Evaporation device, vacuum coating equipment and vacuum coating method

Abstract

The invention relates to the technical field of vacuum coating, and particularly discloses an evaporation device, vacuum coating equipment and a vacuum coating method. The device comprises a bearing disc provided with a plurality of working positions and an evaporation source main body, the bearing disc can rotate around the switching axis, and the multiple working stations are distributed around the switching axis in the circumferential direction. The evaporation source main bodies are installed on the bearing disc, each evaporation source main body is located at a working position, and the bearing disc can drive each evaporation source main body to move to any working position; the evaporation source body is provided with a material bottle body used for containing materials and a material bottle protection shell arranged on the material bottle body in a sleeving mode, the material bottle protection shell comprises a heating piece, and the heating piece can heat the materials in the material bottle body to the pre-melting temperature or the evaporation temperature. According to the device, the material to be evaporated is pre-melted and heated through the design that the material is heated to the pre-melting temperature or the evaporation temperature, so that the evaporation speed of the material is increased, the film forming effect is improved, and the film coating efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to an evaporation device, a vacuum coating equipment and a vacuum coating method. Background Art

[0002] In the coating process such as vacuum evaporation coating, the replenishment and preheating of coating materials are important preparation steps before vacuum coating. In the prior art, in order to replenish the coating materials to the vacuum coating station, it is often necessary to break the vacuum in the coating chamber; and during the preheating process of the coating materials, vacuum coating is usually not possible in the vacuum coating chamber at the same time. Under the aforementioned circumstances, the production efficiency of vacuum coating is low and is not conducive to improving the quality of coating; especially for coating materials that require long-term preheating, the preheating process of the coating materials becomes one of the important factors affecting the coating efficiency. Summary of the invention

[0003] The purpose of the present invention is to provide an evaporation device, a vacuum coating equipment and a vacuum coating method. With the help of the cooperation of a heating element and a carrier plate, the material can be pre-melted while waiting for evaporation, thereby accelerating the evaporation rate of the material and improving the film forming effect and coating efficiency.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] The evaporation device comprises a carrier plate and an evaporation source body; the carrier plate can rotate around a switching axis, a plurality of working positions are arranged on the carrier plate, and the plurality of working positions are circumferentially distributed around the switching axis; the evaporation source body is installed on the carrier plate, each of the evaporation source bodies is located at one of the working positions, and the carrier plate can drive each of the evaporation source bodies to move to any of the working positions; the evaporation source body is provided with a bottle body for accommodating materials and a bottle protective shell sleeved on the bottle body, the bottle protective shell comprises a heating element, and the heating element can heat the material in the bottle body to a pre-melting temperature or an evaporation temperature; the evaporation temperature is higher than the pre-melting temperature.

[0006] As a preferred technical solution of the evaporation device, the material bottle protective shell further comprises a protective shell body, the heating element is arranged on the outer side wall of the material bottle body, and the protective shell body is a tubular element, which is sleeved on the heating element.

[0007] As a preferred technical solution of the evaporation device, the material bottle protective shell further includes a cooling pipeline, which is arranged on the inner side wall of the protective shell body, and the cooling pipeline can contain a coolant.

[0008] As a preferred technical solution of the evaporation device, the evaporation device also includes a cooling liquid storage unit, the discharge end of the cooling liquid storage unit is connected to the cooling liquid inlet on the carrier plate, the receiving end of the cooling liquid storage unit is connected to the cooling liquid outlet on the carrier plate, the cooling liquid flows into the cooling pipeline from the cooling liquid inlet and flows out of the cooling pipeline from the cooling liquid outlet.

[0009] As a preferred technical solution for the evaporation device, the evaporation device also includes a hollow rotating shaft, all of the evaporation source bodies are installed on the upper disk surface of the carrier disk, the hollow rotating shaft is inserted into the lower disk surface of the carrier disk, the through hole of the hollow rotating shaft connects the upper disk surface of the carrier disk and the lower disk surface of the carrier disk, the hollow rotating shaft is coaxial with the switching axis, a rotating seal is sleeved on the hollow rotating shaft, and the hollow rotating shaft can rotate relative to the rotating seal.

[0010] As a preferred technical solution of the evaporation device, the evaporation device also includes an electrode connector, which is arranged at one end of the hollow rotating shaft away from the supporting plate and is electrically connected to the heating element through an electrical connection cable, and the electrical connection cable passes through a through hole of the hollow rotating shaft.

[0011] As a preferred technical solution of the evaporation device, the evaporation device further includes a driving wheel, which is drivingly connected to the hollow rotating shaft and is used to drive the hollow rotating shaft to rotate around the switching axis.

[0012] As a preferred technical solution of the evaporation device, a device positioning frame is fixedly connected to the upper plate surface of the carrier plate, the number of the device positioning frames is the same as the number of the evaporation source bodies, and each of the evaporation source bodies is movably mounted on one of the device positioning frames.

[0013] A vacuum coating device comprises a coating chamber for coating a substrate fixture, wherein at least one of the above-mentioned evaporation devices is arranged in the coating chamber, one of the multiple working positions is defined as an evaporation position, and the remaining working positions are defined as pre-melting positions, and a pre-melting baffle and a coating baffle are also installed in the coating chamber, and the pre-melting baffle is used to shield the opening of the material bottle body of the evaporation source body located at the pre-melting position, and the coating baffle is used to shield the opening of the material bottle body of the evaporation source body located at the evaporation position.

[0014] The vacuum coating method is applied to the above vacuum coating equipment, comprising the following steps:

[0015] S10: positioning the substrate fixture in the coating chamber;

[0016] S20: heating the material in the evaporation source body at the pre-melting position to a pre-melting temperature, and heating the material in the evaporation source body at the evaporation position to an evaporation temperature;

[0017] S30: When the material in the evaporation source body located at the evaporation position is less than a preset value, the carrier plate drives other evaporation source bodies to move to the evaporation position until the coating of the substrate fixture is completed.

[0018] Beneficial effects of the present invention:

[0019] The evaporation device uses a carrier plate that can rotate around the switching axis to achieve the switching of the evaporation source body between different working positions, thereby achieving the purpose of moving any evaporation source body to the corresponding position. The structural design of the evaporation source body, which consists of a bottle body, a bottle protective shell and a heating element, makes the heating operation of each bottle body independent of each other, improves the flexibility of heating the evaporation source body, and helps the evaporation device achieve different working purposes. By heating the material to the pre-melting temperature, the material waiting for evaporation can be pre-melted and heated, and by heating the material to the evaporation temperature, the material can be evaporated and coated, and this improvement helps to flexibly achieve different heating purposes for the coating material. The evaporation device accelerates the evaporation rate of the material and improves the evaporation efficiency of the material, thereby meeting the requirements of the vacuum coating equipment for the film forming effect and coating efficiency of the substrate on the substrate fixture.

[0020] The vacuum coating equipment is able to perform heating operations at different temperatures on the evaporation source body located at different working positions by limiting the evaporation position and the pre-melting position; the material in the evaporation source body located at the pre-melting position is heated to the pre-melting temperature, and the opening of the material bottle body can be blocked by the pre-melting baffle during the pre-melting process. The above design allows the material to be fully pre-melted, and the evaporation coating cannot be performed due to the factors of temperature and obstruction of the evaporation path, so that the evaporation source body located at the pre-melting position can quickly meet the evaporation coating conditions and start evaporation after switching to the evaporation position, thereby drastically shortening the waiting time after replacing the evaporation source body, thereby significantly shortening the invalid working time of the vacuum coating operation, improving the parallelism of the coating process, and thus maximizing the efficiency of material evaporation. The above improvements greatly improve the efficiency of coating, and also help to improve the film forming effect. The design of the coating baffle selectively closing the opening of the evaporation source body located at the evaporation position can realize the rapid control of material evaporation, so that after reaching the coating thickness or discovering an operating error, the material can be suppressed as quickly as possible from evaporating onto the coating substrate, thereby ensuring the controllability of the coating process.

[0021] The vacuum coating method distinguishes between the pre-melting position and the evaporation position, and adds a pre-melting step to the evaporation source body to be evaporated, so that the pre-melting and evaporation of the evaporation material can be carried out simultaneously, thereby improving the evaporation coating efficiency. The amount of material in the evaporation source body located at the evaporation position is monitored, and when the material in one evaporation source body is less than the preset value, another evaporation source body can be replaced in time to continue evaporation. The above design enables the vacuum coating equipment to achieve continuous evaporation coating as much as possible without wasting materials, thereby significantly shortening the ineffective working time of the vacuum coating equipment and significantly improving the material evaporation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of a vacuum coating device provided by an embodiment of the present invention;

[0023] Figure 2 is a top view of a vacuum coating device provided by an embodiment of the present invention;

[0024] Figure 3 It is a schematic diagram of the structure of an evaporation device provided in an embodiment of the present invention.

[0025] In the figure:

[0026] 110, chamber shell; 111, protective shell; 121, pre-melting baffle; 122, coating baffle;

[0027] 210, coating room; 220, feeding room;

[0028] 300, feeding device;

[0029] 400, positioning device;

[0030] 500, evaporation device; 510, carrier plate; 511, coolant inlet; 512, coolant outlet; 513, device positioning frame; 514, switching axis; 520, rotating seal; 530, driving wheel; 540, coolant storage unit; 550, electrode connector; 560, hollow rotating shaft;

[0031] 600, evaporation source body;

[0032] 700. Substrate fixture. DETAILED DESCRIPTION

[0033] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] like Figures 1 to 3 As shown, the substrate to be coated can be placed on the substrate fixture 700 .

[0038] The present embodiment provides an evaporation device 500, which includes a carrier plate 510 and an evaporation source body 600; the carrier plate 510 can rotate around a switching axis 514, and a plurality of working positions are arranged on the carrier plate 510, and the plurality of working positions are circumferentially distributed around the switching axis 514, and illustratively, the plurality of working positions are circumferentially uniformly distributed around the switching axis 514; the evaporation source body 600 is installed on the carrier plate 510, and the number of the evaporation source body 600 is the same as the number of working positions, and each evaporation source body 600 is located at a working position, and the carrier plate 510 can drive each evaporation source body 600 to move to any working position; the evaporation source body 600 is provided with a bottle body for accommodating materials and a bottle protective shell sleeved on the bottle body, and the bottle protective shell includes a heating element, and illustratively, the heating element can be a heating wire; the heating element can heat the material in the bottle body to a pre-melting temperature or an evaporation temperature; and the evaporation temperature is higher than the pre-melting temperature. It can be understood that the material can be a coating material.

[0039] The evaporation device 500 uses a carrier plate 510 that can rotate around a switching axis 514 to achieve the switching of the evaporation source body 600 between different working positions, thereby achieving the purpose of moving any evaporation source body 600 to a corresponding position. The structural design of the evaporation source body 600, which consists of a bottle body, a bottle protective shell and a heating element, makes the heating operation of each bottle body independent of each other, improves the flexibility of heating the evaporation source body 600, and helps the evaporation device 500 to achieve different working purposes. By heating the material to the pre-melting temperature, the material waiting for evaporation can be pre-melted and heated, and by heating the material to the evaporation temperature, the material can be evaporated and coated, thereby helping to flexibly achieve different heating purposes for the coating material. The evaporation device 500 accelerates the evaporation speed of the material and improves the evaporation efficiency of the material, thereby meeting the requirements of the vacuum coating equipment for the film forming effect and coating efficiency of the substrate on the substrate fixture 700.

[0040] In this embodiment, the material bottle protective shell also includes a protective shell body, and the heating element is arranged on the outer wall of the material bottle body. The protective shell body is a tubular member, which is sleeved on the heating element. Through the structural design of the protective shell body and the heating element, the heating capacity of the heating element on the material bottle body is optimized, and the heat preservation and heat insulation capacity of the protective shell body on the heating element and the material bottle body is guaranteed. The above structure is simple and reliable, occupies a small space and has high working stability, which ensures that the material can be smoothly heated to the pre-melting temperature or evaporation temperature.

[0041] Furthermore, the material bottle protective shell also includes a cooling pipeline, which is arranged on the inner side wall of the protective shell body, and the cooling pipeline can contain a coolant. The setting of the cooling pipeline realizes the cooling operation of the material bottle protective shell, so that the material bottle protective shell has heat insulation ability, thereby avoiding the situation where the heating element arranged on one material bottle body affects the other material bottle body, ensuring that the heating condition in each material bottle body is accurately controllable. The above design ensures the accuracy of the material heating effect, so that the evaporation device 500 can operate smoothly.

[0042] Furthermore, the evaporation device 500 also includes a cooling liquid storage unit 540, the discharge end of the cooling liquid storage unit 540 is connected to the cooling liquid inlet 511 on the carrier plate 510, and the receiving end of the cooling liquid storage unit 540 is connected to the cooling liquid outlet 512 on the carrier plate 510, and the cooling liquid flows into the cooling pipeline from the cooling liquid inlet 511 and flows out of the cooling pipeline from the cooling liquid outlet 512. The above improvements enable the evaporation device 500 to cool the material bottle protective shell by liquid cooling. The setting of the cooling liquid inlet 511 and the cooling liquid outlet 512 on the cooling liquid storage unit 540 allows the cooling liquid to circulate between the cooling liquid storage unit 540 and each material bottle protective shell. The above design improves the utilization rate of the cooling liquid, achieves the purpose of low-cost cooling, and meets the cooling capacity requirements of the cooling pipeline of the evaporation device 500.

[0043] In this embodiment, the evaporation device 500 further includes a hollow rotating shaft 560, all the evaporation source bodies 600 are mounted on the upper disk surface of the carrier plate 510, the hollow rotating shaft 560 is plugged into the lower disk surface of the carrier plate 510, the through hole of the hollow rotating shaft 560 communicates the upper disk surface of the carrier plate 510 and the lower disk surface of the carrier plate 510, the hollow rotating shaft 560 is coaxial with the switching axis 514, and a rotating seal 520 is sleeved on the hollow rotating shaft 560, and the hollow rotating shaft 560 can rotate relative to the rotating seal 520. The above design realizes the structural limitation of the evaporation device 500, optimizes the structural layout of the evaporation device 500, and reduces the space occupied by the evaporation device 500. The design of the hollow rotating shaft 560 with a through hole realizes the storage of the cables on the evaporation device 500, avoids the occurrence of large-scale rotation of the cables with the evaporation source body 600, and greatly reduces the risk of entanglement between the cables, thereby reducing the safety hazards during the operation of the evaporation device 500, reducing the frequency of maintenance, and extending the service life.

[0044] Furthermore, the evaporation device 500 further includes an electrode connector 550, which is disposed at one end of the hollow rotating shaft 560 away from the carrier plate 510 and is electrically connected to the heating element via an electrical connection cable, which passes through a through hole of the hollow rotating shaft 560. Through the design of the electrode connector 550 and the electrical connection cable, the purpose of supplying power to the heating element can be achieved, ensuring that the heating operation of the material in the evaporation source body 600 can be successfully completed.

[0045] Exemplarily, the evaporation device 500 further includes a driving wheel 530, which is in transmission connection with the hollow rotating shaft 560, and is used to drive the hollow rotating shaft 560 to rotate around the switching axis 514. The setting of the driving wheel 530 plays a role in driving the carrier plate 510 to rotate, which helps to improve the automation level of the evaporation device 500. In addition, the workload of the operator is reduced, and the risk of misoperation of the evaporation device 500 is reduced.

[0046] In this embodiment, the upper plate surface of the carrier plate 510 is fixedly connected with a device positioning frame 513, and the number of the device positioning frames 513 is the same as that of the evaporation source bodies 600, and each evaporation source body 600 is movably mounted on a device positioning frame 513. The arrangement of the device positioning frame 513 realizes the movable connection of the evaporation source body 600 on the carrier plate 510, so that the position and angle of the evaporation source body 600 relative to the carrier plate 510 can be adjusted, thereby greatly improving the flexibility of the arrangement of the evaporation source body 600, so that the evaporation device 500 can be applied to different types of working environments.

[0047] In this embodiment, a protective shell 111 is also fixedly connected to the chamber shell 110, and the protective shell 111 is used to protect the rotating seal 520, the driving wheel 530 and the coolant storage unit 540. The rotating seal 520 is sleeved on the hollow rotating shaft 560, and the outer wall of the rotating seal 520 is tightly matched with the chamber shell 110.

[0048] The present embodiment further provides a vacuum coating device, including a coating chamber 210 for coating a substrate fixture 700, wherein at least one evaporation device 500 is rotatably disposed in the coating chamber 210, wherein one of the plurality of working positions of each evaporation device 500 is defined as an evaporation position, and the remaining working positions are defined as pre-melting positions. A pre-melting baffle 121 and a coating baffle 122 are also installed in the coating chamber 210, wherein the pre-melting baffle 121 is used to shield the opening of the material bottle body of the evaporation source body 600 located at the pre-melting position, and the coating baffle 122 is used to shield the opening of the material bottle body of the evaporation source body 600 located at the evaporation position.

[0049] Exemplarily, each evaporation device 500 includes a plurality of pre-melting baffles 121 and a coating baffle 122, the number of the pre-melting baffles 121 is the same as the number of the pre-melting positions, and each pre-melting baffle 121 is used to block an opening of a material bottle body of an evaporation source body 600 located at the pre-melting position, and the coating baffle 122 selectively closes the opening of the material bottle body of the evaporation source body 600 located at the evaporation position.

[0050] The vacuum coating equipment is able to perform heating operations at different temperatures on the evaporation source body 600 located at different working positions by limiting the evaporation position and the pre-melting position; the material in the evaporation source body 600 located at the pre-melting position is heated to the pre-melting temperature, and the opening of the material bottle body is blocked by the pre-melting baffle 121. The above design allows the material to be fully pre-melted and reach the critical state of evaporation, but it can also be limited by the temperature and the factors of the obstruction of the evaporation path and cannot be evaporated and coated on the substrate, so that the evaporation source body 600 located at the pre-melting position can quickly meet the evaporation demand and start evaporation after switching to the evaporation position, thereby drastically shortening the waiting time after replacing the evaporation source body 600, thereby significantly shortening the ineffective working time of the vacuum coating operation, improving the parallelism of the coating process, and thus maximizing the efficiency of material evaporation. The above improvements greatly improve the efficiency of coating and also help to improve the film forming effect. The design of the coating baffle 122 selectively closing the opening of the evaporation source body 600 at the evaporation position can achieve rapid control of material evaporation, so that after the coating thickness is reached or an operating error is found, the evaporation of the material onto the coating substrate can be suppressed as quickly as possible, thereby ensuring the controllability of the coating process.

[0051] Exemplarily, multiple evaporation devices 500 (such as the first evaporation device and the second evaporation device) can share a carrier plate 510. It can be understood that at this time, for each evaporation device 500, one of its multiple working positions is defined as an evaporation position (such as the first evaporation position and the second evaporation position), and the remaining working positions are defined as pre-melting positions (such as the first pre-melting position and the second pre-melting position). The carrier plate 510 can drive a certain evaporation source body 600 of each of the multiple evaporation devices 500 to reach its evaporation position at the same time, so as to realize simultaneous coating of multiple materials (such as the first material and the second material).

[0052] This embodiment also provides a vacuum coating method for coating a substrate on a substrate fixture 700, which is applied to the above-mentioned vacuum coating equipment, and includes the following steps:

[0053] Step 1: heating the material in the evaporation source body 600 at the pre-melting position to the pre-melting temperature.

[0054] Step 2: heating the material in the evaporation source body 600 at the evaporation position to the evaporation temperature and performing vacuum coating.

[0055] Step 3: Stop heating all the evaporation source bodies 600 and move the substrate fixture 700 out of the coating chamber 210 .

[0056] Step 4: Monitor the material capacity in the evaporation source body 600 located at the evaporation position.

[0057] Step 5: Determine whether the material in the evaporation source body 600 at the evaporation position is less than the preset value. If so, switch an evaporation source body 600 at the pre-melting position to the evaporation position and then return to step 2. If not, proceed to step 6.

[0058] Step 6: Determine whether the coating of the substrate on the substrate fixture 700 is completed. If so, proceed to step 3; if not, return to step 2.

[0059] In this embodiment, step 1 and step 2 can be performed simultaneously. The above steps 1 to 6 are only used to distinguish the steps and do not represent a specific operation sequence.

[0060] Among them, the evaporation temperature is higher than the pre-melting temperature, each evaporation device 500 is provided with an evaporation position and at least one pre-melting position, the number of evaporation source bodies 600 is the same as the sum of the number of evaporation positions and pre-melting positions, and each evaporation source body 600 is located at the evaporation position or the pre-melting position.

[0061] By distinguishing the pre-melting position and the evaporation position, a pre-melting step is added to the evaporation source body 600 to be evaporated, so that the pre-melting and evaporation of the evaporation material can be carried out simultaneously, thereby improving the evaporation coating efficiency. The amount of material in the evaporation source body 600 located at the evaporation position is monitored, so that when the material in one evaporation source body 600 is less than the preset value, another evaporation source body 600 can be replaced in time to continue evaporation. The above design enables the vacuum coating equipment to achieve continuous evaporation coating as much as possible without wasting materials, thereby significantly shortening the ineffective working time of the vacuum coating equipment and significantly improving the material evaporation efficiency.

[0062] Specifically, the heating element does not heat the evaporation source body 600 where the material is less than a preset value.

[0063] In this embodiment, before the material in the evaporation source body 600 located at the pre-melting position is heated to the pre-melting temperature, the following steps are also included: determine whether the coating chamber 210 meets the environmental requirements of the high vacuum state, if so, continue with step 2, if not, terminate the coating operation and continue to evacuate. By detecting the vacuum state in the coating chamber 210, it is possible to determine whether the coating chamber 210 meets the environmental requirements required for coating. With the setting of this step, it is limited that the coating operation can only be performed in a high vacuum environment, thereby ensuring the film forming effect of the substrate on the substrate fixture 700, improving the finished product yield of the substrate on the substrate fixture 700, and reducing the production cost.

[0064] Exemplarily, the coating chamber 210 is selectively connected to the feeding chamber 220, and a feeding device 300 for feeding materials to the evaporation source body 600 is installed in the feeding chamber 220. The feeding operation of the evaporation source body 600 includes the following detailed steps: connecting the feeding chamber 220 to the coating chamber 210, feeding the evaporation source body 600 with the feeding device 300, and then isolating the feeding chamber 220 from the coating chamber 210. By adopting the above steps, the time for the coating chamber 210 to be connected to the feeding chamber 220 can be reduced as much as possible, thereby reducing the risk of the high vacuum state in the coating chamber 210 being affected due to accidents, so as to more effectively ensure the film forming effect of the substrate on the substrate fixture 700.

[0065] Furthermore, one of all the pre-melting positions is defined as a feeding position, and the feeding device 300 can replenish materials to the evaporation source body 600 located at the feeding position. The definition of the feeding position facilitates the feeding operation of the feeding device 300 to the evaporation source body 600, and the design of the feeding position as a pre-melting position also enables the material replenishment action of the evaporation source body 600 located at the feeding position to be completed together with the evaporation and pre-melting operations of other evaporation source bodies 600, coordinates the working condition relationship between the feeding period and the evaporation period of the evaporation source body 600, avoids the situation where the vacuum coating equipment works ineffectively when the material is replenished, thereby further compressing the ineffective working time, so that the efficiency of material evaporation can be further improved.

[0066] In this embodiment, the evaporation positions and all the pre-melting positions are distributed at intervals in the circumferential direction around the switching axis 514 .

[0067] Exemplarily, a positioning device 400 is provided in the coating chamber 210, and the positioning device 400 is used to position the substrate fixture 700. After the substrate fixture 700 is positioned in the coating chamber 210, the following steps are also included: the substrate fixture 700 is controlled to rotate around the axis of the substrate fixture 700 by the positioning device 400; and before stopping heating all the evaporation source bodies 600, the following steps are also included: the substrate fixture 700 is controlled to stop rotating by the positioning device 400. By rotating the substrate fixture 700 around its own axis, the positions of various parts of the substrate on the substrate fixture 700 can be changed, so that the coating material particles can be uniformly adhered to various places on the surface of the substrate on the substrate fixture 700, thereby further improving the film forming effect of the substrate on the substrate fixture 700.

[0068] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. An evaporation device, characterized in that include: A carrier plate (510) is rotatable around a switching axis (514), and a plurality of working positions are arranged on the carrier plate (510), and the plurality of working positions are circumferentially distributed around the switching axis (514); An evaporation source body (600) is installed on the carrying plate (510), each of the evaporation source bodies (600) is located at one of the working positions, and the carrying plate (510) can drive each of the evaporation source bodies (600) to move to any of the working positions; The evaporation source body (600) is provided with a bottle body for containing materials and a bottle protection shell sleeved on the bottle body, the bottle protection shell includes a heating element, and the heating element can heat the material in the bottle body to a pre-melting temperature or an evaporation temperature; the evaporation temperature is higher than the pre-melting temperature.

2. The evaporation device according to claim 1, characterized in that The material bottle protective shell further comprises a protective shell body, the heating element is arranged on the outer side wall of the material bottle body, and the protective shell body is a tubular element, which is sleeved on the heating element.

3. The evaporation device according to claim 2, characterized in that: The material bottle protection shell further comprises a cooling pipeline, wherein the cooling pipeline is arranged on the inner side wall of the protection shell body, and the cooling pipeline can contain a cooling liquid.

4. The evaporation device according to claim 3, characterized in that The evaporation device also includes a cooling liquid storage unit (540), the discharge end of the cooling liquid storage unit (540) is connected to the cooling liquid inlet (511) on the carrier plate (510), and the receiving end of the cooling liquid storage unit (540) is connected to the cooling liquid outlet (512) on the carrier plate (510), and the cooling liquid flows into the cooling pipeline from the cooling liquid inlet (511) and flows out of the cooling pipeline from the cooling liquid outlet (512).

5. The evaporation device according to claim 1, characterized in that The evaporation device further comprises a hollow rotating shaft (560), all of the evaporation source bodies (600) are mounted on the upper disk surface of the carrier disk (510), the hollow rotating shaft (560) is plugged into the lower disk surface of the carrier disk (510), a through hole of the hollow rotating shaft (560) connects the upper disk surface of the carrier disk (510) and the lower disk surface of the carrier disk (510), the hollow rotating shaft (560) is coaxial with the switching axis (514), a rotating seal (520) is sleeved on the hollow rotating shaft (560), and the hollow rotating shaft (560) can rotate relative to the rotating seal (520).

6. The evaporation device according to claim 5, characterized in that The evaporation device further comprises an electrode connector (550), which is arranged at one end of the hollow rotating shaft (560) away from the carrier plate (510) and is electrically connected to the heating element via an electrical connection cable, and the electrical connection cable passes through a through hole of the hollow rotating shaft (560).

7. The evaporation device according to claim 5, characterized in that The evaporation device further comprises a driving wheel (530), wherein the driving wheel (530) is drivingly connected to the hollow rotating shaft (560) and is used to drive the hollow rotating shaft (560) to rotate around the switching axis (514).

8. The evaporation device according to claim 1, characterized in that The upper disk surface of the carrier disk (510) is fixedly connected with a device positioning frame (513), the number of the device positioning frames (513) is the same as the number of the evaporation source bodies (600), and each of the evaporation source bodies (600) is movably mounted on one of the device positioning frames (513).

9. Vacuum coating equipment, characterized in that: The invention comprises a coating chamber (210) for coating a substrate fixture (700), wherein at least one evaporation device according to any one of claims 1 to 8 is arranged in the coating chamber (210), one of the plurality of working positions is defined as an evaporation position, and the remaining working positions are defined as pre-melting positions, and a pre-melting baffle (121) and a coating baffle (122) are also installed in the coating chamber (210), wherein the pre-melting baffle (121) is used to shield the opening of the material bottle body of the evaporation source body (600) located at the pre-melting position, and the coating baffle (122) is used to shield the opening of the material bottle body of the evaporation source body (600) located at the evaporation position.

10. A vacuum coating method, characterized in that: The vacuum coating device according to claim 9 comprises the following steps: S10: positioning the substrate fixture (700) in the coating chamber (210); S20: heating the material in the evaporation source body (600) located at the pre-melting position to a pre-melting temperature, and heating the material in the evaporation source body (600) located at the evaporation position to an evaporation temperature; S30: When the material in the evaporation source body (600) located at the evaporation position is less than a preset value, the carrier plate (510) drives other evaporation source bodies (600) to move to the evaporation position until the coating of the substrate fixture (700) is completed.

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