Retaining ring supporting film vacuum hot press forming clamp and using method thereof

Abstract

The invention provides a retaining ring supporting film vacuum hot press forming clamp and a using method thereof. The retaining ring supporting film vacuum hot press forming clamp comprises a clamp concave plate, a clamp convex plate and a flexible material arranged on the using face of the clamp concave plate. The retaining ring supporting film vacuum hot-press forming clamp is reasonable in design and convenient to use, the retaining ring supporting film is clamped by arranging the clamp concave plate and the clamp convex plate which are made of flexible materials on the using face in a combined mode, vacuum hot-press treatment is conducted, and the problem that the retaining ring supporting film deforms in the hot-press molding process is effectively solved.

Description

Technical Field

[0001] The invention relates to the technical field of hot pressing fixtures, and in particular to a vacuum hot pressing forming fixture for a retaining ring supporting a film and a use method thereof. Background Art

[0002] The polishing head refers to a device used to fix the wafer during the chemical mechanical grinding and polishing process, so that the wafer can achieve a specific accuracy and surface polishing level. The retaining ring is one of the main components of the grinding head and is used to fix the wafer. The support film has a specific shape and is installed between the assembly main part and the wafer fixing ring. The raw material is thermoplastic. The existing technology uses two metal concave and convex plates for hot pressing and shaping. Due to the trapped air between the mold and the product during the mold closing process and the slight error between the molds, this leaves room for the support film to deform in waves, so there is a high probability that it cannot be restored to a flat surface state during the cooling process, resulting in a high scrap rate.

[0003] CN101905448A discloses a polishing pad that can be used for chemical mechanical planarization and a manufacturing method thereof. The polishing pad includes a base layer, and a flexible nano brush layer is provided on the base layer. First, a template is prepared, and then a polymer solution is coated on the base layer, and then the nano structure on the template is transferred to the base layer to obtain a nano brush polishing pad. Compared with the prior art, the most prominent advantage of the polishing pad is that it has a flexible fiber structure, and can achieve material removal under flexible contact with the polished surface, which can solve the stress problem encountered in the existing chemical mechanical planarization technology to the greatest extent, and is suitable for CMP under ultra-low pressure. In addition, it can also solve the defects such as scratches, over-polishing, butterfly and erosion that occur in harder polishing pads, and obtain a higher quality polished surface.

[0004] CN104416452A discloses a chemical mechanical polishing pad, which includes: a polishing layer, a rigid layer; and a hot melt adhesive bonding the polishing layer to the rigid layer; wherein the polishing layer has a specific gravity greater than 0.6, a Shore D hardness of 60-90, and an elongation at break of 100-300%; and has a unique combination of initial hydrolytic stability and sustained hydrolytic instability. The polishing layer has a polishing surface, a bottom surface, and an average thickness TP-average, which is measured from the polishing surface to the bottom surface in a direction perpendicular to the polishing surface; wherein the polishing layer is cast polyurethane.

[0005] However, the above patent does not consider how to solve the problem of deformation of the chemical mechanical polishing pad during the hot pressing and shaping process.

[0006] CN102853676A discloses a hot pressing fixture and a hot pressing method using the fixture. The hot pressing fixture includes a base plate and a pressurizing column. Tension side plates are fixedly connected on both sides of the base plate. A cover plate is detachably connected to the top of the tension side plate. The base plate, the tension side plate and the cover plate form a frame structure. A pressing plate, a flexible graphite plate and a pad are arranged on the base plate from top to bottom. The pressurizing column passes through the cover plate and cooperates with the cover plate. The lower end of the pressurizing column is fixedly connected to the pressing plate. A locking device for locking the pressurizing column is provided on the cover plate. The hot pressing method includes: assembling the workpiece to be processed between the flexible graphite plate and the pad of the hot pressing fixture, and after compressing the flexible graphite plate, directly placing the hot pressing fixture equipped with the workpiece to be processed in a high-temperature furnace for hot pressing. However, the hot pressing fixture is not suitable for processing the retaining ring support film.

[0007] Therefore, it is of great significance to develop a vacuum hot pressing molding fixture suitable for retaining ring support film to solve the problem of hot pressing deformation of retaining ring support film. Summary of the invention

[0008] In view of the problems existing in the prior art, the present invention provides a vacuum hot pressing molding clamp for a retaining ring support film and a method of using the same. The retaining ring support film is clamped by arranging a clamp concave plate and a clamp convex plate combination made of flexible material on the use surface, and a vacuum hot pressing treatment is performed, thereby effectively solving the problem of deformation of the retaining ring support film during the hot pressing molding process.

[0009] To achieve this object, the present invention adopts the following technical solutions:

[0010] In a first aspect, the present invention provides a retaining ring support film vacuum hot press molding fixture, the retaining ring support film vacuum hot press molding fixture comprising a fixture concave plate, a fixture convex plate and a flexible material arranged on the use surface of the fixture concave plate.

[0011] The vacuum hot-pressing jig for retaining ring support film of the present invention arranges flexible material on the use surface of the jig concave plate. Due to its high elasticity, the redundant gap between the jig concave plate and the jig convex plate is filled, and pressure is provided to the entire surface of the retaining ring support film, so as to ensure that the retaining ring support film does not deform during the hot-pressing process. The present invention does not specify the depth of the pit of the jig concave plate and the height of the protrusion of the jig convex plate, and can be set according to the actual needs of the retaining ring support film product.

[0012] Preferably, corresponding threaded holes and corresponding pin holes are provided on the corners of the clamp concave plate and the clamp convex plate.

[0013] Preferably, the pin ejection pin hole of the pin hole is arranged on the fixture concave plate. In the present invention, the shape of the fixture concave plate and the fixture convex plate is preferably square, and the threaded holes are preferably arranged at the four corners of the square. The pin hole is arranged at two diagonal positions of the fixture concave plate and the fixture convex plate, in order to ensure accurate mold fitting of the two plates.

[0014] Preferably, the material of the fixture concave plate and the fixture convex plate independently includes any one of 304 stainless steel, 45 steel or Q235 carbon structural steel, which can provide sufficient pressure for vacuum hot pressing of the retaining ring support film and is cheap and easily available.

[0015] Preferably, the flatness of the fixture concave plate and the fixture convex plate are independently <0.01mm, for example, it can be 0.009mm, 0.008mm, 0.005mm, 0.003mm, 0.002mm or 0.0001mm, etc., but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0016] Preferably, the flexible material comprises silicone or rubber.

[0017] Preferably, the thickness of the flexible material is 0.1-0.3 mm, for example, 0.1 mm, 0.13 mm, 0.15 mm, 0.2 mm, 0.25 mm or 0.3 mm, etc., but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0018] When the thickness of the flexible material is small, it cannot fill the excess gap between the concave plate and the convex plate of the fixture well, and will still cause deformation of the retaining ring support film; when the thickness of the flexible material is large, it will produce a heat preservation effect, affecting the cooling speed of the retaining ring support film to be hot-pressed.

[0019] Preferably, the flexible material is compression molded onto the use surface of the fixture recess.

[0020] In a second aspect, the present invention further provides a method for using the retaining ring support film vacuum hot pressing molding fixture as described in the first aspect, the method comprising:

[0021] After the processing environment is evacuated, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 60 to 80° C. and kept warm. After natural cooling, the retaining ring support film product is obtained.

[0022] The present invention ensures that no air remains during the vacuum hot pressing process of the retaining ring support film by evacuating the processing environment, and no air bubbles are formed to cause deformation. In addition, the flexible material arranged on the use surface of the fixture concave plate fully fills the excess gap between the fixture concave plate and the fixture convex plate when the mold is closed, and provides stable pressure for the retaining ring support film, thereby realizing stable hot pressing shaping of the retaining ring support film product.

[0023] The present invention preferably uses a temperature of 60 to 80°C for the hot pressing treatment, which can achieve vacuum hot pressing of the retaining ring support film without causing damage to the flexible material disposed on the use surface of the fixture concave plate and adhering to the retaining ring support film, thereby affecting the quality of the retaining ring support film. When the temperature of the hot pressing treatment is low, the hot pressing forming effect of the retaining ring support film is poor and the yield rate is low; when the temperature of the hot pressing treatment is high, the flexible material will be damaged and adhere to the retaining ring support film product, thereby affecting the quality of the retaining ring support film product. In addition, high temperature will cause large dimensional deviations of the retaining ring support film, reduced transparency, and fogging and opacity.

[0024] Preferably, the temperature of the hot pressing treatment is 60-80°C, for example, it can be 60°C, 65°C, 68°C, 70°C, 75°C, 78°C or 80°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] Preferably, the vacuum degree of the processing environment is <1 kPa, for example, it can be 0.9 kPa, 0.85 kPa, 0.8 kPa, 0.7 kPa, 0.5 kPa or 0.2 kPa, etc., but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0026] Preferably, the pressure of the hot pressing treatment is 10-20 MPa, for example, 10 MPa, 11 MPa, 12 MPa, 15 MPa, 17 MPa or 20 MPa, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0027] Preferably, the insulation time is 30 to 60 minutes, for example, it can be 30 minutes, 33 minutes, 35 minutes, 40 minutes, 45 minutes, 50 minutes or 60 minutes, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0028] Preferably, the cooling to 20-25°C may be, for example, 20°C, 21°C, 22°C, 23°C, 24°C, 24.5°C or 25°C, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] As a preferred technical solution of the present invention, the method of use includes:

[0030] After the processing environment is evacuated to a vacuum degree of <1kPa, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 60-80°C and a pressure of 10-20MPa and kept warm for 30-60min. After naturally cooling to 20-25°C, the retaining ring support film product is obtained.

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] The vacuum hot pressing molding fixture for retaining ring support film provided by the present invention has reasonable design and is easy to use. The yield rate of retaining ring support film products is increased from about 20% to more than 80%, which effectively inhibits the formation of ripples on the surface of the retaining ring support film products and reduces the scrap rate, and is suitable for large-scale promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the structure of the vacuum hot pressing molding fixture for retaining ring support film in Example 1 of the present invention.

[0034] In the figure: 1- fixture concave plate; 2- fixture convex plate; 3- flexible material; 4- threaded hole; 5- pin hole; 6- pin ejection pin hole. DETAILED DESCRIPTION

[0035] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0036] The present invention is further described in detail below. However, the following examples are only simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

[0037] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0038] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0039] Example 1

[0040] This embodiment provides a vacuum hot pressing molding fixture for retaining ring support film, and its structural schematic diagram is as follows: Figure 1 shown.

[0041] The retaining ring support film vacuum hot pressing forming fixture comprises a fixture concave plate 1, a fixture convex plate 2 and a flexible material 3 arranged on the use surface of the fixture concave plate.

[0042] Corresponding threaded holes 4 and corresponding pin holes 5 are provided on the corners of the clamp concave plate 1 and the clamp convex plate 2;

[0043] The pin ejection pin hole 6 of the pin hole 5 is arranged on the fixture concave plate 1 .

[0044] The material of the fixture concave plate 1 and the fixture convex plate 2 is independently 304 stainless steel.

[0045] The flatness of the fixture concave plate 1 is 0.001 mm; the flatness of the fixture convex plate 2 is 0.003 mm.

[0046] The flexible material 3 is silica gel and has a thickness of 0.2 mm.

[0047] The flexible material 3 is molded on the use surface of the fixture concave plate 1;

[0048] Example 2

[0049] The present embodiment provides a retaining ring supporting film vacuum hot pressing forming jig, the retaining ring supporting film vacuum hot pressing forming jig comprising a jig concave plate, a jig convex plate and a flexible material arranged on the use surface of the jig concave plate.

[0050] Corresponding threaded holes and corresponding pin holes are provided on the corners of the clamp concave plate and the clamp convex plate;

[0051] The pin ejection pin hole of the pin hole is arranged on the fixture concave plate.

[0052] The material of the fixture concave plate is 45 steel; the material of the fixture convex plate is Q235 carbon structural steel.

[0053] The flatness of the concave plate of the fixture is 0.008 mm; the flatness of the convex plate of the fixture is 0.0001 mm.

[0054] The flexible material is rubber and has a thickness of 0.3 mm.

[0055] The flexible material is compression molded on the use surface of the fixture concave plate;

[0056] Example 3

[0057] This embodiment provides a method for using the vacuum hot pressing molding fixture for retaining ring support film as described in Embodiment 1, the method comprising:

[0058] After the processing environment is evacuated to a vacuum degree of 0.8 kPa, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 60°C and a pressure of 12 MPa and kept warm for 45 minutes. After naturally cooling to 23°C, the retaining ring support film product is obtained.

[0059] Example 4

[0060] This embodiment provides a method for using the vacuum hot pressing molding fixture for retaining ring support film as described in Embodiment 1, the method comprising:

[0061] After the processing environment is evacuated to a vacuum degree of 0.7 kPa, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 80°C and a pressure of 20 MPa and kept warm for 60 minutes. After naturally cooling to 20°C, the retaining ring support film product is obtained.

[0062] Example 5

[0063] This embodiment provides a method for using the vacuum hot pressing molding fixture for retaining ring support film as described in Embodiment 1, the method comprising:

[0064] After the processing environment is evacuated to a vacuum degree of 0.2 kPa, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 70°C and a pressure of 10 MPa and kept warm for 30 minutes. After naturally cooling to 25°C, the retaining ring support film product is obtained.

[0065] Example 6

[0066] This embodiment provides a vacuum hot pressing molding fixture for retaining ring support film, which is the same as that of Embodiment 1 except that the thickness of the flexible material is 0.05 mm.

[0067] This embodiment also provides a method for using the above-mentioned retaining ring support film vacuum hot pressing molding fixture, and the method for using is the same as that of Example 3.

[0068] Example 7

[0069] This embodiment provides a retaining ring support film vacuum hot pressing molding fixture, which is the same as the embodiment 1 except that the thickness of the flexible material is 0.5 mm.

[0070] This embodiment also provides a method for using the above-mentioned retaining ring support film vacuum hot pressing molding fixture, and the method for using is the same as that of Example 3.

[0071] Comparative Example 1

[0072] This comparative example provides a retaining ring support film vacuum hot pressing forming fixture, which is the same as Example 1 except that no flexible material is provided on the use surface of the fixture concave plate.

[0073] This comparative example also provides a method for using the above-mentioned retaining ring support film vacuum hot pressing molding fixture, and the method for using is the same as that of Example 3.

[0074] Comparative Example 2

[0075] This comparative example provides a method for using the vacuum hot pressing molding fixture for retaining ring support film as described in Example 1. The method is the same as Example 3 except that the temperature of the hot pressing treatment is 50°C.

[0076] Comparative Example 3

[0077] This comparative example provides a method for using the vacuum hot pressing molding fixture for retaining ring support film as described in Example 1. The method is the same as Example 3 except that the temperature of the hot pressing treatment is 100°C.

[0078] The yield rates of the retaining ring support film products obtained in the above-mentioned Examples 3 to 7 and Comparative Examples 1 to 3 were statistically analyzed, and the results are shown in Table 1.

[0079] Table 1

[0080]

[0081]

[0082] From Table 1 we can see that:

[0083] (1) It can be seen from Examples 3 to 5 that the vacuum hot pressing molding jig for retaining ring support film provided by the present invention effectively suppresses the formation of ripples on the surface of the retaining ring support film product, and the yield of the obtained retaining ring support film product is relatively high, reaching more than 80%;

[0084] (2) Combining Example 3 with Examples 6 to 7, it can be seen that the thickness of the flexible material in the vacuum hot-pressing jig for retaining the ring support film in Example 6 is relatively small, and the excess gap between the jig concave plate and the jig convex plate cannot be well filled, which will cause the retaining ring support film to be deformed, and the yield rate of the retaining ring support film is reduced to 53%; the thickness of the flexible material in the vacuum hot-pressing jig for retaining the ring support film in Example 7 is relatively large, and the yield rate of the retaining ring support film is reduced to 72%, and the thicker flexible material will produce a heat preservation effect, affecting the cooling speed of the retaining ring support film to be hot-pressed;

[0085] (3) Combining Example 3 with Comparative Examples 1 to 3, it can be seen that in Comparative Example 1, no flexible material is provided on the use surface of the fixture concave plate in the vacuum hot pressing molding fixture for retaining the ring support film, which will cause the retaining ring support film to be severely deformed during the hot pressing molding process, and the yield rate is only 18%; the temperature of the hot pressing treatment in Comparative Example 2 is relatively low, the hot pressing molding effect of the retaining ring support film is poor, and the yield rate is relatively low, only 13%; the temperature of the hot pressing treatment in Comparative Example 3 is relatively high, which will cause the flexible material to be damaged and adhere to the retaining ring support film product, and the yield rate of the retaining ring support film product is greatly reduced to 28%.

[0086] In summary, the vacuum hot pressing molding fixture for the retaining ring support film provided by the present invention is reasonably designed and easy to use. The retaining ring support film is clamped by combining a clamp concave plate and a clamp convex plate made of flexible material on the use surface, and vacuum hot pressing treatment is performed, which effectively solves the problem of deformation of the retaining ring support film during the hot pressing molding process and is suitable for large-scale promotion and application.

[0087] The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above-mentioned embodiments, but the present invention is not limited to the above-mentioned detailed structural features, that is, it does not mean that the present invention must rely on the above-mentioned detailed structural features to be implemented. Those skilled in the art should understand that any improvement of the present invention, equivalent replacement of the components selected by the present invention, addition of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0088] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

Claims

1. A vacuum hot pressing molding fixture for retaining ring support film, characterized in that: The retaining ring supporting film vacuum hot pressing forming fixture comprises a fixture concave plate, a fixture convex plate and a flexible material arranged on the use surface of the fixture concave plate.

2. The retaining ring support film vacuum hot pressing molding fixture according to claim 1, characterized in that: Corresponding threaded holes and corresponding pin holes are provided on the corners of the clamp concave plate and the clamp convex plate; Preferably, the pin ejection pinhole of the pin hole is arranged on the fixture concave plate.

3. The vacuum hot pressing forming fixture for retaining ring support film according to claim 1 or 2, characterized in that: The material of the fixture concave plate and the fixture convex plate independently includes any one of 304 stainless steel, 45 steel or Q235 carbon structural steel.

4. The vacuum hot pressing forming fixture for retaining ring support film according to any one of claims 1 to 3, characterized in that: The flatness of the fixture concave plate and the fixture convex plate are each independently less than 0.01 mm.

5. The vacuum hot pressing forming fixture for retaining ring support film according to any one of claims 1 to 4, characterized in that: The flexible material includes silicone or rubber; Preferably, the thickness of the flexible material is 0.1-0.3 mm.

6. The vacuum hot pressing forming fixture for retaining ring support film according to any one of claims 1 to 5, characterized in that: The flexible material is compression molded onto the use surface of the fixture concave plate.

7. A method for using the vacuum hot pressing molding fixture for retaining ring support film according to any one of claims 1 to 6, characterized in that: The method of use includes: After the processing environment is evacuated, the retaining ring support film to be hot-pressed is placed between the concave plate and the convex plate of the fixture, and is hot-pressed at a temperature of 60 to 80° C. and kept warm. After natural cooling, the retaining ring support film product is obtained.

8. The method of use according to claim 7, characterized in that: The vacuum degree of the processing environment is <1 kPa.

9. The method of use according to claim 7 or 8, characterized in that: The pressure of the hot pressing treatment is 10-20 MPa.

10. The method of use according to any one of claims 7 to 9, characterized in that: The insulation time is 30 to 60 minutes; Preferably, the cooling is to 20-25°C.

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