High-temperature co-fired aluminum nitride ceramic plate and preparation process thereof

Abstract

The invention relates to the technical field of aluminum nitride ceramic plates, in particular to a high-temperature co-fired aluminum nitride ceramic plate and a preparation process thereof.According to the high-temperature co-fired aluminum nitride ceramic plate, a mounting notch used for mounting a sensor is formed in the left side of the upper portion of a base body layer, and the mounting notch is filled with a filling material after the sensor is mounted; a sensor is embedded in an aluminum nitride ceramic plate, the functions of real-time monitoring and data transmission are achieved, a miniature cooling channel layer is optimally arranged, the design of a plug-in type connector assembly is adopted, connection and disassembly of a cooling channel are facilitated, cooling fluid can be effectively prevented from leaking during disassembly, and the safety and reliability of a system are improved; a filling mechanism is optimally used in the preparation process, a pushing and scraping assembly transversely moves in a reciprocating mode to push and spread the filling material discharged in a discharging assembly in a swinging mode in a mounting notch, and meanwhile an aluminum nitride ceramic plate is made to vibrate through a uniform vibration assembly so that the filling material can be uniformly vibrated in the mounting notch; and the filling effect of the filling material is improved to a certain extent.

Description

Technical Field

[0001] The invention relates to the technical field of aluminum nitride ceramic plates, in particular to a high-temperature co-fired aluminum nitride ceramic plate and a preparation process thereof. Background Art

[0002] Aluminum nitride ceramic plates have high thermal conductivity, low expansion coefficient, high strength, high temperature resistance, chemical corrosion resistance, high resistivity, and low dielectric loss. They are ideal heat dissipation substrates and packaging materials for large-scale integrated circuits. Aluminum nitride ceramics can also be used to make Al evaporating dishes, magnetohydrodynamic power generation devices, and high-temperature turbine corrosion-resistant components. Their optical properties can be used as infrared windows, etc.

[0003] At present, China's patent application number: CN202420090476.8 discloses a high-temperature co-fired aluminum nitride ceramic plate, including an aluminum nitride ceramic plate body, a fixing bolt is provided on one side of the surface of the protective component, an installation groove is provided inside the protective component, a second clamping plate is provided on one side of the first clamping plate, a mounting hole is opened on the surface of the protective component, a protective component is provided on the outside of the aluminum nitride ceramic plate body, a back frame is provided on the back of the protective component, a buffer component is provided inside the installation groove, and a first clamping plate is provided inside the protective component.

[0004] However, the current high-temperature co-fired aluminum nitride ceramic plates are not convenient for realizing real-time monitoring and data transmission functions of the aluminum nitride ceramic plates during use, and the heat dissipation efficiency is poor, and it is inconvenient to carry out daily maintenance and inspection when using cooling channels; and in the preparation process of high-temperature co-fired aluminum nitride ceramic plates, the filling process of the notches for installing sensors is cumbersome and the filling effect is poor. Summary of the invention

[0005] The object of the present invention is to provide a high temperature co-fired aluminum nitride ceramic plate and a preparation process thereof, so as to solve the problems raised in the above background technology.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a high-temperature co-fired aluminum nitride ceramic plate, which comprises, from top to bottom, a base layer, a reinforcement layer, a micro-cooling channel layer, a conductive composite layer and a ceramic coating. An installation slot for installing a sensor is opened on the left side above the base layer, and the installation slot is filled with filling material after the sensor is installed. Ceramic fiber is introduced into the reinforcement layer as a reinforcement material, and both the upper and lower sides are honeycomb structures. The micro-cooling channel layer includes a plate connected to the reinforcement layer and the conductive composite layer on the upper and lower sides respectively, a first channel is arranged on the rear side of the plate, and a second channel is arranged on the front side of the plate, and the right inlet and outlet of the first channel and the second channel are connected with a joint assembly.

[0007] Preferably, the filling material is aluminum nitride ceramic powder and silicate binder.

[0008] Preferably, rectangular grooves are provided on the left and right sides of the top of the base layer, and strip grooves are provided on the front and back sides of the top of the base layer.

[0009] Preferably, the joint assembly includes a first sleeve connected to the inlet and outlet of the first channel and the second channel, a first support embedded in the left side of the first sleeve, a first sealing plug rod sliding through the middle side of the first support, a first spring connected to the outside of the right side of the first support, a sliding sleeve slidingly arranged on the right side of the outer surface of the first sleeve, a second spring arranged on the left side of the sleeve, a bead arranged on the right side of the inner wall of the first sleeve, a second sleeve arranged on the right side of the first sleeve, a second support embedded in the right side of the second sleeve, a second sealing plug rod sliding through the middle side of the second support, and a third spring connected to the outer surface of the left side of the second support, the first spring is connected to the first sealing plug rod on the right side, the second spring is connected to the first sleeve on the left side, the bead is in contact with the sleeve on the outside, and the third spring is connected to the second sealing plug rod on the left side.

[0010] Preferably, sealing rubber rings are provided on the right side of the outer surface of the first sealing plug rod and on the left side of the outer surface of the second sealing plug rod, a sealing ring is embedded on the right side inside the first sleeve, a limiting ring for limiting the sliding sleeve is provided on the right end of the outer surface of the first sleeve, and a card groove for contacting and engaging with the card bead is provided on the middle side of the outer surface of the second sleeve.

[0011] In addition, the present invention provides a preparation process of a high temperature co-fired aluminum nitride ceramic plate, comprising the following steps:

[0012] S1. Remove the joint assembly of the micro cooling channel layer, then stack the base layer, reinforcement layer, micro cooling channel layer, conductive composite layer and ceramic coating from top to bottom and put them into a high temperature furnace for high temperature co-firing to fully combine the materials of each layer to form a dense aluminum nitride ceramic plate;

[0013] S2. After the sintered aluminum nitride ceramic plate is cooled, the notches, rectangular grooves and strip grooves are installed at the top side of the substrate layer by grinding equipment, and the opened grooves are cleaned. Then the sensor is placed in the installation notch to ensure that it is stable and correctly connected to the electrical interface;

[0014] S3, using a filling mechanism to fill the filling material into the installation slot, compact the filling material, and then perform high temperature curing to ensure the bonding strength between the filling material and the base layer;

[0015] S4. After the filling is completed, the surface of the base layer is polished to ensure that it is flat and consistent with the surrounding surface, and then the joint assembly is installed in the micro cooling channel layer to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

[0016] Preferably, the filling mechanism includes a base plate, a cylinder rotatably arranged in the middle and right part of the top side of the base plate, a slider connected to the top end of the cylinder, a support frame rotatably connected to the left side of the top of the base plate, a push-scraping assembly installed on the left side of the top of the support frame, a slide connected to the right side of the push-scraping assembly, a support platform slidably connected to the inner side of the slide, a feeding assembly fastened to the middle part of the right side of the slide, and two vibrating assemblies arranged on the left and right sides of the support platform, the slider is slidably connected to the middle and left side of the support frame, and the bottom of the support platform is fastened to the support frame.

[0017] Preferably, the scraping assembly includes a first motor whose bottom is fastened to the supporting frame, a rotating rod connected to the front output end of the first motor, a push rod rotatably connected to the left front part of the rotating rod, a rotating frame rotatably connected to the right end of the push rod, and a scraper arranged at the bottom of the rotating frame, the upper and middle part of the rotating frame is rotatably connected to the slide, and the bottom of the scraper is in a Y-shaped structure.

[0018] Preferably, the unloading assembly includes a mounting base fastened to the slide on the left side, a second motor fastened to the right side of the top of the mounting base, a turntable connected to the bottom output end of the second motor, a connecting rod frame connected to the inner side of the turntable, a fulcrum column rotatably connected to the front and rear sides of the connecting rod frame, a discharge hopper fastened to the right end of the fulcrum column, and a hose arranged on the top side of the discharge hopper, the turntable passes through and rotates on the inner side of the top of the mounting base, the left end of the fulcrum column is rotatably connected to the mounting base, the top end of the hose is connected to the external filling material end, a shift groove is opened on the left side of the inside of the turntable, a positioning block is arranged inside the shift groove, the middle side of the positioning block passes through and is rotatably connected with the connecting rod frame, two rows of hole grooves are arranged on the left side of the rear of the turntable, and the two rows of hole grooves are respectively located on the upper and lower sides of the rear of the shift groove, and the rear side of the positioning block is fastened to the inside of the hole groove.

[0019] Preferably, the vibration uniformity assembly includes a sleeve whose side is fastened to the support, a third motor fastened to the top side of the sleeve, an eccentric wheel connected to the front output end of the third motor, a rocker arm rotatably connected to one side of the front of the eccentric wheel, a vertical rod rotatably connected to the bottom of the rocker arm, a knocking column fixed to the bottom end of the vertical rod, an inner warehouse arranged on the middle and lower side of the sleeve, a convex ring integrally formed on the middle and upper part of the outer surface of the knocking column, a fourth spring connected to the top side of the convex ring and a fifth spring connected to the bottom side of the convex ring, the knocking column slides through the middle side of the inner warehouse, and the upper and lower sides of the inner warehouse are respectively connected to the fourth spring and the fifth spring.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The high-temperature co-fired aluminum nitride ceramic plate of the present invention is provided with an installation slot for installing a sensor on the left side above the base layer, and the installation slot is filled with filling material after the sensor is installed. By embedding the sensor in the aluminum nitride ceramic plate, real-time monitoring and data transmission functions are realized. The reinforcement layer introduces ceramic fiber as a reinforcement material, and the upper and lower sides are both honeycomb structures to improve the overall strength and toughness. The micro-cooling channel layer is optimized and the plug-in joint assembly design is adopted, which makes the connection and disassembly of the cooling channel more convenient, facilitates daily maintenance and inspection, and can effectively prevent the leakage of the cooling fluid during disassembly, thereby improving the safety and reliability of the system.

[0022] The present invention optimizes the use of a filling mechanism in the preparation process of a high-temperature co-fired aluminum nitride ceramic plate. The slide block is used by the action of a cylinder to lift the support frame upward, so that the support frame can be lifted and lowered on the base plate to place the support frame above and outside the installation slot where the filling material needs to be filled. Then, the pushing and scraping assembly is reciprocated and moved laterally to flatten and spread the filling material swung out of the blanking assembly into the installation slot. At the same time, the aluminum nitride ceramic plate is vibrated by the contact between the vibration assembly and the aluminum nitride ceramic plate to vibrate the filling material in the installation slot to prevent gaps from being generated, thereby improving the compaction and filling effect of the filling material to a certain extent.

[0023] The right side of the outer surface of the first sealing plug rod and the left side of the outer surface of the second sealing plug rod of the present invention are both provided with sealing rings to respectively improve the sealing effect when they are in the first sleeve and the second sleeve, so as to prevent the leakage of the cooling fluid in the channel through the contact between the first sealing plug rod and the sealing ring and the first sleeve. A sealing ring is embedded on the right side of the interior of the first sleeve to increase the sealing performance when in contact with the second sleeve. A limiting ring for limiting the sliding sleeve is provided on the right end of the outer surface of the first sleeve to prevent the sliding sleeve from running away. A card groove for contacting and engaging with the card bead is provided on the middle side of the outer surface of the second sleeve, thereby improving the connection effect of the second sleeve with the first sleeve after being inserted into the interior of the first sleeve.

[0024] The turntable of the present invention is provided with two rows of hole slots on the left side of the rear part, and the two rows of hole slots are respectively located at the upper and lower sides of the rear part of the shift slot. The rear side of the positioning block is fastened inside the hole slot. The positioning block changes its position in the shift slot by cooperating with the hole slots at different positions, thereby changing the speed and effect of the positioning block driving the connecting rod frame to shift, so as to change the range and speed of the forward and backward swinging of the discharge hopper. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the high temperature co-fired aluminum nitride ceramic plate of the present invention;

[0026] Figure 2 It is a schematic diagram of the structure of the micro cooling channel layer of the present invention;

[0027] Figure 3It is a structural schematic diagram of the joint assembly of the present invention;

[0028] Figure 4 This is a process flow chart for preparing a high temperature co-fired aluminum nitride ceramic plate of the present invention;

[0029] Figure 5 It is a structural schematic diagram of the packing mechanism of the present invention;

[0030] Figure 6 It is a structural schematic diagram of the blanking assembly of the present invention;

[0031] Figure 7 It is a structural schematic diagram of the connection between the turntable and the connecting rod frame of the present invention;

[0032] Figure 8 For the present invention Figure 7 Rear view of

[0033] Fig. 9 It is a schematic diagram of the structure of the homogenizing component of the present invention.

[0034] In the figure: base layer-1, reinforcement layer-2, micro cooling channel layer-3, conductive composite layer-4, ceramic coating-5, mounting notch-6, rectangular groove-7, strip groove-8, plate-31, first channel-32, second channel-33, joint assembly-34, first sleeve-341, first support-342, first sealing plug rod-343, first spring-344, sleeve-345, second spring-346, card bead-347, second sleeve-348, second support-349, second sealing plug rod-3410, third spring-3411, sealing ring-3412, limit ring-3413, card slot-3481, bottom plate-91, cylinder-92, slider-93, support Frame -94, push scraper assembly -95, slide -96, support platform -97, unloading assembly -98, vibration assembly -99, first motor -951, rotating rod -952, push rod -953, rotating frame -954, scraper -955, mounting seat -981, second motor -982, turntable -983, connecting rod frame -984, support shaft column -985, discharge hopper -986, hose -987, shifting groove -9831, positioning block -9832, hole groove -9833, sleeve -991, third motor -992, eccentric wheel -993, rocker arm -994, vertical rod -995, knocking column -996, inner bin -997, convex ring -998, fourth spring -999, fifth spring -9910. DETAILED DESCRIPTION

[0035] In order to further explain the technical solution of the present invention, it is described in detail below through specific embodiments.

[0036] See also Figure 1 , Figure 2 and Figure 3 The present invention provides a high-temperature co-fired aluminum nitride ceramic plate, which comprises a substrate layer 1, a reinforcement layer 2, a micro-cooling channel layer 3, a conductive composite layer 4 and a ceramic coating 5 from top to bottom. An installation slot 6 for installing a sensor is provided on the left side above the substrate layer 1, and the installation slot 6 is filled with a filling material after the sensor is installed. By embedding the sensor in the aluminum nitride ceramic plate, real-time monitoring and data transmission functions are realized. The reinforcement layer 2 introduces ceramic fiber as a reinforcement material, and both the upper and lower sides are honeycomb structures to improve the overall strength and toughness. The micro-cooling channel layer 3 includes a plate 31 connected to the reinforcement layer 2 and the conductive composite layer 4 on the upper and lower sides, a first channel 32 is provided on the rear side of the plate 31, and a second channel 33 is provided on the front side of the plate 31. The first channel 32 and the second channel 33 are connected to the right inlet and outlet of the joint assembly 34. The joint assembly 34 adopts an insert-type design, which makes the connection and disassembly of the cooling channel more convenient, convenient for daily maintenance and inspection, and can effectively prevent the leakage of the cooling fluid during disassembly, thereby improving the safety and reliability of the system.

[0037] Among them, the filling materials are aluminum nitride ceramic powder and silicate adhesive, which ensure that the sensor is installed firmly and will not affect the performance of the overall structure. Rectangular grooves 7 are opened on the left and right sides of the top of the substrate layer 1, and strip grooves 8 are opened on the front and back sides of the top of the substrate layer 1 to reduce the thermal stress concentration of the material, thereby improving the overall thermal stability.

[0038] The joint assembly 34 includes a first seat 341 connected to the inlet and outlet of the first channel 32 and the second channel 33, a first support 342 embedded in the left side of the first seat 341, a first sealing plug rod 343 sliding through the middle side of the first support 342, and a first spring 344 connected to the right side of the first support 342. The first spring 344 provides a rightward force to the first sealing plug rod 343, a sliding sleeve 345 slidingly arranged on the right side of the outer surface of the first seat 341, a second spring 346 arranged on the left side of the sliding sleeve 345, and a first spring 347 arranged on the first seat 341. The bead 347 on the right side of the inner wall of the seat 341, the outer side of the bead 347 contacts the sliding sleeve 345, and the second spring 346 provides a rightward thrust to the sliding sleeve 345. After the sliding sleeve 345 compresses the second spring 346, the sliding sleeve 345 releases the limit on the bead 347, so that the bead 347 can move to a position inside the first seat 341, and the second seat 348 is set on the right side of the first seat 341, the second support 349 embedded in the right side of the second seat 348, the second sealing plug rod 3410 that passes through and slides on the middle side of the second support 349, and the second sealing plug rod 3410 connected to the second The third spring 3411 on the left outer surface of the support 349 provides a leftward thrust to the second sealing plug rod 3410 through the third spring 3411. The right side of the first spring 344 is connected to the first sealing plug rod 343, the left side of the second spring 346 is connected to the first sleeve 341, and the left side of the third spring 3411 is connected to the second sealing plug rod 3410. The right side of the outer surface of the first sealing plug rod 343 and the left side of the outer surface of the second sealing plug rod 3410 are both provided with sealing rubber rings to improve the sealing effect when they are in the first sleeve 341 and the second sleeve 348 respectively, so as to achieve the sealing effect of the sealing plug rod 3410 through the third spring 3411. A sealing plug rod 343 and a sealing rubber ring are in contact with the first seat 341 to prevent leakage of the cooling fluid in the channel. A sealing ring 3412 is embedded in the right side of the first seat 341 to increase the sealing when in contact with the second seat 348. A limiting ring 3413 is provided at the right end of the outer surface of the first seat 341 to limit the sliding sleeve 345 to prevent the sliding sleeve 345 from running away. A card groove 3481 is provided on the middle side of the outer surface of the second seat 348 to contact and engage with the card bead 347, thereby improving the connection effect between the second seat 348 and the first seat 341 after being inserted into the interior of the first seat 341.

[0039] After the sleeve 345 is moved to the left, the second sleeve 348 is inserted into the first sleeve 341. The sleeve 345 releases the limit on the card bead 347 so that the card bead 347 moves upward and is inserted into the card groove 3481 of the second sleeve 348. Then, the thrust to the left on the sleeve 345 is released and the sleeve 345 is moved to contact the left side of the limit ring 3413 under the action of the second spring 346. At this time, the sleeve 345 limits the movement of the card bead 347 to clamp the second sleeve 348 on the inner side of the first sleeve 341. At the same time, the left side of the second sealing plug rod 3410 contacts the right side of the first sealing plug rod 343, so that the first sealing plug rod 343 is pressed into the inner side of the first support 342, and the second sealing plug rod 3410 is pressed into the inner side of the second support 349, so that the channels inside the first sleeve 341 and the second sleeve 348 are opened to facilitate the circulation of the cooling fluid.

[0040] See also Figure 1 , Figure 2 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 The present invention provides a preparation process of a high temperature co-fired aluminum nitride ceramic plate, comprising the following steps:

[0041] S1, remove the joint assembly 34 of the micro cooling channel layer 3, then stack the base layer 1, the reinforcement layer 2, the micro cooling channel layer 3, the conductive composite layer 4 and the ceramic coating 5 from top to bottom and put them into a high temperature furnace for high temperature co-firing to fully combine the materials of each layer to form a dense aluminum nitride ceramic plate;

[0042] S2. After the sintered aluminum nitride ceramic plate is cooled, the notch 6, the rectangular groove 7 and the strip groove 8 are installed at the top side of the base layer 1 by means of a grinding device, and the opened grooves are cleaned, and then the sensor is placed in the installation notch 6 to ensure that it is stable and correctly connected to the electrical interface;

[0043] S3, using a filling mechanism to fill the filling material into the installation slot 6, and compacting the filling material, and then performing high temperature curing to ensure the bonding strength between the filling material and the base layer 1;

[0044] S4. After the filling is completed, the surface of the base layer 1 is polished to ensure that it is flat and consistent with the surrounding surface, and then the joint assembly 34 is installed in the micro cooling channel layer 3 to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

[0045] The filling mechanism includes a bottom plate 91, a cylinder 92 rotatably arranged at the middle right part of the top side of the bottom plate 91, a slider 93 connected to the top end of the cylinder 92, a support frame 94 rotatably connected to the left side of the top of the bottom plate 91, and the slider 93 pushes the support frame 94 upward under the action of the cylinder 92, so that the support frame 94 can be lifted and lowered on the bottom plate 91, a push-scraping assembly 95 installed on the left side of the top of the support frame 94, a slide 96 connected to the right side of the push-scraping assembly 95, a support 97 slidably connected to the inner side of the slide 96, and a material discharge assembly fastened to the middle part of the right side of the slide 96. Part 98 and two vibration components 99 arranged on the left and right sides of the support platform 97, the bottom of the support platform 97 is fastened to the support frame 94, and the filling material swung out of the unloading component 98 is pushed flat and spread in the installation groove 6 through the reciprocating lateral movement of the pushing and scraping component 95. At the same time, the aluminum nitride ceramic plate is vibrated by the contact between the vibration component 99 and the aluminum nitride ceramic plate to vibrate the filling material in the installation groove 6 to prevent gaps. The slider 93 is slidably connected to the left side inside the support frame 94 to ensure that the support frame 94 is parallel to the aluminum nitride ceramic plate after being lowered.

[0046] Among them, the pushing and scraping assembly 95 includes a first motor 951 whose bottom is fastened to the supporting frame 94, a rotating rod 952 connected to the front output end of the first motor 951, a push rod 953 rotatably connected to the left front part of the rotating rod 952, a rotating frame 954 rotatably connected to the right end of the push rod 953, and a scraper 955 arranged at the bottom of the rotating frame 954. The upper and middle parts of the rotating frame 954 are rotatably connected to the slide 96. Under the action of the first motor 951, the rotating rod 952 drives the rotating frame 954 to push back and forth left and right, so that the scraper 955 moves left and right to scrape the filling material flat. The bottom of the scraper 955 is a Y-shaped structure. The rotating frame 954 can rotate on the slide 96 to make the scraper 955 slightly swing left and right, thereby improving the scraping effect of the scraper 955 on the filling material.

[0047] The unloading assembly 98 includes a mounting base 981 fastened to the slide 96 on the left side, a second motor 982 fastened to the right side of the top of the mounting base 981, a turntable 983 connected to the output end of the bottom of the second motor 982, a connecting rod frame 984 connected to the inner side of the turntable 983, a fulcrum column 985 rotatably connected to the front and rear sides of the inside of the connecting rod frame 984, a discharge hopper 986 fastened to the right end of the fulcrum column 985, and a hose 987 arranged on the top side of the discharge hopper 986. The turntable 983 penetrates and rotates on the inner side of the top of the mounting base 981, the left end of the fulcrum column 985 is rotatably connected to the mounting base 981, and the top end of the hose 987 is connected to the external filling material end. Under the action of the second motor 982, the turntable 983 drives the fulcrum column 985 to reciprocate on the mounting base 981 in the forward and backward directions through the cooperation with the connecting rod frame 984, so that the discharge hopper 986 swings back and forth to discharge the filling material. The material is discharged into different positions in the installation slot 6 to improve the efficiency of scraping and ensure the filling effect. A shift slot 9831 is opened on the left side of the turntable 983, and a positioning block 9832 is arranged inside the shift slot 9831. The middle side of the positioning block 9832 is rotatably connected with the connecting rod frame 984, so that when the turntable 983 rotates, the connecting rod frame 984 is driven by the positioning block 9832 to perform a rotation action. Two rows of hole slots 9833 are arranged on the left side of the rear of the turntable 983, and the two rows of hole slots 9833 are respectively located on the upper and lower sides of the rear of the shift slot 9831. The rear side of the positioning block 9832 is fastened to the inside of the hole slot 9833. The positioning block 9832 changes its position in the shift slot 9831 through the cooperation with the hole slots 9833 at different positions, thereby changing the speed and effect of the positioning block 9832 driving the connecting rod frame 984 to perform the rotation, so as to change the range and speed of the forward and backward swing of the discharge hopper 986.

[0048] The vibration homogenization component 99 includes a sleeve 991 fastened to the support 97 on the side, a third motor 992 fastened to the top side of the sleeve 991, an eccentric wheel 993 connected to the front output end of the third motor 992, a swing rod 994 rotatably connected to one side of the front of the eccentric wheel 993, a vertical rod 995 rotatably connected to the bottom of the swing rod 994, and a knocking column 996 fixed to the bottom end of the vertical rod 995. Under the action of the third motor 992, the eccentric wheel 993 cooperates with the swing rod 994 to make the vertical rod 995 drive the knocking column 996 to move up and down reciprocatingly. The inner bin 997 arranged on the middle and lower side of the sleeve 991 and the convex ring 99 formed integrally on the middle and upper part of the outer surface of the knocking column 996 are 8. The fourth spring 999 connected to the top side of the convex ring 998 and the fifth spring 9910 connected to the bottom side of the convex ring 998, the knocking column 996 penetrates and slides in the middle side of the inner bin 997 to limit the knocking column 996 and ensure the stable longitudinal displacement of the knocking column 996. The upper and lower sides of the inner bin 997 are respectively connected to the fourth spring 999 and the fifth spring 9910, so as to provide downward and upward forces to the knocking column 996 through the fourth spring 999 and the fifth spring 9910, so that the knocking column 996 has a certain buffering force when it contacts the aluminum nitride ceramic plate, avoiding damage to the aluminum nitride ceramic plate and ensuring that the filling material is vibrated evenly in the installation slot 6.

[0049] The working principle of using the filling mechanism to fill the filling material into the installation slot 6 is as follows:

[0050] First, the integral filling mechanism is installed at the position where the installation slot 6 of the aluminum nitride ceramic plate needs to be filled through the bottom plate 91. Then, after the aluminum nitride ceramic plate is moved to the right side below the support frame 94, the cylinder 92 is controlled to start so that the slider 93 drives the support frame 94 to rotate downward with the left side of the top of the bottom plate 91 as the fulcrum, so that the right side below the support frame 94 contacts and wraps around the outer side above the installation slot 6.

[0051] Secondly, the external filling material end is controlled to discharge the filling material into the discharge hopper 986, and then the first motor 951 and the second motor 982 are started. Under the action of the second motor 982, the turntable 983 drives the support shaft column 985 to reciprocate in the front and rear directions on the mounting seat 981 through the cooperation with the connecting rod frame 984, so that the discharge hopper 986 swings back and forth. Under the action of the first motor 951, the rotating rod 952 drives the rotating frame 954 and the slide 96 to push back and forth on the support platform 97, so that the discharge hopper 986 discharges the filling material into different positions in the mounting slot 6, and at the same time, the scraper 955 moves left and right to scrape the filling material flat and fill it in the mounting slot 6;

[0052] Again, when the filling material is scraped and filled, the third motor 992 can be controlled to start. Under the action of the third motor 992, the eccentric wheel 993 cooperates with the rocker arm 994 to make the vertical rod 995 drive the knocking column 996 to move back and forth up and down. In the process of the knocking column 996 moving up and down, the convex ring 998 cooperates with the fourth spring 999 and the fifth spring 9910 to make the knocking column 996 have a certain buffering force when it moves downward and contacts the aluminum nitride ceramic plate, thereby avoiding damage to the aluminum nitride ceramic plate and ensuring that the filling material is vibrated evenly in the installation slot 6.

[0053] The above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high temperature co-fired aluminum nitride ceramic plate, characterized in that: The high-temperature co-fired aluminum nitride ceramic plate comprises, from top to bottom, a base layer (1), a reinforcement layer (2), a micro-cooling channel layer (3), a conductive composite layer (4) and a ceramic coating (5); an installation slot (6) for installing a sensor is provided on the upper left side of the base layer (1); and a filling material is filled in the installation slot (6) after the sensor is installed; ceramic fiber is introduced into the reinforcement layer (2) as a reinforcement material, and both upper and lower sides are honeycomb structures; the micro-cooling channel layer (3) comprises a plate (31) connected to the reinforcement layer (2) and the conductive composite layer (4) on the upper and lower sides respectively; a first channel (32) is provided on the rear side of the plate (31), and a second channel (33) is provided on the front side of the plate (31); and the first channel (32) and the second channel (33) are connected to the right inlet and outlet of each of the first channel (32) and the second channel (33) with a joint assembly (34).

2. The high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: The filling materials are aluminum nitride ceramic powder and silicate binder.

3. The high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: Rectangular grooves (7) are provided on the left and right sides of the top of the base layer (1), and strip grooves (8) are provided on the front and back sides of the top of the base layer (1).

4. The high temperature co-fired aluminum nitride ceramic plate according to claim 1, characterized in that: The joint assembly (34) comprises a first seat (341) connected to the inlet and outlet of the first channel (32) and the second channel (33), a first support (342) embedded in the left side of the first seat (341), a first sealing plug rod (343) sliding through the middle side of the first support (342), a first spring (344) connected to the right side of the first support (342), a sliding sleeve (345) slidingly arranged on the right side of the outer surface of the first seat (341), a second spring (346) arranged on the left side of the sliding sleeve (345), a bead (347) arranged on the right side of the inner wall of the first seat (341), and a sealing plug rod (343) arranged on the right side of the inner wall of the first seat (341). A second seat (348) is provided on the right side of the interior of the second seat (341), a second support (349) is embedded in the right side of the interior of the second seat (348), a second sealing plug rod (3410) is slidably passed through the middle side of the interior of the second support (349), and a third spring (3411) is connected to the left outer surface of the second support (349), the first spring (344) is connected to the first sealing plug rod (343) on the right side, the second spring (346) is connected to the first seat (341) on the left side, the outer side of the bead (347) is in contact with the sliding sleeve (345), and the left side of the third spring (3411) is connected to the second sealing plug rod (3410).

5. The high temperature co-fired aluminum nitride ceramic plate according to claim 4, characterized in that: Sealing rubber rings are provided on the right side of the outer surface of the first sealing plug rod (343) and the left side of the outer surface of the second sealing plug rod (3410), a sealing ring (3412) is embedded in the right side of the interior of the first sleeve (341), a limiting ring (3413) for limiting the sliding sleeve (345) is provided at the right end of the outer surface of the first sleeve (341), and a groove (3481) for contacting and engaging with the card bead (347) is provided on the middle side of the outer surface of the second sleeve (348).

6. A preparation process of a high temperature co-fired aluminum nitride ceramic plate, used to implement the high temperature co-fired aluminum nitride ceramic plate according to any one of claims 1 to 5, characterized in that: The steps include: S1, removing the joint assembly (34) of the micro-cooling channel layer (3), then stacking the base layer (1), the reinforcement layer (2), the micro-cooling channel layer (3), the conductive composite layer (4) and the ceramic coating (5) from top to bottom and placing them in a high-temperature furnace for high-temperature co-firing to fully combine the materials of each layer to form a dense aluminum nitride ceramic plate; S2. After the sintered aluminum nitride ceramic plate has cooled, a notch (6), a rectangular groove (7) and a strip groove (8) are installed at the top side of the substrate layer (1) by means of a grinding device, and the opened grooves are cleaned. Then, the sensor is placed in the installation notch (6) to ensure that it is stable and the electrical interface is correctly connected; S3, using a filling mechanism to fill the filling material into the installation slot (6), compacting the filling material, and then performing high temperature curing to ensure the bonding strength between the filling material and the base layer (1); S4. After the filling is completed, the surface of the base layer (1) is polished to ensure that it is flat and consistent with the surrounding surface, and then the joint assembly (34) is installed in the micro cooling channel layer (3) to complete the preparation of the high-temperature co-fired aluminum nitride ceramic plate.

7. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 6, characterized in that: The packing mechanism comprises a bottom plate (91), a cylinder (92) rotatably arranged at the middle right portion of the top side of the bottom plate (91), a slider (93) connected to the top end of the cylinder (92), a support frame (94) rotatably connected to the left side of the top of the bottom plate (91), a push-scraping assembly (95) installed at the left side of the top of the support frame (94), a slide frame (96) connected to the right side of the push-scraping assembly (95), a support platform (97) slidably connected to the inner side of the slide frame (96), a material discharge assembly (98) fastened to the middle portion of the right side of the slide frame (96), and two vibration-leveling assemblies (99) arranged on the left and right sides of the support platform (97), wherein the slider (93) is slidably connected to the middle left portion of the inside of the support frame (94), and the bottom of the support platform (97) is fastened to the support frame (94).

8. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 7, characterized in that: The push-scrape assembly (95) comprises a first motor (951) whose bottom is fastened to a support frame (94), a rotating rod (952) connected to the front output end of the first motor (951), a push rod (953) rotatably connected to the left front portion of the rotating rod (952), a rotating frame (954) rotatably connected to the right end of the push rod (953), and a scraper (955) arranged at the bottom of the rotating frame (954); the upper middle portion of the rotating frame (954) is rotatably connected to a slide frame (96), and the bottom of the scraper (955) is in a Y-shaped structure.

9. A process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 7, characterized in that: The unloading assembly (98) includes a mounting seat (981) fastened to the left side of the slide (96), a second motor (982) fastened to the right side of the top of the mounting seat (981), a turntable (983) connected to the bottom output end of the second motor (982), a connecting rod frame (984) connected to the inner side of the turntable (983), a fulcrum column (985) rotatably connected to the front and rear sides of the connecting rod frame (984), a discharge hopper (986) fastened to the right end of the fulcrum column (985), and a hose (987) arranged on the top side of the discharge hopper (986). The turntable (983) penetrates and rotates on the inner side of the top of the mounting seat (981). The fulcrum column The left end of the rotating disk (985) is rotatably connected to the mounting seat (981), the top end of the hose (987) is connected to the end of the external filling material, a displacement groove (9831) is opened on the left side inside the rotating disk (983), a positioning block (9832) is arranged inside the displacement groove (9831), the middle side of the positioning block (9832) is rotatably connected to the connecting rod frame (984), two rows of hole grooves (9833) are arranged on the left side of the rear of the rotating disk (983), and the two rows of hole grooves (9833) are respectively located on the upper and lower sides of the rear of the displacement groove (9831), and the rear side of the positioning block (9832) is fastened inside the hole groove (9833).

10. The process for preparing a high temperature co-fired aluminum nitride ceramic plate according to claim 7, characterized in that: The vibration homogenization component (99) comprises a sleeve (991) whose side is fastened to the support (97), a third motor (992) fastened to the top side of the sleeve (991), an eccentric wheel (993) connected to the front output end of the third motor (992), a swing rod (994) rotatably connected to one side of the front of the eccentric wheel (993), a vertical rod (995) rotatably connected to the bottom of the swing rod (994), a knocking column (996) fixed to the bottom end of the vertical rod (995), and a vertical rod (997) disposed on the sleeve. (991) an inner bin (997) at the middle and lower side of the interior, a convex ring (998) integrally formed at the middle and upper part of the outer surface of the knocking column (996), a fourth spring (999) connected to the top side of the convex ring (998) and a fifth spring (9910) connected to the bottom side of the convex ring (998), the knocking column (996) penetrates and slides in the middle side of the inner bin (997), and the upper and lower sides of the inner bin (997) are respectively connected to the fourth spring (999) and the fifth spring (9910).

Images