EDS energy disperse spectroscopy

Abstract

The invention discloses an EDS energy disperse spectroscopy, the energy disperse spectroscopy comprises a controller, a detector, a driving adjusting device and a focusing device, the controller and the detector are fixedly installed together, the controller and the driving adjusting device are installed together, and the detector is inserted in the focusing device. The structure that the driving adjusting device is matched with the detector is adopted, automatic adjustment of the detection distance can be achieved, and the detection distance adjusting device does not need manual operation and can be remotely and automatically controlled. The invention can be widely applied to the EDS on the scanning electron microscope.

Description

Technical Field

[0001] The invention discloses an energy spectrometer, in particular to an EDS energy spectrometer, belonging to the technical field of electronic analysis instruments. Background Art

[0002] EDS (Energy Dispersive Spectroscopy) is an analytical tool, usually used in conjunction with a scanning electron microscope (SEM) for elemental analysis of materials. Conventional spectrometers can perform qualitative and quantitative analysis of elemental composition and point, line, and surface distribution analysis. EDS spectrometers determine the elements present in a sample and their relative abundance by measuring the energy of characteristic X-rays emitted by the sample. Its main features include: it can identify multiple elements in a sample, usually ranging from boron to uranium; it can provide quantitative information on elements to help study the composition of materials; it is suitable for component analysis of tiny areas, and is applicable to fields such as materials science, metallurgy, electronics, and biology; compared with other analytical techniques, EDS can quickly acquire data and improve efficiency.

[0003] The EDS spectrometers in the prior art generally have the disadvantages of low integration, large total volume, and the need for manual adjustment of the detection distance. Summary of the invention

[0004] In view of the above-mentioned shortcoming that the detection distance of the EDS spectrometer in the prior art needs to be adjusted manually, the present invention provides an EDS spectrometer which adopts a driving adjustment device in conjunction with a detector structure to achieve automatic adjustment of the detection distance.

[0005] The technical solution adopted by the present invention to solve its technical problem is: an EDS spectrometer, the spectrometer includes a controller, a detector, a drive adjustment device and a focusing device, the controller and the detector are fixedly installed together, the controller and the drive adjustment device are installed together, and the detector is inserted in the focusing device.

[0006] The technical solution adopted by the present invention to solve the technical problem further includes: The controller comprises a host computer middle frame, a first heat sink of the host computer, a second heat sink of the host computer, a first control board of the host computer, a second control board of the host computer, a third control board of the host computer, a lower computer middle frame, a first heat sink of the lower computer, a second heat sink of the lower computer, a first control board of the lower computer, a second control board of the lower computer and a bottom plate. The first control board of the host computer is fixedly mounted on the host computer middle frame, and the second control board of the host computer is fixedly mounted on the first control board of the host computer through a copper column. In specific implementation, the third control board of the host computer is fixedly mounted on the host computer middle frame, and the first heat sink of the host computer and the second heat sink of the host computer are respectively The upper computer middle frame is fixedly installed by screws on both sides of the upper computer middle frame, the first heat sink of the upper computer and the second heat sink of the upper computer are respectively fixedly provided with heat fins on the outer sides, the first control board of the lower computer and the second control board of the lower computer are respectively fixedly installed on both sides of the lower computer middle frame, the first heat sink of the lower computer and the second heat sink of the lower computer are respectively fixedly installed on both sides of the lower computer middle frame, the first heat sink of the lower computer and the second heat sink of the lower computer are respectively fixedly provided with heat fins on the outer sides, the upper computer middle frame and the lower computer middle frame are fixedly installed together, a bottom plate is fixedly installed on the bottom of the lower computer middle frame, and limit baffles are respectively extended outward on the front and rear sides of the bottom plate.

[0007] The detector comprises a detector host and an electron trap. The electron trap is fixedly arranged at the receiving window position on the detector host, and the other end of the detector is installed together with the controller.

[0008] The driving and adjusting device includes a slide rail, a slider, a motor, a screw rod and a screw sleeve. The slider is arranged on the slide rail and can slide back and forth along the slide rail. The controller is fixedly installed on the slider. The screw rod is arranged parallel to the slide rail. The motor directly or indirectly drives the screw rod to rotate. The screw sleeve is mounted on the screw rod, and the screw sleeve is directly or indirectly installed with the controller.

[0009] There are two slide rails, which are arranged in parallel. Two sliders are arranged on each slide rail. One end of the slide rail is fixedly mounted on the motor mounting seat, and the other end of the slide rail is fixedly mounted on the focusing device. The motor mounting seat is "U" shaped, and the motor is fixedly mounted on the motor mounting seat. A coupling is arranged in the motor mounting seat, the rotor of the motor is connected to the coupling, and the screw rod is connected to the other end of the coupling.

[0010] The outer cover of the motor is equipped with a motor protection cover, the motor protection cover is equipped with an interface, the interface is electrically connected to the motor, a bearing is respectively arranged in the motor mounting seat and the focusing device, and the two bearings are respectively mounted on both ends of the screw rod.

[0011] A driving plate is fixedly mounted on the screw sleeve by screws, the driving plate is fixedly mounted together with the controller, and a bottom protective cover is mounted on the outer side cover of the screw rod.

[0012] A limit switch is installed on the motor mounting seat and the focusing device respectively, and the limit switch is arranged correspondingly to the limit baffle on the bottom plate.

[0013] The focusing device comprises a flange mounting seat, a detector mounting seat and more than two flanges, wherein the more than two flanges are installed between the flange mounting seat and the detector mounting seat, and each flange has at least one mounting surface that is inclined, that is, the angle between the inclined mounting surface and the axis of the flange is not 90°.

[0014] The flange mounting seat is in a circular shape, and the two mounting surfaces are arranged in parallel. A first mounting hole is provided on the flange mounting seat, and three first mounting holes are arranged. The three first mounting holes are evenly distributed along the center of the flange mounting seat. The middle of the flange mounting seat is a first through hole. A second mounting hole is provided on the flange mounting seat, and eight second mounting holes are arranged. The eight second mounting holes are evenly distributed along the center of the flange mounting seat. A first sealing ring mounting groove is provided on one side of the flange mounting seat, and a second sealing ring mounting groove is provided on the other side of the flange mounting seat. A first scale is provided on the outer side of the flange mounting seat along the circumferential direction; The first flange is in the shape of a circular ring, wherein the angle between the mounting surface in contact with the flange mounting seat and the axis of the first flange is 90°, the angle between the other mounting surface and the axis of the first flange is non-90°, the angle α between the two mounting surfaces of the first flange is between 2° and 8°, preferably 5°, a first waist-shaped hole is provided on the first flange, the first waist-shaped hole is arranged corresponding to the second mounting hole, there are six first waist-shaped holes, the six first waist-shaped holes are evenly distributed along the center of the first flange, a step is provided at the bottom of the first waist-shaped hole, the middle of the first flange is a second through hole, a third mounting hole is provided on the first flange, there are eight third mounting holes, the eight third mounting holes are evenly distributed along the center of the first flange, a third sealing ring mounting groove is provided on one side of the first flange, and a second scale is provided along the circumferential direction on the outer side of the first flange; The second flange is in the shape of a circular ring, and the angles between the two mounting surfaces and the axis of the second flange are all non-90° angles. The angle β between the two mounting surfaces of the second flange is between 4° and 16°, preferably 10°. The two mounting surfaces of the second flange 44 are symmetrically arranged. A second waist-shaped hole is provided on the second flange, and the second waist-shaped hole is arranged corresponding to the third mounting hole. There are six second waist-shaped holes, and the six second waist-shaped holes are evenly distributed along the center of the second flange. A step is provided at the bottom of the second waist-shaped hole. The middle of the second flange is a third through hole. A fourth mounting hole is provided on the second flange, and there are eight fourth mounting holes. The eight fourth mounting holes are evenly distributed along the center of the second flange. A third ruler and a fourth ruler are provided on the outer side of the second flange along the circumferential direction. The third ruler and the fourth ruler are respectively arranged on the upper and lower sides of the outer circle of the second flange; The third flange is in the shape of a circular ring, the angle between the mounting surface of the third flange in contact with the detector mounting seat and the axis of the third flange is 90°, the angle between the other mounting surface and the axis of the third flange is non-90°, the angle γ between the two mounting surfaces of the third flange is between 2° and 8°, preferably 5°, a third waist-shaped hole is provided on the third flange, the third waist-shaped hole is provided corresponding to the fourth mounting hole, there are six third waist-shaped holes, the six third waist-shaped holes are evenly distributed along the center of the third flange, a step is provided at the bottom of the third waist-shaped hole, the third flange is in the middle of the fourth through hole, the third flange is provided with a fifth mounting hole, there are six fifth mounting holes, the six fifth mounting holes are evenly distributed along the center of the third flange, a fourth sealing ring mounting groove is provided on one side of the third flange, a fifth sealing ring mounting groove is provided on the other side of the third flange, and a fifth scale is provided along the circumferential direction on the outer side of the third flange; The detector mounting seat is in a "T" shape, and the two mounting surfaces of the detector mounting seat are arranged in parallel. A sixth mounting hole is opened on the detector mounting seat. There are six sixth mounting holes, and the six sixth mounting holes are evenly distributed in a circle along the center of the detector mounting seat. The middle of the detector mounting seat is a fifth through hole, and the detector is fixedly installed in the fifth through hole. A mounting plate for installing a slide rail and a limit switch extends outward from the side of one mounting surface of the detector mounting seat.

[0015] The beneficial effects of the present invention are as follows: the present invention adopts a driving adjustment device in conjunction with a detector structure to achieve automatic adjustment of the detection distance, and the detection distance adjustment device can be remotely and automatically controlled without manual operation. The present invention can be widely used in EDS spectrometers on scanning electron microscopes.

[0016] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0018] Figure 2 It is a schematic diagram of the structure of the decomposed state of the present invention.

[0019] Figure 3 It is a schematic diagram of the three-dimensional structure of the controller part in the present invention.

[0020] Figure 4 It is a schematic diagram of the partially decomposed state structure of the controller in the present invention.

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the detector part in the present invention.

[0022] Figure 6 It is a schematic diagram of the structure of the detector part in the decomposed state in the present invention.

[0023] Figure 7 It is a schematic diagram of a partial three-dimensional structure of the driving and adjusting device in the present invention.

[0024] Figure 8 It is a schematic diagram of the structure of the driving and adjusting device in the present invention in a partially exploded state.

[0025] Fig. 9 It is a schematic diagram of a partial three-dimensional structure of the focusing device in the present invention.

[0026] Fig.10 It is a schematic diagram of the structure of the focusing device in the present invention in a partially exploded state.

[0027] Fig.11 It is a front view structural schematic diagram of the flange seat in the present invention.

[0028] Fig.12 It is a schematic diagram of the rear view structure of the flange seat in the present invention.

[0029] Fig.13 It is a schematic diagram of the three-dimensional structure of the flange seat in the present invention.

[0030] Fig.14 This is a schematic diagram of the top view of the first flange in the present invention.

[0031] Fig.15 It is a schematic diagram of the three-dimensional structure of the first flange in the present invention.

[0032] Fig.16 It is a schematic diagram of the top view structure of the second flange in the present invention.

[0033] Fig.17 It is a schematic diagram of the rear view structure of the second flange in the present invention.

[0034] Fig.18 It is a schematic diagram of the three-dimensional structure of the second flange in the present invention.

[0035] Fig.19 It is a schematic diagram of the front view structure of the third flange in the present invention.

[0036] Fig. 20 This is a schematic diagram of the top view of the third flange in the present invention.

[0037] Fig.21 It is a schematic diagram of the rear view structure of the third flange in the present invention.

[0038] Fig. 22 It is a schematic diagram of the three-dimensional structure of the third flange in the present invention.

[0039] Fig.23 It is a schematic diagram of the three-dimensional structure of the detector mounting base in the present invention.

[0040] Fig.24It is a schematic diagram of the three-dimensional structure of the flange seat and the first mounting structure of the first flange plate in the present invention.

[0041] Fig.25 It is a front view structural schematic diagram of the flange seat and the first flange plate first mounting structure in the present invention.

[0042] Fig.26 It is a schematic diagram of the three-dimensional structure of the flange seat and the first flange plate and the second mounting structure in the present invention.

[0043] Fig. 27 It is a front view structural schematic diagram of the flange seat and the first flange plate and the second mounting structure in the present invention.

[0044] In the figure, 1-controller, 11-upper computer middle frame, 12-upper computer first heat sink, 13-lower computer middle frame, 14-lower computer first heat sink, 15-upper computer second heat sink, 16-lower computer second heat sink, 17-bottom plate, 18-limit baffle, 19-upper computer first control board, 110-upper computer second control board, 111-upper computer third control board, 112-lower computer first control board, 113-lower computer second Control board, 2-detector, 21-detector host, 22-electron trap, 23-receiving window, 3-drive adjustment device, 31-bottom protection cover, 32-slide rail, 33-slider, 34-motor protection cover, 35-interface, 36-motor, 37-motor mounting seat, 38-coupling, 39-screw, 310-drive plate, 311-screw sleeve, 312 bearing, 313-limit switch, 4-focus device, 41-scanning electric Mirror SEM mounting wall, 42-flange mounting seat, 421-first mounting hole, 422-first through hole, 423-second mounting hole, 424-first sealing ring mounting groove, 425-first scale, 426-second sealing ring mounting groove, 43-first flange, 431-first waist-shaped hole, 432-second through hole, 433-third mounting hole, 434-third sealing ring mounting groove, 435-second scale, 44-second flange , 441-second waist-shaped hole, 442-third through hole, 443-fourth mounting hole, 444-third ruler, 445-fourth ruler, 45-third flange, 451-third waist-shaped hole, 452-fourth through hole, 453-fifth mounting hole, 454-fourth sealing ring mounting groove, 455-fifth ruler, 456-fifth sealing ring mounting groove, 46-detector mounting seat, 461-sixth mounting hole, 462-fifth through hole. DETAILED DESCRIPTION

[0045] This embodiment is a preferred implementation mode of the present invention. All other embodiments whose principles and basic structures are the same or similar to those of this embodiment are within the protection scope of the present invention.

[0046] The present invention mainly protects an EDS (Energr Dispersive X-ray Spectroscepy), which is a common working unit of a scanning electron microscope (SEM) and can perform qualitative and quantitative analysis of elemental composition and point-line-surface distribution analysis, and can make up for the deficiency that SEM can only perform morphology analysis.

[0047] Please refer to the attached Figure 1 To Attachment Fig.10 The present invention mainly includes a controller 1, a detector 2, a driving and adjusting device 3 and a focusing device 4. The controller 1 and the detector 2 are fixedly installed together. The controller 1 and the driving and adjusting device 3 are installed together. The driving device 3 can push the controller 1 to move together with the detector 2. The detector 2 is inserted in the focusing device 4, and the focusing position and focusing distance of the detector 2 can be adjusted by the focusing device 4.

[0048] Please refer to the attached Figure 3 and attached Figure 4 In this embodiment, the controller 1 includes a host computer and a slave computer, wherein the host computer is usually a computer equipped with an operating system, communicates with the slave computer, processes the data and information uploaded by the slave computer, and controls the operation of the slave computer. The host computer requires the installation of the main EDS program software, and the user operates the host computer through the UI interface. In the prior art, the host computer of the common EDS spectrometer is a desktop computer or a laptop computer. The host computer in this embodiment is highly integrated and installed together with the slave computer, and has the same functions as the host computer. During specific implementation, a conventional host computer can also be used instead. The slave computer is a digital multi-channel analysis system mainly composed of a DSP and FPGA system, including a DAC for controlling the deflection of a scanning electron microscope and an ADC for collecting energy spectrum data and electronic image data. The slave computer communicates with the scanning electron microscope and the host computer at the same time. The circuit system and circuit structure of this component are the same as those of the conventional EDS spectrometer slave computer. In the present invention, only its installation structure is improved.

[0049] In this embodiment, the controller 1 mainly includes an upper computer middle frame 11, an upper computer first heat sink 12, an upper computer second heat sink 15, an upper computer first control board 19, an upper computer second control board 110, an upper computer third control board 111, a lower computer middle frame 13, a lower computer first heat sink 14, a lower computer second heat sink 16, a lower computer first control board 112, a lower computer second control board 113 and a bottom plate 17. The upper computer first control board 19 is fixedly mounted on the upper computer middle frame 11, and the upper computer second control board 110 is fixedly mounted on the upper computer first control board 19 through a copper column. In specific implementation, the upper computer can also be The first control board 19 and the second control board 110 of the host computer are respectively mounted on the host computer middle frame 11, and the third control board 111 of the host computer is fixedly mounted on the host computer middle frame 11. Since the host computer control system is relatively complex, in this embodiment, it is divided into several control boards for design to make its structure more compact. In specific implementation, it can also be designed on the same control board, or it can be designed into more control boards according to structural requirements. The first heat sink 12 of the host computer and the second heat sink 15 of the host computer are respectively fixedly mounted on both sides of the host computer middle frame 11 by screws. The first heat sink 12 of the host computer and the second heat sink 15 of the host computer are fixedly mounted on both sides of the host computer middle frame 11 by screws. The upper and lower sides are respectively fixed with heat dissipation fins. The upper computer first heat dissipation plate 12 and the upper computer second heat dissipation plate 15 can be used as heat dissipation plates on one hand, and can also be used as upper computer protection covers on the other hand. The lower computer first control board 112 and the lower computer second control board 113 are respectively fixedly mounted on both sides of the lower computer middle frame 13. Since the lower computer control system is relatively complex, in this embodiment, it is separated into several control boards for design to make its structure more compact. In specific implementation, it can also be designed on the same control board, or it can be designed into more control boards according to structural requirements. The lower computer first heat dissipation plate 14 and the lower computer second heat dissipation plate 113 are respectively fixedly mounted on both sides of the lower computer middle frame 13. The heat plates 16 are fixedly installed on both sides of the lower machine middle frame 13 by screws, and cooling fins are fixedly arranged on the outer sides of the first heat sink 14 and the second heat sink 16 of the lower machine. The first heat sink 14 and the second heat sink 16 of the lower machine can be used as heat sinks on the one hand, and can also be used as protective covers of the lower machine on the other hand. The upper machine middle frame 11 and the lower machine middle frame 13 are fixedly installed together by screws to form an integrated controller. A bottom plate 17 is fixedly installed at the bottom of the lower machine middle frame 13. In this embodiment, limit baffles 18 are respectively extended outward on the front and rear sides of the bottom plate 17 to limit the movement distance.

[0050] Please refer to the attached Figure 5 and attached Figure 6In this embodiment, the detector 2 is a silicon drift detector (SDD), which is used to receive X-ray fluorescence photons. The detector 2 includes a detector host 21 and an electron trap 22. The electron trap 22 is fixedly arranged at the receiving window 23 on the detector host 21, and is used to filter out electrons and only allow photons to enter the detector receiving window 23. The other end of the detector 2 is fixedly installed with the lower computer in the controller 1, and transmits the detection signal to the lower computer in the controller 1.

[0051] The detector 2, the lower computer and the upper computer together constitute the main body of the spectrometer.

[0052] Please refer to the attached Figure 7 and attached Figure 8 In this embodiment, the driving and adjusting device 3 mainly includes a slide rail 32, a slider 33, a motor 36, a screw rod 39 and a screw sleeve 312. The slider 33 is arranged on the slide rail 32 and can slide back and forth along the slide rail 32. The controller 1 is fixedly installed on the slider 33. The screw rod 39 is arranged parallel to the slide rail 32. The motor 36 directly or indirectly drives the screw rod 39 to rotate. The screw sleeve 312 is mounted on the screw rod 39, and the screw sleeve 312 is directly or indirectly installed with the controller 1.

[0053] In this embodiment, two slide rails 32 are provided, and the two slide rails 32 are arranged in parallel. Two sliders 33 are arranged on each slide rail 32, so that the sliding process is smoother.

[0054] In this embodiment, one end of the slide rail 32 is fixedly mounted on the motor mounting seat 37, and the other end of the slide rail 32 is fixedly mounted on the focusing device 4. The motor mounting seat 37 is "U"-shaped, and the motor 36 is fixedly mounted on the motor mounting seat 37. A coupling 38 is arranged in the motor mounting seat 37. The rotor of the motor 36 is connected to the coupling 38, and the screw rod 39 is connected to the other end of the coupling 38, that is, the motor 36 drives the screw rod 39 to rotate through the coupling 38.

[0055] In this embodiment, the motor 36 is covered with a motor protection cover 34 on the outside, and an interface 35 is installed on the motor protection cover 34. The interface 35 is electrically connected to the electrode 36, and power and control signals can be input through the interface 35 to drive and control the motor 36 to work.

[0056] In this embodiment, a bearing 312 is correspondingly disposed in the motor mounting seat 37 and the focusing device 4, and the two bearings 312 are respectively mounted on both ends of the screw rod 39, so that the screw rod 39 can rotate more stably and smoothly.

[0057] In this embodiment, a drive plate 310 is fixedly mounted on the screw sleeve 311 by screws, and the drive plate 310 is fixedly mounted together with the controller 1. When the screw rod 39 rotates, the screw sleeve 311 drives the drive plate 310 to slide forward and backward along the screw rod 39, and the controller 1 is pushed forward and backward by the drive plate 310 to adjust the detection distance, so that the receiving window of the spectrometer detector reaches the required position. In this embodiment, the outer side cover of the screw rod 39 is equipped with a bottom protective cover 31, which can protect the screw rod 39.

[0058] In this embodiment, a limit switch 313 is installed on the motor mounting bracket 37 and the focusing device 4 respectively. The limit switch 313 is arranged corresponding to the limit baffle 18 on the base plate 17. The cooperation between the limit baffle 18 and the limit switch 313 can prevent the moving parts from exceeding the stroke.

[0059] In this embodiment, the focusing device 4 mainly includes a flange mounting seat 42, a detector mounting seat 46 and more than two flange plates. The more than two flange plates are installed between the flange mounting seat 42 and the detector mounting seat 46. Each flange plate has at least one mounting surface that is inclined, that is, the angle between the inclined mounting surface and the axis of the flange plate is not 90°. The end face of each flange unit has an angle, and each flange can be adjusted 360° around the rotation axis. By adjusting the angle of each flange, the direction of the detector optical axis can be adjusted until it coincides with the focus.

[0060] The following will be specifically described using three flange structures. During implementation, the number of flanges may also be two or more.

[0061] Please refer to the attached Fig.11 To Attachment Fig.13In this embodiment, the flange mounting seat 42 is in a circular shape, and the two mounting surfaces are arranged in parallel. A first mounting hole 421 is provided on the flange mounting seat 42, and three first mounting holes 421 are arranged. The three first mounting holes 421 are evenly distributed along the circumference of the center of the flange mounting seat 42. The flange mounting seat 42 can be installed together with the scanning electron microscope SEM mounting wall 41 through the first mounting holes 421. The middle of the flange mounting seat 42 is a first through hole 422 for inserting the detector 2. The flange mounting seat 42 is provided with a second mounting hole 423 for installing the first flange plate 43. In this embodiment, eight second mounting holes 423 are arranged. During specific implementation, they can also be specifically set according to actual needs. The eight second mounting holes 4231 are evenly distributed along the circumference of the center of the flange mounting seat 42. Preferably, the second mounting hole 423 adopts a blind hole, and during specific implementation, a through hole can also be used. In this embodiment, a first sealing ring installation groove 424 is provided on one side of the flange mounting seat 42 for installing a second sealing ring to achieve sealing between the first flange 43 and the flange mounting seat 42, and a second sealing ring installation groove 426 is provided on the other side of the flange mounting seat 42 for installing the first sealing ring to achieve sealing between the flange mounting seat 42 and the SEM mounting wall 41. In this embodiment, a first scale 425 is provided on the outer side of the flange mounting seat 42 along the circumferential direction.

[0062] Please refer to the attached Fig.14 To Attachment Fig.15In this embodiment, the first flange 43 is in a circular shape, wherein the angle between one mounting surface (the mounting surface in contact with the flange mounting seat 42) and the axis of the first flange 43 is 90°, and the angle between the other mounting surface and the axis of the first flange 43 is non-90°, that is, there is a certain angle between the two mounting surfaces of the first flange 43. In this embodiment, the angle α between the two mounting surfaces of the first flange 43 is between 2° and 8°, preferably 5°. In this embodiment, a first waist-shaped hole 431 is provided on the first flange 43, and the first waist-shaped hole 431 is provided corresponding to the second mounting hole 423. In this embodiment, six first waist-shaped holes 431 are provided. In specific implementation, they can also be specifically set according to actual needs. The six first waist-shaped holes 431 are evenly distributed along the circumference of the center of the first flange 43. In this embodiment, the number of the first waist-shaped holes 431 and the second mounting hole 423 is not equal, and the first waist-shaped hole 431 is waist-shaped, which can ensure that the first flange 43 and the flange mounting seat 42 can be adjusted 360° at all angles without an adjustment blind spot, and can ensure that at any angle, there are at least four screws connecting the first flange 43 and the flange mounting seat 42 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the first waist-shaped hole 431, which can be used to clamp the screw cap. The middle of the first flange 43 is a second through hole 432 for inserting the detector 2. The first flange 43 is provided with a third mounting hole 433 for mounting the second flange 44. In this embodiment, eight third mounting holes 433 are provided. In specific implementation, they can also be specifically set according to actual needs. The eight third mounting holes 433 are evenly distributed along the circumference of the center of the first flange 43. Preferably, the third mounting holes 433 are blind holes. In specific implementation, through holes can also be used. In this embodiment, a third sealing ring mounting groove 434 is provided on one side of the first flange 43 for mounting the third sealing ring to achieve sealing between the second flange 44 and the first flange 43. In this embodiment, a second scale 435 is provided on the outer side of the first flange 43 along the circumferential direction.

[0063] Please refer to the attached Fig.16 To Attachment Fig.18In this embodiment, the second flange 44 is in a circular shape, and the angles between its two mounting surfaces and the axis of the second flange 44 are all non-90°, that is, the two mounting surfaces of the second flange 44 and the plane defined by the second flange 44 form a certain angle. In this embodiment, the angle β between the two mounting surfaces of the second flange 44 is between 4° and 16°, preferably 10°, and the two mounting surfaces of the second flange 44 are symmetrically arranged, that is, the angle between each mounting surface of the second flange 44 and the plane defined by the second flange 44 is between 2° and 8°, preferably 5°. In this embodiment, a second waist-shaped hole 441 is provided on the second flange 44, and the second waist-shaped hole 441 is provided corresponding to the third mounting hole 433. In this embodiment, six second waist-shaped holes 441 are provided. When implementing, they can also be specifically set according to actual needs. The six second waist-shaped holes 441 are evenly distributed along the center of the second flange 44. In this embodiment, the number of the second waist-shaped holes 441 and the third mounting hole 433 is not equal, and the second waist-shaped holes 441 are waist-shaped, which can ensure that the second flange 44 and the first flange 43 can be adjusted 360° at all angles without an adjustment blind spot, and can ensure that at any angle, there are at least four screws connecting the second flange 44 and the first flange 43 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the second waist-shaped hole 441, which can be used to clamp the screw cap. The second flange 44 has a third through hole 442 in the middle for inserting the detector 2. The second flange 44 has a fourth mounting hole 443 for mounting the third flange 45. In this embodiment, eight fourth mounting holes 443 are provided. In specific implementation, they can also be specifically set according to actual needs. The eight fourth mounting holes 443 are evenly distributed along the circumference of the center of the second flange 44. Preferably, the fourth mounting holes 443 are blind holes. In specific implementation, through holes can also be used. In this embodiment, the outer side of the second flange 44 is provided with a third scale 444 and a fourth scale 445 along the circumferential direction. The third scale 444 and the fourth scale 445 are respectively arranged on the upper and lower sides of the outer circle of the second flange 44.

[0064] Please refer to the attached Fig.19 To Attachment Fig. 22In this embodiment, the third flange 45 is in a circular shape, and the angle between one of the mounting surfaces of the third flange 45 (the mounting surface in contact with the detector mounting seat 46) and the axis of the third flange 45 is 90°, and the angle between the other mounting surface and the axis of the third flange 45 is non-90°, that is, there is a certain angle between the two mounting surfaces of the third flange 45. In this embodiment, the angle γ between the two mounting surfaces of the third flange 45 is between 2° and 8°, preferably 5°. In this embodiment, a third waist-shaped hole 451 is provided on the third flange 45, and the third waist-shaped hole 451 is provided corresponding to the fourth mounting hole 443. In this embodiment, six third waist-shaped holes 451 are provided. When implementing, they can also be specifically set according to actual needs. The six third waist-shaped holes 451 are evenly distributed along the circumference of the center of the third flange 45. In this embodiment, the number of the third waist-shaped holes 451 and the fourth mounting hole 443 is not equal, and the third waist-shaped hole 451 is waist-shaped, which can ensure that the third flange 45 and the second flange 44 can be adjusted 360° at all angles without an adjustment blind spot, and can ensure that at any angle, there are at least four screws between the third flange 45 and the second flange 44 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the third waist-shaped hole 451, which can be used to clamp the screw cap. The third flange 45 has a fourth through hole 452 in the middle for inserting the detector 2. The third flange 45 has a fifth mounting hole 453 for mounting the detector mounting seat 46. In this embodiment, six fifth mounting holes 453 are provided. In specific implementation, they can also be specifically set according to actual needs. The six fifth mounting holes 453 are evenly distributed along the circumference of the center of the third flange 45. Preferably, the fifth mounting holes 453 are blind holes. In specific implementation, through holes can also be used. In this embodiment, a fourth sealing ring mounting groove 454 is provided on one side of the third flange 45 for mounting the fourth sealing ring to achieve sealing between the third flange 45 and the second flange 44. A fifth sealing ring mounting groove 456 is provided on the other side of the third flange 45 for mounting the fifth sealing ring to achieve sealing between the detector mounting seat 46 and the third flange 45. In this embodiment, a fifth scale 455 is provided on the outer side of the third flange 45 along the circumferential direction.

[0065] Please refer to the attached Fig.23In this embodiment, the detector mounting seat 46 is in a "T" shape, and the two mounting surfaces of the detector mounting seat 46 are arranged in parallel. A sixth mounting hole 461 is opened on the detector mounting seat 46, and six sixth mounting holes 461 are arranged. The six sixth mounting holes 461 are evenly distributed in a circle along the center of the detector mounting seat 46. The detector mounting seat 46 and the third flange plate 45 can be installed together through the sixth mounting hole 461. The middle of the detector mounting seat 46 is a fifth through hole 462, and the detector 2 is fixedly installed in the fifth through hole 462. A mounting plate extends outward from the side of a mounting surface of the detector mounting seat 46 for installing the slide rail 32 and the limit switch 313.

[0066] In the above embodiment, three flanges are used as an example for explanation, wherein the first flange 42 and the third flange 44 are arranged at both ends, which are defined as end flanges respectively, and the second flange 43 is arranged in the middle, which is defined as the middle flange. If two flanges are arranged, the second flange 43 in the middle can be cancelled. If more flanges are arranged, the flanges of the second flange 43 structure can be increased accordingly. As for the setting of the sealing ring installation groove and the sealing ring, as long as the sealing between the corresponding flanges can be satisfied, there is no specific limitation on which flange to be set on. The three flanges in this embodiment are stacked and their diameters decrease successively. Preferably, the diameter of the upper-level flange is smaller than the opening position of the waist-shaped hole on the current-level flange, that is, the upper-level flange will not block the waist-shaped hole on the current-level flange, so that the screws in the waist-shaped hole can be easily removed and installed, and the relative angle between the flanges can be easily adjusted.

[0067] Rotate the first flange 43, the second flange 44 and the third flange 45. The end faces of each flange have an angle, which can be adjusted 360° around their respective rotation axes. Adjust the angle of each flange separately, so as to adjust the direction of the detector optical axis until it coincides with the focus, and then fix it. Please refer to the attached Fig.24 To Attachment Fig. 27 The figure takes the connection relationship between the first flange 43 and the flange mounting seat 42 as an example for explanation, wherein the attached Fig.24 To Attachment Fig.25 When the display is 0°, the connection diagram between the first flange 43 and the flange mounting seat 42 is shown. In the figure, the first flange 43 and the flange mounting seat 42 are fixed by eight screws. Fig.26 To Attachment Fig. 27 The figure shows a schematic diagram of the connection between the first flange 43 and the flange mounting seat 42 when the flange 43 is rotated by 22.50 degrees. In the figure, the first flange 43 and the flange mounting seat 42 are fixed by six screws.

[0068] The present invention adopts a driving adjustment device in conjunction with a detector structure to achieve automatic adjustment of the detection distance, and the detection distance adjustment device does not need to be manually operated but can be remotely and automatically controlled. The present invention can be widely used in EDS spectrometers on scanning electron microscopes.

Claims

1. An EDS spectrometer, characterized in that: The energy spectrometer comprises a controller (1), a detector (2), a drive adjustment device (3) and a focusing device (4); the controller (1) and the detector (2) are fixedly mounted together, the controller (1) and the drive adjustment device (3) are mounted together, and the detector (2) is inserted into the focusing device (4).

2. The EDS spectrometer according to claim 1, characterized in that: The controller (1) comprises an upper computer middle frame (11), an upper computer first heat sink (12), an upper computer second heat sink (15), an upper computer first control board (19), an upper computer second control board (110), an upper computer third control board (111), a lower computer middle frame (13), a lower computer first heat sink (14), a lower computer second heat sink (16), a lower computer first control board (112), a lower computer second control board (113) and a bottom plate (17); the upper computer first control board (19) is fixedly mounted on the upper computer middle frame (11); the upper computer second control board (110) is fixedly mounted on the upper computer first control board (19) via a copper column; in a specific implementation, the upper computer third control board (111) is fixedly mounted on the upper computer middle frame (11); the upper computer first heat sink (12) and the upper computer second heat sink (16) are fixedly mounted on the upper computer first control board (19); The heat sinks (15) are fixedly mounted on both sides of the upper computer middle frame (11) by screws, and heat sink fins are fixedly mounted on the outer sides of the upper computer first heat sink (12) and the upper computer second heat sink (15). The lower computer first control board (112) and the lower computer second control board (113) are fixedly mounted on both sides of the lower computer middle frame (13). The lower computer first heat sink (14) and the lower computer second heat sink (16) are fixedly mounted on both sides of the lower computer middle frame (13), and heat sink fins are fixedly mounted on the outer sides of the lower computer first heat sink (14) and the lower computer second heat sink (16). The upper computer middle frame (11) and the lower computer middle frame (13) are fixedly mounted together, and a bottom plate (17) is fixedly mounted on the bottom of the lower computer middle frame (13). The bottom plate (17) is provided with limit baffles (18) extending outwards on both front and rear sides of the bottom plate (17).

3. The EDS spectrometer according to claim 1, characterized in that: The detector (2) comprises a detector host (21) and an electron trap (22); the electron trap (22) is fixedly arranged at the position of a receiving window (23) on the detector host (21); and the other end of the detector (2) is mounted together with the controller (1).

4. The EDS spectrometer according to claim 1, characterized in that: The driving and adjusting device (3) comprises a slide rail (32), a slider (33), a motor (36), a screw rod (39) and a screw sleeve (312); the slider (33) is arranged on the slide rail (32) and can slide back and forth along the slide rail (32); the controller (1) is fixedly mounted on the slider (33); the screw rod (39) is arranged parallel to the slide rail (32); the motor (36) directly or indirectly drives the screw rod (39) to rotate; the screw sleeve (312) is sleeved on the screw rod (39); and the screw sleeve (312) is directly or indirectly mounted together with the controller (1).

5. The EDS spectrometer according to claim 4, characterized in that: The slide rails (32) are provided with two, the two slide rails (32) are arranged in parallel, and each slide rail (32) is provided with two sliders (33), one end of the slide rail (32) is fixedly mounted on the motor mounting seat (37), and the other end of the slide rail (32) is fixedly mounted on the focusing device (4), the motor mounting seat (37) is in a "U" shape, the motor (36) is fixedly mounted on the motor mounting seat (37), a coupling (38) is arranged in the motor mounting seat (37), the rotor of the motor (36) is connected to the coupling (38), and the screw rod (39) is connected to the other end of the coupling (38).

6. The EDS spectrometer according to claim 4, characterized in that: The outer cover of the motor (36) is provided with a motor protection cover (34), an interface (35) is installed on the motor protection cover (34), the interface (35) is electrically connected to the motor (36), a bearing (312) is respectively provided in the motor mounting seat (37) and the focusing device (4), and the two bearings (312) are respectively mounted on both ends of the screw rod (39).

7. The EDS spectrometer according to claim 4, characterized in that: The screw sleeve (311) is fixedly mounted with a drive plate (310) by means of screws. The drive plate (310) and the controller (1) are fixedly mounted together. The outer side of the screw rod (39) is covered with a bottom protective cover (31).

8. The EDS spectrometer according to claim 4, characterized in that: A limit switch (313) is installed on the motor mounting seat (37) and the focusing device (4), respectively. The limit switch (313) is arranged corresponding to the limit baffle (18) on the bottom plate (17).

9. The EDS spectrometer according to claim 1, characterized in that: The focusing device (4) comprises a flange mounting seat (42), a detector mounting seat (46) and two or more flanges, wherein the two or more flanges are mounted between the flange mounting seat (42) and the detector mounting seat (46), and each flange has at least one mounting surface that is inclined, that is, the angle between the inclined mounting surface and the axis of the flange is not 90°.

10. The EDS spectrometer according to claim 9, characterized in that: The flange mounting seat (42) is in the shape of a ring, and the two mounting surfaces are arranged in parallel. The flange mounting seat (42) is provided with a first mounting hole (421), and the number of the first mounting holes (421) is three, and the three first mounting holes (421) are evenly distributed along the circumference of the center of the flange mounting seat (42). The middle of the flange mounting seat (42) is a first through hole (422). The flange mounting seat (42) is provided with a second mounting hole (423), and the number of the second mounting holes (423) is eight, and the eight second mounting holes (423) are evenly distributed along the circumference of the center of the flange mounting seat (42). A first sealing ring mounting groove (424) is provided on one side of the flange mounting seat (42), and a second sealing ring mounting groove (426) is provided on the other side of the flange mounting seat (42). A first scale (425) is provided on the outer side of the flange mounting seat (42) along the circumferential direction. The first flange (43) is in a circular shape, wherein the angle between the mounting surface in contact with the flange mounting seat (42) and the axis of the first flange (43) is 90°, and the angle between the other mounting surface and the axis of the first flange (43) is non-90°. The angle α between the two mounting surfaces of the first flange (43) is between 2° and 8°, preferably 5°. The first flange (43) is provided with a first waist-shaped hole (431), and the first waist-shaped hole (431) is arranged corresponding to the second mounting hole (423). There are six first waist-shaped holes (431). The first waist-shaped holes (431) are evenly distributed along the circumference of the center of the first flange (43), a step is provided at the bottom of the first waist-shaped hole (431), a second through hole (432) is provided in the middle of the first flange (43), a third mounting hole (433) is provided on the first flange (43), eight third mounting holes (433) are provided, and the eight third mounting holes (433) are evenly distributed along the circumference of the center of the first flange (43), a third sealing ring mounting groove (434) is provided on one side of the first flange (43), and a second scale (435) is provided on the outer side of the first flange (43) along the circumferential direction; The second flange (44) is in the shape of a ring. The angles between the two mounting surfaces and the axis of the second flange (44) are all non-90°. The angle β between the two mounting surfaces of the second flange (44) is between 4° and 16°, preferably 10°. The two mounting surfaces of the second flange 44 are symmetrically arranged. A second waist-shaped hole (441) is provided on the second flange (44). The second waist-shaped hole (441) is arranged corresponding to the third mounting hole (433). There are six second waist-shaped holes (441). The six second waist-shaped holes (441) are evenly arranged along the circumference of the center of the second flange (44). The second waist-shaped hole (441) is provided with a step at the bottom, the middle of the second flange (44) is a third through hole (442), the second flange (44) is provided with a fourth mounting hole (443), eight fourth mounting holes (443) are provided, and the eight fourth mounting holes (443) are evenly distributed along the circumference of the center of the second flange (44), and the outer side of the second flange (44) is provided with a third ruler (444) and a fourth ruler (445) along the circumferential direction, and the third ruler (444) and the fourth ruler (445) are respectively provided on the upper and lower sides of the outer circle of the second flange (44); The third flange (45) is in the shape of a circular ring. The angle between the mounting surface of the third flange (45) in contact with the detector mounting seat (46) and the axis of the third flange (45) is 90°. The angle between the other mounting surface and the axis of the third flange (45) is non-90°. The angle γ between the two mounting surfaces of the third flange (45) is between 2° and 8°, preferably 5°. The third flange (45) is provided with a third waist-shaped hole (451). The third waist-shaped hole (451) is arranged corresponding to the fourth mounting hole (443). There are six third waist-shaped holes (451). The six third waist-shaped holes (451) are arranged along the third method. The center of the flange (45) is evenly distributed on the circumference, a step is provided at the bottom of the third waist-shaped hole (451), a fourth through hole (452) is provided in the middle of the third flange (45), a fifth mounting hole (453) is provided on the third flange (45), six fifth mounting holes (453) are provided, and the six fifth mounting holes (453) are evenly distributed on the circumference along the center of the third flange (45), a fourth sealing ring mounting groove (454) is provided on one side of the third flange (45), a fifth sealing ring mounting groove (456) is provided on the other side of the third flange (45), and a fifth scale (455) is provided on the outer side of the third flange (45) along the circumferential direction; The detector mounting seat (46) is in a "T" shape. The two mounting surfaces of the detector mounting seat (46) are arranged in parallel. A sixth mounting hole (461) is provided on the detector mounting seat (46). Six sixth mounting holes (461) are arranged. The six sixth mounting holes (461) are evenly distributed along the center of the detector mounting seat (46). A fifth through hole (462) is provided in the middle of the detector mounting seat (46). The detector (2) is fixedly mounted in the fifth through hole (462). A mounting plate for mounting a slide rail (32) and a limit switch (313) is extended outward from a side surface of a mounting surface of the detector mounting seat (46).

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