Multi-wavelength laser frequency doubling device and system

Abstract

The invention relates to the technical field of OLED laser repairing, in particular to a multi-wavelength laser frequency doubling device and system.The multi-wavelength laser frequency doubling device comprises a first light path, a second light path, a third light path and a fourth light path; a first conversion assembly used for selectively sending the second wavelength laser to a fourth light path is arranged between the first frequency doubling crystal and the frequency tripling crystal. A second conversion assembly used for selectively sending the third wavelength laser to a third light path is arranged behind the frequency tripling crystal; and a third conversion assembly and a second frequency doubling crystal are sequentially arranged on the fourth light path. The multi-wavelength laser frequency doubling device can solve the problem that an existing laser repairing device used for OLED panel repairing is difficult to repair various different defects at the same time, so that the repairing efficiency is low, the various different defects can be repaired at the same time, and therefore the repairing efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the field of OLED laser repair technology, and more specifically, to a multi-wavelength laser frequency doubling device and system. Background Art

[0002] The existing laser repair process for repairing OLED panels generally generates laser to irradiate defects, and repairs the defects based on the ablation effect of the laser on the defects.

[0003] However, existing devices for the laser repair process of OLED panel repair can generally only generate lasers of a single wavelength to repair a single defect on the OLED panel. It is difficult to repair multiple types of defects at the same time, and the repair efficiency is low.

[0004] Therefore, the existing technology needs to be improved and developed. Summary of the invention

[0005] The purpose of the present application is to provide a multi-wavelength laser frequency doubling device and system, aiming to solve the problem that the existing laser repair devices used for repairing OLED panels are difficult to repair multiple types of defects at the same time, resulting in low repair efficiency.

[0006] In a first aspect, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path, a second optical path, a third optical path, and a fourth optical path; A laser source, a first double frequency crystal and a triple frequency crystal are sequentially arranged on the first optical path, and the laser source is used to emit a laser of a first wavelength; A first conversion component for selectively sending a second wavelength laser into a fourth optical path is provided between the first double frequency crystal and the triple frequency crystal, wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component is arranged after the frequency tripling crystal for selectively sending a third wavelength laser into a third optical path, wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component and a second double frequency crystal are arranged successively on the fourth optical path, and the third conversion component is used for selectively sending the second wavelength laser into the second optical path.

[0007] The multi-wavelength laser frequency doubling device provided in the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to lasers of different wavelengths can be repaired at the same time, thereby improving the repair efficiency, being highly targeted and flexible.

[0008] Optionally, the first conversion component includes: a first dichroic mirror, for transmitting the first wavelength laser and reflecting the second wavelength laser to send it into a fourth optical path; The first motion mechanism is connected to the first dichroic mirror and is used to drive the first dichroic mirror to move so as to enter or leave the first optical path.

[0009] Optionally, the first conversion component further includes: a first reflecting mirror connected to the first motion mechanism and used to reflect the first wavelength laser and the second wavelength laser to send them into a fourth optical path; The first motion mechanism is also used to drive the first reflecting mirror to move so as to enter or leave the first optical path.

[0010] Optionally, a second attenuator is disposed at the first optical path end, the second optical path end, and the third optical path end; The second attenuator is used to measure and adjust the power of the laser on the corresponding optical path.

[0011] Optionally, the second attenuator includes a half-wave plate, a polarization beam splitter and a detection component which are arranged in sequence; The angle between the half-wave plate and the corresponding optical path is adjustable; The polarization beam splitter is used to transmit and reflect the laser light on the corresponding optical path to the detection component; The detection component is used to measure the power of the laser on the corresponding optical path; The second attenuator also includes a driving mechanism connected to the half-wave plate, and the driving mechanism is used to drive the half-wave plate to rotate to adjust the angle between the half-wave plate and the corresponding optical path.

[0012] Optionally, the detection component includes a beam reducer, a first filter and an optical power meter which are arranged in sequence.

[0013] Optionally, the detection component is also used to measure the irradiation angle of the laser on the corresponding optical path; The detection assembly also includes a first beam splitter, a fourth reflector, a first focusing mirror, a second filter and a PSD sensor which are arranged in sequence; The first beam splitter is arranged between the polarization beam splitter and the beam reducer, and is used for transmitting and reflecting the laser light on the corresponding optical path to the fourth reflector; The fourth reflecting mirror is used to reflect the laser light on the corresponding optical path toward the first focusing mirror.

[0014] Optionally, a first attenuator is provided between the laser source and the first double frequency crystal; The first attenuator is used to measure and adjust the power of the laser with the first wavelength.

[0015] In a second aspect, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path, a second optical path, a third optical path, and a fourth optical path; A laser source, a first double frequency crystal and a triple frequency crystal are sequentially arranged on the first optical path, and the laser source is used to emit a laser of a first wavelength; A first dichroic mirror is provided between the first double frequency crystal and the triple frequency crystal for sending only the second wavelength laser into the fourth optical path, and the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second dichroic mirror is arranged after the frequency tripling crystal for sending only the third wavelength laser into the third optical path, and the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A second beam splitter, a second double frequency crystal and a third dichroic mirror are arranged in sequence on the fourth optical path. The second beam splitter is used to send the second wavelength laser into the second optical path, and the third dichroic mirror is used to transmit only the fourth wavelength laser. The wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser.

[0016] The multi-wavelength laser frequency doubling device provided in the present application can make each optical path output only one wavelength of laser light, and can simultaneously repair four defects respectively adapted to the four wavelengths of laser light based on four wavelengths of laser light, thereby improving the repair efficiency.

[0017] In a third aspect, the present application provides a multi-wavelength laser frequency doubling system for repairing defects on an OLED panel and for adjusting the power of a laser for repairing the defects, comprising a first optical path, a second optical path, a third optical path, and a fourth optical path; A laser source, a first double frequency crystal and a triple frequency crystal are sequentially arranged on the first optical path, and the laser source is used to emit a laser of a first wavelength; A first conversion component for selectively sending a second wavelength laser into a fourth optical path is provided between the first double frequency crystal and the triple frequency crystal, wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component is arranged after the frequency tripling crystal for selectively sending a third wavelength laser into a third optical path, wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component and a second double frequency crystal are successively arranged on the fourth optical path, and the third conversion component is used to selectively send the second wavelength laser into the second optical path; A second attenuator is disposed at the end of the first optical path, the end of the second optical path and the end of the third optical path, a third attenuator is disposed between the third conversion component and the second double frequency crystal, the second attenuator and the third attenuator are both used to measure and adjust the power of the laser on the corresponding optical path, and both include a half-wave plate, a polarization beam splitter and a detection component that are disposed in sequence; The angle between the half-wave plate and the corresponding optical path is adjustable; the polarization beam splitter is used to transmit and reflect the laser on the corresponding optical path to the detection component; The detection component is used to measure the power of the laser on the corresponding optical path; The second attenuator and the third attenuator also include a driving mechanism connected to the half-wave plate, the driving mechanism being used to drive the half-wave plate to rotate so as to adjust the angle between the half-wave plate and the corresponding optical path; The multi-wavelength laser frequency doubling system also includes a controller, which is used to measure the power of the laser on the corresponding optical path according to the detection component, and control the driving mechanism to drive the half-wave plate to rotate according to the power of the laser on the corresponding optical path to adjust the angle between the half-wave plate and the corresponding optical path, so as to adjust the power of the laser on the corresponding optical path reflected by the polarization splitter to reach the target value.

[0018] The multi-wavelength laser frequency doubling system provided in the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a laser of a specific wavelength can be repaired, or multiple defects adapted to lasers of different wavelengths can be repaired at the same time, which can improve the repair efficiency, and has strong targeting and high flexibility; and the present application can realize closed-loop control of the laser power of each optical path based on the second attenuator and the third attenuator, thereby improving the power regulation accuracy of the laser on each optical path.

[0019] From the above, it can be seen that the present application provides a multi-wavelength laser frequency doubling device and system, wherein the multi-wavelength laser frequency doubling device provided by the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to different wavelength lasers can be repaired at the same time, which can improve the repair efficiency, and has strong targeting and high flexibility.

[0020] Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or be understood by practicing the present application. The purpose and other advantages of the present application can be realized and obtained by the structures specifically pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of a multi-wavelength laser frequency doubling device provided in an embodiment of the present application.

[0022] Figure 2 A schematic diagram of the path of the first light path provided in an embodiment of the present application.

[0023] Figure 3 A schematic diagram of the paths of the third light path and the fourth light path provided in an embodiment of the present application.

[0024] Figure 4 A schematic diagram of the path of the second light path provided in an embodiment of the present application.

[0025] Figure 5 A schematic diagram of the structure of the first conversion component provided in an embodiment of the present application.

[0026] Figure 6 A schematic diagram of the structure of the second conversion component provided in an embodiment of the present application.

[0027] Figure 7 A schematic diagram of the structure of the third conversion component provided in an embodiment of the present application.

[0028] Figure 8 A schematic diagram of the structure of the second attenuator provided in an embodiment of the present application.

[0029] Fig. 9 A schematic diagram of the structure of the detection component provided in an embodiment of the present application.

[0030] Fig.10 A schematic diagram of the structure of another multi-wavelength laser frequency doubling device provided in an embodiment of the present application.

[0031] Fig.11 A schematic diagram of the structure of a multi-wavelength laser frequency doubling device in one case provided in an embodiment of the present application.

[0032] Fig.12 A schematic structural diagram of a multi-wavelength laser frequency doubling device in another case provided in an embodiment of the present application.

[0033] Fig.13 This is a diagram of the electrical control framework of the multi-wavelength laser frequency doubling system provided in an embodiment of the present application.

[0034] Explanation of reference numerals: 1. second attenuator; 2. first attenuator; 3. output window; 4. fast-reflecting mirror pair; 5. fifth reflector; 6. second focusing mirror; 7. collimating mirror; 8. optical shutter; 9. third attenuator; 10. input window; 11. laser source; 12. first double-frequency crystal; 13. triple-frequency crystal; 14. first conversion component; 141. first dichroic mirror; 142. first motion mechanism; 143. first reflector; 15. second conversion component; 151. second dichroic mirror; 152. second motion mechanism; 153. second reflector; 41. third conversion component; 411. first Two beam splitters; 412, third motion mechanism; 413, third reflector; 42, second double frequency crystal; 43, third dichroic mirror; 101, half-wave plate; 102, polarization beam splitter; 103, detection component; 1031, beam reduction mirror; 1032, first filter; 1033, optical power meter; 1034, first beam splitter; 1035, fourth reflector; 1036, first focusing mirror; 1037, second filter; 1038, PSD sensor; 104, drive mechanism; 100, first optical path; 200, second optical path; 300, third optical path; 400, fourth optical path. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0036] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0037] First, as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path 100, a second optical path 200, a third optical path 300 and a fourth optical path 400; A laser source 11, a first double frequency crystal 12 and a triple frequency crystal 13 are sequentially arranged on the first optical path 100, and the laser source 11 is used to emit a laser of a first wavelength; A first conversion component 14 for selectively sending the second wavelength laser into the fourth optical path 400 is provided between the first double frequency crystal 12 and the triple frequency crystal 13, wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component 15 is disposed after the frequency tripling crystal 13 for selectively sending a third wavelength laser into the third optical path 300 , wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component 41 and a second double frequency crystal 42 are arranged in sequence on the fourth optical path 400 . The third conversion component 41 is used to selectively send the second wavelength laser into the second optical path 200 .

[0038] Specifically, in the optical path of the present application, "first" means that the devices on the optical path are irradiated by the laser along the optical path first, and "later" means that the devices on the optical path are irradiated by the laser along the optical path later.

[0039] More specifically, the first wavelength laser input into the first doubled frequency crystal 12 will produce a nonlinear optical effect to generate a second wavelength laser. At the same time, the first doubled frequency crystal 12 will transmit part of the first wavelength laser. Therefore, after the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first doubled frequency crystal 12, and the first doubled frequency crystal 12 simultaneously outputs the first wavelength laser and the second wavelength laser to the first conversion component 14.

[0040] More specifically, the first wavelength laser input into the tripled frequency crystal 13 will produce a nonlinear optical effect to generate a third wavelength laser. At the same time, the tripled frequency crystal 13 will transmit part of the first wavelength laser. Therefore, after the first wavelength laser passes through the first conversion component 14, the first wavelength laser passes through the tripled frequency crystal 13, and the tripled frequency crystal 13 simultaneously outputs the first wavelength laser and the third wavelength laser to the second conversion component 15.

[0041] More specifically, the second wavelength laser input into the second doubled frequency crystal 42 will produce a nonlinear optical effect to generate a fourth wavelength laser. At the same time, the second doubled frequency crystal 42 will transmit part of the second wavelength laser. Therefore, when the second wavelength laser irradiates the second doubled frequency crystal 42, the second doubled frequency crystal 42 simultaneously outputs the second wavelength laser and the fourth wavelength laser, wherein the wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser.

[0042] More specifically, in the present application, the first conversion component 14 can optionally send the second wavelength laser into the fourth optical path 400. For the case where the first conversion component 14 sends the second wavelength laser into the fourth optical path 400, there are two implementations: the first conversion component 14 sends the first wavelength laser and the second wavelength laser into the fourth optical path 400 together, and the first conversion component 14 transmits the first wavelength laser and sends the second wavelength laser into the fourth optical path 400. Among them, the implementation of the first conversion component 14 sending the first wavelength laser and the second wavelength laser into the fourth optical path 400 together can be implemented based on the reflector included in the first conversion component 14, and the implementation of the first conversion component 14 transmitting the first wavelength laser and sending the second wavelength laser into the fourth optical path 400 can be implemented based on the dichroic mirror included in the first conversion component 14. Similarly, for the case where the second conversion component 15 sends the third wavelength laser into the third optical path 300, there are two implementations: the second conversion component 15 sends both the first wavelength laser and the third wavelength laser into the third optical path 300, and the second conversion component 15 transmits the first wavelength laser and sends the third wavelength laser into the third optical path 300.

[0043] More specifically, when the first conversion component 14 only sends the second wavelength laser into the fourth optical path 400, for the case where the third conversion component 41 sends the second wavelength laser into the second optical path 200, there are two implementation modes: the third conversion component 41 sends the second wavelength laser into the second optical path 200, and the third conversion component 41 allows the second wavelength laser to irradiate along the fourth optical path 400 and simultaneously sends the second wavelength laser into the second optical path 200; when the first conversion component 14 sends the first wavelength laser and the second wavelength laser into the fourth optical path 400 together, for the case where the third conversion component 41 sends the second wavelength laser into the second optical path 200, there are two implementation modes: the third conversion component 41 sends the first wavelength laser and the second wavelength laser into the second optical path 200 together, and the third conversion component 41 allows the first wavelength laser and the second wavelength laser to irradiate along the fourth optical path 400 and simultaneously sends the first wavelength laser and the second wavelength laser into the second optical path 200 together.

[0044] like Figure 1 As shown, more specifically, in an embodiment in which the first conversion component 14 only sends the second wavelength laser into the fourth optical path 400, the second conversion component 15 only sends the third wavelength laser into the third optical path 300, and the third conversion component 41 simultaneously sends the second wavelength laser into the second optical path 200 while irradiating the second wavelength laser along the fourth optical path 400: After the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first double frequency crystal 12, the first double frequency crystal 12 generates the second wavelength laser, the first wavelength laser and the second wavelength laser are irradiated toward the first conversion component 14 together, the first conversion component 14 sends the second wavelength laser into the fourth optical path 400, the first wavelength laser passes through the first conversion component 14 and passes through the triple frequency crystal 13, the triple frequency crystal 13 generates the third wavelength laser, the first wavelength laser and the third wavelength laser are irradiated toward the second conversion component 15 together, the second conversion component 15 sends the third wavelength laser into the third optical path 300, and the first wavelength laser passes through the second conversion component 15 and is output along the first optical path 100; The second wavelength laser light entering the fourth optical path 400 is sent into the second optical path 200 by the third conversion component 41 and output along the second optical path 200; The third wavelength laser light sent into the third optical path 300 is output along the third optical path 300; The second wavelength laser irradiated along the fourth optical path 400 by the third conversion component 41 passes through the second double frequency crystal 42, and the second double frequency crystal 42 generates a fourth wavelength laser, which is output together with the second wavelength laser along the fourth optical path 400.

[0045] In this embodiment, it is only necessary to set an optical device such as a dichroic mirror after the second doubled frequency crystal 42 that only allows the fourth wavelength laser to continue to irradiate along the fourth optical path 400, so that the first wavelength laser, the second wavelength laser, the third wavelength laser and the fourth wavelength laser can be output along the first optical path 100, the second optical path 200, the third optical path 300 and the fourth optical path 400 respectively. Therefore, the present application can simultaneously repair the defect types that are suitable for the four wavelengths of lasers, thereby improving the repair efficiency.

[0046] like Fig.11 As shown, more specifically, in an embodiment in which the first conversion component 14 only sends the second wavelength laser into the fourth optical path 400, the second conversion component 15 sends both the first wavelength laser and the third wavelength laser into the third optical path 300, and the third conversion component 41 does not send the second wavelength laser into the second optical path 200: After the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first double frequency crystal 12, the first double frequency crystal 12 generates the second wavelength laser, the first wavelength laser and the second wavelength laser are irradiated toward the first conversion component 14 together, the first conversion component 14 sends the second wavelength laser into the fourth optical path 400, the first wavelength laser passes through the first conversion component 14 and passes through the triple frequency crystal 13, the triple frequency crystal 13 generates the third wavelength laser, the first wavelength laser and the third wavelength laser are irradiated toward the second conversion component 15 together, the second conversion component 15 sends both the first wavelength laser and the third wavelength laser into the third optical path 300; The first wavelength laser and the third wavelength laser sent into the third optical path 300 are both output along the third optical path 300; The second wavelength laser entering the fourth optical path 400 passes through the second doubled frequency crystal 42 , and the second doubled frequency crystal 42 generates a fourth wavelength laser. The fourth wavelength laser and the second wavelength laser are output together along the fourth optical path 400 .

[0047] In this embodiment, it is only necessary to set an optical device such as a dichroic mirror after the second conversion component 15 in the third optical path 300 that only allows the third wavelength laser to continue to irradiate along the third optical path 300, and to set an optical device such as a dichroic mirror after the second doubled frequency crystal 42 that only allows the fourth wavelength laser to continue to irradiate along the fourth optical path 400. The third wavelength laser and the fourth wavelength laser can be output along the third optical path 300 and the fourth optical path 400, respectively. Therefore, the present application can repair the defect types that are adapted to the two wavelengths of lasers at the same time as needed, thereby improving the repair efficiency.

[0048] In addition, there are other embodiments in which the types of lasers sent into the corresponding optical paths by the first conversion component 14, the second conversion component 15 and the third conversion component 41 are different from the above embodiments. In these embodiments, the optical paths along which the lasers of different wavelengths are irradiated are also different, which will not be repeated here.

[0049] It can be seen from the above-mentioned implementation modes that the present application only needs to reasonably set the first conversion component 14, the second conversion component 15 and the third conversion component 41 to send the laser with a specific wavelength into the corresponding optical path, and allow the laser with a specific wavelength to continue to irradiate along the original optical path, and set an optical device in the specific optical path that only allows the laser with a specific wavelength to pass through, so that one, two, three or four specific lasers with different wavelengths can be output as needed, so that a single defect adapted to the laser with a specific wavelength can be repaired, or multiple defects adapted to lasers with different wavelengths can be repaired at the same time, which can improve the repair efficiency, and has strong targeting and high flexibility.

[0050] The multi-wavelength laser frequency doubling device provided in the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to lasers of different wavelengths can be repaired at the same time, thereby improving the repair efficiency, being highly targeted and flexible.

[0051] Preferably, the multi-wavelength laser frequency doubling device further includes an optical path adjustment structure for configuring the optical path, and the optical path adjustment structure includes: Three second focusing lenses 6 are respectively arranged before the first double frequency crystal 12, before the second double frequency crystal 42 and before the triple frequency crystal 13; Three collimating lenses 7 are respectively arranged behind the first double frequency crystal 12, behind the second double frequency crystal 42 and behind the triple frequency crystal 13; The second focusing lens 6 and the collimating lens 7 are used to make the laser beams on the corresponding optical paths be output in parallel.

[0052] More preferably, the optical path adjustment structure further includes: The two fifth reflectors 5 are respectively arranged between the third conversion component 41 and the second double frequency crystal 42 and after the second conversion component 15 on the third optical path 300, and are used to make the lasers on the corresponding optical paths be output in parallel.

[0053] More preferably, the optical path adjustment structure further includes: Four fast mirror pairs 4 are respectively arranged after the second conversion component 15 on the first optical path 100, after the third conversion component 41 on the second optical path 200, after the fifth reflector 5 on the third optical path 300 and after the second double frequency crystal 42, and are used to adjust the distance between the lasers on each optical path.

[0054] Preferably, an input window 10 for allowing the first wavelength laser to pass through and outputting the first wavelength laser to the first doubled frequency crystal 12 is provided between the laser source 11 and the first doubled frequency crystal 12 .

[0055] like Figure 5As shown, in some preferred embodiments, the first conversion component 14 includes: A first dichroic mirror 141, for transmitting the first wavelength laser and reflecting the second wavelength laser to send it into the fourth optical path 400; The first motion mechanism 142 is connected to the first dichroic mirror 141 , and is used to drive the first dichroic mirror 141 to move so as to enter or leave the first optical path 100 .

[0056] Specifically, a dichroic mirror is an optical device that has a transmission effect on a laser of one wavelength and a reflection effect on a laser of another wavelength. In the present application, the first dichroic mirror 141 can transmit the first wavelength laser and reflect the second wavelength laser. Therefore, the first motion mechanism 142 drives the first dichroic mirror 141 to make it enter the first optical path 100, corresponding to the implementation of the first conversion component 14 transmitting the first wavelength laser and sending the second wavelength laser into the fourth optical path 400. In this implementation, the first conversion component 14 can cooperate with other conversion components and crystals to realize the output of each wavelength laser along each optical path respectively; the first motion mechanism 142 drives the first dichroic mirror 141 to make it leave the first optical path 100, corresponding to the implementation of the first conversion component 14 allowing the first wavelength laser and the second wavelength laser to continue to irradiate along the first optical path 100. In this implementation, the first conversion component 14 can not generate laser output along the second optical path 200 and the fourth optical path 400 when there is no need to repair the defects adapted to the second wavelength laser and the fourth wavelength laser, thereby avoiding laser energy waste.

[0057] In this embodiment, the multi-wavelength laser frequency doubling device of the present application can cooperate with other conversion components and crystals to realize the output of each wavelength laser along each optical path respectively, and when there is no need to repair defects adapted to the second wavelength laser and the fourth wavelength laser, no laser is generated to be output along the second optical path 200 and the fourth optical path 400, thereby avoiding waste of laser energy.

[0058] In some preferred embodiments, the first conversion component 14 further includes: A first reflector 143, connected to the first motion mechanism 142, for reflecting the first wavelength laser and the second wavelength laser to send them into the fourth optical path 400; The first motion mechanism 142 is further used to drive the first reflective mirror 143 to move so as to enter or leave the first optical path 100 .

[0059] Specifically, the first reflector 143 can reflect the first wavelength laser and the second wavelength laser, so the first motion mechanism 142 drives the first reflector 143 to move so that it enters the first optical path 100, which corresponds to the implementation of the first conversion component 14 sending the first wavelength laser and the second wavelength laser into the fourth optical path 400 together. In this implementation, the first conversion component 14 can not generate laser output along the first optical path 100 and the third optical path 300 when there is no need to repair the defects adapted to the first wavelength laser and the third wavelength laser, thereby avoiding laser energy waste; the first motion mechanism 142 drives the first reflector 143 to move so that it is separated from the first optical path 100, which corresponds to the implementation of the first conversion component 14 allowing the first wavelength laser and the second wavelength laser to continue to irradiate along the first optical path 100. In this implementation, the first conversion component 14 can not generate laser output along the second optical path 200 and the fourth optical path 400 when there is no need to repair the defects adapted to the second wavelength laser and the fourth wavelength laser, thereby avoiding laser energy waste.

[0060] In this embodiment, the multi-wavelength laser frequency doubling device of the present application can not generate laser output along the optical path corresponding to a specific type of defect when there is no need to repair the defect of that type, thereby avoiding the waste of laser energy.

[0061] like Figure 6 As shown, preferably, the second conversion component 15 includes: A second dichroic mirror 151, for transmitting the first wavelength laser and reflecting the third wavelength laser to send it into the third optical path 300; The second motion mechanism 152 is connected to the second dichroic mirror 151 , and is used to drive the second dichroic mirror 151 to move so as to enter or leave the first optical path 100 .

[0062] More preferably, the first conversion component 14 further includes: The second reflector 153 is connected to the second motion mechanism 152 and is used to reflect the first wavelength laser and the third wavelength laser to send them into the third optical path 300; The second motion mechanism 152 is further used to drive the second reflective mirror 153 to move so as to enter or leave the first optical path 100 .

[0063] like Figure 7 As shown, preferably, the third conversion component 41 includes: A second beam splitter 411, used for transmitting the second wavelength laser and reflecting the second wavelength laser to send it into the second optical path 200; The third motion mechanism 412 is connected to the second beam splitter 411 , and is used to drive the second beam splitter 411 to move so as to enter or leave the fourth optical path 400 .

[0064] More preferably, the third conversion component 41 further includes: A third reflector 413, connected to the third motion mechanism 412, for reflecting the second wavelength laser to send it into the second optical path 200; The third motion mechanism 412 is further used to drive the third reflective mirror 413 to move so as to enter or leave the fourth optical path 400 .

[0065] like Fig.12 As shown, in an embodiment in which the first motion mechanism 142 only drives the first reflector 143 to move so that it enters the first optical path 100, and the third motion mechanism 412 drives the second beam splitter 411 and the third reflector 413 to move so that they are out of the fourth optical path 400: After the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first doubled frequency crystal 12, the first doubled frequency crystal 12 generates the second wavelength laser, the first wavelength laser and the second wavelength laser are irradiated toward the first conversion component 14 together, the first conversion component 14 sends both the first wavelength laser and the second wavelength laser into the fourth optical path 400, the first wavelength laser and the second wavelength laser entering the fourth optical path 400 pass through the second doubled frequency crystal 42, the second doubled frequency crystal 42 generates the second wavelength laser and the fourth wavelength laser, and the first wavelength laser, the second wavelength laser and the fourth wavelength laser are output together along the fourth optical path 400.

[0066] In this embodiment, it is only necessary to set an optical device such as a dichroic mirror after the second doubled frequency crystal 42 that only allows the fourth wavelength laser to continue to irradiate along the fourth optical path 400, so that the fourth wavelength laser can be output along the fourth optical path 400. Therefore, the present application can output only one wavelength of laser when only one type of defect needs to be output, thereby performing targeted repairs and avoiding waste of laser energy.

[0067] In other embodiments where the optical devices sent into the corresponding optical paths by the first conversion component 14, the second conversion component 15, and the third conversion component 41 are different, the number and type of lasers output by the multi-wavelength laser frequency doubling device of the present application are also different, which will not be described in detail here. Therefore, the present application can reasonably send the corresponding optical devices into the corresponding optical paths based on the first motion mechanism 142, the second motion mechanism 152, and the third motion mechanism 412 as needed, so that each optical path can output or not output the laser of the corresponding wavelength as needed, thereby being able to repair one or more defects adapted to different types of lasers.

[0068] In some preferred embodiments, a second attenuator 1 is disposed at the end of the first optical path 100 , the end of the second optical path 200 , and the end of the third optical path 300 ; The second attenuator 1 is used to measure and adjust the power of the laser on the corresponding optical path.

[0069] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a second attenuator 1 on each optical path, which can detect and adjust the laser power of each optical path, thereby realizing closed-loop control of the laser power output by each optical path.

[0070] Preferably, a third attenuator 9 is provided between the third conversion component 41 and the second double frequency crystal 42; The third attenuator 9 is used to measure and adjust the power of the laser on the fourth optical path 400 .

[0071] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a third attenuator 9 on the fourth optical path 400, which can detect and adjust the laser power of the fourth optical path 400, thereby realizing closed-loop control of the laser power output by the fourth optical path 400; and because the wavelength of the fourth wavelength laser output by the fourth optical path 400 is generally shorter, and the cost of the optical device for adjusting the power of the laser with a shorter wavelength is relatively high, therefore, in this embodiment, the present application is provided with a third attenuator 9 between the third conversion component 41 and the second doubled frequency crystal 42, which can measure and adjust the laser power of the fourth optical path 400 before the second doubled frequency crystal 42 generates a fourth wavelength laser with a shorter wavelength, thereby saving costs.

[0072] like Figure 8 As shown, in some preferred embodiments, the second attenuator 1 includes a half-wave plate 101, a polarization beam splitter 102 and a detection component 103 which are arranged in sequence; The angle between the half-wave plate 101 and the corresponding optical path is adjustable; the polarization beam splitter 102 is used to transmit and reflect the laser irradiated along the corresponding optical path to the detection component 103; The detection component 103 is used to measure the power of the laser on the corresponding optical path; The second attenuator 1 further comprises a driving mechanism 104 connected to the half-wave plate 101 , and the driving mechanism 104 is used to drive the half-wave plate 101 to rotate so as to adjust the angle between the half-wave plate 101 and the corresponding optical path.

[0073] Specifically, the polarization beam splitter 102 can convert the laser on its optical path into two mutually perpendicular polarized lights based on transmission and reflection. Therefore, the polarization beam splitter 102 can reflect the laser on its optical path to the detection component 103, so that the detection component 103 can detect the power of the polarized light converted from the laser, and the power of the laser on the optical path where the second attenuator 1 is located can be calculated from the power of the polarized light converted from it. Therefore, the present application can detect the laser power on the optical path where the second attenuator 1 is located based on the detection component 103.

[0074] More specifically, when the half-wave plate 101 and the polarization beam splitter 102 are jointly arranged on the optical path, the polarization direction of the laser light transmitted by the half-wave plate 101 can be changed by rotating the half-wave plate 101 to change the angle between it and the optical path in which it is located, so that the proportion of the polarized light transmitted by the polarization beam splitter 102 is changed, thereby being able to adjust the power of the laser light transmitted by the polarization beam splitter 102. Therefore, setting the half-wave plate 101 and the polarization beam splitter 102 can adjust the power of the laser light on the corresponding optical path.

[0075] More specifically, the detection component 103 can detect the power of the laser reflected by the polarization beam splitter 102. Therefore, the present application can calculate the power of the laser transmitted by the polarization beam splitter 102, that is, the power of the laser output by the second attenuator 1, based on the laser power detected by the detection component 103 and the angle between the polarization beam splitter 102 and the optical path where it is located. The power of the laser output by the second attenuator 1 is positively correlated with the power of the laser on the optical path where the second attenuator 1 is located. Therefore, the present application only needs to control the driving mechanism 104 according to the power of the laser on the optical path where the second attenuator 1 is located to drive the half-wave plate 101 to rotate to adjust the angle between the half-wave plate 101 and the optical path where it is located, so as to adjust the power of the laser output by the second attenuator 1, thereby adjusting the power of the laser on the optical path where the second attenuator 1 is located, thereby realizing closed-loop control of the power of the laser output from the optical path where the second attenuator 1 is located.

[0076] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a half-wave plate 101, a polarization beam splitter 102 and a detection component 103, which can realize closed-loop control of the laser power of the optical path where the second attenuator 1 is located, and improve the power regulation accuracy of the laser on each optical path.

[0077] Preferably, a third dichroic mirror 43 and a detection assembly 103 are successively arranged at the end of the fourth optical path 400; The third dichroic mirror 43 is used for transmitting the laser light of the fourth wavelength and reflecting the laser light of the second wavelength toward the detection component.

[0078] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a third dichroic mirror 43, which can detect the power of the second wavelength laser and enable the fourth optical path 400 to output only the fourth wavelength laser.

[0079] like Fig. 9 As shown, in some preferred embodiments, the detection component 103 includes a beam reducer 1031, a first filter 1032 and an optical power meter 1033 which are arranged in sequence.

[0080] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a detection component 103 including a beam reducer 1031 , a first filter 1032 and an optical power meter 1033 , which can detect the power of the laser reflected by the polarization beam splitter 102 .

[0081] In some preferred embodiments, the detection component 103 is also used to measure the irradiation angle of the laser on the corresponding optical path; The detection assembly 103 also includes a first beam splitter 1034, a fourth reflector 1035, a first focusing mirror 1036, a second filter 1037 and a PSD sensor 1038 which are arranged in sequence; The first beam splitter 1034 is disposed between the polarization beam splitter 102 and the beam reducer 1031, and is used to transmit the laser light on the corresponding optical path and reflect it to the fourth reflector 1035; The fourth reflecting mirror 1035 is used to reflect the laser light on the corresponding optical path toward the first focusing mirror 1036 .

[0082] Specifically, the first beam splitter 1034 can cooperate with the fourth reflector 1035 to send the laser on the corresponding optical path to the first focusing mirror 1036 without affecting the detection of laser power by the optical power meter 1033, so that the PSD sensor 1038 can detect the angle of the laser irradiated along the corresponding optical path.

[0083] In this embodiment, the multi-wavelength laser frequency doubling device of the present application can enable the PSD sensor 1038 to detect the angle of the laser irradiated along the corresponding optical path without affecting the detection of laser power by the optical power meter 1033, thereby facilitating subsequent adjustment of the angle of the laser irradiated along the corresponding optical path.

[0084] Preferably, all second attenuators 1 are followed by optical shutters 8 for controlling the laser output on the corresponding optical paths.

[0085] More preferably, an output window 3 for outputting laser light on a corresponding optical path is disposed behind each optical gate 8 , and all output windows 3 are provided with an optical coating for transmitting only laser light of a single wavelength corresponding to each output window 3 .

[0086] Specifically, the output window 3 set on the first optical path 100 corresponds to the first wavelength laser, the output window 3 set on the second optical path 200 corresponds to the second wavelength laser, the output window 3 set on the third optical path 300 corresponds to the third wavelength laser, and the output window 3 set on the fourth optical path 400 corresponds to the fourth wavelength laser.

[0087] In this embodiment, the present application enables each optical path to output laser light of only one wavelength, thereby achieving a better defect repair effect when repairing defects adapted to the laser light based on any wavelength of the laser light.

[0088] In some preferred embodiments, a first attenuator 2 is provided between the laser source 11 and the first double frequency crystal 12; The first attenuator 2 is used to measure and adjust the power of the laser of the first wavelength.

[0089] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a first attenuator 2 between the laser source 11 and the first doubled frequency crystal 12, which can perform preliminary detection and adjustment of the laser power emitted by the laser source 11, thereby cooperating with the second attenuator 1 provided on each optical path to further improve the power adjustment accuracy of the laser on each optical path.

[0090] Second, as Fig.10 As shown, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path 100, a second optical path 200, a third optical path 300 and a fourth optical path 400; A laser source 11, a first double frequency crystal 12 and a triple frequency crystal 13 are sequentially arranged on the first optical path 100, and the laser source 11 is used to emit a laser of a first wavelength; A first dichroic mirror 141 is provided between the first double frequency crystal 12 and the triple frequency crystal 13 for sending only the second wavelength laser light into the fourth optical path 400, and the wavelength of the second wavelength laser light is 1 / 2 of the wavelength of the first wavelength laser light; A second dichroic mirror 151 is arranged behind the frequency tripling crystal 13 for sending only the third wavelength laser into the third optical path 300 , and the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A second beam splitter 411, a second double frequency crystal 42 and a third dichroic mirror 43 are arranged in sequence on the fourth optical path 400. The second beam splitter 411 is used to send the second wavelength laser into the second optical path 200, and the third dichroic mirror 43 is used to only transmit the fourth wavelength laser. The wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser.

[0091] Specifically, the second wavelength laser light transmitted by the first double frequency crystal 12 to the first dichroic mirror 141 is reflected by the first dichroic mirror 141 and sent to the fourth optical path 400, the first wavelength laser light transmitted by the first double frequency crystal 12 to the first dichroic mirror 141 passes through the first dichroic mirror 141 to irradiate the triple frequency crystal 13, the third wavelength laser light transmitted by the triple frequency crystal 13 to the second dichroic mirror 151 is reflected by the second dichroic mirror 151 and sent to the third optical path 300, the first wavelength laser light transmitted by the triple frequency crystal 13 to the second dichroic mirror 151 passes through the second dichroic mirror 151, and thus the first optical path 100 only outputs the first wavelength laser light. The third optical path 300 outputs only the third wavelength laser; the second wavelength laser reflected by the second beam splitter 411 and sent to the fourth optical path 400 enters the second optical path 200, so the second optical path 200 outputs only the second wavelength laser; the second wavelength laser transmitted by the second beam splitter 411 and sent to the fourth optical path 400 irradiates the second double frequency crystal 42, and the second wavelength laser transmitted by the second double frequency crystal 42 is reflected by the third dichroic mirror 43 and leaves the fourth optical path 400, and the fourth wavelength laser transmitted by the second double frequency crystal 42 passes through the third dichroic mirror 43, so the fourth optical path 400 outputs only the fourth wavelength laser. Therefore, the multi-wavelength laser frequency doubling device provided by the present application can make each optical path output only one wavelength of laser, and can simultaneously repair four defects respectively adapted to the four wavelength lasers based on the four wavelength lasers, thereby improving the repair efficiency.

[0092] Thirdly, Fig.13 As shown, the present application provides a multi-wavelength laser frequency doubling system for repairing defects on an OLED panel and for adjusting the power of a laser for repairing the defects, comprising a first optical path 100, a second optical path 200, a third optical path 300 and a fourth optical path 400; A laser source 11, a first double frequency crystal 12 and a triple frequency crystal 13 are sequentially arranged on the first optical path 100, and the laser source 11 is used to emit a laser of a first wavelength; A first conversion component 14 for selectively sending the second wavelength laser into the fourth optical path 400 is provided between the first double frequency crystal 12 and the triple frequency crystal 13, wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component 15 is disposed after the frequency tripling crystal 13 for selectively sending a third wavelength laser into the third optical path 300 , wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; The fourth optical path 400 is provided with a third conversion component 41 and a second double frequency crystal 42 in sequence, and the third conversion component 41 is used to selectively send the second wavelength laser into the second optical path 200; The end of the first optical path 100, the end of the second optical path 200 and the end of the third optical path 300 are all provided with a second attenuator 1, and a third attenuator 9 is provided between the third conversion component 41 and the second double frequency crystal 42. The second attenuator 1 and the third attenuator 9 are both used to measure and adjust the power of the laser on the corresponding optical path, and both include a half-wave plate 101, a polarization beam splitter 102 and a detection component 103 which are arranged in sequence; The angle between the half-wave plate 101 and the corresponding optical path is adjustable; The polarization beam splitter 102 is used to transmit and reflect the laser light on the corresponding optical path to the detection component 103; The detection component 103 is used to measure the power of the laser on the corresponding optical path; The second attenuator 1 and the third attenuator 9 also include a driving mechanism 104 connected to the half-wave plate 101, and the driving mechanism 104 is used to drive the half-wave plate 101 to rotate to adjust the angle between the half-wave plate 101 and the corresponding optical path; The multi-wavelength laser frequency doubling system also includes a controller (not shown in the figure), which is used to measure the power of the laser on the corresponding optical path according to the detection component 103, and control the driving mechanism 104 to drive the half-wave plate 101 to rotate according to the power of the laser on the corresponding optical path to adjust the angle between the half-wave plate 101 and the corresponding optical path, so as to adjust the power of the laser on the corresponding optical path reflected by the polarization beam splitter 102 to reach the target value.

[0093] The multi-wavelength laser frequency doubling system provided in the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to lasers of different wavelengths can be repaired at the same time, which can improve the repair efficiency, and has strong targeting and high flexibility; and the present application can realize closed-loop control of the laser power of each optical path based on the second attenuator 1 and the third attenuator 9, thereby improving the power regulation accuracy of the laser on each optical path.

[0094] From the above, it can be seen that the present application provides a multi-wavelength laser frequency doubling device and system, wherein the multi-wavelength laser frequency doubling device provided by the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to different wavelength lasers can be repaired at the same time, which can improve the repair efficiency, and has strong targeting and high flexibility.

[0095] In the embodiments provided in the present application, it should be understood that, herein, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0096] The above are only embodiments of the present application and are not intended to limit the scope of protection of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the scope of protection of the present application.

Claims

1. A multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, characterized in that: Comprising a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first conversion component (14) for selectively sending a second wavelength laser into the fourth optical path (400) is provided between the first doubled frequency crystal (12) and the tripled frequency crystal (13), wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component (15) is arranged behind the frequency tripling crystal (13) for selectively sending a third wavelength laser into the third optical path (300), wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component (41) and a second double frequency crystal (42) are arranged in sequence on the fourth optical path (400); the third conversion component (41) is used to selectively send the second wavelength laser into the second optical path (200).

2. The multi-wavelength laser frequency doubling device according to claim 1, characterized in that: The first conversion component (14) comprises: A first dichroic mirror (141) is used to transmit the first wavelength laser and reflect the second wavelength laser to send it into a fourth optical path (400); A first motion mechanism (142) is connected to the first dichroic mirror (141) and is used to drive the first dichroic mirror (141) to move so as to enter or leave the first optical path (100).

3. The multi-wavelength laser frequency doubling device according to claim 2, characterized in that: The first conversion component (14) further comprises: A first reflecting mirror (143), connected to the first motion mechanism (142), and used to reflect the first wavelength laser and the second wavelength laser to send them into a fourth optical path (400); The first motion mechanism (142) is also used to drive the first reflector (143) to move so as to enter or leave the first optical path (100).

4. The multi-wavelength laser frequency doubling device according to claim 1, characterized in that: A second attenuator (1) is provided at the end of the first optical path (100), the end of the second optical path (200) and the end of the third optical path (300); The second attenuator (1) is used to measure and adjust the power of the laser on the corresponding optical path.

5. The multi-wavelength laser frequency doubling device according to claim 4, characterized in that: The second attenuator (1) comprises a half-wave plate (101), a polarization beam splitter (102) and a detection component (103) which are arranged in sequence; The angle between the half-wave plate (101) and the corresponding optical path is adjustable; The polarization beam splitter (102) is used to transmit the laser light on the corresponding optical path and reflect it to the detection component (103); The detection component (103) is used to measure the power of the laser on the corresponding optical path; The second attenuator (1) further comprises a driving mechanism (104) connected to the half-wave plate (101), wherein the driving mechanism (104) is used to drive the half-wave plate (101) to rotate so as to adjust the angle between the half-wave plate (101) and the corresponding optical path.

6. The multi-wavelength laser frequency doubling device according to claim 5, characterized in that: The detection component (103) comprises a beam reducer (1031), a first optical filter (1032), and an optical power meter (1033) which are arranged in sequence.

7. The multi-wavelength laser frequency doubling device according to claim 6, characterized in that: The detection component (103) is also used to measure the irradiation angle of the laser on the corresponding optical path; The detection component (103) further comprises a first beam splitter (1034), a fourth reflector (1035), a first focusing mirror (1036), a second filter (1037) and a PSD sensor (1038) which are arranged in sequence; The first beam splitter (1034) is arranged between the polarization beam splitter (102) and the beam reducer (1031), and is used to transmit and reflect the laser light on the corresponding optical path to the fourth reflector (1035); The fourth reflector (1035) is used to reflect the laser light on the corresponding optical path toward the first focusing mirror (1036).

8. The multi-wavelength laser frequency doubling device according to claim 1, characterized in that: A first attenuator (2) is provided between the laser source (11) and the first frequency doubling crystal (12); The first attenuator (2) is used to measure and adjust the power of the first wavelength laser.

9. A multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, characterized in that: Comprising a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first dichroic mirror (141) for sending only the second wavelength laser light into the fourth optical path (400) is arranged between the first double frequency crystal (12) and the triple frequency crystal (13), wherein the wavelength of the second wavelength laser light is 1 / 2 of the wavelength of the first wavelength laser light; A second dichroic mirror (151) is arranged behind the frequency tripling crystal (13) for sending only the third wavelength laser light into the third optical path (300), wherein the wavelength of the third wavelength laser light is 1 / 3 of the wavelength of the first wavelength laser light; A second beam splitter (411), a second double frequency crystal (42) and a third dichroic mirror (43) are arranged in sequence on the fourth optical path (400); the second beam splitter (411) is used to send the second wavelength laser into the second optical path (200); the third dichroic mirror (43) is used to transmit only the fourth wavelength laser; the wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser.

10. A multi-wavelength laser frequency doubling system for repairing defects on an OLED panel and for adjusting the power of a laser for repairing the defects, characterized in that: Comprising a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first conversion component (14) for selectively sending a second wavelength laser into the fourth optical path (400) is provided between the first doubled frequency crystal (12) and the tripled frequency crystal (13), wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component (15) is arranged behind the frequency tripling crystal (13) for selectively sending a third wavelength laser into the third optical path (300), wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component (41) and a second double frequency crystal (42) are arranged in sequence on the fourth optical path (400), and the third conversion component (41) is used to selectively send the second wavelength laser into the second optical path (200); A second attenuator (1) is disposed at the end of the first optical path (100), the end of the second optical path (200), and the end of the third optical path (300); a third attenuator (9) is disposed between the third conversion component (41) and the second doubled frequency crystal (42); the second attenuator (1) and the third attenuator (9) are both used to measure and adjust the power of the laser on the corresponding optical path, and both include a half-wave plate (101), a polarization beam splitter (102), and a detection component (103) which are disposed in sequence; The angle between the half-wave plate (101) and the corresponding optical path is adjustable; The polarization beam splitter (102) is used to transmit the laser light on the corresponding optical path and reflect it to the detection component (103); The detection component (103) is used to measure the power of the laser on the corresponding optical path; The second attenuator (1) and the third attenuator (9) both further comprise a driving mechanism (104) connected to the half-wave plate (101), the driving mechanism (104) being used to drive the half-wave plate (101) to rotate so as to adjust the angle between the half-wave plate (101) and the corresponding optical path; The multi-wavelength laser frequency doubling system further comprises a controller, the controller being used to measure the power of the laser on the corresponding optical path according to the detection component (103), and to control the driving mechanism (104) to drive the half-wave plate (101) to rotate according to the power of the laser on the corresponding optical path so as to adjust the angle between the half-wave plate (101) and the corresponding optical path, so as to adjust the power of the laser on the corresponding optical path reflected by the polarization beam splitter (102) to reach a target value.

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