Inspection quality frame body inner cavity precision in-situ detection and trimming system

Abstract

The invention provides a precision in-situ detection and trimming system for an inner cavity of an inspection quality frame, which belongs to the technical field of precision machining measurement and comprises an autocollimator and a pentaprism device. The pentaprism device comprises a pentaprism, and the pentaprism comprises a first incident plane, a first emergent plane adjacent to the first incident plane, a first shielding plane and two side surfaces; the included angle between the first incident plane and the first emergent plane and the included angle between the adjacent side faces of an inner cavity of a to-be-detected inspection mass frame are both 90 degrees, and the first shielding plane is provided with a first light shielding device. In the detection process, the pentaprism device is arranged in a cavity of the inspection mass frame body, the pentaprism device and the inspection mass frame body are jointly arranged on the first base, the autocollimator is aligned with the first incident plane, and parallel light rays emitted by the autocollimator penetrate through the first side face and enter from the first incident plane; and after being deflected by 90 degrees, the light is emitted from the first emergent surface and acts on the second side surface in the form of a cross cursor, so that the perpendicularity error between the first side surface and the second side surface is determined.

Description

Technical Field

[0001] The present application belongs to the field of precision machining and measurement technology, and more specifically, relates to a precision in-situ detection and adjustment system for the inner cavity of a mass inspection frame. Background Art

[0002] The proof mass frame is used in high-precision measurement systems such as spacecraft navigation, precise orbit determination and orbit prediction, and is crucial to the research in the fields of earth science, basic physics and astrophysics. As a quality inspection device for high-precision measurement systems, the proof mass frame can serve as the capacitor plate frame of the inertial sensor in the gravitational wave detection system. The disturbance of the capacitor plate frame to the proof mass directly affects the comprehensive performance of the inertial sensor. Therefore, the frame has very strict processing accuracy indicators and material performance requirements, and at the same time, it has extremely stringent requirements on indicators such as the verticality of adjacent surfaces in the frame cavity and the relative degree of opposite surfaces.

[0003] The means of detecting the relative degree and verticality of the inner cavity of the quality inspection frame are constantly being iterated and optimized. Traditional methods of detecting surface geometric features mainly include coordinate measurement, electronic countermeasure measurement, and mechanical measurement. However, traditional measurement methods cannot meet the requirements of in-situ detection of surface geometric features of the inner cavity of the frame, and cannot provide surface error feedback information for processing compensation. Summary of the invention

[0004] In view of the defects of the prior art, the purpose of the present application is to provide a precision in-situ detection and adjustment system for the inner cavity of a quality inspection frame, aiming to solve the problem that traditional measurement methods cannot perform in-situ detection of the geometric features of the inner cavity surface of the frame.

[0005] In a first aspect, an embodiment of the present application provides a system for precise in-situ detection and adjustment of a cavity of a proof mass frame, including an autocollimator and a pentaprism device;

[0006] The pentaprism device includes a pentaprism and a first light shielding device, the pentaprism includes a first incident surface, a first exit surface adjacent to the first incident surface and a first shielding surface, and two side surfaces; the angle between the first incident surface and the first exit surface and the angle between the adjacent side surfaces of the inner cavity of the inspection mass frame to be measured are both 90°, and the first shielding surface is provided with a first light shielding device;

[0007] During the detection process, the pentaprism device is arranged in the cavity of the proof mass frame, and is arranged together with the proof mass frame on the first base. When the first incident surface and the first exit surface are respectively arranged to be opposite to the first side surface and the second side surface adjacent to the cavity of the proof mass frame, the autocollimator is aligned with the first incident surface, and the parallel light emitted by the autocollimator enters from the first incident surface through the first side surface, deflects 90°, and is emitted from the first exit surface and acts on the second side surface in the form of a cross cursor;

[0008] The position information of the cross cursor is used to determine the verticality error between the first side surface and the second side surface.

[0009] Optionally, when the first incident surface and the first exit surface are respectively arranged to be opposite to the second side surface and the third side surface adjacent to the quality inspection inner cavity, the autocollimator is aligned with the first incident surface, and the parallel light emitted by the autocollimator is irradiated to the first incident surface through the second side surface, deflected by 90°, and then emitted from the first exit surface and acts on the third side surface in the form of a cross cursor;

[0010] The position information of the cross cursor is used to determine the perpendicularity error between the second side surface and the third side surface and the parallelism error between the first side surface and the third side surface.

[0011] Optionally, the first light shielding device includes an L surface, and the L surface and the first incident surface are located in the same plane;

[0012] At the beginning of the detection, the parallel light emitted by the autocollimator irradiates the L surface in the form of a cross cursor, and the position information of the cross cursor is used to determine the position information of the first incident surface.

[0013] Optionally, the pentaprism and the first light shielding device are movable relative to the first base along a vertical direction of the parallel light emitted by the autocollimator via a sliding track.

[0014] Optionally, the pentaprism device also includes a pentaprism seat, a first telescopic rod, a second base and a base track. The pentaprism and the first light blocking device are fixedly mounted on the pentaprism seat. The pentaprism seat and the second base are connected via the first telescopic rod. The second base is mounted on the base track. The base track is provided with a sliding track in a direction perpendicular to the parallel light emitted by the autocollimator. The base track and the inspection mass frame are fixedly mounted on the first base. The pentaprism seat is rotatable relative to the second base.

[0015] Optionally, the inspection mass frame inner cavity precise in-situ detection and adjustment system further comprises a detachable prism device, the prism device comprises a prism and a second light shielding device, the prism comprises a second incident surface, a second exit surface opposite to the second incident surface, two second shielding surfaces adjacent to the second incident surface, and the second shielding surfaces are provided with a second light shielding device;

[0016] When the prism device is set on the first base, the autocollimator is aimed at the second incident surface, and the parallel light emitted by the autocollimator is changed by the prism and then emitted from the second exit surface and acts on the L surface in the form of a cross cursor. The position information of the cross cursor is used to determine the position information of the first incident surface.

[0017] Optionally, the prism device also includes a prism seat, a second telescopic rod and a third base, the prism and the second light blocking device are fixedly arranged on the prism seat, the prism seat and the third base are connected by the second telescopic rod, the third base is detachably arranged on the first base, and the prism seat is rotatable relative to the third base.

[0018] Optionally, the precise in-situ detection and adjustment system for the inner cavity of the inspection mass frame also includes a freezing clamp. During the detection process, the pentaprism device and the inspection mass frame are set on the first base through the freezing clamp. The freezing clamp is a hollow structure for clamping the inspection mass frame, with a liquid storage tank on the top, a first connecting part on the bottom, and a water inlet and an outlet on the side.

[0019] Optionally, the freezing clamp is arranged on the first base through a fixing seat, and the fixing seat includes a second connecting portion on the top, and the first connecting portion is connected to the second connecting portion to fix the freezing clamp and the inspection quality frame.

[0020] Optionally, the first base is arranged on a rotating platform of the B-axis of the machine tool, and the rotation of the rotating platform of the B-axis of the machine tool drives the inspection mass frame on the first base to rotate.

[0021] The embodiment of the present application provides a precise in-situ detection and adjustment system for the inner cavity of an inspection mass frame, which changes the optical path of parallel light emitted by an autocollimator through a prism device, thereby achieving in-situ detection of the verticality error between adjacent side surfaces and the parallelism error between opposite side surfaces of the inner cavity of the inspection mass frame to be tested, so as to timely adjust the processing parameters of the inspection mass frame according to the detection results, meet the high-precision and ultra-precision manufacturing requirements of the inspection mass frame, and improve the processing accuracy and processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the present application or related technologies, the following is a brief introduction to the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a structural schematic diagram of a precise in-situ detection and adjustment system for the inner cavity of an inspection mass frame provided in an embodiment of the present application;

[0024] Figure 2 It is a front view of the inspection quality frame cavity precision in-situ detection and adjustment system for the command inspection frame cavity provided in the embodiment of the present application;

[0025] Figure 3 It is a structural schematic diagram of the inspection quality frame provided in the embodiment of the present application;

[0026] Figure 4 is a schematic structural diagram of a pentaprism device provided in an embodiment of the present application;

[0027] Figure 5 is a top view of a pentaprism device provided in an embodiment of the present application;

[0028] Figure 6 is a schematic structural diagram of a prism device provided in an embodiment of the present application;

[0029] Figure 7 is a top view of a prism device provided in an embodiment of the present application;

[0030] Figure 8 is a schematic diagram of the structure of the freezing clamp provided in an embodiment of the present application;

[0031] Fig. 9 is a schematic diagram of the structure of the fixing base provided in an embodiment of the present application;

[0032] Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0033] 1—autocollimator, 2—quality inspection frame, 3—pentaprism device, 4—quadrangular prism device, 5—support plate, 6—support leg, 11—first base, 12—B-axis rotation platform, S1~S4—different sides of the quality inspection frame, 31—pentaprism, 32—first light blocking device, 33—pentaprism seat, 34—first telescopic rod, 35—second base, 36—base track, 41—quadrangular prism, 42—quadrangular prism seat, 43—second telescopic rod, 44—third base, 111—freezing clamp, 112—liquid storage tank, 113—water inlet, 114—water outlet, 115—first connecting part, 116—fixed seat, 117—second connecting part, 118—third connecting part. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0035] Figure 1 is a schematic diagram of the structure of the precision in-situ detection and adjustment system for the inner cavity of the inspection mass frame provided in the embodiment of the present application, Figure 2 1 is a front view of the inspection quality frame cavity precision in-situ detection and adjustment system for the command inspection frame cavity provided by the embodiment of the present application, such as Figure 1 and Figure 2 As shown, the precision in-situ detection and adjustment system for the inner cavity of the inspection mass frame at least includes:

[0036] Autocollimator 1, pentaprism device 3 and computer (not shown in the figure).

[0037] Optionally, the autocollimator 1 emits parallel light, and the autocollimator 1 is mounted on a support plate 5, and a support leg 6 is provided below the support plate 5. The support leg 6 is height-adjustable, and the height of the autocollimator 1 and the inspection mass frame 2 are made consistent by adjusting the height of the support leg 6.

[0038] Optionally, the autocollimator 1 includes a collimator and a telescope. The collimator is provided with a light source, a condenser, a graticule, etc., and can also directly illuminate the object to be measured.

[0039] Figure 3 is a schematic diagram of the structure of the inspection quality frame provided in the embodiment of the present application, such as Figure 3 As shown, the test mass frame 2 to be tested is a regular hexagon, with no filling on the top and bottom, which can be used to place and take the object to be tested and the pentaprism device 3; the four sides are hollowed out, so that the parallel light emitted by the autocollimator 1 can pass through the side of the test mass frame 2 to illuminate the pentaprism device 3 set in its cavity. The inner surface of the cavity is defined as the S surface, which is arranged clockwise as S1 to S4.

[0040] like Figure 1 As shown, during the inspection process, the inspection quality frame 2 is set on the first base 11, and the first base 11 is set on the machine tool B-axis rotating platform 12. The rotation of the machine tool B-axis rotating platform 12 drives the first base 11 and the inspection quality frame 2 and other workpieces set on the first base 11 to rotate.

[0041] like Figure 1 As shown, during the detection process, the pentaprism device 3 is arranged in the cavity of the proof mass frame 2 to be tested, and the geometric centers of the pentaprism device 3 and the proof mass frame 2 are located in a straight line with the optical path center of the autocollimator 1 .

[0042] Figure 4 is a schematic diagram of the structure of a pentaprism device provided in an embodiment of the present application, Figure 5 is a top view of the pentaprism device provided in an embodiment of the present application, such as Figure 4 As shown, the pentaprism device 3 at least includes a pentaprism 31 and a first light blocking device 32 .

[0043] like Figure 5As shown, the pentaprism 31 includes a first incident surface, a first exit surface and a first shielding surface adjacent to the first incident surface, and two side surfaces; the first shielding surface is provided with a first light shielding device 32. The purpose of providing the first light shielding device 32 is to shield light and ensure that light only enters the pentaprism from the first incident surface, so the first shielding surface adjacent to the first incident surface is provided with a first light shielding device. It is easy to imagine that the side surfaces adjacent to the first shielding surface other than the first incident surface can also be shielded by the first light shielding device to further ensure that light only enters from the first incident surface.

[0044] Optionally, the first light shielding device 32 includes an L surface, and the L surface is located in the same plane as the first incident surface of the pentaprism 31. When the parallel light emitted by the autocollimator 1 is irradiated onto the L surface in the form of a cross cursor, the light is reflected back to the autocollimator 1, and the position information of the cross cursor is used to determine the position information of the plane where the first incident surface of the pentaprism 31 is located.

[0045] Optionally, the angle between the first incident surface and the first exit surface of the pentaprism 31 and the angle between the adjacent side surfaces of the inner cavity of the inspection mass frame 2 are both 90°. It should be noted that in the embodiment of the present application, the inspection mass frame 2 is taken as a regular hexahedron for explanation, and the angle between the adjacent side surfaces of the inner cavity of the inspection mass frame 2 should be 90°, so the angle between the first incident surface and the first exit surface is set to 90°, and the degrees of each angle of the pentaprism and the refractive index of the pentaprism are set accordingly, so that the parallel light incident on the first incident surface can be deflected by 90° and then emitted from the first exit surface, thereby measuring the verticality error between the adjacent side surfaces of the inner cavity of the inspection mass frame 2; it can also be achieved by replacing 90° with other degrees.

[0046] Optionally, the pentaprism 31 and the first light blocking device 32 are movable relative to the first base 11 along a vertical direction of the parallel light emitted by the autocollimator 1 via a sliding track, so that the parallel light emitted by the autocollimator 1 can be aligned with the first incident surface of the pentaprism 31 or with the L surface of the first light blocking device 32.

[0047] Optionally, the pentaprism device 3 further comprises a pentaprism seat 33, a first telescopic rod 34, a second base 35 and a base track 36. The pentaprism 31 and the first light shielding device 32 are fixedly arranged on the pentaprism seat 33, and optionally, the first light shielding device 32 is a part of the pentaprism seat 33.

[0048] Optionally, the pentaprism seat 33 and the second base 35 are connected via a first telescopic rod 34 , and the first telescopic rod 34 can move vertically relative to the second base 35 to adjust the height of the pentaprism 31 to be consistent with the height of the autocollimator 1 .

[0049] Optionally, the second base 35 is slidably connected to the base rail 36, the second base 35 is arranged on the base rail 36, and the base rail 36 is arranged on the first base 11; the base rail 36 is provided with a sliding track along the direction perpendicular to the parallel light emitted by the autocollimator 1, and when the second base 35 moves linearly along the track under the action of electric drive, it drives the pentaprism 31 and the first light blocking device 32 to move along the direction perpendicular to the parallel light emitted by the autocollimator 1, so that the light is incident from the first incident surface of the pentaprism 31 or the light hits the first light blocking device 32 and is reflected.

[0050] Optionally, the pentaprism seat 33 is rotatable relative to the second base 35. Specifically, there are two situations. The first situation is that the pentaprism seat 33 is rotatably arranged on the top of the first telescopic rod 34. The second situation is that the connection between the first telescopic rod 34 and the pentaprism seat 33 is fixed, the first telescopic rod 34 is rotatably connected to the second base 35, and the rotation of the first telescopic rod 34 drives the pentaprism seat 33 to rotate.

[0051] It should be noted that the rotation, telescopic and sliding in the embodiments of the present application can all be achieved by electric drive, so that the height adjustment and horizontal position adjustment of the workpiece can be realized.

[0052] During the detection process, the first incident surface and the first exit surface of the pentaprism 31 are respectively set to be opposite to the first side surface and the second side surface adjacent to the inner cavity of the proof mass frame 2, and the autocollimator 1 is aligned with the first incident surface of the pentaprism 31 (and at the hollow position of the first side surface of the proof mass frame 2 at the same time). The autocollimator 1 emits a parallel light source through the graticule, passes through the first side surface of the proof mass frame 2 to be tested, and enters from the first incident surface of the pentaprism 31. After being deflected 90° inside the pentaprism 31 (reference Figure 5 ) is emitted from the first exit surface, and then acts on the second side surface of the proof mass frame 2 in the form of a cross cursor, and the position information of the cross cursor is used to determine the verticality error between the first side surface and the second side surface of the proof mass frame 2.

[0053] Furthermore, through the rotational movement of the B-axis rotating platform of the machine tool and the rotation of the pentaprism seat 33, the first incident surface and the first exit surface of the pentaprism 31 are respectively set to be opposite to the second side surface and the third side surface (the third side surface is opposite to the first side surface) adjacent to the inner cavity of the inspection mass frame 2, and the autocollimator 1 is aligned with the first incident surface of the pentaprism 31 (and at the hollow position of the second side surface of the inspection mass frame 2 at the same time). The autocollimator 1 emits a parallel light source passing through the graticule, passes through the second side surface of the inspection mass frame 2 to be measured, and enters from the first incident surface of the pentaprism 31. After being deflected 90° inside the pentaprism 31 (reference Figure 5) is emitted from the first exit surface, and then acts on the third side surface of the inspection mass frame 2 in the form of a cross cursor. At this time, the position information of the cross cursor is used to determine the verticality error between the second side surface and the third side surface of the inspection mass frame 2, and further determine the parallelism error between the first side surface and the third side surface of the inspection mass frame 2.

[0054] Optionally, the position information of the cross cursor is transmitted to a computer, which calculates the verticality error between adjacent side surfaces and the parallelism error between opposite side surfaces of the inspection quality frame 2 based on the position information of the cross cursor, and feeds back to the adjustment and processing system, which adjusts the processing parameters of the inspection quality frame according to the error calculation results.

[0055] Optionally, before the detection begins, the second base 35 in the pentaprism device 3 is electrically driven to move linearly on the base track 36, so that the parallel light source emitted by the autocollimator 1 acts on the L surface of the first light shielding device 32 in the pentaprism device 3 in the form of a cross cursor, and the light is reflected back to the autocollimator 1. The position information of the cross cursor is used to determine the position information of the L surface, that is, to determine the position information of the first incident surface of the pentaprism 31. When the position of the cross cursor is at the set position of the L surface, it means that the first incident surface of the pentaprism 31 is strictly perpendicular to the parallel light emitted by the autocollimator 1, and there is no need to rotate the pentaprism seat. Even if the first incident surface of the pentaprism 31 is not strictly perpendicular to the parallel light emitted by the autocollimator 1, the currently detected position information can be used as the reference information for subsequent verticality error and parallelism error measurements.

[0056] Optionally, the inspection mass frame inner cavity precise in-situ detection and adjustment system further comprises a detachable four-prism device.

[0057] like Figure 1 and Figure 2 As shown, the quadrangular prism device 4 is detachably disposed on the first base 11. During the detection process, its geometric center is in a straight line with the geometric centers of the inspection mass frame 2 and the pentaprism device 3, and the optical path center of the autocollimator.

[0058] Figure 6 is a schematic diagram of the structure of a prism device provided in an embodiment of the present application, Figure 7 is a top view of the prism device provided in the embodiment of the present application, such as Figure 6 As shown, the prism device 4 at least includes a prism 41 and a second light shielding device ( Figure 6 The second light shielding device is a part of the prism seat 42).

[0059] like Figure 7As shown, the prism 41 includes a second incident surface, a second exit surface opposite to the second incident surface, and two second shielding surfaces adjacent to the second incident surface, and the two second shielding surfaces are provided with second light shielding devices. The purpose of providing the second light shielding device is to shield light and ensure that the light emitted by the autocollimator 1 only enters the prism from the second incident surface, so the second light shielding device is provided on the second shielding surface adjacent to the second incident surface to shield the light. It is conceivable that the second light shielding device can be provided only on a second shielding surface where light may be incident.

[0060] During the detection process, when the prism device 4 is set on the first base 11, the autocollimator 1 is aligned with the second incident surface of the prism 41, and the parallel light emitted by the autocollimator 1 is changed by the prism 4 and emitted from the second exit surface of the prism 4 and aligned with the L surface of the first light blocking device 32 in the pentaprism device 3. The light is reflected back to the autocollimator 1 from the L surface, and the computer determines the position information of the first incident surface of the pentaprism 31 based on the fourth angle between the parallel light emitted by the autocollimator 1 and the received reflected light.

[0061] Optionally, the prism device 4 further includes a prism seat 42, a second telescopic rod 43 and a third base 44. The prism 41 is fixedly arranged on the prism seat 42 ( Figure 6 The second light shielding device is a part of the prism seat 42, the prism seat 42 and the third base 44 are connected by a second telescopic rod 43, and the third base 44 is detachably arranged on the first base 11. The second telescopic rod 43 can move vertically relative to the third base 44 to adjust the height of the prism 41 to be consistent with the height of the autocollimator 1.

[0062] Optionally, the prism seat 42 is rotatable relative to the third base 44. Specifically, there are two situations, the first is that the prism seat 42 is rotatably arranged on the top of the second telescopic rod 43, and the second is that the connection between the second telescopic rod 43 and the prism seat 42 is fixed, the second telescopic rod 43 and the third base 44 are rotatably connected, and the rotation of the second telescopic rod 43 drives the prism seat 42 to rotate.

[0063] Optionally, the precision in-situ detection and adjustment system for the inner cavity of the inspection mass frame further includes a freezing clamping device, specifically a freezing clamp.

[0064] Figure 8 is a schematic diagram of the structure of the freezing clamp provided in the embodiment of the present application, such as Figure 8 As shown, the freezing clamp 111 is a hollow structure for clamping the pentaprism device 3 and the inspection mass frame 2 to be tested, a plurality of liquid storage tanks 112 are arranged on the top to store low-temperature liquid, a water inlet 113 and a water outlet 114 are arranged on the side, and a first connecting part 115 is arranged on the bottom to fix the freezing clamp 111.

[0065] During the testing process, the inspection mass frame 2 and other workpieces to be tested are clamped by the freezing clamp 111, avoiding the stress and surface damage caused by the traditional clamping and fixing method, ensuring the high-precision and ultra-precision manufacturing requirements of the inspection mass frame 2, and providing guarantee for subsequent precise measurement and adjustment.

[0066] Optionally, during the detection process, the freezing clamp 111 is fixed on the first base 11 through a fixing seat.

[0067] Fig. 9 is a schematic diagram of the structure of the fixing seat provided in the embodiment of the present application, such as Fig. 9 As shown, the top of the fixing seat 116 is provided with a second connection portion 117, and the second connection portion 117 at the top of the fixing seat 116 is connected to the first connection portion 115 at the bottom of the freezing clamp 111 to achieve the purpose of fixing the freezing clamp 111 and the inspection mass frame 2 clamped therein. The bottom of the fixing seat 116 is also provided with a third connection portion 118 so that the fixing seat 116 can be fixed on the first base 11.

[0068] Optionally, refer to Figure 8 and Fig. 9 , the first connection part 115 at the bottom of the freezing clamp 111 is a protruding column, and the second connection part 117 at the top of the fixing seat 116 is a fixing hole. The protruding column at the bottom of the freezing clamp 111 is fixed to the fixing hole at the top of the fixing seat 116 to fix the freezing clamp 111 and the inspection mass frame 2 clamped by it; the third connection part 118 at the bottom of the fixing seat 116 is a protruding column, and the corresponding top of the first base 11 is provided with a fixing hole to fix the fixing seat 116. It can be imagined that the freezing clamp 111 and the inspection mass frame 2 clamped by it can be fixed by setting the first connection part 115 as a recessed fixing hole and the second connection part 117 as a protruding column; the third connection part 118 is set as a recessed fixing hole, and the top of the first base 11 is provided with a protruding column to fix the fixing seat 116.

[0069] Reference Figure 1 , the overall on-site inspection and adjustment process is described below.

[0070] Step 1: Set up and calibrate the autocollimator 1. Set up the autocollimator 1 horizontally, and adjust the height of the autocollimator 1 so that it is aligned with the outer surface corresponding to the first side surface of the inner cavity of the test mass frame 2 to be tested.

[0071] Step 2: Setting the pentaprism device 3 . The pentaprism device 3 is set in the cavity of the proof mass frame 2 , and the position of the pentaprism 31 is adjusted so that the autocollimator 1 is aligned with the outer surface of the proof mass frame 2 and the first incident surface of the pentaprism 31 .

[0072] Step 3: calibrate the reference position information of the first incident surface of the pentaprism 31.

[0073] Method 1: Use the quadrangular prism device 4 to determine the position information of the first incident surface of the pentaprism 31 .

[0074] Step 3-11, set the prism device 4. Set the prism device 4 on the first base 11, adjust the height of the prism 41 so that the autocollimator 1 is simultaneously aligned with the second incident surface of the prism 41, and can deflect the parallel light emitted by the autocollimator 1 and align it with the L surface of the first light shielding device 32 in the pentaprism device 3.

[0075] Step 3-12, start the autocollimator 1, the autocollimator 1 emits the parallel light source through the graticule, enters from the second incident surface of the prism 41, and passes through the inside of the prism 41 as follows: Figure 7 After being deflected, the light is emitted from the second exit surface, and then acts on the L surface of the first light shielding device 32 in the pentaprism device 3 in the form of a cross cursor, and the light is reflected back to the autocollimator 1. The position information of the cross cursor is used to determine the position information of the L surface, that is, to determine the position information of the first incident surface of the pentaprism 31.

[0076] Step 3-13, remove the prism device 4.

[0077] Method 2: using the pentaprism device 3 to determine the position information of the first incident surface of the pentaprism 31 .

[0078] Step 3-21, start the autocollimator 1, and the autocollimator 1 emits a parallel light source through the graticule.

[0079] Step 3-22, the second base 35 in the pentaprism device 3 is electrically driven to move linearly on the base track 36, so that the parallel light source emitted by the autocollimator 1 acts on the L surface of the first light shielding device 32 in the pentaprism device 3 in the form of a cross cursor, and the light is reflected back to the autocollimator 1. The position information of the cross cursor is used to determine the position information of the L surface, that is, to determine the position information of the first incident surface of the pentaprism 31.

[0080] The pentaprism seat 33 is rotatable relative to the second base 35. By rotating the pentaprism seat 33, the cross cursor can be displayed at a specified position on the L surface. At this time, the first incident surface of the pentaprism 31 is strictly perpendicular to the parallel light emitted by the autocollimator 1, which serves as the reference position of the plane where the first incident surface is located.

[0081] Considering that the autocollimator 1 needs to be aligned with the first incident surface in the subsequent steps, and the electric drive that makes the second base 35 in the pentaprism device 3 move linearly on the base track 36 may cause the reference position of the plane where the first incident surface of the pentaprism 31 is located to rotate and shift, therefore, method 1 is given priority.

[0082] Step 4, start the autocollimator 1, the autocollimator 1 emits a parallel light source through the graticule, passes through the first side surface of the test mass frame 2 to be tested, and enters the first incident surface of the pentaprism 31, and passes through the inside of the pentaprism 31 as follows: Figure 5 The light is deflected and emitted from the first exit surface, and then acts on the second side of the proof mass frame 2 in the form of a cross cursor. The position information of the cross cursor is used to determine the verticality error between the first side and the second side of the proof mass frame 2.

[0083] Step 5: Through the rotational movement of the B-axis rotating platform of the machine tool and the rotation of the pentaprism seat 33, the autocollimator 1 is aligned with the outer surface corresponding to the second side surface of the inner cavity of the inspection mass frame 2 to be measured and the first incident surface of the pentaprism 31, and the above steps are repeated. The parallel light emitted by the autocollimator 1 acts on the third side surface of the inspection mass frame 2 in the form of a cross cursor. The position information of the cross cursor is used to determine the verticality error between the second side surface and the third side surface of the inspection mass frame 2, and further determine the parallelism error between the first side surface and the third side surface of the inspection mass frame 2.

[0084] It should be understood that expressions such as "including" and "may include" that may be used in the present application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In the present application, terms such as "including" and / or "having" may be interpreted as indicating specific characteristics, numbers, operations, constituent elements, components, or combinations thereof, but may not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0085] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. Among them, "fixed connection" means that the two are connected to each other and the relative position relationship after the connection remains unchanged. "Rotational connection" means that the two are connected to each other and can rotate relative to each other after the connection. "Sliding connection" means that the two are connected to each other and can slide relative to each other after the connection. The directional terms mentioned in the embodiments of the present application, such as "top", "bottom", "inside", "outside", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present application, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0086] In addition, in the embodiments of the present application, the mathematical concepts mentioned are symmetric, equal, relative, perpendicular, etc. These limitations are all for the current technological level, rather than absolutely strict definitions in the mathematical sense, and a small amount of deviation is allowed, such as approximately symmetric, approximately equal, approximately relative, approximately perpendicular, etc. For example, A is relative to B, which means that A and B are relative or approximately relative. A is perpendicular to B, which means that A and B are perpendicular or approximately perpendicular.

[0087] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A precision in-situ detection and adjustment system for the inner cavity of a mass inspection frame, characterized in that: Includes autocollimator and pentaprism device; The pentaprism device includes a pentaprism and a first light shielding device, the pentaprism includes a first incident surface, a first exit surface adjacent to the first incident surface and a first shielding surface, and two side surfaces; the angle between the first incident surface and the first exit surface and the angle between the adjacent side surfaces of the inner cavity of the inspection mass frame to be measured are both 90°, and the first shielding surface is provided with the first light shielding device; During the detection process, the pentaprism device is arranged in the cavity of the inspection mass frame, and is arranged together with the inspection mass frame on the first base. When the first incident surface and the first exit surface are respectively arranged to be opposite to the first side surface and the second side surface adjacent to the inner cavity of the inspection mass frame, the autocollimator is aligned with the first incident surface, and the parallel light emitted by the autocollimator is incident from the first incident surface through the first side surface, and is deflected by 90° and then emitted from the first exit surface and acts on the second side surface in the form of a cross cursor; The position information of the cross cursor is used to determine the verticality error between the first side surface and the second side surface.

2. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 1 is characterized in that: When the first incident surface and the first exit surface are respectively arranged to be opposite to the second side surface and the third side surface adjacent to the quality inspection inner cavity, the autocollimator is aligned with the first incident surface, and the parallel light emitted by the autocollimator is irradiated to the first incident surface through the second side surface, deflected by 90°, and then emitted from the first exit surface and acts on the third side surface in the form of a cross cursor; The position information of the cross cursor is used to determine the perpendicularity error between the second side surface and the third side surface and the parallelism error between the first side surface and the third side surface.

3. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 1 is characterized in that: The first light shielding device comprises an L surface, and the L surface and the first incident surface are located in the same plane; At the beginning of the detection, the parallel light emitted by the autocollimator irradiates the L surface in the form of a cross cursor, and the position information of the cross cursor is used to determine the position information of the first incident surface.

4. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 3 is characterized in that: The pentaprism and the first light shielding device are movable relative to the first base along a vertical direction of the parallel light emitted by the autocollimator via a sliding track.

5. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 4 is characterized in that: The pentaprism device also includes a pentaprism seat, a first telescopic rod, a second base and a base track. The pentaprism and the first light blocking device are fixedly arranged on the pentaprism seat. The pentaprism seat and the second base are connected by the first telescopic rod. The second base is arranged on the base track. The base track is provided with a sliding track in a direction perpendicular to the parallel light emitted by the autocollimator. The base track and the inspection mass frame are fixedly arranged on the first base. The pentaprism seat is rotatable relative to the second base.

6. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 3 is characterized in that: The system further comprises a detachable prism device, the prism device comprising a prism and a second light shielding device, the prism comprising a second incident surface, a second exit surface opposite to the second incident surface, and two second shielding surfaces adjacent to the second incident surface, the second shielding surface being provided with the second light shielding device; When the prism device is set on the first base, the autocollimator is aimed at the second incident surface, and the parallel light emitted by the autocollimator is changed by the prism, then emitted from the second exit surface and acts on the L surface in the form of a cross cursor, and the position information of the cross cursor is used to determine the position information of the first incident surface.

7. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 6, characterized in that: The prism device also includes a prism seat, a second telescopic rod and a third base. The prism and the second light blocking device are fixedly arranged on the prism seat. The prism seat and the third base are connected by the second telescopic rod. The third base is detachably arranged on the first base. The prism seat is rotatable relative to the third base.

8. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 1 is characterized in that: The system also includes a freezing clamp. During the detection process, the pentaprism device and the inspection mass frame are set on the first base through the freezing clamp. The freezing clamp is a hollow structure for clamping the inspection mass frame, with a liquid storage tank on the top, a first connecting part on the bottom, and a water inlet and a water outlet on the side.

9. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 8, characterized in that: The freezing clamp is arranged on the first base through a fixing seat, and the fixing seat includes a second connecting part on the top, and the first connecting part is connected to the second connecting part to fix the freezing clamp and the inspection mass frame.

10. The system for precise in-situ detection and adjustment of the inner cavity of the inspection mass frame according to claim 1, characterized in that: The first base is arranged on a rotating platform of the B-axis of the machine tool, and the rotation of the rotating platform of the B-axis of the machine tool drives the inspection mass frame on the first base to rotate.

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