Flatness appearance visual inspection all-in-one machine

Abstract

The invention discloses a flatness appearance visual inspection all-in-one machine which comprises a charging tray conveying line in the X-axis direction, and a code scanning mechanism, a golden finger detection mechanism, a chip top detection mechanism, a long side opposite two-side and bottom detection mechanism, a detection transfer table, a short side opposite two-side detection mechanism and a waste removal mechanism which form a square shape with the charging tray conveying line. The device further comprises a first Y-axis vacuum manipulator, a second Y-axis vacuum manipulator, a first X-axis vacuum manipulator, a second X-axis vacuum manipulator and a third Y-axis vacuum manipulator. According to the invention, chip code scanning detection, golden finger detection and six-surface visual detection are integrated, and the detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of visual inspection, and in particular to an all-in-one machine for visual inspection of flatness and appearance. Background Art

[0002] After the IC chip is manufactured, it is necessary to inspect the flatness of the six sides of the chip and the flatness of the gold fingers. Flatness can detect whether there are defects such as pits, scratches, and dirt. Currently, flatness detection is performed using a visual camera detection device. For example, the invention patent with publication number CN115178476A and publication date 2022.10.14 discloses a high-speed and high-precision six-sided appearance inspection device for chips. The disclosed inspection mechanism includes a first inspection industrial camera, a second inspection industrial camera, and a third inspection industrial camera to realize the inspection of the six sides of the chip. However, the appearance inspection device does not integrate the inspection of the gold fingers of the chip. Currently, the inspection of the gold fingers needs to be performed on additional equipment, which reduces the inspection efficiency. Summary of the invention

[0003] In order to overcome the above-mentioned shortcomings, the purpose of the present invention is to provide an all-in-one machine for visual inspection of flatness appearance that integrates gold finger and six-sided visual inspection of a chip, improves inspection efficiency, has a compact structure, and has a reasonable distribution.

[0004] In order to achieve the above purpose, the technical solution adopted by the present invention is: an integrated machine for visual inspection of flatness appearance, including a tray conveyor line running in the X-axis direction, and a code scanning mechanism for forming a "mouth" shape with the tray conveyor line, a gold finger detection mechanism, a chip top detection mechanism, a long side opposite side and bottom detection mechanism, a detection transfer table, a short side opposite side detection mechanism, and a waste material removal mechanism are sequentially arranged on the same side of the tray conveyor line; the gold finger detection mechanism includes a glass detection platform, a line scan camera aligned with the glass detection platform, and a line scan X-axis linear module that drives the line scan camera to move, and the inlet of the tray conveyor line is A first Y-axis vacuum manipulator for connecting the material end, the code scanning mechanism, and the glass detection platform is arranged above the material end, the code scanning mechanism, and the glass detection platform; the glass detection platform and the chip top detection mechanism are connected through a second Y-axis vacuum manipulator; the chip top detection mechanism, the two opposite sides of the long side, the bottom detection mechanism, and the detection turntable are connected through a first X-axis vacuum manipulator, and the detection turntable and the detection mechanisms on the two opposite sides of the short side are connected through a second X-axis vacuum manipulator; a third Y-axis vacuum manipulator for connecting the three is arranged above the detection mechanisms on the two opposite sides of the short side, the waste rejection mechanism, and the discharge end of the material tray conveyor line.

[0005] Preferably, the tray conveyor line includes a belt group composed of multiple pairs of conveying belts, and the feeding end and the receiving end of the belt group are respectively provided with a feeding bin and a receiving bin, and the feeding bin and the receiving bin both include: a bin body, for storing the tray, the bin body passes through the top and bottom and opposite sides; two support members, the support members are arranged on opposite sides of the bin body; two bin body two-axis driving modules, respectively drive the two support members to lift and translate, forcing the two support members to move towards or in opposite directions, when the two support members move towards each other, the two support members support the tray in the bin body, and when the two support members move in opposite directions, the two support members release the tray in the bin body; a lifting platform, the lifting platform is located between the two conveying belts below the bin body, the lifting platform is lifted and lowered by the drive of the bin body lifting cylinder, when the lifting platform rises, it can extend into the bin body, and when the lifting platform descends, the lifting platform is lower than the belt group.

[0006] Preferably, the first Y-axis vacuum manipulator, the first X-axis vacuum manipulator, the second X-axis vacuum manipulator and the third Y-axis vacuum manipulator all include a first manipulator two-axis drive module, a servo motor and a first vacuum suction head. The servo motor can move back and forth in the two-axis directions by driving the first manipulator two-axis drive module, and the first vacuum suction head is driven to rotate by the servo motor; the second Y-axis vacuum manipulator includes a second manipulator two-axis drive module and a second vacuum suction head. The second vacuum suction head can move back and forth in the Y-axis and Z-axis directions by driving the second manipulator two-axis drive module; the detection turntable can be adjusted in the Z-axis direction through the matching dovetail groove slider and bolts.

[0007] Preferably, a position detection camera is provided above the feeding end of the tray conveyor line, and an identification hole is provided on the chip. The position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed.

[0008] Preferably, the barcode scanning mechanism includes a barcode scanning gun, which is fixed on one side of the first vacuum suction head of the first Y-axis vacuum manipulator, and the scanning port of the barcode scanning gun is aligned with the QR code of the chip on the glass detection platform to scan the QR code of the chip on the glass detection platform; a barcode scanning NG platform is provided on one side of the glass detection platform, and a plurality of barcode scanning NG slots are provided on the barcode scanning NG platform, and the barcode scanning NG platform can be moved between the barcode scanning gun and the glass detection platform by the drive of the barcode scanning X-axis linear module.

[0009] Preferably, the chip top detection mechanism includes: a top visual detection camera, which can be adjusted in the X-axis and Z-axis directions through multiple sets of matching dovetail groove sliders and bolts; a sliding turntable, which is located below the top visual detection camera, and the second Y-axis vacuum manipulator is connected to the glass detection platform and the sliding turntable; a detection Y-axis linear module, which drives the sliding turntable to move back and forth along the Y-axis between the glass detection platform and the opposite sides of the long side and the bottom detection mechanism.

[0010] Preferably, the detection mechanism for the opposite sides and the bottom of the long side includes: two long side visual inspection cameras, which are arranged opposite to each other and distributed along the Y-axis direction, and the two long side visual inspection cameras can be adjusted in the Y-axis direction through matching dovetail groove sliders and bolts; a bottom visual inspection camera, located below the middle of the two long side visual inspection cameras, and the bottom visual inspection camera can be adjusted in the X-axis and Z-axis directions through multiple sets of matching dovetail groove sliders and bolts; when the first X-axis vacuum manipulator drives the chip to move between the two long side visual inspection cameras and is located above the bottom visual inspection camera, the two long side visual inspection cameras and the bottom visual inspection camera perform visual inspection on the two side surfaces and bottom surface of the chip one by one.

[0011] Preferably, the short side relative side detection mechanism includes two short side visual detection cameras, which are arranged opposite to each other and distributed along the Y-axis direction. When the second X-axis vacuum manipulator drives the chip to move between the two short side visual detection cameras, the two short side visual detection cameras perform visual inspection on the two sides of the chip one by one; the two short side visual detection cameras can be adjusted in the Y-axis direction through matching dovetail groove sliders and bolts.

[0012] Preferably, a discharge turntable is arranged between the waste removal mechanism and the detection mechanisms on the opposite sides of the short side. The discharge turntable is driven by the discharge Y-axis linear module to move back and forth along the Y-axis. The second X-axis vacuum manipulator transfers the chips to the discharge turntable, and the third Y-axis vacuum manipulator transfers the chips on the discharge turntable to the waste removal mechanism.

[0013] Preferably, the waste removal mechanism includes a waste platform and a waste X-axis linear module, and the waste platform is driven to the bottom of the third Y-axis vacuum manipulator by the waste X-axis linear module; the waste platform is provided with a gold finger NG groove, a chip top NG groove, a long side NG groove, a bottom NG groove, and a short side NG groove, which are respectively used to receive defective chips transferred by the third Y-axis vacuum manipulator.

[0014] The beneficial effects of the integrated machine for visual inspection of flatness appearance of the present invention are: First, the present application integrates the functions of chip code scanning detection, gold finger detection, chip top detection, long side relative sides and bottom detection, short side relative sides detection, and waste rejection, and does not need to be detected on other equipment, thus improving the efficiency of detection; Secondly, the tray conveyor line, code scanning mechanism, gold finger detection mechanism, chip top detection mechanism, long side opposite sides and bottom detection mechanism, detection transfer table, short side opposite sides detection mechanism, waste material removal mechanism and tray conveyor line are arranged to form a "mouth" shape. The chips are loaded from the loading end of the tray conveyor line, and the empty trays flow on the tray conveyor line. During the circulation process, the chips are detected in turn. After the detection, they are collected by the receiving end, making the structure compact and the layout reasonable; Thirdly, it is integrated with a code scanning NG platform and a waste rejection mechanism, which improves the efficiency of collecting defective chips; for the code scanning NG platform, the present application utilizes the cooperation of the first manipulator two-axis drive module of the first Y-axis vacuum manipulator and the code scanning X-axis linear module to realize the movement in the X-axis, Y-axis and Z-axis directions, and can directly and neatly load the code scanning NG chips into the code scanning NG slot without the need for later loading; for the waste rejection mechanism, the present application utilizes the cooperation of the first manipulator two-axis drive module of the third Y-axis vacuum manipulator and the waste X-axis linear module to realize the movement in the X-axis, Y-axis and Z-axis directions, and can neatly load the chips with gold finger defects and six-sided defects detected into the NG slot on the corresponding waste platform without the need for later loading, thereby improving the efficiency of collecting defective chips; Fourthly, since the device is in the shape of a "mouth" as a whole, the central space is relatively large, and the two long-side visual inspection cameras and the two short-side visual inspection cameras are arranged in the Y-axis direction, which makes the layout more reasonable. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a top view of this embodiment; Figure 2 is a three-dimensional diagram of this embodiment; Figure 3 This is a three-dimensional diagram of the tray conveyor line of this embodiment; Figure 4 for Figure 3 A partial enlarged view of the middle A; Figure 5 This is a three-dimensional diagram of the loading bin or receiving bin cooperating with the conveying belt in this embodiment; Figure 6 This is a three-dimensional diagram of the coordination of the tray conveyor line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator in this embodiment; Figure 7 for Figure 6 A partial enlarged view of point B in the middle; Figure 8A three-dimensional diagram showing the cooperation between the chip top detection mechanism and the second Y-axis vacuum manipulator at a first angle in this embodiment; Fig. 9 A second-angle stereoscopic view of the chip top detection mechanism and the second Y-axis vacuum manipulator cooperating with each other in this embodiment; Fig.10 It is a three-dimensional diagram of the cooperation of the detection mechanisms on the opposite sides and bottom of the long side, the detection mechanisms on the opposite sides of the short side, the first X-axis vacuum manipulator, and the second X-axis vacuum manipulator in this embodiment; Fig.11 It is a three-dimensional diagram of the waste removal mechanism and the third Y-axis vacuum manipulator in this embodiment.

[0016] In the figure: 100, material tray conveyor line; 110, conveyor belt; 120a, loading bin; 120b, receiving bin; 121, bin body; 122, support member; 123, bin body two-axis drive module; 124, lifting platform; 125, bin body lifting cylinder; 126, material tray; 200, code scanning mechanism; 210, code scanning gun; 220, code scanning NG platform; 221, code scanning NG slot; 230, code scanning X-axis linear module; 300, gold finger detection mechanism; 310, glass detection platform; 320, line scan camera; 330, line scan X-axis linear module; 400, chip top detection mechanism; 410, top visual detection camera; 420, sliding transfer table; 430, detection Y-axis linear module; 500, detection mechanism for the two opposite sides of the long side and the bottom; 510, long side visual detection camera; 520, bottom visual detection camera; 600, detection transfer station; 700, detection mechanism on both sides of the short side; 710, short side visual detection camera; 720, discharge transfer table; 730, discharge Y-axis linear module; 800, waste rejection mechanism; 810, waste platform; 820, waste X-axis linear module; 900a, first Y-axis vacuum manipulator; 900b, second Y-axis vacuum manipulator; 900c, first X-axis vacuum manipulator; 900d, second X-axis vacuum manipulator; 900e, third Y-axis vacuum manipulator; 910, two-axis drive module of first manipulator; 920, servo motor; 930, first vacuum suction head; 940, two-axis drive module of second manipulator; 950, second vacuum suction head. DETAILED DESCRIPTION

[0017] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0018] See also Figure 1 , Figure 2 As shown, the present embodiment discloses an all-in-one machine for visual inspection of flatness appearance, including a tray conveyor line 100 running along the X-axis, and a code scanning mechanism 200, a gold finger detection mechanism 300, a chip top detection mechanism 400, detection mechanisms on opposite sides of the long side and the bottom 500, a detection turntable 600, detection mechanisms on opposite sides of the short side 700, and a waste removal mechanism 800 are sequentially arranged on the same side of the tray conveyor line 100, wherein the tray conveyor line 100, the code scanning mechanism 200, the gold finger detection mechanism 300, the chip top detection mechanism 400, the detection mechanisms on opposite sides of the long side and the bottom 500, the detection turntable 600, the detection mechanisms on opposite sides of the short side 700, and the waste removal mechanism 800 are surrounded by the tray conveyor line 100 to form a "mouth" shape.

[0019] like Figure 6 As shown, the gold finger detection mechanism 300 includes a glass detection platform 310, a line scan camera 320 aimed at the glass detection platform 310, and a line scan X-axis linear module 330 for driving the line scan camera 320 to move. In this embodiment, the line scan camera 320 is located directly below the glass detection platform 310, and a first Y-axis vacuum manipulator 900a is provided above the feeding end 100a of the material tray conveyor line 100, the code scanning mechanism 200, and the glass detection platform 310 to connect the three.

[0020] like Figure 1 , Figure 2 As shown, the glass inspection platform 310 is connected to the chip top inspection mechanism 400 via a second Y-axis vacuum manipulator 900 b.

[0021] like Figure 1 , Figure 2 , Fig.10 As shown, the chip top detection mechanism 400, the two opposite sides of the long side and the bottom detection mechanism 500, and the detection turntable 600 are connected by a first X-axis vacuum manipulator 900c, and the detection turntable 600 and the detection mechanisms 700 on the two opposite sides of the short side are connected by a second X-axis vacuum manipulator 900d; a third Y-axis vacuum manipulator 900e is provided above the detection mechanisms 700 on the two opposite sides of the short side, the waste rejection mechanism 800, and the discharge end 100b of the tray conveyor line 100 to connect the three.

[0022] like Figure 1 , Figure 3 , Figure 4 , Figure 5As shown, the tray conveyor line 100 includes a belt group consisting of multiple pairs of conveyor belts 110, each pair of conveyor belts 110 includes two conveyor belts 110, and the feeding end and the receiving end of the belt group are respectively provided with a feeding bin 120a and a receiving bin 120b, and the feeding bin 120a and the receiving bin 120b both include: The warehouse body 121 is used to store the material tray 126. The material tray 126 is provided with a plurality of chip slots, each of which contains a chip. The warehouse body 121 is penetrated from top to bottom and from opposite sides. Two support members 122 are arranged on opposite sides of the bin body 121. Figure 3 , Figure 4 , Figure 5 As shown, the two support members 122 in this embodiment are located on both sides of the X-axis direction; The two-axis drive modules 123 of the two warehouse bodies respectively drive the two support members 122 to rise and fall and translate, that is, to move back and forth along the Z axis and the X axis, forcing the two support members 122 to move toward or in the opposite direction. When the two support members 122 move toward each other, the two support members 122 support the material tray 126 in the warehouse body 121. When the two support members 122 move in the opposite direction, the two support members 122 release the material tray 126 in the warehouse body 121. Lifting platform 124, such as Figure 5 As shown, the lifting platform 124 is located between the two conveying belts 110 below the warehouse body 121. The lifting platform 124 is driven and lifted by the warehouse body lifting cylinder 125. When the lifting platform 124 rises, it can extend into the warehouse body 121; when the lifting platform 124 descends, the lifting platform 124 is lower than the belt group.

[0023] When the upper bin 120a feeds the belt group of the tray conveyor line 100, a tray 126 is stacked in the bin body 121, and a plurality of chip products are placed on the tray 126. The two-axis drive modules 123 of the two bin bodies drive the two support members 122 to move toward each other, supporting the bottom tray 126 in the bin body 121. At this time, the bottom tray 126 is higher than the belt group; then, the bin body lifting cylinder 125 drives the lifting platform 124 to rise until it contacts the bottom tray 126 in the bin body 121 and no longer moves upward; the two-axis drive modules 123 of the two bin bodies drive the two support members 122 to move in the opposite direction. Move and release the material tray 126 at the bottom of the warehouse body 121; the warehouse body lifting cylinder 125 drives the lifting platform 124 to descend by the thickness of one material tray 126; then, the material tray 126 in the warehouse body 121 moves down as a whole by the thickness of one material tray 126; the two warehouse body two-axis driving modules 123 drive the two supporting members 122 to move toward each other again, and support the material tray 126 at the bottom of the warehouse body 121; at the same time, the warehouse body lifting cylinder 125 drives the lifting platform 124 to descend below the belt group, and the material tray 126 is received by the belt group, and the belt group drives the material tray 126 to move in the X-axis direction.

[0024] When the receiving bin 120b receives the material tray 126 detected on the belt group, the two bin body two-axis drive modules 123 drive the two support members 122 to move toward each other, supporting the lowermost material tray 126 in the bin body 121, and the bin body lifting cylinder 125 drives the lifting platform 124 to descend, and the lifting platform 124 is in a state lower than the belt group; when the detected material tray 126 is driven by the belt group to the top of the lifting platform 124, the bin body lifting cylinder 125 drives the lifting platform 124 to At the same time, the two-axis driving modules 123 of the two warehouse bodies drive the two supporting members 122 to move up the thickness of a material tray 126. Then, the lifting platform 124 drives the material tray 126 on the belt group to the bottom of the warehouse body 121. Then, the two supporting members 122 release the upper material tray 126 and descend to the two sides of the material tray 126 transferred to the warehouse body 121, and then move toward each other to clamp the material tray 126 transferred to the warehouse body 121, thereby completing the collection of the material tray 126.

[0025] like Figure 6 , Fig.10 , Fig.11 As shown, the first Y-axis vacuum manipulator 900a, the first X-axis vacuum manipulator 900c, the second X-axis vacuum manipulator 900d and the third Y-axis vacuum manipulator 900e all include a first manipulator two-axis drive module 910, a servo motor 920, and a first vacuum suction head 930. The servo motor 920 can move back and forth in the two-axis directions through the drive of the first manipulator two-axis drive module 910, and the first vacuum suction head 930 is driven to rotate by the servo motor 920.

[0026] like Fig. 9 As shown, the second Y-axis vacuum robot 900b includes a second robot two-axis driving module 940 and a second vacuum head 950. The second vacuum head 950 can move back and forth in the Y-axis and Z-axis directions through the drive of the second robot two-axis driving module 940.

[0027] In this embodiment, a position detection camera is arranged above the feeding end 100a of the tray conveyor line 100, and an identification hole is arranged on the chip. The position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed. If reversed, the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a is used to absorb the chip. During the rising process, the servo motor 920 of the first Y-axis vacuum manipulator 900a drives the first vacuum suction head 930 to rotate 180°, and then transports it to the code scanning mechanism 200.

[0028] like Figure 6As shown, the code scanning mechanism 200 includes a code scanning gun 210, which is fixed to one side of the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a. The scanning port of the code scanning gun 210 is aligned with the two-dimensional code of the chip on the glass detection platform 310, so as to scan the two-dimensional code of the chip on the glass detection platform 310. The code scanning gun 210 is specifically arranged to be inclined to ensure that the code scanning port can be aligned with the chip on the glass detection platform 310. Since the two-dimensional code on the chip is formed by attaching a label or laser, if If the label is not attached or the laser is incomplete, the chip is an unqualified product. In order to replace manual inspection or inspection with other inspection equipment and thus improve the inspection efficiency, the present embodiment integrates a code scanning mechanism 200. The code scanning gun 210 does not require an additional drive module and is directly fixed on one side of the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a, thereby simplifying the equipment structure. After the first Y-axis vacuum manipulator 900a transfers the chip to the glass inspection platform 310, a code scanning inspection is performed first, and then a gold finger inspection is performed.

[0029] like Figure 6 As shown, a code scanning NG platform 220 is provided on one side of the glass inspection platform 310, and a plurality of code scanning NG slots 221 are provided on the code scanning NG platform 220. The code scanning NG platform 220 is located below the code scanning gun 210. The code scanning NG platform 220 can be moved between the code scanning gun 210 and the glass inspection platform 310 by the driving of the code scanning X-axis linear module 230, that is, it is located directly below the code scanning gun 210 and directly above the glass inspection platform 310.

[0030] The first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a in this embodiment can transfer the defective chip to any position of the code scanning NG platform 220, and the code scanning X-axis linear module 230 is used to realize the movement of the code scanning NG platform 220 to any position on the X-axis, and the first manipulator two-axis driving module 910 of the first Y-axis vacuum manipulator 900a can move back and forth in the Y-axis and Z-axis directions. Therefore, through the cooperation of the code scanning X-axis linear module 230 and the first Y-axis vacuum manipulator 900a, arbitrary movement in the three-axis direction is realized. A plurality of evenly distributed code scanning NG slots 221 are provided on the code scanning NG platform 220, and each defective product can be placed in the code scanning NG slot 221, without the need for manual subsequent arrangement of the defective chips, thereby improving the efficiency of receiving defective chips.

[0031] In this embodiment, the barcode scanning X-axis linear module 230 is lower than the glass detection platform 310, and the barcode scanning NG platform 220 is higher than the glass detection platform 310. When the barcode scanning gun 210 detects that there is a problem with the two-dimensional code, the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a is first used to absorb the defective chip on the glass detection platform 310, and the barcode scanning NG platform 220 is then driven by the barcode scanning X-axis linear module 230 to move to the top of the glass detection platform 310, and is located below the defective chip. The first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a transfers the defective chip to the barcode scanning NG platform 220. In this embodiment, the barcode scanning NG platform 220 can be transferred to the top of the glass detection platform 310, and the space above the glass detection platform 310 can be fully utilized, making the structure more compact and high in space utilization.

[0032] like Figure 8 , Fig. 9 As shown, the chip top detection mechanism 400 includes: Top visual inspection camera 410; The sliding transfer table 420 is located below the top visual inspection camera 410, and the second Y-axis vacuum manipulator 900b is connected to the glass inspection platform 310 and the sliding transfer table 420; The Y-axis linear module 430 is detected, and the Y-axis linear module 430 drives the sliding turntable 420 to move back and forth along the Y-axis between the glass detection platform 310 and the two opposite sides of the long side and the bottom detection mechanism 500.

[0033] The sliding transfer table 420 is used to receive the chip transferred by the first vacuum suction head 930 of the first Y-axis vacuum robot 900a, and then moved by the sliding transfer table 420 to the top visual inspection camera 410 for inspection, and then transferred to the opposite sides of the long side and the bottom inspection mechanism 500 after inspection.

[0034] like Fig.10 As shown, the detection mechanism 500 on the two opposite sides of the long side and the bottom includes: Two long side vision inspection cameras 510, the two long side vision inspection cameras 510 are arranged opposite to each other and distributed along the Y-axis direction; A bottom visual inspection camera 520 is located below and between the two long side visual inspection cameras 510; When the first X-axis vacuum robot 900c drives the chip to move between the two long-side visual inspection cameras 510 and above the bottom visual inspection camera 520, the two long-side visual inspection cameras 510 and the bottom visual inspection camera 520 perform visual inspections on the two side surfaces and the bottom surface of the chip one by one.

[0035] Two long side visual inspection cameras 510 and one bottom visual inspection camera 520 are used to realize flatness inspection of the two side surfaces and the bottom surface of the long side of the chip, and one by one inspection is adopted, that is, after one of the long side visual inspection cameras 510 completes the inspection, the second long side visual inspection camera 510 is then inspected, and finally the bottom visual inspection camera 520 is inspected, so that the flatness data obtained by the inspection will not be inaccurate due to the interference of other light sources, thereby ensuring the accuracy of chip inspection.

[0036] In addition, since the detection Y-axis linear module 430 drives the sliding turntable 420 to move in the Y-axis direction, and the first manipulator two-axis driving module 910 of the first X-axis vacuum manipulator 900c drives the first vacuum suction head 930 to move back and forth in the X-axis and Z-axis directions, after working together, the three-axis technical effect is achieved. Even if the chip position on the sliding turntable 420 is inaccurate, the purpose of precise grasping can be achieved by adjusting the position of the chip on the Y-axis and the position of the first vacuum suction head 930 on the X-axis and Z-axis.

[0037] like Fig.10 As shown, the short side opposite sides detection mechanism 700 includes two short side visual detection cameras 710, which are arranged opposite to each other and distributed along the Y axis direction. When the second X axis vacuum manipulator 900d drives the chip to move between the two short side visual detection cameras 710, the two short side visual detection cameras 710 perform visual detection on the two sides of the chip one by one. Similarly, detection one by one can ensure that the detection is not affected by other light sources, and can ensure the accuracy of the detection.

[0038] The reason why the two long-side visual inspection cameras 510 and the two short-side visual inspection cameras 710 are arranged in the Y-axis direction is that the device is in the shape of a "mouth" as a whole, and the space in the middle is relatively large, so this layout is more reasonable. The first X-axis vacuum manipulator 900c transfers the inspected chip to the inspection transfer table 600, and the first vacuum suction head 930 of the second X-axis vacuum manipulator 900d absorbs the chip and rotates it 90° by the servo motor 920, so that the two side surfaces of the short side of the chip are aligned with the two short-side visual inspection cameras 710 distributed on the Y-axis. After completing the visual inspection of the two side surfaces of the short side of the chip, the second X-axis vacuum manipulator 900d transfers it to the waste removal mechanism 800.

[0039] like Fig.11As shown, the short side opposite side detection mechanism 700 also includes a discharge turntable 720, which is located between the waste rejection mechanism 800 and the short side visual detection camera 710. The discharge turntable 720 is driven by the discharge Y-axis linear module 730 to move back and forth along the Y-axis, and the second X-axis vacuum manipulator 900d transfers the chip to the discharge turntable 720, and the third Y-axis vacuum manipulator 900e transfers the chip on the discharge turntable 720 to the waste rejection mechanism 800. Similarly, the discharge turntable 720 moves back and forth in the Y-axis direction, and the first vacuum suction head 930 of the second X-axis vacuum manipulator 900d moves in the X-axis and Z-axis directions, so as to achieve a three-axis effect. Even if the position of the discharge turntable 720 or the position of the chip grabbing is inaccurate, it can be adjusted, and finally the chip is accurately placed on the discharge turntable 720.

[0040] like Fig.11 As shown, the waste removal mechanism 800 in this embodiment includes a waste platform 810 and a waste X-axis linear module 820. The waste platform 810 is driven to the bottom of the third Y-axis vacuum manipulator 900e by the waste X-axis linear module 820; the waste platform 810 is provided with a gold finger NG groove, a chip top NG groove, a long side NG groove, a bottom NG groove, and a short side NG groove (not shown in the figure), which are respectively used to receive defective chips transferred by the third Y-axis vacuum manipulator 900e.

[0041] After the gold finger detection and six-side detection, the defective chips are uniformly collected on the waste platform 810. It is not necessary to equip each inspection station with an NG rejection structure, which saves space. Even if the third Y-axis vacuum manipulator 900e can only move on the Y-axis and Z-axis, the waste platform 810 with the X-axis movement can also achieve the effect of three axes, and the defective chips can be placed in the corresponding NG slot. The chips without defects are rotated 90° in the opposite direction by the third Y-axis vacuum manipulator 900e and placed in the material tray 126 above the belt group. After the material tray 126 is filled, it is transported to the receiving bin 120b by the belt group for collection.

[0042] In some embodiments, in order to improve the applicability of the device, the following settings may also be performed: The top visual inspection camera 410 can be adjusted in the X-axis and Z-axis directions through multiple sets of matching dovetail groove sliders and bolts; Both long edge visual inspection cameras 510 can be adjusted in the Y-axis direction through matching dovetail slides and bolts; The bottom visual inspection camera 520 can be adjusted in the X-axis and Z-axis directions through multiple sets of matching dovetail groove sliders and bolts; The inspection turntable 600 can be adjusted in the Z-axis direction through the matching dovetail slide and bolts; Both short-side visual inspection cameras 710 can be adjusted in the Y-axis direction through matching dovetail slides and bolts.

[0043] The working principle of this embodiment is: The loading bin 120a supplies a tray 126 filled with chips to the loading end of the tray conveyor line 100. When the tray 126 is transferred to the bottom of the first Y-axis vacuum manipulator 900a, the position detection camera first detects whether the polarity of the chips in the tray 126 is reversed. If it is reversed, the first Y-axis vacuum manipulator 900a grabs the chip, rotates it 180°, and transfers it to the glass inspection platform 310; if it is not reversed, the first Y-axis vacuum manipulator 900a directly transfers a chip to the glass inspection platform 310; then, the barcode scanner 210 scans the QR code of the chip on the glass inspection platform 310. If the code is NG, the NG platform is scanned. 220 moves to the top of the glass inspection platform 310, and the first Y-axis vacuum robot 900a transfers the chip with NG code scanning to the NG code scanning platform 220, and the NG code scanning platform 220 is reset; if there is no NG code scanning, the line scanning camera 320 detects the gold finger at the bottom of the chip; after the detection, the system records whether it is NG or not, and the second Y-axis vacuum robot 900b transfers it to the sliding transfer table 420, and the sliding transfer table 420 then transfers the chip to the bottom of the top visual inspection camera 410 for detection; after the top visual inspection camera 410 detects, the system records whether it is NG or not, and then the sliding transfer table 420 transfers it to the first X-axis vacuum robot 900c At the bottom, the first X-axis vacuum robot 900c absorbs and grabs the chip, and transfers it to the two opposite sides of the long side and the bottom detection mechanism 500, and detects the two sides and the bottom of the long side of the chip one by one. After the detection, the system records whether it is NG or not. The first X-axis vacuum robot 900c transfers the chip to the detection transfer table 600, and the second X-axis vacuum robot 900d transfers the chip on the detection transfer table 600 to the detection mechanisms 700 on the two opposite sides of the short side. Two short side visual detection cameras 710 detect the two sides of the short side one by one. After the detection, the system records whether it is NG or not. The second X-axis vacuum robot 900d transfers the chip to the discharge transfer table 720 , the third Y-axis vacuum manipulator 900e places the NG chips recorded by the system in the corresponding gold finger NG slot, chip top NG slot, long side NG slot, bottom NG slot, and short side NG slot in sequence, and directly loads them onto the tray; if there is no NG, the third Y-axis vacuum manipulator 900e directly transports them to the empty tray 126 at the receiving end of the tray conveyor line 100. At this time, the detection of one chip is completed. After all the chips in the tray 126 at the loading end are taken away for detection, the belt group of the tray conveyor line 100 transports the empty tray toward the receiving end. After the empty tray 126 at the receiving end is completely filled, the receiving bin 120b collects the full tray.

[0044] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A flatness appearance visual inspection integrated machine, characterized in that: A material tray conveyor line (100) extending in an X-axis direction is provided on the same side of the material tray conveyor line (100), and a code scanning mechanism (200) for forming a "mouth" shape with the material tray conveyor line (100), a gold finger detection mechanism (300), a chip top detection mechanism (400), two opposite sides of the long side and a bottom detection mechanism (500), a detection transfer table (600), two opposite sides of the short side detection mechanisms (700), and a waste material removal mechanism (800) are sequentially arranged; The gold finger detection mechanism (300) comprises a glass detection platform (310), a line scan camera (320) aimed at the glass detection platform (310), and a line scan X-axis linear module (330) for driving the line scan camera (320) to move; A first Y-axis vacuum manipulator (900a) is provided above the feeding end (100a) of the tray conveyor line (100), the code scanning mechanism (200), and the glass detection platform (310) for connecting the three. The glass detection platform (310) is connected to the chip top detection mechanism (400) via a second Y-axis vacuum manipulator (900b); The chip top detection mechanism (400), the two opposite sides of the long side and the bottom detection mechanism (500), and the detection transfer table (600) are connected via a first X-axis vacuum manipulator (900c); The detection transfer table (600) and the detection mechanisms (700) on the two opposite sides of the short side are connected via a second X-axis vacuum manipulator (900d); A third Y-axis vacuum manipulator (900e) is provided above the detection mechanisms (700) on the opposite sides of the short side, the waste rejection mechanism (800), and the material discharge end (100b) of the material tray conveyor line (100) for connecting the three.

2. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The tray conveyor line (100) comprises a belt group consisting of a plurality of pairs of conveyor belts (110), wherein a loading bin (120a) and a receiving bin (120b) are respectively provided at a loading end and a receiving end of the belt group, and the loading bin (120a) and the receiving bin (120b) both comprise: A bin body (121) is used to store the material tray (126), and the bin body (121) penetrates from top to bottom and from two opposite sides; Two support members (122), the support members (122) being arranged on two opposite sides of a portion through which the bin body (121) passes; Two warehouse body two-axis driving modules (123) respectively drive the two support members (122) to rise and fall and to move horizontally, forcing the two support members (122) to move towards or in opposite directions; when the two support members (122) move towards each other, the two support members (122) support the material tray (126) in the warehouse body (121); when the two support members (122) move in opposite directions, the two support members (122) release the material tray (126) in the warehouse body (121); A lifting platform (124), the lifting platform (124) is located between two conveying belts (110) below the warehouse body (121), the lifting platform (124) is driven by a warehouse body lifting cylinder (125) to be raised and lowered, and when the lifting platform (124) is raised, it can extend into the warehouse body (121), and when the lifting platform (124) is lowered, the lifting platform (124) is lower than the belt group.

3. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The first Y-axis vacuum manipulator (900a), the first X-axis vacuum manipulator (900c), the second X-axis vacuum manipulator (900d), and the third Y-axis vacuum manipulator (900e) all comprise a first manipulator two-axis drive module (910), a servo motor (920), and a first vacuum suction head (930); the servo motor (920) can move back and forth in two-axis directions through the drive of the first manipulator two-axis drive module (910); and the first vacuum suction head (930) is driven to rotate by the servo motor (920); The second Y-axis vacuum manipulator (900b) comprises a second manipulator two-axis driving module (940) and a second vacuum suction head (950), and the second vacuum suction head (950) can move back and forth in the Y-axis and Z-axis directions through the drive of the second manipulator two-axis driving module (940); The detection turntable (600) can be adjusted in the Z-axis direction through matching dovetail groove sliders and bolts.

4. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: A position detection camera is arranged above the feeding end (100a) of the tray conveyor line (100), and an identification hole is arranged on the chip. The position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed.

5. The integrated machine for visual inspection of flatness appearance according to claim 3, characterized in that: The code scanning mechanism (200) comprises a code scanning gun (210), the code scanning gun (210) being fixed to one side of a first vacuum suction head (930) of a first Y-axis vacuum manipulator (900a), and a scanning port of the code scanning gun (210) being aligned with a two-dimensional code of a chip on a glass detection platform (310); A code scanning NG platform (220) is provided on one side of the glass inspection platform (310), and a plurality of code scanning NG slots (221) are provided on the code scanning NG platform (220). The code scanning NG platform (220) can be moved between the code scanning gun (210) and the glass inspection platform (310) by being driven by a code scanning X-axis linear module (230).

6. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The chip top detection mechanism (400) comprises: A top visual inspection camera (410), wherein the top visual inspection camera (410) can be adjusted in the X-axis and Z-axis directions through a plurality of sets of matching dovetail groove sliders and bolts; A sliding transfer table (420), wherein the sliding transfer table (420) is located below the top visual inspection camera (410), and the second Y-axis vacuum manipulator (900b) is connected to the glass inspection platform (310) and the sliding transfer table (420); A detection Y-axis linear module (430) is provided, wherein the detection Y-axis linear module (430) drives the sliding turntable (420) to move back and forth along the Y-axis between the glass detection platform (310) and the two opposite sides of the long side and the bottom detection mechanism (500).

7. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The long side opposite sides and bottom detection mechanism (500) comprises: Two long side visual inspection cameras (510), the two long side visual inspection cameras (510) are arranged opposite to each other and distributed along the Y-axis direction, and the two long side visual inspection cameras (510) are both adjustable in the Y-axis direction through matching dovetail groove sliders and bolts; A bottom visual inspection camera (520) is located below and between the two long side visual inspection cameras (510), and the bottom visual inspection camera (520) can be adjusted in the X-axis and Z-axis directions through a plurality of sets of matching dovetail groove sliders and bolts; When the first X-axis vacuum manipulator (900c) drives the chip to move between the two long-side visual inspection cameras (510) and above the bottom visual inspection camera (520), the two long-side visual inspection cameras (510) and the bottom visual inspection camera (520) perform visual inspections on the two side surfaces and the bottom surface of the chip one by one.

8. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The short side relative side detection mechanism (700) comprises two short side visual detection cameras (710), the two short side visual detection cameras (710) are arranged opposite to each other and distributed along the Y-axis direction, when the second X-axis vacuum manipulator (900d) drives the chip to move between the two short side visual detection cameras (710), the two short side visual detection cameras (710) perform visual detection on the two side surfaces of the chip one by one; the two short side visual detection cameras (710) can be adjusted in the Y-axis direction through matching dovetail groove sliders and bolts.

9. The integrated machine for visual inspection of flatness appearance according to claim 8, characterized in that: The short side opposite side detection mechanism (700) further comprises a discharge turntable (720), wherein the discharge turntable (720) is located between the waste rejection mechanism (800) and the short side visual detection camera (710), and the discharge turntable (720) is driven by the discharge Y-axis linear module (730) to move back and forth along the Y-axis, and the second X-axis vacuum manipulator (900d) transfers the chip to the discharge turntable (720), and the third Y-axis vacuum manipulator (900e) transfers the chip on the discharge turntable (720) to the waste rejection mechanism (800).

10. The integrated machine for visual inspection of flatness appearance according to claim 1, characterized in that: The waste rejection mechanism (800) comprises a waste platform (810) and a waste X-axis linear module (820); the waste platform (810) is driven to the position directly below the third Y-axis vacuum manipulator (900e) by the waste X-axis linear module (820); The waste platform (810) is provided with a gold finger NG groove, a chip top NG groove, a long side NG groove, a bottom NG groove, and a short side NG groove, which are respectively used to receive defective chips transferred by the third Y-axis vacuum robot (900e).

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