Silicon crystal bar centering adjusting device based on laser positioning

Abstract

The invention relates to the technical field of silicon crystal processing equipment, in particular to a silicon crystal bar centering adjusting device based on laser positioning, and adopts the technical scheme that the silicon crystal bar centering adjusting device comprises an equipment table, a bottom plate is arranged at the lower end of the equipment table, bottom brackets are arranged on the two sides of the lower end of the bottom plate, and mounting rails are arranged on the two sides of the equipment table; and an open groove is formed between the mounting rails, a moving assembly is mounted on the open groove, and control motors are mounted on the two sides of the moving assembly. The movable grooves are formed in the two sides of the workbench, movement of the moving blocks is controlled through the moving motors, then the moving blocks and the connecting blocks are driven to move, the whole moving assembly is adjusted to move greatly, and movement of the clamping plates is controlled through the control motors, so that the clamping efficiency is improved. Therefore, the clamping plate is controlled to carry out fine distance adjustment on the silicon crystal bar, so that the overall adjustment is more detailed.

Description

Technical Field

[0001] The invention relates to the technical field of silicon crystal processing equipment, and in particular to a silicon crystal rod centering adjustment device based on laser positioning. Background Art

[0002] Silicon ingot is a rod-shaped crystal material made of high-purity silicon through a special process. It has a highly ordered crystal structure, which makes it have excellent electrical, optical and thermal properties. Silicon ingot plays an important role in the semiconductor industry, optoelectronic applications and optical fiber communications. In the storage process of silicon ingots, in order to avoid damage to the silicon ingots due to mutual squeezing, a special adjustment device needs to be designed. The device can effectively support and adjust the silicon ingot by setting structures such as buffers and adjustment components to ensure the stability and safety of the silicon ingots during storage.

[0003] The prior art also has the following defects during use:

[0004] The platforms used to fix silicon crystal rods in the prior art, currently, the positioning and fixing of most silicon crystal rods are only performed by naked eye positioning analysis, which has low accuracy, and are usually adjusted manually, which easily causes contamination to the silicon crystal rod. In the case of inconvenient adjustment of the silicon crystal rod, it will lead to the inability to carry out the work smoothly. The current silicon crystal rod centering adjustment device usually has poor alignment accuracy, cannot ensure that the silicon crystal rod is in a relatively accurate and stable position, and cannot guarantee that the silicon crystal rod can be smoothly used for subsequent work, which may cause errors in the work.

[0005] In view of this, we propose a silicon crystal rod alignment and adjustment device based on laser positioning to solve the existing problems. Summary of the invention

[0006] The object of the present invention is to provide a silicon crystal rod centering adjustment device based on laser positioning to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: A silicon crystal rod centering adjustment device based on laser positioning, comprising an equipment table, a bottom plate is arranged at the lower end of the equipment table, bottom brackets are arranged on both sides of the lower end of the bottom plate, mounting rails are arranged on both sides of the equipment table, slots are arranged between the mounting rails, moving components are installed on the slots, control motors are installed on both sides of the moving component, the control motors run through both sides of the moving component and are connected inwardly with connecting members, a first screw rod is arranged in the connecting member, one end of the first screw rod is connected to the control motor, and the other end of the first screw rod is connected to a clamping plate, a plurality of groups of contact heads are evenly arranged on the surface of the clamping plate, guide rails are arranged on both sides of the bottom plate, a laser locator is arranged at the upper end of the guide rail, a plurality of groups of laser emitting holes are arranged at the upper end of the laser locator, a rotation control member is arranged on one side of the lower end of the laser locator, a third screw rod is connected inwardly to the rotation control member, a moving member is installed on the third screw rod, a moving module is installed at the lower end of the moving member, and a plurality of groups of moving blocks are provided with clamping blocks inwardly.

[0008] Preferably, inward grooves are provided on both sides of the guide rail, the clamping block and the grooves are fitted and installed, and the laser locator and the guide rail are connected and installed via the clamping block and the moving module.

[0009] Preferably, multiple groups of mounting blocks are provided at the lower end of the base plate, a movable motor is installed on the mounting block on one side, a second spiral rod is provided inwardly through the mounting block, a movable block is installed on the second spiral rod, and a connecting block is provided at the upper end of the movable block.

[0010] Preferably, a connecting block is provided below the moving component, the connecting block is provided inside the slot, the moving block and the moving component are connected via the connecting block, and the moving component is slidably connected in the slot via the connecting block.

[0011] Preferably, a work surface is provided on the equipment table, and the equipment table is centrally arranged at the upper end of the bottom plate, and the work surface is centrally arranged above the equipment table.

[0012] Preferably, a detachable cover is provided at the upper end of the laser locator, a groove is provided at the rear end of the laser locator, and a laser adjustment switch is provided in the groove.

[0013] Preferably, the bottom plate is provided with scale lines on a side close to the guide rail, and the scale lines are evenly arranged between the guide rail and the edge of the bottom plate.

[0014] Preferably, the moving assembly, mounting rails, guide rails and laser locator are all symmetrically installed based on the base plate.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention provides movable grooves on both sides of the workbench, and controls the movement of the moving block by a moving motor, thereby driving the moving block and the connecting block to move, thereby adjusting the entire moving assembly to move more, and controls the movement of the clamping plate by controlling the motor, thereby controlling the clamping plate to adjust the position of the silicon crystal rod by a fine distance, making the overall adjustment more precise.

[0017] 2. The present invention provides laser locators on both sides of the mobile component, and performs positioning and alignment through multiple groups of laser emitting holes on the laser locator. The laser locator as a whole can be adjusted to a certain extent, and the position of the laser locator can be located and determined through the scale. In addition, the stability of the rotating control part at the lower end of the laser locator can be well controlled to ensure the accuracy of positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the three-dimensional structure at A;

[0020] Figure 3 It is a side cross-sectional structural schematic diagram of the present invention;

[0021] Figure 4 This is a schematic diagram of the structure at the bottom of the laser locator.

[0022] In the figure: 1. Equipment table; 2. Base plate; 3. Work table; 4. Cover plate; 5. Laser adjustment switch; 6. Laser locator; 7. Guide rail; 8. Bottom bracket; 9. Scale lines; 10. Control motor; 11. Laser emission hole; 12. Contact head; 13. Clamping plate; 14. First screw rod; 15. Connecting piece; 16. Moving component; 17. Slotting; 18. Mounting track; 19. Connecting block; 20. Moving motor; 21. Mounting block; 22. Second screw rod; 23. Moving block; 24. Rotation control piece; 25. Moving module; 26. Clamping block; 27. Moving piece; 28. Third screw rod. DETAILED DESCRIPTION

[0023] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0024] Embodiment 1

[0025] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, a silicon crystal rod centering adjustment device based on laser positioning proposed by the present invention comprises an equipment platform 1, a bottom plate 2 is arranged at the lower end of the equipment platform 1, bottom brackets 8 are arranged at both sides of the lower end of the bottom plate 2, mounting rails 18 are arranged at both sides of the equipment platform 1, slots 17 are arranged between the mounting rails 18, a moving component 16 is installed on the slots 17, control motors 10 are installed on both sides of the moving component 16, the control motor 10 runs through both sides of the moving component 16 and is connected to a connecting member 15 inwardly, a first screw rod 14 is arranged in the connecting member 15, and one end of the first screw rod 14 is connected to a control motor 10. The motor 10 is provided with a clamping plate 13 at the other end of the first screw rod 14, and a plurality of contact heads 12 are evenly arranged on the surface of the clamping plate 13. Guide rails 7 are provided on both sides of the bottom plate 2, and a laser locator 6 is provided at the upper end of the guide rail 7. A plurality of laser emitting holes 11 are provided at the upper end of the laser locator 6. A rotation control member 24 is provided on one side of the lower end of the laser locator 6, and a third screw rod 28 is connected inwardly to the rotation control member 24. A moving member 27 is installed on the third screw rod 28, and a moving module 25 is installed at the lower end of the moving member 27. A plurality of moving blocks 23 are provided with clamping blocks 26 inwardly.

[0026] The moving component 16 can move to a certain extent on the mounting rail 18 through the slot 17, so as to adjust the position of the moving component 16, and the moving component 16 includes a clamping plate 13 controlled by the control motor 10. The control motor 10 controls the rotation of the first screw rod 14 to drive the movement of the clamping plate 13. A plurality of groups of contact heads 12 are arranged on the surface of the clamping plate 13. The contact heads 12 can prevent the clamping plate 13 from causing contamination and damage to the silicon crystal rod during the clamping process. A laser locator 6 is arranged on the outer side of the moving component 16. The laser locator 6 can move on the guide rail 7, and the position of the silicon crystal rod can be calibrated by the laser locator 6.

[0027] Furthermore, inward grooves are provided on both sides of the guide rail 7 , the clamping block 26 and the grooves are fitted and installed, and the laser locator 6 and the guide rail 7 are connected and installed through the clamping block 26 and the moving module 25 .

[0028] The laser locator 6 can be moved on the guide rail 7 through the moving module 25 , and the fixation of the laser locator 6 on the guide rail 7 can be controlled through the clamping block 26 .

[0029] Furthermore, multiple groups of mounting blocks 21 are provided at the lower end of the base plate 2, a movable motor 20 is installed on the mounting block 21 on one side, a second spiral rod 22 is provided inwardly through the movable motor 20, a movable block 23 is installed on the second spiral rod 22, and a connecting block 19 is provided on the upper end of the movable block 23.

[0030] The moving motor 20 can move the moving block 23 by controlling the rotation of the second screw rod 22, and the movement of the moving block 23 will drive the connecting block 19 to move, thereby driving the moving assembly 16 at the upper end to move together.

[0031] Furthermore, a connecting block 19 is provided below the moving component 16 , and the connecting block 19 is provided inside the slot 17 . The moving block 23 and the moving component 16 are connected via the connecting block 19 , and the moving component 16 is slidably connected in the slot 17 via the connecting block 19 .

[0032] The lower end of the moving component 16 is connected to a connecting block 19 . The movement of the connecting block 19 can drive the moving component 16 to move to a certain extent. The entire moving component 16 can be controlled to move by a moving motor 20 .

[0033] Furthermore, a work surface 3 is provided on the equipment platform 1 , and the equipment platform 1 is centrally arranged on the upper end of the bottom plate 2 , and the work surface 3 is centrally arranged above the equipment platform 1 .

[0034] Both sides of the equipment table 1 are used to install adjustment devices, the work surface 3 is used for working activities, and the bottom plate 2 is a support plate for supporting the entire table.

[0035] Furthermore, a detachable cover plate 4 is provided at the upper end of the laser locator 6, a groove is provided at the rear end of the laser locator 6, and a laser adjustment switch 5 is provided in the groove.

[0036] Objects such as batteries can be placed inside the cover plate 4, and a laser adjustment switch 5 is provided inside the groove. The laser adjustment switch 5 can control the intensity of the laser emission and is used to control the opening and closing of the laser.

[0037] Furthermore, the bottom plate 2 is provided with scale lines 9 on one side close to the guide rail 7 , and the scale lines 9 are evenly arranged between the guide rail 7 and the edge of the bottom plate 2 .

[0038] The scale lines 9 can be used to clearly see the position of the laser locator 6, which is convenient for fixing the position of the laser locator 6.

[0039] Furthermore, the moving assembly 16 , the mounting track 18 , the guide rail 7 and the laser locator 6 are all symmetrically installed based on the base plate 2 .

[0040] The symmetrically installed equipment on both sides can position and install multiple groups of silicon crystal rods at the same time, further ensuring the smooth progress of silicon crystal rod centering and adjustment work, and supporting more work needs.

[0041] The working principle of the silicon crystal rod centering adjustment device based on laser positioning according to the first embodiment is as follows: by placing the silicon crystal rod that needs to be centered and adjusted between the moving components 16, the rotation of the second screw rod 22 can be controlled by the moving motor 20, and the movement of the moving component 16 is controlled by the rotation of the second screw rod 22, and then the rotation of the first screw rod 14 is controlled by the control motor 10, thereby controlling the movement of the clamping plate 13, so that the silicon crystal rod can be finely adjusted and fixed, and during the adjustment process, the laser emission holes 11 on both sides are used for laser emission and calibration. After the laser emitter is adjusted, the laser generator can be fixed on the guide rail 7 through the rotating control member 24 at the lower end.

[0042] The above-mentioned specific embodiments are only several preferred embodiments of the present invention. Based on the technical solutions of the present invention and the relevant inspirations of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

Claims

1. A silicon crystal rod centering adjustment device based on laser positioning, comprising an equipment platform (1), characterized in that: A bottom plate (2) is provided at the lower end of the equipment platform (1), bottom brackets (8) are provided on both sides of the lower end of the bottom plate (2), mounting rails (18) are provided on both sides of the equipment platform (1), slots (17) are provided between the mounting rails (18), a moving assembly (16) is installed on the slots (17), control motors (10) are installed on both sides of the moving assembly (16), the control motor (10) passes through both sides of the moving assembly (16) and is connected inwardly to a connecting member (15), a first screw rod (14) is provided in the connecting member (15), one end of the first screw rod (14) is connected to the control motor (10), and the other end of the first screw rod (14) is connected to the control motor (10). A clamping plate (13) is connected, and a plurality of contact heads (12) are evenly arranged on the surface of the clamping plate (13). Guide rails (7) are arranged on both sides of the bottom plate (2). A laser locator (6) is arranged at the upper end of the guide rail (7). A plurality of laser emitting holes (11) are arranged at the upper end of the laser locator (6). A rotation control member (24) is arranged on one side of the lower end of the laser locator (6). The rotation control member (24) is connected inwardly to a third screw rod (28). A moving member (27) is installed on the third screw rod (28). A moving module (25) is installed at the lower end of the moving member (27). A plurality of groups of the moving blocks (23) are provided with clamping blocks (26) inwardly.

2. The silicon ingot centering adjustment device based on laser positioning according to claim 1, characterized in that: Inward grooves are provided on both sides of the guide rail (7), the clamping block (26) and the grooves are fitted and installed, and the laser locator (6) and the guide rail (7) are connected and installed through the clamping block (26) and the moving module (25).

3. The silicon crystal rod centering adjustment device based on laser positioning according to claim 1, characterized in that: A plurality of mounting blocks (21) are arranged at the lower end of the base plate (2), a movable motor (20) is installed on the mounting block (21) on one side, the movable motor (20) passes through the mounting block (21) and a second screw rod (22) is arranged inwardly, a movable block (23) is installed on the second screw rod (22), and a connecting block (19) is arranged at the upper end of the movable block (23).

4. The silicon ingot centering adjustment device based on laser positioning according to claim 3, characterized in that: A connecting block (19) is arranged below the moving component (16), and the connecting block (19) is arranged inside the slot (17). The moving block (23) and the moving component (16) are connected via the connecting block (19), and the moving component (16) is slidably connected in the slot (17) via the connecting block (19).

5. The silicon ingot centering adjustment device based on laser positioning according to claim 1, characterized in that: A work surface (3) is arranged on the equipment platform (1); the equipment platform (1) is centrally arranged on the upper end of the base plate (2); and the work surface (3) is centrally arranged above the equipment platform (1).

6. The silicon ingot centering adjustment device based on laser positioning according to claim 1, characterized in that: A detachable cover plate (4) is provided at the upper end of the laser locator (6), a groove is provided at the rear end of the laser locator (6), and a laser adjustment switch (5) is provided in the groove.

7. The silicon ingot centering adjustment device based on laser positioning according to claim 1, characterized in that: The bottom plate (2) is provided with scale lines (9) on one side close to the guide rail (7), and the scale lines (9) are evenly arranged between the edges of the guide rail (7) and the bottom plate (2).

8. The silicon ingot centering adjustment device based on laser positioning according to claim 1, characterized in that: The moving assembly (16), the mounting track (18), the guide rail (7) and the laser locator (6) are all symmetrically installed based on the base plate (2).

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