Energy-saving type double-air-duct double-control constant-temperature clean air supply system
By adopting an energy-saving dual air duct dual control constant temperature and clean air supply system in semiconductor manufacturing equipment, using the design of heat exchanger, independent air duct and EFU air duct, the high-precision temperature and cleanliness control in local areas of the equipment is solved. The problem has achieved optimization of space and energy consumption, and met the high-precision temperature and cleanliness requirements.
Patent Information
- Application Number
- CN202411390389.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-08
- Publication Date
- 2024-12-31
AI Technical Summary
In semiconductor manufacturing equipment, in order to achieve high-precision temperature and cleanliness control in local areas of the equipment, it is difficult for the prior art to add a one-way air supply system under conditions of limited space and energy consumption, resulting in difficult to meet the internal temperature and cleanliness of the equipment. High precision requirements.
The constant temperature and clean air supply system adopts energy-saving dual air duct dual control, including heat exchanger, air inlet air duct, independent air duct and EFU air duct. The two air outlets are controlled through independent fans and EFU fans, and closed-loop heating components are used. and high-efficiency filters enable precise control of temperature and cleanliness, reducing space occupancy and energy consumption.
It realizes that while adding a one-way air supply system to the original equipment, it reduces space occupation and energy consumption, ensures the cleanliness and temperature accuracy of the air outlet, and the two-way systems are independent of the closed-loop temperature control to meet high-precision requirements.
Smart Images
Figure CN119230454A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to an energy-saving double-air-duct double-control constant-temperature clean air supply system. Background Art
[0002] In the semiconductor industry, there are many devices used in various processes for semiconductor manufacturing. Control of the microenvironment inside the equipment is a routine requirement to meet the internal cleanliness and improve product yield. With the improvement of the accuracy level, the temperature control requirements are increased inside the relevant important process equipment to ensure that the temperature inside the entire equipment cavity is controlled with high precision. However, as the requirements of each process are getting higher and higher, in addition to controlling the overall environment and cleanliness inside the process equipment, sometimes it is also necessary to control the temperature and cleanliness of a certain local area inside the equipment. For example: in a wafer processing scenario, first of all, it is necessary to ensure the temperature accuracy requirements and cleanliness requirements inside the equipment, such as within 25±0.1℃, and the internal cleanliness level ISO CLASS1; then the wafers outside the equipment will be sent in and placed on a frame, which will have about 10 layers, such as one piece will be sent out every 3 minutes, and then another piece will come in from the outside. It is required to blow the surface temperature of the wafer to 25 plus or minus 0.1 in 3 minutes. Therefore, a separate air supply is required to meet this requirement.
[0003] In order to achieve overall temperature and cleanliness control inside the equipment, the current conventional practice is to add an EFU filter unit on the top of the equipment, and then integrate a temperature control system on the top of the EFU to ensure the cleanliness and temperature requirements of the filtered air below the EFU, so as to achieve constant temperature and cleanliness requirements inside the equipment. However, in order to achieve the temperature accuracy and cleanliness accuracy requirements of the local key production areas inside the equipment, an additional air supply system is added to ensure both cleanliness and temperature control. It is necessary to add components to the original temperature system, but the space size of the equipment is often limited, the space that can be used inside is very limited, and how to reduce energy consumption based on the original power consumption is the biggest difficulty. Summary of the invention
[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide an energy-saving dual-duct dual-control constant temperature clean air supply system to solve the technical problem of adding an air supply system to the original equipment with limited space and power consumption.
[0005] To achieve the above object, the present invention is implemented by adopting the following technical solutions: The present invention provides an energy-saving dual-duct dual-control constant temperature clean air supply system, comprising: Heat exchanger; An air inlet duct, one end of which is connected to the air outlet of the heat exchanger, and the other end of which is provided with a first air outlet and a second air outlet; the second air outlet is located downstream of the first air outlet; An independent air duct, with an independent fan built in, one end of the independent air duct connected to the first air outlet, and the other end of the independent air duct connected to the first target area; The EFU air duct has an EFU fan built in it, one end of the EFU air duct is connected to the second air outlet, and the other end is connected to the second target area.
[0006] Optionally, the air inlet duct includes an air inlet section and an air outlet section, the ventilation cross section of the air inlet section gradually decreases from the heat exchanger to the air outlet section, and the ventilation cross section of the air outlet section is fixed.
[0007] Optionally, the air inlet duct includes a top plate, a side plate and a bottom plate, the top plate and the bottom plate are arranged opposite to each other in the upper and lower directions, and the two side plates are sealed to both sides of the top plate and the bottom plate; in the air inlet section, the two side plates are arranged obliquely, and in the air outlet section, the two side plates are arranged in parallel.
[0008] Optionally, the air outlet of the independent air duct is provided with a first high-efficiency filter, and the air outlet of the EFU air duct is provided with a second high-efficiency filter.
[0009] Optionally, a first closed-loop heating component is provided in the independent air duct, and the first closed-loop heating component includes a first heater and a first temperature sensor provided at the air inlet and the air outlet of the independent air duct, and the first temperature sensor is used to perform closed-loop control on the first heater; a second closed-loop heating component is provided in the EFU air duct, and the second closed-loop heating component includes a second heater and a second temperature sensor provided at the air inlet and the air outlet of the EFU air duct, and the second temperature sensor is used to perform closed-loop control on the second heater.
[0010] Optionally, the first target area is located within the second target area.
[0011] Optionally, the air volume and power consumption of the independent fan are both smaller than those of the EFU fan.
[0012] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides an energy-saving dual-duct dual-control constant temperature clean air supply system, which adds an air supply system to the original equipment. While adding the air supply system, the space occupancy is reduced through the design of the air duct, while only slightly increasing the energy consumption, noise and vibration. The equipment after adding the air supply system realizes dual-channel air outlet, and ensures the cleanliness requirements and temperature accuracy requirements of the air outlet; the two fans can set the speed independently, and the two systems have independent temperature closed-loop control, which ensures the accuracy requirements of the two air outlets. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a structural top view of the energy-saving dual-duct dual-control constant temperature clean air supply system provided by an embodiment of the present invention; Figure 2 This is a structural front view of the energy-saving dual-duct dual-control constant temperature clean air supply system provided by an embodiment of the present invention; The markings in the figure are: 1. Heat exchanger; 2. Air inlet duct; 21. First air outlet; 22. Second air outlet; 3. Independent air duct; 31. Independent fan; 32. First high efficiency filter; 4. EFU air duct; 41. EFU fan; 42. Second high efficiency filter. DETAILED DESCRIPTION
[0014] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.
[0015] Embodiment 1:
[0016] like Figure 1 and 2 As shown, the embodiment of the present invention provides an energy-saving dual-duct dual-control constant temperature clean air supply system, including a heat exchanger 1, an air inlet duct 2, an independent air duct 3 and an EFU air duct 4; all the air in the system enters through the heat exchanger 1, and the function of the heat exchanger 1 is to eliminate the fluctuation of the air inlet temperature to a smaller fluctuation, such as reducing the fluctuation of the air inlet from ±1°C to ±0.2°C. As a first-level temperature control system. The heat exchanger 1 will automatically make relevant adjustments according to the air temperature after passing through to ensure the control accuracy of the first-level temperature.
[0017] One end of the air inlet duct 2 is connected to the air outlet of the heat exchanger 1, and the other end is provided with a first air outlet 21 and a second air outlet 22; the second air outlet 22 is located downstream of the first air outlet 21. One end of the independent air duct 3 is connected to the first air outlet 21, and the other end is connected to the first target area; the independent air duct 3 has an independent fan 31 built in; one end of the EFU air duct 4 is connected to the second air outlet 22, and the other end is connected to the second target area; the EFU air duct 4 has an EFU fan 41 built in.
[0018] After passing through the heat exchanger 1, the wind can only continue to flow along the air duct formed by the air inlet duct 2. The power source of the entire design system consists of two fans, one is the EFU fan 41, which has a large air volume and power consumption, and generates a large wind pressure. The other is the independent fan 31, which is a fan with small air volume and low power consumption, and has a small pressure.
[0019] The wind is driven by the suction force of the two fans through the air inlet duct 2, because the design of the air inlet duct 2 is a special design, that is, the second air outlet 22 is located downstream of the first air outlet 21. In the actual setting, the air inlet duct 2 includes an air inlet section and an air outlet section. The air inlet side of the air inlet section needs to fully receive the air outlet of the heat exchanger 1, so the opening is relatively large, and the ventilation cross-section of the air inlet section gradually decreases from the heat exchanger 1 to the air outlet section, and the ventilation cross-section of the air outlet section is fixed. The entire air inlet duct 2 is composed of a top plate and a bottom plate, and the two sides are sealed by side plates. The side plates of the air inlet section are inclined, and the side plates of the air outlet section are parallel. Such a setting ensures that the incoming wind first passes through the air inlet of the independent fan 31, and then reaches the air inlet of the EFU fan 41. The advantage of this is that the rotation speed of the independent fan 31 can be reduced, thereby reducing energy consumption and noise vibration for the system. Because the suction force of the EFU fan 41 is much greater than that of the independent fan 31, if the wind passes through the air inlet of the EFU fan 41 first, the wind will be taken away by the EFU fan 41, and the air volume obtained by the independent fan 31 under the same speed condition will become smaller, so the speed needs to be increased to barely obtain the required air volume. However, the result is increased energy consumption, increased noise, and increased vibration.
[0020] The air entering independent air duct 3 and EFU air duct 4 both passes through heat exchanger 1, and the air from heat exchanger 1 is the air whose temperature has been regulated in the first season. Compared with the system that only needs to meet the overall environment, adding a small fan to supply air actually utilizes the design of the original existing components and realizes one-level regulation. Here, the required functions can be achieved without adding too many components, which can save space, improve space utilization, and increase costs less.
[0021] After the wind is sucked in by the independent fan 31 and the EFU fan 41, the first-level temperature control has been completed, but the wind continues to flow downward through the independent fan 31 and the EFU fan 41 to the final filtered air outlet. How to ensure that the air outlet temperatures of both meet a high level of accuracy requirements is a difficult point, because the fans, materials, areas, air volumes and other factors that the two winds contact are different, so the heat exchange must be different, and it is impossible to ensure that the final air outlet temperatures of the two routes meet the set value and fluctuation accuracy. In order to solve the above problems, a first closed-loop heating component is provided in the independent air duct 3, and the first closed-loop heating component includes a first heater and a first temperature sensor arranged at the air inlet and outlet of the independent air duct 3, and the first temperature sensor is used to perform closed-loop control on the first heater; a second closed-loop heating component is provided in the EFU air duct 4, and the second closed-loop heating component includes a second heater and a second temperature sensor arranged at the air inlet and outlet of the EFU air duct 4, and the second temperature sensor is used to perform closed-loop control on the second heater. The closed-loop stepless regulation is used to perform real-time closed-loop regulation of the air in two directions, which can meet the requirements of high-precision temperature control.
[0022] The air outlet of the independent air duct 3 is provided with a first high efficiency filter 32, and the air outlet of the EFU air duct 4 is provided with a second high efficiency filter 42. The filter is designed at the end of the air outlet to ensure the cleanliness level of the air outlet to the greatest extent.
[0023] The first target area is located within the second target area. To solve the problem of high-demand supporting equipment, in addition to meeting the overall temperature and cleanliness inside the equipment, air supply control of a certain important control area is also required.
[0024] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.
[0025] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.
Claims
1. An energy-saving dual-duct dual-control constant temperature clean air supply system, characterized in that: include: Heat exchanger; An air inlet duct, one end of which is connected to the air outlet of the heat exchanger, and the other end of which is provided with a first air outlet and a second air outlet; the second air outlet is located downstream of the first air outlet; An independent air duct, with an independent fan built in, one end of the independent air duct connected to the first air outlet, and the other end of the independent air duct connected to the first target area; The EFU air duct has an EFU fan built in it, one end of the EFU air duct is connected to the second air outlet, and the other end is connected to the second target area.
2. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 1 is characterized in that: The air inlet duct includes an air inlet section and an air outlet section. The ventilation cross section of the air inlet section gradually decreases from the heat exchanger to the air outlet section, and the ventilation cross section of the air outlet section is fixed.
3. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 2 is characterized in that: The air inlet duct includes a top plate, a side plate and a bottom plate, the top plate and the bottom plate are arranged opposite to each other up and down, and the two side plates are sealed to both sides of the top plate and the bottom plate; in the air inlet section, the two side plates are arranged obliquely, and in the air outlet section, the two side plates are arranged in parallel.
4. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 1 is characterized in that: The air outlet of the independent air duct is provided with a first high efficiency filter, and the air outlet of the EFU air duct is provided with a second high efficiency filter.
5. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 1 is characterized in that: A first closed-loop heating component is arranged in the independent air duct, and the first closed-loop heating component includes a first heater and a first temperature sensor arranged at the air inlet and the air outlet of the independent air duct, and the first temperature sensor is used to perform closed-loop control on the first heater; a second closed-loop heating component is arranged in the EFU air duct, and the second closed-loop heating component includes a second heater and a second temperature sensor arranged at the air inlet and the air outlet of the EFU air duct, and the second temperature sensor is used to perform closed-loop control on the second heater.
6. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 1 is characterized in that: The first target area is located within the second target area.
7. The energy-saving dual-duct dual-control constant temperature clean air supply system according to claim 1 is characterized in that: The air volume and power consumption of the independent fan are both smaller than those of the EFU fan.