Silencing structure for vacuum pump

Abstract

The invention discloses a noise reduction structure for a vacuum pump, the noise reduction structure comprises a resonance box, the resonance box is provided with a plurality of resonance cavities arranged side by side, the plurality of resonance cavities are communicated in sequence, and vibration noise in the vacuum pump is spread outwards through a pump body outlet and enters the plurality of resonance cavities. Sound waves generate resonance and counteract under the action of the multiple resonant cavities which are communicated with one another, so that the amplitude of the sound waves is weakened. In the invention, the two adjacent resonant cavities are sequentially communicated through the non-return channel and the flow guide channel, and the opening, communicated with the flow guide channel, of the same resonant cavity and the opening, communicated with the non-return channel, of the same resonant cavity are arranged at intervals, so that airflow and vibration noise are subjected to direction change and path extension for many times in the flowing process; the complex flowing mode not only further weakens sound waves and reduces vibration noise through multiple times of reflection and interference, but also can quickly weaken the airflow velocity and reduce aerodynamic noise generated by airflow impact, and effectively weaken the noise level in the operation process of the vacuum pump.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum pumps, and in particular to a silencer structure for vacuum pumps. Background Art

[0002] A vacuum pump is a device that uses mechanical, physical, chemical or physicochemical methods to evacuate air from a container to obtain and maintain a vacuum. It is widely used in metallurgy, chemistry, food and other industries. The vacuum pump needs to be tested before it is put into use. Since it is inconvenient to install complex noise reduction structures in the test scenario, the vacuum pump generates a lot of operating noise. During the operation of the vacuum pump, the vacuum pump inhales, compresses and discharges the gas through the pump body outlet. The compression and flow process of the gas in the pump inevitably generates vibration noise, and the airflow impact generated by the gas discharged from the pump body outlet will also cause pneumatic noise. These noises will not only deteriorate the working environment, but may also interfere with the stable operation of precision electronic equipment.

[0003] In the related art, the pump body outlet of the vacuum pump is usually connected to a bellows, and then connected to an exhaust duct to collect and process the gas discharged by the vacuum pump, and it is expected that the airflow at the pump body outlet can be guided by the bellows to weaken the working noise of the vacuum pump. However, the bellows has a weak ability to reduce noise, resulting in the operating noise of the vacuum pump still being at a relatively high level. Summary of the invention

[0004] The embodiment of the present application provides a silencer structure for a vacuum pump, which can solve the technical problem of high noise level of the vacuum pump during testing.

[0005] An embodiment of the present application provides a silencer structure for a vacuum pump, the silencer structure comprising a resonance box; the resonance box has a plurality of resonance cavities arranged side by side, a plurality of check channels connected to the plurality of resonance cavities in a one-to-one correspondence, and a plurality of flow guide channels; wherein each of the check channels is connected to an adjacent resonance cavity through the flow guide channel, and an opening of the same resonance cavity connected to the flow guide channel is arranged at intervals from an opening connected to the check channel, one of the plurality of resonance cavities is a first resonance cavity, and another is a second resonance cavity, the first resonance cavity is used to communicate with a vacuum pump, the check channel connected to the second resonance cavity has a check total outlet, the first resonance cavity receives the airflow delivered by the vacuum pump, and the airflow sequentially enters the adjacent resonance cavity through the check channel and the flow guide channel, and after passing through all the resonance cavities in sequence, flows out from the check total outlet.

[0006] In some embodiments, the opening of the first cavity for connecting to the vacuum pump and the opening connected to the non-return channel are arranged opposite to each other in a first direction; the opening of the same resonance cavity connected to the guide channel and the opening connected to the non-return channel are arranged at intervals in the first direction; wherein the first direction is perpendicular to the direction in which multiple resonance cavities are arranged side by side.

[0007] In some embodiments, the resonance box includes a non-return wall, which includes a first plate body and a second plate body, and the first plate body and the second plate body are stacked and enclosed to form the non-return channel; the silencer structure also includes a non-return member, which is arranged in the non-return channel, and the non-return member is used to control the opening and closing of the non-return channel, and to control the one-way flow of the airflow from the upstream resonance cavity to the downstream resonance cavity.

[0008] In some embodiments, a plurality of the resonance cavities are arranged side by side in a horizontal direction, the non-return channel includes a non-return chamber, the non-return chamber has a non-return inlet connected to the resonance chamber, and the non-return member is arranged in the non-return chamber; the non-return member has a first state and a second state, in the first state, the non-return member abuts against the non-return inlet under the action of gravity to close the non-return inlet; in the second state, the non-return member is separated from the non-return inlet under the action of airflow, so that the airflow can enter the non-return channel from the non-return inlet.

[0009] In some embodiments, the non-return cavity extends along the direction of gravity, and in the direction of gravity, the cross-sectional area of ​​the non-return cavity gradually decreases along the direction toward the non-return inlet; the non-return channel also includes an air guide section, which is connected to the end of the non-return cavity away from the non-return inlet and extends from the non-return cavity to the guide channel; from the non-return cavity toward the guide channel, the cross-sectional area of ​​the air guide section gradually increases; the air guide section is curved or straight.

[0010] In some embodiments, the resonance box includes a first shell and a plurality of first partition walls arranged inside the first shell, the plurality of first partition walls are arranged side by side, and divide the internal space of the first shell into a plurality of the resonance cavities; the first partition walls have the guide channel, the guide channel has a guide inlet connected to the non-return channel and a guide outlet connected to the resonance cavity, the guide inlet and the guide outlet are arranged at intervals along a first direction, and the first direction is perpendicular to the direction in which the plurality of the resonance cavities are arranged side by side.

[0011] In some of the embodiments, each of the first partition walls includes two sub-partition walls arranged side by side in the direction in which the multiple resonance cavities are arranged side by side, the guide channel and the guide inlet are formed between the two sub-partition walls, and one of the sub-partition walls has the guide outlet.

[0012] In some embodiments, the noise reduction structure also includes a noise reduction box, which is installed on the resonance box, and the noise reduction box and the resonance box enclose a noise reduction cavity, and the noise reduction cavity is connected to the total non-return outlet; the noise reduction box has a noise reduction outlet connected to the noise reduction cavity, and the airflow flowing out through the total non-return outlet enters the noise reduction cavity and flows out of the noise reduction cavity from the noise reduction outlet.

[0013] In some embodiments, the number of the noise reduction chambers is two, and one of them is the first noise reduction chamber and the other is the second noise reduction chamber, the first noise reduction chamber is connected to the total non-return outlet, and the second noise reduction chamber is connected to the noise reduction outlet; wherein, the first noise reduction chamber and the second noise reduction chamber are connected to each other, and the airflow entering from the total non-return outlet passes through the first noise reduction chamber and the second noise reduction chamber in sequence, and is discharged from the noise reduction outlet.

[0014] In some embodiments, the direction in which the first noise reduction cavity and the second noise reduction cavity are arranged side by side is parallel to the direction in which the multiple resonance cavities are arranged side by side; the first noise reduction cavity and the second noise reduction cavity are arranged on the same side of the multiple resonance cavities along a first direction, and the first direction is perpendicular to the direction in which the multiple resonance cavities are arranged side by side.

[0015] Based on a silencing structure for a vacuum pump according to an embodiment of the present application, multiple resonance chambers are arranged side by side, and the vibration noise in the vacuum pump propagates outward through the pump body outlet and enters the multiple resonance chambers. The sound waves resonate and cancel each other under the action of the multiple resonance chambers connected to each other, so as to weaken the amplitude of the sound waves, thereby achieving the purpose of reducing the vibration noise; two adjacent resonance chambers are connected in sequence through a non-return channel and a guide channel, and the opening of the same resonance chamber connected to the guide channel and the opening connected to the non-return channel are arranged at intervals, so that the airflow and noise continuously switch directions during the flow in the resonance chamber, the non-return channel and the guide channel, and flow along the extended path, and finally experience multiple direction changes and path extensions in the process of passing through all the resonance chambers in sequence. This complex flow pattern not only causes multiple reflections, interferences and energy dissipation of the sound waves during propagation, further weakening the vibration noise, but also can quickly weaken the airflow velocity, effectively reducing the pneumatic noise generated by the airflow impact. The silencing structure of the present application is easy to install, and the first resonance chamber is connected to the vacuum pump, which can achieve noise reduction effects through the joint action of resonance silencing, flow direction change and path extension, and effectively weaken the noise level of the vacuum pump during detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 A schematic structural diagram of a sound-absorbing structure according to an embodiment of the present application;

[0018] Figure 2 A schematic diagram of an explosion structure of a sound-absorbing structure according to an embodiment of the present application;

[0019] Figure 3 A cross-sectional schematic diagram of a sound-absorbing structure according to an embodiment of the present application;

[0020] Figure 4 A partial perspective schematic diagram of a resonance box according to an embodiment of the present application;

[0021] Figure 5 It is another explosion structure schematic diagram of a sound-absorbing structure of an embodiment of the present application;

[0022] Figure 6 This is a schematic structural diagram of a noise reduction box according to an embodiment of the present application;

[0023] Reference numerals:

[0024] 1. Noise-absorbing structure;

[0025] 10. Resonance box; 20. Anti-return piece; 30. Noise reduction box;

[0026] 11. first shell; 12. first partition wall; 31. second partition wall; 32. noise reduction pipe;

[0027] 111, first plate; 112, second plate; 113, third plate; 121, sub-partition wall;

[0028] 100, resonance chamber; 110, non-return channel; 120, flow guide channel; 300, noise reduction chamber; 310, first noise reduction chamber; 320, second noise reduction chamber;

[0029] 100a, resonance inlet; 100b, resonance outlet; 110a, non-return inlet; 120a, flow guide inlet; 120b, flow guide outlet; 1110, non-return cavity; 1120, air guide section;

[0030] X, first direction; Y, second direction. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0032] As a gas delivery device that generates and maintains a vacuum, vacuum pumps are widely used in the industrial field. The vacuum pump transports gas from an environment with a pressure lower than one atmosphere to the atmosphere or an environment with the same atmospheric pressure, so that the evacuated container reaches the required vacuum degree. In practical applications, the vacuum pump needs to be tested before it is put into use, such as factory inspection, maintenance inspection, and re-commissioning test of vacuum pumps that have been out of service for a long time. The inventors have found that the vacuum pump in the test scenario will generate a lot of operating noise. However, since the replacement frequency of the vacuum pump in the test scenario is usually high, and frequent disassembly and performance testing are required, the installation and maintenance of the noise reduction structure becomes difficult.

[0033] In the test scenario, the operating noise of the vacuum pump is complex. The impact of the airflow from the pump body outlet to the exhaust of the lower system will cause pneumatic noise, and the noise inside the vacuum pump will also propagate outward through the pump body outlet. The causes of the noise inside the vacuum pump are complex. On the one hand, the airflow inside the vacuum pump causes the mechanical structure to vibrate and generate noise. On the other hand, the motor, fan and other structures in the vacuum pump also produce working noise. In addition, some variable volume vacuum pumps use the periodic change of the pump chamber volume to complete the process of suction and exhaust. Before being discharged from the pump chamber, the compression of the gas will also generate additional vibration noise. The superposition of this multi-source noise will form a stronger noise interference. The noise level cannot be effectively reduced by simply setting up a diversion device or sound-absorbing cotton, resulting in a large operating noise during the vacuum pump test.

[0034] To solve the above technical problems, please refer to Figure 1-Figure 3 The present application proposes a muffler structure 1 for a vacuum pump, which is applied to the vacuum pump. The muffler structure 1 includes a resonance box 10, which has a plurality of resonance chambers 100 arranged side by side. The plurality of resonance chambers 100 are connected in sequence. When the vibration noise in the vacuum pump propagates outward through the pump body outlet, the sound waves resonate and cancel each other under the action of the plurality of resonance chambers 100 connected to each other, so as to weaken the amplitude of the sound waves, thereby achieving the purpose of reducing the vibration noise. The muffler structure 1 of the present application has a simple structure and is easy to install. It can not only be applied to the vacuum pump test process, but also can play a noise reduction role when installed in a vacuum pump in normal operation.

[0035] The resonance box 10 also includes a plurality of check channels 110, which are connected to the plurality of resonance chambers 100 one by one. The multi-stage check channels 110 effectively prevent the airflow from flowing back to the vacuum pump, thereby protecting the vacuum pump. It is understandable that the sound wave propagates along the flow channel in the resonance box 10. When the sound wave flows from the resonance chamber 100 to the check channel 110, the flow channel cross section suddenly shrinks, and the sound wave is reflected here. Part of the sound wave is reflected to the resonance inlet of the resonance chamber 100, and the other part continues to propagate forward along the flow channel, thereby achieving the purpose of noise elimination to a certain extent.

[0036] The resonance box 10 also includes a plurality of guide channels 120, each non-return channel 110 is connected to an adjacent resonance cavity 100 through the guide channel 120, one end of the guide channel 120 is connected to one resonance cavity 100 through the non-return channel 110, and the other end is connected to another resonance cavity 100, so that two adjacent resonance cavities 100 are connected, so that gas and sound waves can flow between adjacent resonance cavities 100.

[0037] In the embodiment of the present application, the opening of the same resonance cavity 100 connected to the guide channel 120 and the opening connected to the non-return channel 110 are arranged at intervals, forcing the gas to flow along a longer path as much as possible. One of the multiple resonance cavities 100 is a first resonance cavity, and the other is a second resonance cavity. The first resonance cavity is used to communicate with a vacuum pump, and the non-return channel 110 connected to the second resonance cavity has a non-return total outlet. The first resonance cavity receives the airflow delivered by the vacuum pump, and the airflow enters the adjacent resonance cavity through the non-return channel and the guide channel in sequence, and after passing through all the resonance cavities in sequence, it flows out from the non-return total outlet. The airflow and noise continuously switch directions while flowing in the resonance cavity 100, the non-return channel 110 and the guide channel 120, and flow along an extended path, and finally experience multiple direction changes and path extensions while passing through all the resonance cavities 100 in sequence. This complex flow pattern not only causes multiple reflections, interferences and energy dissipation of sound waves during propagation, further weakening vibration noise, but also can quickly weaken the airflow velocity, effectively reduce the pneumatic noise generated by the airflow impact, thereby effectively weakening the noise level during the operation of the vacuum pump.

[0038] See also Figure 1-Figure 4 , Figure 4 This is a partial perspective schematic diagram of a resonance box 10 according to an embodiment of the present application. The resonance box 10 includes a first shell body 11 and a plurality of first partition walls 12. The plurality of first partition walls 12 are arranged side by side inside the first shell body 11, and divide the internal space of the first shell body 11 into a plurality of resonance cavities 100. In this way, two adjacent resonance cavities 100 share one first partition wall 12, which helps to reduce the size of the resonance box 10.

[0039] In the embodiment of the present application, the resonance cavity 100 has a resonance inlet and a resonance outlet, and the resonance inlet and the resonance outlet of the same resonance cavity 100 are arranged relatively in the first direction X. Specifically, in the first cavity, the resonance inlet is an opening for connecting to the vacuum pump, and the resonance outlet is an opening connected to the non-return channel 110. In other resonance cavities 100, the resonance inlet of the same resonance cavity 100 is an opening connected to the guide channel 120, and the resonance outlet is an opening connected to the non-return channel 110. In this way, not only can the flow path of the airflow in the resonance cavity 100 be extended, but also the flow channel design between adjacent resonance cavities 100 can be combined to make the airflow reciprocate in the first direction X, forcing the airflow to change direction multiple times, reducing the speed of the airflow, and helping to reduce the generation of aerodynamic noise.

[0040] The design of the flow channel between adjacent resonance cavities 100 in the embodiment of the present application is described in detail below with reference to the accompanying drawings.

[0041] In one embodiment of the present application, the guide channel 120 is disposed between two adjacent resonant cavities 100, the first partition wall 12 has the guide channel 120, the guide channel 120 has a guide inlet 120a connected to the check channel 110, and a guide outlet 120b connected to the resonant cavity 100, the guide inlet 120a and the guide outlet 120b are arranged at intervals along the first direction X, and the first direction X is perpendicular to the direction in which the multiple resonant cavities 100 are arranged side by side. Please continue to refer to Figure 3 The flow direction of the airflow in the resonance cavity 100 is opposite to the flow direction in the guide channel 120. In this way, by setting a tortuous reciprocating airflow path, the airflow and the flow channel wall in the resonance box 10 generate more friction and collision, thereby reducing the energy and speed of the airflow.

[0042] Furthermore, each first partition wall 12 includes two sub-partition walls 121 arranged side by side in the direction in which the plurality of resonance cavities 100 are arranged side by side. Figure 1-Figure 4 In the resonance box 10 shown, a flow guide channel 120 and a flow guide inlet 120a are formed between two sub-partition walls 121, and one of the sub-partition walls 121 has a flow guide outlet 120b, which is disposed on one side of the sub-partition wall 121 along the first direction X.

[0043] Optionally, the guide outlet 120b can also be arranged on one side of the second direction Y of the sub-partition wall 121, and the guide inlet 120a and the guide outlet 120b are arranged at intervals along the second direction Y. In this way, a tortuous airflow path can also be formed, which is helpful for noise reduction.

[0044] In another embodiment of the present application, the guide channel 120 is arranged on one side of two adjacent resonance cavities 100 along the second direction Y (not shown), the first shell 11 has two first side walls arranged opposite to each other along the second direction Y, at least one of the two first side walls forms a plurality of guide channels 120, it can be understood that the plurality of guide channels 120 can be arranged on the same side of the plurality of resonance cavities 100 along the second direction Y, or the plurality of guide channels 120 are arranged on both sides of the plurality of resonance cavities 100 along the second direction Y. The second direction Y intersects with the direction in which the plurality of resonance cavities 100 are arranged side by side and the first direction X. In particular, when the resonance box 10 is a square box, the direction in which the plurality of resonance cavities 100 are arranged side by side, the first direction X, and the second direction Y are perpendicular to each other.

[0045] Please continue reading Figure 1-Figure 4 The resonance box 10 includes a non-return wall, the first shell 11 at least partially forms the non-return wall, the non-return wall includes a first plate 111 and a second plate 112, the first shell 11 also includes a third plate 113, in a specific implementation, the first plate 111, the second plate 112 and the third plate 113 are stacked once, wherein the first plate 111 and the second plate 112 are grooved to enclose a non-return channel 110.

[0046] It should be noted that the first plate 111, the second plate 112 and the third plate 113 are all sealed to ensure the air tightness of the resonance chamber 100, the non-return channel 110 and the guide channel 120 in the resonance box 10, and the three are all detachably connected to facilitate the disassembly and cleaning of the resonance box 10. In a specific implementation, the sealant can be applied at the connection between the first plate 111 and the second plate 112 and the connection between the second plate 112 and the third plate 113, and then installed by fasteners. Optionally, the first partition wall 12 and the first shell 11 are an integral structure to facilitate processing and reduce installation steps.

[0047] The silencer structure 1 also includes a check member 20, which is arranged in the check channel 110. The check member 20 is used to control the disconnection of the check channel 110 and to control the unidirectional flow of the airflow from the upstream resonance chamber 100 to the downstream resonance chamber 100, so as to prevent the contaminated gas from flowing back into the pump from the pump body outlet when the vacuum pump stops running, causing contamination and damage to the internal components of the pump.

[0048] Please continue reading Figure 3, a plurality of resonance cavities 100 are arranged side by side in the horizontal direction, the non-return channel 110 includes a non-return cavity 1110, the non-return cavity 1110 has a non-return inlet 110a connected to the resonance cavity, and the non-return member 20 is arranged in the non-return cavity 1110. The non-return member 20 has a first state and a second state. In the first state, the non-return member 20 abuts against the non-return inlet 110a under the action of gravity to close the non-return inlet 110a to prevent the airflow in the muffler structure 1 from flowing back to the vacuum pump after the vacuum pump is stopped. In the second state, the non-return member 20 is separated from the non-return inlet 110a under the action of the airflow, so that the airflow can enter the non-return channel 110 from the non-return inlet 110a, so that the airflow flowing out from the pump body outlet when the vacuum pump is running can pass through the plurality of resonance cavities 100 in sequence.

[0049] In one embodiment of the present application, the check piece 20 has an arc surface. For example, the check piece 20 can be a round sphere or an elliptical sphere. When the arc surface of the check piece 20 contacts the wall surface of the check cavity 1110, it can provide a better sealing effect and reduce air leakage. When the arc surface of the check piece 20 is impacted by airflow, it can move more smoothly, reducing the probability of the check piece 20 being stuck due to tilting or rotation. The check cavity 1110 extends along the direction of gravity, and in the direction of gravity, the cross-sectional area of ​​the check cavity 1110 gradually decreases in the direction toward the check inlet 110a. The wall surface of the check cavity 1110 provides a downward guiding force for the check piece 20, so that the check piece 20 will naturally roll toward the check inlet 110a under the action of gravity. Optionally, the check piece 20 is made of high temperature resistant rubber material.

[0050] Optionally, the anti-return member 20 can also be a windshield body, one end of which is installed on the inner wall of the anti-return cavity 1110 through an elastic member. The anti-return member 20 has a first state and a second state. In the first state, the elastic force of the elastic member of the anti-return member 20 abuts against the anti-return inlet 110a to close the anti-return inlet 110a to prevent the airflow in the silencer structure 1 from flowing back to the vacuum pump after the vacuum pump is shut down. In the second state, the anti-return member 20 is separated from the anti-return inlet 110a under the action of the airflow, so that the airflow can enter the anti-return channel 110 from the anti-return inlet 110a, so that the airflow flowing out from the pump body outlet when the vacuum pump is running can pass through multiple resonance cavities 100 in sequence.

[0051] The non-return channel 110 also includes an air guide section 1120, which is connected to one end of the non-return chamber 1110 away from the non-return inlet 110a, and extends from the non-return chamber 1110 to the connecting guide channel 120. The air guide section 1120 not only connects the non-return chamber 1110 and the guide channel 120, but also plays a transition and guiding role. From the non-return chamber 1110 to the direction of the guide channel 120, the cross-sectional area of ​​the air guide section 1120 gradually increases, and the speed of the airflow in the air guide section 1120 gradually decreases, which helps to reduce the turbulence and noise of the airflow. Optionally, the air guide section 1120 can be straight to facilitate slotting. The air guide section 1120 can also be curved to increase wind resistance and further reduce the airflow speed.

[0052] See also Figure 5-Figure 6 , Figure 5 This is another exploded structural schematic diagram of a sound-absorbing structure 1 according to an embodiment of the present application. Figure 6 This is a schematic diagram of the structure of a noise reduction box 30 of an embodiment of the present application. The noise reduction structure 1 also includes a noise reduction box 30. The noise reduction box 30 is installed on the resonance box 10, and the noise reduction box 30 and the resonance box 10 enclose a noise reduction chamber 300, and the noise reduction chamber 300 is connected to the non-return main outlet. The noise reduction box 30 has a noise reduction outlet connected to the noise reduction chamber 300, and the airflow flowing out of the non-return main outlet enters the noise reduction chamber 300 and flows out of the noise reduction chamber 300 from the noise reduction outlet. The noise reduction chamber 300 in the present application is based on the principle of reactive silencing and is suitable for reducing low-frequency and medium-low-frequency noise.

[0053] There are two noise reduction chambers 300, one of which is the first noise reduction chamber 310 and the other is the second noise reduction chamber 320. The first noise reduction chamber 310 and the second noise reduction chamber 320 are connected to each other. The first noise reduction chamber 310 is connected to the total anti-return outlet, and is used to initially absorb and reflect the low-frequency and medium-low frequency noise entering from the total anti-return outlet. The second noise reduction chamber 320 is connected to the noise reduction outlet, and further noise reduction processing is performed through the second noise reduction chamber 320. The airflow entering from the total anti-return outlet passes through the first noise reduction chamber 310 and the second noise reduction chamber 320 in sequence, and is discharged from the noise reduction outlet. When the airflow flows through the two chambers, it will experience more sound wave reflection and interference processes, which helps to enhance the noise reduction effect.

[0054] The noise reduction box 30 includes a second partition wall 31 and a noise reduction pipe 32. The first noise reduction chamber 310 and the second noise reduction chamber 320 are arranged on opposite sides of the second partition wall 31. The second partition wall 31 has a partition opening. The noise reduction pipe 32 passes through the partition opening and is installed on the second partition wall 31. One end of the noise reduction pipe 32 extends to the first noise reduction chamber 310 and the other end extends to the second noise reduction chamber 320 to connect the first noise reduction chamber 310 and the second noise reduction chamber 320. The noise reduction pipe 32 can affect the propagation characteristics of sound waves in the pipe. By changing the length of the noise reduction pipe 32, the passing frequency can be effectively eliminated and the noise reduction effect of a specific frequency band can be improved.

[0055] Furthermore, the first noise reduction chamber 310 and the second noise reduction chamber 320 are arranged side by side. Along the direction in which the first noise reduction chamber 310 and the second noise reduction chamber 320 are arranged side by side, the length of the first noise reduction chamber 310 is greater than the length of the second noise reduction chamber 320. Correspondingly, the length of the noise reduction tube 32 in the first noise reduction chamber 310 is greater than its length in the second noise reduction chamber 320. The longer first noise reduction chamber 310 can provide more space for sound waves to reflect and interfere, thereby more effectively absorbing low-frequency and medium-low frequency noise.

[0056] In the embodiment of the present application, the direction in which the first noise reduction chamber 310 and the second noise reduction chamber 320 are arranged side by side is parallel to the direction in which the multiple resonance chambers 100 are arranged side by side. The first noise reduction chamber 310 and the second noise reduction chamber 320 are arranged on the same side of the multiple resonance chambers 100 along the first direction X. This layout helps to save space and makes the structure of the entire silencing structure 1 more compact. At the same time, the noise reduction chamber 300 is arranged on the same side of the multiple resonance chambers 100 along the first direction X, which is also convenient for processing and installation. Figure 5 Taking the above-mentioned sound-absorbing structure 1 as an example, the noise reduction box 30, the first plate body 111, the second plate body 112 and the third plate body 113 are sealed and installed in sequence to obtain the sound-absorbing structure 1, thereby reducing the manufacturing cost and complexity.

[0057] During actual use, the vacuum pump has a pump body outlet, and the first resonance chamber of the silencer structure 1 is connected to the pump body outlet of the vacuum pump. It should be noted that the silencer structure 1 in the embodiment of the present application can be applied to the test process of the vacuum pump, and can also be applied to the working scene of the vacuum pump. Taking the maintenance test as an example, the first resonance chamber of the silencer structure 1 is connected to the pump body outlet of the vacuum pump, and the noise reduction outlet of the silencer structure 1 is connected to the exhaust duct, thereby reducing the operating noise of the vacuum pump during detection.

[0058] In the working scenario, the first resonance chamber of the silencer structure 1 is connected to the pump body outlet of the vacuum pump, and the noise reduction outlet of the silencer structure 1 is connected to the tail exhaust pipe. The airflow output from the pump body outlet of the vacuum pump flows to the silencer structure 1 and is discharged from the noise reduction outlet to the tail exhaust pipe, thereby reducing the working noise of the vacuum pump.

[0059] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of this application, it should be understood that if the terms "upper", "lower", "left", "right", etc. indicate an orientation or position relationship based on the orientation or position relationship shown in the drawings, it is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0060] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A silencing structure (1) for a vacuum pump, characterized in that: It includes a resonance box (10); The resonance box (10) has a plurality of resonance cavities (100) arranged side by side, a plurality of non-return channels (110) connected to the plurality of resonance cavities (100) in a one-to-one correspondence, and a plurality of flow guide channels (120); Each of the non-return channels (110) is connected to the adjacent resonance cavity (100) through the guide channel (120), and the opening of the same resonance cavity (100) connected to the guide channel (120) and the opening connected to the non-return channel (110) are arranged at intervals, one of the plurality of resonance cavities (100) is a first resonance cavity, and another is a second resonance cavity, the first resonance cavity is used to communicate with a vacuum pump, the non-return channel (110) connected to the second resonance cavity has a non-return main outlet, the first resonance cavity receives the airflow delivered by the vacuum pump, and the airflow sequentially enters the adjacent resonance cavity (100) through the non-return channel (110) and the guide channel (120), and after sequentially passing through all the resonance cavities (100), flows out from the non-return main outlet.

2. The silencing structure (1) for a vacuum pump according to claim 1, characterized in that: The opening of the first cavity for communicating with the vacuum pump and the opening communicating with the non-return channel (110) are arranged opposite to each other in a first direction; The opening of the same resonance cavity (100) connected to the flow guiding channel (120) and the opening connected to the non-return channel (110) are arranged at intervals in the first direction; Wherein, the first direction is perpendicular to the direction in which the plurality of resonant cavities (100) are arranged side by side.

3. The silencing structure (1) for a vacuum pump according to claim 1, characterized in that: The resonance box (10) comprises a non-return wall, the non-return wall comprises a first plate body (111) and a second plate body (112), the first plate body (111) and the second plate body (112) are stacked and enclosed to form the non-return channel (110); The muffler structure (1) further comprises a non-return member (20), wherein the non-return member (20) is arranged in the non-return channel (110), and the non-return member (20) is used to control the disconnection and connection of the non-return channel (110), and is used to control the one-way flow of airflow from the upstream resonance cavity (100) to the downstream resonance cavity (100).

4. The silencing structure (1) for a vacuum pump according to claim 3, characterized in that: The plurality of resonance cavities (100) are arranged side by side in a horizontal direction, the non-return channel (110) comprises a non-return cavity (1110), the non-return cavity (1110) has a non-return inlet (110a) connected to the resonance cavity (100), and the non-return member (20) is arranged in the non-return cavity (1110); The anti-return member (20) has a first state and a second state. In the first state, the anti-return member (20) abuts against the anti-return inlet (110a) under the action of gravity to close the anti-return inlet (110a); in the second state, the anti-return member (20) is separated from the anti-return inlet (110a) under the action of airflow, so that the airflow can enter the anti-return channel (110) from the anti-return inlet (110a).

5. The silencing structure (1) for a vacuum pump according to claim 4, characterized in that: The non-return cavity (1110) extends along the gravity direction, and in the gravity direction, the cross-sectional area of ​​the non-return cavity (1110) gradually decreases in the direction toward the non-return inlet (110a); The non-return channel (110) further comprises an air guiding section (1120), the air guiding section (1120) being connected to an end of the non-return chamber (1110) away from the non-return inlet (110a), and extending from the non-return chamber (1110) to connect to the guide channel (120); From the direction of the anti-return cavity (1110) toward the flow guiding channel (120), the cross-sectional area of ​​the air guiding section (1120) gradually increases; The air guide section (1120) is in a curved or straight line shape.

6. The silencing structure (1) for a vacuum pump according to claim 1, characterized in that: The resonance box (10) comprises a first shell (11) and a plurality of first partition walls (12) arranged inside the first shell (11); the plurality of first partition walls (12) are arranged side by side and divide the internal space of the first shell (11) into a plurality of resonance cavities (100); The first partition wall (12) has the guide channel (120), the guide channel (120) has a guide inlet (120a) connected to the non-return channel (110) and a guide outlet (120b) connected to the resonance cavity (100), the guide inlet (120a) and the guide outlet (120b) are arranged at intervals along a first direction, and the first direction is perpendicular to the direction in which the plurality of resonance cavities (100) are arranged side by side.

7. The silencing structure (1) for a vacuum pump according to claim 6, characterized in that: Each of the first partition walls (12) comprises two sub-partition walls (121) arranged side by side in the direction in which the plurality of resonance cavities (100) are arranged side by side, the guide channel (120) and the guide inlet (120a) are formed between the two sub-partition walls (121), and one of the sub-partition walls (121) has the guide outlet (120b).

8. The silencing structure (1) for a vacuum pump according to claim 1, characterized in that: The noise reduction structure (1) further comprises a noise reduction box (30), wherein the noise reduction box (30) is installed on the resonance box (10), and the noise reduction box (30) and the resonance box (10) are enclosed to form a noise reduction chamber (300), and the noise reduction chamber (300) is connected to the non-return main outlet; The noise reduction box (30) has a noise reduction outlet communicated with the noise reduction chamber (300); the airflow flowing out through the non-return main outlet enters the noise reduction chamber (300) and flows out of the noise reduction chamber (300) from the noise reduction outlet.

9. The silencing structure (1) for a vacuum pump according to claim 8, characterized in that: The number of the noise reduction chambers (300) is two, one of which is a first noise reduction chamber (310) and the other is a second noise reduction chamber (320); the first noise reduction chamber (310) is connected to the non-return main outlet, and the second noise reduction chamber (320) is connected to the noise reduction outlet; The first noise reduction chamber (310) and the second noise reduction chamber (320) are interconnected, and the airflow entering from the non-return main outlet passes through the first noise reduction chamber (310) and the second noise reduction chamber (320) in sequence before being discharged from the noise reduction outlet.

10. The sound-absorbing structure (1) for a vacuum pump according to claim 9, characterized in that: The direction in which the first noise reduction cavity (310) and the second noise reduction cavity (320) are arranged side by side is parallel to the direction in which the plurality of resonance cavities (100) are arranged side by side; The first noise reduction cavity (310) and the second noise reduction cavity (320) are arranged on the same side of the plurality of resonance cavities (100) along a first direction, and the first direction is perpendicular to the direction in which the plurality of resonance cavities (100) are arranged side by side.

Images