Parallel decoupling precise deflection motion platform

Abstract

The parallel decoupling precise deflection motion platform comprises a base, a deflection table set, a deformable connecting piece, a deformable set and a driving assembly, the deflection table set comprises an upper deflection table and a lower deflection table which are arranged in a stacked and spaced mode, and the upper deflection table comprises a first upper deflection arm and a second upper deflection arm which are perpendicularly connected with each other; the lower deflection table comprises a first lower deflection arm and a second lower deflection arm which are perpendicularly connected with each other, the lower deflection table is fixedly connected with the base, the upper deflection table is used for bearing a to-be-loaded object, the deformable connecting piece is arranged at the geometric center of the deflection table set and is connected with the upper deflection table and the lower deflection table, and the first driving piece is used for driving the first upper swing arm to deflect. The second driving piece is used for driving the second upper swing arm to deflect. The parallel decoupling precise deflection motion platform is high in rigidity and low in control complexity, meanwhile, high motion precision is guaranteed, and the motion stroke is improved.

Description

Technical Field

[0001] The invention relates to the technical field of precision motion positioning, and in particular to a parallel decoupled precision deflection motion platform. Background Art

[0002] The two-axis yaw precision positioning motion platform is an important equipment in many high-tech fields. For example, it can be applied to optical engineering, semiconductor manufacturing, astronomical observation, biological operations, etc. It is the core actuation carrier for achieving related goals.

[0003] In the prior art, the two-axis rotary precision motion platform is mainly realized by a series solution, that is, a single-axis swing platform is orthogonally stacked with another single-axis swing platform. This solution is simple and easy to implement, but it has disadvantages such as motion error accumulation, bulky structure, poor dynamic response, and weak rigidity. The two-axis parallel yaw motion platform based on the principle of flexible mechanism cannot achieve motion decoupling, that is, multiple inputs correspond to multiple outputs. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a parallel decoupled precision yaw motion platform, which has high rigidity and low control complexity, and at the same time ensures high motion accuracy and improves motion range.

[0005] The embodiment of the present application provides a parallel decoupled precision deflection motion platform, including a base, a deflection table group, a deformable connecting member, a deformable group and a driving assembly, the deflection table group includes an upper deflection table and a lower deflection table arranged in a stacked and spaced manner, the upper deflection table includes a first upper deflection arm and a second upper deflection arm connected vertically to each other, the lower deflection table includes a first lower deflection arm and a second lower deflection arm connected vertically to each other, the lower deflection table is fixedly connected to the base, the upper deflection table is used to carry objects to be carried, the deformable connecting member is arranged at the geometric center of the deflection table group, the deformable group includes a first deformable member, a second deformable member, a third deformable member and a fourth deformable member, the first deformable member connects the first upper swing arm and the deformable connecting member, the second deformable member connects the second upper swing arm and the deformable connecting member, the third deformable member connects the first lower swing arm and the deformable connecting member, the fourth deformable member connects the second lower swing arm and the deformable connecting member, the driving assembly includes a first driving member and a second driving member, the first driving member is used to drive the first upper swing arm to deflect, and the second driving member is used to drive the second upper swing arm to deflect.

[0006] According to the parallel decoupled precision deflection and swing motion platform of the embodiment of the present application, an upper deflection and swing table and a lower deflection and swing table connected by a deformable connecting member are arranged, and a first deformable member used to connect the first upper swing arm and the deformable connecting member, a second deformable member used to connect the second upper swing arm and the deformable connecting member, a third deformable member used to connect the first lower swing arm and the deformable connecting member, and a fourth deformable member used to connect the second lower swing arm and the deformable connecting member respectively. The first upper swing arm is driven to deflect by the first driving member, and the second upper swing arm is driven to deflect by the second driving member, so that the upper deflection and swing table can rotate around the second upper swing arm as the axis, can also rotate around the first upper swing arm as the axis, and can also rotate around the first upper swing arm and the second upper swing arm as the axis at the same time, thereby realizing two-axis parallel connection and, at the same time, realizing single-input and single-output decoupled motion. The parallel decoupled precision deflection and swing motion platform has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves the motion range.

[0007] In a possible implementation of the present application, the deformable connecting member includes two relatively arranged first split members and two relatively arranged second split members, the projections of the two first split members on the base are located within the projection of the first upper swing arm on the base, and the projections of the two second split members on the base are located within the projection of the second upper swing arm on the base; the first split member connects the first deformable member and the third deformable member, and the second split member connects the second deformable member and the fourth deformable member.

[0008] In a possible implementation of the present application, the first split component includes a first split upper section and a first split lower section, the first split upper section and the first split lower section are connected by a fifth deformable component, the first deformable component connects the first upper swing arm and the first split upper section, and the third deformable component connects the first lower swing arm and the first split lower section; the second split component includes a second split upper section and a second split lower section, the second split upper section and the second split lower section are connected by a sixth deformable component, the second deformable component connects the second upper swing arm and the second split upper section, and the fourth deformable component connects the second lower swing arm and the second split lower section.

[0009] In a possible implementation of the present application, the first deformable member, the second deformable member, the third deformable member and the fourth deformable member are all sheet-shaped, and are multiple and spaced apart.

[0010] In a possible implementation of the present application, the tilting table assembly, the deformable connecting member and the deformable group are an integrally formed structure.

[0011] In a possible implementation of the present application, the drive assembly also includes a first drive mounting seat and a second drive mounting seat; the first drive mounting seat is connected to one end of the first upper swing arm, and the first drive member is installed on the first drive base. When the first drive member drives the first upper swing arm to deflect, the output end of the first drive member abuts against the base; the second drive mounting seat is connected to one end of the second upper swing arm, and the second drive member is installed on the second drive base. When the second drive member drives the second upper swing arm to deflect, the output end of the second drive member abuts against the base.

[0012] In a possible implementation of the present application, the drive assembly also includes a first elastic member and a second elastic member; the first elastic member is connected to the other end of the first upper swing arm, and when the first upper swing arm is deflected, the first elastic member has a preload force; the second elastic member is connected to the other end of the second upper swing arm, and when the second upper swing arm is deflected, the second elastic member has a preload force.

[0013] In a possible implementation of the present application, the drive assembly also includes a first elastic mounting seat and a second elastic mounting seat; the first elastic mounting seat includes a first seat and a second seat, the first seat is connected to the other end of the first upper swing arm, one end of the first elastic member is connected to the first mounting portion of the first seat, the second seat is connected to the base, the other end of the first elastic member is connected to the second mounting portion of the second seat, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; the second elastic mounting seat includes a third seat and a fourth seat, the third seat is connected to the other end of the second upper swing arm, one end of the second elastic member is connected to the third mounting portion of the third seat, the fourth seat is connected to the base, the other end of the second elastic member is connected to the fourth mounting portion of the fourth seat, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

[0014] In a possible implementation of the present application, the tilting and deflecting table assembly further includes a loading platform, and the loading platform is connected to the upper tilting and deflecting table.

[0015] In a possible implementation of the present application, the upper deflection platform and the lower deflection platform have the same structure and are arranged opposite to each other; the first upper deflection arm and the second upper deflection arm are both U-shaped. Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 is a schematic structural diagram of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention at an angle; Figure 2is a structural schematic diagram of a parallel decoupled precision yaw motion platform from another angle according to an embodiment of the present invention; Figure 3 is a stereoscopic diagram of a deformable connector of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Figure 4 is a front view of a deformable connecting member of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Figure 5 is a top view of a deformable connecting member of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Figure 6 is a schematic structural diagram of a first elastic member or a second elastic member of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Figure 7 is a schematic structural diagram of a first driving member or a second driving member of a parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Figure 8 is a structural schematic diagram of another angle of the parallel decoupled precision yaw motion platform according to an embodiment of the present invention; Fig. 9 is a top view of a deflection table assembly of a parallel decoupled precision deflection motion platform according to an embodiment of the present invention; Fig.10 It is a front view of the deflection table assembly of the parallel decoupled precision deflection motion platform according to an embodiment of the present invention.

[0017] Reference numerals: Precision yaw motion platform 100, Base 10, The tilting platform assembly 20, the upper tilting platform 21, the first upper tilting arm 211, the second upper tilting arm 212, the lower tilting platform 22, the first lower tilting arm 221, the second lower tilting arm 222, the loading platform 23, The deformable connecting member 30, the first split member 31, the first split upper section 311, the first split lower section 312, the second split member 32, the second split upper section 321, the second split lower section 322, The deformable group 40, the first deformable member 41, the second deformable member 42, the third deformable member 43, the fourth deformable member 44, the fifth deformable member 45, the sixth deformable member 46, Driving assembly 50, first driving member 51, second driving member 52, first driving base 53, second driving base 54, first elastic member 55, second elastic member 56, The first elastic mounting seat 57, the first seat 571, the second seat 572, The second elastic mounting seat 58 , the third seat 581 , and the fourth seat 582 . DETAILED DESCRIPTION

[0018] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] Please refer to the following Figure 1-Figure 10 The parallel decoupled precision yaw motion platform 100 according to an embodiment of the present application is described.

[0021] Reference Figure 1 and Figure 2A parallel decoupled precision deflection motion platform 100 provided in an embodiment of the present application includes a base 10, a deflection platform group 20, a deformable connecting member 30, a deformable group 40 and a driving assembly 50. The deflection platform group 20 includes an upper deflection platform 21 and a lower deflection platform 22 arranged in a stacked and spaced manner. The upper deflection platform 21 includes a first upper deflection arm 211 and a second upper deflection arm 212 connected vertically to each other. The lower deflection platform 22 includes a first lower deflection arm 221 and a second lower deflection arm 222 connected vertically to each other. The lower deflection platform 22 is fixedly connected to the base 10. The upper deflection platform 21 is used to carry objects to be loaded. The deformable connecting member 30 is arranged on the deflection platform group 20. Geometric center, the deformable group 40 includes a first deformable member 41, a second deformable member 42, a third deformable member 43 and a fourth deformable member 44, the first deformable member 41 connects the first upper swing arm and the deformable connecting member 30, the second deformable member 42 connects the second upper swing arm and the deformable connecting member 30, the third deformable member 43 connects the first lower swing arm and the deformable connecting member 30, the fourth deformable member 44 connects the second lower swing arm and the deformable connecting member 30, the driving assembly 50 includes a first driving member 51 and a second driving member 52, the first driving member 51 is used to drive the first upper swing arm to deflect, and the second driving member 52 is used to drive the second upper swing arm to deflect.

[0022] Specifically, refer to Figure 1 and Figure 2 The parallel decoupled precision deflection motion platform 100 in the embodiment of the present invention includes a base 10, and the base 10 is used to support the deflection table group 20, the deformable connecting member 30, the deformable group 40 and the driving component 50.

[0023] Reference Figure 1 and Figure 2The deflection table group 20 includes an upper deflection table 21 and a lower deflection table 22 which are stacked and spaced apart, that is, the upper deflection table 21 and the lower deflection table 22 are not directly connected. Exemplarily, the upper deflection table 21 and the lower deflection table 22 can be stacked and spaced apart along the thickness direction of the base 10. The upper deflection table 21 and the lower deflection table 22 can be arranged in sequence from bottom to top, or from top to bottom. The upper deflection table 21 includes a first upper deflection arm 211 and a second upper deflection arm 212 which are vertically connected to each other. Exemplarily, the first upper deflection arm 211 and the second upper deflection arm 212 can be fixedly connected by welding, threaded connection, snap connection or connecting components, or integrally formed. The lower deflection table 22 includes a first lower deflection arm 221 and a second lower deflection arm 222 which are vertically connected to each other. Exemplarily, the first lower deflection arm 221 and the second lower deflection arm 222 can be fixedly connected by welding, threaded connection, snap connection or connecting components, or integrally formed. The lower deflection platform 22 is fixedly connected to the base 10, and the lower deflection platform 22 and the base 10 can be connected by welding, threaded connection, snap connection or connecting components. The upper deflection platform 21 is used to carry objects to be loaded. For example, the upper deflection platform 21 can have a load-bearing portion, and the objects to be loaded can be carried by the load-bearing portion, or by connecting other structural parts to carry the objects to be loaded.

[0024] The deformable connecting member 30 is arranged at the geometric center of the tilting platform group 20. Specifically, the deformable connecting member 30 is perpendicular to the upper tilting platform 21 and the lower tilting platform 22. Meanwhile, the deformable connecting member 30 is located between the upper tilting platform 21 and the lower tilting platform 22. The deformable connecting member 30 is not directly connected to the upper tilting platform 21 and the lower tilting platform 22. The deformable connecting member 30 can be slightly deformed.

[0025] Reference Figure 1 and Figure 2 The deformable group 40 includes a first deformable member 41, a second deformable member 42, a third deformable member 43 and a fourth deformable member 44. The first deformable member 41 connects the first upper swing arm and the deformable connecting member 30, the second deformable member 42 connects the second upper swing arm and the deformable connecting member 30, the third deformable member 43 connects the first lower swing arm and the deformable connecting member 30, and the fourth deformable member 44 connects the second lower swing arm and the deformable connecting member 30. Since the lower deflection platform 22 is fixedly connected to the base 10, at least one of the first lower deflection arm 221 and the second lower deflection arm 222 is fixedly connected to the base 10, and the lower deflection platform 22 provides support for the deformable connecting member 30 through the third deformable member 43 and the fourth deformable member 44, and the deformable connecting member 30 provides support for the first upper deflection arm 211 and the second upper deflection arm 212 through the first deformable member 41 and the second deformable member 42.

[0026] It can be understood that the two ends of the first deformable member 41 are respectively connected to the first upper deflection arm 211 and the deformable connecting member 30, the two ends of the second deformable member 42 are respectively connected to the second upper deflection arm 212 and the deformable connecting member 30, the two ends of the third deformable member 43 are respectively connected to the first lower deflection arm 221 and the deformable connecting member 30, and the two ends of the fourth deformable member 44 are respectively connected to the second lower deflection arm 222 and the deformable connecting member 30. They can be fixedly connected, for example, by welding, threaded connection, snap connection or connection through connecting components, etc., or can be integrally formed.

[0027] The first driving member 51 is used to drive the first upper swing arm to deflect. Specifically, the first driving member 51 is used to drive the first upper swing arm to rotate with the second upper swing arm as the axis. The second driving member 52 is used to drive the second upper swing arm to deflect. Specifically, the second driving member 52 is used to drive the second upper swing arm to rotate with the first upper swing arm as the axis. In this way, the upper deflection platform 21 can rotate with the second upper swing arm as the axis, or can rotate with the first upper swing arm as the axis, or can rotate with the first upper swing arm and the second upper swing arm as the axis at the same time. When the upper deflection platform 21 rotates with the second upper swing arm as the axis, the deformable connecting member 30 deforms in its rotation direction and does not deform in other directions, thereby realizing two-axis parallel connection and decoupling at the same time. The parallel decoupling precision deflection motion platform 100 has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves the motion stroke.

[0028] Therefore, refer to Figure 1 and Figure 2 According to the parallel decoupled precision deflection motion platform 100 of the embodiment of the present application, an upper deflection platform 21 and a lower deflection platform 22 connected by a deformable connecting member 30 are provided, and a first deformable member 41 for connecting a first upper swing arm and the deformable connecting member 30, a second deformable member 42 for connecting a second upper swing arm and the deformable connecting member 30, a third deformable member 43 for connecting a first lower swing arm and the deformable connecting member 30, and a fourth deformable member 44 for connecting a second lower swing arm and the deformable connecting member 30 are provided, and the first upper swing arm is driven to deflect by the first driving member 51, and the second driving member 52 is used to drive the first upper swing arm to deflect. The movable member 52 drives the second upper swing arm to deflect, so that the upper deflection table 21 can rotate around the second upper swing arm as the axis, and can also rotate around the first upper swing arm as the axis, and can also rotate around the first upper swing arm and the second upper swing arm as the axis. When the upper deflection table 21 rotates around the second upper swing arm as the axis, the deformable connecting member 30 deforms in its rotation direction and does not deform in other directions, thereby realizing two-axis parallel connection and decoupling at the same time. The parallel decoupling precision deflection motion platform 100 has high rigidity and low control complexity. At the same time, it ensures high motion accuracy and improves the motion range.

[0029] In some embodiments, the lengths of the first deformable member 41 , the second deformable member 42 , the third deformable member 43 and the fourth deformable member 44 can be set according to actual needs, and the deflection stroke can be increased by increasing their lengths.

[0030] In some embodiments of the present application, reference Figure 3 , Figure 4 and Figure 5 The deformable connecting member 30 includes two oppositely arranged first split members 31 and two oppositely arranged second split members 32, the projections of the two first split members 31 on the base 10 are located within the projection of the first upper swing arm on the base 10, and the projections of the two second split members 32 on the base 10 are located within the projection of the second upper swing arm on the base 10; the first split member 31 connects the first deformable member 41 and the third deformable member 43, and the second split member 32 connects the second deformable member 42 and the fourth deformable member 44.

[0031] Specifically, the first split component 31 and the second split component 32 are evenly staggered along the circumferential direction perpendicular to the central axis of the upper deflection platform 21 and the lower deflection platform 22. The shapes of the first split component 31 and the second split component 32 can be the same or different. For example, the first split component 31 and the second split component 32 can be one or two of a cuboid, a cylinder and a cube. The two first split components 31 are respectively located on both sides of the second upper swing arm, and the two second split components 32 are respectively located on both sides of the first upper swing arm. The first split component 31 located on the same side of the second upper swing arm and the first upper swing arm are connected by at least one first deformable component 41, the second split component 32 located on the same side of the first upper swing arm and the second upper swing arm are connected by at least one second deformable component, the first split component 31 located on the same side of the second lower swing arm and the first lower swing arm are connected by at least one third deformable component 43, and the second split component 32 located on the same side of the first lower swing arm and the second lower swing arm are connected by at least one fourth deformable component 44.

[0032] In some embodiments of the present application, reference Figure 3 , Figure 4 and Figure 5 The first split component 31 includes a first split upper section 311 and a first split lower section 312, the first split upper section 311 and the first split lower section 312 are connected by a fifth deformable component 45, the first deformable component 41 connects the first upper swing arm and the first split upper section 311, and the third deformable component 43 connects the first lower swing arm and the first split lower section 312; the second split component 32 includes a second split upper section 321 and a second split lower section 322, the second split upper section 321 and the second split lower section 322 are connected by a sixth deformable component 46, the second deformable component 42 connects the second upper swing arm and the second split upper section 321, and the fourth deformable component 44 connects the second lower swing arm and the second split lower section 322.

[0033] Connecting the first split upper section 311 and the first split lower section 312 through the fifth deformable member 45 is conducive to the deflection of the second upper swing arm around the first upper swing arm; connecting the second split upper section 321 and the second split lower section 322 through the sixth deformable member 46 is conducive to the deflection of the first upper swing arm around the second upper swing arm.

[0034] The first deformable member 41 connects the first upper swing arm and the first split upper section 311, the third deformable member 43 connects the first lower swing arm and the first split lower section 312, the second deformable member 42 connects the second upper swing arm and the second split upper section 321, and the fourth deformable member 44 connects the second lower swing arm and the second split lower section 322, that is, the first upper swing arm is connected to the first lower swing arm through the first deformable member 41, the first split member 31 and the third deformable member 43 in sequence, and the second upper swing arm is connected to the second lower swing arm through the second deformable member 42, the second split member 32 and the fourth deformable member 44 in sequence. In this way, when the first upper swing arm and the second upper swing arm are deflected under the drive of the driving assembly 50, the number of structures that can be deformed and the deformation displacement that can be generated are increased, thereby increasing the movement stroke.

[0035] In some embodiments of the present application, reference Figure 3 , Figure 4 and Figure 5 The first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 are all sheet-shaped, and are arranged in plurality at intervals.

[0036] By setting the first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 to be sheet-shaped, deformation is facilitated. Specifically, the first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 can be metal sheets, for example, stainless steel sheets, etc. The first deformable member 41, the second deformable member 42, the third deformable member 43 and the fourth deformable member 44 are all multiple and spaced apart, thus improving the reliability of the connection between the upper deflection table 21 and the lower deflection table 22, as well as the rigidity of the entire structure. Preferably, multiple first deformable members 41, multiple second deformable members, multiple third deformable members 43 and multiple fourth deformable members 44 are evenly distributed.

[0037] In some embodiments of the present application, the deflection table group 20, the deformable connecting member 30 and the deformable group 40 are an integrated structure. Specifically, the deflection table group 20, the deformable connecting member 30 and the deformable group 40 are formed in one piece by a wire cutting process, and a threading hole structure is designed in the structure to facilitate wire cutting. The integrated structure avoids problems such as mismatch of deflection centers, installation gaps and vibrations caused by multi-structure assembly.

[0038] In some embodiments of the present application, reference Figure 7The driving assembly 50 also includes a first driving mounting seat and a second driving mounting seat; the first driving mounting seat is connected to one end of the first upper swing arm, and the first driving member 51 is installed on the first driving base 5310. When the first driving member 51 drives the first upper swing arm to deflect, the output end of the first driving member 51 abuts against the base 10; the second driving mounting seat is connected to one end of the second upper swing arm, and the second driving member 52 is installed on the second driving base 5410. When the second driving member 52 drives the second upper swing arm to deflect, the output end of the second driving member 52 abuts against the base 10.

[0039] By setting the first driving mounting seat and the second driving mounting seat, it is convenient to install the first driving member 51 and the second driving member 52 on the first upper swing arm and the second upper swing arm respectively, and the output ends of the first driving member 51 and the second driving member 52 are both abutted against the base 10, so that when the output ends of the first driving member 51 and the second driving member 52 are extended, the first upper swing arm and the second upper swing arm can be pushed to deflect.

[0040] Specifically, the first drive member 51 and the first drive mounting seat, and the first drive mounting seat and the first upper swing arm can be detachably connected, for example, by threaded connection, snap connection, or connection through a connecting member, etc., for easy installation and replacement, or can be fixedly connected, for example, by welding or integral molding, etc. The first drive mounting seat can be L-shaped. The first drive member 51 can be a linear motor.

[0041] The connection relationship between the second driving member 52 and the second driving mounting seat, and between the second driving mounting seat and the second upper swing arm is the same as above and will not be repeated here.

[0042] In some embodiments of the present application, reference Figure 6 The driving assembly 50 also includes a first elastic member 55 and a second elastic member 56; the first elastic member 55 is connected to the other end of the first upper swing arm, and when the first upper swing arm is deflected, the first elastic member 55 has a preload; the second elastic member 56 is connected to the other end of the second upper swing arm, and when the second upper swing arm is deflected, the second elastic member 56 has a preload.

[0043] Specifically, since the output end of the first driving member 51 is only in contact with the base 10 and is not connected, the first upper deflection arm 211 can only be driven to deflect, but cannot be reset. Therefore, by providing a first elastic member 55 connected to the other end of the first upper swing arm, and when the first upper swing arm deflects, the first elastic member 55 has a preload force, so that when the driving force is removed, the first elastic member 55 can drive the first upper swing arm to reset under the action of the preload force, thereby realizing the deflection of the first upper swing arm in the positive and negative directions.

[0044] It should be noted that when the first upper swing arm is deflected by the first driving member 51, the first elastic member 55 can be in an extended state or a compressed state, which is not limited here and can be set according to actual needs. The first elastic member 55 can be a spring, etc. The first driving member 51 can be a piezoelectric actuator or a piezoelectric ceramic, etc.

[0045] The functions and configurations of the second elastic member 56 and the second driving member 52 are the same as those of the first elastic member 55 and the first driving member 51 , and are not described in detail herein.

[0046] In some embodiments of the present application, reference Figure 6 The driving assembly 50 also includes a first elastic mounting seat 57 and a second elastic mounting seat 58; the first elastic mounting seat 57 includes a first seat 571 and a second seat 572, the first seat 571 is connected to the other end of the first upper swing arm, one end of the first elastic member 55 is connected to the first mounting portion of the first seat 571, the second seat 572 is connected to the base 10, the other end of the first elastic member 55 is connected to the second mounting portion of the second seat 572, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; the second elastic mounting seat 58 includes a third seat 581 and a fourth seat 582, the third seat 581 is connected to the other end of the second upper swing arm, one end of the second elastic member 56 is connected to the third mounting portion of the third seat 581, the fourth seat 582 is connected to the base 10, the other end of the second elastic member 56 is connected to the fourth mounting portion of the fourth seat 582, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

[0047] By providing the first elastic mounting seat 57, it is convenient to install the first elastic member 55 on the first upper deflection arm 211. By providing the first seat 571 and the second seat 572 respectively connecting the first upper swing arm and the base 10, and connecting the two ends of the first elastic member 55 to the first seat 571 and the second seat 572 respectively, the first elastic member 55 can be extended or contracted when the first upper swing arm is deflected.

[0048] Specifically, the first seat 571 may be L-shaped, with one end being attached to and connected to the first upper swing arm, and the other end being a first mounting portion, which is used to be limitedly assembled with one end of the first elastic member 55 to adjust the length of the first elastic member 55. The second seat 572 may be U-shaped, with an open end being a second mounting portion, and the two second mounting portions are respectively located at the upper and lower sides of the first mounting portion in the vertical direction, and the other end of the first elastic member 55 is limitedly assembled with one of the open ends of the second seat 572.

[0049] Of course, the present application is not limited thereto, and the structure of the first elastic mounting seat 57 may be other structures, as long as the first elastic member 55 can drive the first upper swing arm to deflect in the opposite direction under the action of the preload force.

[0050] The structure of the second elastic mounting seat 58 may be the same as that of the first elastic mounting seat 57 , and will not be described in detail herein.

[0051] In some embodiments of the present application, reference Figure 8 The tilting and tilting table assembly 20 also includes a loading platform 23 , and the loading platform 23 is connected to the upper tilting and tilting table 21 .

[0052] By providing the stage 23, larger objects can be carried, for example, a reflector, a crystal, a clamp, a template, etc. can be carried.

[0053] Specifically, the loading platform 23 is connected to the first upper swing arm and the second upper swing arm, so as to deflect under the drive of the first upper swing arm and the second upper swing arm. The loading platform 23 and the upper deflection platform 21 can be fixedly connected or detachably connected.

[0054] In some embodiments of the present application, reference Fig. 9 and Fig.10 The upper deflection platform 21 and the lower deflection platform 22 have the same structure and are arranged opposite to each other; the first upper deflection arm 211 and the second upper deflection arm 212 are both U-shaped.

[0055] The first upper deflection arm 211 and the second upper deflection arm 212 are both set to be U-shaped, and the upper deflection platform 21 has the same structure as the lower deflection platform 22, so that the motion platform is surrounded by a hollow structure with a compact internal structure and high structural stability, and it is convenient to install the drive mounting seat and the elastic mounting seat.

[0056] In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A parallel decoupling precision yaw motion platform, characterized in that: include: Base; A deflection table group, the deflection table group includes an upper deflection table and a lower deflection table arranged in a stacked and spaced manner, the upper deflection table includes a first upper deflection arm and a second upper deflection arm vertically connected to each other, the lower deflection table includes a first lower deflection arm and a second lower deflection arm vertically connected to each other, the lower deflection table is fixedly connected to the base, and the upper deflection table is used to carry objects to be loaded; A deformable connecting member, wherein the deformable connecting member is arranged at the geometric center of the tilting and tilting table group; a deformable group, the deformable group comprising a first deformable member, a second deformable member, a third deformable member and a fourth deformable member, the first deformable member connecting the first upper swing arm and the deformable connecting member, the second deformable member connecting the second upper swing arm and the deformable connecting member, the third deformable member connecting the first lower swing arm and the deformable connecting member, and the fourth deformable member connecting the second lower swing arm and the deformable connecting member; A driving assembly, wherein the driving assembly includes a first driving member and a second driving member, wherein the first driving member is used to drive the first upper swing arm to deflect, and the second driving member is used to drive the second upper swing arm to deflect.

2. The parallel decoupled precision yaw motion platform according to claim 1 is characterized in that: The deformable connecting member includes two first split members arranged opposite to each other and two second split members arranged opposite to each other, the projections of the two first split members on the base are located within the projection of the first upper swing arm on the base, and the projections of the two second split members on the base are located within the projection of the second upper swing arm on the base; The first split member connects the first deformable member and the third deformable member, and the second split member connects the second deformable member and the fourth deformable member.

3. The parallel decoupled precision yaw motion platform according to claim 2, characterized in that: The first split member includes a first split upper section and a first split lower section, the first split upper section and the first split lower section are connected via a fifth deformable member, the first deformable member connects the first upper swing arm and the first split upper section, and the third deformable member connects the first lower swing arm and the first split lower section; The second split component includes a second split upper section and a second split lower section, the second split upper section and the second split lower section are connected by a sixth deformable component, the second deformable component connects the second upper swing arm and the second split upper section, and the fourth deformable component connects the second lower swing arm and the second split lower section.

4. The parallel decoupled precision yaw motion platform according to claim 1, characterized in that: The first deformable member, the second deformable member, the third deformable member and the fourth deformable member are all sheet-shaped, and are multiple and spaced apart.

5. The parallel decoupled precision yaw motion platform according to claim 1, characterized in that: The deflection platform group, the deformable connecting member and the deformable group are an integrally formed structure.

6. The parallel decoupled precision yaw motion platform according to claim 1, characterized in that: The drive assembly also includes a first drive mount and a second drive mount; The first driving mounting seat is connected to one end of the first upper swing arm, the first driving member is installed on the first driving base, and when the first driving member drives the first upper swing arm to deflect, the output end of the first driving member abuts against the base; The second driving mounting seat is connected to one end of the second upper swing arm, and the second driving member is installed on the second driving base. When the second driving member drives the second upper swing arm to deflect, the output end of the second driving member abuts against the base.

7. The parallel decoupled precision yaw motion platform according to claim 6, characterized in that: The driving assembly further includes a first elastic member and a second elastic member; The first elastic member is connected to the other end of the first upper swing arm, and when the first upper swing arm is deflected, the first elastic member has a pre-tightening force; The second elastic member is connected to the other end of the second upper swing arm, and when the second upper swing arm is deflected, the second elastic member has a pre-tightening force.

8. The parallel decoupled precision yaw motion platform according to claim 6, characterized in that: The drive assembly also includes a first elastic mounting seat and a second elastic mounting seat; The first elastic mounting seat includes a first seat and a second seat, the first seat is connected to the other end of the first upper swing arm, one end of the first elastic member is connected to the first mounting portion of the first seat, the second seat is connected to the base, the other end of the first elastic member is connected to the second mounting portion of the second seat, and the first mounting portion and the second mounting portion are spaced apart in the vertical direction; The second elastic mounting seat includes a third seat and a fourth seat, the third seat is connected to the other end of the second upper swing arm, one end of the second elastic member is connected to the third mounting portion of the third seat, the fourth seat is connected to the base, the other end of the second elastic member is connected to the fourth mounting portion of the fourth seat, and the third mounting portion and the fourth mounting portion are spaced apart in the vertical direction.

9. The parallel decoupled precision yaw motion platform according to claim 1, characterized in that: The tilting and tilting platform assembly also includes a loading platform, and the loading platform is connected to the upper tilting and tilting platform.

10. The parallel decoupled precision yaw motion platform according to claim 1, characterized in that: The upper deflection platform and the lower deflection platform have the same structure and are arranged opposite to each other; The first upper deflection arm and the second upper deflection arm are both U-shaped.

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