Air inlet device for atomic layer deposition

Abstract

The invention discloses an air inlet device for atomic layer deposition, and relates to the technical field of atomic layer deposition equipment. The device comprises a first fixing frame and a second fixing frame, an air inlet isolation pipe, a butt joint isolation pipe, an air outlet isolation pipe and an exhaust isolation pipe are sequentially arranged on one side of the first fixing frame, the air outlet isolation pipe is rotationally installed at the bottom of the second fixing frame, and a plurality of evenly-distributed air blowing pipes are fixedly installed on the peripheral side of the air outlet isolation pipe; the end, away from the butt joint isolation pipe, of the air inlet isolation pipe is slidably sleeved with two air inlet pipes, and the two air inlet pipes are provided with the same control air valve. By arranging the butt-joint assembly, two kinds of gas are transmitted along different gas inlet pipes, rotary hoses, gas inlet outer sleeves, butt-joint inner sleeves and different gas chambers respectively and are blown out from different gas blowing pipes, and the two kinds of gas are in a completely isolated state all the time; and the condition that the gas transmission device is blocked due to reactants generated by gas retention is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of atomic layer deposition equipment, and in particular to an air intake device for atomic layer deposition. Background Art

[0002] The principle of atomic layer thin film deposition technology: when the temperature and pressure in the reaction chamber are within a certain range, gas reaction source A and gas reaction source B (such as commonly used SiCl2H2 / dichlorosilane, NH3 / ammonia) are alternately introduced into the reaction chamber and reach the surface of the silicon wafer, and circulate in sequence to achieve the deposition of a thin film on the surface of the silicon wafer in the form of a single atomic layer growth. Both gas reaction sources require an air intake device to isolate and evenly distribute the gas. If the two gas reaction sources meet at the air intake end, a chemical reaction will immediately occur. They need to enter the chamber alternately in a pulsed form to prevent the two from reacting before reaching the substrate.

[0003] The existing air intake device can isolate the two gas reaction sources at the air intake end to prevent them from reacting. However, in order to ensure that the ejection positions of the two gas reaction sources are consistent, the same air blowing pipe needs to be used, which can easily lead to gas or its by-products being retained in the air blowing pipe (such as SiCl2H2 and NH3 mixing and reacting in the air blowing pipe), resulting in the two gases not being completely isolated. After multiple cycles of accumulation, the two gas reaction sources will react in the air blowing pipe to form deposits, which not only leads to a decrease in the quality of the gas reaction sources, but also causes the deposits to accumulate and block the air blowing pipe. For this reason, an air intake device for atomic layer deposition is proposed. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the existing air intake device can isolate two gas reaction sources at the air intake end to prevent them from reacting, but in order to ensure that the ejection positions of the two gas reaction sources are consistent, the same air blowing pipe needs to be used, which can easily lead to gas or its by-products being retained in the air blowing pipe, resulting in the two gases not being completely isolated. After multiple cycles of accumulation, the two gas reaction sources will react in the air blowing pipe to form deposits, which not only leads to a decrease in the quality of the gas reaction sources, but also causes the deposits to accumulate and block the air blowing pipe. The present invention provides an air intake device for atomic layer deposition.

[0005] In order to achieve the above-mentioned purpose, the present invention specifically adopts the following technical solutions:

[0006] An air intake device for atomic layer deposition comprises a first fixed frame and a second fixed frame, wherein an air intake isolation pipe, a docking isolation pipe, an air outlet isolation pipe and an exhaust isolation pipe are sequentially arranged on one side of the first fixed frame, wherein the air outlet isolation pipe is rotatably mounted on the bottom of the second fixed frame, and a plurality of evenly distributed air blowing pipes are fixedly mounted on the circumference of the air outlet isolation pipe, and two air intake pipes are slidably sleeved on one end of the air intake isolation pipe away from the docking isolation pipe, and the two air intake pipes are provided with the same control air valve, and isolation plates are fixedly mounted inside the air intake isolation pipe, the air outlet isolation pipe, the docking isolation pipe and the exhaust isolation pipe, and the four isolation plates divide the insides of the air intake isolation pipe, the air outlet isolation pipe, the docking isolation pipe and the exhaust isolation pipe into equal parts. Two air chambers, the two air inlet pipes correspond to the positions of the two air chambers respectively, a rotary motor is fixedly installed on the second fixed frame, the output end of the rotary motor is driven to be installed with a rotary shaft, one end of the rotary shaft is fixedly sleeved with a rotary gear, a driven gear ring meshing with the rotary gear is fixedly sleeved on the air outlet isolation pipe, two docking inner sleeves are fixedly installed at both ends of the air outlet isolation pipe, the four docking inner sleeves correspond to the positions of the two air chambers respectively, two air inlet outer sleeves matched with the docking inner sleeves are fixedly installed on one end of the docking isolation pipe close to the air outlet isolation pipe, the two air inlet outer sleeves correspond to the positions of the two air chambers respectively, and docking components are arranged on the air inlet isolation pipe and the docking isolation pipe;

[0007] The docking assembly is used to drive the air intake isolation pipe and the docking isolation pipe to move forward, and to dock the air intake outer sleeve with the docking inner sleeve to transmit gas;

[0008] The docking assembly includes two rotating hoses fixedly installed between the air intake isolation pipe and the docking isolation pipe, the two rotating hoses respectively correspond to the positions of the two air chambers, a stabilizing sleeve is rotatably sleeved on one end of the docking isolation pipe, one end of the stabilizing sleeve is slidably sleeved on the air intake isolation pipe, the two rotating hoses are both located inside the stabilizing sleeve, an air intake electric push rod is fixedly installed on one side of the first fixed frame, a traveling sleeve is fixedly installed on the telescopic end of the air intake electric push rod, and the traveling sleeve is fixedly sleeved on the stabilizing sleeve.

[0009] Furthermore, two surplus rings are sleeved on one end of the intake pipe located inside the intake isolation pipe, one of the surplus rings away from the first fixing frame is fixedly sleeved on the intake pipe, and the other surplus ring is slidably sleeved on the intake pipe, and the same surplus spring is fixedly installed between the two surplus rings, and the surplus spring is sleeved on the intake pipe.

[0010] Furthermore, the air intake outer sleeve is sleeved with a first plug cover at one end located inside the docking isolation tube, a first push rod is fixedly installed on one side of the first plug cover, a first slide is fixedly installed inside the air intake outer sleeve, the first push rod is slidably installed on the first slide, a first retaining ring is fixedly sleeved on the air intake outer sleeve, a same first return spring is fixedly installed between the first plug cover and the first retaining ring, the first return spring is sleeved on the air intake outer sleeve, a second plug cover is sleeved on one end of the docking inner sleeve located inside the air outlet isolation tube, a second push rod corresponding to the position of the first push rod is fixedly installed on one side of the second plug cover, a second slide is fixedly installed inside the docking inner sleeve, the second push rod is slidably installed on the second slide, a second retaining ring is fixedly sleeved on the docking inner sleeve, a same second return spring is fixedly installed between the second plug cover and the second retaining ring, and the second return spring is sleeved on the docking inner sleeve.

[0011] Furthermore, a third fixing frame is provided at one end of the exhaust isolation pipe away from the air outlet isolation pipe, and two exhaust pipes are slidably sleeved on one end of the exhaust isolation pipe close to the third fixing frame, and the positions of the two exhaust pipes correspond to the positions of the two air chambers respectively, and the two exhaust pipes are fixedly mounted on the third fixing frame, and an exhaust electric push rod is fixedly mounted on one side of the third fixing frame, and the telescopic end of the exhaust electric push rod is fixedly connected to the exhaust isolation pipe, and two exhaust outer sleeves matched with the docking inner sleeve are fixedly mounted on one end of the exhaust isolation pipe close to the air outlet isolation pipe, and a third plug cover is sleeved on one end of the exhaust outer sleeve located inside the exhaust isolation pipe, and a third push rod corresponding to the position of the second push rod is fixedly mounted on one side of the third plug cover, a third slide is fixedly mounted inside the exhaust outer sleeve, and the third push rod is slidably mounted on the third slide, a third retaining ring is fixedly sleeved on the exhaust outer sleeve, and the same third return spring is fixedly mounted between the third plug cover and the third retaining ring, and the third return spring is sleeved on the exhaust outer sleeve.

[0012] Furthermore, a plurality of pressure sensors evenly distributed along the axis of the docking isolation tube are fixedly installed on one end of the docking isolation tube close to the air outlet isolation tube, a pressure transmission spring rod is fixedly installed on one side of the pressure sensor, a positioning block is fixedly installed on the telescopic end of the pressure transmission spring rod, and a plurality of positioning sleeves compatible with the positioning block are fixedly installed on one end of the air outlet isolation tube close to the docking isolation tube.

[0013] Furthermore, the plurality of positioning blocks are distributed on both sides along the isolation plate, and the plurality of positioning blocks located on both sides have different external shapes and structures.

[0014] Furthermore, a steering hose is fixedly installed on one end of the air blowing pipe, and a load-bearing ring is fixedly installed on one end of the steering hose.

[0015] Furthermore, the rotary hoses are all sleeved with corrugated shells, and the two ends of the corrugated shells are respectively fixedly connected to one end of the air intake isolation pipe and the docking isolation pipe.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. The present invention provides a docking assembly so that during the gas transmission process, the two gases are transmitted along different intake pipes, rotary hoses, intake outer sleeves, docking inner sleeves and different air chambers, and blown out from different blowing pipes. The two gases are always in a completely isolated state, and there will be no situation where reactants are generated due to gas retention and the gas transmission device is blocked;

[0018] 2. The present invention provides a rotating hose so that the rotating motor can drive the outlet isolation tube to rotate back and forth, so that the gas can be blown onto the substrate more evenly. When the outlet isolation tube rotates back and forth, the two rotating hoses can be wound back and forth with the outlet isolation tube, thereby providing a margin for the rotation of the outlet isolation tube, so that the docking isolation tube can rotate with the outlet isolation tube while the inlet isolation tube remains different;

[0019] 3. The present invention provides a residual spring so that when the two rotating hoses are wound, the actual distance between the air intake isolation tube and the docking isolation tube will be reduced, so that the residual spring is compressed. When the rotating hose is reset, the residual spring will also drive the air intake isolation tube to reset, so that the distance between the air intake isolation tube and the docking isolation tube is restored, so that the rotating hose remains in a straight state, avoiding the rotating hose from being tangled due to slack when winding, which affects subsequent use;

[0020] 4. The present invention provides a first plug cover and a second plug cover, so that when the air intake is finished, the butt isolation pipe is separated from the air outlet isolation pipe, and the first plug cover and the second plug cover are reset under the elastic action of the first return spring and the second return spring, and the air intake outer sleeve and the butt inner sleeve are re-sealed, which can effectively prevent the residual gas leakage inside the air intake isolation pipe, the butt isolation pipe, etc.;

[0021] 5. The present invention sets an exhaust pipe so that when a single gas is fed in, the exhaust electric push rod controls the exhaust outer sleeve to be connected with the docking inner sleeve, so that gas can be pumped out along the exhaust pipe, so that the gas in the intake isolation pipe, the docking isolation pipe, the exhaust isolation pipe and the cavity can be pumped out, which can not only discharge the residual gas in time to prepare for the input of the second gas in the next round, but also remove the gaseous by-products to avoid affecting the deposition effect;

[0022] 6. The present invention provides a positioning block so that when the docking isolation tube and the outlet isolation tube are docked, the positioning block is pressed so that the pressure sensor can transmit a signal, so that the docking relationship between the current docking isolation tube and the outlet isolation tube can be judged according to the pressure change of the pressure sensor, so that the positioning block can be inserted into the inside of the positioning socket to ensure that the docking isolation tube and the outlet isolation tube can be accurately docked;

[0023] 7. The present invention sets the positioning blocks on both sides to different shapes, so that the positioning blocks can only be plugged into the positioning sockets of corresponding shapes. The signal change of the pressure sensor can ensure that the position relationship between the outlet isolation pipe and the inlet isolation pipe remains consistent, thereby avoiding the situation where different gases are transmitted using the same gas chamber, and further ensuring complete isolation during gas transmission.

[0024] 8. The present invention provides a steering hose so that when the outlet isolation tube rotates back and forth, each air blowing tube will continuously change position with the rotation of the outlet isolation tube, and the steering hose will overcome the pressure of the gas when it is blown out and move vertically downward under the gravity of the load ring, thereby changing the gas blowing direction, so that the gas in each air blowing tube is always blown out in a downward direction, so as to blow on the substrate, further improving the uniformity of the blowing;

[0025] 9. The present invention provides a corrugated shell so that the corrugated shell can be sleeved on the outside of the rotary hose to protect the rotary hose. It can share the pulling force of the air intake isolation pipe and the docking isolation pipe on the rotary hose and improve the structural strength of the rotary hose. It can also replace the rotary hoses to make contact when the two rotary hoses are entangled with each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0027] Figure 2 It is a schematic diagram of the internal three-dimensional structure of the air intake isolation pipe and the docking isolation pipe of the present invention;

[0028] Figure 3 The present invention Figure 2 Schematic diagram of the structure at A in the middle;

[0029] Figure 4 It is a schematic diagram of the three-dimensional structure of the interior of the gas outlet isolation tube of the present invention from a first-view perspective;

[0030] Figure 5 It is a schematic diagram of the three-dimensional structure of the interior of the gas outlet isolation tube of the present invention from a second viewing angle;

[0031] Figure 6 It is a schematic diagram of the internal three-dimensional structure of the exhaust isolation tube of the present invention;

[0032] Figure 7It is a schematic diagram of the three-dimensional structure of the air blowing pipe of the present invention;

[0033] Figure 8 It is a schematic diagram of the internal three-dimensional structure of the air intake outer sleeve of the present invention;

[0034] Fig. 9 It is a schematic diagram of the three-dimensional structure of the rotary hose and the corrugated casing of the present invention;

[0035] Fig.10 This is a schematic diagram of the gas introduction sequence of the present invention;

[0036] Figure numerals: 1, first fixing frame; 2, second fixing frame; 3, air inlet isolation pipe; 4, air outlet isolation pipe; 5, docking isolation pipe; 6, exhaust isolation pipe; 7, air inlet pipe; 8, control air valve; 9, isolation plate; 10, air blowing pipe; 11, rotary motor; 12, rotary shaft; 13, rotary gear; 14, driven gear ring; 15, docking inner sleeve; 16, air inlet outer sleeve; 17, air inlet electric push rod; 18, rotary hose; 19, stabilizing sleeve; 20, travel sleeve ring; 21, residual sleeve ring; 22, residual spring; 23, first plug cover ; 24. First push rod; 25. First retaining ring; 26. First return spring; 27. Second plug cover; 28. Second push rod; 29. ​​Second retaining ring; 30. Second return spring; 31. Pressure sensor; 32. Pressure transmission spring rod; 33. Positioning block; 34. Positioning sleeve; 35. Third fixing frame; 36. Exhaust pipe; 37. Exhaust electric push rod; 38. Exhaust outer sleeve; 39. Third plug cover; 40. Third push rod; 41. Third retaining ring; 42. Third return spring; 43. Steering hose; 44. Load ring; 45. Corrugated shell. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the inventive product is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0041] like Figure 1 As shown, an air intake device for atomic layer deposition comprises a first fixed frame 1 and a second fixed frame 2, one side of the first fixed frame 1 is provided with an air intake isolation pipe 3, a docking isolation pipe 5, an air outlet isolation pipe 4 and an exhaust isolation pipe 6 in sequence, the air outlet isolation pipe 4 is rotatably mounted on the bottom of the second fixed frame 2, a plurality of evenly distributed air blowing pipes 10 are fixedly mounted on the circumference of the air outlet isolation pipe 4, one end of the air intake isolation pipe 3 away from the docking isolation pipe 5 is slidably sleeved with two air intake pipes 7, and the two air intake pipes 7 are provided with the same control air valve 8, wherein the first fixed frame 1 and the second fixed frame 2 are both fixedly mounted on the reaction chamber, so as to maintain different, the air intake pipe 7 is respectively connected to a tank or pipeline equipped with two gas reaction sources, taking two commonly used gas reaction sources SiCl2H2 / dichlorosilane and NH3 / ammonia as examples, the mixing of the two will react in advance: SiCl2H2=Si(s)+Cl2(g)+H2(g), 2NH3+2Si(s)=2Si N(s)+3H2(↑), so it needs to be isolated;

[0042] The gas delivery device includes two gas inlet pipes 7 (hereinafter referred to as gas inlet pipe 7A and gas inlet pipe 7B) specially used for inputting two gas reaction sources (SiC12H2 / dichlorosilane, NH3 / ammonia), and a gas pipeline (hereinafter referred to as nitrogen pipeline A) for conveying N2 / nitrogen is connected to the reaction chamber separately, and the boiling point of NH3 / ammonia is -33.5°C, and it is a gas under normal conditions, and it is difficult to be attached to the gas delivery pipeline. The thermal decomposition reaction temperature of SiC12H2 / dichlorosilane is 630°C, and the normal temperature of the gas inlet device when in use is 180°C, so the possibility of SiC12H2 / dichlorosilane being attached to the gas delivery pipeline is also very small;

[0043] like Fig.10As shown, at the beginning of the process, SiCl2H2 / dichlorosilane is first introduced into the reaction chamber through the air inlet pipe 7A. The interior of the reaction chamber is a low-pressure and high-temperature environment. SiCl2H2 / dichlorosilane will quickly fill the chamber and undergo thermal decomposition to generate elemental Si / silicon. Then, N2 / nitrogen is introduced into the reaction chamber through the nitrogen pipe A to clean and remove the residual SiCl2H2 / dichlorosilane, Cl2, H2 and other mixed gases in the reaction chamber. Then, NH3 / ammonia is introduced into the reaction chamber through the air inlet pipe 7B to react with Si / silicon to generate SiN for coating. Finally, N2 / nitrogen is introduced into the reaction chamber again through the nitrogen pipe A to clean the residual mixed gas. This completes a cycle. The above process is then repeated to obtain a SiN film of a specified thickness.

[0044] The above reaction process comprises the following steps:

[0045] 1. SiC12H2 is introduced from the air inlet pipe 7A and thermal decomposition occurs: SiC12H2=Si(s)+C12(g)+H2(g);

[0046] 2. N2 is introduced from nitrogen pipe A to purge the residual gas;

[0047] 3. NH3 is introduced from the air inlet pipe 7B and reacts with Si generated on the silicon wafer in step 1 to generate SiN: 2NH3+2Si(s)=2SiN(s)+3H2(↑);

[0048] 4. N2 is introduced from nitrogen pipe A to purge the residual gas;

[0049] 5. The above four steps are a cycle, which is repeated multiple times until the Si N reaches the specified thickness;

[0050] The air intake device and the air intake equipment in the prior art are both connected to multiple external gas circuits. After all processes are completed or the equipment has been used for a certain period, the air intake pipe 7A and the air intake pipe 7B (i.e., the air intake device of the present application) are connected to another air circuit for conveying N2 / nitrogen (the nitrogen pipe B described below), so that the nitrogen pipe B conveys N2 / nitrogen to each pipe in the air intake device, and the air intake device and the reaction chamber are cleaned separately, further eliminating the influence of gas reaction source residue or adhesion to the pipe wall on the air intake device.

[0051] like Figure 2 , Figure 4 , Figure 6As shown, the interiors of the air inlet isolation pipe 3, the air outlet isolation pipe 4, the docking isolation pipe 5 and the exhaust isolation pipe 6 are all fixedly installed with isolation plates 9, and the four isolation plates 9 respectively divide the interiors of the air inlet isolation pipe 3, the air outlet isolation pipe 4, the docking isolation pipe 5 and the exhaust isolation pipe 6 into two air chambers, wherein the interiors of the air inlet isolation pipe 3, the air outlet isolation pipe 4, the docking isolation pipe 5 and the exhaust isolation pipe 6 are divided into two equal and mutually sealed air chambers by their respective isolation plates 9, and except for the air outlet isolation pipe 4, the positions of the two air chambers inside the air inlet isolation pipe 3, the docking isolation pipe 5 and the exhaust isolation pipe 6 correspond to each other, and when the air outlet isolation pipe 4 is docked with the air inlet isolation pipe 3, the docking isolation pipe 5 and the exhaust isolation pipe 6, the positions of all the isolation plates 9 are kept consistent, and the positions of all the air chambers on the same side are kept corresponding, and the multiple blowing pipes 10 are evenly divided into two groups along the isolation plates 9 inside the air outlet isolation pipe 4, and the two groups of blowing pipes 10 are respectively connected with the two air chambers inside the air outlet isolation pipe 4, for blowing out the two gases;

[0052] like Figure 2 As shown, the two air inlet pipes 7 correspond to the positions of the two air chambers respectively. Figure 5 As shown, a rotary motor 11 is fixedly mounted on the second fixed frame 2, a rotary shaft 12 is driven and mounted on the output end of the rotary motor 11, a rotary gear 13 is fixedly sleeved on one end of the rotary shaft 12, a driven gear ring 14 meshing with the rotary gear 13 is fixedly sleeved on the outlet isolation pipe 4, two docking inner sleeves 15 are fixedly mounted on both ends of the outlet isolation pipe 4, and the four docking inner sleeves 15 correspond to the positions of the two air chambers respectively, as shown in FIG. Figure 3 As shown, one end of the butt-joint isolation pipe 5 close to the outlet isolation pipe 4 is fixedly mounted with two inlet outer sleeves 16 adapted to the butt-joint inner sleeve 15, as shown in FIG. Figure 3 As shown, the two air intake outer sleeves 16 correspond to the positions of the two air chambers respectively, and the air intake isolation pipe 3 and the docking isolation pipe 5 are provided with docking components;

[0053] The docking assembly is used to drive the air intake isolation pipe 3 and the docking isolation pipe 5 to move forward, and to dock the air intake outer sleeve 16 with the docking inner sleeve 15 to transmit gas;

[0054] like Figure 2As shown, the docking assembly includes two rotating hoses 18 fixedly installed between the air intake isolation pipe 3 and the docking isolation pipe 5, the two rotating hoses 18 correspond to the positions of the two air chambers respectively, a stabilizing sleeve 19 is rotatably sleeved on one end of the docking isolation pipe 5, one end of the stabilizing sleeve 19 is slidably sleeved on the air intake isolation pipe 3, the two rotating hoses 18 are both located inside the stabilizing sleeve 19, an air intake electric push rod 17 is fixedly installed on one side of the first fixed frame 1, and a moving push rod 17 is fixedly installed on the telescopic end of the air intake electric push rod 17 The travel collar 20 is fixedly sleeved on the stable sleeve frame 19; specifically, the atomic layer deposition air intake device is provided with a docking assembly, so that before the gas transmission, the air intake electric push rod 17 can drive the travel collar 20 and the stable sleeve frame 19 to drive the air intake isolation pipe 3 and the docking isolation pipe 5 to approach the air outlet isolation pipe 4, until the docking inner sleeve 15 and the air intake outer sleeve 16 are plugged into each other, so that the air intake isolation pipe 3, the docking isolation pipe 5 and the air outlet isolation pipe 4 are connected to each other, and at this time, the air intake pipe 7 can be respectively connected in sequence. Different gases are input into the gas outlet isolation pipe 4 so that the gases can be blown out from the blowing pipe 10. During the gas transmission process, the two gases are respectively transmitted along different inlet pipes 7, rotary hoses 18, inlet outer sleeves 16, docking inner sleeves 15 and different air chambers, and blown out from different blowing pipes 10. The two gases are always in a completely isolated state, and there will be no situation where the gas transmission device is blocked due to reactants generated by gas retention. By setting the rotary hose 18, the rotary electric The machine 11 can drive the rotating gear 13 to rotate via the rotating shaft 12, and then use the driven gear ring 14 to drive the gas outlet isolation tube 4 to rotate back and forth, so that the gas can be blown out along with the rotating blowing tube 10, so that the gas can be blown onto the substrate more evenly. When the gas outlet isolation tube 4 rotates back and forth, the two rotating hoses 18 can be wound back and forth with each other along with the gas outlet isolation tube 4, thereby providing a margin for the rotation of the gas outlet isolation tube 4, so that the docking isolation tube 5 can rotate along with the gas outlet isolation tube 4 while the gas inlet isolation tube 3 remains different.

[0055] like Figure 2As shown, two residual rings 21 are sleeved on one end of the intake pipe 7 located inside the intake isolation pipe 3, one of the residual rings 21 away from the first fixing frame 1 is fixedly sleeved on the intake pipe 7, and the other residual ring 21 is slidably sleeved on the intake pipe 7, and the same residual spring 22 is fixedly installed between the two residual rings 21, and the residual spring 22 is sleeved on the intake pipe 7; specifically, by setting the residual spring 22, the intake electric push rod 17 will drive the intake isolation pipe 3 and the docking isolation pipe 5 to move forward, and when the stabilizing frame 19 slides to the maximum stroke, it will drive the intake isolation pipe 3 to slide along the intake pipe 7 until one of the residual rings 21 contacts the inner wall of the air intake isolation tube 3 and covers the connection between the air intake pipe 7 and the air intake isolation tube 3, thereby improving the sealing performance of the air intake isolation tube 3. At the same time, when the two rotating hoses 18 are wound, the actual distance between the air intake isolation tube 3 and the docking isolation tube 5 will be reduced, so that the air intake isolation tube 3 pushes the residual ring 21 and compresses the residual spring 22. When the rotating hose 18 is reset, the residual spring 22 will also drive the air intake isolation tube 3 to reset, so that the distance between the air intake isolation tube 3 and the docking isolation tube 5 is restored, thereby keeping the rotating hose 18 in a straight state, avoiding the rotating hose 18 from being knotted when wound due to relaxation, thereby affecting subsequent use.

[0056] like Figure 3 As shown, one end of the air intake outer sleeve 16 located inside the docking isolation tube 5 is sleeved with a first plug cover 23, a first push rod 24 is fixedly installed on one side of the first plug cover 23, a first slide is fixedly installed inside the air intake outer sleeve 16, the first push rod 24 is slidably installed on the first slide, a first retaining ring 25 is fixedly sleeved on the air intake outer sleeve 16, and a first return spring 26 is fixedly installed between the first plug cover 23 and the first retaining ring 25. The first return spring 26 is sleeved on the air intake outer sleeve 16, as shown in FIG. Figure 4As shown, a second plug cover 27 is sleeved on one end of the docking inner sleeve 15 located inside the air outlet isolation pipe 4, a second push rod 28 corresponding to the position of the first push rod 24 is fixedly installed on one side of the second plug cover 27, a second slide is fixedly installed inside the docking inner sleeve 15, the second push rod 28 is slidably installed on the second slide, a second retaining ring 29 is fixedly sleeved on the docking inner sleeve 15, and a second return spring 30 is fixedly installed between the second plug cover 27 and the second retaining ring 29, and the second return spring 30 is sleeved on the docking inner sleeve 15; specifically, by arranging the first plug cover 23 and the second plug cover 27, the first plug cover 23 and the second plug cover 27 can keep the air inlet outer sleeve 16 and the docking inner sleeve 15 closed, when the docking inner sleeve 1 When the butt-jointed inner sleeve 15 and the air inlet outer sleeve 16 are butt-jointed, the butt-jointed inner sleeve 15 will be inserted into the air inlet outer sleeve 16, and then the second push rod 28 will contact the first push rod 24, thereby respectively driving the second plug cover 27 and the first plug cover 23 to detach from the butt-jointed inner sleeve 15 and the air inlet outer sleeve 16, so that the butt-jointed inner sleeve 15 and the air inlet outer sleeve 16 are connected, thereby realizing the automatic connection between the butt-jointed isolation pipe 5 and the air outlet isolation pipe 4; when the air intake is finished, the butt-jointed isolation pipe 5 is detached from the air outlet isolation pipe 4, and the first plug cover 23 and the second plug cover 27 will be reset under the elastic action of the first return spring 26 and the second return spring 30, and the air inlet outer sleeve 16 and the butt-jointed inner sleeve 15 will be re-sealed, so as to effectively prevent the residual gas leakage inside the air inlet isolation pipe 3, the butt-jointed isolation pipe 5, etc.

[0057] like Figure 6As shown, a third fixing frame 35 is provided at one end of the exhaust isolation tube 6 away from the gas outlet isolation tube 4. In the present embodiment, the third fixing frame 35 is fixedly mounted on the reaction chamber, thereby maintaining a difference. Two exhaust pipes 36 are slidably sleeved on one end of the exhaust isolation tube 6 close to the third fixing frame 35. The positions of the two exhaust pipes 36 correspond to the positions of the two gas chambers respectively. The two exhaust pipes 36 are both fixedly mounted on the third fixing frame 35. An exhaust electric push rod 37 is fixedly mounted on one side of the third fixing frame 35. The telescopic end of the exhaust electric push rod 37 is fixedly connected to the exhaust isolation tube 6. Two exhaust outer sleeves 38 adapted to the docking inner sleeve 15 are fixedly mounted on one end of the exhaust isolation tube 6 close to the gas outlet isolation tube 4. A third plug cover 39 is sleeved on one end of the exhaust outer sleeve 38 located inside the exhaust isolation tube 6. A third push rod 40 corresponding to the position of the second push rod 28 is fixedly mounted on one side of the third plug cover 39. A third slide is fixedly installed inside the exhaust outer sleeve 38, and a third push rod 40 is slidably installed on the third slide. A third baffle ring 41 is fixedly sleeved on the exhaust outer sleeve 38, and a third return spring 42 is fixedly installed between the third plug cover 39 and the third baffle ring 41, and the third return spring 42 is sleeved on the exhaust outer sleeve 38; specifically, by setting the exhaust pipe 36, when the single gas intake is completed, the control valve 8 controls the intake pipe 7 to be closed, and the exhaust electric push rod 37 can control the exhaust isolation pipe 6 to slide along the exhaust pipe 36 until the exhaust outer sleeve 38 is connected to the docking inner sleeve 15, so that air can be evacuated along the exhaust pipe 36, so that the gas in the intake isolation pipe 3, the docking isolation pipe 5, the exhaust isolation pipe 4 and the cavity can be evacuated, which can not only discharge the residual gas in time to prepare for the input of the second gas in the next round, but also remove the gaseous by-products to avoid affecting the deposition effect.

[0058] like Figure 3 As shown, a plurality of pressure sensors 31 evenly distributed along the axis of the butt-joint isolation tube 5 are fixedly installed on one end of the butt-joint isolation tube 5 close to the air outlet isolation tube 4, a pressure transmission spring rod 32 is fixedly installed on one side of the pressure sensor 31, and a positioning block 33 is fixedly installed on the telescopic end of the pressure transmission spring rod 32, as shown in FIG. Figure 4 As shown, a plurality of positioning sleeves 34 compatible with the positioning block 33 are fixedly installed at one end of the air outlet isolation tube 4 close to the docking isolation tube 5; specifically, by setting the positioning block 33, when the docking isolation tube 5 is docked with the air outlet isolation tube 4, the positioning block 33 will gradually approach the positioning sleeve 34 as the docking isolation tube 5 moves, and when the positioning block 33 is pressurized, it will transmit pressure to the pressure sensor 31 through the pressure transmission spring rod 32, so that the pressure sensor 31 can transmit a signal, so that the current docking relationship between the docking isolation tube 5 and the air outlet isolation tube 4 can be judged according to the pressure change of the pressure sensor 31, so that the positioning block 33 can be inserted into the inside of the positioning sleeve 34, ensuring that the docking isolation tube 5 and the air outlet isolation tube 4 can be accurately docked.

[0059] like Figure 3 As shown, a plurality of positioning blocks 33 are distributed on both sides along the isolation plate 9, and the plurality of positioning blocks 33 on both sides have different external structures respectively; specifically, by setting the positioning blocks 33 on both sides to different shapes, the positioning blocks 33 can only be plugged into each other with positioning sockets 34 of corresponding shapes, and in conjunction with the signal change of the pressure sensor 31, it can be ensured that the positional relationship between the gas outlet isolation pipe 4 and the gas inlet isolation pipe 3 remains consistent front and back, thereby avoiding the situation where different gases front and back are transmitted using the gas chamber at the same position, and further ensuring complete isolation during gas transmission.

[0060] like Figure 7 As shown, a steering hose 43 is fixedly installed at one end of the blowing pipe 10, and a load ring 44 is fixedly installed at one end of the steering hose 43; specifically, by arranging the steering hose 43, when the rotary motor 11 drives the air outlet isolation pipe 4 to rotate back and forth, each blowing pipe 10 will continuously change position with the rotation of the air outlet isolation pipe 4, and the steering hose 43 at one end of the blowing pipe 10 will overcome the pressure of the gas when it is blown out and move vertically downward under the action of the gravity of the load ring 44, thereby changing the gas blowing direction, so that the gas in each blowing pipe 10 is always blown out in a downward direction, so as to blow on the substrate, further improving the uniformity of the blowing.

[0061] like Fig. 9 As shown, the revolving hose 18 is sleeved with a corrugated shell 45, and the two ends of the corrugated shell 45 are respectively fixedly connected to one end of the air intake isolation pipe 3 and the docking isolation pipe 5; specifically, by arranging the corrugated shell 45, the corrugated shell 45 can be sleeved on the outside of the revolving hose 18 to protect the revolving hose 18, which can not only share the pulling force of the air intake isolation pipe 3 and the docking isolation pipe 5 on the revolving hose 18 and improve the structural strength of the revolving hose 18, but also can replace the revolving hose 18 to make contact when the two revolving hoses 18 are entangled with each other.

[0062] In summary: before air intake: the air intake electric push rod 17 drives the traveling sleeve ring 20 and the stabilizing sleeve frame 19 to drive the air intake isolation pipe 3 and the docking isolation pipe 5 to approach the air outlet isolation pipe 4. When the positioning block 33 is pressurized, the pressure sensor 31 can transmit a signal to judge the current docking relationship between the docking isolation pipe 5 and the air outlet isolation pipe 4. The rotary motor 11 drives the air outlet isolation pipe 4 to rotate back and forth, changing the position of the positioning sleeve 34, so that the positioning block 33 can be plugged into the inside of the positioning sleeve 34, so that the docking isolation pipe 5 and the air outlet isolation pipe 4 can be accurately docked, and at the same time, the docking inner sleeve 15 and the air intake outer sleeve 16 are connected;

[0063] During gas intake: the two gases are transmitted along different gas intake pipes 7, rotary hoses 18, gas intake outer sleeves 16, docking inner sleeves 15 and different gas chambers, and blown out from different gas blowing pipes 10. The rotary motor 11 drives the gas outlet isolation pipe 4 and the gas blowing pipe 10 to rotate back and forth, so that the gas is blown evenly onto the substrate;

[0064] After air intake: the air valve 8 is controlled to close the air intake pipe 7, and the exhaust electric push rod 37 controls the exhaust isolation pipe 6 to slide along the exhaust pipe 36 until the exhaust outer sleeve 38 is connected to the docking inner sleeve 15, and the air intake isolation pipe 3, the docking isolation pipe 5, the air outlet isolation pipe 4 and the gas and gaseous by-products in the cavity are extracted along the exhaust pipe 36;

[0065] The connection relationship between each pipeline: the air intake isolation pipe 3 and the connection isolation pipe 5: the positions of the original air chambers of the air intake isolation pipe 3 and the connection isolation pipe 5 are in a corresponding state. The first fixing frame 1 is fixedly installed on the reaction chamber, and the air intake pipe 7 is fixed on the first fixing frame 1. The air intake isolation pipe 3 is slidably connected with the air intake pipe 7. When the air intake isolation pipe 3 is driven by the air intake electric push rod 17, the residual spring 22 will be compressed and contracted, such as Figure 2 As shown, when the docking isolation pipe 5 rotates, it drives the two rotating hoses 18 ( Figure 2 The middle rotating hose 18 is wrapped inside the corrugated casing 45) and wound, thereby pulling the air intake isolation pipe 3, so that the residual spring 22 is further compressed. Therefore, when the docking isolation pipe 5 stops rotating, the two rotating hoses 18 will be reset, straightened and tightened under the action of the rebound force of the residual spring 22, so that the docking isolation pipe 5 is rotated and reset, so that the air intake isolation pipe 3 and the docking isolation pipe 5 are re-aligned;

[0066] Connect the isolation pipe 5 and the air outlet isolation pipe 4: Figure 4 As shown, the butt-jointed isolation pipe 5 is moved to the end of the outlet isolation pipe 4 located at the lower left corner (or Figure 5 The outlet isolation pipe 4 is located at one end of the upper left corner), and then the relative position of the current docking isolation pipe 5 and the outlet isolation pipe 4 is determined by the mutual insertion of the pressure sensor 31, the pressure transmission spring rod 32, the positioning block 33 and the positioning sleeve 34 and the pressure change, and then the rotary motor 11 is controlled to rotate to drive the outlet isolation pipe 4 to change its position, so that Figure 3 The air inlet outer sleeve 16 on the docking isolation pipe 5 shown can be connected with Figure 4 The butt-jointed inner sleeves 15 on the outlet isolation pipe 4 at the lower left corner are plugged into each other, so that the butt-jointed isolation pipe 5 and the outlet isolation pipe 4 can be successfully butted, so that gas intake and deposition can begin in sequence;

[0067] Gas outlet isolation tube 4 and exhaust isolation tube 6: The third fixing frame 35 is fixedly installed on the reaction chamber like the first fixing frame 1, and the exhaust isolation tube 6 is slidably connected with the gas inlet isolation tube 3 and the exhaust isolation tube 6. Since the gas inlet isolation tube 3 and the exhaust isolation tube 6 will not rotate, the positions of the gas inlet isolation tube 3 and the exhaust isolation tube 6 themselves correspond to each other. When the gas intake is completed, the docking isolation tube 5 and the gas outlet isolation tube 4 are in a docking state, and the docking isolation tube 5 drives the gas outlet isolation tube 4 to reset under the action of the rebound force of the residual spring 22. At this time, the gas inlet isolation tube 3, the gas outlet isolation tube 4 and the docking isolation tube 5 all maintain a docking and aligned state, so the gas outlet isolation tube 4 and the exhaust isolation tube 6 are also in an aligned state, as shown in FIG. Figure 6 As shown, the exhaust electric push rod 37 drives the exhaust isolation pipe 6 to approach Figure 4 The middle outlet isolation pipe 4 is located at one end of the upper right corner (or Figure 5 The lower right corner of the middle Figure 6 The exhaust outer sleeve 38 on the exhaust isolation pipe 6 can be connected with Figure 4 The docking inner sleeves 15 located in the upper right corner are plugged into each other to complete the docking of the gas outlet isolation pipe 4 and the exhaust isolation pipe 6. Finally, the docking isolation pipe 5 is separated from the gas outlet isolation pipe 4, the docking relationship is disconnected, and the exhaust isolation pipe 6 can start exhausting.

[0068] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. An air inlet device for atomic layer deposition, characterized in that: The invention comprises a first fixed frame (1) and a second fixed frame (2), wherein one side of the first fixed frame (1) is provided with an air intake isolation pipe (3), a docking isolation pipe (5), an air outlet isolation pipe (4) and an exhaust isolation pipe (6) in sequence, wherein the air outlet isolation pipe (4) is rotatably mounted on the bottom of the second fixed frame (2), and a plurality of evenly distributed air blowing pipes (10) are fixedly mounted on the circumference of the air outlet isolation pipe (4), and two air intake pipes (7) are slidably sleeved on one end of the air intake isolation pipe (3) away from the docking isolation pipe (5), and the two air intake pipes (7) are provided with the same control air valve (8), and the interiors of the air intake isolation pipe (3), the air outlet isolation pipe (4), the docking isolation pipe (5) and the exhaust isolation pipe (6) are all fixedly provided with isolation plates (9), and the four isolation plates (9) respectively divide the interiors of the air intake isolation pipe (3), the air outlet isolation pipe (4), the docking isolation pipe (5) and the exhaust isolation pipe (6) into two The two air inlet pipes (7) correspond to the positions of the two air chambers respectively; a rotary motor (11) is fixedly mounted on the second fixed frame (2); a rotary shaft (12) is driven and mounted on the output end of the rotary motor (11); a rotary gear (13) is fixedly sleeved on one end of the rotary shaft (12); a driven gear ring (14) meshing with the rotary gear (13) is fixedly sleeved on the air outlet isolation pipe (4); and both ends of the air outlet isolation pipe (4) are fixedly sleeved. Two butt-jointed inner sleeves (15) are fixedly installed, and the four butt-jointed inner sleeves (15) correspond to the positions of the two air chambers respectively; two air inlet outer sleeves (16) adapted to the butt-jointed inner sleeves (15) are fixedly installed at one end of the butt-jointed isolation pipe (5) close to the air outlet isolation pipe (4), and the two air inlet outer sleeves (16) correspond to the positions of the two air chambers respectively; and a butt-jointed assembly is provided on the air inlet isolation pipe (3) and the butt-jointed isolation pipe (5); The docking assembly is used to drive the air intake isolation pipe (3) and the docking isolation pipe (5) to move forward, and to dock the air intake outer sleeve (16) with the docking inner sleeve (15) to transmit gas; The docking assembly comprises two rotating hoses (18) fixedly mounted between the air intake isolation pipe (3) and the docking isolation pipe (5), the two rotating hoses (18) respectively corresponding to the positions of the two air chambers, a stabilizing sleeve 1 (9) is rotatably sleeved on one end of the docking isolation pipe (5), one end of the stabilizing sleeve (19) is slidably sleeved on the air intake isolation pipe (3), the two rotating hoses (18) are both located inside the stabilizing sleeve (19), an air intake electric push rod (17) is fixedly mounted on one side of the first fixed frame (1), a traveling sleeve (20) is fixedly mounted on the telescopic end of the air intake electric push rod (17), and the traveling sleeve (20) is fixedly sleeved on the stabilizing sleeve (19).

2. The gas inlet device for atomic layer deposition according to claim 1, characterized in that: Two residual collars (21) are sleeved on one end of the air intake pipe (7) located inside the air intake isolation pipe (3), one of the residual collars (21) away from the first fixing frame (1) is fixedly sleeved on the air intake pipe (7), and the other residual collar (21) is slidably sleeved on the air intake pipe (7), and the same residual spring (22) is fixedly installed between the two residual collars (21), and the residual spring (22) is sleeved on the air intake pipe (7).

3. The gas inlet device for atomic layer deposition according to claim 1, characterized in that: The air intake outer sleeve (16) is sleeved with a first plug cover (23) at one end located inside the docking isolation tube (5), a first push rod (24) is fixedly installed on one side of the first plug cover (23), a first slide is fixedly installed inside the air intake outer sleeve (16), the first push rod (24) is slidably installed on the first slide, a first retaining ring (25) is fixedly sleeved on the air intake outer sleeve (16), a first return spring (26) is fixedly installed between the first plug cover (23) and the first retaining ring (25), the first return spring (26) is sleeved on the air intake outer sleeve (16), and the docking inner sleeve ( 15) A second plug cover (27) is sleeved on one end of the air outlet isolation pipe (4), a second push rod (28) corresponding to the position of the first push rod (24) is fixedly installed on one side of the second plug cover (27), a second slide is fixedly installed inside the docking inner sleeve (15), the second push rod (28) is slidably installed on the second slide, a second retaining ring (29) is fixedly sleeved on the docking inner sleeve (15), a second return spring (30) is fixedly installed between the second plug cover (27) and the second retaining ring (29), and the second return spring (30) is sleeved on the docking inner sleeve (15).

4. The gas inlet device for atomic layer deposition according to claim 3, characterized in that: A third fixing frame (35) is provided at one end of the exhaust isolation pipe (6) away from the outlet isolation pipe (4); two exhaust pipes (36) are slidably sleeved at one end of the exhaust isolation pipe (6) close to the third fixing frame (35); the positions of the two exhaust pipes (36) respectively correspond to the positions of the two air chambers; the two exhaust pipes (36) are fixedly mounted on the third fixing frame (35); an exhaust electric push rod (37) is fixedly mounted on one side of the third fixing frame (35); the telescopic end of the exhaust electric push rod (37) is fixedly connected to the exhaust isolation pipe (6); and two exhaust pipes (36) are fixedly mounted on one end of the exhaust isolation pipe (6) close to the outlet isolation pipe (4) and are connected to the inner sleeve (1 5) a matching exhaust outer sleeve (38), wherein one end of the exhaust outer sleeve (38) located inside the exhaust isolation tube (6) is sleeved with a third plug cover (39), one side of the third plug cover (39) is fixedly mounted with a third push rod (40) corresponding to the position of the second push rod (28), a third slide is fixedly mounted inside the exhaust outer sleeve (38), the third push rod (40) is slidably mounted on the third slide, a third retaining ring (41) is fixedly sleeved on the exhaust outer sleeve (38), a third return spring (42) is fixedly mounted between the third plug cover (39) and the third retaining ring (41), and the third return spring (42) is sleeved on the exhaust outer sleeve (38).

5. The gas inlet device for atomic layer deposition according to claim 1, characterized in that: A plurality of pressure sensors (31) evenly distributed along the axis of the butt-joint isolation tube (5) are fixedly mounted on one end of the butt-joint isolation tube (5) close to the air outlet isolation tube (4); a pressure transmission spring rod (32) is fixedly mounted on one side of the pressure sensor (31); a positioning block (33) is fixedly mounted on the telescopic end of the pressure transmission spring rod (32); and a plurality of positioning sleeves (34) matched with the positioning block (33) are fixedly mounted on one end of the air outlet isolation tube (4) close to the butt-joint isolation tube (5).

6. The gas inlet device for atomic layer deposition according to claim 5, characterized in that: The plurality of positioning blocks (33) are distributed on both sides along the isolation plate (9), and the plurality of positioning blocks (33) located on both sides have different external shapes and structures.

7. The gas inlet device for atomic layer deposition according to claim 1, characterized in that: A steering hose (43) is fixedly mounted on one end of the air blowing pipe (10), and a load-bearing ring (44) is fixedly mounted on one end of the steering hose (43).

8. The gas inlet device for atomic layer deposition according to claim 1, characterized in that: The rotary hose (18) is sleeved with a corrugated casing (45), and the two ends of the corrugated casing (45) are respectively fixedly connected to one end of the air intake isolation pipe (3) and the docking isolation pipe (5).

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