Ultraviolet curing equipment

Abstract

The invention relates to the technical field of semiconductor equipment, in particular to ultraviolet curing equipment. The invention provides ultraviolet curing equipment which at least comprises an ultraviolet light source, a reflection module and a lamp box. The ultraviolet light source is installed in the lamp box and used for emitting ultraviolet light. The reflection module is arranged in the lamp box and is used for reflecting the ultraviolet light and reflecting the ultraviolet light to a target area; wherein the reflection module at least comprises a main reflector and a back pressure sheet; the main reflector is used for carrying out primary reflection on the ultraviolet light; and the back pressure sheet is connected with the main reflector and is in sliding rail type connection with the lamp box. According to the invention, the angle of the back pressure sheet can be adjusted by operating the adjustable knob outside the lamp box without temperature rise and fall, so that the light path is changed, the working efficiency is improved, the labor and time cost is reduced, and a new thought and direction are provided for process development and innovation.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and more particularly to an ultraviolet curing equipment. Background Art

[0002] UV curing equipment is a technical device that uses ultraviolet light (UV light) as an energy source to quickly cure materials such as coatings (i.e., convert them from liquid or soft state to solid state). Such equipment usually contains at least a UV light source, a reflective module, and other key components.

[0003] Chinese invention patent CN101093786A details a UV curing system, in which the construction of the UV lamp is described in detail. The UV lamp consists of a thin UV lamp tube, which is mounted in a cover. The cover contains a reflector, which faces the UV lamp tube and is responsible for directing UV radiation to a flood pattern above the substrate. In addition, the reflector is placed in a resonant cavity, the function of which is to limit the shape and size of the reflector.

[0004] Figure 1 A schematic diagram of a UV curing device is disclosed, such as Figure 1 As shown, the ultraviolet light source is a lamp 11 for emitting ultraviolet light, and the reflection module is a main reflector 12, also called a "primary reflector", which is responsible for the first reflection of the ultraviolet light.

[0005] For UV curing equipment (UV chamber), the main reflector 12 is an important component. Since the illumination of the lamp tube 11 in the chamber is uneven, it is necessary to provide reflected light through the main reflector 12 to make the light evenly distributed in the chamber. The main reflector 12 adjusts the light path by changing the reflected light angle, thereby optimizing the curing effect.

[0006] The counter-pressing sheet 13 is a device for fixing the main reflector 12, and the main reflector 12 is fixed in the card slot of the counter-pressing sheet 13. The counter-pressing sheet 13 fixes the main reflector 12 on the microwave cavity in the light box of the ultraviolet curing equipment by screws. If the illumination angle needs to be adjusted, the angle of the main reflector 12 must be changed by replacing a counter-pressing sheet 13 of a different type. The widths of the counter-pressing sheets 13 of different types are different, and the angles at which the main reflector 12 can be adjusted are also different.

[0007] Therefore, the light box needs to be heated and cooled, and the components inside the light box, including the magnetron, shielding cover and other key parts, need to be frequently disassembled and assembled, which affects the process performance. This practice requires a lot of manpower when disassembling and assembling the light box, which reduces work efficiency and increases hardware costs. Summary of the invention

[0008] The object of the present invention is to provide an ultraviolet curing device to solve the problem that it is difficult to adjust the main reflector to change the reflected light angle in the ultraviolet curing device of the prior art.

[0009] In order to achieve the above object, the present invention provides an ultraviolet curing device, which at least includes an ultraviolet light source, a reflection module and a light box:

[0010] The ultraviolet light source is installed in the light box and is used to emit ultraviolet light;

[0011] The reflection module is installed in the light box to reflect the ultraviolet light and reflect the ultraviolet light to the target area;

[0012] Wherein, the reflection module at least includes a main reflector and a back pressure sheet;

[0013] The main reflector is connected to a back pressure sheet and is used to reflect the ultraviolet light once;

[0014] The counter-pressure plate is connected to the light box by a slide-type connection, so that the counter-pressure plate can slide relative to the light box to adjust the relative position.

[0015] In one embodiment, a sliding track is provided inside the light box;

[0016] The counter-pressure plate is provided with a pulley structure corresponding to the position of the sliding track;

[0017] The pulley structure moves in the sliding track to adjust the position of the counter-pressure plate, thereby changing the reflected light angle of the main reflector.

[0018] In one embodiment, the pulley structure comprises a first disc, a second disc and a connecting shaft:

[0019] The first disc is arranged below the sliding track;

[0020] The second disc is arranged above the sliding track;

[0021] The connecting shaft connects the first disc and the second disc.

[0022] In one embodiment, the radius of the first disk is smaller than the radius of the second disk.

[0023] In one embodiment, an adjusting screw is installed on the side of the pulley structure or the sliding track;

[0024] The contact pressure between the pulley structure and the sliding track is adjusted by rotating the adjusting screw so that the pulley is fixed on the sliding track.

[0025] In one embodiment, an adjustable knob is provided outside the light box, and the adjustable knob is connected to the pulley structure:

[0026] The relative position of the pulley structure in the sliding track is adjusted by rotating the adjustable knob, thereby changing the reflected light angle of the main reflector.

[0027] In one embodiment, a plurality of angle marks are provided on the surface of the adjustable knob for marking the reflected light angle of the main reflector.

[0028] In one embodiment, the adjustment angle range of the adjustable knob is: no more than 5 degrees of outward rotation, and no more than 10 degrees of inward rotation.

[0029] In one embodiment, the light box further comprises a microwave cavity:

[0030] The microwave cavity is used to accommodate an ultraviolet light source and a reflection module.

[0031] In one embodiment, pulley structures are provided at both ends of the counter-pressure sheet;

[0032] A sliding track is provided inside the light box at a position corresponding to the pulley structure.

[0033] The ultraviolet curing equipment proposed in the present invention can adjust the angle of a back pressure sheet by operating an adjustable knob outside the light box without raising or lowering the temperature, thereby changing the light path. This not only significantly improves work efficiency and reduces manpower and time costs, but also provides new ideas and directions for process development and innovation. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features.

[0035] in:

[0036] Figure 1 A schematic diagram of a UV curing device is disclosed;

[0037] Figure 2 A schematic diagram of an ultraviolet curing device according to an embodiment of the present invention is disclosed;

[0038] Figure 3 A partial enlarged view of an ultraviolet curing device according to an embodiment of the present invention is disclosed.

[0039] The meanings of the reference numerals in the figures are as follows:

[0040] 11 lamps;

[0041] 12 main reflectors;

[0042] 13-Reverse compression tablet;

[0043] 21 lamps;

[0044] 22 main reflector;

[0045] 23-reverse compression tablet;

[0046] 24 sliding tracks;

[0047] 25 pulley structure;

[0048] 251 first disc;

[0049] 252 second disc;

[0050] 26 adjustable knobs;

[0051] 261 angle markings. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0053] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention. Although the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation, the form, quantity and proportion of each component in actual implementation may be changed arbitrarily, and the component layout may also be more complicated.

[0054] Figure 2 A schematic diagram of an ultraviolet curing device according to an embodiment of the present invention is disclosed. Figure 2 As shown, a UV curing device proposed by the present invention at least includes: a UV light source, a reflection module and a light box:

[0055] The ultraviolet light source is installed in the light box and is used to emit ultraviolet light;

[0056] The reflection module is installed in the light box to reflect the ultraviolet light and reflect the ultraviolet light to the target area.

[0057] like Figure 2 In the illustrated embodiment, the ultraviolet light source is a lamp tube 21 .

[0058] The reflection module includes a main reflector 22, also called a "primary reflector", which is installed in the light box and is used to reflect the ultraviolet light once.

[0059] In this embodiment, the lamp tube 21 and the main reflector 22 can adopt the structural design of the prior art, for example Figure 1 The structure shown.

[0060] Furthermore, in this embodiment, the reflection module includes a back pressure sheet 23 for fixedly connecting the main reflector 22. Optionally, the main reflector 22 is fixed in a slot of the back pressure sheet 23.

[0061] A counter-pressure plate 23 is designed to be connected to the light box in a slideway manner, so that the counter-pressure plate 23 can slide relative to the light box to adjust the relative position, and finally realize flexible adjustment of the position of the main reflector 22 and the illumination angle.

[0062] Furthermore, the light box also includes a microwave cavity, which is used to accommodate components such as an ultraviolet light source and a reflection module to ensure that light is evenly distributed in a closed environment and avoid external interference.

[0063] The cavity of the microwave cavity can be designed into different shapes (such as round or rectangular) according to different application requirements, and the inner wall can be made of high reflectivity material.

[0064] Figure 3 A partial enlarged view of an ultraviolet curing device according to an embodiment of the present invention is disclosed. Specifically, Figure 3 yes Figure 2 The enlarged image of the dotted box area. Figure 2 and Figure 3 As shown, in this embodiment, the slideway connection is achieved by the cooperation of the sliding track and the pulley structure.

[0065] More specifically, a sliding track 24 is provided inside the microwave cavity of the light box;

[0066] The counter-pressure sheet 23 is provided with a pulley structure 25 corresponding to the position of the sliding track 24;

[0067] The pulley structure 25 moves in the sliding track 24 to adjust the position of a counter-pressure plate 23 , thereby changing the reflected light angle of the main reflector 22 .

[0068] Compared with the fixing method of fixing screws in the prior art, the present invention adopts a slideway connection method, in which a sliding track 24 is provided in the microwave cavity of the light box, and a pulley structure 25 provided on a counter-pressure plate 23 can slide in the track to drive the sliding of the counter-pressure plate 23.

[0069] The microwave cavity is the main cavity of the ultraviolet curing device. The addition of the sliding track 24 structure ensures the sliding of the counter-pressure plate 23, while ensuring the angle adjustment of the main reflector and the accuracy of the optical path.

[0070] Furthermore, a pulley structure 25 is provided at both ends of a counter-pressure sheet 23;

[0071] Inside the light box, at a position corresponding to the pulley structure 25 , a sliding track 24 is provided.

[0072] Furthermore, the pulley structure 25 includes a first disc 251, a second disc 252 and a connecting shaft:

[0073] The first disc 251 is disposed below the sliding track;

[0074] The second disc 252 is disposed above the sliding track;

[0075] The connecting shaft connects the first disc 251 and the second disc 252 .

[0076] In this embodiment, the first disk 251 located below the track has a smaller radius, while the second disk 252 located above the track has a larger radius.

[0077] The upper and lower discs together form a simple pulley device, so that a counter-pressure piece 23 can slide smoothly along the sliding track 24. Through this sliding design, the operator can adjust the position of a counter-pressure piece 23 by simply pushing or rotating while keeping the system closed.

[0078] Furthermore, an adjusting screw is installed on the side of the pulley structure 25 or the sliding track 24;

[0079] The contact pressure between the pulley structure 25 and the sliding track 24 is adjusted by rotating the adjusting screw, thereby increasing the friction force so that the pulley is fixed on the sliding track.

[0080] The adjusting screw should be installed on the side of the pulley structure 25 or the sliding track 24 so that the operator can adjust it conveniently.

[0081] By tightening the screw, the pulley structure 25 can be fixed on the sliding track 24, while loosening the screw reduces the friction force, allowing the pulley to slide freely. This method allows the pulley to switch between different states: it can slide during adjustment and can be fixed after adjustment.

[0082] Furthermore, an adjustable knob 26 is provided outside the light box:

[0083] The adjustable knob 26 is connected to the pulley structure 25 . The relative position of the pulley structure 25 in the sliding track 24 can be adjusted by rotating the adjustable knob 26 , thereby changing the reflected light angle of the main reflector 22 .

[0084] The operator can make fine adjustments through the adjustable knob 26 while keeping the system closed, and lock the pulley position by adjusting the screw to achieve precise adjustment of the counter pressure plate 23.

[0085] The connection relationship between the adjustable knob 26 and the pulley structure 25 can be achieved in a variety of different ways.

[0086] In one embodiment, a connecting rod is provided between the adjustable knob 26 and the pulley structure 25 . When the adjustable knob 26 is rotated, the connecting rod can directly transmit the rotational force to the pulley structure 25 .

[0087] In order to realize this connection, adjustable knob 26 can be connected to the top of connecting rod by the mode of thread or buckle.On pulley structure 25, a suitable hole position can be set so that the bottom of connecting rod can be inserted into or fixed in this hole position.

[0088] In order to ensure the stability of the connecting rod, the connecting rod can be locked by means of screws or pins to ensure that it does not loosen or fall off during use.

[0089] When the operator rotates the adjustable knob 26, the rotational force of the adjustable knob 26 is transmitted to the pulley structure 25 through the connecting rod. The pulley structure 25 moves on the sliding track 24, and this movement is due to the connecting rod converting the rotational force into a sliding force.

[0090] As the pulley structure 25 moves on the slide rail 24, the position of the counter-pressure plate 23 will also change accordingly. This change is achieved through the mechanical linkage relationship between the pulley structure 25 and the counter-pressure plate 23, so that the adjustment of the entire device becomes more accurate and convenient. In this way, the operator can easily adjust the position of the counter-pressure plate 23 by rotating the adjustable knob 26 to meet different process requirements.

[0091] Furthermore, a plurality of angle marks 261 are provided on the surface of the adjustable knob 26 for marking the reflected light angle of the main reflector 22 , which can be used to adjust the light path during process development.

[0092] The knobs have clear angle markings 261, which facilitate precise adjustment of the light path as needed during process development, thereby optimizing the uniformity of the light. This is also important during production. With these angle markings, operators can quickly return to a specific angle setting for easy reuse. This not only improves production efficiency, but also ensures the consistency and reliability of the light path during each production process. The presence of angle markings allows operators to easily record and replicate specific settings, thereby maintaining consistent lighting effects in different production batches.

[0093] Furthermore, the adjustable angle range of the adjustable knob 26 is: no more than 5 degrees of outward rotation, and no more than 10 degrees of inward rotation.

[0094] This adjustment angle range ensures that the knob will not be over-rotated during adjustment, thereby avoiding potential damage to the device. By limiting the rotation angle of the knob, it can be ensured that the main reflector 22 is adjusted within a safe and controllable range.

[0095] It is explained here that “rotating outward in a counterclockwise direction” means that the knob is moved away from the lamp tube 21 , while “rotating inward” means that the knob is moved toward the lamp tube 21 .

[0096] In the prior art, the adjustment direction of UV curing equipment is mainly focused on parameters such as the gap, power and treat time, without considering the parameter of changing the light path. Among them, power is usually expressed as a percentage (%); the gap refers to the distance between the spray plate and the heating plate; the treat time refers to the duration of the light effect.

[0097] The present invention proposes a UV curing device with an adjustable light path, which opens up new ideas and directions for process development. In the device, the parameter of changing the light path can be added on the basis of the original machine adjustment direction, so as to achieve more precise control of the curing effect. By adjusting the light path, the curing process can be optimized for different materials and product characteristics, and the production efficiency and product quality can be improved. In practical applications, the UV curing device proposed by the present invention can adapt to more diverse production needs, providing manufacturers with greater flexibility and competitive advantages.

[0098] It is worth noting that, in addition to the aforementioned key components, the ultraviolet curing device involved in the present invention may also include a series of other components with the same functions as the ultraviolet curing device in the prior art. Due to space limitations, it will not be described here in detail, but it should be understood that all components of the ultraviolet curing device in the prior art are applicable to the present invention. For example, the ultraviolet curing device proposed in the present invention may also be equipped with an auxiliary reflector, by adding an additional auxiliary reflector on the basis of the main reflector to enhance the illumination of a specific area or achieve secondary reflection.

[0099] The ultraviolet curing equipment proposed by the present invention changes the fixing method between a counter-pressure plate and a light box to a slide-type connection structure, and adds an adjustable knob with an angle mark on the outside of the light box, so that the angle of the counter-pressure plate can be adjusted without cooling and disassembling the light box, thereby changing the light path. This improvement significantly improves work efficiency, reduces labor costs, and greatly reduces potential factors affecting process performance.

[0100] In the description of the present invention, it should be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0101] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0102] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more, unless otherwise clearly specified.

[0103] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0104] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A UV curing device, characterized in that: At least includes a UV light source, a reflective module and a light box: The ultraviolet light source is installed in the light box and is used to emit ultraviolet light; The reflection module is installed in the light box to reflect the ultraviolet light and reflect the ultraviolet light to the target area; Wherein, the reflection module at least includes a main reflector and a back pressure sheet; The main reflector is connected to a back pressure sheet and is used to reflect the ultraviolet light once; The counter-pressure plate is connected to the light box by a slide-type connection, so that the counter-pressure plate can slide relative to the light box to adjust the relative position.

2. The ultraviolet curing device according to claim 1, characterized in that: The interior of the light box is provided with a sliding track; The counter-pressure plate is provided with a pulley structure corresponding to the position of the sliding track; The pulley structure moves in the sliding track to adjust the position of a counter-pressure sheet, thereby changing the reflected light angle of the main reflector.

3. The ultraviolet curing device according to claim 2, characterized in that: The pulley structure comprises a first disc, a second disc and a connecting shaft: The first disc is arranged below the sliding track; The second disc is arranged above the sliding track; The connecting shaft connects the first disc and the second disc.

4. The ultraviolet curing device according to claim 3, characterized in that: The radius of the first disk is smaller than the radius of the second disk.

5. The ultraviolet curing device according to any one of claim 2, claim 3 or claim 4, characterized in that: An adjusting screw is installed on the side of the pulley structure or the sliding track; The contact pressure between the pulley structure and the sliding track is adjusted by rotating the adjusting screw so that the pulley is fixed on the sliding track.

6. The ultraviolet curing device according to claim 1, characterized in that: An adjustable knob is arranged outside the light box, and the adjustable knob is connected to the pulley structure: The relative position of the pulley structure in the sliding track is adjusted by rotating the adjustable knob, thereby changing the reflected light angle of the main reflector.

7. The ultraviolet curing device according to claim 6, characterized in that: A plurality of angle marks are arranged on the surface of the adjustable knob for marking the reflected light angle of the main reflector.

8. The ultraviolet curing device according to claim 7, characterized in that: The adjustable angle range of the adjustable knob is: no more than 5 degrees of outward rotation and no more than 10 degrees of inward rotation.

9. The ultraviolet curing device according to claim 1, characterized in that: The light box also includes a microwave cavity: The microwave cavity is used to accommodate an ultraviolet light source and a reflection module.

10. The ultraviolet curing device according to claim 2, characterized in that: Both ends of the counter-pressure sheet are provided with pulley structures; A sliding track is provided inside the light box at a position corresponding to the pulley structure.

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