Hydraulic pneumatic control device of gas valve

Abstract

The invention relates to the technical field of valve control, in particular to a hydraulic pneumatic control device of a gas valve, which comprises a device body, and a hydraulic piston, a hydraulic chamber and a control component which are arranged on the device body, and the hydraulic piston drives the control component to move through hydraulic oil in the hydraulic chamber. A first embedding groove is formed in the outer wall of the lower end of the hydraulic piston, a first magnet is fixedly embedded in the first embedding groove, a second embedding groove is formed in the inner wall of the control component, a second magnet is movably embedded in the second embedding groove, an elastic piece is connected to the inner side of the second magnet, and the magnetic pole of the outer side of the second magnet is opposite to that of the outer side of the first magnet. According to the hydraulic pneumatic control device of the gas valve, gradual valve opening can be achieved, and the problem that hydraulic oil expands when heated can be solved.

Description

Technical Field

[0001] The invention relates to the technical field of valve control, in particular to a hydraulic and pneumatic control device of a gas valve. Background Art

[0002] In the field of semiconductor manufacturing, accurate charging, discharging and control of ultra-high purity gases are crucial, which not only affects production efficiency, but is also directly related to product quality and yield. In order to ensure the purity and stable flow of the gas, professional gas valves need to be set up to regulate the entry and release of the gas. The control device of the gas valve plays a vital role in this process, especially in high-pressure and low-temperature working environments, which require it to have good sealing and reliability. The use of a hydraulic and pneumatic control device with a lock can effectively enhance the safety of the gas valve and prevent misoperation, while providing precise control functions to ensure higher safety standards and operational stability during the charging and discharging process. Through this type of control device, the automation level of the production line can be improved, human intervention can be reduced, and a more efficient and safer semiconductor production process can be achieved.

[0003] For example, the device for hydraulic and pneumatic control of a valve with a pneumatic locking device disclosed in the patent with publication number CN102333981B can realize the opening and closing of the gas valve, and lock the gas valve after closing it to prevent misoperation. Combining the scheme and the accompanying drawings of the prior art, it can be seen that its principle is roughly as follows: the control member 6 in the device is connected to the valve flap of the gas valve, and the control member 6 is kept pressed down under the action of the spring 9, so that the valve flap of the gas valve is in a normally closed state. At the same time, the ring 12 presses the paired beads into the upward direction of the control member 6, thereby locking the control member 6 to prevent misoperation; when the gas valve needs to be opened, the threaded ring 12 is first rotated so that it no longer presses the paired beads against the control member 6, and then the pneumatic piston 4 moves downward under the action of the pneumatic assembly, and the pneumatic piston 4 then drives the hydraulic piston 5 to move downward and compress the hydraulic oil in the hydraulic chamber 11, and finally the hydraulic oil lifts the control member 6 to make the control member 6 open the valve flap of the gas valve.

[0004] Although the above-mentioned prior art can already meet the requirements of ultra-high purity gas charging and discharging devices in the semiconductor field, it is found in actual use that the following shortcomings still exist: First, it is impossible to realize progressive valve opening. If the valve is opened slowly, it is easy to cause the valve opening time to be too long. If the valve is opened quickly, it is easy to cause the impact load on the pipeline and equipment to be too large at the moment of valve opening, which reduces safety and also reduces the service life of the pipeline and equipment. Second, in the process of repeated opening and closing of the valve, the repeated friction between the hydraulic piston and the control component is easy to generate heat, causing the hydraulic oil to expand due to heat. At this time, the hydraulic oil needs to occupy a larger hydraulic chamber space, which will cause the control component to be unable to effectively close the valve, resulting in air leakage, and then the beads cannot effectively lock the control component. Summary of the invention

[0005] In order to solve the problems existing in the prior art, the present application provides a hydraulic and pneumatic control device for a gas valve.

[0006] The hydraulic and pneumatic control device of a gas valve provided by the present invention adopts the following technical solution:

[0007] A hydraulic and pneumatic control device for a gas valve comprises a device body, a hydraulic piston, a hydraulic chamber and a control member arranged on the device body, wherein the hydraulic piston drives the control member to move through the hydraulic oil in the hydraulic chamber, a first embedding groove is provided on the outer wall of the lower end of the hydraulic piston, a first magnet is fixedly embedded in the first embedding groove, a second embedding groove is provided on the inner wall of the control member, a second magnet is movably embedded in the second embedding groove, an elastic member is connected to the inner side of the second magnet, the outer magnetic pole of the second magnet is opposite to the outer magnetic pole of the first magnet, and the first magnet coincides with the second magnet at the end point of the downward movement of the hydraulic piston.

[0008] Preferably, a second spring is connected between the inner side of the second magnet and the inner side of the second embedding groove.

[0009] Preferably, a limiting column is provided on the inner side of the second embedding groove.

[0010] Preferably, a sealing ring is embedded in the circumference of the second magnet.

[0011] Preferably, magnetic shielding plates are provided in both the first embedding groove and the second embedding groove.

[0012] Preferably, the first embedding grooves and the second embedding grooves are provided in multiple groups in the circumferential direction, and the first magnets and the second magnets are also provided in multiple groups.

[0013] Preferably, the outer end of the limiting column is fixedly connected with a heat shrink block.

[0014] Preferably, a sleeve is fixedly connected to the inner side of the second magnet, and the inner end of the sleeve is sleeved on the outer end of the limiting column.

[0015] Preferably, the magnetic shielding plate is made of low-carbon steel plate.

[0016] Preferably, the heat shrink block is made of thermoplastic elastomer.

[0017] The beneficial effects of the present invention are:

[0018] 1. Progressive valve opening can avoid the long valve opening time caused by slow valve opening and the excessive impact load on pipelines and equipment caused by fast valve opening, thereby improving safety and extending the service life of pipelines and equipment;

[0019] 2. If the friction between the hydraulic piston and the control member causes the hydraulic oil to expand due to heat during repeated valve opening and closing, the second magnet can adaptively move inward to adapt to the situation where the hydraulic oil needs to occupy a larger hydraulic chamber space, thereby avoiding the situation where the control member cannot effectively close the valve and cause air leakage, and then avoiding the situation where the bead cannot effectively lock the control member;

[0020] 3. When the environment in the hydraulic chamber is high, the heat shrink block will shrink due to the heat, thereby shortening the distance of the limit column, extending the upper limit of the inward movement of the second magnet, compensating for the space occupied by the heated hydraulic oil, and thus ensuring the progressive valve opening effect of the device;

[0021] 4. The space of the sleeve limits the deformation space of the heat shrink block, preventing it from expanding in width after restoring its shape, thereby preventing the limit column from being unable to return to its original length. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a cross-sectional view of a hydraulic and pneumatic control device for a gas valve in an embodiment of the present application;

[0023] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle.

[0024] Explanation of the accompanying drawings: 1. Pneumatic piston; 2. Hydraulic piston; 3. Hydraulic chamber; 4. Control member; 5. First spring; 61. Ring; 62. Bead; 7. First magnet; 8. Second magnet; 81. Second spring; 82. Limiting column; 83. Sealing ring; 84. Magnetic shielding plate; 85. Heat shrink block; 86. Sleeve. DETAILED DESCRIPTION

[0025] The following will be combined with the attached Figure 1 -Attached Figure 2 The present invention is further illustrated by the following embodiments.

[0026] This embodiment discloses a hydraulic and pneumatic control device for a gas valve.

[0027] Reference Figure 1The hydraulic and pneumatic control device of the gas valve includes a device body and a pneumatic piston 1, a hydraulic piston 2, a hydraulic chamber 3, a control member 4, a first spring 5, a ring 61 and a bead 62 arranged on the device body, wherein the pneumatic piston 1 is connected to the hydraulic piston 2, the pneumatic piston 1 is used to drive the hydraulic piston 2 to move, the hydraulic piston 2 extends into the hydraulic chamber 3, the hydraulic piston 2 is used to compress or release the hydraulic oil, the upper end of the control member 4 is connected to the first spring 5 and the lower end is in contact with the hydraulic oil, the control member 4 is pressed down by the first spring 5, and the hydraulic piston 2 compresses the hydraulic oil to drive the control member 4 upward to overcome the elastic force of the first spring 5. The lower end of the device body is used to be connected to the valve body, so that the control member 4 is connected to the valve disc of the valve body and controlled. The beads 62 are arranged in pairs on one side of the control member 4, the ring 61 is threadedly connected to the periphery of the device body, and the ring 61 controls the beads 62 to lock or unlock the control member 4 by rotating. The above structure and principle of the device are prior art, so it will not be repeated in detail.

[0028] Reference Figure 1 and Figure 2 A first embedding groove is provided on the outer wall of the lower end of the hydraulic piston 2, in which a first magnet 7 is fixedly embedded. A second embedding groove is provided on the inner wall of the control member 4, in which a second magnet 8 is movably embedded. An elastic member is connected to the inner side of the second magnet 8. The outer magnetic pole of the second magnet 8 is opposite to the outer magnetic pole of the first magnet 7. At the end point of the downward movement of the hydraulic piston 2, the first magnet 7 and the second magnet 8 overlap. Through the above arrangement, there are three stages in the process of the hydraulic piston 2 moving downward, including: stage one, the hydraulic piston 2 compresses the hydraulic oil, at which time the hydraulic oil compresses the second magnet 8 to move inward until the upper limit of movement is reached; stage two, the hydraulic piston 2 further compresses the hydraulic oil, at which time the hydraulic oil compresses the control member 4 to move upward, thereby opening the valve; stage three, the hydraulic piston 2 further compresses the hydraulic oil, the first magnet 7 begins to be attracted outward by the second magnet 8, and the attraction is accelerated as the overlapping surface increases, that is, at this time, in addition to the downward pressure of the hydraulic piston 2 to open the valve, there is also the outward thrust of the second magnet 8 to open the valve, and the thrust gradually increases, realizing progressive valve opening, which can avoid the valve opening time being too long due to slow valve opening, and can also avoid the impact load on the pipeline and equipment being too large due to fast valve opening, thereby improving safety and extending the service life of the pipeline and equipment. In addition, if during the process of repeated opening and closing of the valve, the friction between the hydraulic piston 2 and the control member 4 causes the hydraulic oil to expand due to heat, the second magnet 8 can adaptively move inward to adapt to the situation where the hydraulic oil needs to occupy a larger space in the hydraulic chamber 3, thereby avoiding the situation where the control member 4 cannot effectively close the valve and cause air leakage, and then avoiding the situation where the bead 62 cannot effectively lock the control member 4.

[0029] Reference Figure 1 and Figure 2Specifically, a second spring 81 is connected between the inner side of the second magnet 8 and the inner side of the second embedded groove, and the second magnet 8 is elastically connected through the second spring 81. A limit column 82 is arranged on the inner side of the second embedded groove, and the limit column 82 is arranged to limit the upper limit of the inward movement of the second magnet 8. At the same time, the limit column 82 also protects the second spring 81 to prevent the second spring 81 from being over-compressed. Further, a sealing ring 83 is circumferentially embedded in the second magnet 8, and the sealing ring 83 is arranged to prevent hydraulic oil from penetrating between the second embedded groove and the second magnet 8. In addition, in order to prevent the first magnet 7 and the second magnet 8 from having adverse effects on the surrounding structure, a magnetic shielding plate 84 is arranged in the first embedded groove and the second embedded groove. In this embodiment, the first embedded groove and the second embedded groove are provided with multiple groups in the circumferential direction, and correspondingly, the first magnet 7 and the second magnet 8 are provided with multiple groups, and the magnetic shielding plate 84 is made of low-carbon steel plate.

[0030] Since the hydraulic oil will occupy a larger space in the hydraulic chamber 3 after thermal expansion, thereby reducing the movable range of the second magnet 8 and weakening the progressive valve opening effect of the device, the present invention also makes the following improvements.

[0031] Reference Figure 1 and Figure 2 The outer end of the limit column 82 is fixedly connected with a heat shrink block 85. The heat shrink block 85 shrinks when heated and restores its shape after cooling down. When the environment in the hydraulic chamber 3 is high, the heat shrink block 85 shrinks when heated, thereby shortening the distance of the limit column 82, extending the upper limit of the inward movement of the second magnet 8, and compensating for the space occupied by the heated hydraulic oil, thereby ensuring the progressive valve opening effect of the device. Further, the inner side of the second magnet 8 is fixedly connected with a sleeve 86, and the inner end of the sleeve 86 is sleeved on the outer end of the limit column 82. On the one hand, the cooperation between the sleeve 86 and the limit column 82 guides the movement of the second magnet 8. On the other hand, the space of the sleeve 86 limits the deformation space of the heat shrink block 85, preventing it from extending in width after restoring its shape, thereby preventing the limit column 82 from being unable to restore to its original length. In this embodiment, the heat shrink block 85 is made of thermoplastic elastomer.

[0032] The above are all preferred embodiments of the present invention, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A hydraulic and pneumatic control device for a gas valve, characterized in that: The invention comprises a device body, a hydraulic piston (2), a hydraulic chamber (3) and a control member (4) arranged on the device body. The hydraulic piston (2) drives the control member (4) to move through the hydraulic oil in the hydraulic chamber (3). The lower outer wall of the hydraulic piston (2) is provided with a first embedding groove, in which a first magnet (7) is fixedly embedded. The inner wall of the control member (4) is provided with a second embedding groove, in which a second magnet (8) is movably embedded. An elastic member is connected to the inner side of the second magnet (8). The outer magnetic pole of the second magnet (8) is opposite to the outer magnetic pole of the first magnet (7). At the end point of the downward movement of the hydraulic piston (2), the first magnet (7) and the second magnet (8) overlap.

2. A hydraulic and pneumatic control device for a gas valve according to claim 1, characterized in that: A second spring (81) is connected between the inner side of the second magnet (8) and the inner side of the second embedding groove.

3. A hydraulic and pneumatic control device for a gas valve according to claim 2, characterized in that: A limiting column (82) is arranged inside the second embedding groove.

4. A hydraulic and pneumatic control device for a gas valve according to claim 3, characterized in that: A sealing ring (83) is embedded in the circumference of the second magnet (8).

5. A hydraulic and pneumatic control device for a gas valve according to claim 4, characterized in that: A magnetic shielding plate (84) is disposed in each of the first embedding groove and the second embedding groove.

6. A hydraulic and pneumatic control device for a gas valve according to claim 5, characterized in that: The first embedding grooves and the second embedding grooves are provided in multiple groups in the circumferential direction, and the first magnets (7) and the second magnets (8) are also provided in multiple groups.

7. A hydraulic and pneumatic control device for a gas valve according to claim 6, characterized in that: The outer end of the limiting column (82) is fixedly connected with a heat shrink block (85).

8. A hydraulic and pneumatic control device for a gas valve according to claim 7, characterized in that: A sleeve (86) is fixedly connected to the inner side of the second magnet (8), and the inner end of the sleeve (86) is sleeved on the outer end of the limiting column (82).

9. The hydraulic and pneumatic control device for a gas valve according to claim 5, characterized in that: The magnetic shielding plate (84) is made of low carbon steel plate.

10. The hydraulic and pneumatic control device for a gas valve according to claim 7, characterized in that: The heat shrink block (85) is made of thermoplastic elastomer.

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