Helium balance recovery leak detection system and control method

Abstract

The embodiment of the invention provides a leak detection system for helium balance recovery and a control method, and belongs to the technical field of helium recovery. According to the method, a filling gun, a recycling gun, a helium supply mechanism, a recycling pipeline and a balance pipeline are included. The output end of the balance pipeline communicates with the recycling end of the helium supply mechanism, the input end of the balance pipeline communicates with the filling gun and the recycling gun, and the balance pipeline is used for remaining pipeline helium and recycling first helium; the output end of the recycling pipeline communicates with the recycling end of the helium supply mechanism, the input end of the recycling pipeline communicates with the filling gun and the recycling gun, and the recycling pipeline is used for recycling pipeline helium and recycling second helium; wherein the first helium gas and the second helium gas form workpiece helium gas. The balance pipeline and the recovery pipeline are cooperatively regulated and controlled, workpiece helium is recovered step by step, meanwhile, pipeline helium is recovered, the pressure balance of the system is maintained, the system is prevented from being damaged, the helium leakage risk is reduced, and therefore the operation safety of the leakage detection system is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of helium recovery, and in particular to a leak detection system and a control method for balanced helium recovery. Background Art

[0002] In the prior art, nitrogen and helium are generally used to detect leaks in heat pump units in air conditioning systems. The process is: first, nitrogen is used to perform a large leak tightness test, then helium is filled in for a helium mass spectrometer leak tightness test, and finally the helium is recycled.

[0003] However, in this process, since the system will detect different workpieces, there will be certain differences between the pressure parameters of the detected workpieces or the pressure parameters of the helium recovered workpieces and the set pressure parameters of the equipment, which may affect the regulation of the pressure balance during the system filling process and the recovery process, and cause pipeline gas pressure imbalance, damage the system or the detected workpiece, and even cause safety hazards. Summary of the invention

[0004] The main purpose of the embodiments of the present application is to propose a leak detection system and control method for helium balance recovery, so as to maintain the pressure balance of each pipeline in the system, prevent damage to the system or the workpiece being detected, and improve the safety of the operation of the leak detection system.

[0005] To achieve the above-mentioned purpose, one aspect of an embodiment of the present application provides a helium balance recovery leak detection system, including: a filling gun, a recovery gun, a helium supply mechanism, a recovery pipeline and a balance pipeline;

[0006] The recovery gun is in communication with the recovery workpiece, and the recovery workpiece contains workpiece helium;

[0007] The helium supply mechanism is in communication with the filling gun, the filling gun is in communication with the inspected workpiece, and the helium supply mechanism is used to supply filling helium to the inspected workpiece through the filling gun;

[0008] The output end of the balancing pipeline is communicated with the recovery end of the helium supply mechanism, and the input end of the balancing pipeline is communicated with the filling gun and the recovery gun respectively, and the balancing pipeline is used to recover the pipeline helium retained in the helium supply mechanism and recover the first helium;

[0009] The output end of the recovery pipeline is communicated with the recovery end of the helium supply mechanism, and the input end of the recovery pipeline is communicated with the filling gun and the recovery gun respectively, and the recovery pipeline is used to recover the pipeline helium and the second helium;

[0010] Wherein, the first helium gas and the second helium gas form the workpiece helium gas.

[0011] In some embodiments, a helium balance recovery leak detection system further includes: a first detection module;

[0012] The first detection module is disposed on the recovery gun, and is used to detect the workpiece pressure of the workpiece helium output and the output pressure of the second helium output.

[0013] In some embodiments, the helium supply mechanism includes: a helium tank, a regulating assembly, a supply pipeline, and a second detection module;

[0014] The input end of the regulating component is communicated with the helium tank, the recovery end of the regulating component is communicated with the output end of the balancing pipeline and the output end of the recovery pipeline respectively, the output end of the regulating component is communicated with the supply pipeline, the supply pipeline is communicated with the filling gun, and the second detection module is arranged on the regulating component;

[0015] The regulating component is used to regulate the filling pressure of the helium gas, and the second detection module is used to detect the filling pressure and a first recovery pressure at the recovery end of the regulating component.

[0016] In some embodiments, the recovery pipeline includes: a third detection module, a first recovery branch pipe, a second recovery branch pipe, a recovery main pipe, a recovery valve and a recovery pump valve assembly;

[0017] The input end of the first recovery branch pipe is communicated with the filling gun, the first recovery branch pipe is provided with the recovery valve, the input end of the second recovery branch pipe is communicated with the recovery gun, the second recovery branch pipe is provided with the recovery pump valve assembly, the input end of the recovery main pipe is communicated with the first recovery branch pipe and the second recovery branch pipe respectively, the output end of the recovery main pipe is communicated with the recovery end of the helium supply mechanism, and the third detection module is arranged on the recovery main pipe;

[0018] The first recovery branch is used to recover the pipeline helium through the recovery valve, the second recovery branch is used to recover the second helium through the recovery pump valve assembly, and the third detection module is used to detect current recovery parameters.

[0019] In some embodiments, the balancing pipeline includes: a first balancing valve, a second balancing valve, a first balancing branch pipe, a second balancing branch pipe and a balancing main pipe;

[0020] The input end of the first balancing branch pipe is communicated with the filling gun, the first balancing branch pipe is provided with the first balancing valve, the input end of the second balancing branch pipe is communicated with the recovery gun, the second balancing branch pipe is provided with the second balancing valve, the input end of the balancing main pipe is communicated with the first balancing branch pipe and the second balancing branch pipe respectively, and the output end of the balancing main pipe is communicated with the recovery end of the helium supply mechanism;

[0021] The first balancing branch pipe is used to recover the pipeline helium through the first balancing valve, and the second balancing branch pipe is used to recover the first helium through the second balancing valve.

[0022] In some embodiments, a helium balance recovery leak detection system further includes: a nitrogen supply mechanism and a vacuum pipeline;

[0023] The nitrogen supply mechanism is in communication with the filling gun, and the nitrogen supply mechanism is used to supply filling nitrogen to the filling gun;

[0024] The vacuum pipeline is connected to the filling gun, and the vacuum pipeline is used to vacuum the inspected workpiece.

[0025] Another aspect of the present invention provides a method for controlling a helium balance recovery leak detection system, which is applied to a helium balance recovery leak detection system provided by an embodiment of the present invention, and the method includes:

[0026] When the inspected workpiece is completely filled with helium, it responds to the recovery instruction, controls the balance pipeline and the recovery pipeline, and recovers the pipeline helium retained in the helium supply mechanism at the same time;

[0027] Acquire a workpiece pressure of the workpiece helium output in the recovered workpiece and a first recovery pressure at the recovery end of the helium supply mechanism, and determine the first helium required to be recovered by the balancing pipeline according to the first recovery pressure and the workpiece pressure;

[0028] Controlling the balance pipeline to recycle the first helium gas, and obtaining the current recovery parameter in the recovery pipeline and the output pressure of the remaining second helium gas output; wherein the first helium gas and the second helium gas form the workpiece helium gas;

[0029] determining, according to the current recovery parameter and the output pressure, whether the recovery pipeline can recover the second helium;

[0030] If so, the recovery pipeline is adjusted to recover the second helium gas.

[0031] In some embodiments, before the helium filling of the inspected workpiece is completed, the method further includes:

[0032] Obtaining the filling pressure of helium and the required pressure of the inspected workpiece, and determining the balancing time according to the filling pressure and the required pressure;

[0033] According to the balancing time, the helium supply mechanism and the filling gun are regulated, the filling time is adjusted, and the filling helium is supplied to the inspected workpiece until the helium pressure in the inspected workpiece reaches the set pressure.

[0034] In some embodiments, the current recovery parameter includes: a second recovery pressure on the recovery pipeline.

[0035] In some embodiments, judging whether the recovery pipeline can recover the second helium according to the current recovery parameter and the output pressure specifically includes:

[0036] Calculating the difference between the second recovery pressure and the output pressure to obtain a recovery pressure difference, and determining whether the recovery pressure difference is greater than a set recovery pressure limit;

[0037] If so, it is considered that the recovery pipeline cannot recover the second helium, and the first helium is determined again to adjust the balance pipeline.

[0038] The embodiments of the present application include at least the following beneficial effects: by setting up a balancing pipeline, the balancing pipeline and the recovery pipeline are coordinated and regulated, so that the workpiece helium that can be recycled and the pipeline helium retained in the helium supply mechanism are coordinated and recovered, and by step-by-step recovery of the workpiece helium containing a certain pressure, the additional pressurization generated on the system when the workpiece is output is alleviated, the pressure balance of the recovery pipeline and the helium supply mechanism and other equipment is maintained to prevent system damage, and the pipeline helium is recovered at the same time, the pressure balance of the recovery pipeline is maintained while reducing the risk of helium leakage that may occur during operation, thereby improving the safety of the leak detection system operation and saving resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a partial structural schematic diagram of a helium balance recovery leak detection system provided by one embodiment of the present invention;

[0040] Figure 2 It is a schematic diagram of the framework structure of a helium balance recovery leak detection system provided by one embodiment of the present invention;

[0041] Figure 3 The present invention is a flowchart of a control method for a helium balance recovery leak detection system provided in one embodiment of the present invention. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the embodiments of the present application. They are only examples of devices and methods consistent with some aspects of the embodiments of the present application as detailed in the attached claims.

[0043] It is understood that the terms "first", "second", etc. used in this application can be used to describe various concepts in this article, but unless otherwise specified, these concepts are not limited by these terms. These terms are only used to distinguish one concept from another concept. For example, without departing from the scope of the embodiment of the present application, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Depending on the context, the words "if" and "if" as used herein can be interpreted as "at the time of" or "when" or "in response to determination".

[0044] The terms "at least one", "multiple", "each", "any", etc. used in this application, at least one includes one, two or more, multiple includes two or more, each refers to each of the corresponding multiple, and any refers to any one of the multiple.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein are only for the purpose of describing the embodiments of this application and are not intended to limit this application.

[0046] During the leak detection process of the heat pump unit in the air-conditioning system, since the system will detect different workpieces, there will be certain differences between the pressure parameters of the detected workpieces and the set pressure parameters of the equipment, which may affect the adjustment of the system's pressure balance and cause pipeline air pressure imbalance, damage the system or the detected workpiece, and even cause safety hazards.

[0047] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, a helium balance recovery leak detection system includes: a filling gun 100, a recovery gun 200, a helium supply mechanism 300, a recovery pipeline 400, a balance pipeline 500, a nitrogen supply mechanism 600 and a vacuum pipeline 700.

[0048] At least two filling guns 100 and at least two recovery guns 200 are provided, which can be understood as at least two filling stations and at least two recovery stations are provided in the system.

[0049] The nitrogen supply mechanism 600 is connected to the filling gun 100, and the nitrogen supply mechanism 600 outputs filling nitrogen, and the filling nitrogen is injected into the interior of the inspected workpiece through the filling gun 100. The filling nitrogen is high-pressure nitrogen.

[0050] In one embodiment, after the inspected workpiece is connected to the filling gun 100, the nitrogen supply mechanism 600 is driven to operate in response to a start instruction, and the filling nitrogen is injected into the interior of the inspected workpiece through the filling gun 100. The pressure detector detects the current pressure. When the nitrogen pressure of the inspected workpiece reaches the set nitrogen pressure value, the nitrogen supply mechanism 600 stops running, and the pressure of the inspected workpiece is maintained. According to the pressure change before and after the pressure maintenance, the pressure change value is calculated, and according to the pressure change value, it is determined whether the inspected workpiece is leaking.

[0051] The vacuum line 700 is connected to the filling gun 100. When it is determined that the inspected workpiece has no leakage, the vacuum line 700 vacuums the inspected workpiece.

[0052] In one embodiment, when it is determined that the inspected workpiece has no leakage, the vacuum pipeline 700 is driven to operate to evacuate the nitrogen in the inspected workpiece. When the pressure reaches the set evacuation pressure value, the vacuum pipeline 700 evacuates the inspected workpiece until the vacuum degree of the inspected workpiece reaches the set vacuum degree, and the vacuum pipeline 700 stops operating.

[0053] The inspected workpiece is connected to the filling gun 100, which is connected to the helium supply mechanism 300. The helium supply mechanism 300 outputs filling helium, which is injected into the interior of the inspected workpiece through the filling gun 100. The filling helium is high-pressure helium.

[0054] In one embodiment, when the vacuum degree of the inspected workpiece reaches a set vacuum degree, the helium supply mechanism 300 operates to inject helium into the inspected workpiece through the filling gun 100 until the helium pressure in the inspected workpiece reaches the set pressure, thereby completing the helium filling of the inspected workpiece.

[0055] The input end of the recovery pipeline 400 is connected to the filling gun 100, and the output end of the recovery pipeline 400 is connected to the recovery end of the helium supply mechanism 300. The recovery pipeline 400 can recover the helium trapped in the pipeline of the helium supply mechanism 300 through the filling gun 100, that is, recover the pipeline helium.

[0056] The input end of the balancing pipeline 500 is connected to the filling gun 100, and the output end of the balancing pipeline 500 is connected to the recovery end of the helium supply mechanism 300. The balancing pipeline 500 can recover the helium trapped in the pipeline of the helium supply mechanism 300 through the filling gun 100, that is, recover the pipeline helium.

[0057] In one embodiment, since the helium retained in the helium supply mechanism 300 is all high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the helium filling of the inspected workpiece is completed, the recovery command is responded to, and the recovery pipeline 400 and the balance pipeline 500 are operated at the same time to recover the pipeline helium retained in the helium supply mechanism 300 and recycle it to the helium supply mechanism 300, so as to maintain the pressure balance among the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to recycle and save resources.

[0058] The recovery gun 200 is connected to the recovered workpiece, and the recovered workpiece stores workpiece helium, wherein the workpiece helium is high-pressure helium; according to the step-by-step recovery of the corresponding pipeline, the workpiece helium can be divided into the first helium and the second helium.

[0059] The input end of the balancing pipeline 500 is connected to the filling gun 100, and the output end of the balancing pipeline 500 is connected to the recovery end of the helium supply mechanism 300. The balancing pipeline 500 can recover part of the workpiece helium in advance through the recovery gun 200, that is, recover the first helium.

[0060] The input end of the recovery pipeline 400 is connected to the recovery gun 200, and the output end of the recovery pipeline 400 is connected to the recovery end of the helium supply mechanism 300. The recovery pipeline 400 can recover the remaining workpiece helium through the recovery gun 200, that is, recover the second helium.

[0061] In one embodiment, since the workpiece helium is high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the recovery pipeline 400 is connected to the recovery gun 200, in response to the recovery instruction, the balance pipeline 500 is first operated to recover part of the workpiece helium, and the balance between the recovered workpiece and the helium supply mechanism 300 is maintained until the remaining workpiece helium does not cause air pressure imbalance in the system or damage the equipment in the recovery pipeline 400. Then the recovery pipeline 400 is operated to recover the remaining workpiece helium, so as to recover all the workpiece helium to the helium supply mechanism 300, so as to maintain the pressure balance between the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to recycle and save resources.

[0062] By setting up a balancing pipeline 500, the balancing pipeline 500 and the recovery pipeline 400 are coordinated and regulated, so that the recyclable workpiece helium and the pipeline helium retained in the helium supply mechanism 300 are coordinated and recovered, and by recovering the workpiece helium containing a certain pressure in steps, the additional pressurization generated on the system when the workpiece is output is alleviated, and the pressure balance of the recovery pipeline 400 and the helium supply mechanism 300 and other equipment is maintained to prevent system damage, and the pipeline helium is recovered at the same time, while maintaining the pressure balance of the recovery pipeline 400 and reducing the risk of helium leakage that may occur during operation, thereby improving the safety of the leak detection system operation and saving resources.

[0063] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, a first detection module is installed on the recovery gun 200. When the recovery gun 200 is connected to the recovery workpiece, the first detection module can detect the workpiece pressure when the workpiece outputs helium, the output pressure when the second helium is output, and the output helium concentration of the second helium.

[0064] The first detection module includes a pressure sensor and a helium sensor, and may also be a combination of other sensors to detect the pressure and concentration of helium. In this embodiment, no specific limitation is imposed on the specific type of the first detection module.

[0065] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, the helium supply mechanism 300 includes: a helium tank 310, a supply pipeline 320, a second detection module and an adjustment component.

[0066] The regulating assembly includes: a low-pressure tank 330 , a compressor 340 , a filter 350 , a one-way valve 360 ​​and a high-pressure tank 370 .

[0067] The helium tank 310 is in communication with the low-pressure tank 330 , that is, the output end of the assembly is in communication with the helium tank 310 , and the low-pressure tank 330 is in communication with the high-pressure tank 370 via the compressor 340 , the filter 350 and the one-way valve 360 ​​in sequence.

[0068] The recovery end of the low-pressure tank 330 is connected to the output end of the balance pipeline 500, and the recovery end of the low-pressure tank 330 is connected to the output end of the recovery pipeline 400. The high-pressure tank 370 is connected to the supply pipeline 320, that is, the output end of the assembly is connected to the supply pipeline 320. The supply pipeline 320 is connected to the filling gun 100.

[0069] In one embodiment, when the vacuum degree of the inspected workpiece reaches the set vacuum degree, the low-pressure tank 330 mixes the recovered pipeline helium, the recovered workpiece helium, and the helium supplied by the helium tank 310. The compressor 340 and the high-pressure tank 370 are used to adjust the pressure of the recovered pipeline helium, the recovered workpiece helium, and the helium supplied by the helium tank 310, that is, the filling pressure of the filling helium is adjusted, so as to output helium with high pressure, that is, output the filling helium. The high-pressure tank 370 injects the filling helium into the inspected workpiece through the filling gun 100 until the helium pressure in the inspected workpiece reaches the set pressure, so as to complete the helium filling of the inspected workpiece.

[0070] A second detection module is provided on the recovery end of the low-pressure tank 330 and the output end of the high-pressure tank 370. The second detection module can detect the first recovery pressure from the low-pressure tank 330 and can detect the filling pressure of the helium filled into the inspected workpiece from the high-pressure tank 370.

[0071] The second detection module may be a pressure sensor or a combination of other sensors to detect the pressure of helium. In this embodiment, no specific limitation is imposed on the specific type of the second detection module.

[0072] Reference Figure 1 and Figure 2 , in some embodiments of one aspect of the present invention, the recovery pipeline 400 includes: a third detection module, a first recovery branch pipe 410, a second recovery branch pipe 420, a recovery main pipe 430, a recovery valve 411 and a recovery pump valve assembly 421;

[0073] The input end of the first recovery branch pipe 410 is connected to the filling gun 100 . A recovery valve 411 is provided on the first recovery branch pipe 410 . When the recovery valve 411 is operated, the first recovery branch pipe 410 can recover the pipeline helium of the supply pipeline 320 in the helium supply mechanism 300 through the filling gun 100 .

[0074] In one embodiment, since the helium retained in the helium supply mechanism 300 is all high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the helium filling of the inspected workpiece is completed, the recovery instruction is responded to, and the first recovery branch 410 and the balance pipeline 500 are operated at the same time, and the recovery valve 411 is operated to recover the pipeline helium retained in the helium supply mechanism 300 and recycle it to the helium supply mechanism 300, so as to maintain the pressure balance among the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to recycle and save resources.

[0075] The input end of the second recovery branch pipe 420 is connected to the recovery gun 200. The second recovery branch pipe 420 is provided with a recovery pump valve assembly 421. When the recovery pump valve assembly 421 is operated, the second recovery branch pipe 420 can recover the remaining workpiece helium in the recovered workpiece through the recovery gun 200, that is, recover the second helium.

[0076] The recovery pump valve assembly 421 includes: a recovery valve, a recovery pump and a one-way valve. The second helium gas flows into the recovery main pipe 430 through the recovery valve, the recovery pump and the one-way valve in sequence.

[0077] In one embodiment, since the workpiece helium is high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the recovery pipeline 400 is connected to the recovery gun 200, in response to the recovery instruction, the balance pipeline 500 is first operated to recover part of the workpiece helium to maintain the balance between the recovered workpiece and the helium supply mechanism 300 until the remaining workpiece helium does not cause air pressure imbalance in the system or damage the equipment in the recovery pipeline 400. Then the second recovery branch 420 is operated, the recovery pump valve assembly 421 is operated, and the remaining workpiece helium is recovered to recover all the workpiece helium to the helium supply mechanism 300, so as to achieve pressure balance between the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to achieve recycling and save resources.

[0078] The input end of the recovery main pipe 430 is communicated with the output end of the first recovery branch pipe 410, and the input end of the recovery main pipe 430 is also communicated with the output end of the second recovery branch pipe 420. The output end of the recovery main pipe 430 is communicated with the recovery end of the low-pressure tank 330 in the helium supply mechanism 300. A recovery pump may be provided on the recovery main pipe 430 to supply the pipeline helium and the second helium to the low-pressure tank 330.

[0079] In one embodiment, the recovery main pipe 430 outputs both the pipeline helium recovered by the first recovery branch pipe 410 and the second helium recovered by the second recovery branch pipe 420 to the low-pressure tank 330 for mixing treatment.

[0080] The third detection module is disposed on the recovery main pipe 430, and the third detection module detects the second recovery pressure on the recovery pipeline 400 and the recovery helium concentration on the recovery main pipe 430, thereby forming the current recovery parameters. In other words, the current recovery parameters include: the second recovery pressure and the recovery helium concentration.

[0081] The third detection module includes a pressure sensor and a helium sensor, and may also be a combination of other sensors to detect the pressure and concentration of helium. In this embodiment, no specific limitation is imposed on the specific type of the third detection module.

[0082] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, the balancing pipeline 500 includes: a first balancing branch pipe 510 , a second balancing branch pipe 520 , a balancing main pipe 530 , a first balancing valve 511 and a second balancing valve 521 .

[0083] The input end of the first balancing branch pipe 510 is connected to the filling gun 100 . The first balancing branch pipe 510 is provided with a first balancing valve 511 . When the first balancing valve 511 is operated, the first balancing branch pipe 510 can recover the pipeline helium of the supply pipeline 320 in the helium supply mechanism 300 through the filling gun 100 .

[0084] In one embodiment, since the helium retained in the helium supply mechanism 300 is all high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the helium filling of the inspected workpiece is completed, it responds to the recovery instruction, and operates the first recovery branch pipe 410 and the first balancing branch pipe 510 at the same time, and operates the recovery valve 411 and the first balancing valve 511 to simultaneously recover the pipeline helium retained in the helium supply mechanism 300 and recover it into the low-pressure tank 330, so as to maintain the pressure balance among the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to recycle and save resources.

[0085] The input end of the second balancing branch pipe 520 is connected to the recovery gun 200. The second balancing branch pipe 520 is provided with a second balancing valve 521. When the second balancing valve 521 is operated, the second balancing branch pipe 520 can recover part of the helium in the recovered workpiece through the recovery gun 200, that is, recover the first helium.

[0086] In one embodiment, since the workpiece helium is high-pressure helium, if it is recovered by the recovery pipeline 400 alone, the equipment of the recovery pipeline 400 will be damaged. Therefore, when the recovery pipeline 400 is connected to the recovery gun 200, in response to the recovery instruction, the second balancing branch 520 is first operated, and the second balancing valve 521 is operated to recover part of the workpiece helium to maintain the balance between the recovered workpiece and the low-pressure tank 330 until the remaining workpiece helium does not cause air pressure imbalance in the system or damage the equipment in the recovery pipeline 400. Then the second recovery branch 420 is operated, the recovery pump valve assembly 421 is operated, and the remaining workpiece helium is recovered to recover all the workpiece helium to the helium supply mechanism 300, so as to achieve pressure balance between the recovery pipeline 400, the nitrogen supply mechanism 600 and the helium supply mechanism 300, so as to achieve recycling and save resources.

[0087] The input end of the balancing main pipe 530 is communicated with the output end of the first balancing branch pipe 510, and the input end of the balancing main pipe 530 is also communicated with the output end of the second balancing branch pipe 520. The output end of the balancing main pipe 530 is communicated with the recovery end of the low-pressure tank 330 in the helium supply mechanism 300. A recovery pump may be provided on the balancing main pipe 530 to supply the pipeline helium and the first helium to the low-pressure tank 330.

[0088] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, the nitrogen supply mechanism 600 includes: a nitrogen tank 610 and a nitrogen supply pipeline 620 .

[0089] The nitrogen tank 610 is connected to the input end of the nitrogen supply pipeline 620, the output end of the nitrogen supply pipeline 620 is connected to the filling gun 100, and a nitrogen filling valve 621 is provided on the nitrogen supply pipeline 620. When the nitrogen filling valve 621 is operated, the nitrogen supply pipeline 620 injects the filling nitrogen output from the nitrogen tank 610 into the interior of the inspected workpiece through the filling gun 100.

[0090] In one embodiment, after the inspected workpiece is connected to the filling gun 100, the nitrogen filling valve 621 is operated in response to a start instruction, and the filling nitrogen is injected into the interior of the inspected workpiece through the filling gun 100. The pressure detector detects the current pressure. When the nitrogen pressure of the inspected workpiece reaches the set nitrogen pressure value, the nitrogen filling valve 621 is closed to maintain the pressure of the inspected workpiece. According to the pressure change before and after the pressure maintenance, the pressure change value is calculated, and according to the pressure change value, it is determined whether the inspected workpiece is leaking.

[0091] Reference Figure 1 and Figure 2 In some embodiments of one aspect of the present invention, the vacuum pipeline 700 includes: an evacuation pipeline 710 and a nitrogen exhaust pipeline 720.

[0092] The input end of the evacuation pipe 710 is connected to the filling gun 100, and an evacuation valve 711 is provided on the evacuation pipe 710. When the evacuation pump 711 is operated, the evacuation pipe 710 evacuates the inspected workpiece through the filling gun 100.

[0093] The input end of the nitrogen exhaust pipeline 720 is connected to the filling gun 100, and a nitrogen exhaust valve 721 is provided on the nitrogen exhaust pipeline 720. When the nitrogen exhaust valve 721 is operated, the nitrogen exhaust pipeline 720 exhausts the nitrogen in the inspected workpiece through the filling gun 100.

[0094] In one embodiment, when it is determined that the inspected workpiece has no leakage, the nitrogen exhaust valve 721 is operated to drive the nitrogen exhaust pipeline 720 to operate and exhaust the nitrogen in the inspected workpiece. When the pressure reaches the set exhaust pressure value, the nitrogen exhaust valve 721 is closed, the evacuation valve 711 is operated, and the evacuation pipeline 710 evacuates the inspected workpiece until the vacuum degree of the inspected workpiece reaches the set vacuum degree, and the evacuation valve 711 is closed.

[0095] Reference Figure 3 In some embodiments of another aspect of the present invention, a control method for a helium balance recovery leak detection system is provided. Using a helium balance recovery leak detection system in an embodiment of one aspect of the present invention, the control method comprises the following steps:

[0096] S100, when the inspected workpiece is completely filled with helium, respond to the recovery instruction, control the balance pipeline and the recovery pipeline, and recover the pipeline helium retained in the helium supply mechanism.

[0097] S200, obtaining the workpiece pressure of the workpiece helium output in the recovered workpiece and the first recovery pressure of the recovery end of the helium supply mechanism, and determining the first helium required to be recovered by the balancing pipeline according to the first recovery pressure and the workpiece pressure.

[0098] S300, controlling the balance pipeline to recycle the first helium, and obtaining the current recovery parameter in the recovery pipeline and the output pressure of the remaining second helium output; wherein the first helium and the second helium form the workpiece helium.

[0099] S400: judging whether the recovery pipeline can recover the second helium according to the current recovery parameter and the output pressure.

[0100] S500: If yes, adjust the recovery pipeline to recover the second helium.

[0101] S100 to S500 shown in the embodiment of the present application, by setting a balancing pipeline, responding to the recovery instruction, and driving the balancing pipeline and the recovery pipeline at the same time, thereby recovering the pipeline helium trapped in the helium supply mechanism at the same time, maintaining the pressure balance of the recovery pipeline, and reducing the risk of helium leakage that may occur during operation. According to the workpiece pressure output by the recovered workpiece and the first recovery pressure at the recovery end of the helium supply mechanism, the first helium that needs to be recovered by the balancing pipeline is determined to recover part of the workpiece helium to alleviate the additional pressurization generated by the system when the workpiece is recovered; then, according to the output pressure of the second helium and the current recovery parameters, when it is determined that the second helium will not cause pressure imbalance to the system or damage the equipment in the recovery pipeline, the recovery pipeline is controlled to recover the second helium to recover the remaining workpiece helium, and all the workpiece helium is recovered. By recovering the workpiece helium containing a certain pressure in steps, the pressure balance of the recovery pipeline and the helium supply mechanism and other equipment is maintained to prevent system damage. The balance pipeline and the recovery pipeline are coordinated and regulated, so that the recyclable workpiece helium and the pipeline helium retained in the helium supply mechanism are coordinated and recovered, thereby improving the safety of the leak detection system operation and saving resources.

[0102] The specific implementation methods of the above steps are introduced below.

[0103] In S100, when the helium filling of the inspected workpiece is completed, in response to the recovery instruction, some filling helium will be retained in the supply pipeline of the helium supply mechanism. The retained filling helium is regarded as pipeline helium. If the helium supply mechanism cannot recover the pipeline helium to the low-pressure tank for processing, it is recovered through the set recovery pipeline.

[0104] However, the retained helium is all high-pressure helium. If it is recovered using the recovery pipeline alone, the equipment of the recovery pipeline will be damaged. Therefore, it is necessary to control the balance pipeline and the recovery pipeline at the same time to recover the pipeline helium at the same time. The recovery pipeline and the balance pipeline are both connected to the helium supply mechanism, and the difference in air pressure between the pipelines is not large, so there is no need for step-by-step recovery.

[0105] In one embodiment, since the helium retained in the helium supply mechanism is all high-pressure helium, if it is recovered by using a recovery pipeline alone, the equipment of the recovery pipeline will be damaged. Therefore, when the inspected workpiece is completed with helium filling, the recovery instruction is responded to, and the first recovery branch and the first balancing branch are operated at the same time, the opening of the recovery valve and the opening of the first balancing valve are adjusted, and the recovery valve and the first balancing valve are opened at the same time to simultaneously recover the pipeline helium retained in the helium supply mechanism and recover it into the low-pressure tank, so as to maintain the pressure balance between the recovery pipeline, the nitrogen supply mechanism, the helium supply mechanism and other pipelines, recycle them, save resources, and reduce the risk of helium leakage that may occur during operation.

[0106] In S200, since the workpiece helium is high-pressure helium, if it is recovered using a recovery pipeline alone, the equipment of the recovery pipeline will be damaged. Therefore, when the recovery pipeline is connected to the recovery gun, the workpiece pressure of the workpiece helium output and the first recovery pressure of the recovery end of the low-pressure tank are obtained.

[0107] The pressure difference between the first recovery pressure and the workpiece pressure is calculated, and based on the pressure difference, the part of the workpiece helium that needs to be recovered by the balance pipeline is determined, that is, the first helium that needs to be recovered is determined, so that the workpiece pressure of the recovered workpiece is balanced with the first recovery pressure of the low-pressure tank.

[0108] Among them, according to the step-by-step recovery of the corresponding pipeline, the workpiece helium can be divided into the first helium and the second helium, that is, part of the workpiece helium recovered by the balance pipeline is used as the first helium, and the remaining workpiece helium recovered by the recovery pipeline is used as the second helium. In addition, according to the pressure difference, the gas state equation or the ideal gas law can be used to determine the first helium to be recovered. The method for determining the first helium is not specifically limited in this embodiment.

[0109] In S300, the balancing pipeline is controlled to recover the first helium determined in S200, so that the workpiece pressure of the recovered workpiece is balanced with the first recovery pressure of the low-pressure tank.

[0110] In one embodiment, the amount of helium that the second balancing valve needs to recover the first helium is determined by detecting the first recovery pressure and the workpiece pressure. According to the determined first helium, the opening of the second balancing valve is adjusted to recover part of the workpiece helium, and the balance between the recovered workpiece and the low-pressure tank is maintained to alleviate the additional pressurization of the system when the recovered workpiece is output.

[0111] Since the helium pressure of general workpieces is above 1MPa (10 kg), in order to prevent the pressure of the remaining workpiece helium from being too high and damaging the recovery pipeline, the current recovery parameters in the recovery pipeline and the output pressure of the remaining workpiece helium are detected for judgment.

[0112] According to the step-by-step recovery of the corresponding pipelines, the workpiece helium can be divided into the first helium and the second helium, that is, part of the workpiece helium recovered by the balance pipeline is used as the first helium, and the remaining workpiece helium recovered by the recovery pipeline is used as the second helium.

[0113] In S400, the current recovery parameters include: a second recovery pressure and a recovered helium concentration.

[0114] Calculate the difference between the second recovery pressure and the output pressure, calculate the recovery pressure difference, and determine whether the recovery pressure difference is greater than the set recovery pressure limit;

[0115] If yes, it is considered that the recovery pipeline cannot recover the second helium, and the remaining workpiece helium will cause pressure imbalance in the system or damage the equipment in the recovery pipeline. It is necessary to return to S200 to determine the first helium again and adjust the balance pipeline for recovery again.

[0116] If not, it is considered that the recovery pipeline can recover the second helium, and the remaining workpiece helium will not cause pressure imbalance in the system or damage the equipment in the recovery pipeline.

[0117] In S500, when it is considered that the recovery pipeline is capable of recovering the second helium gas, the recovery pipeline is adjusted to recover the remaining workpiece helium gas, that is, to recover the second helium gas.

[0118] In one embodiment, the second recovery branch is operated, the recovery pump valve assembly is started, and the remaining workpiece helium is recovered to recover all the workpiece helium to the helium supply mechanism, so as to achieve pressure balance between the recovery pipeline, the nitrogen supply mechanism and the helium supply mechanism, so as to recycle and save resources.

[0119] In some embodiments, at S100, before the helium filling is completed, the method further includes:

[0120] S110, detecting the filling pressure of the helium gas and obtaining the required pressure of the inspected workpiece, and determining the balancing time according to the filling pressure and the required pressure.

[0121] S120, by balancing the time, regulating the helium supply mechanism and the filling gun, adjusting the filling time, and injecting the filling helium into the inspected workpiece until the helium pressure in the inspected workpiece reaches the set pressure.

[0122] In S110 of some embodiments, due to the difference between the detected workpiece pressure parameter and the equipment set pressure parameter, some of the detected workpieces use a throttle valve or a needle valve at the filling port, which causes the filling pressure and the required pressure of the detected workpiece to be unable to be balanced in real time, so it is necessary to set a balance time to achieve pressure balance delay. The balance time of the pressure balance delay is determined by the difference between the filling pressure and the required pressure.

[0123] In S120 of some embodiments, the helium supply mechanism is regulated by the balancing time to adjust the filling time of the helium, and the helium filling operation is performed. The opening of the filling valve in the supply pipeline can be gradually adjusted according to the set step size to adjust the filling time.

[0124] The helium supply mechanism fills the inspected workpiece with helium through a filling gun. When the helium pressure inside the inspected workpiece reaches the set pressure, it is considered that the helium filling of the inspected workpiece is completed.

[0125] In some embodiments, in S400, the process of determining whether the recovery pipeline can recover the second helium gas may include but is not limited to:

[0126] S410, calculating the difference between the second recovery pressure and the output pressure, obtaining the recovery pressure difference, and determining whether the recovery pressure difference is a set recovery pressure limit.

[0127] S411, if yes, it is considered that the recovery pipeline cannot recover the second helium, and the process returns to S200 to determine the first helium again, and adjust the balance pipeline to recover it again.

[0128] In S410 of some embodiments, the difference between the second recovery pressure and the output pressure is calculated, the recovery pressure difference is calculated, and it is determined whether the recovery pressure difference is greater than the set recovery pressure limit.

[0129] In S411 of some embodiments, when the recovery pressure difference is greater than the set recovery pressure limit, it is considered that the recovery pipeline cannot recover the second helium, and the remaining workpiece helium will cause pressure imbalance in the system or damage the equipment in the recovery pipeline. It is necessary to return to S200 to determine the first helium again and adjust the balance pipeline for recovery again.

[0130] When the recovery pressure difference is less than or equal to the set recovery pressure limit, it is considered that the recovery pipeline can recover the second helium, and the remaining workpiece helium will not cause pressure imbalance in the system or damage the equipment in the recovery pipeline.

[0131] In some embodiments, in S400, the process of determining whether the recovery pipeline can recover the second helium gas may include, but is not limited to:

[0132] S420, detecting the recovered helium concentration of the recovery pipeline and the output helium concentration of the second helium, and determining the mixed pressure value of the mixed helium in the recovery pipeline according to the recovered helium concentration, the output helium concentration, the second recovery pressure and the output pressure.

[0133] S421, determining whether the mixed pressure value exceeds a set mixed pressure threshold.

[0134] S422, if yes, it is considered that the recovery pipeline cannot recover the second helium, and the process returns to S200 to determine the first helium again, and adjusts the balance pipeline to recover it again; otherwise, it is considered that the recovery pipeline can recover the second helium, and the process proceeds to S500.

[0135] In S420 of some embodiments, since the recovery pipeline recovers the pipeline helium and the second helium at the same time, the helium with different pressures and different concentrations may also affect the recovery pipeline after mixing. Therefore, it is necessary to obtain the recovered helium concentration of the recovery pipeline and the output helium concentration of the second helium, so as to predict and calculate the mixed pressure value of the mixed helium in the recovery pipeline.

[0136] According to the recovered helium concentration, the output helium concentration, the second recovered pressure and the output pressure, the mixed pressure value can be determined by the gas state equation or the ideal gas law P=(N1P1+N2P2) / N1+N2, where the recovered helium concentration is N1, the output helium concentration is N2, the second recovered pressure is P1, and the output pressure is P2. The method for determining the mixed pressure value is not specifically limited in this embodiment.

[0137] In S421 and S422 of some embodiments, when the mixed pressure value exceeds the set mixed pressure threshold, it is considered that the recovery pipeline cannot recover the second helium, and the remaining workpiece helium will cause pressure imbalance in the system or damage the equipment in the recovery pipeline. It is necessary to return to S200 to determine the first helium again and adjust the balance pipeline for recovery again.

[0138] When the mixed pressure value is less than or equal to the set mixed pressure threshold, it is considered that the recovery pipeline can recover the second helium, and the remaining workpiece helium will not cause pressure imbalance in the system or damage the equipment in the recovery pipeline.

[0139] It should be noted that S420 to S422 can be run simultaneously with the two judgment processes S410 and S411 to determine whether the recovery pipeline can recover the second helium.

[0140] In some embodiments of another aspect of the present invention, in S101, before determining the equilibrium time, the method further includes:

[0141] S101, responding to the start instruction, driving the nitrogen supply mechanism to operate, injecting the filling nitrogen into the interior of the inspected workpiece through the filling gun, detecting the current pressure of the inspected workpiece, and determining whether the current pressure reaches the set nitrogen pressure value;

[0142] S102, if yes, the nitrogen supply mechanism stops running, the inspected workpiece is pressure-maintained, the pressure change value before and after the pressure maintenance is obtained, and whether the inspected workpiece is leaking is determined based on the pressure change value.

[0143] S103, when the pressure change value is less than or equal to the leakage setting value, it is considered that the inspected workpiece has no leakage, and the vacuum pipeline is driven to operate.

[0144] In S101 of some embodiments, in response to a start instruction, the nitrogen supply mechanism is driven to operate, and the filling nitrogen is injected into the interior of the inspected workpiece through a filling gun. The pressure detector detects the current pressure to determine whether the current pressure reaches the set nitrogen pressure value.

[0145] In S102 of some embodiments, when the nitrogen pressure of the inspected workpiece reaches the set nitrogen pressure value, the nitrogen supply mechanism stops running, the pressure of the inspected workpiece is maintained, and the pressure change value is calculated based on the pressure change before and after the pressure maintenance, and whether the inspected workpiece is leaking is determined based on the pressure change value.

[0146] If the pressure change value exceeds the leakage setting value, it indicates that the inspected workpiece has a leak, a leakage signal is issued, the reset button is responded to, the vacuum pipeline is operated, the nitrogen in the inspected workpiece is emptied through the filling gun, and the nitrogen supply mechanism stops running.

[0147] If the pressure change value is less than or equal to the leakage setting value, it indicates that there is no leakage in the inspected workpiece.

[0148] In S103 of some embodiments, when the pressure change value is less than or equal to the leakage setting value, it is considered that the inspected workpiece has no leakage, and the vacuum pipeline is operated.

[0149] When the vacuum degree of the inspected workpiece reaches the set vacuum degree, the helium supply mechanism operates to inject helium into the inspected workpiece through the filling gun until the helium pressure in the inspected workpiece reaches the set pressure to complete the helium filling of the inspected workpiece.

[0150] The terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0151] The preferred embodiments of the present invention are described in detail above, but the invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A helium balance recovery leak detection system, characterized in that: include: Filling gun, recovery gun, helium supply mechanism, recovery pipeline and balance pipeline; The recovery gun is in communication with the recovery workpiece, and the recovery workpiece contains workpiece helium; The helium supply mechanism is in communication with the filling gun, the filling gun is in communication with the inspected workpiece, and the helium supply mechanism is used to supply filling helium to the inspected workpiece through the filling gun; The output end of the balancing pipeline is communicated with the recovery end of the helium supply mechanism, and the input end of the balancing pipeline is communicated with the filling gun and the recovery gun respectively, and the balancing pipeline is used to recover the pipeline helium retained in the helium supply mechanism and recover the first helium; The output end of the recovery pipeline is communicated with the recovery end of the helium supply mechanism, and the input end of the recovery pipeline is communicated with the filling gun and the recovery gun respectively, and the recovery pipeline is used to recover the pipeline helium and the second helium; Wherein, the first helium gas and the second helium gas form the workpiece helium gas.

2. A helium balance recovery leak detection system according to claim 1, characterized in that: Also includes: A first detection module; The first detection module is disposed on the recovery gun, and is used to detect the workpiece pressure of the workpiece helium output and the output pressure of the second helium output.

3. A helium balance recovery leak detection system according to claim 1, characterized in that: The helium supply mechanism comprises: a helium tank, a regulating component, a supply pipeline and a second detection module; The input end of the regulating component is communicated with the helium tank, the recovery end of the regulating component is communicated with the output end of the balancing pipeline and the output end of the recovery pipeline respectively, the output end of the regulating component is communicated with the supply pipeline, the supply pipeline is communicated with the filling gun, and the second detection module is arranged on the regulating component; The regulating component is used to regulate the filling pressure of the helium gas, and the second detection module is used to detect the filling pressure and a first recovery pressure at the recovery end of the regulating component.

4. A helium balance recovery leak detection system according to claim 1, characterized in that: The recovery pipeline includes: a third detection module, a first recovery branch pipe, a second recovery branch pipe, a recovery main pipe, a recovery valve and a recovery pump valve assembly; The input end of the first recovery branch pipe is communicated with the filling gun, the first recovery branch pipe is provided with the recovery valve, the input end of the second recovery branch pipe is communicated with the recovery gun, the second recovery branch pipe is provided with the recovery pump valve assembly, the input end of the recovery main pipe is communicated with the first recovery branch pipe and the second recovery branch pipe respectively, the output end of the recovery main pipe is communicated with the recovery end of the helium supply mechanism, and the third detection module is arranged on the recovery main pipe; The first recovery branch is used to recover the pipeline helium through the recovery valve, the second recovery branch is used to recover the second helium through the recovery pump valve assembly, and the third detection module is used to detect current recovery parameters.

5. A helium balance recovery leak detection system according to claim 1, characterized in that: The balancing pipeline comprises: a first balancing valve, a second balancing valve, a first balancing branch pipe, a second balancing branch pipe and a balancing main pipe; The input end of the first balancing branch pipe is communicated with the filling gun, the first balancing branch pipe is provided with the first balancing valve, the input end of the second balancing branch pipe is communicated with the recovery gun, the second balancing branch pipe is provided with the second balancing valve, the input end of the balancing main pipe is communicated with the first balancing branch pipe and the second balancing branch pipe respectively, and the output end of the balancing main pipe is communicated with the recovery end of the helium supply mechanism; The first balancing branch pipe is used to recover the pipeline helium through the first balancing valve, and the second balancing branch pipe is used to recover the first helium through the second balancing valve.

6. A helium balance recovery leak detection system according to claim 1, characterized in that: Also includes: Nitrogen supply mechanism and vacuum pipeline; The nitrogen supply mechanism is in communication with the filling gun, and the nitrogen supply mechanism is used to supply filling nitrogen to the filling gun; The vacuum pipeline is connected to the filling gun, and the vacuum pipeline is used to vacuum the inspected workpiece.

7. A control method for a helium balance recovery leak detection system, characterized in that: A leak detection system for helium balance recovery applied to any one of claims 1 to 6, comprising: When the inspected workpiece is completely filled with helium, it responds to the recovery instruction, controls the balance pipeline and the recovery pipeline, and recovers the pipeline helium retained in the helium supply mechanism at the same time; Acquire a workpiece pressure of the workpiece helium output in the recovered workpiece and a first recovery pressure at the recovery end of the helium supply mechanism, and determine the first helium required to be recovered by the balancing pipeline according to the first recovery pressure and the workpiece pressure; Controlling the balance pipeline to recycle the first helium gas, and obtaining the current recovery parameter in the recovery pipeline and the output pressure of the remaining second helium gas output; wherein the first helium gas and the second helium gas form the workpiece helium gas; determining, according to the current recovery parameter and the output pressure, whether the recovery pipeline can recover the second helium; If so, the recovery pipeline is adjusted to recover the second helium gas.

8. The control method of a helium balance recovery leak detection system according to claim 7, characterized in that: Before the inspected workpiece is filled with helium, the method further includes: Obtaining the filling pressure of helium and the required pressure of the inspected workpiece, and determining the balancing time according to the filling pressure and the required pressure; According to the balancing time, the helium supply mechanism and the filling gun are regulated, the filling time is adjusted, and the filling helium is supplied to the inspected workpiece until the helium pressure in the inspected workpiece reaches the set pressure.

9. The control method of a helium balance recovery leak detection system according to claim 7, characterized in that: The current recovery parameter includes: a second recovery pressure on the recovery pipeline.

10. The control method of a helium balance recovery leak detection system according to claim 9, characterized in that: The determining, according to the current recovery parameter and the output pressure, whether the recovery pipeline can recover the second helium specifically includes: Calculating the difference between the second recovery pressure and the output pressure to obtain a recovery pressure difference, and determining whether the recovery pressure difference is greater than a set recovery pressure limit; If so, it is considered that the recovery pipeline cannot recover the second helium, and the first helium is determined again to adjust the balance pipeline.

Images