Cavity of vacuum drying equipment

Abstract

The invention discloses a cavity of vacuum drying equipment. The cavity comprises a box body, a laminar flow plate, a guide plate and a drawing plate. The box body is provided with a vacuum cavity, and a cavity door is arranged at an opening of the side wall of the box body. A first guide rail is arranged on the side wall of the box body, and a first fixing part is arranged at the end, close to the opening, of the first guide rail and used for fixing the laminar flow plate to the first guide rail. A first limiting part is arranged at the end, away from the opening, of the guide plate and used for limiting the position of the guide plate. A second guide rail is arranged on the guide plate, and the drawing plate can move back and forth along the second guide rail. Wherein a lining strip is arranged between the drawing plate and the guide plate, and the lining strip is used for separating the drawing plate from the guide plate, so that the friction force borne by the drawing plate during movement is reduced. The laminar flow plate, the guide plate and the drawing plate can be moved out of the vacuum chamber from the opening, so that the operation steps are simplified, the equipment debugging time is shortened, and meanwhile, the friction force borne by the drawing plate during movement can be reduced.

Description

Technical Field

[0001] The invention relates to the technical field of drying equipment, and in particular to a cavity of vacuum drying equipment. Background Art

[0002] VCD (Vacuum Concentration Drying) is a vacuum drying equipment. It is a device that removes moisture from materials under low pressure. It is widely used in food, medicine, chemical and material industries. In particular, it is one of the core equipment for perovskite slit coating. The coated substrate is placed in the cavity, and the air pressure in the cavity is reduced by vacuuming, so that the liquid film on the surface of the substrate evaporates quickly, and the perovskite liquid film quickly enters a supersaturated state, and then rapidly nucleates to achieve uniform crystal growth. However, during the volatilization of the liquid film, foreign matter such as perovskite residues will be formed in the cavity. The foreign matter will contaminate the substrate and affect the quality of the substrate, so the cavity needs to be cleaned regularly.

[0003] In the prior art, a laminar plate, a guide plate and a pull-out plate are designed in the cavity. The laminar plate and the guide plate are fixed in the cavity by screws. When taking out for cleaning, the vacuum cavity and part of the vacuum pipe need to be removed. After cleaning, the cavity and the vacuum pipe need to be tested for vacuum tightness, which consumes a lot of human resources and time. In addition, the pull-out plate is used to carry the substrate. The pull-out plate is set on the guide plate. The pull-out plate is in direct contact with the guide plate. When the pull-out plate is pulled out, the friction between the pull-out plate and the guide plate is large, causing the pull-out plate to get stuck, and even the pull-out plate is deformed by friction, which causes the pull-out plate and the guide plate to get stuck and unable to move.

[0004] Therefore, the cavity of the existing vacuum drying equipment needs to be improved. Summary of the invention

[0005] The object of the present invention is to provide a cavity of a vacuum drying device, wherein a laminar flow plate, a guide plate and a pull-out plate can all be moved out of a vacuum chamber from an opening, thereby simplifying the operation steps, reducing the equipment debugging time, and thus improving the use efficiency of the equipment. At the same time, the friction force to which the pull-out plate is subjected when moving can also be reduced, which not only ensures the smooth movement of the pull-out plate, but also prolongs the service life of the pull-out plate and the guide plate.

[0006] The purpose of the present invention is achieved by the following technical solutions:

[0007] A cavity of a vacuum drying device, comprising:

[0008] A box body, the box body having side walls, a top wall and a bottom wall, the side walls, the top wall, the bottom wall and the cavity door are arranged to form a vacuum chamber, the side wall of the box body is provided with an opening, the opening is provided with a cavity door, and the cavity door is used to close the opening;

[0009] A laminar flow plate, wherein the laminar flow plate is arranged in the vacuum chamber, a first guide rail is arranged on the side wall, a first fixing portion is arranged at one end of the first guide rail close to the opening, the first fixing portion is used to fix the laminar flow plate to the first guide rail, and when the first fixing portion is removed, the laminar flow plate can be moved out of the vacuum chamber along the first guide rail;

[0010] A guide plate, the guide plate is arranged in the vacuum chamber, and a first limit portion is arranged at one end of the guide plate away from the opening, the first limit portion is used to limit the position of the guide plate, and the guide plate can be moved out of the vacuum chamber;

[0011] A pull-out plate, the pull-out plate is used to carry the substrate, the pull-out plate is arranged on the guide plate, a second guide rail is arranged on the guide plate, and the pull-out plate can move back and forth along the second guide rail and drive the substrate to enter or leave the vacuum chamber;

[0012] Wherein, a lining strip is arranged between the pull-out plate and the guide plate, and the lining strip is used to separate the pull-out plate from the guide plate so as to reduce the friction force to which the pull-out plate is subjected when moving.

[0013] Preferably, the lining strip is arranged on a side of the guide plate close to the second guide rail, and the lining strip is a Teflon lining strip.

[0014] Preferably, a bending plate is provided at one end of the first guide rail away from the opening, and one end of the laminar plate away from the opening is arranged in close contact with the bending plate. The bending plate and the first fixing portion are used together to fix the laminar plate to the first guide rail.

[0015] Preferably, a waist hole is provided on the first guide rail, and the waist hole is used to adjust the distance between the laminar plate and the top wall.

[0016] Preferably, a second limiting portion is provided at one end of the guide plate away from the opening, and the second limiting portion is used to limit the distance that the pull-out plate moves in a direction away from the opening.

[0017] Preferably, a third limiting portion is provided on the pull-out plate, and the third limiting portion is used to limit the position of the substrate; and / or,

[0018] The pull-out plate is provided with a supporting portion, and the supporting portion is used to support the substrate; and / or,

[0019] A handle is provided at one end of the pull-out plate close to the opening.

[0020] Preferably, a second fixing portion is provided at one end of the guide plate close to the opening, and the second fixing portion is used to fix the guide plate to the cavity. When the second fixing portion is removed, the guide plate can be moved out of the vacuum chamber.

[0021] Preferably, a vacuum breaking device is further included, wherein the vacuum breaking device includes a filter arranged in the vacuum chamber and an inflation tube connected to the filter, and the filter is provided with a plurality of small holes.

[0022] Preferably, the total cross-sectional area of ​​the small holes is larger than the cross-sectional area of ​​the inflation port connecting the inflation tube and the filter.

[0023] Preferably, the number of the filters is one or more. When the number of the filters is plural, the multiple filters are evenly distributed below the substrate.

[0024] Compared with the prior art, the beneficial effects of the present invention include at least:

[0025] The cavity of the vacuum drying equipment of the present invention is realized by detachably arranging the laminar plate, the guide plate and the pull-out plate in the vacuum chamber. The laminar plate, the guide plate and the pull-out plate can all be moved out of the vacuum chamber from the opening without disassembling the box body and the vacuum pipe, and the vacuum sealing test of the box body and the vacuum pipe is avoided, the operation steps are simplified, the equipment debugging time is reduced, and the use efficiency of the equipment is improved. At the same time, by arranging a lining strip between the pull-out plate and the guide plate, the friction force suffered by the pull-out plate when moving can also be reduced, which not only ensures the smooth movement of the pull-out plate, but also prolongs the service life of the pull-out plate and the guide plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural explosion diagram of a cavity of a vacuum drying device according to an embodiment of the present invention.

[0027] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle.

[0028] Figure 3 It is a schematic diagram of the three-dimensional structure of a cavity of a vacuum drying device according to an embodiment of the present invention.

[0029] Figure 4 It is a schematic diagram of the planar structure of a cavity of a vacuum drying device according to an embodiment of the present invention.

[0030] Figure 5 yes Figure 4 Schematic diagram of the cross section along the AA direction.

[0031] Figure 6 yes Figure 5 A partial enlarged view of point B in the middle.

[0032] Figure 7 It is a schematic diagram of the three-dimensional structure when the vacuum breaking device in the embodiment of the present invention is arranged in the vacuum chamber.

[0033] Figure 8 It is a structural explosion diagram of the vacuum breaking device in the embodiment of the present invention.

[0034] In the figure: 100, cavity of vacuum drying equipment; 1, box body; 11, side wall; 111, front wall; 112, rear wall; 113, left wall; 114, right wall; 115, opening; 116, fixing hole; 12, top wall; 13, bottom wall; 14, vacuum chamber; 15, exhaust hole; 2, laminar flow plate; 21, first guide rail; 211, bending plate; 212, waist hole; 22, first fixing part; 3, guide Plate; 31, first limiting part; 32, second guide rail; 321, first side; 322, second side; 33, lining strip; 34, second limiting part; 4, pull-out plate; 41, third limiting part; 42, supporting part; 43, handle; 5, vacuum breaking device; 51, filter; 511, small hole; 52, inflation tube; 53, ferrule joint; 54, adapter optical axis; 55, second sealing member; 200, substrate. DETAILED DESCRIPTION

[0035] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0036] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0037] Reference Figures 1 to 8 The present invention provides a cavity 100 of a vacuum drying device, comprising: a box 1, a laminar flow plate 2, a guide plate 3 and a pull-out plate 4, wherein the laminar flow plate 2, the guide plate 3 and the pull-out plate 4 are arranged in a vacuum chamber 14 of the box 1, and the pull-out plate 4 is arranged on the guide plate 3, and the pull-out plate 4 is used to carry a substrate 200 and drive the substrate 200 to enter or leave the vacuum chamber 14. The cavity 100 of the vacuum drying device may further include a vacuum breaking device 5, and the vacuum breaking device 5 is used to break the vacuum of the vacuum chamber 14.

[0038] Specifically, refer to Figure 1 , Figure 3 , the box body 1 as a whole can be roughly rectangular, and of course can also be in other shapes. In this embodiment, the box body 1 as a whole is rectangular, and the box body 1 can have side walls 11, top walls 12 and bottom walls 13. The side walls 11 of the box body 1 can be provided with an opening 115, and the substrate 200 can enter or leave the vacuum chamber 14 through the opening 115. A chamber door (not shown) is provided at the opening 115, and the chamber door is used to close the opening 115 so that the vacuum chamber 14 forms a closed space, that is, the side walls 11, the top wall 12, the bottom wall 13 and the chamber door can be surrounded to form the vacuum chamber 14. The side wall 11 may include a front wall 111 and a rear wall 112 arranged oppositely, and a left wall 113 and a right wall 114 arranged oppositely. The front wall 111 is provided with an opening 115, that is, the chamber door is provided on the front wall 111. A first seal (not shown) may be provided between the cavity door and the box body 1. The first seal may be, for example, a sealing ring. The first seal may improve the sealing performance between the cavity door and the box body 1. When the vacuum pump evacuates the box body 1, the first seal may prevent air leakage between the cavity door and the box body 1.

[0039] A suction hole 15 may be provided on the top wall 12 and / or the bottom wall 13, and a vacuum pipe (not shown) is connected to the suction hole 15 and communicates with the vacuum chamber 14. The vacuum chamber 14 is used to place the substrate 200, and the surface of the substrate 200 is coated with a liquid film formed by a solvent, such as a coating liquid, and the coating liquid is, for example, a perovskite solution. The air pressure of the vacuum chamber 14 is reduced by vacuuming, so that the solvent in the liquid film is rapidly volatilized, and as the gas is pumped out by a vacuum pump (not shown), the liquid film rapidly enters a supersaturated state, and then rapidly nucleates to achieve uniform crystal growth.

[0040] Reference Figure 1 , Figure 5, the laminar plate 2 can be arranged in the vacuum chamber 14, and the laminar plate 2 is preferably arranged above the substrate 200, the laminar plate 2 is more preferably arranged close to the top wall 12, and a first guide rail 21 can be arranged on the side wall 11. In the present embodiment, the number of the first guide rails 21 can be two, and the two first guide rails 21 are respectively arranged on the left wall 113 and the right wall 114. A first fixing portion 22 can be provided at one end of the first guide rail 21 close to the opening 115, that is, a first fixing portion 22 can be provided at one end of the first guide rail 21 close to the front wall 111. The first fixing portion 22 is used to fix the laminar plate 2 to the first guide rail 21 to avoid the position of the laminar plate 2 from shifting. When the first fixing portion 22 is removed, the laminar plate 2 can be moved out of the vacuum chamber 14 along the first guide rail 21. That is, the laminar plate 2 is not fixedly connected to the side wall 11 of the box body 1 by means of screw locking or the like, but the laminar plate 2 is fixed on the first guide rail 21. When the laminar plate 2 needs to be removed from the vacuum chamber 14, it is only necessary to remove the first fixing portion 22. Since the first fixing portion 22 is arranged at the opening 115, it is not necessary to disassemble the box body 1 and the vacuum pipe to remove the laminar plate 2. The first fixing portion 22 can be a latch, a buckle, a fixing plate, etc. to fix the laminar plate 2.

[0041] The laminar flow plate 2 may be provided with a plurality of evenly distributed vent holes (not shown), and the plurality of evenly distributed vent holes make the gas flow more even. That is, the gas first passes through the vent holes on the laminar flow plate 2, then enters the pipeline assembly, and finally is sucked out by the vacuum pump. The number of the laminar flow plates 2 may be one or more, and in the present embodiment, the number of the laminar flow plates 2 is two.

[0042] Reference Figure 1 , Figure 5 The guide plate 3 is arranged in the vacuum chamber 14, and the guide plate 3 is arranged below the substrate 200. The guide plate 3 is preferably arranged close to the bottom wall 13. The end of the guide plate 3 away from the opening 115 may be provided with a first limiter 31, and the first limiter 31 is used to limit the position of the guide plate 3, and the guide plate 3 can be moved out of the vacuum chamber 14. In other words, the guide plate 3 and the box body 1 are not fixedly connected by means of screw locking or the like, and can be moved relative to each other. When the guide plate 3 needs to be cleaned, it only needs to be pulled out of the opening 115, and the guide plate 3 can be removed without disassembling the box body 1 and the vacuum pipe.

[0043] In this embodiment, refer to Figure 5The first limiting portion 31 may be L-shaped as a whole, and the number of the first limiting portions 31 may be two, and the two first limiting portions 31 are respectively arranged at the intersection of the left wall 113 and the rear wall 112 and the intersection of the right wall 114 and the rear wall 112. The two first limiting portions 31 may limit the guide plate 3 in the left and right directions and in the direction from the front wall 111 to the rear wall 112, so that not only the guide plate 3 can be prevented from shaking in the left and right directions in the vacuum chamber 14, but also the guide plate 3 can be prevented from shaking in the front and rear directions together with the chamber door. The first limiting portion 31 may also adopt other shapes as long as it can limit the guide plate 3.

[0044] In some embodiments, the first limiting portion 31 may not be provided, and the position of the guide plate 3 may be limited by the side wall 11 , the rear wall 112 and the cavity door.

[0045] Reference Figure 1 , Figure 5 The pull-out plate 4 is used to carry the substrate 200. The pull-out plate 4 can be arranged on the guide plate 3. The guide plate 3 can be provided with a second guide rail 32. In the present embodiment, the number of the second guide rails 32 is two. The two second guide rails 32 are preferably arranged on both sides of the guide plate 3, that is, the two second guide rails 32 are arranged close to the left wall 113 and the right wall 114, respectively. The pull-out plate 4 can move back and forth along the second guide rails 32 and drive the substrate 200 to enter, exit or leave the vacuum chamber 14, that is, the pull-out plate 4 can move back and forth in the front-to-back direction along the second guide rails 32 and drive the substrate 200 to enter, exit or leave the vacuum chamber 14.

[0046] Among them, a lining strip 33 may be provided between the pull-out plate 4 and the guide plate 3, and the lining strip 33 is used to separate the pull-out plate 4 from the guide plate 3, that is, to avoid direct contact between the pull-out plate 4 and the guide plate 3. When the pull-out plate 4 moves, the lower surface of the pull-out plate 4 directly contacts the upper surface of the lining strip 33, so as to reduce the friction force on the pull-out plate 4 when it moves. The friction force between the lining strip 33 and the pull-out plate 4 is smaller than the friction force between the pull-out plate 4 and the guide plate 3.

[0047] Reference Figure 1The second guide rail 32 may include a first side 321 and a second side 322. The first side 321 and the second side 322 may be arranged in an L shape. The first side 321 may be fixedly connected to the guide plate 3, and the second side 322 may be arranged above the side of the guide plate 3 facing the substrate 200, that is, the second side 322 may be arranged in parallel or substantially in parallel with the side of the guide plate 3 facing the substrate 200. The number of the second guide rails 32 is preferably two, and the two second guide rails 32 are arranged in parallel with each other, and the two second guide rails 32 are respectively arranged on both sides of the guide plate 3. The distance between the first side 321 of the two second guide rails 32 is greater than or equal to the width of the card drawing plate, and the distance between the second side 322 of the two second guide rails 32 is less than the width of the pull-out plate 4, so as to ensure that the second guide rails 32 can limit the moving path of the pull-out plate 4.

[0048] In the present application, by detachably arranging the laminar plate 2, the guide plate 3 and the pull-out plate 4 in the vacuum chamber 14, the laminar plate 2, the guide plate 3 and the pull-out plate 4 can be moved out of the vacuum chamber 14 from the opening 115, without disassembling the box body 1 and the vacuum pipe, and avoiding the vacuum sealing test of the box body 1 and the vacuum pipe, simplifying the operation steps, reducing the equipment debugging time, and thus improving the equipment utilization efficiency. At the same time, by arranging a lining strip 33 between the pull-out plate 4 and the guide plate 3, the lower surface of the pull-out plate 4 is in direct contact with the upper surface of the lining strip 33, and the friction between the lining strip 33 and the pull-out plate 4 is less than the friction between the pull-out plate 4 and the guide plate 3, and the friction force on the pull-out plate 4 when moving can also be reduced, which not only ensures the smooth movement of the pull-out plate 4, but also extends the service life of the pull-out plate 4 and the guide plate 3.

[0049] In a specific embodiment, referring to Figure 1 , the lining strip 33 can be arranged on the side of the guide plate 3 close to the second guide rail 32, and more preferably, the lining strip 33 is arranged on the wire board below the second side edge 322. As a preferred embodiment, the height of the gap between the second side edge 322 and the upper surface of the lining strip 33 is greater than or equal to the thickness of the pull-out plate 4, so that the pull-out plate 4 can move smoothly in the gap. In some embodiments, the lining strip 33 can also be arranged on the side of the second side edge 322 facing the pull-out plate 4, that is, both sides of the pull-out plate 4 are in direct contact with the lining strip 33, so that the upper surface of the pull-out plate 4 can be prevented from directly contacting the second side edge 322, and the friction between the lining strip 33 and the pull-out plate 4 is less than the friction between the pull-out plate 4 and the second side edge 322, which can further reduce the friction force suffered by the pull-out plate 4 when moving.

[0050] As a preferred embodiment, the lining strip 33 can be a Teflon lining strip 33, that is, the lining strip 33 is made of Teflon material. Teflon has self-lubricating properties and a very low friction coefficient. When the pull-out plate 4 slides against the lining strip 33, the friction force on the pull-out plate 4 is very small, making the pull-out plate 4 slide more smoothly, preventing the pull-out plate 4 from getting stuck or even deforming when moving, thereby extending the service life of the pull-out plate 4. At the same time, Teflon has excellent corrosion resistance and anti-aging properties, which can prevent the lining strip 33 from being corroded and oxidized by the coating liquid, maintain stable performance during long-term use, reduce the frequency of replacement and maintenance, and reduce the cost of use. In addition, Teflon is easy to process and has high processing accuracy. It can fit tightly with the object to be lined and provide a good lining effect.

[0051] In a specific embodiment, referring to Figure 1 , Figure 2 , Figure 5 A bending plate 211 may be provided at one end of the first guide rail 21 away from the opening 115, that is, the bending plate 211 is arranged at one end of the first guide rail 21 close to the rear wall 112, and the end of the laminar plate 2 away from the opening 115 can be fitted with the bending plate 211, that is, the end of the laminar plate 2 close to the rear wall 112 can be fitted with the bending plate 211, and the bending plate 211 and the first fixing part 22 can be used together to fix the laminar plate 2 to the first guide rail 21, that is, the bending plate 211 and the first fixing part 22 are respectively arranged at two ends of the laminar plate 2, and the distance between the bending plate 211 and the first fixing part 22 is equal to or approximately equal to the length of the laminar plate 2 in the front-to-back direction, so that the bending plate 211 and the first fixing part 22 can clamp and fix the laminar plate 2 to prevent the laminar plate 2 from moving or shaking, thereby ensuring the stable operation of the vacuum drying equipment. The bending plate 211 and the first guide rail 21 can be integrally formed or separated. In the present embodiment, the bending plate 211 and the first guide rail 21 are integrally formed, which is convenient for manufacturing the bending portion and the first guide rail 21, and can also avoid the matching error between the bending portion and the first guide rail 21, thereby improving the accuracy of the bending portion and the first guide rail 21. In the process of moving the laminar plate 2 along the first guide rail 21 to the vacuum chamber 14, when the laminar plate 2 and the bending plate 211 are fitted together or the laminar plate 2 cannot be pushed, it means that the laminar plate 2 has reached the predetermined position, thereby ensuring the accuracy of the position of the laminar plate 2.

[0052] In some embodiments, the bending plate 211 may not be provided, and the end of the laminar plate 2 away from the opening 115 may be arranged in close contact with the rear wall 112. At this time, the function of the rear wall 112 is the same as or similar to that of the bending plate 211. The rear wall 112 and the first fixing part 22 can also clamp and fix the laminar plate 2 to prevent the laminar plate 2 from moving or shaking, thereby ensuring the stable operation of the vacuum drying equipment.

[0053] Reference Figure 6 A waist hole 212 may be provided on the first guide rail 21, and the length of the first waist hole 212 is preferably consistent with the height direction of the cavity. A fixing hole 116 may be provided on the side wall 11 of the cavity. The fixing hole 116 is, for example, a threaded hole. The first guide rail 21 can be fixed to the side wall 11 of the cavity by a screw. The distance between the first guide rail 21 and the top wall 12 can be adjusted by adjusting the position between the waist hole 212 and the fixing hole 116 to adjust the distance between the first guide rail 21 and the top wall 12, and then the distance between the laminar plate 2 and the top wall 12 can be adjusted, that is, the waist hole 212 is used to adjust the distance between the laminar plate 2 and the top wall 12. This not only reduces the requirements for the assembly process, but also ensures the accuracy of the position of the laminar plate 2. The distance between the first guide rail 21 and the top wall 12 can also be adjusted to install laminar plates 2 of different thicknesses or different numbers to meet different application scenarios.

[0054] As a preferred method, refer to Figure 1 , Figure 2 , the end of the guide plate 3 away from the opening 115 may be provided with a second limiting portion 34, that is, the end of the guide plate 3 close to the rear wall 112 may be provided with a second limiting portion 34, and the second limiting portion 34 is used to limit the distance that the pull-out plate 4 moves in the direction away from the opening 115, that is, the second limiting portion 34 is used to limit the distance that the pull-out plate 4 moves in the front-back direction. When the pull-out plate 4 abuts against the second limiting portion 34, it represents that the pull-out plate 4 enters the predetermined position of the vacuum chamber 14. The distance that the pull-out plate 4 enters the vacuum chamber 14 can be controlled by adjusting the position of the second limiting portion 34, which can not only prevent the pull-out plate 4 from entering the vacuum chamber 14 too deep and inconvenient to operate, but also cause the pull-out plate 4 to be away from the cavity door, so that the cavity door and the second limiting portion 34 cannot limit the pull-out plate 4, resulting in the pull-out plate 4 shaking when the vacuum equipment is running, thereby driving the substrate 200 to shake. In addition, by adjusting the position of the second limiting portion 34, pull-out plates 4 of different sizes can be satisfied. The second limiting portion 34 may be in a block or column shape, and the number of the second limiting portion 34 may be one or more. In this embodiment, the second limiting portion 34 is in a column shape, and the number of the second limiting portions 34 is multiple and evenly distributed.

[0055] In some embodiments, the second limiting portion 34 may not be provided, and the position of the pull-out plate 4 may be limited by the rear wall 112 and the cavity door.

[0056] The end of the guide plate 3 close to the opening 115 may also be provided with a second fixing portion (not shown), that is, the end of the guide plate 3 close to the front wall 111 may be provided with a second fixing portion, the second fixing portion is used to fix the guide plate 3 to the empty chamber, the second fixing portion cooperates with the rear wall 112 or the first limiting portion 31 to fix the guide plate 3, and the guide plate 3 can be prevented from shaking. When the second fixing portion is removed, the guide plate 3 can be moved out of the vacuum chamber 14. In other words, the guide plate 3 is not fixedly connected to the box body 1 by means of screw locking, etc., but the guide plate 3 is fixed between the rear wall 112 or the first limiting portion 31 and the second fixing portion. When the guide plate 3 needs to be moved out of the vacuum chamber 14, it is only necessary to remove the second fixing portion. Since the second fixing portion is arranged at the opening 115, the guide plate 3 can be removed without disassembling the box body 1 and the vacuum pipe. The second fixing portion can be a latch, a buckle, a fixing plate, etc. to fix the laminar flow plate 2.

[0057] As a preferred method, refer to Figure 1 , Figure 2 , Figure 5 The pull-out plate 4 may be provided with a third limiting portion 41, which may be L-shaped and limit the substrate 200 from two directions. The third limiting portion 41 is used to limit the position of the substrate 200. The number of the third limiting portions 41 is preferably four and they are respectively provided at the four corners of the pull-out plate 4. Such a third limiting portion 41 can prevent the substrate 200 from deflecting during the movement of the pull-out plate 4, thereby ensuring the stability of the position of the substrate 200.

[0058] Reference Figure 1 , Figure 2 , Figure 5 The pull-out plate 4 may also be provided with a support portion 42 for supporting the substrate 200. The support portion 42 allows a certain distance between the substrate 200 and the pull-out plate 4, which is not only convenient for taking and placing the substrate 200, but also prevents the substrate 200 from being damaged by friction between the substrate 200 and the pull-out plate 4. The number of the support portions 42 is preferably multiple, and the multiple support portions 42 are evenly distributed to provide a stable support for the substrate 200.

[0059] Reference Figure 1 , Figure 3 A handle 43 may also be provided at one end of the pull-out plate 4 near the opening 115. The handle 43 facilitates the operation of the pull-out plate 4 and also increases the contact area with the cavity door, thereby increasing the stability of the cavity door limiting the pull-out plate 4.

[0060] In a specific embodiment, referring to Figure 7 , Figure 8The cavity 100 of the vacuum drying equipment may further include a vacuum breaking device 5, which is used to break the vacuum of the vacuum chamber 14. The vacuum breaking device 5 may include a filter 51 disposed in the vacuum chamber 14 and a gas charging tube 52 connected to the filter 51. The filter 51 may be provided with a plurality of small holes 511. When the gas enters the filter 51 through the gas charging tube 52, the gas enters the vacuum chamber 14 through the small holes 511 on the filter 51. In this way, the gas blown out from the filter 51 can be more uniform, the speed at which the gas enters the vacuum chamber 14 is reduced, and the impact force of the gas on the substrate 200 is reduced, which can not only ensure the stability of the position of the substrate 200 and prevent the substrate 200 from being blown over, but also prevent the coating liquid on the substrate 200 from being affected by the gas and becoming uneven, thereby ensuring the coating quality on the substrate 200. At the same time, the filter 51 can also filter the gas entering the vacuum chamber 14 to prevent foreign matter from entering the vacuum chamber 14 , thereby avoiding foreign matter from contaminating the substrate 200 and the coating liquid on the substrate 200 , thereby improving the quality of the substrate 200 and the coating.

[0061] Compared with the air distribution plate provided in the vacuum chamber 14, the air distribution plate is in the shape of a plate, and a plurality of through holes for gas to pass through are provided on the air distribution plate. Although the air distribution plate can also reduce the speed at which the gas enters the vacuum chamber 14, the air distribution plate occupies a large space, while the filter 51 of the present application is small in size and occupies a small space, thereby improving the space utilization rate of the vacuum chamber 14. The filter 51 is easy to install and the position setting is flexible. At the same time, the filter 51 of the present application also plays the role of filtering foreign matter in the gas, so there is no need to set up an additional gas filtering device, which not only reduces the overall volume of the vacuum drying equipment, but also reduces the cost of the vacuum drying equipment.

[0062] The number of the filters 51 may be one or more. When the number of the filters 51 is multiple, the multiple filters 51 may be evenly distributed below the substrate 200. Figure 7 There are two filters 51, which are respectively disposed on both sides below the substrate 200, and the two filters 51 are symmetrically disposed. Gas can enter the vacuum chamber 14 through the two filters 51 at the same time, thereby ensuring that the air pressure at various locations in the vacuum chamber 14 remains balanced.

[0063] The gas tube 52 can be connected to the gas filling device (not shown) or the outside atmosphere. A control valve (not shown) can also be provided on the gas tube 52, and the control valve can control the opening and closing of the gas tube 52. The gas tube 52 is preferably bent as a whole. When the gas enters the gas tube 52, the flow direction of the gas can change once or multiple times. Compared with the straight gas tube 52, the flow direction of the gas changes from a straight entry mode to a bent entry mode, and the flow rate of the gas will be slowed down, which further reduces the influence of the gas on the position of the substrate 200 and the coating liquid. The bent gas tube 52 can be formed by combining multiple gas tubes 52, or the bent gas tube 52 can be formed by bending a single gas tube 52.

[0064] As a preferred embodiment, the total cross-sectional area of ​​the small holes 511 is larger than the cross-sectional area of ​​the inflation port connecting the inflation tube 52 and the filter 51, that is, the cross-sectional area of ​​the air inlet of the filter 51 is smaller than the cross-sectional area of ​​the air outlet of the filter 51. This can reduce the flow rate of the gas when it enters the vacuum chamber 14 from the filter 51, and further reduce the influence of the gas on the position of the substrate 200 and the coating liquid.

[0065] As an example, see Figure 8 A ferrule joint 53 and an adapter optical axis 54 may be provided between the gas filling tube 52 and the filter 51. The gas filling tube 52, the ferrule joint 53, the adapter optical axis 54 and the filter 51 are connected in sequence, that is, one end of the gas filling tube 52 is connected to one end of the ferrule joint 53, the other end of the ferrule joint 53 is connected to one end of the adapter optical axis 54, and the other end of the adapter optical axis 54 is connected to the filter 51. A second sealing member 55 may be provided between the adapter optical axis 54 and the filter 51. The second sealing member 55 is, for example, a sealing ring, and the second sealing member 55 may prevent gas from leaking from between the adapter optical axis 54 and the filter 51.

[0066] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A cavity of a vacuum drying device, characterized in that: include: A box body, the box body having side walls, a top wall and a bottom wall, the side walls, the top wall, the bottom wall and the cavity door are arranged to form a vacuum chamber, the side wall of the box body is provided with an opening, the opening is provided with a cavity door, and the cavity door is used to close the opening; A laminar flow plate, wherein the laminar flow plate is arranged in the vacuum chamber, a first guide rail is arranged on the side wall, a first fixing portion is arranged at one end of the first guide rail close to the opening, the first fixing portion is used to fix the laminar flow plate to the first guide rail, and when the first fixing portion is removed, the laminar flow plate can be moved out of the vacuum chamber along the first guide rail; A guide plate, the guide plate is arranged in the vacuum chamber, and a first limit portion is arranged at one end of the guide plate away from the opening, the first limit portion is used to limit the position of the guide plate, and the guide plate can be moved out of the vacuum chamber; A pull-out plate, the pull-out plate is used to carry the substrate, the pull-out plate is arranged on the guide plate, a second guide rail is arranged on the guide plate, and the pull-out plate can move back and forth along the second guide rail and drive the substrate to enter or leave the vacuum chamber; Wherein, a lining strip is arranged between the pull-out plate and the guide plate, and the lining strip is used to separate the pull-out plate from the guide plate so as to reduce the friction force to which the pull-out plate is subjected when moving.

2. The cavity of the vacuum drying equipment according to claim 1, characterized in that: The lining strip is arranged on a side of the guide plate close to the second guide rail, and the lining strip is a Teflon lining strip.

3. The cavity of the vacuum drying equipment according to claim 1, characterized in that: A bending plate is provided at one end of the first guide rail away from the opening, and one end of the laminar plate away from the opening is arranged in close contact with the bending plate. The bending plate and the first fixing portion are used together to fix the laminar plate to the first guide rail.

4. The cavity of the vacuum drying equipment according to claim 1, characterized in that: The first guide rail is provided with a waist hole, and the waist hole is used to adjust the distance between the laminar plate and the top wall.

5. The cavity of the vacuum drying equipment according to claim 1, characterized in that: A second limiting portion is disposed at one end of the guide plate away from the opening, and the second limiting portion is used to limit the distance that the pull-out plate moves in a direction away from the opening.

6. The cavity of the vacuum drying equipment according to claim 1, characterized in that: The pull-out plate is provided with a third limiting portion, and the third limiting portion is used to limit the position of the substrate; and / or, The pull-out plate is provided with a supporting portion, and the supporting portion is used to support the substrate; and / or, A handle is provided at one end of the pull-out plate close to the opening.

7. The cavity of the vacuum drying equipment according to claim 1, characterized in that: A second fixing portion is provided at one end of the guide plate close to the opening, and the second fixing portion is used to fix the guide plate to the cavity. When the second fixing portion is removed, the guide plate can be removed from the vacuum chamber.

8. The cavity of the vacuum drying equipment according to claim 1, characterized in that: It also includes a vacuum breaking device, which includes a filter arranged in the vacuum chamber and an inflation tube connected to the filter, and the filter is provided with a plurality of small holes.

9. The cavity of the vacuum drying equipment according to claim 8, characterized in that: The total cross-sectional area of ​​the small holes is greater than the cross-sectional area of ​​the inflation port connecting the inflation tube and the filter.

10. The cavity of the vacuum drying equipment according to claim 8, characterized in that: The number of the filters is one or more. When the number of the filters is plural, the multiple filters are evenly distributed below the substrate.

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