Two-dimensional fast reflecting mirror based on split mirror holder

Abstract

The invention relates to the technical field of optical elements, in particular to a two-dimensional fast reflecting mirror based on a split mirror holder, which comprises a shell, a reflecting mirror, a first driving assembly, a second driving assembly, a first reflecting mirror holder, a second reflecting mirror holder, a pivoting assembly and a reflecting mirror base, the first driving assembly drives the first reflector support to drive the reflector to move in the first direction. The second driving assembly drives the second reflector support to drive the first reflector support and the reflector to move in the second direction. The first direction and the second direction are in different dimensions. The second direction is consistent with the height of the rotation center of the gravity center of the rotor of the fast reflecting mirror, so that the rotational inertia of the rotor is effectively reduced, the coupling between two shafts during the scanning motion of the fast reflecting mirror is reduced, the stability and scanning performance of the fast reflecting mirror are improved, and the anti-interference performance is greatly improved; and the requirement of a two-dimensional high-speed fast reflecting mirror for laser radar scanning can be met.

Description

Technical Field

[0001] The invention relates to the technical field of optical elements, and in particular to a two-dimensional fast-reflecting mirror based on a split mirror holder. Background Art

[0002] In the laser radar system, the laser scanning device is the core component of the radar laser beam expansion. The laser radar reflects the laser beam through the high-frequency swing of the scanning device to achieve the deflection of the collimated beam at any angle, and finally forms a laser line array or area array. Therefore, laser radar applications have high performance requirements for laser scanning devices, which are required to have large field of view, high scanning frequency, low energy attenuation, uniform distribution of scanning points, and good repeatability. The field of view angle (i.e. scanning angle) of the scanner can reflect the target tracking range of the laser radar; the scanning frequency determines the data rate of the laser radar. The higher the scanning rate, the better the real-time performance of the radar.

[0003] A fast reflector is a component that works between a light source or receiver and a target to adjust and stabilize the optical system's line of sight or beam pointing. It uses a voice coil motor to precisely control the reflector's deflection direction and thus the beam's deflection angle, and is used to achieve rapid adjustment of the reflector's "deflection-tilt" azimuth angle. It can be used for applications such as line of sight stabilization or scanning compensation in the optoelectronics field. Due to its compact structure, fast response speed, high working bandwidth, and high pointing accuracy, it is widely used in astronomical telescopes, adaptive optics, image motion compensation, free-space optical communications, precision tracking, and other fields, and has become a key device for stabilizing beams and correcting beam propagation directions in optical systems.

[0004] Most of the existing laser scanning devices used for LiDAR scanning are two-dimensional galvanometers, which cannot meet the high-precision requirements in the field of LiDAR scanning. Summary of the invention

[0005] (I) Purpose of the invention

[0006] The purpose of the present invention is to provide a two-dimensional fast-reflecting mirror based on a split mirror holder, which can improve the dynamic characteristics of a laser radar scanning device, reduce power consumption, and meet the high-performance requirements of laser radar scanning.

[0007] (II) Technical solution

[0008] In order to solve the above problems, the present invention provides a two-dimensional fast-reflecting mirror based on a split mirror holder, comprising:

[0009] A housing, a reflector, a first drive assembly, a second drive assembly, a first reflector support, a second reflector support, a pivot assembly and a reflector base;

[0010] The first reflector support is configured as a first frame structure, and the reflector is sleeved in the first frame structure of the first reflector support;

[0011] The second reflector support is configured as a second frame structure, and the first reflector support is sleeved in the second frame structure of the second reflector support;

[0012] The reflector base is configured as a third frame structure, and the second reflector support is sleeved in the third frame structure of the reflector base through the pivot assembly;

[0013] The first drive assembly and the second drive assembly are both disposed in the accommodating cavity of the housing;

[0014] The first driving component drives the first reflector support to drive the reflector to move along the first direction;

[0015] The second driving component drives the second reflector support to drive the first reflector support and the reflector to move along the second direction;

[0016] The first direction and the second direction are in different dimensions.

[0017] In another aspect of the present invention, preferably, the reflector base, the second reflector holder, the first reflector holder and the reflector are coaxially arranged;

[0018] The second driving assembly enables the second reflector support to pivot along a second direction within the third frame structure through the pivot assembly;

[0019] The first driving assembly drives the first reflector support to drive the reflector to pivot along a first direction within the second frame structure.

[0020] In another aspect of the present invention, preferably,

[0021] The pivot assembly includes a pair of pivot components, which are arranged along the horizontal axis of the third frame structure of the reflector base and symmetrically arranged on both sides of the vertical axis of the third frame structure of the reflector base.

[0022] In another aspect of the present invention, preferably,

[0023] The pivoting member comprises a first portion and a second portion;

[0024] The first part is fixedly connected to the second reflector support;

[0025] The second part is fixedly connected to the reflector base;

[0026] The first part is rollingly connected to the second part.

[0027] In another aspect of the present invention, preferably,

[0028] The first driving assembly is configured as a pair of coil components;

[0029] The pair of coil components are disposed in the accommodating cavity of the housing;

[0030] The pair of coil components are symmetrically arranged along the center of the reflecting mirror.

[0031] In another aspect of the present invention, preferably,

[0032] The second drive assembly is configured as a pair of electromagnetic drive components;

[0033] The pair of electromagnetic driving components are arranged in the accommodating cavity of the housing;

[0034] The pair of electromagnetic driving components are symmetrically arranged along the center of the reflecting mirror.

[0035] In another aspect of the present invention, preferably, the pair of coil components and the pair of electromagnetic drive components are arranged at intervals, and the angle between adjacent coil components and the electromagnetic drive components is 90°, and the pair of electromagnetic drive components are arranged along the vertical axis of the third frame structure of the reflector base.

[0036] In another aspect of the present invention, preferably, the two-dimensional fast reflection mirror further comprises a displacement sensor, and the displacement sensor is disposed in the accommodating cavity of the housing;

[0037] The displacement sensor comprises two groups;

[0038] One set of displacement sensors is used to measure the displacement of the first reflector support;

[0039] Another set of displacement sensors is used to measure the displacement of the second reflector support.

[0040] In another aspect of the present invention, preferably, the two-dimensional fast reflection mirror further comprises a circuit main board, and the circuit main board is arranged in the accommodating cavity at the other end of the housing;

[0041] The circuit main board is electrically connected to the first drive component and the second drive component, and the circuit main board is used to control the working parameters of the first drive component and the second drive component.

[0042] In another aspect of the present invention, preferably, the reflector comprises a substrate material and a thin film material;

[0043] The substrate material includes: beryllium, quartz, BK7, silicon carbide, fused quartz, silicon monoxide, sapphire or magnesium fluoride.

[0044] The film material includes: a metal film;

[0045] The film material is attached to the base material by distillation technology.

[0046] (III) Beneficial effects

[0047] The above technical solution of the present invention has the following beneficial technical effects:

[0048] The present invention drives the first reflector holder and the second reflector holder to move in two different dimensional directions respectively through the first drive component and the second drive component, which greatly reduces the coupling phenomenon in another dimensional direction during rapid scanning. The first drive component and the second drive component respectively act on the movement in the first direction and the second direction without interfering with each other, thereby improving the stability of two-dimensional scanning, effectively improving the anti-interference ability and accuracy of the two-dimensional fast reflection mirror, and being able to meet the requirements of laser radar scanning of the two-dimensional high-speed fast reflection mirror. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is a schematic diagram of the overall structure explosion of one embodiment of the present invention;

[0050] Figure 2 is a side view of the overall structure of an embodiment of the present invention;

[0051] Figure 3 is a schematic structural diagram of a second reflector support according to an embodiment of the present invention;

[0052] Figure 4 is an exploded schematic diagram of a second reflector support structure according to an embodiment of the present invention;

[0053] Reference numerals:

[0054] 1: Shell,

[0055] 2: Reflector, 3: First drive assembly, 3-1: Coil component,

[0056] 4: Second driving component, 4-1: Electromagnetic driving component, 5: Reflector base,

[0057] 6-1: first reflector support, 6-2: second reflector support,

[0058] 7: Pivot assembly, 7-1: Pivot component, 7-1-1: First part, 7-1-2: Second part, 8: Displacement sensor, 9: Circuit board. DETAILED DESCRIPTION

[0059] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0060] The accompanying drawings show schematic diagrams of layer structures according to embodiments of the present invention. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clarity. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may additionally design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0061] Obviously, the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0062] In the description of the present invention, it should be noted that the terms “first”, “second” and “third” are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0063] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0064] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0065] Embodiment 1

[0066] A two-dimensional fast-reflecting mirror based on a split mirror holder. Figure 1 An exploded schematic diagram of the overall structure of an embodiment of the present invention is shown; Figure 2 FIG. 2 shows a side view of the overall structure of an embodiment of the present invention; Figure 1 and Figure 2 As shown, including:

[0067] Housing 1, reflector 2, first drive assembly 3, second drive assembly 4, first reflector holder 6-1, second reflector holder 6-2-2, pivot assembly 7 and reflector base 5;

[0068] The first reflector holder 6-1 is configured as a first frame structure, and the reflector 2 is mounted in the first frame structure of the first reflector holder 6-1; the specific shape of the first frame structure of the first reflector holder 6-1 is not limited here, and can be rectangular, circular, triangular, etc. In the present embodiment, the reflector 2 is configured as a perfect circle, and the first frame structure is an annular frame structure. The outer peripheral wall of the reflector 2 is abutted against and fixedly connected to the inner peripheral wall of the first reflector holder 6-1. The annular frame structure can evenly support the edge of the reflector 2 to avoid deformation or damage caused by excessive local force. At the same time, this structure can also effectively reduce the scattering of light at the edge of the frame and improve the optical performance.

[0069] The second reflector support 6-2-2 is configured as a second frame structure, and the first reflector support 6-1 is sleeved in the second frame structure of the second reflector support 6-2-2; the specific shape of the second frame structure of the second reflector support 6-2-2 is not limited here, and can be rectangular, circular, triangular, etc. In this embodiment, the first reflector support 6-1 is configured as a perfect circle, and the second frame structure is an annular frame structure, and the outer peripheral wall of the first reflector support 6-1 abuts against the inner peripheral wall of the second reflector support 6-2-2 and is movably connected.

[0070] The reflector base 5 is configured as a third frame structure, and the second reflector support 6-2-2 is sleeved in the third frame structure of the reflector base 5 via a pivot assembly 7;

[0071] The specific shape of the reflector base 5 is not limited here. In this embodiment, the reflector base 5 is set to be square, and the reflector base 5 is connected to the end face of the shell 1. Further, the reflector base 5 and the shell 1 are coaxially arranged, and the second reflector support 6-2-2 is arranged in the third frame structure of the reflector base 5 through the pivot assembly 7; the reflector 2, the first reflector support 6-1, the second reflector support 6-2-2 and the reflector base 5 are sequentially sleeved and axially coaxially arranged; the pivot assembly 7 enables the second reflector support 6-2-2 to rotate in the third frame structure along the second direction. The square frame structure of the reflector base 5 is adopted, which greatly improves the anti-interference performance while ensuring the rotation angle range of the second reflector support 6-2-2; reduces the coupling between the two axes during the scanning movement of the fast mirror, which is conducive to improving the stability and scanning performance of the fast mirror; and occupies a small space, making the internal structure of the fast mirror more compact.

[0072] The first driving assembly 3 and the second driving assembly 4 are both disposed in the accommodating cavity of the housing 1;

[0073] The first driving assembly 3 drives the first reflector support 6-1 to drive the reflector 2 to move along the first direction;

[0074] The second driving assembly 4 drives the second reflector holder 6-2-2 to drive the first reflector holder 6-1 and the reflector 2 to move along the second direction;

[0075] The first direction and the second direction are in different dimensions.

[0076] The specific relationship between the first direction and the second direction is not limited here. In this embodiment, Figure 1 As shown, the first driving component 3 drives the first reflector holder 6-1 to drive the reflector 2 to pivot along the first direction within the second frame structure, and the first direction is the direction in which the first driving component 3 drives the first reflector holder 6-1 to drive the reflector 2 to rotate around the central vertical axis of the reflector 2.

[0077] The second driving component 4 causes the second reflector support 6-2-2 to pivot in the third frame structure along the second direction through the pivoting component 7; the second direction is the direction in which the second driving component 4 drives the second reflector support 6-2-2 to drive the first reflector support 6-1 and the reflector 2 to rotate around the central horizontal axis of the reflector 2.

[0078] Further, in this embodiment, Figure 3 A schematic diagram of the structure of a second reflector support according to an embodiment of the present invention is shown; Figure 4 FIG. 2 shows an exploded schematic diagram of a second reflector support structure according to an embodiment of the present invention; Figure 3 and Figure 4 As shown; the pivot assembly 7 includes a pair of pivot parts 7-1, a pair of pivot parts are arranged along the horizontal axis of the third frame structure of the reflector base 5, and are symmetrically arranged on both sides of the vertical axis of the third frame structure of the reflector base 5.

[0079] The pivoting component 7-1 includes a first part 7-1-1 and a second part 7-1-2; the first part 7-1-1 is fixedly connected to the second reflector holder 6-2, and a first through hole fixedly connected to the first part 7-1-1 is provided on the frame of the frame structure of the second reflector holder 6-2; the second part 7-1-2 is fixedly connected to the reflector base 5, and a second through hole fixedly connected to the second part 7-1-2 is provided on the frame of the frame structure of the reflector base 5; the first part 7-1-1 is rollingly connected to the second part 7-1-2. The rolling connection can be achieved by a ball bearing. In this embodiment, the pivoting component 7-1 is a radial bearing, and a pair of radial bearings are respectively provided as follows: Figure 1 The second reflector holder 6 - 2 is shown as being arranged on the left and right sides in a vertically axially symmetrical manner.

[0080] Further, in this embodiment, the first drive assembly 3 is configured as a pair of coil components 3-1; the pair of coil components 3-1 are arranged in the accommodating cavity of the housing 1; the pair of coil components 3-1 are symmetrically arranged along the center of the reflector 2. The second drive assembly 4 is configured as a pair of electromagnetic drive components 4-1; the pair of electromagnetic drive components 4-1 are arranged in the accommodating cavity of the housing 1; the pair of electromagnetic drive components 4-1 are symmetrically arranged along the center of the reflector 2. The pair of coil components 3-1 and the pair of electromagnetic drive components 4-1 are arranged at intervals, and the angle between the adjacent coil components 3-1 and the electromagnetic drive components 4-1 is 90°, and the pair of electromagnetic drive components 4-1 are arranged along the vertical axis of the third frame structure of the reflector base 5. The line formed by the pair of electromagnetic drive components 4-1 is perpendicular to the line formed by the pair of radial bearings. This layout not only optimizes the space utilization, but also ensures that there is no mutual interference between the various drive components, thereby improving the stability and reliability of the entire drive system. Further, in this embodiment, a pair of coil components 3-1 and a pair of electromagnetic drive components 4-1 placement grooves are provided in the accommodating cavity of the housing, which is convenient for positioning and installation.

[0081] Furthermore, in the present embodiment, the two-dimensional fast mirror also includes a displacement sensor 8, which is arranged in the housing cavity of the shell; the displacement sensor includes two groups; one group of displacement sensors is used to measure the displacement of the first reflector support; the other group of displacement sensors is used to measure the displacement of the second reflector support. In the present embodiment, each group includes two displacement sensors, and a placement groove for the displacement sensor 8 is arranged in the housing cavity of the shell to facilitate positioning and installation. In the present embodiment, the displacement sensor 8 adopts an eddy current sensor, which has strong environmental adaptability, can work in a wide temperature range, withstand strong impact vibration, and has the advantages of high measurement accuracy, fast response, and simple structure; four eddy current sensors arranged opposite to each other are placed near the central axis of the reflector, and the two groups of sensors can form a group of differential signals in the two motion axis directions, so that the fast mirror can measure a larger rotation angle, thereby effectively overcoming the influence of interference.

[0082] The two-dimensional fast reflex mirror also includes a circuit main board 9, which is arranged in a receiving cavity at the other end of the shell; the circuit main board 9 is electrically connected to the first drive component 3 and the second drive component 4, and the circuit main board 9 is used to control the working parameters of the first drive component 3 and the second drive component 4.

[0083] The reflector 2 includes a base material and a thin film material; the base material includes beryllium, quartz, BK7, silicon carbide, fused quartz, silicon monoxide, sapphire or magnesium fluoride, and the thin film material includes a metal thin film; the thin film material is attached to the base material by distillation technology. The metal thin film includes aluminum, gold, and silver to improve the reflectivity in the visible light and ultraviolet region.

[0084] In this embodiment, the second direction is consistent with the height of the center of rotation of the center of gravity of the fast reflex mirror mover, which effectively reduces the rotational inertia of the mover and reduces the coupling between the two axes during the scanning movement of the fast reflex mirror, which is beneficial to improving the stability and scanning performance of the fast reflex mirror and greatly improving the anti-interference performance of the supporting structure; and it occupies a small space, making the internal structure of the fast reflex mirror more compact and reducing the power consumption of the fast reflex mirror; taking into account the performance requirements of the one-dimensional galvanometer mirror and the two-dimensional galvanometer mirror, it can meet the requirements of the two-dimensional high-speed fast reflex mirror used for lidar scanning.

[0085] It should be understood that the above specific embodiments of the present invention are only used to illustrate or explain the principles of the present invention, and do not constitute a limitation of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. In addition, the appended claims of the present invention are intended to cover all changes and modifications that fall within the scope and boundaries of the appended claims, or the equivalent forms of such scope and boundaries.

[0086] In the above description, the technical details of patterning and etching of each layer are not described in detail. However, those skilled in the art should understand that various means in the prior art can be used to form layers, regions, etc. of desired shapes. In addition, in order to form the same structure, those skilled in the art can also design methods that are not completely the same as the methods described above.

[0087] The present invention has been described above with reference to the embodiments of the present invention. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

[0088] Although the embodiments of the present invention have been described in detail, it should be understood that the various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention.

[0089] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A two-dimensional fast-reflecting mirror based on a split mirror holder, characterized in that: include: A housing (1), a reflector (2), a first drive assembly (3), a second drive assembly (4), a first reflector support (6-1), a second reflector support (6-2), a pivot assembly (7) and a reflector base (5); The first reflector support (6-1) is configured as a first frame structure, and the reflector (2) is sleeved in the first frame structure of the first reflector support (6-1); The second reflector support (6-2) is configured as a second frame structure, and the first reflector support (6-1) is sleeved in the second frame structure of the second reflector support (6-2); The reflector base (5) is configured as a third frame structure, and the second reflector support (6-2) is sleeved in the third frame structure of the reflector base (5) via the pivot assembly (7); The first drive assembly (3) and the second drive assembly (4) are both arranged in the accommodating cavity of the housing (1); The first driving component (3) drives the first reflector support (6-1) to drive the reflector (2) to move along a first direction; The second driving component (4) drives the second reflector support (6-2) to drive the first reflector support (6-1) and the reflector (2) to move along a second direction; The first direction and the second direction are in different dimensions.

2. The two-dimensional fast reflection mirror according to claim 1, characterized in that: The reflector base (5), the second reflector holder (6-2), the first reflector holder (6-1) and the reflector (2) are coaxially arranged; The second driving assembly (4) enables the second reflector support (6-2) to pivot along a second direction within the third frame structure via the pivot assembly (7); The first driving assembly (3) drives the first reflector support (6-1) to drive the reflector (2) to pivot along a first direction within the second frame structure.

3. The two-dimensional fast reflection mirror according to claim 2, characterized in that: The pivot assembly (7) comprises a pair of pivot components (7-1), wherein the pair of pivot components are arranged along the horizontal axis of the third frame structure of the reflector base (5) and are symmetrically arranged on both sides of the vertical axis of the third frame structure of the reflector base (5).

4. The two-dimensional fast reflection mirror according to claim 3, characterized in that: The pivoting component (7-1) comprises a first part (7-1-1) and a second part (7-1-2); The first part (7-1-1) is fixedly connected to the second reflector support (6-2); The second part (7-1-2) is fixedly connected to the reflector base (5); The first part (7-1-1) is rollingly connected to the second part (7-1-2).

5. The two-dimensional fast reflection mirror according to claim 4, characterized in that: The first driving component (3) is configured as a pair of coil components (3-1); The pair of coil components (3-1) are arranged in the accommodating cavity of the housing (1); The pair of coil components (3-1) are symmetrically arranged along the center of the reflector (2).

6. The two-dimensional fast reflection mirror according to claim 4, characterized in that: The second driving component (4) is configured as a pair of electromagnetic driving components (4-1); The pair of electromagnetic drive components (4-1) are arranged in the accommodating cavity of the housing (1); The pair of electromagnetic driving components (4-1) are symmetrically arranged along the center of the reflecting mirror (2).

7. The two-dimensional fast reflection mirror according to claim 1, characterized in that: The pair of coil components (3-1) and the pair of electromagnetic drive components (4-1) are arranged at intervals, and the angle between adjacent coil components (3-1) and electromagnetic drive components (4-1) is 90°. The pair of electromagnetic drive components (4-1) are arranged along the vertical axis of the third frame structure of the reflector base (5).

8. The two-dimensional fast reflection mirror according to claim 1, characterized in that: The two-dimensional fast reflection mirror further comprises a displacement sensor (8), wherein the displacement sensor is arranged in the accommodating cavity of the shell; The displacement sensor comprises two groups; One set of displacement sensors is used to measure the displacement of the first reflector support; Another set of displacement sensors is used to measure the displacement of the second reflector support.

9. The two-dimensional fast reflection mirror according to claim 1, characterized in that: The two-dimensional fast reflection mirror further comprises a circuit main board (9), and the circuit main board (9) is arranged in the accommodating cavity at the other end of the housing; The circuit main board (9) is electrically connected to the first drive component (3) and the second drive component (4), and the circuit main board (9) is used to control the working parameters of the first drive component (3) and the second drive component (4).

10. The two-dimensional fast reflection mirror according to claim 1, characterized in that: The reflector (2) comprises a substrate material and a thin film material; The substrate material includes: beryllium, quartz, BK7, silicon carbide, fused quartz, silicon monoxide, sapphire or magnesium fluoride. The film material includes: a metal film; The film material is attached to the base material by distillation technology.

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