Arc source for ion plating

Abstract

The invention relates to an arc source for ion plating. A target material assembly is fixed in an installation assembly; an insulating flange is fixed below the target material assembly; the water cooling assembly is fixed on the mounting assembly through the insulating fastening assembly below the insulating flange; the magnetic field assembly and the water cooling assembly are fixedly connected below the water cooling assembly through a threaded connection structure on the water cooling assembly. An arc striking device is fixedly connected to one side of the mounting assembly; the arc striking device conducts arc striking by turning over an arc striking needle. According to the ion plating machine, the structures of the mounting assembly, the water cooling assembly, the magnetic field assembly, the arc striking device and the like are changed, the problem of pollution caused by contact of an arc striking needle with a target surface is avoided, the technical problem that the size of an arc source for ion plating is large due to an arc striking mode is solved, and a series of problems that the size of the ion plating machine is reduced, energy consumption is reduced and the like are solved. The problem caused by an arc striking mode in the prior art is solved.

Description

Technical Field

[0001] The embodiments of the present invention relate to an arc source, and in particular to an arc source for ion plating. Background Art

[0002] In the prior art, in the arc source for ion plating, due to the problem of arc striking method, especially when multiple arc sources are used side by side and in parallel, the installation method of the arc striking needle leads to the service life problem of the arc striking needle, oil seal, and rubber ring, and the contamination problem of the arc striking needle contacting the target surface. The arc striking method also causes the arc source for ion plating to be larger in size and cannot be installed in a narrow and long ion plating machine, resulting in a series of problems such as a larger size of the ion plating machine and increased energy consumption. It becomes very important to change the arc striking method of the arc source. Summary of the invention

[0003] An object of an embodiment of the present invention is to provide an arc source for ion plating that changes the arc striking method including the installation method of the arc striking needle.

[0004] In order to achieve the above object, an embodiment of the present invention designs an arc source for ion plating, comprising:

[0005] Install components;

[0006] A target assembly, wherein the target assembly is fixed in the mounting assembly;

[0007] An insulating flange, wherein the insulating flange is fixed below the target assembly;

[0008] A water cooling assembly, wherein the water cooling assembly is fixed to the mounting assembly by an insulating fastening assembly below the insulating flange;

[0009] A magnetic field assembly, wherein the magnetic field assembly is fixedly connected to the water cooling assembly through a threaded connection structure on the water cooling assembly below the water cooling assembly;

[0010] An arc-striking device is fixedly connected to one side of the mounting assembly; the arc-striking device performs arc-striking by flipping an arc-striking needle.

[0011] Furthermore, the arc source for ion plating described in the present invention, the installation assembly, also includes:

[0012] A mounting flange, the mounting flange being arranged at the lower part of the mounting assembly;

[0013] an anode seat, embedded in the mounting flange;

[0014] Insulating bolts, connected by bolts on both sides of the anode seat;

[0015] an anode, in the anode holder, the anode being suspended and fixed by the insulating bolts;

[0016] A shielding cover is sleeved on the outer sides of the anode seat and the insulating bolts.

[0017] Furthermore, the arc source for ion plating described in the present invention, the target assembly, also includes:

[0018] A target material is inserted below the inner side of the anode of the mounting assembly;

[0019] A water sealing plate is placed below the target material; fixing bolts are inserted into both sides of the water sealing plate to fix the water sealing plate above the water cooling assembly;

[0020] A target pressing flange is fastened on the outer side of the target material at a right angle;

[0021] A ceramic ring is located above the target pressure flange and is clamped on the outer side of the target material.

[0022] Furthermore, in the arc source for ion plating described in the present invention, the anode is circular, and a bevel is provided along the inner edge of the anode; a threaded hole is provided at each of the angled dividing lines around the anode.

[0023] Furthermore, the arc source for ion plating described in the present invention and the insulating fastening assembly also include:

[0024] An insulating sleeve is provided with a through hole on the same radius on the circumference of the mounting flange of the mounting assembly, the insulating flange and the water cooling flange of the water cooling assembly; and the insulating sleeve is placed in the through hole;

[0025] The fastening bolts are screwed into the insulating sleeve; the mounting flange, the insulating flange and the water-cooling flange are fixed together.

[0026] Furthermore, the arc source for ion plating described in the present invention and the water cooling assembly also include:

[0027] The water cooling flange is arranged inside the water cooling assembly;

[0028] A fan-shaped flange is placed in the groove inside the water-cooling flange;

[0029] A water outlet pipe, one end of which is fixedly connected to the central axis of the water-cooling flange;

[0030] A water inlet pipe, inside the water outlet pipe, fixedly connected to one end of the water inlet pipe on the central axis of the water-cooling flange;

[0031] A water inlet joint, threadedly connected to the water inlet joint at the other end of the water inlet pipe;

[0032] A water outlet joint is threadedly connected to the water outlet joint on the side of the water outlet pipe.

[0033] Furthermore, the arc source for ion plating described in the present invention and the magnetic field assembly also include:

[0034] A magnet fixing seat, fixed below the water cooling flange of the water cooling assembly;

[0035] Permanent magnets, a plurality of permanent magnets are arranged on the magnet fixing seat;

[0036] A coil, wherein the coil is wound around a plurality of the permanent magnets;

[0037] A round nut is provided in the groove of the magnet fixing seat; the round nut is threadedly connected with the external thread arranged on the water outlet joint.

[0038] Furthermore, the arc source for ion plating described in the present invention and the arc striking device also include:

[0039] An arc-striking insulating member is fixed below the mounting flange of the mounting assembly, and the cylinder on the arc-striking insulating member penetrates into the mounting flange;

[0040] A connecting rod is inserted into the central hole of the arc-striking insulating member;

[0041] A clamping member, fixing the lower portion of the clamping member on the upper portion of the arc-striking insulating member;

[0042] A linkage structure is movably connected to the clamp and one end of the connecting rod; an arc-starting needle is fixed on the linkage structure;

[0043] A bellows fixing part is located below the arc-striking insulating part, and one end of the connecting rod is fixedly connected to one end of the bellows fixing part;

[0044] A column, fixing one end of the column at both ends of the bellows fixing member;

[0045] Cylinder mounting plate, the other end of the column is fixed to one side of the cylinder mounting plate;

[0046] A cylinder, a cylinder body of the cylinder being fixed on the other side of the cylinder mounting plate;

[0047] The metal welded bellows is used to connect the piston rod of the cylinder and the other end of the connecting rod.

[0048] Furthermore, in the arc source for ion plating described in the present invention, a movable groove is opened on one side of the linkage structure; the roller fixed on the connecting rod is embedded in the movable groove; one side of the linkage structure is folded in a direction greater than 90°, and the middle of the linkage structure is movably connected to the opening above the clamping member through a pin.

[0049] Furthermore, in the arc source for ion plating described in the present invention, the top of the arc starting needle is 1.5 mm away from the surface of the target material.

[0050] Compared with the prior art, the embodiment of the present invention adopts the following methods: fixing the target assembly in the mounting assembly; fixing the insulating flange under the target assembly; fixing the water cooling assembly on the mounting assembly with an insulating fastening assembly under the insulating flange; fixing the magnetic field assembly with the water cooling assembly through a threaded connection structure on the water cooling assembly under the water cooling assembly; fixing the arc striking device on one side of the mounting assembly; the arc striking device strikes the arc by flipping the arc striking needle; in the present invention, the structures of the mounting assembly, the water cooling assembly, the magnetic field assembly, the arc striking device and other devices are changed, so that the service life of the arc striking needle, the oil seal and the rubber ring in the arc source of the present invention is extended, the pollution problem of the arc striking needle contacting the target surface is avoided, and the technical problem that the arc striking method also leads to a large volume of the arc source of ion plating is solved, so that the arc source of the present invention can be installed on a narrow and long ion plating machine, reducing the volume of the ion plating machine and reducing energy consumption. A series of problems caused by the arc striking method in the prior art are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 It is a schematic diagram of the front three-dimensional structure of the present invention;

[0052] Figure 2 It is a schematic diagram of the reverse three-dimensional structure of the present invention;

[0053] Figure 3 It is a schematic diagram of the full cross-section structure of the present invention;

[0054] Figure 4 It is a schematic diagram of the full cross-section structure of the installation assembly of the present invention;

[0055] Figure 5 It is a schematic diagram of the three-dimensional structure of the anode of the present invention;

[0056] Figure 6 It is a schematic diagram of the full cross-sectional structure of the target material of the present invention;

[0057] Figure 7It is a schematic diagram of the full cross-section structure of the water cooling assembly of the present invention;

[0058] Figure 8 It is a schematic diagram of the full cross-section structure of the magnetic field assembly of the present invention;

[0059] Fig. 9 It is a schematic diagram of the three-dimensional structure of the arc striking device of the present invention;

[0060] Fig.10 It is a schematic diagram of the three-dimensional structure of the present invention in a non-arcing state;

[0061] Fig.11 It is a schematic structural diagram of A of the present invention. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical scheme and advantages of the present invention clearer, the following will be described in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present invention, many technical details are provided in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed for protection in the claims of the present application can be implemented.

[0063] An embodiment of the present invention relates to an arc source for ion plating, such as Figure 1-Figure 11 As shown, including:

[0064] The mounting assembly 1 in the present invention is a mounting component used as an arc source for ion plating in this embodiment;

[0065] A target assembly 2 is fixed in the mounting assembly 1; the target assembly 2 is used as a target mounting component of an arc source for ion plating in this embodiment; it is mainly used to mount and fix the target;

[0066] An insulating flange 3 is fixed below the target assembly 2; the insulating flange 3 is used to insulate the target assembly 2 and the water cooling assembly 5;

[0067] The water cooling component 5 is fixed on the mounting component 1 by using the insulating fastening component 4 under the insulating flange 3 ; the water cooling component 5 is used to cool the magnetic field component 6 .

[0068] The magnetic field assembly 6 is fixedly connected to the water cooling assembly 5 through a threaded connection structure on the water cooling assembly 5 below the water cooling assembly 5; the magnetic field assembly 6 is used to provide the magnetic flux of the arc source used for ion plating in this embodiment.

[0069] An arc-starting device 7 is fixedly connected to one side of the mounting assembly 1; the arc-starting device 7 starts an arc by flipping the arc-starting needle 70. The arc-starting device 7 is mainly used for arc starting. In this embodiment, the structures of the mounting assembly 1, the water-cooling assembly 5, the magnetic field assembly 6, the arc-starting device 7 and other devices are changed, so that the service life of the arc-starting needle 70, the oil seal and the rubber ring in the arc source of the present invention is extended, and the contamination problem of the arc-starting needle 70 contacting the target surface is avoided, and the technical problem that the arc-starting method also leads to a large volume of the arc source for ion plating is solved, so that the arc source of the present invention can be installed on a narrow and long ion plating machine, reducing the volume of the ion plating machine, reducing energy consumption and a series of other problems. The problems caused by the arc-starting method in the prior art are solved.

[0070] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the installation component 1 also includes:

[0071] A mounting flange 15 is provided at the lower part of the mounting assembly 1 ; the mounting flange 15 is mainly used to mount the arc source for ion plating in this embodiment on the ion plating machine.

[0072] An anode seat 14 is embedded in the mounting flange 15; the anode seat 14 is used to fix the anode 11;

[0073] Insulating bolts 13 are connected by bolts on both sides of the anode seat 14; the insulating bolts 13 are mainly used to fix the anode 11 and also play an insulating role;

[0074] In the anode holder 14, the anode 11 is suspended and fixed by insulating bolts 13;

[0075] The shielding cover 12 is inserted into the outer side of the anode seat 14 and the insulating bolts 13. The shielding cover 12 prevents the insulating bolts 13 from being exposed. The structure of the above-mentioned mounting assembly 1 mainly solves the structure of installing the arc source for ion plating on the ion plating machine in this embodiment, and at the same time, the structure of installing the anode seat 14 and the anode 11 in the mounting flange 15.

[0076] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the target assembly 2 further includes:

[0077] A target material 21 is inserted into the lower part of the inner side of the anode 11 of the mounting assembly 1 ; the target material 21 is mainly used as a material for the arc source of ion plating during the plating process.

[0078] A water sealing plate 24 is placed below the target 21 ; fixing bolts are inserted into both sides of the water sealing plate 24 to fix the water sealing plate 24 above the water cooling assembly 5 ; the water sealing plate 24 mainly serves to isolate the cooling water between the target 21 and the water cooling flange 51 .

[0079] A target pressing flange 22 is fastened at a right angle to the outer side of the target material 21 ; the target pressing flange 22 is used to fix the target material 21 .

[0080] Above the target pressure flange 22, a ceramic ring 23 is clamped on the outer side of the target material 21. The ceramic ring 23 is used to isolate the anode 11.

[0081] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the anode 11 is circular, and a bevel is provided along the inner edge of the anode 11; a threaded hole is provided at a 90° dividing line around the anode 11.

[0082] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the insulating fastening assembly 4 further includes:

[0083] A through hole is opened on the same radius on the circumference of the mounting flange 15 of the mounting assembly 1, the insulating flange 3 and the water cooling flange 51 of the water cooling assembly 5; an insulating sleeve 41 is placed in the through hole; the insulating sleeve 41 is mainly used to transmit the arc source voltage between the water cooling assembly 5, the insulating flange 3 and the mounting flange 15.

[0084] The fastening bolts 42 are screwed into the insulating sleeve 41 to fix the mounting flange 15, the insulating flange 3 and the water cooling flange 51 together. The fastening bolts 42 mainly play a fixing role.

[0085] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the water cooling assembly 5 also includes:

[0086] A water cooling flange 51 is provided inside the water cooling assembly 5;

[0087] A fan-shaped flange 52 is placed in the groove inside the water-cooling flange 51; the fan-shaped flange 52 plays a role of diversion, which can improve the cooling capacity;

[0088] One end of a water outlet pipe 54 is fixedly connected to the central axis of the water cooling flange 51; the water outlet pipe 54 is used for returning cooling water;

[0089] In the water outlet pipe 54, one end of the water inlet pipe 53 is fixedly connected on the central axis of the water cooling flange 51; the water inlet pipe 53 is used for the inlet of cooling water;

[0090] The other end of the water inlet pipe 53 is threadedly connected to a water inlet connector 56 ; the water inlet connector 56 and the water outlet connector 55 are used to connect cooling water.

[0091] A water outlet connector 55 is threadedly connected to the side of the water outlet pipe 54 .

[0092] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the magnetic field assembly 6 also includes:

[0093] A magnet fixing seat 64 is fixed below the water cooling flange 51 of the water cooling assembly 5; the magnet fixing seat 64 is used to fix the permanent magnet 63.

[0094] A plurality of permanent magnets 63 are arranged on the magnet fixing seat 64;

[0095] The coil 62 is wound around a number of permanent magnets 63; the coil 62 after being energized mainly plays the role of magnetic flux

[0096] A round nut 61 is provided in the groove of the magnet fixing seat 64 ; the round nut 61 is threadedly connected to the external thread provided on the water outlet joint 55 . The round nut 61 is used to fix the magnetic field assembly 6 below the water cooling flange 51 of the water cooling assembly 5 .

[0097] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the arc striking device 7 further comprises:

[0098] An arc-striking insulating member 74 is fixed below the mounting flange 15 of the mounting assembly 1, and the cylinder on the arc-striking insulating member 74 is inserted into the mounting flange 15; the arc-striking insulating member 74 is used to insulate the arc-striking device 7 during the arc-striking process; the entire arc-striking device 7 is installed above the arc-striking insulating member 74 and connected and fixed to the mounting flange 15 to achieve fixation of the arc-striking device 7.

[0099] A connecting rod 72 is inserted into the central hole of the arc-starting insulating member 74 ; the connecting rod 72 is used to connect the linkage member structure 71 and one end of the bellows fixing member 75 . .

[0100] The lower part of the clamping member 73 is fixed on the upper part of the arc-striking insulating member 74 ; the clamping member 73 is used to connect the linkage member structure 71 .

[0101] The linkage structure 71 is movably connected to one end of the clamping member 73 and the connecting rod 72; the arc-starting needle 70 is fixed on the linkage structure 71; the linkage structure 71 mainly functions to realize the flipping of the arc-starting needle 70 under the linear motion of the cylinder 79.

[0102] Below the arc-striking insulating member 74 , one end of the connecting rod 72 is fixedly connected to one end of a bellows fixing member 75 ; the bellows fixing member 75 is used to connect the piston rod of the cylinder 79 and the connecting rod 72 .

[0103] One end of a column 76 is fixed to both ends of the bellows fixing member 75; the column 76 plays a supporting role.

[0104] The other end of the column 76 is fixed to one side of a cylinder mounting plate 78 ; the cylinder mounting plate 78 is used to mount a cylinder 79 .

[0105] Cylinder 79, a cylinder body of the cylinder 79 is fixed on the other side of the cylinder mounting plate 78;

[0106] The piston rod of the cylinder 79 is connected to the other end of the connecting rod 72 by a metal welding bellows 77. The metal welding bellows 77 mainly seals the arc-starting needle 70 during the operation.

[0107] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, a movable groove 711 is provided on one side of the linkage structure 71; a roller 721 fixed on the connecting rod 72 is embedded in the movable groove 711; one side of the linkage structure 71 is folded in a direction greater than 90 degrees, and the middle of the linkage structure 71 is movably connected to the opening 731 above the clamping member 73 through the pin 712. Thus, the action flipping of the arc-starting needle 70 is realized.

[0108] In order to achieve the above technical effects, the arc source used for ion plating in this embodiment is as follows: Figure 1-Figure 11 As shown, the top of the arc-starting needle 70 is 1.5 mm away from the surface of the target material 21. This avoids the problem of contamination caused by the arc-starting needle 70 contacting the target surface, and solves the problem of the service life of the arc-starting needle 70. In this embodiment, the arc-starting method adopts pulse high voltage and non-contact arc-starting.

[0109] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. An arc source for ion plating, characterized in that: include: Install the components (1); A target assembly (2), wherein the target assembly (2) is fixed in the mounting assembly (1); An insulating flange (3), wherein the insulating flange (3) is fixed below the target assembly (2); A water cooling component (5) is fixed to the mounting component (1) using an insulating fastening component (4) below the insulating flange (3); A magnetic field component (6) is fixedly connected to the water cooling component (5) through a threaded connection structure on the water cooling component (5) below the water cooling component (5); An arc striking device (7) is fixedly connected to one side of the mounting assembly (1); the arc striking device (7) strikes an arc by flipping an arc striking needle (70).

2. The arc source for ion plating according to claim 1, characterized in that: The installation assembly (1) further comprises: A mounting flange (15), the mounting flange (15) being arranged at the lower part of the mounting assembly (1); an anode seat (14), wherein the anode seat (14) is embedded in the mounting flange (15); Insulating bolts (13), the insulating bolts (13) being connected by bolts on both sides of the anode seat (14); An anode (11), in the anode seat (14), the anode (11) is suspended and fixed by the insulating bolt (13); A shielding cover (12) is inserted into the outer sides of the anode seat (14) and the insulating bolt (13).

3. The arc source for ion plating according to claim 1, characterized in that: The target assembly (2) further comprises: A target material (21), the target material (21) being inserted below the inner side of the anode (11) of the mounting assembly (1); A water sealing plate (24), the water sealing plate (24) is placed below the target material (21); fixing bolts are inserted into both sides of the water sealing plate (24) to fix the water sealing plate (24) above the water cooling assembly (5); A target pressing flange (22), which is buckled onto the outer side of the target material (21) at a right angle; A ceramic ring (23) is located above the target pressure flange (22) and is clamped on the outer side of the target material (21).

4. The arc source for ion plating according to claim 3, characterized in that: The anode (11) is circular, and a bevel is arranged along the inner edge of the anode (11); a threaded hole is respectively opened at a 90° dividing line around the anode (11).

5. The arc source for ion plating according to claim 1, characterized in that: The insulating fastening assembly (4) further comprises: An insulating sleeve (41) is provided with a through hole on the same radius on the circumference of the mounting flange (15) of the mounting assembly (1), the insulating flange (3) and the water cooling flange (51) of the water cooling assembly (5); and the insulating sleeve (41) is placed in the through hole; A fastening bolt (42) is screwed into the insulating sleeve (41); the mounting flange (15), the insulating flange (3) and the water cooling flange (51) are fixed together.

6. The arc source for ion plating according to claim 1, characterized in that: The water cooling assembly (5) further comprises: The water cooling flange (51) is arranged inside the water cooling component (5); A fan-shaped flange (52), the fan-shaped flange (52) being placed in the groove inside the water-cooling flange (51); A water outlet pipe (54), one end of which is fixedly connected to the central axis of the water cooling flange (51); A water inlet pipe (53), inside the water outlet pipe (54), one end of which is fixedly connected to the water inlet pipe (53) on the central axis of the water cooling flange (51); A water inlet connector (56) is threadedly connected to the other end of the water inlet pipe (53); A water outlet connector (55) is threadedly connected to the side of the water outlet pipe (54).

7. The arc source for ion plating according to claim 1, characterized in that: The magnetic field assembly (6) further comprises: A magnet fixing seat (64), the magnet fixing seat (64) being fixed below the water cooling flange (51) of the water cooling assembly (5); Permanent magnets (63), a plurality of permanent magnets (63) are arranged on the magnet fixing seat (64); A coil (62), wherein the coil (62) is wound around a plurality of permanent magnets (63); A round nut (61) is provided in the groove of the magnet fixing seat (64); the round nut (61) is threadedly connected to an external thread provided on the water outlet joint (55).

8. The arc source for ion plating according to claim 1, characterized in that: The arc striking device (7) further comprises: An arc-striking insulating member (74) is fixed below the mounting flange (15) of the mounting assembly (1), and the cylinder on the arc-striking insulating member (74) penetrates into the mounting flange (15); A connecting rod (72) is inserted into the central hole of the arc-striking insulating member (74); A clamping member (73) fixing the lower portion of the clamping member (73) on the upper portion of the arc-striking insulating member (74); A linkage member structure (71), wherein the linkage member structure (71) is movably connected to the clamping member (73) and one end of the connecting rod (72); an arc-starting needle (70) is fixed on the linkage member structure (71); A bellows fixing member (75) is located below the arc-striking insulating member (74), and one end of the connecting rod (72) is fixedly connected to one end of the bellows fixing member (75); A column (76) is fixed at one end of the column (76) at both ends of the bellows fixing member (75); A cylinder mounting plate (78), wherein the other end of the column (76) is fixed to one side of the cylinder mounting plate (78); A cylinder (79), a cylinder body of the cylinder (79) being fixed on the other side of the cylinder mounting plate (78); The metal welded bellows (77) is used to connect the piston rod of the cylinder (79) and the other end of the connecting rod (72).

9. The arc source for ion plating according to claim 8, characterized in that: A movable groove (711) is provided on one side of the linkage structure (71); a roller (721) fixed on the connecting rod (72) is embedded in the movable groove (711); one side of the linkage structure (71) is folded in a direction greater than 90 degrees, and the middle of the linkage structure (71) is movably connected to the opening (731) above the clamping member (73) through a pin shaft (712).

10. The arc source for ion plating according to claim 8, characterized in that: The top of the arc starting needle (70) is 1.5 mm away from the surface of the target material (21).

Images