Distributed pressure sensor calibration system and use method thereof

Abstract

The invention discloses a distributed pressure sensor calibration system and a use method thereof, and the system comprises an air compressor, a switch valve I, a pressure gauge I, an air storage tank, a safety valve I, a switch valve II, a filter, a dryer, a pressure regulating valve I, a distributed pressure sensor calibration device, a switch valve III, and a pressure regulating valve II. The device comprises a sealed cabin, an exhaust joint, an air supply joint, a safety valve II, a pressure gauge II, a sealing gasket, a sealing ring I, a pressure sensor signal joint fixing plate, a distributed pressure sensor signal joint fixing plate, a sealing ring II, a sealing door, a pressure measuring platform, a limiting plate, a pressure sensor, a leveling bolt, a sealing ring III and a distributed pressure sensor signal joint. According to the distributed pressure sensor calibration system, the problem that calibration errors are caused due to the fact that the same load cannot be applied to all sensing points at the same time in the existing calibration technology is solved.

Description

Technical field:

[0001] The invention relates to a distributed pressure sensor calibration system and a use method thereof, belonging to the technical field of sensor calibration. Background technology:

[0002] Distributed pressure sensors can simultaneously measure and determine the static and dynamic gas pressure distribution in a region, and have fast response speed, high sensitivity, and good flexibility. They are widely used in aerospace, semiconductor manufacturing, medical diagnosis and other fields. Distributed pressure sensors need to be calibrated before they can output accurate pressure measurement results. Calibration refers to establishing a mapping relationship between the output voltage of a distributed pressure sensor and the pressure applied at the sensing point. Traditional calibration devices calibrate distributed pressure sensors by measuring the output voltage of the sensor under different mass weights. Affected by the rough surface of the distributed pressure sensor, the sensing points of the distributed pressure sensor are unevenly stressed, resulting in calibration errors, which affect the measurement accuracy of the distributed pressure sensor. Therefore, a new distributed pressure sensor calibration system is needed to improve the calibration accuracy. Summary of the invention:

[0003] The purpose of the present invention is to solve the shortcomings of the existing distributed pressure sensor calibration technology. The present invention proposes to use the uniformly distributed gas pressure in the sealed cabin to simultaneously apply the same load to each sensing point of the distributed pressure sensor, and measure the voltage signal output by the distributed pressure sensor, thereby establishing a mapping relationship between the pressure of each sensing point and the output voltage, thereby improving the calibration accuracy of the distributed pressure sensor and solving the problem that the existing calibration technology cannot simultaneously apply the same load to all sensing points, causing calibration errors.

[0004] In order to achieve the purpose of the present invention, the following technical solutions are proposed:

[0005] The present invention at least includes: an air compressor, a switch valve I, a pressure gauge I, an air storage tank, a safety valve I, a switch valve II, a filter, a dryer, a pressure regulating valve I, a distributed pressure sensor calibration device, a switch valve III and a pressure regulating valve II, the distributed pressure sensor calibration device includes, a sealed cabin, an exhaust joint, an air supply joint, a safety valve II, a pressure gauge II, a sealing gasket, a sealing ring I, a pressure sensor signal joint fixing plate, a distributed pressure sensor signal joint fixing plate, a sealing ring II, a sealing door, a pressure measuring platform, a limit plate, a pressure sensor, a leveling bolt, a sealing ring III, a distributed pressure sensor signal joint, a pressure sensor signal joint and a sealing ring IV, characterized in that the air compressor is connected to the air storage tank through the switch valve I, the pressure gauge I and the safety valve I are installed on the air storage tank, the air storage tank is connected to the air supply joint through the switch valve II, the filter, the dryer, the pressure regulating valve I, the exhaust joint It is connected with the pressure regulating valve II through the switch valve III, the exhaust joint, the air supply joint, the safety valve II and the pressure gauge II are installed on the sealed cabin, the sealing gasket is fixed on the sealed cabin, the sealing door is arranged on the sealed cabin, the pressure sensor signal joint fixing plate is fixed on the sealed cabin, the sealing ring I is arranged between the sealed cabin and the pressure sensor signal joint fixing plate, the pressure sensor signal joint is fixed on the sealed cabin, the sealing ring IV is arranged between the sealed cabin and the pressure sensor signal joint, the distributed pressure sensor signal joint fixing plate is fixed on the sealed cabin, the sealing ring II is arranged between the sealed cabin and the distributed pressure sensor signal joint fixing plate, the distributed pressure sensor signal joint is fixed on the sealed cabin, the sealing ring III is arranged between the sealed cabin and the distributed pressure sensor signal joint, the pressure measuring platform is arranged in the sealed cabin through the adjusting bolt, the limit plate is fixed on the pressure measuring platform, and the pressure sensor is fixed on the limit plate.

[0006] The method of use of the present invention is as follows:

[0007] The first step is to adjust the leveling bolts to make the pressure measuring platform level;

[0008] The second step is to fix the distributed pressure sensor on the limit plate;

[0009] The third step is to close the sealing door, the switch valve I, the switch valve II and the switch valve III;

[0010] Step 4: Open the air compressor and switch valve I in sequence;

[0011] Step 5: Open the switch valve II;

[0012] Step 6: Use pressure regulating valve I, pressure regulating valve II and switch valve III to adjust the gas pressure in the distributed pressure sensor calibration device. The pressure sensor measures the gas pressure near the distributed pressure sensor. After the reading is stable, start to calibrate the distributed pressure sensor.

[0013] Step 7, repeat step 6 to calibrate the distributed pressure sensor at different pressures;

[0014] Step 8. Turn off the air compressor;

[0015] In the ninth step, exhaust the gas inside the distributed pressure sensor calibration device to the atmosphere, open the sealed door of the distributed pressure sensor calibration device, and take out the distributed pressure sensor.

[0016] Features of the present invention:

[0017] The present invention solves the problem that a uniform load cannot be applied to all sensing points of a distributed pressure sensor at the same time, causing a large sensor calibration error, and has a simple structure, strong versatility and convenient signal transmission. Description of the drawings:

[0018] Figure 1 The overall diagram of the present invention is illustrated.

[0019] Figure 2 The distributed pressure sensor calibration device of the present invention is illustrated.

[0020] Figure 3 The internal structure of the distributed pressure sensor calibration device of the present invention is illustrated.

[0021] Figure 4 The structure of the signal switching part of the distributed pressure sensor of the present invention is illustrated.

[0022] Figure 5 The structure of the signal transfer part of the pressure sensor of the present invention is illustrated.

[0023] Figure 6 The cross-sectional view of the pressure sensor and the signal transfer part of the distributed pressure sensor of the present invention is shown schematically.

[0024] 1. Air compressor; 2. Switch valve Ⅰ; 3. Pressure gauge Ⅰ; ​​4. Air storage tank; 5. Safety valve Ⅰ; 6. Switch valve Ⅱ; 7. Filter; 8. Dryer; 9. Pressure regulating valve Ⅰ; 10. Distributed pressure sensor calibration device; 11. Switch valve Ⅲ; 12. Pressure regulating valve Ⅱ; 10-1. Sealed cabin; 10-2. Exhaust connector; 10-3. Air supply connector; 10-4. Safety valve Ⅱ; 10-5. Pressure gauge Ⅱ; 10-6. Sealing gasket; 10-7. Sealing ring Ⅰ; 10-8. Pressure sensor signal connector fixing plate; 10-9, distributed pressure sensor signal connector fixing plate; 10-10, sealing ring II; 10-11, sealing door; 10-12, pressure measuring platform; 10-13, limit plate; 10-14, pressure sensor; 10-15, leveling bolt; 10-16, sealing ring III; 10-17, distributed pressure sensor signal connector; 10-18, pressure sensor signal connector; 10-19, sealing ring IV; A, ​​distributed pressure sensor. Specific implementation method:

[0025] The specific working process of the present invention is described below in conjunction with the accompanying drawings.

[0026] The air compressor 1 of the present invention is connected to the air storage tank 4 through the switch valve I2, the pressure gauge I3 and the safety valve I5 are installed on the air storage tank 4, the air storage tank 4 is connected to the air supply joint 10-3 through the switch valve II6, the filter 7, the dryer 8, and the pressure regulating valve I9, the exhaust joint 10-2 is connected to the pressure regulating valve II12 through the switch valve III11, the exhaust joint 10-2, the air supply joint 10-3, the safety valve II10-4, and the pressure gauge II10-5 are installed on the sealed cabin 10-1, the sealing gasket 10-6 is fixed on the sealed cabin 10-1, the sealing door 10-11 is arranged on the sealed cabin 10-1, the pressure sensor signal joint fixing plate 10-8 is fixed on the sealed cabin 10-1, the sealing ring I10-7 is arranged between the sealed cabin 10-1 and the pressure sensor signal joint fixing plate 10-8, the pressure sensor signal joint 10-18 is fixed on the sealed cabin 10-1, the sealing ring IV 10-19 is arranged between the sealed cabin 10-1 and the pressure sensor signal connector 10-18, the distributed pressure sensor signal connector fixing plate 10-9 is fixed on the sealed cabin 10-1, the sealing ring II 10-10 is arranged between the sealed cabin 10-1 and the distributed pressure sensor signal connector fixing plate 10-9, the distributed pressure sensor signal connector 10-17 is fixed on the sealed cabin 10-1, the sealing ring III 10-16 is arranged between the sealed cabin 10-1 and the distributed pressure sensor signal connector 10-17, the pressure measuring platform 10-12 is arranged in the sealed cabin 10-1 by adjusting the bolt 10-15, the limit plate 10-13 is fixed on the pressure measuring platform 10-12, and the pressure sensor 10-14 is fixed on the limit plate 10-13.

[0027] When the present invention needs to calibrate the distributed pressure sensor A to be tested:

[0028] The first step is to adjust the leveling bolts 10-15 to make the pressure measuring platform 10-12 level;

[0029] The second step is to fix the distributed pressure sensor A on the limit plate 10-13;

[0030] The third step is to close the sealing door 10-11, the switch valve I2, the switch valve II6 and the switch valve III11;

[0031] Step 4: Open the air compressor 1 and the switch valve Ⅰ2 in sequence;

[0032] Step 5, open the switch valve II6;

[0033] Step 6: Use the pressure regulating valve I9, the pressure regulating valve II12 and the switch valve III11 to adjust the gas pressure in the distributed pressure sensor calibration device 10. The pressure sensors 10-14 measure the gas pressure near the distributed pressure sensor A. After the reading is stable, the distributed pressure sensor A is calibrated.

[0034] Step 7, repeat step 6 to calibrate the distributed pressure sensor A at different pressures;

[0035] Step 8, turn off the air compressor 1;

[0036] The ninth step is to exhaust the gas inside the distributed pressure sensor calibration device 10 to the atmosphere, open the sealing door 10 - 11 of the distributed pressure sensor calibration device 10 , and take out the distributed pressure sensor A.

Claims

1. A distributed pressure sensor calibration system, comprising: Air A compressor (1), a switch valve I (2), a pressure gauge I (3), an air storage tank (4), a safety valve I (5), a switch valve II (6), a filter (7), a dryer (8), a pressure regulating valve I (9), a distributed pressure sensor calibration device (10), a switch valve III (11) and a pressure regulating valve II (12), wherein the distributed pressure sensor calibration device (10) comprises a sealed cabin (10-1), an exhaust joint (10-2), an air supply joint (10-3), a safety valve II (10-4), a pressure gauge II (10-5), a sealing gasket (10-6), a sealing ring I (10-7), a pressure sensor signal joint fixing plate (10-8), a distributed pressure sensor signal joint fixing plate (10-9), a sealing ring II (10-1 0), a sealing door (10-11), a pressure measuring platform (10-12), a limit plate (10-13), a pressure sensor (10-14), a leveling bolt (10-15), a sealing ring III (10-16), a distributed pressure sensor signal connector (10-17), a pressure sensor signal connector (10-18) and a sealing ring IV (10-19), characterized in that the air compressor (1) is connected to the air storage tank (4) through a switch valve I (2), a pressure gauge I (3) and a safety valve I (5) are installed on the air storage tank (4), the air storage tank (4) is connected to the air supply connector (10-3) through a switch valve II (6), a filter (7), a dryer (8), and a pressure regulating valve I (9), and the exhaust connector (10-2) is connected to the air supply connector (10-3) through a switch valve The pressure sensor signal connector (10-1) is connected to the pressure regulating valve (12); the exhaust connector (10-2), the air supply connector (10-3), the safety valve (10-4) and the pressure gauge (10-5) are installed on the sealed cabin (10-1); the sealing gasket (10-6) is fixed on the sealed cabin (10-1); the sealing door (10-11) is arranged on the sealed cabin (10-1); the pressure sensor signal connector fixing plate (10-8) is fixed on the sealed cabin (10-1); the sealing ring (10-7) is arranged between the sealed cabin (10-1) and the pressure sensor signal connector fixing plate (10-8); the pressure sensor signal connector (10-18) is fixed on the sealed cabin (10-1); and the sealing ring (10-19) is arranged on the sealed cabin (10 -1) and a pressure sensor signal connector (10-18), a distributed pressure sensor signal connector fixing plate (10-9) is fixed on the sealed cabin (10-1), a sealing ring II (10-10) is arranged between the sealed cabin (10-1) and the distributed pressure sensor signal connector fixing plate (10-9), a distributed pressure sensor signal connector (10-17) is fixed on the sealed cabin (10-1), a sealing ring III (10-16) is arranged between the sealed cabin (10-1) and the distributed pressure sensor signal connector (10-17), a pressure measuring platform (10-12) is arranged in the sealed cabin (10-1) through an adjusting bolt (10-15), and a limit plate (10-13) is fixed on the pressure measuring platform (10-12),The pressure sensor (10-14) is fixed on the limit plate (10-13).

2. The method for using a distributed pressure sensor calibration system according to claim 1, characterized in that: The first step is to adjust the leveling bolts (10-15) to make the pressure measuring platform (10-12) level; The second step is to fix the distributed pressure sensor (A) on the limit plate (10-13); The third step is to close the sealing door (10-11), the switch valve I (2), the switch valve II (6) and the switch valve III (11); Step 4: Open the air compressor (1) and switch valve I (2) in sequence; Step 5: Open the switch valve II (6); Step 6: Using the pressure regulating valve I (9), the pressure regulating valve II (12) and the switch valve III (11) to adjust the gas pressure in the distributed pressure sensor calibration device (10), the pressure sensor (10-14) measures the gas pressure near the distributed pressure sensor (A), and starts to calibrate the distributed pressure sensor (A) after the reading is stable; Step 7, repeating step 6 to calibrate the distributed pressure sensor (A) at different pressures; Step 8, turning off the air compressor (1); The ninth step is to exhaust the gas inside the distributed pressure sensor calibration device (10) to the atmosphere, open the sealed door (10-11) of the distributed pressure sensor calibration device (10), and take out the distributed pressure sensor (A).

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