 .

[0103] S102 , forming a second mounting assembly, wherein the second mounting assembly includes a second mounting plate 120 and a plurality of positioning guide sleeves 132 , wherein the second mounting plate 120 has a plurality of mounting holes 121 arranged at intervals, and the plurality of positioning guide sleeves 132 can be detachably arranged in the plurality of mounting holes 121 .

[0104] S103 , stacking the second mounting plate 120 on the side of the first mounting plate 110 having the plurality of positioning pins 131 , and making the plurality of positioning pins 131 pass through the plurality of mounting holes 121 in a one-to-one correspondence.

[0105] S104, the plurality of positioning guide sleeves 132 are correspondingly inserted into the plurality of mounting holes 121 and sleeved on the outer circumference of the plurality of positioning pins 131, and the plurality of positioning guide sleeves 132 are fixed to the second mounting plate 120, so that the first mounting plate 110 and the second mounting plate 120 have a first relative position.

[0106] In the positioning method provided in this embodiment, the positioning pins 131 are arranged at intervals on one side of the first mounting plate 110, and the positioning guide sleeves 132 can be detachably arranged in the multiple mounting holes 121. During the positioning of the first mounting plate 110 and the second mounting plate 120, the positioning guide sleeves 132 are first penetrated into the mounting holes 121. The outer diameter of the positioning guide sleeves 132 is smaller than the radial dimension of the mounting holes 121, so that there is a movable margin between the positioning guide sleeves 132 and the mounting holes 121, which facilitates the positioning guide sleeves 132 to be sleeved on the outer periphery of the positioning pins 131 while being penetrated into the mounting holes 121. The positioning method can reduce the resistance of the positioning guide sleeves 132 and the positioning pins 131 to positioning, which is beneficial to improving the efficiency of positioning the first mounting plate 110 and the second mounting plate 120. When the first mounting plate 110 and the second mounting plate 120 have a first relative position, the positioning guide sleeve 132 is fixed to the second mounting plate 120. At this time, the second mounting plate 120 and the positioning guide sleeve 132 are arranged corresponding to the part of the positioning pin 131 with the maximum radial dimension. The positioning guide sleeve 132 of the second mounting plate 120 and the positioning pin 131 are transitionally matched, and the positioning guide sleeve 132 and the positioning pin 131 are accurately positioned, that is, the positioning of the second mounting plate 120 and the first mounting plate 110 is achieved. The positioning method has a high positioning accuracy. In addition, each of the positioning pins 131 is transitionally matched with the positioning guide sleeve 132 and is in full contact, which improves the structural rigidity and reliability of the positioning of the first mounting plate 110 and the second mounting plate 120.

[0107] It can be understood that when the first mounting plate 110 and the second mounting plate 120 are in the first relative position, the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed, that is, the relative position of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction is fixed, and the freedom of the relative position change of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction is limited, so that the positioning mechanism 100 can be applied to the positioning of multiple groups of second target objects and the first target object. Specifically, when it is necessary to replace a different second target object, it is only necessary to connect the second mounting plate 120 with the different second target object, and there is no need to calibrate the relative position of the positioning guide sleeve 132 and the second mounting plate 120, so as to improve the efficiency of replacing different second target objects and positioning.

[0108] In some embodiments, the positioning pin 131 includes a first positioning portion 1311, a second positioning portion 1314 and a guide portion 1312 connected to each other, the first positioning portion 1311 is arranged closer to the first mounting plate 110 than the second positioning portion 1314, the second positioning portion 1314 is arranged closer to the first mounting plate 110 than the guide portion 1312, the radial dimension of the first positioning portion 1311 is greater than the radial dimension of the second positioning portion 1314, the radial dimension of the second positioning portion 1314 is greater than or equal to the radial dimension of the guide portion 1312, and the radial dimension of the guide portion 1312 gradually decreases from the end connected to the second positioning portion 1314 to the end away from the second positioning portion 1314; the first mounting assembly The component also includes a plurality of height adjustment components 140, and the plurality of height adjustment components 140 and the plurality of positioning pins 131 are arranged on the same side of the first mounting plate 110, and the plurality of height adjustment components 140 are arranged at intervals, and the height adjustment component 140 includes a first adjustment component 141 and a second adjustment component 142, the first adjustment component 141 is fixedly arranged on the surface of the first mounting plate 110 facing the second mounting plate 120, the second adjustment component 142 is sequentially penetrated through the first adjustment component 141 and the first mounting plate 110, the end of the second adjustment component 142 facing away from the first adjustment component 141 abuts against the second mounting plate 120, and the second adjustment component 142 is threadedly connected to the first adjustment component 141 and the first mounting plate 110, respectively.

[0109] The positioning method also includes: moving the second adjusting member 142 in a direction away from the first adjusting member 141 to push the second mounting plate 120 to move in a direction away from the first mounting plate 110, so that the second mounting plate 120 is set corresponding to the second positioning portion 1314, so that the first mounting plate 110 and the second mounting plate 120 have a second relative position.

[0110] In the positioning method provided in this embodiment, the positioning guide sleeve 132 can be movably inserted into the mounting hole 121 of the second mounting plate 120. In the process in which the positioning guide sleeve 132 is sleeved from the guide portion 1312 and the second positioning portion 1314 to the outer periphery of the first positioning portion 1311, there is a movable margin between the positioning guide sleeve 132 and the mounting hole 121, and there is a movable margin between the positioning guide sleeve 132 and the guide portion 1312. The guide portion 1312 can guide the positioning guide sleeve 132 to be sleeved, and the positioning guide sleeve 132 can be sleeved to allow the positioning guide sleeve 132 to be sleeved. The positioning guide sleeve 132 is finally sleeved on the first positioning portion 1311, and the positioning guide sleeve 132 and the first positioning portion 1311 are transitionally matched, thereby achieving precise positioning of the positioning guide sleeve 132 and the first positioning portion 1311; further, the positioning guide sleeve 132 is fixed to the second mounting plate 120, thereby achieving precise positioning of the second mounting plate 120 and the first positioning portion 1311, that is, achieving precise positioning of the first mounting plate 110 and the second mounting plate 120 in the horizontal direction.

[0111] Furthermore, the first mounting assembly further includes a height adjustment assembly 140, the height adjustment assembly 140 includes a first adjustment member 141 and a second adjustment member 142, the second adjustment member 142 moves relative to the first adjustment member 141 in a direction away from the first mounting plate 110 to increase the height of the second adjustment member 142, and the end of the second adjustment member 142 away from the first adjustment member 141 always abuts against the second mounting plate 120 to drive the first mounting plate 110 to move in a direction away from the second mounting plate 120 and away from the first mounting plate 110, so that the first mounting plate 110 is The mounting plate 110 and the second mounting plate 120 have a second relative position, at which the second mounting plate 120 is arranged corresponding to the second positioning portion 1314, and a certain amount of free space is provided between the second positioning portion 1314 and the positioning guide sleeve 132, so that a certain amount of free space is provided between the second positioning portion 1314 and the second mounting plate 120. When the first mounting plate 110 and the second mounting plate 120 need to be separated, the separation resistance of the second mounting plate 120 and the first mounting plate 110 can be greatly reduced, so that the first mounting plate 110 and the second mounting plate 120 can be separated. In addition, due to the self-weight of the second mounting plate 120 and the self-weight of the second target object connected to the second mounting plate 120, as well as the relative position restrictions of the plurality of positioning pins 131, when the second adjusting member 142 moves in a direction away from the first mounting plate 110 relative to the first adjusting member 141, the relative position of the second mounting plate 120 and the first mounting plate 110 in the horizontal direction remains unchanged, that is, the first mounting plate 110 and the second mounting plate 120 can maintain a high positioning accuracy. The positioning method provided in the present application has high positioning accuracy, and the second mounting plate 120 is easily installed on one side of the first mounting plate 110 and positioned with the positioning pin 131, while also achieving easy separation of the first mounting plate 110 and the second mounting plate 120.

[0112] In some embodiments, the first mounting assembly also includes a first locking member 133, the first mounting plate 110 has a plurality of recessed grooves 1101 spaced apart from each other facing the second mounting plate 120, the positioning pins 131 have through holes 1313, and the plurality of positioning pins 131 spaced apart on one side of the first mounting plate 110 include: respectively arranging the plurality of positioning pins 131 in the plurality of recessed grooves 1101; and sequentially through the through holes 1313 of the positioning pins 131 and the first mounting plate 110, so as to space the plurality of positioning pins 131 apart on one side of the first mounting plate 110.

[0113] In the positioning method provided in this embodiment, the first mounting plate 110 is provided with a plurality of recessed grooves 1101, and the plurality of positioning pins 131 are respectively provided in the plurality of recessed grooves 1101, and the recessed grooves 1101 provide positioning indications for the installation of the plurality of positioning pins 131, so as to prevent the positioning pins 131 from being offset during the installation process on the first mounting plate 110 and reduce the installation accuracy of the positioning pins 131 on the first mounting plate 110. Further, the first locking member 133 is sequentially penetrated through the positioning pins 131 and the first mounting plate 110 to fix the relative positions of the positioning pins 131 and the first mounting plate 110, so as to prevent the positioning pins 131 from being offset during the positioning process on the first mounting plate 110 and the second mounting plate 120, and the positioning method has a high accuracy in positioning the first mounting plate 110 and the second mounting plate 120.

[0114] See also Fig.15 The present application provides a wafer inspection device 200, which includes: a positioning mechanism 100, a probe card 210, a test bench panel 220 and a test machine 230 provided in the present application, wherein the first mounting plate 110 is fixedly arranged on the test bench panel 220, and the test bench panel 220 is used to carry the probe card 210; the second mounting plate 120 is fixedly connected to the test machine 230, and the test machine 230 is used to realize electrical connection with the probe card 210; the positioning mechanism 100 is used to locate the relative position of the test bench panel 220 and the test machine 230.

[0115] It can be understood that when the positioning mechanism 100 is applied to the wafer inspection device 200, the first mounting plate 110 is fixedly set on the test bench panel 220, and the test bench panel 220 is the first target object; the second mounting plate 120 is fixedly connected to the test machine 230, and the test machine 230 is the second target object.

[0116] It can be understood that when the second mounting plate 120 is fixedly connected to the testing machine 230 , the second mounting plate 120 is disposed around the periphery of the testing machine 230 and is fixedly connected to the testing machine 230 .

[0117] In this embodiment, the first mounting plate 110 of the positioning mechanism 100 is connected to the test bench panel 220, and the second mounting plate 120 is connected to the test machine 230. The multiple groups of the positioning components 130 of the positioning mechanism 100 can realize the precise positioning of the first mounting plate 110 and the second mounting plate 120, so as to facilitate the precise positioning of the test machine 230 and the test bench panel 220. When the probe card 210 is carried on the test bench panel 220, it is conducive to the precise positioning of the test machine 230 and the probe card 210, and then the electrical connection between the test machine 230 and the probe card 210 is realized to avoid affecting the working process of the probe card 210. Further, the positioning mechanism 100 can also realize that the first mounting plate 110 and the second mounting plate 120 are easy to separate. In order to meet different test requirements, when the test bench panel 220 needs to adapt to different test machines 230, the test machine 230 and the test bench panel 220 can be quickly separated to avoid affecting the working efficiency of the probe card 210.

[0118] It can be understood that when the test bench panel 220 needs to adapt to different test machines 230, the positioning guide sleeve 132 and the first positioning portion 1311 are first transitionally matched to achieve precise alignment of the positioning guide sleeve 132 and the positioning pin 131. At this time, the relative position of the positioning guide sleeve 132 and the second mounting plate 120 is fixed. When a different test machine 230 needs to be replaced, it is only necessary to connect the second mounting plate 120 to the different test machine 230, and there is no need to calibrate the relative position of the positioning guide sleeve 132 and the second mounting plate 120, so as to improve the efficiency of replacing different test machines 230 and positioning, so that the positioning mechanism 100 can be suitable for positioning multiple groups of test machines 230 and the test bench panel 220. When the relative positions of the positioning guide sleeve 132 and the second mounting plate 120 are fixed, the relative positions of the positioning guide sleeve 132 and the positioning pin 131 in the horizontal direction are fixed. During the positioning of the test machine 230 and the test bench panel 220, it is only necessary to move the second mounting plate 120 to the height where the second positioning portion 1314 is located. The positioning guide sleeve 132 and the second positioning portion 1314 are clearance-matched, so that the positioning guide sleeve 132 and the positioning pin 131 are easily separated, thereby achieving easy separation of the first mounting plate 110 and the second mounting plate 120.

[0119] Optionally, the wafer inspection device 200 also includes a chuck (not shown in the figure), which is arranged on the side of the test table panel 220 away from the test machine 230, and the chuck is used to carry the wafer to be inspected. The tip of the probe card 210 away from the test machine 230 makes physical contact with the wafer to be inspected to achieve inspection of the wafer to be inspected.

[0120] It can be understood that the test bench panel 220 is used to carry the probe card 210. When the probe card 210 is carried on the test bench panel 220, the test bench panel 220 has a setting hole that passes through two opposite surfaces of the test bench panel 220, which is used to set the probe card 210. The side of the probe card 210 facing the test machine 230 is electrically connected to the test machine 230, and the tip of the probe card 210 faces the side away from the test machine 230 and is in physical contact with the chuck.

[0121] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, if there is no contradiction between them.

[0122] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A positioning mechanism, characterized in that: The positioning mechanism comprises: a first mounting plate; a second mounting plate, the second mounting plate being disposed on one side of the first mounting plate, the second mounting plate having a plurality of mounting holes; and A plurality of positioning components; the positioning components include positioning pins and positioning guide sleeves, the plurality of positioning pins of the plurality of positioning components are arranged at intervals on the side of the first mounting plate facing the second mounting plate and are arranged around the outer periphery of the second mounting plate, the plurality of positioning pins are arranged one-to-one with the plurality of mounting holes, the positioning guide sleeve can be detachably arranged on the second mounting plate, the positioning guide sleeve is used to be sleeved on the outer periphery of the positioning pins and transitionally cooperate with the positioning pins to achieve the alignment of the first mounting plate and the second mounting plate, the maximum radial dimension of the positioning pin is less than or equal to the inner diameter of the positioning guide sleeve; the outer diameter of the positioning guide sleeve is less than the radial dimension of the mounting hole; the positioning pin includes a first positioning portion and a second positioning portion connected to each other, the first positioning portion is arranged closer to the first mounting plate than the second positioning portion, and the radial dimension of the first positioning portion is greater than the radial dimension of the second positioning portion; when the positioning pin cooperates with the positioning guide sleeve to position the first mounting plate and the second mounting plate, the positioning guide sleeve is sleeved on the outer periphery of the first positioning portion, and the positioning guide sleeve transitionally cooperates with the first positioning portion to position the relative positions of the first mounting plate, the second mounting plate and the positioning guide sleeve; The positioning mechanism also includes a height adjustment component, which is arranged between the first mounting plate and the second mounting plate and is used to adjust the distance between the first mounting plate and the second mounting plate; when the relative position of the positioning guide sleeve and the second mounting plate is fixed, the height adjustment component adjusts the distance between the first mounting plate and the second mounting plate so that the second mounting plate is sleeved on the outer periphery of the second positioning portion.

2. The positioning mechanism according to claim 1, characterized in that: The difference between the radial dimension D1 of the first positioning portion and the radial dimension D2 of the second positioning portion is in the range of 0.02 mm ≤ D1 - D2 ≤ 0.1 mm.

3. The positioning mechanism according to claim 1, characterized in that: The positioning pin also includes a guide portion, which is bent and connected to the second positioning portion and is arranged farther away from the first mounting plate than the second positioning portion. The radial dimension of the second positioning portion is greater than or equal to the radial dimension of the guide portion, and the radial dimension of the guide portion gradually decreases from one end connected to the second positioning portion to an end away from the second positioning portion.

4. The positioning mechanism according to claim 3, characterized in that: The guide portion has a central axis, and the range of an angle α between an outer peripheral side wall of the guide portion and the central axis is: 3°≤α≤15°.

5. The positioning mechanism according to claim 1, characterized in that: The first mounting plate has a plurality of recessed grooves spaced apart from each other facing the second mounting plate, a plurality of positioning pins are correspondingly arranged in the plurality of recessed grooves, and the positioning pins have through holes. The positioning assembly also includes a first locking member, which is sequentially through the through holes and the first mounting plate to install the positioning pins on the first mounting plate.

6. The positioning mechanism according to claim 1, characterized in that: The positioning assembly also includes a plurality of second locking members. When the positioning guide sleeve can be movably inserted into the mounting hole and sleeved on the outer periphery of the first positioning portion, the second locking members are used to lock the positioning guide sleeve to the second mounting plate to limit the relative position of the second mounting plate and the positioning guide sleeve.

7. The positioning mechanism according to claim 6, characterized in that: The positioning guide sleeve includes a connected flange portion and a boss portion, the flange portion presses against the surface of the second mounting plate away from the first mounting plate, the boss portion can be movably inserted into the mounting hole and the boss portion is sleeved on the outer periphery of the positioning pin; the aperture of the mounting hole is D3, and the outer diameter of the boss portion is D4, then the relationship is satisfied: 0.4mm≤D3-D4≤0.6mm.

8. The positioning mechanism according to claim 1, characterized in that: The height adjustment assembly includes a first adjusting member and a second adjusting member, the first adjusting member is fixedly arranged on the surface of the first mounting plate facing the second mounting plate, the second adjusting member is sequentially penetrated through the first adjusting member and the first mounting plate, one end of the second adjusting member facing away from the first adjusting member abuts against the second mounting plate, the second adjusting member is threadedly connected to the first adjusting member and the first mounting plate respectively, and the second adjusting member can rotate relative to the first adjusting member to adjust the height of the second adjusting member, thereby adjusting the distance between the first mounting plate and the second mounting plate.

9. A positioning method, characterized in that: The positioning method comprises: A first mounting assembly is formed, so that the first mounting assembly includes a first mounting plate and a plurality of positioning pins, and the plurality of positioning pins are arranged at intervals on one side of the first mounting plate; the positioning pin includes a first positioning portion, a second positioning portion and a guide portion that are connected to each other, the first positioning portion is arranged closer to the first mounting plate than the second positioning portion, the second positioning portion is arranged closer to the first mounting plate than the guide portion, the radial dimension of the first positioning portion is greater than the radial dimension of the second positioning portion, the radial dimension of the second positioning portion is greater than or equal to the radial dimension of the guide portion, and the radial dimension of the guide portion gradually decreases from an end connected to the second positioning portion to an end away from the second positioning portion; the first mounting assembly also includes a plurality of height adjustment assemblies, the plurality of height adjustment assemblies and the plurality of positioning pins are arranged on the same side of the first mounting plate, and the plurality of height adjustment assemblies are arranged at intervals; Forming a second mounting assembly, so that the second mounting assembly includes a second mounting plate and a plurality of positioning guide sleeves, the second mounting plate has a plurality of mounting holes arranged at intervals, and the plurality of positioning guide sleeves can be detachably arranged in the plurality of mounting holes; The second mounting plate is stacked on the side of the first mounting plate having the plurality of positioning pins, and the plurality of positioning pins are passed through the plurality of mounting holes in a one-to-one correspondence; The plurality of positioning guide sleeves are respectively inserted into the plurality of mounting holes and sleeved on the outer peripheries of the plurality of positioning pins, the positioning guide sleeves are sleeved on the outer periphery of the first positioning portion, and the plurality of positioning guide sleeves are fixed to the second mounting plate, so that the first mounting plate and the second mounting plate have a first relative position; and The height adjustment assembly adjusts the distance between the first mounting plate and the second mounting plate so that the second mounting plate is arranged corresponding to the second positioning portion, so that the first mounting plate and the second mounting plate have a second relative position.

10. The positioning method according to claim 9, characterized in that: The height adjustment assembly includes a first adjustment member and a second adjustment member, wherein the first adjustment member is fixedly arranged on a surface of the first mounting plate facing the second mounting plate, the second adjustment member is sequentially passed through the first adjustment member and the first mounting plate, an end of the second adjustment member facing away from the first adjustment member abuts against the second mounting plate, and the second adjustment member is threadedly connected to the first adjustment member and the first mounting plate respectively; The positioning method further comprises: The second adjusting member is moved in a direction away from the first adjusting member to push the second mounting plate to move in a direction away from the first mounting plate, so that the second mounting plate is arranged corresponding to the second positioning portion, so that the first mounting plate and the second mounting plate have a second relative position.

11. The positioning method according to claim 10, characterized in that: The first mounting assembly further includes a first locking member, the first mounting plate has a plurality of recessed grooves spaced apart from each other facing the second mounting plate, the positioning pins have through holes, and the plurality of positioning pins spaced apart on one side of the first mounting plate include: Disposing the plurality of positioning pins in the plurality of sinks respectively; and The first locking member is sequentially inserted into the insertion hole of the positioning pin and the first mounting plate, so that the plurality of positioning pins are spaced apart and arranged on one side of the first mounting plate.

12. A wafer inspection device, characterized in that: The wafer detection device comprises: The positioning mechanism according to any one of claims 1 to 8; Probe card; a test bench panel, the first mounting plate being fixedly disposed on the test bench panel, the test bench panel being used to carry a probe card; and The second mounting plate is fixedly connected to the tester, and the tester is used to realize electrical connection with the probe card; the positioning mechanism is used to align the relative position of the test bench panel and the tester.

Images