Glass core substrate FOUP carrying box

Abstract

The invention relates to the technical field of glass core substrate production, in particular to a glass core substrate FOUP carrying box. The device comprises a box body, a cover plate and a base plate supporting mechanism, the base plate supporting mechanism is arranged in the box body, the cover plate is detachably connected to an opening in the front end of the box body, the base plate supporting mechanism comprises side edge supporting assemblies and a middle supporting assembly, and the two sides in the box body are each provided with a set of side edge supporting assemblies; a group of middle supporting assemblies are arranged in the middle in the box body, the side supporting assemblies and the middle supporting assemblies are of a multi-layer structure, and each layer of area for placing a glass core substrate is correspondingly formed by each layer of the side supporting assemblies and each layer of the middle supporting assemblies. According to the carrying box, the middle supporting set is additionally arranged, the situation that the middle of a large-size substrate collapses due to the fact that the large-size substrate is too long can be effectively prevented, and the stability of the substrate in the box body and the product quality are improved; a three-point contact mode is adopted among the middle support group, the lateral support group and the substrate, so that the contact area is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of glass core substrate production, and in particular to a glass core substrate FOUP carrying box. Background Art

[0002] Glass core substrate boxes are mainly used to place, store and transport glass substrates in semiconductor production. In order to simplify transportation and minimize the risk of contamination, specific glass core substrate boxes are used to transport and store substrates. Currently, common glass core substrate boxes are mainly suitable for round glass wafers, and the size production conditions are limited to 8~12 inches.

[0003] The existing glass core substrate box is generally only suitable for 8-12 inch round substrates, and it is difficult to produce larger square substrates. There is no support in the middle of the box, and when the substrate is larger, the middle will be deformed. The contact area between the support rod and the substrate is large, and the substrate is easily damaged.

[0004] Secondly, since the space inside the substrate box is relatively small and multiple substrates need to be separated from each other when placed, the storage and use efficiency is not high. It is not easy to prevent moisture and static electricity on the substrates in the glass substrate box. External static electricity and moisture inside the box can cause damage to the substrates, thus affecting their use. During the buckling process of the cover, there is a phenomenon that the upper edge of the wafer is inserted into the gap or edge of the arc-shaped storage groove, causing the wafer to break. Summary of the invention

[0005] The present invention provides a glass core substrate FOUP carrying box, aiming to solve the problems of existing glass core substrate boxes having small space, low storage and use efficiency, and easy damage to substrates.

[0006] The present invention provides a glass core substrate FOUP carrying box, comprising a box body, a cover plate, and a substrate supporting mechanism, wherein the substrate supporting mechanism is arranged inside the box body, the cover plate is detachably connected to the front end opening of the box body, the substrate supporting mechanism comprises a side support assembly and a middle support assembly, a group of side support assemblies are arranged at both sides of the box body, a group of middle support assemblies are arranged at the middle position of the box body, the side support assemblies and the middle support assemblies are multi-layer structures, and each layer of the side support assembly corresponds to each layer of the middle support assembly to form each layer area for placing the glass core substrate.

[0007] As a further improvement of the present invention, the side support assembly includes a side fixing column, a side support rod, a sleeve, and an O-ring. The side fixing column is connected in the box body, and multiple side support plates are respectively connected in parallel to the side fixing columns. Both ends of the side support rod are connected with sleeves, and one end of the side support rod is connected to the side fixing column at the end through the sleeve. Each side support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

[0008] As a further improvement of the present invention, the intermediate support assembly includes an intermediate fixed column, an intermediate support rod, and an O-ring. The intermediate fixed column is connected to the box body, and multiple intermediate support rods are respectively connected to the intermediate fixed column in parallel. Each of the intermediate support rods is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

[0009] As a further improvement of the present invention, a spring sheet group is provided on the cover plate, and after the cover plate is connected to the box body, the spring sheet group supports one end of the glass core substrate.

[0010] As a further improvement of the present invention, the spring sheet group is composed of a plurality of spring sheets arranged in sequence, each of the spring sheets corresponds to a glass core substrate, the two ends of the spring sheets are connected to the inner wall of the cover plate, the middle part of the spring sheets forms a spring sheet protrusion protruding from the inner wall of the cover plate, and the spring sheet protrusion supports the glass core substrate.

[0011] As a further improvement of the present invention, the front end of the box body is provided with an inwardly concave deformation cavity, the deformation cavity is provided with a lock bolt, the cover plate is provided with a rotating buckle, the end of the rotating buckle is provided with a lock head, the cover plate is sealed and connected to the deformation cavity of the box body, and the rotating buckle is screwed to insert the lock head into the lock bolt.

[0012] As a further improvement of the present invention, the glass core substrate FOUP carrying box also includes an overhead crane transport connection block, which is installed on the top of the box body. The overhead crane transport connection block is provided with a fool-proof triangular notch, and the overhead crane transport connection block is docked with the overhead crane.

[0013] As a further improvement of the present invention, the glass core substrate FOUP carrying box also includes a bottom fixing plate, which is connected to the bottom of the box body and is provided with a positioning hole that is docked with a positioning pin of the AGV.

[0014] As a further improvement of the present invention, the glass core substrate FOUP carrying box further includes handles, and the handles are connected to both sides of the box body.

[0015] As a further improvement of the present invention, the glass core substrate FOUP carrying box also includes an RFID card, and a card slot is provided on the outer wall of the box body, and the RFID card is connected in the card slot.

[0016] The beneficial effects of the present invention are: (1) For the production of square glass core substrates, it can be applied to larger-sized square substrates, which is more convenient for the automated production of larger-sized substrates and improves the productivity and applicability of larger-sized square glass substrates; (2) As the substrate size increases, the number of chips that can be produced increases, and at the same time, the production and processing efficiency can be effectively improved, thereby saving costs and achieving the effect of cost reduction and profit; (3) The addition of an intermediate support partition group can effectively prevent large-sized substrates from collapsing in the middle due to their own excessive length, thereby improving the stability of the substrate inside the box and the product quality; (4) The three-point multi-point contact method between the middle support group, the lateral support group and the substrate greatly reduces the contact area, avoiding dust pollution of the substrate due to friction, thereby ensuring the cleanliness of the substrate and reducing the rework rate and scrap rate of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a partial exploded view of the glass core substrate FOUP carrier box of the present invention; Figure 2 It is a bottom view of the box body of the present invention; Figure 3 It is a structural diagram of the side support assembly and the middle support assembly of the present invention; Figure 4 is an inner side view of the cover plate of the present invention; Figure 5 It is a structural diagram of the overhead travelling crane transport connection block of the present invention. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0019] like Figure 1 As shown, a glass core substrate FOUP carrier box of the present invention includes a box body 1, a cover plate 2, and a substrate supporting mechanism. The substrate supporting mechanism is arranged inside the box body 1, and the cover plate 2 is detachably connected to the front end opening of the box body 1. The substrate supporting mechanism includes a side support component 3 and a middle support component 4. A group of side support components 3 are arranged at both sides of the box body 1, and a group of middle support components 4 are arranged at the middle position of the box body 1. The side support components 3 and the middle support components 4 are multi-layer structures, and each layer of the side support components 3 and each layer of the middle support components 4 correspond to each layer of the area for placing the glass core substrate.

[0020] The box 1 is used to fix other mechanisms. The main functions are dustproof, waterproof and oil-proof. The box 1 can isolate the internal mechanism from direct contact with the surrounding environment, prevent dust, water stains and oil stains from the external environment from entering the machine during transportation, and effectively protect the substrates in the glass core substrate FOUP carrier box from damage, ensure the integrity and cleanliness of the substrates, and improve the product quality rate.

[0021] like Figure 3 As shown, the side support assembly 3 includes a side fixing column 31, a side support rod 32, a sleeve 33, and an O-ring 5. The side fixing column 31 is connected in the box body 1, and multiple side support plates are respectively connected to the side fixing column 31 in parallel. The two ends of the side support rod 32 are connected with the sleeve 33. One end of the side support rod 32 is connected to the side fixing column 31 at the end through the sleeve 33. At least one O-ring 5 is connected to each side support rod 32, and the glass core substrate is in contact with the O-ring 5.

[0022] The side support assembly 3 is a mechanism for supporting both sides of the glass core substrate, in which only the O-ring 5 is in contact with the glass core substrate, supporting the glass substrate in a multi-point contact manner, greatly reducing the contact area, avoiding dust pollution of the substrate due to friction, and thus ensuring the cleanliness of the substrate. The side fixing column 31 constitutes the frame of the entire side support assembly 3 and fixes the side support rod 32. Multiple parallel side support rods 32 constitute a multi-layer area for placing the glass core substrate, and each layer of the area is placed with a glass core substrate. The shaft sleeves 33 at both ends of the side support rod 32 are used to clamp the two ends of the glass core substrate to achieve the role of limiting; the material of the O-ring 5 has good resilience, and after the inner diameter of the O-ring 5 is enlarged by a tool, it can be put on the side support rod 32.

[0023] The intermediate support assembly 4 includes an intermediate fixed column 41, an intermediate support rod 42, and an O-ring 5. The intermediate fixed column 41 is connected to the box body 1, and multiple intermediate support rods 42 are respectively connected to the intermediate fixed column 41 in parallel. Each intermediate support rod 42 is connected to at least one O-ring 5, and the glass core substrate is in contact with the O-ring 5.

[0024] The middle support assembly 4 is a mechanism for supporting the middle part of the substrate to prevent the substrate from collapsing in the middle due to its own excessive length. Among them, only the O-ring 5 is in contact with the glass core substrate, and the glass core substrate is supported in a multi-point contact manner, which greatly reduces the contact area and avoids the dust generated by friction affecting the substrate, thereby ensuring the cleanliness of the substrate. The middle fixed column 41 constitutes the frame of the entire middle support assembly 4 and fixes the middle support rod 42. Multiple parallel middle support rods 42 constitute a multi-layer area for placing the glass core substrate, and each layer supports the middle position of a glass core substrate. The length of the middle support rod 42 is 3 / 4 of the length of the side support rod 32, and the glass core substrate is light in weight. The middle support rod 42 can effectively meet the load-bearing requirements, and the glass core substrate will not fall when placed on it. The material of the O-ring 5 has good resilience. After the inner diameter of the O-ring 5 is enlarged by a tool, it can be put on the middle support rod 42.

[0025] The middle support assembly 4, the side support assembly 3 and the glass core substrate are in contact with each other in a three-point multi-point contact manner, which can effectively prevent the large-sized substrate from collapsing in the middle due to its own excessive length and is suitable for larger-sized square glass substrates.

[0026] like Figure 4 As shown, the cover plate 2 is provided with a spring sheet group 21. After the cover plate 2 is docked with the box body 1, the spring sheet group 21 presses against one end of the glass core substrate. The spring sheet group 21 is composed of a plurality of spring sheets 22 arranged in sequence, each spring sheet 22 corresponds to a glass core substrate, the two ends of the spring sheet 22 are connected to the inner wall of the cover plate 2, and the middle of the spring sheet 22 forms a spring sheet 22 protrusion protruding from the inner wall of the cover plate 2, and the spring sheet 22 protrusion presses against the glass core substrate. Each spring sheet 22 is formed by bending a steel sheet multiple times and forming a protrusion in the middle. The protrusion of the spring sheet 22 can directly contact the glass core substrate, and the elasticity formed by the protrusion plays a buffering role for the glass core substrate.

[0027] The spring sheet group 21 is a mechanism for fixing the glass sheet inside the glass core substrate FOUP carrier box to prevent the substrate from rubbing against the support rods during transportation in the box body 1, thereby preventing the substrate from being worn on the surface. It also plays a role in buffering shocks and absorbing vibrations. The spring sheet group 21 protrudes a few millimeters compared to the inner wall of the cover plate 2. After the cover plate 2 is closed by the box body 1, the spring sheet group 21 will support the glass core substrate, so that the glass core substrate is close to the shaft sleeve 33 on the side support rod 32, so that the front and rear shaft sleeves 33 clamp the glass core substrate to achieve the role of limiting.

[0028] like Figure 1 As shown, the front end of the box body 1 is provided with an inwardly concave deformation cavity 11, the deformation cavity 11 is provided with a lock bolt 12, the cover plate 2 is provided with a rotating buckle 23, and the end of the rotating buckle 23 is provided with a lock head 24. The cover plate 2 is sealed and connected in the deformation cavity 11 of the box body 1, and the rotating buckle 23 is screwed to insert the lock head 24 into the lock bolt 12.

[0029] The outer cover mechanism cooperates with the cover plate 2 to form an enclosed space. The front end of the carrier box body 1 is concave. After the cover plate 2 is closed, it is embedded in the front end of the box body 1. Through the rotary buckle mechanism of the cover plate 2, a specific key is used to rotate to change the opening and closing state, and the lock 24 pops out and is inserted into the card slot 13 at the front end of the box body 1. At this time, the cover plate 2 will firmly clamp the box body 1 to form a closed structure.

[0030] The internal structure of the rotary buckle adopts a rotary telescopic method, which is mainly used to lock the cover plate 2. The opening and closing state is changed by rotating with a specific key, so that a closed space is formed inside the box to isolate the invasion of external pollution and ensure the cleanliness of the substrate.

[0031] like Figure 2 As shown, the glass core substrate FOUP transport box also includes a crane transport connection block 6, which is installed on the top of the box body 1. The crane transport connection block 6 is provided with a foolproof triangular notch 61, and the crane transport connection block 6 is connected to the crane. The crane transport connection block 6 is a structure used for crane transport and transfer. The triangular notch 61 of the crane transport connection block 6 has a foolproof function, which is used to distinguish the direction of the transport box 1 when the crane hooks the transport box 1, avoids operation errors due to wrong directions, reduces time waste, and improves production efficiency. The crane transport connection block 6 is provided with circular notches 62 in the middle and around it for grabbing and hoisting by the crane.

[0032] The glass core substrate FOUP transport box also includes a bottom fixing plate 7, which is connected to the bottom of the box body 1 and is provided with a positioning hole 71 that is docked with the positioning pin of the AGV. The bottom fixing plate 7 is a mechanism for positioning the glass core substrate FOUP transport box, and can also be used to protect the chassis of the box body 1 from unnecessary damage and ensure stable support, which can adapt to the AGV production mode.

[0033] The partial circular positioning holes 71 of the bottom fixing plate 7 cooperate with the positioning pins on the AGV to play a positioning role, and the glass core substrate FOUP carrier box can be quickly transported to the corresponding machine that needs the material through the AGV. Secondly, the partial hole positions of the bottom fixing plate 7 can be positioned with the production machine to connect and fix the carrier box 1, standardize the accuracy of the material picking position, realize the flexible connection between incoming materials and processing, logistics and production, improve work efficiency, and reduce labor costs.

[0034] The overhead crane transport connection block 6 cooperates with the bottom fixing plate 7 to make the glass core substrate FOUP transport box compatible with both overhead crane and AGV production modes, and is suitable for a variety of production modes, which is helpful for the construction of fully automatic production lines and the popularization of unmanned production workshops.

[0035] The glass core substrate FOUP carrier box also includes handles 8, which are connected to both sides of the box body 1. The handles 8 are a mechanism for transporting and transferring the entire glass core substrate FOUP carrier box, and are located on both sides of the box body 1. The glass core substrate FOUP carrier box can be held, manipulated or moved through the handles 8. The handles 8 can be selected in different colors to distinguish the type or state of the substrate.

[0036] The glass core substrate FOUP carrier box also includes an RFID card 9. The outer wall of the box body 1 is provided with a card slot 13, and the RFID card 9 is connected in the card slot 13. The card slot 13 can facilitate the replacement of the RFID card 9, and the RFID card 9 can be used to read, record, and store relevant data.

[0037] The glass core substrate FOUP carrier box has the characteristics of high cleanliness, good wear resistance, antistatic, low outgassing, dimensional stability, and recyclability. The glass core substrate FOUP carrier box mainly plays the role of placing, storing and transporting glass substrates in semiconductor production. It simplifies the glass substrate transportation process and minimizes the risk of glass substrate contamination.

[0038] The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. A glass core substrate FOUP carrier box, characterized in that: It includes a box body, a cover plate, and a substrate support mechanism, wherein the substrate support mechanism is arranged inside the box body, the cover plate is detachably connected to the front end opening of the box body, the substrate support mechanism includes a side support assembly and a middle support assembly, a group of side support assemblies are arranged at both sides of the box body, a group of middle support assemblies are arranged at the middle position of the box body, the side support assemblies and the middle support assemblies are multi-layer structures, and each layer of the side support assembly corresponds to each layer of the middle support assembly to form each layer area for placing the glass core substrate.

2. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The side support assembly includes a side fixing column, a side support rod, a sleeve, and an O-ring. The side fixing column is connected in the box body, and multiple side support plates are respectively connected in parallel to the side fixing columns. Both ends of the side support rod are connected with sleeves. One end of the side support rod is connected to the side fixing column at the end through the sleeve. Each side support rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

3. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The intermediate support assembly includes an intermediate fixing column, an intermediate supporting rod, and an O-ring. The intermediate fixing column is connected to the box body, and multiple intermediate supporting rods are respectively connected to the intermediate fixing column in parallel. Each intermediate supporting rod is connected to at least one O-ring, and the glass core substrate is in contact with the O-ring.

4. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The cover plate is provided with a spring sheet group, and after the cover plate is butted against the box body, the spring sheet group presses against one end of the glass core substrate.

5. The glass core substrate FOUP carrier box according to claim 4, characterized in that: The spring sheet group is composed of a plurality of spring sheets arranged in sequence, each of which corresponds to a glass core substrate. Both ends of the spring sheets are connected to the inner wall of the cover plate, and the middle of the spring sheets forms a spring sheet protrusion protruding from the inner wall of the cover plate, and the spring sheet protrusion supports the glass core substrate.

6. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The front end of the box body is provided with an inwardly concave deformation cavity, the deformation cavity is provided with a lock bolt, the cover plate is provided with a rotating buckle, the end of the rotating buckle is provided with a lock head, the cover plate is sealed and connected in the deformation cavity of the box body, and the rotating buckle is screwed to insert the lock head into the lock bolt.

7. The glass core substrate FOUP carrier box according to claim 1, characterized in that: It also includes a crane transport connection block, which is installed on the top of the box body. The crane transport connection block is provided with a fool-proof triangular notch, and the crane transport connection block is butt-jointed with the crane.

8. The glass core substrate FOUP carrier box according to claim 1, characterized in that: It also includes a bottom fixing plate, which is connected to the bottom of the box body and is provided with a positioning hole that is docked with a positioning pin of the AGV.

9. The glass core substrate FOUP carrier box according to claim 1, characterized in that: The box also includes handles, which are connected to both sides of the box.

10. The glass core substrate FOUP carrier box according to claim 1, characterized in that: It also includes an RFID card. The outer wall of the box body is provided with a card slot, and the RFID card is connected in the card slot.

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