A high-end electronic grade silicon-based granular material delivery valve

Abstract

The present invention discloses a high-end electronic grade silicon-based granular material conveying valve, comprising a valve body, a valve cover, a valve stem, a gate assembly, a baffle assembly and a pneumatic actuator, the gate assembly comprising a gate outer ring and a gate inner ring installed in the gate outer ring, a flow channel opening is provided at the upper part of the gate inner ring, the gate outer ring is linked to the lower end of the valve stem, the number of baffle assemblies is two groups, the baffle assembly comprises a baffle outer ring and a baffle inner ring arranged in the baffle outer ring, the baffle inner ring is arranged close to the gate inner ring, valve seats are arranged in the flow channels on both sides of the valve body, mounting holes are provided on the baffle assembly, the inner end of the valve seat is closely attached to the side of the gate inner ring, the outer cylindrical surface of the valve seat is closely attached to the inner cylindrical surface of the mounting hole; the valve seat, the baffle inner ring and the gate inner ring are all made of non-metallic wear-resistant materials. The present invention has the purity of high-end electronic grade, protects the integrity of granular materials, and can ensure the smooth operation of the valve without blocking or clogging.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor industry valves, and in particular to a high-end electronic-grade silicon-based granular material conveying valve. Background Art

[0002] With the popularization of renewable energy, solar photovoltaic power generation technology is becoming more and more mature, and high-purity silicon is increasingly used in solar cells. High-purity silicon is a key material for manufacturing solar cells. It can convert solar energy into electrical energy and realize green and clean energy supply. High-end silicon-based materials are also the cornerstone of the development of semiconductor integrated circuits, and even more so the cornerstone of chip materials. The innovation of silicon-based materials and devices will determine the future development of integrated circuits and related information technologies. Semiconductor chips made of high-purity silicon are the core components of electronic devices such as computers, mobile phones, and tablets, carrying the computing and storage functions of these devices.

[0003] However, in the process of preparing high-purity silicon from raw materials to high-end electronic-grade silicon wafers, valves must be used to adjust, transmit and cut off process materials such as granular silicon. Therefore, the performance and purity of the valves highly affect the final characteristics of the materials.

[0004] For the vast majority of valves, the valve body, internal parts, and seals are all made of metal. Silicon-based granular materials such as granular silicon have a high surface hardness and rub against the metal valve internal parts during transmission. Although the metal internal parts have undergone surface hardening measures such as spraying, it is still very easy to cause contact wear, which leads to the mixing of valve metal wear products and silicon-based materials, causing pollution.

[0005] On the other hand, silicon-based materials are generally granular during process transmission, with high hardness and strong brittleness. When they collide with valve internals, they will not only cause wear of the internals and breakage of the granular silicon, but they are also easily retained in the valve cavity to cause valve blockage and even jam the valve closing parts. The valve cannot move, causing the entire device to shut down and causing huge losses.

[0006] Prior to this, domestic and foreign technicians used a variety of ball valves, including metal hard-sealed wear-resistant ball valves, disc valves and other valves for application, but none of them could solve the two key problems of valve jamming and wear and pollution, which led to the "neck" of high-end electronic-grade silicon wafer preparation. Summary of the invention

[0007] The purpose of the present invention is to provide a high-end electronic-grade silicon-based granular material conveying valve, which has the purity of high-end electronic grade, protects the integrity of granular materials, and can ensure the smooth operation of the valve without sticking or clogging.

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-end electronic-grade silicon-based granular material conveying valve, comprising a valve body, a valve cover, a valve stem, a gate assembly, a baffle assembly and a pneumatic actuator, wherein the valve cover is installed at the upper end of the valve body, the valve stem passes through the valve cover, the output end of the pneumatic actuator is linked to the upper end of the valve stem, the gate assembly comprises a gate outer ring and a gate inner ring installed in the gate outer ring, a flow channel is provided at the upper part of the gate inner ring, the gate outer ring is linked to the lower end of the valve stem, the baffle assembly is in two groups and is symmetrically arranged on both sides of the gate assembly, and the The baffle assembly includes a baffle outer ring and a baffle inner ring arranged in the baffle outer ring, the baffle inner ring is arranged tightly against the gate inner ring, and the baffle outer ring does not contact the gate inner ring, valve seats are arranged in the flow channels on both sides of the valve body, the baffle assembly is provided with a mounting hole for the corresponding valve seat to pass through, and the inner end of the valve seat is tightly against the side of the gate inner ring, and the outer circular surface of the valve seat is tightly fitted with the inner circular surface of the mounting hole; the valve seat, the baffle inner ring and the gate inner ring are all made of non-metallic wear-resistant materials, the baffle outer ring and the gate inner ring are all made of high-strength metal materials, and the baffle outer ring does not contact the material.

[0009] The present invention is further configured such that the valve seat, the baffle inner ring and the gate inner ring are all made of high-purity silicon material.

[0010] The present invention is further configured such that the gate outer ring is provided with an inner hole matching the gate inner ring, the gate outer ring is connected to the gate inner ring by a first set screw, and the thickness of the gate inner ring is higher than that of the gate outer ring.

[0011] The present invention is further configured such that two groups of baffle assemblies are connected together by adjusting screws, the baffle outer ring is provided with an inner groove matching the baffle inner ring, the baffle outer ring is connected to the baffle inner ring by a second fixing screw, and the plane of the baffle inner ring is higher than the plane of the baffle outer ring after installation.

[0012] The present invention is further configured such that elastic components acting on the valve seat are also provided in the flow channels on both sides of the valve body, the elastic components include a combined disc spring, a sealing ring pressure plate and a valve seat sealing ring, the cross-section of the valve seat sealing ring is conical, a supporting step is provided on the inner wall of the flow channel of the valve body, one end of the combined disc spring abuts against the supporting step, and the other end of the combined spring abuts against the sealing ring pressure plate, an annular sealing cavity with a conical cross-section is formed between the sealing ring pressure plate and the valve seat, and the valve seat sealing ring is arranged in the annular sealing cavity.

[0013] The present invention is further configured such that bushings are provided in the flow channels on both sides of the valve body, and an isolating retaining ring for tightly fitting with the inner circular surface of the bushing is installed on the outer circular surface of the valve seat.

[0014] The present invention is further configured to also include a gate plate clamping assembly, the number of the gate plate clamping assemblies is two groups, and they are respectively arranged on the outside of the two baffle assemblies, the gate plate clamping assembly includes a locking screw, a sealing gasket and a pre-tensioning spring, the valve cover and the side of the valve body are both provided with process holes, the locking screw is threadedly connected to the corresponding process hole, one end of the pre-tensioning spring is abutted against the inner end of the locking screw, and the other end of the pre-tensioning spring is abutted against the outer ring of the corresponding baffle, and the sealing gasket is installed at the outer end of the process hole to abut against the screw head of the locking screw to form a sealing fit.

[0015] The present invention is further configured such that the side of the valve body is provided with a limiting rib plate for limiting the upper stroke of the gate assembly, and the bottom of the valve body is provided with a limiting protrusion for limiting the lower stroke of the gate assembly.

[0016] The present invention is further configured such that an inlet purge valve communicating with the inner cavity of the valve body is provided on the valve stem, and an outlet purge valve communicating with the inner cavity of the valve body is provided at the lower end of the valve body.

[0017] The present invention is further configured to include a control device, which includes a filter pressure reducer, an electromagnetic controller, a speed regulator (open), and a speed regulator (closed) connected to the pneumatic actuator through a pipeline, and the speed of the valve switching stroke is controlled by adjusting the speed regulator (open) and the speed regulator (closed).

[0018] The present invention is further configured that a buffer limit mechanism is also provided at the bottom of the valve body, and the buffer limit mechanism includes two guide seats, a movable seat, a buffer ball and a compression spring. The two guide seats are symmetrically installed at the bottom of the valve body, and a guide channel for the gate assembly to extend into is formed between the two guide seats. The movable seat can be vertically movably arranged in the guide channel, and guide protrusions are respectively provided on both sides of the movable seat. A guide groove extending vertically is respectively provided on the inner side of the two guide seats, and the guide protrusions are slidably arranged in the corresponding guide grooves. One end of the compression spring is abutted against the bottom of the valve body, and the other end of the compression spring is abutted against the bottom of the movable seat. A through groove is provided at the upper end of the movable seat, and the buffer ball is arranged in the through groove, and a limiting flange is provided at the upper end of the movable seat for limiting the bottom of the buffer ball in the through groove, and a threaded groove is provided at a position of the movable seat corresponding to the bottom of the through groove, and a hexagonal nut for supporting the buffer ball is threadedly connected to the threaded groove.

[0019] The present invention is further configured to include a locking assembly symmetrically arranged on both sides of the valve body, the locking assembly including a locking rod and a sleeve, the sleeve being welded to the outer side of the valve body, the valve body and the guide seat being respectively provided with a first through hole and a second through hole coaxial with the sleeve, the locking rod passing through the sleeve and the first through hole and the second through hole, and an O-ring for sealing being provided on the outer periphery of the locking rod, and a locking hole for matching with the locking rod being provided on the side of the guide protrusion; a sliding hole extending along the axial direction of the sleeve being provided on the side of the sleeve, a first locking groove and a second locking groove extending along the circumferential direction of the sleeve being provided at both ends of the sliding hole, a locking convex portion being provided on the side of the locking rod, and when the locking convex portion slides into the first locking groove, an end portion of the locking rod is arranged in the second through hole, and when the locking convex portion slides into the second locking groove, the end portion of the locking rod is inserted into the locking hole.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. All parts in contact with the material are made of high-purity silicon, which is a material that is completely consistent with the material. The characteristics of high-purity silicon material are high hardness and high wear resistance. During the valve switch operation (including the adjustment process), it has good anti-scouring and anti-wear properties. Since its material is completely consistent with the material, even the worn-down particles and powder will not pollute the material at all, ensuring extremely high purity, including the high-cleanliness transmission operation of all silicon-based materials such as high-end electronic-grade silicon-based granular materials.

[0022] 2. In view of the brittle and easy-to-break characteristics of high-purity silicon-based materials, on the one hand, an elastic contact structure (gate clamping assembly) is set for the compression and contact surfaces; on the other hand, the valve switch stroke speed can be set through the control device to a slow opening and closing operation suitable for granular materials, ensuring the integrity of the granular materials throughout the entire stroke.

[0023] 3. When the valve is fully closed, the blind plate at the lower end of the gate isolates the valve seat and the valve body flow channel, forming a valve seal. At this time, even if some granular materials are carried away by the gate flow channel, when the valve is opened, the granular materials will be carried downstream along with the materials in the valve body and valve seat flow channel. In this way, the granular materials always move in the space isolated by the baffle, valve seat and gate, and cannot leak into the valve cavity, causing the valve cavity to be blocked and the valve to be stuck, thus achieving the purpose of preventing the valve from being blocked and stuck.

[0024] 4. The present invention also takes into account solutions under extreme working conditions, that is, under extreme working conditions where the valve is blocked, an inlet purge valve is provided at the upper end of the valve cover, and an outlet purge valve is provided at the lower end of the valve body. Nitrogen or a suitable gas pipeline can be installed on site to purge and clean the inner cavity of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1This is a schematic diagram of the overall structure of Example 1 (fully closed state);

[0026] Figure 2 It is a side view of the whole embodiment 1 (fully opened state);

[0027] Figure 3 for Figure 1 Schematic diagram of the valve seat installation structure;

[0028] Figure 4 for Figure 1 Detailed structural diagram of the gate assembly;

[0029] Figure 5 for Figure 1 Detailed structural diagram of the baffle assembly;

[0030] Figure 6 for Figure 1 The structural diagram of the gate clamping mechanism after installation in the middle AA section;

[0031] Figure 7 This is a schematic diagram of the overall structure of Example 2 (fully closed state);

[0032] Figure 8 for Figure 7 Detailed structural diagram of the middle buffer limit mechanism.

[0033] In the figure: 1. valve body; 2. valve cover; 3. valve stem; 4. gate assembly; 5. baffle assembly; 6. pneumatic actuator; 7. gate outer ring; 8. gate inner ring; 9. flow channel; 10. baffle outer ring; 11. baffle inner ring; 12. valve seat; 13. mounting hole; 14. inner hole; 15. first set screw; 16. adjustment screw; 17. inner groove; 18. second set screw; 19. elastic assembly; 20. combined disc spring; 21. sealing ring pressure plate; 22. valve seat sealing ring; 23. support step; 24. annular sealing chamber; 25. bushing; 26. isolation retaining ring; 27. gate clamping assembly; 28. locking screw; 29. ​​sealing gasket; 30. preload spring; 31. process hole; 32. limit rib plate ; 33. Limiting protrusion; 34. Inlet purge valve; 35. Outlet purge valve; 36. Filter pressure reducer; 37. Solenoid controller; 38. Speed ​​regulator (open); 39. Speed ​​regulator (closed); 40. Buffering limiting mechanism; 41. Guide seat; 42. Movable seat; 43. Buffer ball; 44. Compression spring; 45. Guide channel; 46. Guide protrusion; 47. Guide groove; 48. Through groove; 49. Limiting flange; 50. Threaded groove; 51. Hexagon socket nut; 52. Locking assembly; 53. Locking rod; 54. Bushing; 55. First through hole; 56. Second through hole; 57. O-ring; 58. Locking hole; 59. Sliding hole; 60. First locking groove; 61. Second locking groove; 62. Locking protrusion. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] Embodiment 1: As attached Figures 1 to 6 A high-end electronic-grade silicon-based granular material conveying valve shown in the figure comprises a valve body 1, a valve cover 2, a valve stem 3, a gate assembly 4, a baffle assembly 5 and a pneumatic actuator 6, wherein the valve cover 2 is mounted on the upper end of the valve body 1, the valve stem 3 penetrates the valve cover 2, the output end of the pneumatic actuator 6 is linked to the upper end of the valve stem 3, a position indicator is arranged on the upper end of the pneumatic actuator 6 to facilitate observation of the valve action position, the gate assembly 4 is arranged at the center of the valve body 1, the gate assembly 4 comprises a gate outer ring 7 and a gate inner ring 8 installed in the gate outer ring 7, a flow channel opening 9 is arranged on the upper part of the gate inner ring 8, the gate outer ring 7 is linked to the lower end of the valve stem 3, the valve stem 3 and the gate outer ring 7 are connected by a "T"-shaped groove, and a baffle 11 is arranged in the "T"-shaped groove to prevent the valve stem 3 from falling off from the gate. There are two groups of baffle assemblies 5, which are symmetrically arranged on both sides of the gate assembly 4. The baffle assembly 5 includes a baffle outer ring 10 and a baffle inner ring 11 arranged in the baffle outer ring 10. The baffle inner ring 11 is arranged closely to the gate inner ring 8, and the baffle outer ring 10 does not contact the gate inner ring 8. Valve seats 12 are arranged in the flow channels on both sides of the valve body 1. The baffle assembly 5 is provided with mounting holes 13 for the corresponding valve seats 12 to pass through, and the inner end of the valve seat 12 is closely attached to the side of the gate inner ring 8, and the outer circular surface of the valve seat 12 is closely attached to the inner circular surface of the mounting hole 13; the valve seat 12, the baffle inner ring 11 and the gate inner ring 8 are all made of non-metallic wear-resistant materials, the baffle outer ring 10 and the gate inner ring 8 are all made of high-strength metal materials, and the baffle outer ring does not contact the material. More specifically, the valve seat 12, the baffle inner ring 11 and the gate inner ring 8 are all made of materials that are completely consistent with or very close to the composition of electronic-grade high-purity silicon-based granular materials. This embodiment is made of high-purity silicon materials (that is, high-purity granular silicon, including high-purity silicon with up to 9 nines, super high-purity silicon with 12 nines, and other high-end electronic-grade silicon-based granular materials). In addition, the material can also be replaced with other high-purity silicon-based materials according to the actual needs of customers, such as high-purity silicon carbide.

[0036] By adopting the above scheme, all parts in contact with the material are made of the same material as the material - high-purity silicon. The characteristics of high-purity silicon material are high hardness and high wear resistance. During the valve switching operation (including the adjustment process), it has good anti-erosion and anti-wear properties. Since its material is exactly the same as the material, even the granular powder worn off will not pollute the material at all, ensuring extremely high purity, including high-cleanliness transmission operation of all silicon-based materials such as high-end electronic-grade silicon-based granular materials.

[0037] As attached Figure 4 As shown, the gate outer ring 7 is provided with an inner hole 14 matching the gate inner ring 8, and the gate outer ring 7 is connected to the gate inner ring 8 by a first set screw 15. The first set screw 15 is used to adjust the position distance between the baffle inner ring 11 and the baffle outer ring 10 for the gate assembly 4, and the thickness of the gate inner ring 8 is higher than that of the gate outer ring 7.

[0038] As attached Figure 5 As shown, the two groups of baffle assemblies 5 are connected together by adjusting screws 16, and the distance position is adjusted by adjusting screws 16. The baffle outer ring 10 is provided with an inner groove 17 matching the baffle inner ring 11. The baffle outer ring 10 is connected to the baffle inner ring 11 by a second fixing screw 18, and the plane of the baffle inner ring 11 is higher than the plane of the baffle outer ring 10 after installation.

[0039] The flow channel opening 9 of the gate is set at the upper end of the gate inner circle 8. When the valve stem 3 moves downward into place, the valve is fully opened, and the gate flow channel opening 9 is completely consistent with the flow channel of the valve body 1. The valve stem 3 rises until the valve stem 3 and the valve cover 2 are tightly sealed at the reverse seal, and the valve is fully closed. The height setting of the baffle assembly 5 is completely matched with the valve stroke. The purpose is that the full-open and full-close full-stroke movements of the gate assembly 4 are all active in the isolation space formed by the symmetrical baffle assemblies 5 at both ends.

[0040] As attached Figure 3As shown, the flow passages on both sides of the valve body 1 are also provided with elastic components 19 acting on the valve seat 12, the elastic components 19 include a combination disc spring 20, a sealing ring pressing plate 21 and a valve seat sealing ring 22, the cross section of the valve seat sealing ring 22 is conical, and a support step 23 is provided on the inner wall of the flow passage of the valve body 1, one end of the combination disc spring 20 is against the support step 23, and the other end of the combination spring is against the sealing ring pressing plate 21, and an annular sealing cavity 24 with a conical cross section is formed between the sealing ring pressing plate 21 and the valve seat 12, and the valve seat sealing ring 22 is arranged in the annular sealing cavity 24. Bushings 25 are also provided in the flow passages on both sides of the valve body 1, and an isolation retaining ring 26 for tightly fitting with the inner surface of the bushing 25 is also installed on the outer circumferential surface of the valve seat 12. The combined disc spring 20 performs pre-tightening and sealing on the valve seat sealing ring 22 on the one hand, and exerts a sealing pre-tightening force on the valve seat 12 to the gate plate on the other hand, so as to promote a close fit between the valve seat 12 and the gate plate.

[0041] As attached Figure 6 As shown, it also includes a gate clamping assembly 27, the number of which is two groups, and they are respectively arranged outside the two baffle assemblies 5, the gate clamping assembly 27 includes a locking screw 28, a sealing gasket 29 and a preload spring 30, the valve cover 2 and the valve body 1 are both provided with process holes 31, the locking screw 28 is threadedly connected to the corresponding process hole 31, one end of the preload spring 30 abuts against the inner end of the locking screw 28, and the other end of the preload spring 30 abuts against the corresponding baffle outer ring 10, and the sealing gasket 29 is installed at the outer end of the process hole 31 to abut against the screw head of the locking screw 28 to form a sealing fit. The preload spring 30 acts on the symmetrically arranged left and right baffle outer rings 10, and through the push and fit of the combined disc spring 20 on the valve seat 12, the valve seat 12, the gate inner ring 8, and the baffle inner ring 11 (two symmetrical ones) are closely attached.

[0042] As attached Figure 1 As shown, the delivery valve also includes a control device, which includes a filter pressure reducer 36 connected to the pneumatic actuator 6 through a pipeline, an electromagnetic controller 37, a speed regulator (open) 38, and a speed regulator (closed) 39. By adjusting the speed regulator (open) 38 and the speed regulator (closed) 39, the speed of the valve switching stroke is controlled.

[0043] In view of the brittle and easily broken characteristics of high-purity silicon-based materials, on the one hand, an elastic contact structure (gate clamping component 27) of the pressing and contact surfaces is set, and on the other hand, the valve switch stroke speed can be set through the control device to a slow opening and closing operation suitable for the granular material, thereby ensuring the integrity of the granular material throughout the entire stroke.

[0044] As attached Figure 1 and attached Figure 6As shown, the side of the valve body 1 is provided with a limit rib 32 for constituting an upper stroke limit for the gate assembly 4, and the bottom of the valve body 1 is provided with a limit protrusion 33 for constituting a lower stroke limit for the gate assembly 4. The entire seal and moving assembly move within a limited range, and the positioning is reliable and stable, and can withstand uncertain external interference such as vibration and swing during the operation of the device and the valve, ensuring that the valve can always operate and work stably and reliably.

[0045] As attached Figure 2 As shown, the valve stem 3 is provided with an inlet purge valve 34 communicating with the inner cavity of the valve body 1, and the lower end of the valve body 1 is provided with an outlet purge valve 35 communicating with the inner cavity of the valve body 1. That is, under the extreme working condition that the valve is blocked, the upper end valve cover 2 is provided with an inlet purge valve 34, and the lower end of the valve body 1 is provided with an outlet purge valve 35, and nitrogen or a suitable gas pipeline can be installed on site to purge and clean the inner cavity of the valve.

[0046] Embodiment 2: Based on Embodiment 1, this embodiment sets a buffer limit mechanism 40 at the bottom of the valve body 1. Figure 7 and attached Figure 8As shown, the buffer limit mechanism 40 includes two guide seats 41, a movable seat 42, a buffer ball 43 (made of rubber or silicone material) and a compression spring 44. The two guide seats 41 are symmetrically installed at the bottom of the valve body 1. The guide seat 41 can be welded to the bottom of the valve body 1, or it can be an integrated structure with the valve body 1, and a guide channel 45 for the gate assembly 4 to extend into is formed between the two guide seats 41. The movable seat 42 can be vertically movably arranged in the guide channel 45. The two sides of the movable seat 42 are respectively provided with guide protrusions 46, and the inner sides of the two guide seats 41 are respectively provided with a vertically extending The guide groove 47 is provided, and the guide protrusion 46 is slidably arranged in the corresponding guide groove 47. One end of the compression spring 44 is abutted against the bottom of the valve body 1, and the other end of the compression spring 44 is abutted against the bottom of the movable seat 42. A through groove 48 is provided at the upper end of the movable seat 42, and the buffer ball 43 is arranged in the through groove 48. A limiting flange 49 is provided at the upper end of the movable seat 42 for limiting the bottom of the buffer ball 43 in the through groove 48. The movable seat 42 is provided with a threaded groove 50 at a position corresponding to the bottom of the through groove 48, and a hexagonal nut 51 for supporting the buffer ball 43 is threadedly connected to the threaded groove 50. The valve body 1 further includes a locking assembly 52 symmetrically arranged on both sides of the valve body 1, the locking assembly 52 includes a locking rod 53 and a shaft sleeve 54, the shaft sleeve 54 is welded to the outside of the valve body 1, the valve body 1 and the guide seat 41 are respectively provided with a first through hole 55 and a second through hole 56 coaxial with the shaft sleeve 54, the locking rod 53 passes through the shaft sleeve 54 and the first through hole 55 and the second through hole 56, and an O-ring 57 for sealing is arranged on the periphery of the locking rod 53, the side of the guide protrusion 46 is provided with a locking hole 58 for matching with the locking rod 53; the side of the shaft sleeve 54 is provided with a through hole 58 along the shaft sleeve 54, and the through hole 55 and the second through hole 56 are respectively provided with a first through hole 55 and a second through hole 56 coaxial with the shaft sleeve 54, and the locking rod 53 passes through the shaft sleeve 54 and the first through hole 55 and the second through hole 56, and the locking rod 53 is provided with an O-ring 57 for sealing. The sliding hole 59 extends axially, and the two ends of the sliding hole 59 are respectively provided with a first locking groove 60 and a second locking groove 61 extending along the circumferential direction of the shaft sleeve 54. The side of the locking rod 53 is provided with a locking protrusion 62, which can be threadedly connected to the side of the locking rod 53, or can be inserted into the side of the locking rod 53 by interference, or can be welded to the side of the locking rod 53. When the locking protrusion 62 slides into the first locking groove 60, the end of the locking rod 53 is set in the second through hole 56. When the locking protrusion 62 slides into the second locking groove 61, the end of the locking rod 53 is inserted into the locking hole 58.

[0047] When the locking protrusion on the locking rod 53 is located in the first locking groove 60, the movable seat 42 can move up and down. When the valve is opened, the gate assembly 4 first hits and pushes the buffer ball 43 of the buffer limit mechanism 40 to move downward until the movable seat 42 moves to the bottom of the valve body 1. The gate assembly 4 will not produce a direct rigid impact with the inner wall of the valve body 1, which has a buffering and protective effect on the gate assembly 4; when the locking protrusion on the locking rod 53 is located in the second locking groove 61, the end of the locking rod 53 can be inserted into the locking hole 58 of the guide protrusion 46 to lock the movable seat 42 and limit the gate assembly 4 to avoid accidental opening.

Claims

1. A high-end electronic grade silicon-based granular material delivery valve, characterized by: The invention comprises a valve body (1), a valve cover (2), a valve stem (3), a gate assembly (4), a baffle assembly (5) and a pneumatic actuator (6), wherein the valve cover (2) is mounted on the upper end of the valve body (1), the valve stem (3) passes through the valve cover (2), the output end of the pneumatic actuator (6) is linked to the upper end of the valve stem (3), the gate assembly (4) comprises a gate outer ring (7) and a gate inner ring (8) mounted inside the gate outer ring (7), a flow channel opening (9) is provided at the upper part of the gate inner ring (8), the gate outer ring (7) is linked to the lower end of the valve stem (3), the baffle assembly (5) is in two groups and is symmetrically arranged on both sides of the gate assembly (4), the baffle assembly (5) comprises a baffle outer ring (10) and a baffle inner ring (8) arranged on the baffle outer ring (10) ), the baffle inner ring (11) is arranged in close contact with the gate inner ring (8), and the baffle outer ring (10) does not contact the gate inner ring (8), valve seats (12) are arranged in the flow channels on both sides of the valve body (1), the baffle assembly (5) is provided with a mounting hole (13) for the corresponding valve seat (12) to pass through, and the inner end of the valve seat (12) is in close contact with the side of the gate inner ring (8), and the outer circular surface of the valve seat (12) is in close contact with the inner circular surface of the mounting hole (13); the valve seat (12), the baffle inner ring (11) and the gate inner ring (8) are all made of high-purity silicon material, the baffle outer ring (10) and the gate inner ring (8) are all made of high-strength metal material, and the baffle outer ring (10) does not contact the material; The gate outer ring (7) is provided with an inner hole (14) matching the gate inner ring (8), the gate outer ring (7) is connected to the gate inner ring (8) through a first set screw (15), and the gate inner ring (8) is thicker than the gate outer ring (7); The two groups of baffle assemblies (5) are connected together by adjusting screws (16); the baffle outer ring (10) is provided with an inner groove (17) matching the baffle inner ring (11); the baffle outer ring (10) is connected to the baffle inner ring (11) by a second fixing screw (18); and the plane of the baffle inner ring (11) is higher than the plane of the baffle outer ring (10) after installation.

2. A high-end electronic grade silicon-based granular material delivery valve according to claim 1, characterized in that: The flow channels on both sides of the valve body (1) are also provided with elastic components (19) acting on the valve seat (12), the elastic components (19) comprising a combined disc spring (20), a sealing ring pressure plate (21) and a valve seat sealing ring (22), the cross section of the valve seat sealing ring (22) being conical in shape, a supporting step (23) being provided on the inner wall of the flow channel of the valve body (1), one end of the combined disc spring (20) being against the supporting step (23), the other end of the combined spring being against the sealing ring pressure plate (21), an annular sealing cavity (24) with a conical cross section is formed between the sealing ring pressure plate (21) and the valve seat (12), and the valve seat sealing ring (22) being arranged in the annular sealing cavity (24).

3. A high-end electronic grade silicon-based granular material delivery valve according to claim 2, characterized in that: Bushings (25) are also provided in the flow passages on both sides of the valve body (1), and an isolation retaining ring (26) is also installed on the outer circumferential surface of the valve seat (12) for tightly fitting with the inner circumferential surface of the bushing (25).

4. The high-end electronic grade silicon-based granular material delivery valve according to claim 1, characterized in that: It also includes a gate clamping assembly (27). The gate clamping assembly (27) is in two groups and is respectively arranged on the outside of the two baffle assemblies (5). The gate clamping assembly (27) includes a locking screw (28), a sealing gasket (29) and a preload spring (30). The valve cover (2) and the valve body (1) are both provided with process holes (31). The locking screw (28) is threadedly connected to the corresponding process hole (31). One end of the preload spring (30) abuts against the inner end of the locking screw (28), and the other end of the preload spring (30) abuts against the corresponding baffle outer ring (10). The sealing gasket (29) is installed at the outer end of the process hole (31) to abut against the screw head of the locking screw (28) to form a sealing fit.

5. The high-end electronic grade silicon-based granular material delivery valve according to claim 1, characterized in that: The side of the valve body (1) is provided with a limiting rib (32) for limiting the upper stroke of the gate assembly (4), and the bottom of the valve body (1) is provided with a limiting protrusion (33) for limiting the lower stroke of the gate assembly (4).

6. The high-end electronic grade silicon-based granular material delivery valve according to claim 1, characterized in that: The valve stem (3) is provided with an inlet purge valve (34) which is in communication with the inner cavity of the valve body (1), and the lower end of the valve body (1) is provided with an outlet purge valve (35) which is in communication with the inner cavity of the valve body (1).

7. The high-end electronic-grade silicon-based granular material delivery valve according to claim 1, characterized in that: The bottom of the valve body (1) is also provided with a buffer limit mechanism (40), the buffer limit mechanism (40) comprising two guide seats (41), a movable seat (42), a buffer ball (43) and a compression spring (44), the two guide seats (41) are symmetrically mounted on the bottom of the valve body (1), and a guide channel (45) for the gate assembly (4) to extend therein is formed between the two guide seats (41), the movable seat (42) can be vertically movably arranged in the guide channel (45), the two sides of the movable seat (42) are respectively provided with guide protrusions (46), the inner sides of the two guide seats (41) are respectively provided with a guide groove (47) extending in the vertical direction, the guide protrusions (46) 46) is slidably arranged in the corresponding guide groove (47), one end of the compression spring (44) is against the bottom of the valve body (1), and the other end of the compression spring (44) is against the bottom of the movable seat (42), the upper end of the movable seat (42) is provided with a through groove (48), the buffer ball (43) is arranged in the through groove (48), and the upper end of the movable seat (42) is provided with a limiting flange (49) for limiting the bottom of the buffer ball (43) in the through groove (48), and the movable seat (42) is provided with a threaded groove (50) at a position corresponding to the bottom of the through groove (48), and the threaded groove (50) is threadedly connected with a hexagonal nut (51) for supporting the buffer ball (43).

8. The high-end electronic-grade silicon-based granular material delivery valve according to claim 7, characterized in that: The valve body (1) further comprises a locking assembly (52) symmetrically arranged on both sides of the valve body (1), the locking assembly (52) comprising a locking rod (53) and a shaft sleeve (54), the shaft sleeve (54) being welded to the outer side of the valve body (1), the valve body (1) and the guide seat (41) respectively being provided with a first through hole (55) and a second through hole (56) coaxial with the shaft sleeve (54), the locking rod (53) passing through the shaft sleeve (54) and the first through hole (55) and the second through hole (56), and an O-ring (57) for sealing is arranged on the outer periphery of the locking rod (53), and a side portion of the guide protrusion (46) is provided with a sealing ring for engaging with the locking rod (53) ) is matched with a locking hole (58); a sliding hole (59) extending axially along the shaft sleeve (54) is opened on the side of the shaft sleeve (54), and a first locking groove (60) and a second locking groove (61) extending circumferentially along the shaft sleeve (54) are respectively provided at both ends of the sliding hole (59); a locking protrusion (62) is provided on the side of the locking rod (53); when the locking protrusion (62) slides into the first locking groove (60), the end of the locking rod (53) is arranged in the second through hole (56); when the locking protrusion (62) slides into the second locking groove (61), the end of the locking rod (53) is inserted into the locking hole (58).

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