Waste gas collecting and treating device

Abstract

The invention relates to the technical field of glass manufacturing, and discloses a waste gas collection and treatment device which is applied to a TCO coated glass online preparation system and comprises a waste collection tower used for collecting waste gas generated by the TCO coated glass online preparation system, and a gas outlet of the waste collection tower is communicated with an incinerator through a first pipeline; a gas outlet of the incinerator communicates with a gas inlet in the lower end of the washing tower through a second pipeline, and the washing tower is provided with a spraying assembly used for spraying an alkaline solution; a gas outlet of the washing tower communicates with a waste gas qualification monitor through a third pipeline, a first gas outlet of the waste gas qualification monitor communicates with an exhaust pipe, and a second gas outlet of the waste gas qualification monitor communicates with the incinerator through a circulating pipe. According to the invention, the requirements of standards such as the Emission Standard of Air Pollutants for Industrial Kilns (T / SBX 12-2018) in 2018, the Emission Standard of Air Pollutants for Glass Industry (GB 26453-2022) in 2022 and the like can be met.

Description

Technical Field

[0001] The invention relates to the technical field of glass manufacturing, and in particular to a waste gas collection and treatment device. Background Art

[0002] As the demand for thin-film battery modules in the field of photovoltaic building integration (BIPV) continues to increase, the demand for transparent conductive oxide coated glass (TCO coated glass) for photovoltaics continues to increase; TCO coated glass is usually prepared by an online preparation system. During the preparation process, silane, ethylene, carbon dioxide, monobutyltin trichloride (MBTC), trifluoroacetic acid, ethyl acetate and nitrogen are mainly used as the main raw materials. During the preparation process, waste gas containing hydrogen fluoride, hydrogen, methane, ethane, ethylene, tin oxide, nitrogen dioxide, carbon dioxide and other intermediate compounds will be generated; At present, most of the online preparation systems for TCO coated glass only perform simple treatment on the generated waste gas before discharging it, which cannot meet the requirements of the 2018 "Emission Standards for Air Pollutants from Industrial Kilns" (T / SBX 12-2018) and the 2022 "Emission Standards for Air Pollutants from Glass Industry" (GB 26453-2022). Therefore, there is an urgent need for a waste gas treatment system that can effectively treat and then discharge the waste gas to meet the 2018 "Emission Standards for Air Pollutants from Industrial Kilns" (T / SBX 12-2018), 2022 "Glass Industry Air Pollutant Emission Standard" (GB 26453-2022) and other standards. Summary of the invention

[0003] In view of this, the present invention provides a waste gas collection and treatment device to solve the problem of the lack of an effective method for treating the waste gas generated by the TCO coated glass online preparation system to meet the requirements of the 2018 "Industrial Kiln Air Pollutant Emission Standard" (T / SBX 12-2018), the 2022 "Glass Industry Air Pollutant Emission Standard" (GB 26453-2022) and other standards.

[0004] The present invention provides a waste gas collection and treatment device, which is applied to a TCO coated glass online preparation system. The waste gas collection and treatment device comprises:

[0005] Waste collection tower, the air inlet is used to collect waste gas generated by the TCO coated glass online preparation system;

[0006] An incinerator, connected to the gas outlet of the waste collection tower through a first pipeline, and used to burn combustibles in the waste gas;

[0007] A washing tower, the air inlet at the lower end of which is connected to the air outlet of the incinerator through a second pipeline;

[0008] A spray assembly is provided in the scrubber and is used to spray an alkaline solution to neutralize the acidic medium in the exhaust gas;

[0009] The waste gas qualified monitor is connected to the gas outlet of the washing tower through a third pipeline, the first gas outlet of the waste gas qualified monitor is connected to the exhaust pipe, and the second gas outlet of the waste gas qualified monitor is connected to the incinerator through a circulation pipe.

[0010] The exhaust gas collection and treatment device according to the present invention has at least the following beneficial effects:

[0011] An incinerator, a washing tower and a qualified waste gas monitor are arranged in sequence through a pipeline along the conveying direction of the waste gas, and the second gas outlet of the qualified waste gas monitor is connected to the incinerator through a circulation pipe; the waste gas collected in the waste collecting tower first enters the incinerator for combustion, which can effectively decompose the harmful substances in the waste gas, and then enters the washing tower to contact with the alkaline solution sprayed by the spray component, so that the acid medium in the waste gas is neutralized with the alkaline solution, the pH value of the waste gas is increased, and the total amount of pollutant emissions is reduced; finally, the qualified waste gas monitor is entered to detect various index parameters of the waste gas. If the monitoring results show that the various indicators of the waste gas meet the emission standards, the exhaust pipe is opened to discharge into the atmosphere. If the monitoring results show that the various indicators of the waste gas do not fully meet the emission standards, the exhaust pipe is closed and the circulation pipe is started to recirculate the waste gas through the incinerator and the washing tower for waste gas treatment in turn, until the various indicators of the waste gas meet the emission standards and then are discharged into the atmosphere, ensuring that the 2018 "Emission Standards for Air Pollutants from Industrial Kilns" (T / SBX 12-2018), 2022 "Glass Industry Air Pollutant Emission Standard" (GB 26453-2022) and other standards.

[0012] In an optional embodiment, the spray assembly includes an alkali solution pool, the alkali solution pool is connected to an infusion tube via a water pump, the infusion tube extends into the washing tower at one end away from the alkali solution pool and is provided with a plurality of spray ports.

[0013] In an optional embodiment, the bottom of the washing tower is connected to the alkali solution pool through a liquid return pipe.

[0014] In an optional embodiment, a leakage layer is provided in the washing tower, and the leakage layer is located below the spray port.

[0015] In an optional embodiment, the first pipeline is provided with a dust filter and a cooler;

[0016] And / or, the first pipeline is provided with a check valve and an explosion-proof fan in sequence along the conveying direction of the exhaust gas.

[0017] In an optional embodiment, the second pipe is provided with a heat exchanger, and the heat exchanger is used for allowing the exhaust gas to flow through for cooling.

[0018] In an optional implementation, a temperature sensor is disposed in the incinerator, and the temperature sensor is electrically connected to the incinerator.

[0019] In an optional embodiment, the air inlet of the waste collection tower is connected to a waste gas collection pipe, and the waste gas collection pipe is used to connect to the waste gas pipeline of the TCO coated glass online preparation system; the waste gas collection pipe is provided with an induced draft fan, a dust collector and a compressed air soot blower in sequence along the conveying direction of the waste gas.

[0020] In an optional embodiment, a frustum-shaped gas collecting hood is provided in the waste collecting tower. The gas collecting hood is located below the air inlet of the waste collecting tower, and a porous plate is provided at the outlet of the lower end of the gas collecting hood.

[0021] In an optional embodiment, the third pipeline is provided with an activated carbon adsorption box, and an activated carbon adsorption layer is provided in the activated carbon adsorption box. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic structural diagram of a waste gas collection and treatment device according to an embodiment of the present invention.

[0024] Description of reference numerals:

[0025] 100-waste collection tower, 110-gas collection hood, 120-waste gas concentration detector;

[0026] 200-incinerator, 210-first pipeline, 220-dust filter, 230-check valve, 240-explosion-proof fan, 250-temperature sensor, 260-cooler;

[0027] 300-washing tower, 310-second pipeline, 320-leakage layer, 330-heat exchanger;

[0028] 400-exhaust gas qualified monitor, 410-third pipeline, 420-exhaust pipe, 430-circulation pipe;

[0029] 510-alkaline solution pool, 520-water pump, 530-infusion pipe, 540-return pipe, 550-spray port, 560-spray pipe;

[0030] 600-exhaust gas collection pipe, 610-induced draft fan, 620-dust collector, 630-compressed air soot blower;

[0031] 700-activated carbon adsorption box, 710-activated carbon adsorption layer. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0033] In the description of this embodiment, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this embodiment and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting this embodiment. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0034] In the description of this embodiment, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this embodiment can be understood according to specific circumstances.

[0035] In the process of preparing TCO coated glass using an online preparation system, waste gas containing hydrogen fluoride, hydrogen, methane, ethane, ethylene, tin oxide, nitrogen dioxide, carbon dioxide and other intermediate compounds will be generated; the waste gas treatment equipment of the online preparation system of TCO coated glass in the related art is designed with reference to the waste gas treatment system used in the photovoltaic cell industry, but due to the composition of the raw materials for preparing TCO coated glass and the combustibles and the proportion of combustibles in the waste gas generated by the preparation, which are different from those in the photovoltaic cell industry; the waste gas treatment equipment of the online preparation system of TCO coated glass in the related art is difficult to effectively treat the waste gas generated in the preparation process of TCO coated glass in actual application, and cannot meet the requirements of the 2018 "Industrial Furnace Air Pollutant Emission Standard" (T / SBX 12-2018), the 2022 "Glass Industry Air Pollutant Emission Standard" (GB 26453-2022) and other standards. In order to solve the above technical defects, a waste gas collection and treatment device according to an embodiment of the present invention is provided.

[0036] Combine the following Figure 1 , describing an embodiment of the present invention.

[0037] According to an embodiment of the present invention, a waste gas collection and treatment device is provided, which is applied to a TCO coated glass online preparation system, and the waste gas collection and treatment device includes a waste collection tower 100, and the air inlet of the waste collection tower 100 is used to collect the waste gas generated by the TCO coated glass online preparation system; the air outlet of the waste collection tower 100 is connected to an incinerator 200 through a first pipe 210, and the incinerator 200 is used to burn combustibles in the waste gas; the air outlet of the incinerator 200 is connected to the air inlet at the lower end of a washing tower 300 through a second pipe 310, and the washing tower 300 is provided with a spray assembly, and the spray assembly is used to spray an alkaline solution to neutralize the acidic medium in the waste gas; the air outlet of the washing tower 300 is connected to a waste gas qualified monitor 400 through a third pipe 410, and the first air outlet of the waste gas qualified monitor 400 is connected to an exhaust pipe 420, and the second air outlet of the waste gas qualified monitor 400 is connected to the incinerator 200 through a circulation pipe 430.

[0038] The waste gas collection and treatment device of this embodiment is provided with an incinerator 200, a washing tower 300 and a waste gas qualified monitor 400 in sequence through a pipeline along the conveying direction of the waste gas, and the second gas outlet of the waste gas qualified monitor 400 is connected to the incinerator 200 through a circulation pipe 430; the waste gas collected in the waste collection tower 100 first enters the incinerator 200 for combustion, which can effectively decompose the harmful substances in the waste gas, and then enters the washing tower 300 to contact with the alkaline solution sprayed by the spray component, so that the acidic medium in the waste gas is neutralized with the alkaline solution, thereby increasing the pH value of the waste gas and reducing pollution. The total amount of waste gas emissions; finally, the waste gas enters the waste gas qualification monitor 400 to detect various index parameters of the waste gas. If the monitoring results show that the various indicators of the waste gas meet the emission standards, the exhaust pipe 420 is opened to discharge it into the atmosphere. If the monitoring results show that the various indicators of the waste gas do not fully meet the emission standards, the exhaust pipe 420 is closed and the circulation pipe 430 is started to recirculate the waste gas through the incinerator 200 and the washing tower 300 in turn for waste gas treatment until the various indicators of the waste gas meet the emission standards and then are discharged into the atmosphere, ensuring that the requirements of the 2018 "Emission Standards for Air Pollutants from Industrial Kilns" (T / SBX 12-2018) and the 2022 "Emission Standards for Air Pollutants from Glass Industry" (GB 26453-2022) and other standards are met.

[0039] It should be noted that the exhaust gas compliance monitor 400 adopts the existing SYS-CE-3 flue gas emission continuous monitoring system on the market.

[0040] It can be understood that a pump body is provided on the circulation pipe 430, and the pump body starts and stops according to the instructions of the exhaust gas qualification monitor 400, so that when the monitoring results show that various indicators of the exhaust gas do not fully meet the emission standards, the exhaust gas is recirculated and passed through the incinerator 200 and the washing tower 300 in sequence for exhaust gas treatment.

[0041] The specific structure of the spray assembly of this embodiment is described in detail below.

[0042] In some embodiments, the spray assembly includes an alkali liquid pool 510, the alkali liquid pool 510 is connected to a liquid infusion pipe 530 through a water pump 520, and one end of the liquid infusion pipe 530 away from the alkali liquid pool 510 extends into the washing tower 300 to form a spray pipe 560, and a plurality of spray ports 550 are provided at the lower end of the spray pipe 560, and the spray ports 550 are configured as hollow cone nozzles. During the waste gas treatment process, the water pump 520 is started to pump the alkaline solution in the alkali liquid pool 510 to the spray ports 550 of the spray pipe 560 connected to the liquid infusion pipe 530 for uniform spraying, so that the alkaline solution moves from top to bottom and collides with the waste gas flowing from bottom to top, so that the acidic medium in the waste gas treated by the incinerator 200 is fully neutralized with the alkaline solution, the pH value of the waste gas is increased, and the total amount of pollutant emissions is reduced.

[0043] Specifically, the tower body of the washing tower 300 is made of fiberglass, which has good acid and alkali resistance; the height of the washing tower 300 is 3000mm-3500mm, and the diameter is 5100mm-6000mm, which can extend the residence time of the exhaust gas in the washing tower 300 and ensure that the exhaust gas has enough time to contact with the alkaline solution in the tower for sufficient reaction.

[0044] Specifically, the distance between the spray pipe 560 and the top of the washing tower 300 is 100mm-200mm, and the diameter is 50mm-60mm, which improves the waste gas treatment efficiency and ensures the stability of the device.

[0045] Specifically, the bottom of the washing tower 300 is connected to the alkaline solution pool 510 through a liquid return pipe 540. In this way, the alkaline solution accumulated at the bottom of the washing tower 300 can be recycled into the alkaline pool for filtration and reuse, thereby ensuring the cleanliness of the alkaline solution and realizing multiple recycling of the alkaline solution.

[0046] Specifically, a leakage layer 320 is provided in the washing tower 300, and the leakage layer 320 is located below the spray port 550. When the waste gas treated by combustion in the incinerator 200 flows through the leakage layer 320, the leakage layer 320 can not only remove the dust particles generated by the combustion of the waste gas in the incinerator 200, but also increase the contact area between the waste gas and the alkaline solution, ensuring that the acidic medium in the waste gas treated by combustion in the incinerator 200 is fully neutralized with the alkaline solution.

[0047] Specifically, the leakage layer 320 is composed of porous materials, and these porous materials have a large specific surface area and good distribution.

[0048] Specifically, the leakage layer 320 is arranged in a spiral shape, so that a rotating vortex can be generated when the exhaust gas passes through the leakage layer 320 from top to bottom, which can increase the contact area between the exhaust gas and the alkaline solution, help to more effectively neutralize the acidic medium in the exhaust gas, and further improve the purification efficiency.

[0049] In some embodiments, the second pipe 310 is provided with a heat exchanger 330, and the heat exchanger 330 is used for cooling the exhaust gas. The heat exchanger 330 can recover and utilize the heat in the exhaust gas treated by the incinerator 200 through heat exchange, reduce the temperature of the exhaust gas, reduce the secondary reaction of the exhaust gas when it flows through the subsequent treatment process, and improve the quality of exhaust gas treatment.

[0050] Specifically, a temperature sensor 250 is provided in the incinerator 200, and the temperature sensor 250 is electrically connected to the incinerator 200. The temperature in the incinerator 200 is monitored in real time by the temperature sensor 250 to ensure that the incinerator 200 operates within a temperature range of 850°C-1100°C, thereby fully burning harmful organic matter in the exhaust gas and effectively decomposing harmful substances in the exhaust gas.

[0051] Specifically, the furnace body of the incinerator 200 is provided with warm refractory materials, heat insulating materials and thermal insulation materials from the inside to the outside. The warm refractory materials in the incinerator 200 are made of high-alumina bricks with a thickness of 270mm-300mm, the thermal insulation materials in the incinerator 200 are made of thermal insulation bricks with a thickness of 70mm-90mm, the thermal insulation materials in the incinerator 200 are made of rock wool with a thickness of 100mm-130mm, and the outer body of the incinerator 200 is made of carbon steel plate with a thickness of 50mm-70mm. The incinerator 200 can reduce the heat loss of the furnace body, ensure the full combustion of the exhaust gas, and improve the combustion efficiency of the exhaust gas.

[0052] In some embodiments, the first pipe 210 is provided with a dust filter 220 and a cooler 260. The dust filter 220 removes tiny solid particles in the exhaust gas before entering the incinerator 200, so that the exhaust gas entering the incinerator 200 is pure, which helps the incinerator 200 to efficiently burn harmful organic matter in the exhaust gas and improve the processing efficiency. At the same time, the cooler 260 reduces the temperature of the exhaust gas before entering the incinerator 200, reduces the energy required for the exhaust gas to be burned in the incinerator 200, reduces energy consumption, and improves the processing efficiency.

[0053] Specifically, the first pipeline 210 is provided with a check valve 230 and an explosion-proof fan 240 in sequence along the conveying direction of the exhaust gas. The check valve 230 is used to prevent the exhaust gas from flowing back or counter-flowing from the incinerator 200 through the first pipeline 210 back to the waste collection tower 100, ensuring that the exhaust gas can only flow in one direction in the first pipeline 210, ensuring the safety and stability of the operation of the exhaust gas collection and treatment device of this embodiment; at the same time, the explosion-proof fan 240 provides power to ensure that the exhaust gas flows in an orderly manner through the waste collection tower 100, the incinerator 200 and the washing tower 300 in sequence.

[0054] In some embodiments, the air inlet of the waste collection tower 100 is connected to a waste gas collection pipe 600, and the waste gas collection pipe 600 is used to connect the waste gas pipeline of the TCO coated glass online preparation system; the waste gas collection pipe 600 is provided with an induced draft fan 610, a dust collector 620 and a compressed air soot blower 630 in sequence along the conveying direction of the waste gas. The waste gas first passes through the waste gas collection pipe 600 under the suction of the induced draft fan 610, and passes through the dust collector 620 and the compressed air soot blower 630 during the process. The dust collector 620 can effectively filter the harmful substances and large particles of powder in the waste gas; the compressed air soot blower 630 removes the dust in the waste gas collection pipe 600 through the airflow of compressed air to prevent the waste gas collection pipe 600 from being blocked; then the waste gas is guided to the inside of the waste collection tower 100 to achieve effective collection of the waste gas.

[0055] Specifically, a frustum-shaped gas collecting hood 110 is provided in the waste collecting tower 100. The gas collecting hood 110 is located below the air inlet of the waste collecting tower 100. A porous plate is provided at the outlet of the lower end of the gas collecting hood 110, and holes are evenly distributed on the porous plate. The waste gas is guided by the frustum-shaped gas collecting hood 110, which is larger at the top and smaller at the bottom, so that the waste gas flows to the bottom of the waste collecting tower 100, thereby effectively collecting the waste gas, and preliminarily treating the waste gas, reducing the harmful substances entering the subsequent treatment device, and also reducing the damage and corrosion of the waste gas to the subsequent treatment device; and in the process of the waste gas flowing through the gas collecting hood 110, the porous plate plays a role of equalizing the flow, so that the waste gas flow through the gas collecting hood 110 becomes stable, and the efficiency of the later waste gas treatment is improved.

[0056] In some embodiments, the third pipe 410 is provided with an activated carbon adsorption box 700, and an activated carbon adsorption layer 710 is provided in the activated carbon adsorption box 700. When the exhaust gas flows through the activated carbon adsorption box 700, the activated carbon adsorption layer 710 can adsorb the odor in the exhaust gas, ensuring that the gas discharged into the atmosphere has no pungent odor, and achieving the ultra-low emission standard requirements.

[0057] Specifically, a waste gas concentration detector 120 is provided at the inner bottom of the waste collection tower 100. The waste gas concentration detector 120 is used to detect the concentration of waste gas treated by the gas collecting hood 110, so as to accurately adjust the power usage of the incinerator 200 and the power usage of the spray assembly to improve the waste gas treatment effect.

[0058] The working process of the exhaust gas collection and treatment device of this embodiment is as follows:

[0059] The waste gas generated during the use of the TCO coated glass online preparation system first passes through the dust collector 620 and the compressed air soot blower 630 in the waste gas collection pipe 600 under the suction of the induced draft fan 610. The dust collector 620 can effectively filter out harmful substances and large particles of powder in the waste gas; the compressed air soot blower 630 removes dust in the waste gas collection pipe 600 through the compressed air flow to prevent the waste gas collection pipe 600 from being blocked; then the waste gas flows to the bottom of the waste collection tower 100 under the guidance of the cone-shaped gas collection hood 110 with a large top and a small bottom, so as to effectively collect the waste gas and perform preliminary treatment on the waste gas, and then passes through the dust filter 220 to remove tiny solid particles in the waste gas, and then passes through the cooler 260 to reduce the waste gas temperature, reduce the energy required for the waste gas to be incinerated in the incinerator 200, reduce energy consumption, and improve the treatment efficiency of the incinerator; then passes through the heat exchanger 3 30, recover and utilize the heat in the waste gas treated by the incinerator 200 to reduce the temperature of the waste gas, and then enter the washing tower 300 to contact the alkaline solution sprayed by the spray component, so that the acidic medium in the waste gas is neutralized with the alkaline solution, the pH value of the waste gas is increased, and the total amount of pollutant emissions is reduced; finally, enter the waste gas qualification monitor 400 to detect various index parameters of the waste gas. If the monitoring results show that the various indicators of the waste gas meet the emission standards, the exhaust pipe 420 is opened to discharge it into the atmosphere. If the monitoring results show that the various indicators of the waste gas do not fully meet the emission standards, the exhaust pipe 420 is closed and the circulation pipe 430 is started to recirculate the waste gas through the incinerator 200 and the washing tower 300 in turn for waste gas treatment, until the various indicators of the waste gas meet the emission standards and then are discharged into the atmosphere, ensuring that the requirements of the 2018 "Emission Standards for Air Pollutants from Industrial Kilns" (T / SBX 12-2018) and the 2022 "Emission Standards for Air Pollutants from Glass Industry" (GB 26453-2022) and other standards are met.

[0060] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention. Such modifications and variations are all within the scope defined by the accompanying invention.

Claims

1. An exhaust gas collection and treatment device, applied to a TCO coated glass online preparation system, characterized in that: The exhaust gas collection and treatment device comprises: A waste collection tower (100), the air inlet of which is used to collect waste gas generated by the TCO coated glass online preparation system; An incinerator (200) is connected to the gas outlet of the waste collection tower (100) through a first pipe (210) and is used to burn combustibles in the waste gas; A washing tower (300), the air inlet at the lower end of which is connected to the air outlet of the incinerator (200) through a second pipe (310); A spray assembly, arranged in the washing tower (300) and used for spraying an alkaline solution to neutralize the acidic medium in the exhaust gas; The waste gas compliance monitor (400) is connected to the gas outlet of the washing tower (300) through a third pipe (410), the first gas outlet of the waste gas compliance monitor (400) is connected to an exhaust pipe (420), and the second gas outlet of the waste gas compliance monitor (400) is connected to the incinerator (200) through a circulation pipe (430).

2. The exhaust gas collection and treatment device according to claim 1, characterized in that: The spray assembly comprises an alkali liquid pool (510), the alkali liquid pool (510) is connected to a liquid infusion pipe (530) via a water pump (520), one end of the liquid infusion pipe (530) away from the alkali liquid pool (510) extends into the washing tower (300) and is provided with a plurality of spray ports (550).

3. The exhaust gas collection and treatment device according to claim 2, characterized in that: The bottom of the washing tower (300) is connected to the alkali solution pool (510) via a liquid return pipe (540).

4. A waste gas collection and treatment device according to claim 2 or 3, characterized in that: A material leakage layer (320) is provided in the washing tower (300), and the material leakage layer (320) is located below the spray port (550).

5. An exhaust gas collection and treatment device according to any one of claims 1 to 3, characterized in that: The first pipeline (210) is provided with a dust filter (220) and a cooler (260); And / or, the first pipeline (210) is provided with a check valve (230) and an explosion-proof fan (240) in sequence along the conveying direction of the exhaust gas.

6. An exhaust gas collection and treatment device according to any one of claims 1 to 3, characterized in that: The second pipe (310) is provided with a heat exchanger (330), and the heat exchanger (330) is used for allowing the exhaust gas to flow through for cooling.

7. The exhaust gas collection and treatment device according to claim 1, characterized in that: A temperature sensor (250) is arranged in the incinerator (200), and the temperature sensor (250) is electrically connected to the incinerator (200).

8. The exhaust gas collection and treatment device according to claim 1, characterized in that: The air inlet of the waste collection tower (100) is connected to a waste gas collection pipe (600), and the waste gas collection pipe (600) is used to connect to the waste gas pipeline of the TCO coated glass online preparation system; the waste gas collection pipe (600) is provided with an induced draft fan (610), a dust collector (620) and a compressed air soot blower (630) in sequence along the conveying direction of the waste gas.

9. The exhaust gas collection and treatment device according to claim 8, characterized in that: A frustum-shaped gas collecting hood (110) is arranged in the waste collecting tower (100). The gas collecting hood (110) is located below the air inlet of the waste collecting tower (100). A porous plate is arranged at the outlet at the lower end of the gas collecting hood (110).

10. The exhaust gas collection and treatment device according to claim 1, characterized in that: The third pipeline (410) is provided with an activated carbon adsorption box (700), and an activated carbon adsorption layer (710) is provided in the activated carbon adsorption box (700).

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