MEMS angular velocity sensor

Abstract

The invention discloses an MEMS angular velocity sensor, and the sensor comprises a first detection structure which detects the angular velocity in a first axis direction; the second detection structures are used for detecting the angular speed in the second axis direction, the second detection structures are located on the two sides of the first detection structure, the projection of an overall structure formed by the second detection structures and the first detection structure is of a cross structure, and four independent corner areas of the cross structure are formed; the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block are of the same structure, and each driving mass block in the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block is located in one corner area. According to the MEMS angular velocity sensor, the four driving mass blocks are located in the four corner areas integrally formed by the first detection structure and the second detection structure, and the influence of inter-axis interference on the precision of the sensor is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a MEMS angular velocity sensor. Background Art

[0002] MEMS angular velocity sensors are widely used in consumer electronics, automotive electronics, industrial electronics and other fields. Especially in some new application scenarios, such as AR / VR and autonomous driving, MEMS angular velocity sensors are required to maintain high performance in vibration scenarios.

[0003] Existing three-axis MEMS angular velocity sensors often have a design in which two axes share a mass block, which will cause inter-axis interference when detecting the angular velocity of each axis, thereby reducing the detection accuracy of the MEMS angular velocity sensor. Summary of the invention

[0004] In view of the above problems, the purpose of the present application is to provide a MEMS angular velocity sensor with higher detection accuracy.

[0005] According to one aspect of the present invention, there is provided a MEMS angular velocity sensor, comprising:

[0006] A first detection structure, used for detecting the angular velocity in the direction of the first axis;

[0007] A second detection structure is used to detect the angular velocity in the direction of a second axis, the first axis is perpendicular to the second axis, and the second detection structure is located on both sides of the first detection structure, wherein the projection of the overall structure composed of the second detection structure and the first detection structure is a cross structure, and four independent corner areas of the cross structure are formed;

[0008] The first driving mass, the second driving mass, the third driving mass and the fourth driving mass have the same structure, and each of the first driving mass, the second driving mass, the third driving mass and the fourth driving mass is located in one of the corner areas.

[0009] Optionally, the first drive mass block and the second drive mass block are respectively coupled to a second detection structure located between the two, the third drive mass block and the fourth drive mass block are respectively coupled to the second detection structure located between the two, the first drive mass block and the fourth drive mass block are respectively coupled to the first detection structure located between the two, and the second drive mass block and the third drive mass block are respectively coupled to the first detection structure located between the two.

[0010] Optionally, it also includes:

[0011] The third detection structure is used to detect the angular velocity in the direction of the third axis, and is located in the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block. The third axis is perpendicular to the plane where the first axis and the second axis are located.

[0012] Optionally, the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block are symmetrical as a whole about the first axis and the second axis, or the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block are symmetrical as a whole about the first axis, the second axis and the center.

[0013] Optionally, the first detection structure is symmetrical about the first axis and the second axis, or the first detection structure is symmetrical about the first axis, the second axis and the center.

[0014] Optionally, the first detection structure includes:

[0015] a plurality of coupling beams of a first detection structure;

[0016] a first detection mass, located between the first drive mass and the fourth drive mass, the first detection mass being coupled to the first drive mass and the fourth drive mass via a coupling beam of a corresponding first detection structure;

[0017] The second detection mass block is located between the second driving mass block and the third driving mass block. The second detection mass block is coupled to the second driving mass block and the third driving mass block via the coupling beam of the corresponding first detection structure. The second detection mass block is coupled to the first detection mass block via the coupling beam of the corresponding first detection structure.

[0018] Optionally, the first detection mass block and the second detection mass block are arranged side by side along the first axis direction.

[0019] Optionally, the second detection structure includes:

[0020] a plurality of coupling beams of a second detection structure;

[0021] a third detection mass block and a fourth detection mass block located at a first side of the first detection structure, the third detection mass block and the fourth detection mass block being located between the first driving mass block and the second driving mass block, the third detection mass block being coupled to the first driving mass block via a coupling beam of a corresponding second detection structure, the fourth detection mass block being coupled to the second driving mass block via a coupling beam of a corresponding second detection structure, and the fourth detection mass block being coupled to the third detection mass block via a coupling beam of a corresponding second detection structure;

[0022] The fifth detection mass block and the sixth detection mass block are located on the second side of the first detection structure, and the fifth detection mass block and the sixth detection mass block are located between the third driving mass block and the fourth driving mass block. The fifth detection mass block is coupled to the third driving mass block via the coupling beam of the corresponding second detection structure, and the sixth detection mass block is coupled to the fourth driving mass block via the coupling beam of the corresponding second detection structure. The sixth detection mass block is coupled to the fifth detection mass block via the coupling beam of the corresponding second detection structure.

[0023] Optionally, the third detection mass block and the sixth detection mass block are arranged side by side along the second axis direction, the fourth detection mass block and the fifth detection mass block are arranged side by side along the second axis direction, the third detection mass block and the fourth detection mass block are arranged side by side along the first axis direction, and the fifth detection mass block and the sixth detection mass block are arranged side by side along the first axis direction.

[0024] Optionally, the second detection structure further includes:

[0025] a first anchor point and a second anchor point located at a first side of the first detection structure, the first anchor point and the second anchor point being located between the third detection mass block and the fourth detection mass block, the third detection mass block and the fourth detection mass block being coupled to the first anchor point and the second anchor point via coupling beams of the corresponding second detection structure;

[0026] A third anchor point and a fourth anchor point are located on the second side of the first detection structure, the third anchor point and the fourth anchor point are located between the fifth detection mass block and the sixth detection mass block, and the fifth detection mass block and the sixth detection mass block are coupled to the third anchor point and the fourth anchor point via coupling beams of the corresponding second detection structure.

[0027] Optionally, the first anchor point, the second anchor point, the third anchor point, and the fourth anchor point are distributed in parallel along the second axis.

[0028] Optionally, the third detection structure is symmetrical about the first axis and the second axis, or the third detection structure is symmetrical about the first axis, the second axis and the center.

[0029] Optionally, the third detection structure includes:

[0030] a plurality of coupling beams of a third detection structure;

[0031] a seventh detection mass, located in the first opening of the first driving mass, the seventh detection mass being coupled to the first driving mass via a coupling beam of a corresponding third detection structure;

[0032] an eighth detection mass, located in the first opening of the second driving mass, the eighth detection mass being coupled to the second driving mass via a coupling beam of a corresponding third detection structure;

[0033] a ninth detection mass, located in the first opening of the third driving mass, the ninth detection mass being coupled to the third driving mass via a coupling beam of a corresponding third detection structure;

[0034] a tenth detection mass block, located in the first opening of the fourth driving mass block, the tenth detection mass block being coupled to the fourth driving mass block via a coupling beam of a corresponding third detection structure;

[0035] a first bridging beam coupled to the seventh detection mass via a coupling beam of a corresponding third detection structure, and coupled to the eighth detection mass via a coupling beam of a corresponding third detection structure; and

[0036] The second bridging beam is coupled to the ninth detection mass block via a coupling beam of a corresponding third detection structure, and is coupled to the tenth detection mass block via a coupling beam of a corresponding third detection structure.

[0037] Optionally, the seventh detection mass block and the tenth detection mass block are arranged side by side along the second axis direction, the eighth detection mass block and the ninth detection mass block are arranged side by side along the second axis direction, the seventh detection mass block and the eighth detection mass block are arranged side by side along the first axis direction, and the ninth detection mass block and the tenth detection mass block are arranged side by side along the first axis direction.

[0038] Optionally, it also includes:

[0039] a coupling beam that drives the mass;

[0040] There are four groups of anchor points, each group of anchor points includes a fifth anchor point and a sixth anchor point arranged in parallel along the first axis direction, each driving mass block is coupled to a group of anchor points via a corresponding coupling beam of the driving mass block, wherein the fifth anchor point and the sixth anchor point in each group of anchor points are respectively located on two opposite sides of the driving mass block coupled thereto.

[0041] Optionally, in the driving mode, each of the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block performs linear motion along the first axis direction;

[0042] The seventh detection mass block follows the first driving mass block to make linear motion, the eighth detection mass block follows the second driving mass block to make linear motion, the ninth detection mass block follows the third driving mass block to make linear motion, and the tenth detection mass block follows the fourth driving mass block to make linear motion;

[0043] The third detection mass block follows the first driving mass block to make linear motion, the fourth detection mass block follows the second driving mass block to make linear motion, the fifth detection mass block follows the third driving mass block to make linear motion, and the sixth detection mass block follows the fourth driving mass block to make linear motion;

[0044] The first detection mass block performs rotational motion in a plane defined by a first axis and a second axis along with the first drive mass block and the fourth drive mass block coupled thereto, and the second detection mass block performs rotational motion in a plane defined by the first axis and the second axis along with the second drive mass block and the third drive mass block coupled thereto,

[0045] The first driving mass block and the second driving mass block move in opposite directions, the first driving mass block and the third driving mass block move in the same direction, and the first driving mass block and the fourth driving mass block move in opposite directions.

[0046] The first detection mass block and the second detection mass block rotate in opposite directions.

[0047] Optionally, in the detection mode of the angular velocity in the direction of the first axis, the first detection mass block and the second detection mass block rotate around the second axis, and the first detection mass block and the second detection mass block rotate in opposite phases;

[0048] Each of the first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass does not move due to the constraints of the anchor points on both sides and the decoupling with the first detection structure;

[0049] The third detection mass block, the fourth detection mass block, the fifth detection mass block and the sixth detection mass block in the second detection structure do not move;

[0050] The seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block in the third detection structure do not move.

[0051] Optionally, in the detection mode of the angular velocity in the direction of the second axis, the third detection mass block and the fourth detection mass block rotate around the second axis, and the third detection mass block and the fourth detection mass block rotate in opposite phases; the fifth detection mass block and the sixth detection mass block rotate around the second axis, and the fifth detection mass block and the sixth detection mass block rotate in opposite phases;

[0052] The first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass do not move due to the constraints of the anchor points on both sides and the decoupling with the second detection structure;

[0053] The first detection mass block and the second detection mass block in the first detection structure do not move;

[0054] The seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block in the third detection structure do not move.

[0055] Optionally, in the detection mode of the angular velocity in the direction of the third axis, each of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block performs linear motion along the second axis, the movement direction of the seventh detection mass block is opposite to that of the eighth detection mass block, the movement direction of the seventh detection mass block is the same as that of the ninth detection mass block, and the movement direction of the seventh detection mass block is opposite to that of the tenth detection mass block;

[0056] The first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass do not move due to the constraints of the anchor points on both sides and the decoupling with the third detection structure;

[0057] The first detection mass block and the second detection mass block in the first detection structure do not move;

[0058] The third detection mass, the fourth detection mass, the fifth detection mass and the sixth detection mass in the second detection structure do not move.

[0059] Optionally, each of the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block comprises:

[0060] a first cavity;

[0061] The driving push-pull comb teeth are located in the first cavity, and two groups of driving push-pull comb teeth that are adjacent and opposite to each other form a group of push-pull driving capacitors;

[0062] The drive feedback comb teeth are located in the first cavity, and two groups of drive feedback comb teeth that are adjacent and opposite to each other form a group of drive feedback capacitors.

[0063] Optionally, the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis and the second axis, or the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis, the second axis and the center.

[0064] Optionally, the drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis and the second axis, or the drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis, the second axis and the center.

[0065] Optionally, each driving mass block includes three groups of push-pull driving capacitors and one group of driving feedback capacitors.

[0066] Optionally, each of the first detection mass block and the second detection mass block in the first detection structure is provided with a second cavity, and the second cavity divides the detection mass block into a first part and a second part;

[0067] The first part and the electrode located therebelow form a first detection capacitor; the second part and the electrode located therebelow form a second detection capacitor,

[0068] The first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis and the second axis as a whole, or the first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis, the second axis and the center as a whole.

[0069] Optionally, each of the third detection mass block, the fourth detection mass block, the fifth detection mass block and the sixth detection mass block in the second detection structure is provided with a third cavity, and the third cavity divides the detection mass block into a first part and a second part;

[0070] The first part and the electrode located therebelow form a third detection capacitor; the second part and the electrode located therebelow form a fourth detection capacitor,

[0071] The third detection capacitor and the fourth detection capacitor in the second detection structure are symmetrical about the first axis and the second axis as a whole, or the third detection capacitor and the fourth detection capacitor in the second detection structure are symmetrical about the first axis, the second axis and the center as a whole.

[0072] Optionally, each of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block, and the tenth detection mass block in the third detection structure includes:

[0073] fourth cavity;

[0074] A plurality of connecting beams are located in the fourth cavity and divide the fourth cavity into a plurality of spaces;

[0075] A first plate, located in the fourth cavity, and forming a fifth detection capacitor with the connecting beam;

[0076] The second plate is located in the fourth cavity and forms a sixth detection capacitor with the connecting beam.

[0077] A first plate and a second plate are provided in each space, and the first plate and the second plate in each space are arranged opposite to each other.

[0078] Optionally, the fifth detection capacitor and the sixth detection capacitor in the third detection structure are symmetrical about the first axis and the second axis as a whole, or the fifth detection capacitor and the sixth detection capacitor in the third detection structure are symmetrical about the first axis, the second axis and the center as a whole.

[0079] Optionally, the MEMS angular velocity sensor is symmetrical about the first axis and the second axis, or the MEMS angular velocity sensor is symmetrical about the first axis, the second axis and the center.

[0080] Optionally, the third detection structure further includes:

[0081] a seventh anchor point located at a first side of the first detection structure, the seventh anchor point being coupled to the first bridging beam;

[0082] An eighth anchor point is located at the second side of the first detection structure, and the eighth anchor point is coupled to the second bridge beam.

[0083] Optionally, the seventh anchor point and the eighth anchor point are arranged side by side along the second axis direction, the seventh anchor point is located in a recessed area at the center of the first bridging beam, and the eighth anchor point is located in a recessed area at the center of the second bridging beam.

[0084] Optionally, the second detection structure is symmetrical about the first axis and the second axis, or the second detection structure is symmetrical about the first axis, the second axis and the center.

[0085] Optionally, the four groups of anchor points are symmetrical about the first axis and the second axis as a whole, or the four groups of anchor points are symmetrical about the first axis, the second axis and the center as a whole.

[0086] Optionally, in the driving mode, the sum of the momentum of the first driving mass block and the second driving mass block is 0, the sum of the momentum of the third driving mass block and the fourth driving mass block is 0, the sum of the momentum of the third detection mass block and the fourth detection mass block is 0, the sum of the momentum of the fifth detection mass block and the sixth detection mass block is 0, the sum of the momentum of the seventh detection mass block and the eighth detection mass block is 0, the sum of the momentum of the ninth detection mass block and the tenth detection mass block is 0, and the sum of the angular momentum of the first detection mass block and the second detection mass block is 0.

[0087] Optionally, in the detection mode of the angular velocity in the direction of the first axis, the sum of the angular momentum of the first detection mass block and the second detection mass block is 0.

[0088] Optionally, in the detection mode of the angular velocity in the direction of the second axis, the sum of the angular momentums of the third detection mass block, the fourth detection mass block, the fifth detection mass block, and the sixth detection mass block is zero.

[0089] Optionally, in the detection mode of the angular velocity in the direction of the third axis, the sum of the angular momentums of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block, and the tenth detection mass block is zero.

[0090] The MEMS angular velocity sensor provided by the present application has a projection of an overall structure composed of the second detection structure and the first detection structure as a cross structure, and four independent corner regions of the cross structure are formed, and the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are respectively located in an independent corner region and separated from each other. The above structure avoids the influence of inter-axis interference on the accuracy of the sensor.

[0091] The MEMS angular velocity sensor provided by the present application, wherein the first driving mass block and the second driving mass block are respectively coupled to the second detection structure located between the two, the third driving mass block and the fourth driving mass block are respectively coupled to the second detection structure located between the two, the first driving mass block and the fourth driving mass block are respectively coupled to the first detection structure located between the two, and the second driving mass block and the third driving mass block are respectively coupled to the first detection structure located between the two, so as to eliminate the frequency cracking of the driving mode and improve the measurement accuracy. For example, when detecting the angular velocity in the direction of the first axis, it is only necessary to decouple the first detection structure from the first to fourth driving mass blocks, and the second detection structure and the third detection structure and the first to fourth driving mass blocks do not move. That is, when detecting the angular velocity in each axial direction, the above-mentioned structure in the present application only needs to decouple the detection structure of the corresponding axis from the driving mass block to obtain the detection result without interfering with each other, thereby avoiding the influence of the interference between axes on the sensor accuracy.

[0092] Furthermore, when the angular velocity in the direction of the first axis is input, the first detection mass block and the second detection mass block move in opposite phases. When the angular velocity in the direction of the second axis is input, the third detection mass block and the fourth detection mass block move in opposite phases, and the fifth detection mass block and the sixth detection mass block move in opposite phases. When the angular velocity in the direction of the third axis is input, the seventh detection mass block and the eighth detection mass block move in opposite phases, and the ninth detection mass block and the tenth detection mass block move in opposite phases, eliminating the capacitance change under the interference of linear acceleration and angular acceleration, and improving the vibration resistance of the MEMS angular velocity sensor.

[0093] The overall structure of the MEMS angular velocity sensor provided by the present application is symmetrical about the first axis and the second axis, or symmetrical about the first axis, the second axis and the center, and the first detection mass block and the second detection mass block move in anti-phase, the third detection mass block and the fourth detection mass block move in anti-phase, the fifth detection mass block and the sixth detection mass block move in anti-phase, the seventh detection mass block and the eighth detection mass block move in anti-phase, the ninth detection mass block and the tenth detection mass block move in anti-phase, the first drive mass block and the second drive mass block move in anti-phase, and the third drive mass block and the fourth drive mass block move in anti-phase. In this way, the MEMS angular velocity sensor maintains momentum and angular momentum balance in all mass block movements in the driving mode and the three detection modes, that is, the sum of momentum caused by mass block movement in all working modes is 0, and the sum of angular momentum is also 0. The advantage of this design is that it can avoid the force and torque generated by the mass block movement from coupling into the sensor design, and at the same time avoid the interference of external linear acceleration and angular acceleration on the sensor's detection of angular velocity signals. BRIEF DESCRIPTION OF THE DRAWINGS

[0094] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0095] Figure 1 A schematic diagram of a top view of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0096] Figure 2 A schematic diagram showing the distribution of capacitors in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0097] Figure 3 A schematic diagram showing a first detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application;

[0098] Figure 4 A schematic diagram showing a second detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application;

[0099] Figure 5 A schematic diagram showing the structure of a driving mass block in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0100] Figure 6 A schematic diagram showing a third detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application;

[0101] Figure 7 A motion schematic diagram of a driving mode of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0102] Figure 8 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the X-axis direction;

[0103] Fig. 9 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Y-axis direction is shown;

[0104] Fig.10 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Z-axis direction is shown. DETAILED DESCRIPTION

[0105] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same elements are represented by the same or similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0106] The specific implementation of the present invention is further described in detail below in conjunction with the drawings and examples.

[0107] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0108] Figure 1 A schematic diagram of the top view of the structure of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown. Figure 2 A schematic diagram showing the distribution of capacitors in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown. Figure 3 A schematic diagram showing a first detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown. Figure 4 A schematic diagram showing a second detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown. Figure 5 A schematic diagram of the structure of a driving mass block in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown. Figure 6 A schematic diagram showing a third detection structure in a MEMS angular velocity sensor provided according to an embodiment of the present application is shown.

[0109] like Figure 1 As shown, the MEMS angular velocity sensor includes a first detection structure 200 , a second detection structure 300 , a third detection structure 400 , a first driving mass 101 , a second driving mass 102 , a third driving mass 103 , and a fourth driving mass 104 .

[0110] The first detection structure 200 is used to detect the angular velocity in the direction of a first axis (eg, the X-axis direction).

[0111] The second detection structure 300 is used to detect the angular velocity in the direction of the second axis (for example, the Y axis), and the first axis is perpendicular to the second axis. The second detection structure 300 is located on both sides of the first detection structure 200, and the projection of the overall structure composed of the second detection structure 300 and the first detection structure 200 is a cross structure, and four independent corner areas of the cross structure are formed.

[0112] Further, the first detection structure 200 is symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center. The second detection structure is symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center.

[0113] Each of the first drive mass 101, the second drive mass 102, the third drive mass 103 and the fourth drive mass 104 having the same structure is located in a corner region. Exemplarily, the first drive mass 101 is located in the upper left corner region in the figure, the second drive mass 102 is located in the upper right corner region in the figure, the third drive mass 103 is located in the lower right corner region in the figure, and the fourth drive mass 104 is located in the lower left corner region in the figure. Every two adjacent drive masses are coupled via the first detection structure 200 or the second detection structure 300 located therebetween. Further, the first driving mass block 101 and the second driving mass block 102 are respectively coupled to the second detection structure 300 located therebetween, the third driving mass block 103 and the fourth driving mass block 104 are respectively coupled to the second detection structure 300 located therebetween, the first driving mass block 101 and the fourth driving mass block 104 are respectively coupled to the first detection structure 200 located therebetween, and the second driving mass block 102 and the third driving mass block 103 are respectively coupled to the first detection structure 200 located therebetween.

[0114] Further, the first driving mass 101, the second driving mass 102, the third driving mass 103 and the fourth driving mass 104 are symmetrical about the first axis and the second axis as a whole, or are symmetrical about the first axis, the second axis and the center.

[0115] The third detection structure 400 is used to detect the angular velocity in the direction of the third axis (for example, the Z axis), and is located in the first drive mass 101, the second drive mass 102, the third drive mass 103, and the fourth drive mass 104. Each drive mass is coupled to the third detection structure 400, and the third axis is perpendicular to the plane where the first axis and the second axis are located. Further, the third detection structure 400 is symmetrical about the first axis, the second axis, or symmetrical about the first axis, the second axis, and the center.

[0116] Combination Figure 1 , Figure 3 As shown, the first detection structure 200 includes a plurality of coupling beams, a first detection mass block 201 , and a second detection mass block 202 .

[0117] The first detection mass 201 is located between the first driving mass 101 and the fourth driving mass 104. The first detection mass 201 is coupled to the first driving mass 101 via a coupling beam 211, and the first detection mass 201 is coupled to the fourth driving mass 104 via a coupling beam 212. The second detection mass 202 is located between the second driving mass 102 and the third driving mass 103. The second detection mass 202 is coupled to the second driving mass 102 via a coupling beam 221, and the second detection mass 202 is coupled to the third driving mass 103 via a coupling beam 222. The first detection mass 201 and the second detection mass 202 are coupled via a coupling beam 231.

[0118] Furthermore, the first detection mass block 201 and the second detection mass block 202 are arranged in parallel along the first axis direction.

[0119] Furthermore, combined with Figure 2 , Figure 3 The first detection structure 200 also includes a first detection capacitor C x1,p , the first detection capacitor C x2,p , the second detection capacitor C x1,n , the second detection capacitor C x2,n , used to detect the angular velocity in the direction of the first axis. The first detection capacitor and the second detection capacitor in the first detection structure 200 are symmetrical about the first axis, the second axis, or symmetrical about the first axis, the second axis, and the center. A second cavity 213 is provided in the first detection mass block 201. The second cavity 213 divides the first detection mass block 201 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper and the detection mass block) constitute the first detection capacitor C x1,p The second part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a second detection capacitor C x1,n The second detection mass block 202 is provided with a second cavity 223, which divides the second detection mass block 202 into a first part and a second part. In the direction of the third axis, the first part and the electrode (not shown in the figure) located below it form a first detection capacitor C x2,p The second part and the electrode below it form a second detection capacitor C x2,n .

[0120] Combination Figure 1 , Figure 4 As shown, the second detection structure 300 includes a plurality of coupling beams, a third detection mass block 301 , a fourth detection mass block 302 , a fifth detection mass block 303 , and a sixth detection mass block 304 .

[0121] The third detection mass 301 and the fourth detection mass 302 are located at the first side of the first detection structure 200, and the third detection mass 301 and the fourth detection mass 302 are located between the first driving mass 101 and the second driving mass 102. The third detection mass 301 is coupled to the first driving mass 101 via a coupling beam 311, the fourth detection mass 302 is coupled to the second driving mass 102 via a coupling beam 321, and the fourth detection mass 302 is coupled to the third detection mass 301 via coupling beams 312 and 322.

[0122] The fifth detection mass 303 and the sixth detection mass 304 are located at the second side of the first detection structure 200, and the fifth detection mass 303 and the sixth detection mass 304 are located between the third driving mass 103 and the fourth driving mass 104. The fifth detection mass 303 is coupled to the third driving mass 103 via a coupling beam 331, the sixth detection mass 304 is coupled to the fourth driving mass 104 via a coupling beam 341, and the sixth detection mass 304 is coupled to the fifth detection mass 303 via coupling beams 332 and 342.

[0123] Furthermore, the third detection mass block 301 and the sixth detection mass block 304 are arranged side by side along the second axis direction, the fourth detection mass block 302 and the fifth detection mass block 305 are arranged side by side along the second axis direction, the third detection mass block 301 and the fourth detection mass block 302 are arranged side by side along the first axis direction, and the fifth detection mass block 303 and the sixth detection mass block 304 are arranged side by side along the first axis direction.

[0124] Furthermore, the second detection structure 300 also includes a first anchor point 313 , a second anchor point 323 , a third anchor point 333 , and a fourth anchor point 343 .

[0125] The first anchor point 313 and the second anchor point 323 are located on the first side of the first detection structure 200. The first anchor point 313 and the second anchor point 323 are located between the third detection mass block 301 and the fourth detection mass block 302. The third detection mass block 301 and the fourth detection mass block 302 are coupled to the first anchor point 313 and the second anchor point 323 via the coupling beam 312 and the coupling beam 322.

[0126] The third anchor point 333 and the fourth anchor point 343 are located at the second side of the first detection structure 200, and the third anchor point 333 and the fourth anchor point 343 are located between the fifth detection mass block 303 and the sixth detection mass block 304, and the fifth detection mass block 303 and the sixth detection mass block 304 are coupled to the third anchor point 333 and the fourth anchor point 343 via the coupling beam 332 and the coupling beam 342.

[0127] Furthermore, the first anchor point 313 , the second anchor point 323 , the third anchor point 333 , and the fourth anchor point 343 are distributed in parallel along the second axis.

[0128] Furthermore, combined with Figure 2 , Figure 4 The second detection structure 300 also includes a third detection capacitor C y1,p , the third detection capacitor C y2,p , the third detection capacitor C y3,p , the third detection capacitor C y4,p , the fourth detection capacitor C y1,n , the fourth detection capacitor C y2,n , the fourth detection capacitor C y3,n , the fourth detection capacitor C y4,n , used to detect the angular velocity in the direction of the second axis. The third detection capacitor and the fourth detection capacitor in the second detection structure 300 are symmetrical about the first axis and the second axis as a whole, or are symmetrical about the first axis, the second axis, and the center.

[0129] A third cavity 314 is provided in the third detection mass block 301. The third cavity 314 divides the third detection mass block 301 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a third detection capacitor C y1,p The second part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a fourth detection capacitor C y1,n The fourth detection mass block 302 is provided with a third cavity 324, which divides the fourth detection mass block 302 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a third detection capacitor C y2,p The second part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a fourth detection capacitor C y2,n The fifth detection mass block 303 is provided with a third cavity 334, which divides the fifth detection mass block 303 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a third detection capacitor C y3,p The second part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a fourth detection capacitor C y3,nThe sixth detection mass block 304 is provided with a third cavity 344, which divides the sixth detection mass block 304 into a first part and a second part. In the direction of the third axis, the first part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a third detection capacitor C y4,p The second part and the electrode located below it (not shown in the figure, located between the paper surface and the detection mass block) form a fourth detection capacitor C y4,n .

[0130] Combination Figure 1 , Figure 5 , Figure 6 As shown, the third detection structure 400 includes a plurality of coupling beams, a seventh detection mass block 401 , an eighth detection mass block 402 , a ninth detection mass block 403 , a tenth detection mass block 404 , a first bridging beam 405 , and a second bridging beam 407 .

[0131] The seventh detection mass 401 is located in the first opening 115 of the first driving mass 101 , and the seventh detection mass 401 is coupled to the first driving mass 101 via coupling beams 411 , 412 , 413 , and 414 .

[0132] The eighth detection mass 402 is located in the first opening 125 of the second driving mass 102 , and the eighth detection mass 402 is coupled to the second driving mass 102 via coupling beams 421 , 422 , 423 , and 424 .

[0133] The ninth detection mass 403 is located in the first opening 135 of the third driving mass 103 , and the ninth detection mass 403 is coupled to the third driving mass 103 via coupling beams 431 , 432 , 433 , and 434 .

[0134] The tenth detection mass 404 is located in the first opening 145 of the fourth driving mass 104 , and the tenth detection mass 404 is coupled to the fourth driving mass 104 via coupling beams 441 , 442 , 443 , and 444 .

[0135] The first bridge beam 405 is coupled to the seventh detection mass 401 via the corresponding coupling beam 415 and to the eighth detection mass 402 via the corresponding coupling beam 425. The second bridge beam 407 is coupled to the ninth detection mass 403 via the corresponding coupling beam 435 and to the tenth detection mass 404 via the corresponding coupling beam 445.

[0136] Further, the seventh detection mass block 401 and the tenth detection mass block 404 are arranged side by side along the second axis direction, the eighth detection mass block 402 and the ninth detection mass block 403 are arranged side by side along the second axis direction, the seventh detection mass block 401 and the eighth detection mass block 402 are arranged side by side along the first axis direction, and the ninth detection mass block 403 and the tenth detection mass block 404 are arranged side by side along the first axis direction.

[0137] Furthermore, the third detection structure 400 also includes a seventh anchor point 406 and an eighth anchor point 408 .

[0138] The seventh anchor point 406 is located at the first side of the first detection structure 200 and is coupled to the first bridge beam 405 . The eighth anchor point 408 is located at the second side of the first detection structure 200 and is coupled to the second bridge beam 407 .

[0139] The seventh anchor point 406 and the eighth anchor point 408 are arranged side by side along the second axis direction. The seventh anchor point 406 is located in the recessed area at the center of the first bridging beam 405 , and the eighth anchor point 408 is located in the recessed area at the center of the second bridging beam 407 .

[0140] Furthermore, combined with Figure 2 , Figure 6 The third detection structure 400 further includes a fifth detection capacitor C z1,p , the fifth detection capacitor C z2,p , the fifth detection capacitor C z3,p , the fifth detection capacitor C z4,p , the sixth detection capacitor C z1,n , the sixth detection capacitor C z2,n , the sixth detection capacitor C z3,n , the sixth detection capacitor C z4,n , used to detect the angular velocity in the direction of the third axis. The fifth detection capacitor and the sixth detection capacitor in the third detection structure 400 are symmetrical about the first axis and the second axis as a whole, or are symmetrical about the first axis and the second axis and the center.

[0141] A fourth cavity 416 is provided in the seventh detection mass block 401. A plurality of bridge beams 417 are provided in the fourth cavity 416 to divide the fourth cavity 416 into a plurality of spaces. A first plate 419 and a second plate 418 are provided in each space, and the first plate 419 and the second plate 418 in each space are arranged opposite to each other. The first plate 419 and the connecting beam 417 form a fifth detection capacitor C z1,p The second plate 418 and the connecting beam 417 form a sixth detection capacitor C z1,n .

[0142] A fourth cavity 426 is provided in the eighth detection mass block 402. A plurality of bridging beams 427 are provided in the fourth cavity 426 to divide the fourth cavity 426 into a plurality of spaces. A first plate 429 and a second plate 428 are provided in each space, and the first plate 429 and the second plate 428 in each space are arranged opposite to each other. The first plate 429 and the connecting beam 427 form a fifth detection capacitor C z2,p The second plate 428 and the connecting beam 427 form a sixth detection capacitor C z2,n .

[0143] A fourth cavity 436 is provided in the ninth detection mass block 403. A plurality of bridge beams 437 are provided in the fourth cavity 436 to divide the fourth cavity 436 into a plurality of spaces. A first plate 439 and a second plate 438 are provided in each space, and the first plate 439 and the second plate 438 in each space are arranged opposite to each other. The first plate 439 and the connecting beam 437 form a fifth detection capacitor C z3,p The second plate 438 and the connecting beam 437 form a sixth detection capacitor C z3,n .

[0144] A fourth cavity 446 is provided in the tenth detection mass block 404. A plurality of bridging beams 447 are provided in the fourth cavity 446 to divide the fourth cavity 446 into a plurality of spaces. A first plate 449 and a second plate 448 are provided in each space, and the first plate 449 and the second plate 448 in each space are arranged opposite to each other. The first plate 449 and the connecting beam 447 form a fifth detection capacitor C z4,p The second plate 448 and the connecting beam 447 form a sixth detection capacitor C z4,n .

[0145] Combination Figure 1 , Figure 5 As shown, the MEMS angular velocity sensor further includes four groups of anchor points, each group of anchor points includes a fifth anchor point and a sixth anchor point arranged in parallel along the first axis direction, each driving mass block is coupled to a group of anchor points via a corresponding coupling beam, wherein the fifth anchor point and the sixth anchor point in each group of anchor points are respectively located on two opposite sides of the driving mass block coupled thereto. The four groups of anchor points are symmetrical about the first axis, the second axis, or symmetrical about the first axis, the second axis, and the center.

[0146] Exemplarily, the first driving mass 101 is provided with a fifth anchor point 111 and a sixth anchor point 112 arranged in parallel along the first axis on both sides, and the first driving mass 101 is coupled to the fifth anchor point 111 via a coupling beam 113, and is coupled to the sixth anchor point 112 via a coupling beam 114. The second driving mass 102 is provided with a fifth anchor point 121 and a sixth anchor point 122 arranged in parallel along the first axis on both sides, and the second driving mass 102 is coupled to the fifth anchor point 121 via a coupling beam 123, and is coupled to the sixth anchor point 122 via a coupling beam 124. The third driving mass 103 is provided with a fifth anchor point 131 and a sixth anchor point 132 arranged in parallel along the first axis on both sides, and the third driving mass 103 is coupled to the fifth anchor point 131 via a coupling beam 133, and is coupled to the sixth anchor point 132 via a coupling beam 134. A fifth anchor point 141 and a sixth anchor point 142 arranged in parallel along the first axis are disposed on both sides of the fourth driving mass 104 . The fourth driving mass 104 is coupled to the fifth anchor point 141 via a coupling beam 143 , and is coupled to the sixth anchor point 142 via a coupling beam 144 .

[0147] Furthermore, combined with Figure 2 , Figure 5 The MEMS angular velocity sensor also includes a push-pull drive capacitor C a1,1 , push-pull drive capacitor C a1,2 , push-pull drive capacitor C a1,3 , push-pull drive capacitor C b1,1 , push-pull drive capacitor C b1,2 , push-pull drive capacitor C b1,3 , push-pull drive capacitor C c1,1 , push-pull drive capacitor C c1,2 , push-pull drive capacitor C c1,3 , push-pull drive capacitor C d1,1 , push-pull drive capacitor C d1,2 , push-pull drive capacitor C d1,3 , and the driving feedback capacitor C A1 , drive feedback capacitor C B1 , drive feedback capacitor C C1 , drive feedback capacitor C D1 .

[0148] Exemplarily, each driving mass includes three groups of push-pull driving capacitors and one group of driving feedback capacitors.

[0149] A first cavity 116 is provided inside the first driving mass block 101. The first cavity 116 contains a driving push-pull comb tooth 117 and a driving feedback comb tooth 118. The driving push-pull comb teeth 117 arranged opposite to each other form a push-pull driving capacitor C. a1,1 , push-pull drive capacitor C a1,2, push-pull drive capacitor C a1,3 , the drive feedback comb teeth 118 arranged opposite to each other form a drive feedback capacitor C A1 .

[0150] A first cavity 126 is provided inside the second driving mass block 102. The first cavity 116 contains a driving push-pull comb tooth 127 and a driving feedback comb tooth 128. The driving push-pull comb teeth 127 arranged opposite to each other form a push-pull driving capacitor C b1,1 , push-pull drive capacitor C b1,2 , push-pull drive capacitor C b1,3 , the drive feedback comb teeth 128 arranged opposite to each other form a drive feedback capacitor C B1 .

[0151] A first cavity 136 is provided inside the third driving mass block 103. The first cavity 136 contains a driving push-pull comb tooth 137 and a driving feedback comb tooth 138. The driving push-pull comb teeth 137 arranged opposite to each other form a push-pull driving capacitor C. c1,1 , push-pull drive capacitor C c1,2 , push-pull drive capacitor C c1,3 , the drive feedback comb teeth 138 arranged opposite to each other form a drive feedback capacitor C C1 .

[0152] The fourth driving mass 104 has a first cavity 146 inside. The first cavity 146 contains a driving push-pull comb tooth 147 and a driving feedback comb tooth 148. The driving push-pull comb teeth 147 arranged opposite to each other form a push-pull driving capacitor C. d1,1 , push-pull drive capacitor C d1,2 , push-pull drive capacitor C d1,3 , the drive feedback comb teeth 148 arranged opposite to each other form a drive feedback capacitor C D1 .

[0153] Further, the push-pull drive capacitors in the first drive mass 101, the second drive mass 102, the third drive mass 103, and the fourth drive mass 104 are symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center. The drive feedback capacitors in the first drive mass 101, the second drive mass 102, the third drive mass 103, and the fourth drive mass 104 are symmetrical about the first axis, the second axis, or about the first axis, the second axis, and the center.

[0154] In this embodiment, the MEMS angular velocity sensor is symmetrical about the first axis, the second axis, or is symmetrical about the first axis, the second axis, and the center.

[0155] Figure 7A motion schematic diagram of a driving mode of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown.

[0156] like Figure 7 As shown, under the action of electrostatic force, the first driving mass 101, the second driving mass 102, the third driving mass 103 and the fourth driving mass 104 perform linear motion in the plane (XOY plane) defined by the first axis and the second axis, and specifically perform linear motion along the direction of the first axis (for example, the X-axis direction). The first driving mass 101 and the second driving mass 102 have opposite motion directions, the first driving mass 101 and the third driving mass 103 have the same motion direction, and the first driving mass 101 and the fourth driving mass 104 have opposite motion directions.

[0157] Exemplarily, the second driving mass 102 and the fourth driving mass 104 perform linear motion along the positive direction of the first axis (e.g., the X-axis), and the first driving mass 101 and the third driving mass 103 perform linear motion along the negative direction of the X-axis. In other embodiments, the second driving mass 102 and the fourth driving mass 104 may also perform linear motion along the negative direction of the first axis (e.g., the X-axis), and the first driving mass 101 and the third driving mass 103 perform linear motion along the positive direction of the X-axis. That is, the motion directions of the adjacent driving mass blocks among the first driving mass 101, the second driving mass 102, the third driving mass 103 and the fourth driving mass 104 are opposite.

[0158] The seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403 and the tenth detection mass block 404 in the third detection structure 400 follow the corresponding driving mass blocks to make linear motion. Further, the seventh detection mass block 401 follows the first driving mass block 101 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The eighth detection mass block 402 follows the second driving mass block 102 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The ninth detection mass block 403 follows the third driving mass block 103 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The tenth detection mass block 404 follows the fourth driving mass block 104 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis.

[0159] Exemplarily, the eighth detection mass block 402 and the tenth detection mass block 404 perform linear motion along the first axis (e.g., the X-axis) in the positive direction, and the seventh detection mass block 401 and the ninth detection mass block 403 perform linear motion along the negative direction of the X-axis. In other embodiments, the eighth detection mass block 402 and the tenth detection mass block 404 perform linear motion along the first axis (e.g., the X-axis) in the negative direction, and the seventh detection mass block 401 and the ninth detection mass block 403 perform linear motion along the positive direction of the X-axis.

[0160] The third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303 and the sixth detection mass block 304 in the second detection structure 300 follow the corresponding driving mass blocks to make linear motion. Further, the third detection mass block 301 follows the first driving mass block 101 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The fourth detection mass block 302 follows the second driving mass block 102 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The fifth detection mass block 303 follows the third driving mass block 103 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis. The sixth detection mass block 304 follows the fourth driving mass block 104 to make linear motion in the same direction in the plane (XOY plane) defined by the first axis and the second axis.

[0161] Exemplarily, the fourth detection mass block 302 and the sixth detection mass block 304 perform linear motion along the first axis (e.g., the X-axis) in the positive direction, and the third detection mass block 301 and the fifth detection mass block 303 perform linear motion along the negative direction of the X-axis. In other embodiments, the fourth detection mass block 302 and the sixth detection mass block 304 perform linear motion along the first axis (e.g., the X-axis) in the negative direction, and the third detection mass block 301 and the fifth detection mass block 303 perform linear motion along the positive direction of the X-axis.

[0162] The first detection mass block 201 in the first detection structure 200 rotates in the plane defined by the first axis and the second axis along with the first drive mass block 101 and the fourth drive mass block 104 coupled thereto under the action of the coupling beams 211 and 212. The second detection mass block 202 in the first detection structure 200 rotates in the plane defined by the first axis and the second axis along with the second drive mass block 102 and the third drive mass block 103 coupled thereto under the action of the coupling beams 221 and 222. The first detection mass block 201 and the second detection mass block 202 rotate in opposite directions.

[0163] Exemplarily, the first detection mass 201 rotates clockwise in the plane defined by the first axis and the second axis, and the second detection mass 202 rotates counterclockwise in the plane defined by the first axis and the second axis. In an alternative embodiment, the first detection mass 201 rotates counterclockwise in the plane defined by the first axis and the second axis, and the second detection mass 202 rotates clockwise in the plane defined by the first axis and the second axis.

[0164] In the driving mode, the mass of the first driving mass 101 and the second driving mass 102 is M Q，1 、M Q，2 , the corresponding linear motion speed is V Q，1 、V Q，2 , the sum of the momentum of the first driving mass 101 and the second driving mass 102 = M Q，1 *V Q，1 +M Q，2 *V Q，2 =M Q，1 *V Q，1 +M Q，2 *(-V Q，1 )=0. Similarly, the sum of the momentums of the third driving mass 103 and the fourth driving mass 104 is also 0. Similarly, the sum of the momentums of the third detection mass 301 and the fourth detection mass 302 having the same structure is also 0, and the sum of the momentums of the fifth detection mass 303 and the sixth detection mass 304 having the same structure is also 0. The sum of the momentums of the seventh detection mass 401 and the eighth detection mass 402 having the same structure is also 0, and the sum of the momentums of the ninth detection mass 403 and the tenth detection mass 404 having the same structure is also 0.

[0165] For the first detection mass block 201 and the second detection mass block 202 with the same structure, the moment of inertia is J x，1 , J x，2 , the corresponding linear motion speed is ω x，1 ,ω x，2 , the sum of the angular momentum of the first detection mass block 201 and the second detection mass block 202 = J x，1 *ω x，1 +J x，2 *ω x，2 =J x，1 *ω x，1 +J x，2 *(-ω x，1 ) = 0. That is, in the driving mode, the total momentum and angular momentum of the MEMS angular velocity sensor is 0, and the overall structure is fully balanced.

[0166] Figure 8A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the X-axis direction is shown.

[0167] like Figure 8 As shown, when there is an angular velocity input in the X-axis direction, the first detection mass block 201 and the second detection mass block 202 rotate around the second axis (Y-axis), and the first detection mass block 201 and the second detection mass block 202 rotate in opposite phases. At this time, each of the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 does not move due to the constraints of the fifth anchor point and the sixth anchor point on both sides and the decoupling between the corresponding detection mass block in the first detection structure 200. In addition, there is no shared mass block between the first detection structure 200 and the second detection structure 300 and the third detection structure 400, so there will be no cross-axis interference, and thus the accuracy of the detection of the X-axis capacitance will not be affected.

[0168] The third detection mass 301, the fourth detection mass 302, the fifth detection mass 303 and the sixth detection mass 304 in the second detection structure 300 do not move. The seventh detection mass 401, the eighth detection mass 402, the ninth detection mass 403 and the tenth detection mass 404 in the third detection structure 400 do not move.

[0169] When there is an angular velocity input in the X-axis direction, the first detection capacitor C x1,p , the first detection capacitor C x2,p , the second detection capacitor C x1,n , the second detection capacitor C x2,n Changes. Specifically, C x1,p Increase, C x1,n Reduce, C x2,p Increase, C x2,n Therefore, the angular velocity in the X-axis direction is obtained by calculating the changes in the first detection capacitor and the second detection capacitor. Specifically, the angular velocity signal Ωx is proportional to ΔC x1,p -ΔC x1,n +ΔC x2,p -ΔC x2,n For the first detection mass block 201 and the second detection mass block 202, the moment of inertia at this time is J x，3 , J x，4 , the corresponding linear motion speed is ω x，3 ,ω x，4 , angular momentum and = J x，3 *ω x，3 +J x，4 *ω x，4 =J x，3 *ω x，4 +J x，4*(-ω x，3 )=0, the structure as a whole is fully balanced.

[0170] Fig. 9 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Y-axis direction is shown.

[0171] like Fig. 9 As shown, when there is an angular velocity input in the Y-axis direction, the third detection mass block 301 and the fourth detection mass block 302 in the second detection structure 300 rotate around the second axis (Y-axis), and the third detection mass block 301 and the fourth detection mass block 302 rotate in opposite phases. The fifth detection mass block 303 and the sixth detection mass block 304 in the second detection structure 300 rotate around the second axis, and the fifth detection mass block 303 and the sixth detection mass block 304 rotate in opposite phases;

[0172] At this time, each of the first driving mass mass 101, the second driving mass mass 102, the third driving mass mass 103, and the fourth driving mass mass 104 does not move due to the constraints of the fifth anchor point and the sixth anchor point on both sides and the decoupling with the corresponding detection mass mass in the second detection structure 300;

[0173] There is no shared mass block between the first detection structure 200 and the second detection structure 300 and the third detection structure 400, so there will be no cross-axis interference, and thus the accuracy of the detection of the X-axis capacitance will not be affected. The first detection mass block 201 and the second detection mass block 202 in the first detection structure 300 do not move. The seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403 and the tenth detection mass block 404 in the third detection structure 400 do not move;

[0174] When there is an angular velocity input in the Y-axis direction, the third detection capacitor C y1,p , the third detection capacitor C y2,p , the third detection capacitor C y3,p , the third detection capacitor C y4,p , the fourth detection capacitor C y1,n , the fourth detection capacitor C y2,n , the fourth detection capacitor C y3,n , the fourth detection capacitor C y4,n Specifically, when the second detection structure located on the first side of the first detection structure 200 performs detection, C y1,p Increase, C y1,n Reduce, C y2,p Increase, C y2,n Therefore, the angular velocity in the Y-axis direction is obtained by calculating the change in the above detection capacitance. Specifically, the angular velocity signal Ω x Proportional to ΔCy1,p -ΔC y1,n +ΔC y2,p -ΔC y2,n The detection of the second detection structure located on the first side of the first detection structure 200 is similar to the detection of the second detection structure located on the second side of the first detection structure 200, and will not be repeated. For the third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304, the moment of inertia at this time is J y，1 , J y，2 , J y，3 , J y，4 , the corresponding linear motion speed is ω y，1 ,ω y，2 ,ω y，3 ,ω y，4 , the sum of the angular momentum of the third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303, and the sixth detection mass block 304 = J y，1 *ω y，1 +J y，2 *ω y，2 +J y，3 *ω y，3 +J y，4 *ω y，4 =0, the overall structure is fully balanced.

[0175] Fig.10 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Z-axis direction is shown.

[0176] like Fig.10 As shown, when there is an angular velocity input in the Z-axis direction, each of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 makes linear motion along the second axis direction, the movement directions of the seventh detection mass block 401 and the eighth detection mass block 402 are opposite, the movement directions of the seventh detection mass block 401 and the ninth detection mass block 403 are the same, and the movement directions of the seventh detection mass block 401 and the tenth detection mass block 404 are opposite.

[0177] Each of the first driving mass mass 101 , the second driving mass mass 102 , the third driving mass mass 103 , and the fourth driving mass mass 104 does not move due to the constraints of the fifth anchor point and the sixth anchor point on both sides and the decoupling with the corresponding detection mass mass in the third detection structure 400 .

[0178] There is no shared mass block between the first detection structure 200 and the second detection structure 300 and the third detection structure 400, so there will be no cross-axis interference, and thus the accuracy of the detection of the X-axis capacitance will not be affected. The first detection mass block 201 and the second detection mass block 202 in the first detection structure 300 do not move. The third detection mass block 301, the fourth detection mass block 302, the fifth detection mass block 303 and the sixth detection mass block 304 in the second detection structure 300 do not move.

[0179] When there is an angular velocity input in the Z-axis direction, the fifth detection capacitor C z1,p , the fifth detection capacitor C z2,p , the fifth detection capacitor C z3,p , the fifth detection capacitor C z4,p , the sixth detection capacitor C z1,n , the sixth detection capacitor C z2,n , the sixth detection capacitor C z3,n , the sixth detection capacitor C z4,n The specific direction of change is: C z1,p Increase, C z1,n Reduce, C z2,p Increase, C z2,n Reduce, C z3,p Increase, C z3,n Reduce, C z4,p Increase, C z4,n Therefore, the angular velocity in the Z-axis direction is obtained by calculating the change in the above detection capacitance. Specifically, the angular velocity signal Ω z Proportional to ΔC z1,p -ΔC z1,n +ΔC z2,p -ΔC z2,n +ΔC z3,p -ΔC z3,n +ΔC z4,p -ΔC z4,n The masses of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 are respectively: M z，1 、M z，2 、M z，3 、M z，4 , the corresponding linear motion speeds are V z，1 、V z，2 、V z，3 、V z，4 , the sum of the angular momentum of the seventh detection mass block 401, the eighth detection mass block 402, the ninth detection mass block 403, and the tenth detection mass block 404 = M z，1 *V z，1 +M z，2 *V z，2 +Mz，3 *V z，3 +M z，4 *V z，4 = 0. That is, in the Z-axis detection movement, the total momentum of the entire structure is 0, and the overall structure is fully balanced.

[0180] Furthermore, the torque of the MEMS angular velocity sensor in the driving mode and the detection mode is 0.

[0181] The overall structure of the MEMS angular velocity sensor provided by the present application is symmetrical about the first axis, the second axis, or symmetrical about the first axis, the second axis, and the center. In addition, the first detection mass block and the second detection mass block move in anti-phase, the third detection mass block and the fourth detection mass block move in anti-phase, the fifth detection mass block and the sixth detection mass block move in anti-phase, the seventh detection mass block and the eighth detection mass block move in anti-phase, the ninth detection mass block and the tenth detection mass block move in anti-phase, the first drive mass block and the second drive mass block move in anti-phase, and the third drive mass block and the fourth drive mass block move in anti-phase. In this way, the MEMS angular velocity sensor maintains momentum and angular momentum balance in all mass block movements in the driving mode and the three detection modes, that is, the sum of momentum caused by mass block movement in all working modes is 0, and the sum of angular momentum is also 0. The advantage of this design is that it can avoid the force and torque generated by the mass block movement from coupling into the sensor design, and at the same time avoid the interference of external linear acceleration and angular acceleration on the sensor detection angular velocity signal.

[0182] That is, the MEMS angular velocity sensor provided by the present application realizes a fully balanced design of resonant vibration, thereby effectively improving the sensor's ability to resist interference from external linear acceleration and angular acceleration. These benefits will ultimately be reflected in the performance indicators of the sensor. The improvement in the ability to resist vibration interference helps reduce the sensor's vibration rectification error (VRE) and vibration induced noise (VIN), thereby effectively reducing the sensor's noise spectral density and helping to improve the sensor's dynamic range.

[0183] According to the embodiments of the present invention as described above, these embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and changes can be made based on the above description. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and the modified use based on the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A MEMS angular velocity sensor, comprising: A first detection structure, used for detecting the angular velocity in the direction of the first axis; A second detection structure is used to detect the angular velocity in the direction of a second axis, the first axis is perpendicular to the second axis, and the second detection structure is located on both sides of the first detection structure, wherein the projection of the overall structure composed of the second detection structure and the first detection structure is a cross structure, and four independent corner areas of the cross structure are formed; The first driving mass, the second driving mass, the third driving mass and the fourth driving mass have the same structure, and each of the first driving mass, the second driving mass, the third driving mass and the fourth driving mass is located in one of the corner areas.

2. The MEMS angular velocity sensor according to claim 1, wherein: The first drive mass block and the second drive mass block are respectively coupled to the second detection structure located between the two, the third drive mass block and the fourth drive mass block are respectively coupled to the second detection structure located between the two, the first drive mass block and the fourth drive mass block are respectively coupled to the first detection structure located between the two, and the second drive mass block and the third drive mass block are respectively coupled to the first detection structure located between the two.

3. The MEMS angular velocity sensor according to claim 2, wherein: Also includes: The third detection structure is used to detect the angular velocity in the direction of the third axis, and is located in the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block. The third axis is perpendicular to the plane where the first axis and the second axis are located.

4. The MEMS angular velocity sensor according to claim 1, wherein: The first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis and the second axis, or the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis, the second axis and the center.

5. The MEMS angular velocity sensor according to claim 1, wherein: The first detection structure is symmetrical about the first axis and the second axis, or the first detection structure is symmetrical about the first axis, the second axis and the center.

6. The MEMS angular velocity sensor according to claim 3, wherein: The first detection structure comprises: a plurality of coupling beams of a first detection structure; a first detection mass, located between the first drive mass and the fourth drive mass, the first detection mass being coupled to the first drive mass and the fourth drive mass via a coupling beam of a corresponding first detection structure; The second detection mass block is located between the second driving mass block and the third driving mass block. The second detection mass block is coupled to the second driving mass block and the third driving mass block via the coupling beam of the corresponding first detection structure. The second detection mass block is coupled to the first detection mass block via the coupling beam of the corresponding first detection structure.

7. The MEMS angular velocity sensor according to claim 6, wherein: The first detection mass block and the second detection mass block are arranged side by side along the first axis direction.

8. The MEMS angular velocity sensor according to claim 6, wherein: The second detection structure comprises: a plurality of coupling beams of a second detection structure; a third detection mass block and a fourth detection mass block located at a first side of the first detection structure, the third detection mass block and the fourth detection mass block being located between the first driving mass block and the second driving mass block, the third detection mass block being coupled to the first driving mass block via a coupling beam of a corresponding second detection structure, the fourth detection mass block being coupled to the second driving mass block via a coupling beam of a corresponding second detection structure, and the fourth detection mass block being coupled to the third detection mass block via a coupling beam of a corresponding second detection structure; The fifth detection mass block and the sixth detection mass block are located on the second side of the first detection structure, and the fifth detection mass block and the sixth detection mass block are located between the third driving mass block and the fourth driving mass block. The fifth detection mass block is coupled to the third driving mass block via the coupling beam of the corresponding second detection structure, and the sixth detection mass block is coupled to the fourth driving mass block via the coupling beam of the corresponding second detection structure. The sixth detection mass block is coupled to the fifth detection mass block via the coupling beam of the corresponding second detection structure.

9. The MEMS angular velocity sensor according to claim 8, wherein: The third detection mass block and the sixth detection mass block are arranged side by side along the second axis direction, the fourth detection mass block and the fifth detection mass block are arranged side by side along the second axis direction, the third detection mass block and the fourth detection mass block are arranged side by side along the first axis direction, and the fifth detection mass block and the sixth detection mass block are arranged side by side along the first axis direction.

10. The MEMS angular velocity sensor according to claim 8, wherein: The second detection structure also includes: a first anchor point and a second anchor point located at a first side of the first detection structure, the first anchor point and the second anchor point being located between the third detection mass block and the fourth detection mass block, the third detection mass block and the fourth detection mass block being coupled to the first anchor point and the second anchor point via coupling beams of the corresponding second detection structure; A third anchor point and a fourth anchor point are located on the second side of the first detection structure, the third anchor point and the fourth anchor point are located between the fifth detection mass block and the sixth detection mass block, and the fifth detection mass block and the sixth detection mass block are coupled to the third anchor point and the fourth anchor point via coupling beams of the corresponding second detection structure.

11. The MEMS angular velocity sensor according to claim 10, wherein: The first anchor point, the second anchor point, the third anchor point, and the fourth anchor point are distributed in parallel along the second axis.

12. The MEMS angular velocity sensor according to claim 3, wherein: The third detection structure is symmetrical about the first axis and the second axis, or the third detection structure is symmetrical about the first axis, the second axis and the center.

13. The MEMS angular velocity sensor according to claim 8, wherein: The third detection structure comprises: a plurality of coupling beams of a third detection structure; a seventh detection mass, located in the first opening of the first driving mass, the seventh detection mass being coupled to the first driving mass via a coupling beam of a corresponding third detection structure; an eighth detection mass, located in the first opening of the second driving mass, the eighth detection mass being coupled to the second driving mass via a coupling beam of a corresponding third detection structure; a ninth detection mass, located in the first opening of the third driving mass, the ninth detection mass being coupled to the third driving mass via a coupling beam of a corresponding third detection structure; a tenth detection mass block, located in the first opening of the fourth driving mass block, the tenth detection mass block being coupled to the fourth driving mass block via a coupling beam of a corresponding third detection structure; a first bridging beam coupled to the seventh detection mass via a coupling beam of a corresponding third detection structure, and coupled to the eighth detection mass via a coupling beam of a corresponding third detection structure; and The second bridging beam is coupled to the ninth detection mass block via a coupling beam of a corresponding third detection structure, and is coupled to the tenth detection mass block via a coupling beam of a corresponding third detection structure.

14. The MEMS angular velocity sensor according to claim 13, wherein: The seventh detection mass block and the tenth detection mass block are arranged side by side along the second axis direction, the eighth detection mass block and the ninth detection mass block are arranged side by side along the second axis direction, the seventh detection mass block and the eighth detection mass block are arranged side by side along the first axis direction, and the ninth detection mass block and the tenth detection mass block are arranged side by side along the first axis direction.

15. The MEMS angular velocity sensor according to claim 1, wherein: Also includes: a coupling beam that drives the mass; There are four groups of anchor points, each group of anchor points includes a fifth anchor point and a sixth anchor point arranged in parallel along the first axis direction, each driving mass block is coupled to a group of anchor points via a corresponding coupling beam of the driving mass block, wherein the fifth anchor point and the sixth anchor point in each group of anchor points are respectively located on two opposite sides of the driving mass block coupled thereto.

16. The MEMS angular velocity sensor according to claim 13, wherein: In the driving mode, each of the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block performs linear motion along the first axis direction; The seventh detection mass block follows the first driving mass block to make linear motion, the eighth detection mass block follows the second driving mass block to make linear motion, the ninth detection mass block follows the third driving mass block to make linear motion, and the tenth detection mass block follows the fourth driving mass block to make linear motion; The third detection mass block follows the first driving mass block to make linear motion, the fourth detection mass block follows the second driving mass block to make linear motion, the fifth detection mass block follows the third driving mass block to make linear motion, and the sixth detection mass block follows the fourth driving mass block to make linear motion; The first detection mass block performs rotational motion in a plane defined by a first axis and a second axis along with the first drive mass block and the fourth drive mass block coupled thereto, and the second detection mass block performs rotational motion in a plane defined by the first axis and the second axis along with the second drive mass block and the third drive mass block coupled thereto, The first driving mass block and the second driving mass block move in opposite directions, the first driving mass block and the third driving mass block move in the same direction, and the first driving mass block and the fourth driving mass block move in opposite directions. The first detection mass block and the second detection mass block rotate in opposite directions.

17. The MEMS angular velocity sensor according to claim 13, wherein: In the detection mode of the angular velocity in the direction of the first axis, the first detection mass block and the second detection mass block rotate around the second axis, and the first detection mass block and the second detection mass block rotate in opposite phases; Each of the first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass does not move due to the constraints of the anchor points on both sides and the decoupling with the first detection structure; The third detection mass block, the fourth detection mass block, the fifth detection mass block and the sixth detection mass block in the second detection structure do not move; The seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block in the third detection structure do not move.

18. The MEMS angular velocity sensor according to claim 13, wherein: In the detection mode of the angular velocity in the direction of the second axis, the third detection mass block and the fourth detection mass block rotate around the second axis, and the third detection mass block and the fourth detection mass block rotate in opposite phases; the fifth detection mass block and the sixth detection mass block rotate around the second axis, and the fifth detection mass block and the sixth detection mass block rotate in opposite phases; The first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass do not move due to the constraints of the anchor points on both sides and the decoupling with the second detection structure; The first detection mass block and the second detection mass block in the first detection structure do not move; The seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block in the third detection structure do not move.

19. The MEMS angular velocity sensor according to claim 13, wherein: In the detection mode of the angular velocity in the direction of the third axis, each of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block and the tenth detection mass block performs linear motion along the second axis, the movement direction of the seventh detection mass block is opposite to that of the eighth detection mass block, the movement direction of the seventh detection mass block is the same as that of the ninth detection mass block, and the movement direction of the seventh detection mass block is opposite to that of the tenth detection mass block; The first driving mass mass, the second driving mass mass, the third driving mass mass and the fourth driving mass mass do not move due to the constraints of the anchor points on both sides and the decoupling with the third detection structure; The first detection mass block and the second detection mass block in the first detection structure do not move; The third detection mass, the fourth detection mass, the fifth detection mass and the sixth detection mass in the second detection structure do not move.

20. The MEMS angular velocity sensor according to claim 1, wherein: Each of the first driving mass block, the second driving mass block, the third driving mass block and the fourth driving mass block comprises: a first cavity; The driving push-pull comb teeth are located in the first cavity, and two groups of driving push-pull comb teeth that are adjacent and opposite to each other form a group of push-pull driving capacitors; The drive feedback comb teeth are located in the first cavity, and two groups of drive feedback comb teeth that are adjacent and opposite to each other form a group of drive feedback capacitors.

21. The MEMS angular velocity sensor according to claim 20, wherein: The push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis and the second axis, or the push-pull drive capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis, the second axis and the center.

22. The MEMS angular velocity sensor according to claim 20, wherein: The drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis and the second axis, or the drive feedback capacitors in the first drive mass block, the second drive mass block, the third drive mass block and the fourth drive mass block are symmetrical as a whole about the first axis, the second axis and the center.

23. The MEMS angular velocity sensor according to claim 20, wherein: Each driving mass block includes three groups of push-pull driving capacitors and one group of driving feedback capacitors.

24. The MEMS angular velocity sensor according to claim 6, wherein: A second cavity is formed in each of the first detection mass block and the second detection mass block in the first detection structure, and the second cavity divides the detection mass block into a first part and a second part; The first part and the electrode located therebelow form a first detection capacitor; the second part and the electrode located therebelow form a second detection capacitor, The first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis and the second axis as a whole, or the first detection capacitor and the second detection capacitor in the first detection structure are symmetrical about the first axis, the second axis and the center as a whole.

25. The MEMS angular velocity sensor according to claim 8, wherein: A third cavity is formed in each of the third detection mass block, the fourth detection mass block, the fifth detection mass block and the sixth detection mass block in the second detection structure, and the third cavity divides the detection mass block into a first part and a second part; The first part and the electrode located therebelow form a third detection capacitor; the second part and the electrode located therebelow form a fourth detection capacitor, The third detection capacitor and the fourth detection capacitor in the second detection structure are symmetrical about the first axis and the second axis as a whole, or the third detection capacitor and the fourth detection capacitor in the second detection structure are symmetrical about the first axis, the second axis and the center as a whole.

26. The MEMS angular velocity sensor according to claim 13, wherein: Each of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block, and the tenth detection mass block in the third detection structure comprises: fourth cavity; A plurality of connecting beams are located in the fourth cavity and divide the fourth cavity into a plurality of spaces; A first plate, located in the fourth cavity, and forming a fifth detection capacitor with the connecting beam; The second plate is located in the fourth cavity and forms a sixth detection capacitor with the connecting beam. A first plate and a second plate are provided in each space, and the first plate and the second plate in each space are arranged opposite to each other.

27. The MEMS angular velocity sensor according to claim 26, wherein: The fifth detection capacitor and the sixth detection capacitor in the third detection structure are symmetrical about the first axis and the second axis as a whole, or the fifth detection capacitor and the sixth detection capacitor in the third detection structure are symmetrical about the first axis, the second axis and the center as a whole.

28. The MEMS angular velocity sensor according to claim 1, wherein: The MEMS angular velocity sensor is symmetrical about the first axis and the second axis, or the MEMS angular velocity sensor is symmetrical about the first axis, the second axis and the center.

29. The MEMS angular velocity sensor according to claim 13, wherein: The third detection structure also includes: a seventh anchor point located at a first side of the first detection structure, the seventh anchor point being coupled to the first bridging beam; An eighth anchor point is located at the second side of the first detection structure, and the eighth anchor point is coupled to the second bridge beam.

30. The MEMS angular velocity sensor according to claim 29, wherein: The seventh anchor point and the eighth anchor point are arranged side by side along the second axis direction, the seventh anchor point is located in a recessed area at the center of the first bridge beam, and the eighth anchor point is located in a recessed area at the center of the second bridge beam.

31. The MEMS angular velocity sensor according to claim 1, wherein: The second detection structure is symmetrical about the first axis and the second axis, or the second detection structure is symmetrical about the first axis, the second axis and the center.

32. The MEMS angular velocity sensor according to claim 15, wherein: The four groups of anchor points are symmetrical about the first axis and the second axis as a whole, or the four groups of anchor points are symmetrical about the first axis, the second axis and the center as a whole.

33. The MEMS angular velocity sensor according to claim 16, wherein: In the driving mode, the sum of the momentum of the first driving mass block and the second driving mass block is 0, the sum of the momentum of the third driving mass block and the fourth driving mass block is 0, the sum of the momentum of the third detection mass block and the fourth detection mass block is 0, the sum of the momentum of the fifth detection mass block and the sixth detection mass block is 0, the sum of the momentum of the seventh detection mass block and the eighth detection mass block is 0, the sum of the momentum of the ninth detection mass block and the tenth detection mass block is 0, and the sum of the angular momentum of the first detection mass block and the second detection mass block is 0.

34. The MEMS angular velocity sensor according to claim 17, wherein: In the detection mode of the angular velocity in the direction of the first axis, the sum of the angular momentum of the first detection mass block and the second detection mass block is zero.

35. The MEMS angular velocity sensor according to claim 18, wherein: In the detection mode of the angular velocity in the direction of the second axis, the sum of the angular momentums of the third detection mass block, the fourth detection mass block, the fifth detection mass block, and the sixth detection mass block is zero.

36. The MEMS angular velocity sensor according to claim 19, wherein: In the detection mode of the angular velocity in the direction of the third axis, the sum of the angular momentums of the seventh detection mass block, the eighth detection mass block, the ninth detection mass block, and the tenth detection mass block is zero.

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