Cleaning machine

Abstract

The invention provides a cleaning machine, which belongs to the field of silicon wafer production and processing, and comprises a multi-stage water tank, a drying tank, a throwing mechanism, a slow pulling mechanism, a material basket return line, a hydraulic control cleaning system and a material basket carrying mechanism, the throwing mechanism and the slow pulling mechanism are arranged at several sections of water tanks, close to the drying tank, of the multi-stage water tank, the material basket return line is arranged at the same side ends of the multi-stage water tank and the drying tank, the hydraulic control cleaning system is connected to the multi-stage water tank and provides cleaning liquid, and the material basket carrying mechanism is used for transferring a material basket among the multi-stage water tank, the drying tank and the material basket return line. The silicon wafer cleaning machine integrates the silicon wafer cleaning function and the silicon wafer drying function of soaking, cleaning with different detergents, throwing, slow pulling, temperature control, liquid supplementing, stepped overflowing, self-circulation, partial circulation and drying, segmented and modularized efficient cleaning is achieved, and the silicon wafer cleaning machine is convenient to apply and popularize in the field of silicon wafer cleaning and the like.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and processing, and particularly relates to a cleaning machine. Background Art

[0002] During the silicon wafer preparation process, impurities such as silicon mud and silicon powder will remain on the outer surface of the cut and separated silicon wafers, which need to be cleaned, so a cleaning machine is needed. However, the existing cleaning machines have a low degree of automation, and the cleaning system requires manual control, the modular design is insufficient, and the overall cost and cleaning efficiency are low. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, an object of the present invention is to provide a cleaning machine which can solve the above-mentioned problems.

[0004] A cleaning machine comprises a multi-stage water tank, a drying tank, a throwing mechanism, a slow-pulling mechanism, a basket return line, a hydraulically controlled cleaning system and a basket conveying mechanism. The multi-stage water tanks are arranged side by side and a stepped overflow design from the downstream to the upstream of the process cleaning is adopted between adjacent water tanks having the same cleaning liquid. The drying tank is arranged downstream of the terminal water tank of the multi-stage water tank. The throwing mechanism and the slow-pulling mechanism are arranged at several sections of the water tank adjacent to the drying tank of the multi-stage water tank. The basket return line is arranged at the same side end of the multi-stage water tank and the drying tank. The hydraulically controlled cleaning system is connected to the multi-stage water tank and provides cleaning liquid. The basket conveying mechanism is used for transferring the basket between the multi-stage water tank, the drying tank and the basket return line.

[0005] Optionally, the multi-stage water tank includes a soaking tank, multiple cleaning tanks and multiple washing tanks; the soaking tank is arranged at the upstream end of the cleaning process, and each water tank is provided with a cleaning liquid with corresponding composition, proportion and guaranteed liquid level by a hydraulically controlled cleaning system; each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are arranged at multiple cleaning tanks and multiple washing tanks as needed, the slow pulling mechanism is arranged in the last water tank adjacent to the drying tank, and the throwing mechanism is arranged in multiple upstream water tanks adjacent to the last water tank.

[0006] Optionally, the drying trough includes a drying outer box body, an inner trough body, a drying material basket bracket, a drying sliding cover plate, a drying heating unit and a drying circulation fan assembly; the inner trough body and the outer drying outer box body are arranged at intervals to form a partition cavity, the drying material basket bracket is arranged on the bottom of the inner trough accommodating cavity of the inner trough body, the drying sliding cover plate with a top cover cavity is arranged on the top of the drying outer box body for horizontal sliding control, the drying heating unit is arranged in the partition cavity, the drying circulation fan assembly is installed on the drying outer box body, and a circulating drying flow path is formed by the drying circulation fan assembly, the partition cavity, the top cover cavity and the inner trough accommodating cavity.

[0007] Optionally, the throwing mechanism adopts a single-drive multi-flower basket synchronous throwing structure design, including a plurality of overall concave throwing frames, throwing frame connecting beams, push rod throwing assemblies, throwing transmission support cam assemblies, throwing drive reversing assemblies, throwing guide assemblies and material basket throwing positioning guide units; a plurality of the throwing frames are arranged side by side and fixedly connected at the ends of the frames by the throwing frame connecting beams, and the push rod throwing assemblies and throwing guide assemblies are arranged at the two ends of each throwing frame, and a throwing transmission support cam assembly is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame, and the bottoms of every two push rod throwing assemblies are installed at the two ends of the throwing transmission support cam assembly, the throwing drive reversing assembly is driven to be connected to the throwing transmission support cam assembly, and the throwing guide assembly is sleeved on the push rod throwing assembly and fixed to the outer frame of the cleaning machine; a material basket throwing positioning guide unit corresponding to accommodating a plurality of flower baskets is arranged on the supporting flat frame of the throwing frame.

[0008] Optionally, the slow-pull mechanism includes a slow-pull lifting frame that is concave as a whole, an inclined support seat, a slow-pull lifting drive unit, a flower basket slow-pull positioning guide unit, a slow-pull inclined limit assembly and an inclined rotating shaft assembly; the longitudinal ends of the inclined support seat are pivotally installed above the two ends of the flat frame of the slow-pull lifting frame through an inclined rotating shaft assembly; the slow-pull lifting drive unit adopts a non-belt transmission method and the driving end is connected to the vertical frames at both ends of the slow-pull lifting frame; a plurality of flower basket slow-pull positioning guide units are arranged on the inclined support seat.

[0009] Optionally, the material basket reflow line includes a reflow drive, a reflow drive wheel chain assembly and a reflow material basket blocking mechanism arranged on the reflow rack, the chain of the reflow drive wheel chain assembly is arranged along the reflow rack, the reflow drive is connected to the reflow drive wheel chain assembly, the reflow material basket blocking mechanism is arranged on the lower surface of the reflow rack, and the blocking portion of the reflow material basket blocking mechanism can be controllably protruded from the upper surface of the reflow rack to block and position the silicon wafer material basket on the reflow rack.

[0010] Optionally, the liquid-controlled cleaning system includes a clean water supply circuit, a heating water tank, a cleaning liquid supply circuit, a cleaning drainage circuit and a water tank self-circulation circuit; the clean water supply circuit is arranged between the multi-stage water tank and the heating water tank, and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank; the cleaning liquid supply circuit is used to provide cleaning liquids of different types and proportions to the multiple cleaning tanks and washing tanks; the cleaning drainage circuit is connected to each water tank of the multi-stage water tank in a controllable manner; the water tank self-circulation circuit is connected to the corresponding washing tank, and is used for circulating and stirring the washing liquid in the washing tank.

[0011] Optionally, the basket handling mechanism adopts a basket lifting module or a handling robot; the basket lifting module space is controlled to be installed on the outer frame of the cleaning machine, including a lifting beam drive unit, a lifting beam drive unit, a lifting vertical drive unit and a hook unit, and the hook unit is driven by the lifting beam drive unit, the lifting beam drive unit and the lifting vertical drive unit to realize X, Y and Z movement; wherein the hook unit includes a hook mounting top plate, a hook longitudinal driver, a main hook plate, a basket sensing hook plate, a hook tension spring assembly and a hook plate proximity switch; two hook longitudinal drivers are arranged at both ends of the horizontally arranged hook mounting top plate; the tops of the two vertically arranged main hook plates are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers; the upper and lower movable limit of the basket sensing hook plate is arranged on the side of the main hook plate, and is reset by the hook tension spring assembly; the hook plate proximity switch is arranged on the top of the basket sensing hook plate, which is used to determine whether the silicon wafer basket is hung on the main hook plate and the basket sensing hook plate.

[0012] Compared with the prior art, the beneficial effects of the present invention are: the cleaning machine integrates the silicon wafer cleaning and drying functions of immersion, cleaning with different detergents, tossing, slow pulling, temperature control, liquid replenishment, step overflow, self-circulation, partial circulation, and drying, realizing segmented and modular efficient cleaning, which is convenient for promotion and application in the fields of silicon wafer cleaning and so on. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a partial structural schematic diagram of a cleaning machine;

[0014] Figure 2 It is a schematic diagram of the layout of the multi-stage water tank, drying tank and hydraulic control cleaning system;

[0015] Figure 3 and Figure 4 Schematic diagram of a drying tank from different perspectives;

[0016] Figure 5 It is a partial structural schematic diagram of the drying sliding cover plate;

[0017] Figure 6 It is a schematic diagram of the circulating drying flow path of the drying tank;

[0018] Figure 7 is a schematic diagram of the throwing mechanism;

[0019] Figure 8 It is a schematic diagram of the basket throwing positioning guide unit;

[0020] Fig. 9 It is a schematic diagram of the arrangement of the throwing mechanism and part of the outer frame of the cleaning machine;

[0021] Fig.10 is a schematic diagram of a slow pull mechanism;

[0022] Fig.11 and Fig.12 It is a partial structural schematic diagram of the slow-pull mechanism;

[0023] Fig.13 It is a schematic diagram of the basket return line;

[0024] Fig.14 is a schematic diagram of a reflux basket blocking mechanism;

[0025] Fig.15 It is a schematic diagram of the hydraulically controlled cleaning system;

[0026] Fig.16 It is a schematic diagram of the self-circulating flow path of the water tank;

[0027] Fig.17 is a schematic diagram of a preheating unit;

[0028] Fig.18 and Fig.19 Schematic diagram of the flower basket hoisting module from different angles;

[0029] Fig. 20 Schematic diagram of the hook unit.

[0030] In the figure,

[0031] 100, multi-stage water tank; 110, soaking tank; 120, cleaning tank; 130, washing tank;

[0032] 200, drying tank; 210, drying outer box body; 220, inner tank body; 230, drying basket bracket; 240, drying sliding cover plate; 241, cover plate moving frame; 242, upper cover plate; 243, lower cover plate; 244, cover plate driving assembly; 250, drying heating unit; 260, drying circulation fan assembly;

[0033] 300, throwing mechanism; 310, throwing frame; 320, throwing frame connecting beam; 330, push rod throwing assembly; 340, throwing transmission support cam assembly; 350, throwing drive reversing assembly; 360, throwing guide assembly; 370, material basket throwing positioning guide unit; 371, flower basket throwing positioning plate;

[0034] 400, slow pull mechanism; 410, slow pull lifting frame; 420, tilt support seat; 430, slow pull lifting drive unit; 431, slow pull motor reducer assembly; 432, slow pull first commutator; 433, slow pull horizontal transmission shaft; 434, slow pull second commutator; 435, slow pull vertical transmission shaft; 436, slow pull lifting screw rod assembly; 437, slow pull upper and lower transfer fixing plate group; 438, slow pull slide plate transfer assembly; 439, slow pull lifting guide assembly; 440, flower basket Slow-pull positioning guide unit; 441, slow-pull positioning fixing plate; 442, slow-pull flower basket positioning plate; 450, slow-pull tilting limit assembly; 451, tilting frame flip stop assembly; 452, vertical frame limit adjustment stop assembly; 460, tilting shaft assembly; 461, tilting shaft; 462, shaft lifting flat frame end fixing piece; 463, shaft tilting flat frame end fixing piece; 464, shaft lifting flat support piece; 465, shaft tilting flat frame support piece; 470, slow-pull lifting induction unit;

[0035] 500, material basket return line; 510, return rack; 520, return driver; 530, return drive wheel chain assembly; 540, return basket blocking mechanism; 541, blocking installation base plate; 542, blocking vertical plate; 543, blocking plate; 544, blocking drive assembly; 545, blocking in place monitoring assembly; 550, docking chain;

[0036] 600, hydraulically controlled cleaning system; 610, clean water supply circuit; 611, clean water supply main pipe; 612, hot water supply circuit; 613, cold water supply circuit; 614, branch direct supply circuit; 620, heating water tank; 630, cleaning liquid supply circuit; 631, cleaning liquid supply station; 632, cleaning liquid pipe; 640, cleaning drainage circuit; 641, drainage manifold; 642, drainage main pipe; 650, water tank self-circulation circuit 651, self-circulation pump; 652, self-circulation pipe valve; 660, preheating unit; 661, preheating water inlet main pipe; 662, preheating water inlet transfer pipe; 663, heating rod; 664, heating barrel; 665, preheating connecting pipe; 666, preheating water outlet transfer pipe; 667, preheating water outlet main pipe; 668, preheating temperature sensor; 669, preheating fixing frame; 670, circulation tank; 680, heat exchanger;

[0037] 700, cleaning machine external frame;

[0038] 800, flower basket lifting module; 810, lifting beam drive unit; 820, lifting longitudinal beam drive unit; 830, lifting vertical drive unit; 840, hook unit; 841, hook mounting top plate; 842, hook longitudinal driver; 843, main hook plate; 844, basket sensing hook plate; 845, hook tension spring assembly; 846, hook plate proximity switch; 847, vertical long guide groove; 848, hanging plate column pin. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] A cleaning machine, see Figure 1-Figure 20 , including a multi-stage water tank 100, a drying tank 200, a throwing mechanism 300, a slow pulling mechanism 400, a basket return line 500, a hydraulically controlled cleaning system 600 and a basket transport mechanism.

[0041] Layout relationship: The multi-stage water tanks 100 are arranged side by side and adjacent water tanks with the same type of cleaning liquid adopt a stepped overflow design from the downstream to the upstream of the process cleaning. The drying tank 200 is arranged downstream of the end tank of the multi-stage water tank 100. The throwing mechanism 300 and the slow pulling mechanism 400 are arranged at several sections of the multi-stage water tank 100 adjacent to the drying tank 200. The basket return line 500 is arranged on the same side end of the multi-stage water tank 100 and the drying tank 200. The hydraulically controlled cleaning system 600 is connected to the multi-stage water tank 100 and provides cleaning liquid. The basket conveying mechanism is used for the transfer of the basket between the multi-stage water tank 100, the drying tank 200 and the basket return line 500.

[0042] Among them, see Figure 2 The multi-stage water tank 100 includes a soaking tank 110, multiple cleaning tanks 120 and multiple washing tanks 130; the soaking tank 110 is arranged at the upstream end of the cleaning process, and each water tank is provided with a cleaning liquid with corresponding composition, proportion and guaranteed liquid level by a liquid-controlled cleaning system 600; each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are arranged at multiple cleaning tanks 120 and multiple washing tanks 130 as needed, the slow-pulling mechanism 400 is arranged in the last water tank adjacent to the drying tank 200, and the throwing mechanism 300 is arranged in multiple upstream water tanks adjacent to the last water tank.

[0043] Furthermore, a stepped overflow design from the downstream to the upstream of the process cleaning is adopted between adjacent water tanks with the same cleaning liquid. The stepped overflow design can be: the top of the partition between adjacent water tanks becomes lower step by step. Or a horizontal row of overflow holes, overflow ports, etc. with different heights are opened on the partition, such as multiple overflow circular holes, a horizontal long strip through port, etc.

[0044] Furthermore, a spray pipe for blowing toward the other side with overflow function is arranged on the top side of some water tanks to assist overflow blowing.

[0045] Among them, see Figure 3 and Figure 4 The drying tank 200 includes a drying outer box body 210, an inner tank body 220, a drying basket bracket 230, a drying sliding cover plate 240, a drying heating unit 250 and a drying circulation fan assembly 260; the inner tank body 220 and the outer drying outer box body 210 are arranged at intervals to form a spacing cavity, the drying basket bracket 230 is arranged on the bottom of the inner tank accommodating cavity of the inner tank body 220, the drying sliding cover plate 240 with a top cover cavity is arranged on the top of the drying outer box body 210 for horizontal sliding control, the drying heating unit 250 is arranged in the spacing cavity, and the drying circulation fan assembly 260 is installed on the drying outer box body 210, see Figure 6 A circulating drying flow path is formed by the drying circulation fan assembly 260, the partition cavity, the top cover cavity, and the inner tank accommodating cavity (see the dotted lines and arrows in the figure).

[0046] See also Figure 4 and Figure 5 The drying sliding cover plate 240 includes a cover plate moving frame 241, an upper cover plate 242, a lower cover plate 243 and a cover plate driving assembly 244. The cover plate moving frame 241 is composed of a plurality of groove rails with inner guide grooves. The lower cover plate 243 is arranged below the upper cover plate 242 which is in an inverted "concave" shape as a whole. The lower cover plate 243 adopts a mesh plate with a plurality of ventilation holes evenly provided thereon, and a top cover cavity is formed between the upper cover plate 242 and the lower cover plate 243. The upper cover plate 242 and the lower cover plate 243 are driven by the cover plate driving assembly 244 as a whole to move horizontally in the groove rails of the cover plate moving frame 241.

[0047] A gap is provided between the side of the lower cover plate 243 and the lower end of the side folded plate of the upper cover plate 242, thereby forming a side air outlet of the top cover cavity. When the top of the drying outer box 210 is sealed by the drying sliding cover plate 240, the side air outlet of the top cover cavity is connected to the top air outlet of the partition cavity.

[0048] Among them, multiple groups of drying tanks 200 can be used side by side, and two adjacent tanks can share a sliding cover plate. The bottom surface of the sliding cover plate is provided with corresponding cover plate air inlets and cover plate air outlets corresponding to the circulating air outlets of the lower tank body to improve the overall circulation smoothness of the drying hot air and the drying effect on the silicon wafers.

[0049] Among them, see Figure 7-Figure 9 The throwing mechanism 300 adopts a single-drive multi-basket synchronous throwing structure design, including a plurality of overall concave throwing frames 310, a throwing frame connecting beam 320, a push rod throwing assembly 330, a throwing transmission support cam assembly 340, a throwing drive reversing assembly 350, a throwing guide assembly 360 and a basket throwing positioning guide unit 370.

[0050] Specifically, a plurality of the throwing frames 310 are arranged side by side and fixedly connected at the ends of the frames by the throwing frame connecting beams 320. The push rod throwing assemblies 330 and the throwing guide assemblies 360 are arranged at the two ends of each throwing frame 310. A throwing transmission supporting cam assembly 340 is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame 310. The bottoms of every two push rod throwing assemblies 330 are installed to the two ends of the throwing transmission supporting cam assemblies 340. The throwing drive reversing assembly 350 is driven and connected to the throwing transmission supporting cam assembly 340. The throwing guide assembly 360 is sleeved on the push rod throwing assembly 330 and fixed externally to the outer frame 700 of the cleaning machine. A basket throwing positioning guide unit 370 corresponding to accommodating a plurality of flower baskets is arranged on the supporting flat frame of the throwing frame 310.

[0051] See also Figure 8 The basket throwing positioning guide unit 370 includes a basket throwing positioning plate 371 with a positioning notch. The basket throwing positioning plate 371 adopts a bent plate composed of a supporting flat plate and a guiding positioning inclined plate. The positioning notch is opened on the guiding positioning inclined plate, and the supporting flat plate is horizontally fixed to the beam surface of the throwing frame 310.

[0052] Among them, see Fig.10 The slow-pull mechanism 400 includes a slow-pull lifting frame 410 that is generally concave, an inclined support seat 420, a slow-pull lifting drive unit 430, a flower basket slow-pull positioning guide unit 440, a slow-pull inclined limit assembly 450 and an inclined shaft assembly 460; the longitudinal ends of the inclined support seat 420 are pivotally installed above the two ends of the flat frame of the slow-pull lifting frame 410 through an inclined shaft assembly 460; the slow-pull lifting drive unit 430 adopts a non-belt transmission method and the driving end is connected to the vertical frames at both ends of the slow-pull lifting frame 410; a plurality of flower basket slow-pull positioning guide units 440 are arranged on the inclined support seat 420.

[0053] The slow-pull lifting frame 410 includes a slow-pull lifting horizontal frame and a slow-pull lifting vertical frame, and the two slow-pull lifting vertical frames are vertically installed to the two ends of the slow-pull lifting horizontal frame.

[0054] The tilting shaft assembly 460 includes a tilting shaft 461, a shaft lifting flat frame end fixing piece 462, a shaft tilting flat frame end fixing piece 463, a shaft lifting flat support piece 464 and a shaft tilting flat frame support piece 465; the shaft lifting flat frame end fixing piece 462 and the shaft tilting flat frame end fixing piece 463 are correspondingly arranged at the longitudinal ends of the flat frame of the slow-pull lifting frame 410 and the tilting support seat 420, and the two ends of the tilting shaft 461 pass through the shaft lifting flat frame end fixing piece 462 and the shaft tilting flat frame end fixing piece 463, and are supported by a plurality of shaft lifting flat support pieces 464 and a shaft tilting flat frame support piece 465 in the middle part of the tilting shaft 461.

[0055] See also Fig.11 The slow-pull lifting drive unit 430 includes a slow-pull motor reducer assembly 431, a slow-pull first commutator 432, a slow-pull horizontal transmission shaft 433, a slow-pull second commutator 434, a slow-pull vertical transmission shaft 435, a slow-pull lifting screw assembly 436, a slow-pull upper and lower adapter fixed plate group 437 and a slow-pull slide plate adapter assembly 438; the output end of the slow-pull motor reducer assembly 431 is connected to the horizontal input end of the slow-pull first commutator 432 and the lower end of a slow-pull vertical transmission shaft 435, and the slow-pull horizontal transmission The horizontal output end of the driving shaft 433 is connected to the lower end of another slow-pull vertical transmission shaft 435 through the slow-pull second commutator 434; the upper and lower parts of each slow-pull lifting screw rod assembly 436 are supported by the slow-pull upper and lower transfer fixing plate group 437 and connected to the outer frame 700 of the cleaning machine or the outer end of the cleaning tank 120, and a slow-pull slide plate adapter assembly 438 driven by the slow-pull lifting screw rod assembly 436 is arranged between the two slow-pull upper and lower transfer fixing plate groups 437, and the slow-pull slide plate adapter assembly 438 is connected to the lifting vertical frame of the slow-pull lifting frame 410.

[0056] The slow-pull lifting drive unit 430 also includes a slow-pull lifting guide assembly 439. Two groups of the slow-pull lifting guide assemblies 439 are symmetrically arranged on both sides of the slow-pull lifting screw assembly 436. The slow-pull lifting guide assembly 439 adopts a guide shaft sleeve assembly to enhance the stability of the device lifting.

[0057] The flower basket slow-pull positioning guide unit 440 includes a slow-pull positioning fixing plate 441 and a slow-pull flower basket positioning plate 442 with a positioning notch. The slow-pull flower basket positioning plate 442 is laterally installed on the frame of the inclined support seat 420 through the slow-pull positioning fixing plate 441.

[0058] The slow-pull tilt limit assembly 450 includes a tilt frame flip stop assembly 451 and a vertical frame limit adjustment stop assembly 452. The tilt frame flip stop assembly 451 includes an L-shaped upper stop plate arranged at both ends of the same side of the frame of the tilt support seat 420 and a lower stop extending outward from the longitudinal side rod on the other side. The vertical frame limit adjustment stop assembly 452 adopts a stop rod or a stop plate structure to be arranged on the outside of the frame of the lifting vertical frame of the slow-pull lifting frame 410, and includes an upper stop limit adjustment seat and an angle adjustment screw member.

[0059] Optionally, a tilting driving mechanism is further provided between the slow-pull lifting frame 410 and the tilting support seat 420 , for driving the tilting support seat 420 to rotate and tilt relative to the slow-pull lifting frame 410 .

[0060] Furthermore, the slow-pull mechanism 400 also includes a plurality of slow-pull lifting sensing units 470 for slow-pull position sensing.

[0061] Among them, see Fig.13 and Fig.14 The material basket reflow line 500 includes a reflow driver 520, a reflow drive wheel chain assembly 530 and a reflow material basket blocking mechanism 540 which are arranged on the reflow rack 510. The chain of the reflow drive wheel chain assembly 530 is arranged along the reflow rack 510. The reflow driver 520 is connected to the reflow drive wheel chain assembly 530. The reflow material basket blocking mechanism 540 is arranged on the lower surface of the reflow rack 510, and the blocking portion of the reflow material basket blocking mechanism 540 can be controllably protruded from the upper surface of the reflow rack 510 to block and position the silicon wafer material basket on the reflow rack 510.

[0062] Furthermore, a docking chain 550 is provided at the end of the return frame 510 for upstream or downstream streamline drive connection.

[0063] See also Fig.14 The backflow basket blocking mechanism 540 includes a blocking mounting base plate 541, a blocking vertical plate 542, a blocking plate 543 with a blocking protrusion, a blocking drive assembly 544 and a blocking in-place monitoring assembly 545; the blocking mounting base plate 541 is arranged on the crossbeam of the backflow rack 510, and is used to support the entire backflow basket blocking mechanism 540; the bottoms of two parallel and spaced blocking vertical plates 542 are fixed to the blocking mounting base plate 541, one end of two parallel and spaced blocking plates 543 is installed to the blocking vertical plate 542 through a blocking support pivot, and the other end of the two parallel and spaced blocking plates 543 is pivotally connected to the end of the driving rod of the blocking drive assembly 544 through a blocking drive pivot, and the two sides of the shell of the blocking drive of the blocking drive assembly 544 are pivotally connected to the blocking drive support block; the blocking in-place monitoring assembly 545 is installed below the blocking plate 543, and is used to monitor whether the blocking drive is in place.

[0064] In one example, a plurality of groups of return drivers 520, return drive wheel chain assemblies 530 and return basket blocking mechanisms 540 are arranged side by side on the return rack 510, that is, a multi-streamline parallel arrangement is adopted to improve work efficiency.

[0065] In the example shown in the figure, in order to extend the length of the return flow line, multiple basket return lines 500 can be connected in series. The figure shows a four-section series connection. Of course, it can also be other numbers, and the design can be based on the actual production line length requirements.

[0066] Among them, see Fig.15 The liquid-controlled cleaning system 600 includes a clean water supply liquid circuit 610, a heating water tank 620, a cleaning liquid supply liquid circuit 630, a cleaning drainage flow circuit 640 and a water tank self-circulation flow circuit 650; the clean water supply liquid circuit 610 is arranged between the multi-stage water tank 100 and the heating water tank 620, and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank 100; the cleaning liquid supply liquid circuit 630 is used to provide cleaning liquids of different types and proportions to the multiple cleaning tanks 120 and washing tanks 130; the cleaning drainage flow circuit 640 is connected to each water tank of the multi-stage water tank 100 in a controllable manner; the water tank self-circulation flow circuit 650 is connected to the corresponding washing tank 130, and is used for circulating and stirring the cleaning liquid in the washing tank 130.

[0067] The clean water supply path 610 includes a clean water supply main pipe 611 , a hot water supply path 612 and a cold water supply path 613 connected to each water tank, and the heating water tank 620 is disposed upstream of the hot water supply path 612 .

[0068] The cleaning liquid supply circuit 630 includes a cleaning liquid supply station 631, multiple cleaning liquid pipes 632 for conveying different types of cleaning liquids, and a liquid replenishment control valve; the cleaning liquid supply station 631 includes different types of washing liquid tanks, and the cleaning liquid pipe 632 is controllably connected to the corresponding cleaning tank 120 and the washing tank 130 under the control of the liquid replenishment control valve.

[0069] In a specific example, the cleaning liquid supply station 631 includes four cleaning liquid tanks for providing Class A cleaning liquid, Class B cleaning liquid, Class C cleaning liquid and Class D cleaning liquid. Each cleaning liquid tank is connected to the corresponding cleaning tank 120 and the washing tank 130 through a cleaning liquid pipe 632 and a liquid replenishment control valve, wherein the cleaning tank 120 is controllably connected to a cleaning liquid tank of Class A cleaning liquid or Class B cleaning liquid, and the washing tank 130 is controllably connected to a cleaning liquid tank of Class C cleaning liquid and Class D cleaning liquid.

[0070] The cleaning drainage flow path 640 includes a drainage manifold 641 and a drainage main pipe 642 . A drainage manifold 641 controlled by a drainage control valve is arranged at the lower part of each sink end plate of the multi-stage sink 100 , and all drainage manifolds 641 are connected to the drainage main pipe 642 .

[0071] See also Fig.16 The water tank self-circulation flow path 650 includes a self-circulation pump 651 and a self-circulation pipe valve 652 , and the circulation pipe of the self-circulation pipe valve 652 is connected to the corresponding washing tank 130 .

[0072] The self-circulation pipe valve 652 includes a self-circulation water outlet pipe valve and a self-circulation water inlet pipe valve. One end of the washing tub 130 is connected to the self-circulation water outlet pipe valve, and the other end of the self-circulation water outlet pipe valve is connected to the self-circulation pump 651. The water outlet end of the self-circulation pump 651 is connected to the water inlet end of the self-circulation water inlet pipe valve, and the self-circulation water inlet pipe valve is connected to the other end face of the washing tub 130.

[0073] See also Fig.17 The hydraulically controlled cleaning system 600 also includes a preheating unit 660, which includes a preheating water inlet main pipe 661, a preheating water inlet transfer pipe 662, a heating rod 663, a heating barrel 664, a preheating connecting pipe 665, a preheating water outlet transfer pipe 666, a preheating water outlet main pipe 667 and a preheating temperature sensor 668; a plurality of the heating barrels 664 are connected through a plurality of the preheating connecting pipes 665, and each heating barrel 664 is provided with a heating rod 663 and a preheating temperature sensor 668; the preheating water inlet main pipe 661 is connected to the lower part of the heating barrel 664 at the upstream end through the preheating water inlet transfer pipe 662, and the preheating water outlet main pipe 667 is connected to the upper part of the heating barrel 664 at the downstream end through the preheating water outlet transfer pipe 666.

[0074] In a specific example, a plurality of the heating barrels 664 are arranged side by side at equal intervals, and a plurality of the preheating connecting pipes 665 are obliquely connected between the upper portion of the previous heating barrel 664 and the lower portion of the next or multiple downstream heating barrels 664, such as two heating barrels 664. In the figure, two preheating water inlet transfer pipes 662 are arranged on the preheating water inlet main pipe 661, and the outlet ends of the two preheating water inlet transfer pipes 662 are connected to the lower portions of the corresponding first two heating barrels 664, and two preheating water outlet transfer pipes 666 are arranged on the preheating water outlet main pipe 667, and the water inlet ends of the preheating water outlet transfer pipes 666 are connected to the upper portions of the two heating barrels 664 at the downstream end. The upper end of the first preheating connecting tube 665 is connected to the upper part of the first heating barrel 664, the upper end of the first preheating connecting tube 665 is obliquely connected to the lower part of the third heating barrel 664, and the upper end of the second preheating connecting tube 665 is obliquely connected to the lower part of the fourth heating barrel 664, arranged in sequence.

[0075] Furthermore, the preheating unit 660 also includes a preheating fixing frame 669, and the multiple heating barrels 664 are fixed to the frame of the preheating fixing frame 669 through pipe clamp supports, and the bottom of the preheating water inlet main pipe 661 and the preheating water outlet main pipe 667 are fixed to the bottom plate of the preheating fixing frame 669 through pipe clamp supports.

[0076] Furthermore, the hydraulically controlled cleaning system 600 also includes a plurality of circulation tanks 670, which are used to circulate the cleaning liquid in the immersion tank 110 and the plurality of cleaning tanks 120 after defoaming, and the circulation supply direction includes a water tank with the same cleaning liquid, a sheet inserting machine or a degumming machine at an upstream workstation.

[0077] Furthermore, the hydraulically controlled cleaning system 600 also includes a heat exchanger 680 , which is disposed between the circulation tank 670 and a water tank that circulates and supplies cleaning fluid of the same property, and is used to heat the branch direct supply liquid path 614 of the clean water supply liquid path 610 .

[0078] Each slot is described below.

[0079] Sink No. 0 is a soaking tank 110, sinks No. 1, 6, 9-13 are cleaning tanks 120, sinks No. 2-5, 7 and 8 are washing tanks 130, and the end overflow pipe of sink No. 0 is connected to the external circulation tank 670, and the outlet pipe of the circulation tank 670 is connected to other workstations to pump clean water thereto, such as a sheet inserter or a degumming machine. Sinks No. 2-5 are each provided with the water tank self-circulation flow path 650; sinks No. 6-9 are provided with a circulation tank 670; and sinks No. 14-15 are drying tanks 200, which provide hot air for drying. The water temperature of sinks No. 0-13 is gradually or stagedly increased from 40° to 95°. Temperature sensors are provided on sinks No. 1-13 and sinks No. 14-15.

[0080] Step overflow design: There is a step overflow design between sink No. 1 and sink No. 0, that is, the water in sink No. 1 can overflow to sink No. 0. Sink No. 13 overflows to sink No. 12, sink No. 12 overflows to sink No. 11, sink No. 11 overflows to sink No. 10, and sink No. 10 overflows to sink No. 9.

[0081] A circulation tank 670 is arranged outside the No. 9 water tank, and the overflow pipe of the No. 9 water tank is connected to the circulation tank 670, and the outlet pipe of the circulation tank 670 is connected to the No. 6 water tank, so as to circulate the clean water overflowing from the No. 9 water tank to the No. 6 water tank. The outlet pipe of the circulation tank 670 of the No. 6 water tank is connected to the No. 1 water tank, so as to circulate the clean water overflowing from the No. 6 water tank to the No. 1 water tank. Each of the No. 7 and No. 8 water tanks is provided with a circulation tank 670, and the circulation tank 670 defoams the overflowing washing liquid and circulates it into the corresponding water tank through the water tank self-circulation flow path 650.

[0082] Furthermore, spray pipes are provided at water tank No. 9 and water tank No. 13 to assist in driving the cleaning liquid to the overflow side.

[0083] The water temperature of tanks 0-13 is gradually or stagedly increased from 40° to 95°. Temperature sensors are installed on tanks 1-13 and tanks 14-15.

[0084] The basket handling mechanism adopts a basket hoisting module 800 or a handling robot; the basket hoisting module 800 is installed on the outer frame 700 of the cleaning machine in a controlled and movable manner. Figure 18-Figure 20 , including a hoisting beam drive unit 810, a hoisting longitudinal beam drive unit 820, a hoisting vertical drive unit 830 and a hook unit 840, wherein the hook unit 840 is driven by the hoisting beam drive unit 810, the hoisting longitudinal beam drive unit 820 and the hoisting vertical drive unit 830 to realize X, Y and Z direction movement.

[0085] See also Fig. 20 The hook unit 840 includes a hook installation top plate 841, a hook longitudinal driver 842, a main hook plate 843, a basket sensing hook plate 844, a hook tension spring assembly 845 and a hook plate proximity switch 846; two hook longitudinal drivers 842 are arranged at both ends of the horizontally arranged hook installation top plate 841; the tops of the two vertically arranged main hook plates 843 are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers 842; the basket sensing hook plate 844 is movable and limited up and down on the side of the main hook plate 843, and is movable and reset by the hook tension spring assembly 845; the hook plate proximity switch 846 is arranged on the top of the basket sensing hook plate 844, which is used to determine whether the silicon wafer flower basket is hung on the main hook plate 843 and the basket sensing hook plate 844.

[0086] In a specific example, the main hook plate 843 and the basket sensing hook plate 844 are integrally formed into an anchor shape or a double hook shape that is symmetrical on both sides, which is compatible with the hanging column of the flower basket.

[0087] Furthermore, a plurality of vertical long guide grooves 847 are provided on the main hook plate 843, and the basket sensing hook plate 844 is inserted into the vertical long guide grooves 847 through the hanging plate column pins 848. The hanging plate column pins 848 at the top are used to connect the hook tension spring assembly 845. The hanging plate column pins 848 and the vertical long guide grooves 847 define the vertical movable range of the main hook plate 843 and the basket sensing hook plate 844. The hook tension spring assembly 845 is used to realize the reset of the basket sensing hook plate 844 when the basket is not hung.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cleaning machine, comprising a multi-stage water tank (100), a drying tank (200), a throwing mechanism (300), a slow pulling mechanism (400), a basket return line (500), a hydraulically controlled cleaning system (600) and a basket transport mechanism, characterized in that: The multi-stage water tanks (100) are arranged side by side and a stepped overflow design from the downstream to the upstream of the process cleaning is adopted between adjacent water tanks with the same type of cleaning liquid. The drying tank (200) is arranged downstream of the terminal water tank of the multi-stage water tank (100). The throwing mechanism (300) and the slow pulling mechanism (400) are arranged at several sections of the multi-stage water tank (100) adjacent to the drying tank (200). The material basket return line (500) is arranged at the same side end of the multi-stage water tank (100) and the drying tank (200). The liquid-controlled cleaning system (600) is connected to the multi-stage water tank (100) and provides cleaning liquid. The material basket conveying mechanism is used for transferring the material basket between the multi-stage water tank (100), the drying tank (200) and the material basket return line (500).

2. The cleaning machine according to claim 1, characterized in that: The multi-stage water tank (100) comprises a soaking tank (110), a plurality of cleaning tanks (120) and a plurality of washing tanks (130); the soaking tank (110) is arranged at the upstream end of the cleaning process, and each water tank is provided with a cleaning liquid with corresponding composition, proportion and guaranteed liquid level by a liquid-controlled cleaning system (600); each water tank is provided with a temperature detection unit, and ultrasonic vibration units and heating units are arranged at the plurality of cleaning tanks (120) and the plurality of washing tanks (130) as required; the slow-pulling mechanism (400) is arranged in the last water tank adjacent to the drying tank (200), and the throwing mechanism (300) is arranged in the plurality of upstream water tanks adjacent to the last water tank.

3. The cleaning machine according to claim 2, characterized in that: The drying tank (200) comprises a drying outer box body (210), an inner tank body (220), a drying material basket bracket (230), a drying sliding cover plate (240), a drying heating unit (250) and a drying circulation fan assembly (260); the inner tank body (220) and the outer drying box body (210) are arranged at intervals to form an interval cavity; the drying material basket bracket (230) is arranged on the bottom of the inner tank accommodating cavity of the inner tank body (220); the drying sliding cover plate (240) provided with a top cover cavity is arranged on the top of the drying outer box body (210) in a lateral sliding control manner; the drying heating unit (250) is arranged in the interval cavity; the drying circulation fan assembly (260) is installed on the drying outer box body (210); and a circulating drying flow path is formed by the drying circulation fan assembly (260), the interval cavity, the top cover cavity and the inner tank accommodating cavity.

4. The cleaning machine according to claim 2, characterized in that: The throwing mechanism (300) adopts a single-drive multi-basket synchronous throwing structure design, comprising a plurality of overall concave throwing frames (310), a throwing frame connecting beam (320), a push rod throwing assembly (330), a throwing transmission support cam assembly (340), a throwing drive reversing assembly (350), a throwing guide assembly (360) and a basket throwing positioning guide unit (370); A plurality of the throwing frames (310) are arranged side by side and fixedly connected at the ends of the frames by the throwing frame connecting beams (320); the push rod throwing assembly (330) and the throwing guide assembly (360) are arranged at the two ends of each throwing frame (310); a throwing transmission support cam assembly (340) is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame (310); the bottoms of every two push rod throwing assemblies (330) are installed at the two ends of the throwing transmission support cam assembly (340); the throwing drive reversing assembly (350) is driven and connected to the throwing transmission support cam assembly (340); the throwing guide assembly (360) is sleeved on the push rod throwing assembly (330) and fixed externally to the outer frame (700) of the cleaning machine; a basket throwing positioning guide unit (370) corresponding to accommodating a plurality of flower baskets is arranged on the supporting flat frame of the throwing frame (310).

5. The cleaning machine according to claim 2, characterized in that: The slow-pull mechanism (400) comprises a slow-pull lifting frame (410) which is generally concave, an inclined support seat (420), a slow-pull lifting drive unit (430), a flower basket slow-pull positioning guide unit (440), a slow-pull inclined limit assembly (450) and an inclined shaft assembly (460); the longitudinal ends of the inclined support seat (420) are pivotally mounted above the two ends of the flat frame of the slow-pull lifting frame (410) through an inclined shaft assembly (460); the slow-pull lifting drive unit (430) adopts a non-belt transmission method and the driving end is connected to the vertical frames at the two ends of the slow-pull lifting frame (410); and a plurality of flower basket slow-pull positioning guide units (440) are arranged on the inclined support seat (420).

6. The cleaning machine according to claim 2, characterized in that: The basket reflow line (500) includes a reflow drive (520), a reflow drive wheel chain assembly (530) and a reflow basket blocking mechanism (540) arranged on a reflow rack (510), wherein the chain of the reflow drive wheel chain assembly (530) is arranged along the reflow rack (510), the reflow drive (520) is connected to the reflow drive wheel chain assembly (530), and the reflow basket blocking mechanism (540) is arranged on the lower surface of the reflow rack (510), and the blocking portion of the reflow basket blocking mechanism (540) can be controllably protruded from the upper surface of the reflow rack (510) to block and position the silicon wafer basket on the reflow rack (510).

7. The cleaning machine according to claim 2, characterized in that: The liquid-controlled cleaning system (600) comprises a clean water supply circuit (610), a heating water tank (620), a cleaning liquid supply circuit (630), a cleaning drainage circuit (640) and a water tank self-circulation circuit (650); the clean water supply circuit (610) is arranged between the multi-stage water tank (100) and the heating water tank (620), and is used to provide hot water and cold water with adjustable ratios to the multi-stage water tank (100); the cleaning liquid supply circuit (630) is used to provide cleaning liquids of different types and ratios to the plurality of cleaning tanks (120) and washing tanks (130); the cleaning drainage circuit (640) is connected to each water tank of the multi-stage water tank (100) in a controllable manner; and the water tank self-circulation circuit (650) is connected to the corresponding washing tank (130), and is used to circulate and stir the cleaning liquid in the washing tank (130).

8. The cleaning machine according to claim 2, characterized in that: The basket handling mechanism adopts a basket hoisting module (800) or a handling robot; the basket hoisting module (800) is spatially controlled to be installed on the outer frame (700) of the cleaning machine, and comprises a hoisting crossbeam driving unit (810), a hoisting longitudinal beam driving unit (820), a hoisting vertical driving unit (830) and a hook unit (840); the hook unit (840) is driven by the hoisting crossbeam driving unit (810), the hoisting longitudinal beam driving unit (820) and the hoisting vertical driving unit (830) to achieve movement in the X, Y and Z directions; wherein the hook unit (840) comprises a hook mounting top plate (841), a hook longitudinal driver (842), a main hook plate (843), a basket sensing The invention relates to a hook plate (844), a hook tension spring assembly (845) and a hook plate proximity switch (846); two hook longitudinal drivers (842) are arranged at both ends of a horizontally arranged hook installation top plate (841); the tops of the two vertically arranged main hook plates (843) are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers (842); the upper and lower movable limit positions of the basket sensing hook plate (844) are arranged on the side of the main hook plate (843) and are movable and reset by the hook tension spring assembly (845); the hook plate proximity switch (846) is arranged on the top of the basket sensing hook plate (844) to determine whether the silicon wafer flower basket is hung on the main hook plate (843) and the basket sensing hook plate (844).

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