Infrared drying equipment for photovoltaic quartz furnace tube

Abstract

The invention relates to photovoltaic quartz furnace tube infrared drying equipment, which belongs to the technical field of quartz furnace tube drying equipment, and comprises a drying furnace, a conveying device, a carrying device, an inner wall secondary cleaning and water removing device and a trolley positioning device, air knives are installed on the two sides of an inlet of a furnace body of the drying furnace, and an infrared heating pipe is arranged in the furnace body of the drying furnace. The inner wall secondary cleaning and water removal device is provided with a cleaning and blow-drying mechanism, a water tank and a conveying mechanism; a water spray nozzle and an air spray nozzle are rotationally arranged on the cleaning and blow-drying mechanism; the inner wall of the quartz furnace tube with one sealed end can be dewatered, and the problem that the inner wall is difficult to dry is solved; the cleaning and blow-drying mechanism can sweep away a large amount of residual water drops, formation of incrustation is reduced, the product quality is guaranteed, the drying efficiency is improved, the operation mode and layout of automatic production can be achieved, and meanwhile the problems that natural airing is large in occupied area and low in efficiency are solved.

Description

Technical Field

[0001] The invention relates to infrared drying equipment for a photovoltaic quartz furnace tube, belonging to the technical field of quartz furnace tube drying equipment. Background Art

[0002] Quartz furnace tube is a tubular container made of quartz material, which is widely used in semiconductor manufacturing, photovoltaic industry and electronic industry. Quartz furnace tube processing needs to be frequently cleaned. After cleaning, there will be residual water stains on the surface of the quartz furnace tube, which needs to be dried before the next process.

[0003] Flame baking can easily cause rapid evaporation of water, resulting in the precipitation of hard carbonate scale attached to the surface of the quartz furnace tube, and the presence of scale will affect product quality. Therefore, natural drying and wiping are often used for drying before important processes. However, natural drying and wiping methods have the problems of low efficiency, large floor space and high labor costs, which seriously affect production capacity and costs.

[0004] The existing Chinese utility model patent quartz boat drying equipment with publication number CN215638441U adopts hot air drying. The heating principle is that the hot air blower blows hot air into the furnace body, and heats the air in the furnace body through thermal convection, thereby drying the workpiece in the furnace. The disadvantage of this heating method is that the air in the furnace needs to be heated to a certain temperature before drying, and the heating process is very slow, especially when the space in the furnace is large, the heating process is particularly difficult; the quartz furnace tube is 4 meters long, and one end of some types of quartz furnace tubes is blocked. If hot air drying is adopted, the hot air is difficult to reach the deep inside of the tube, so the inner wall drying of the quartz furnace tube has become an industry problem. Summary of the invention

[0005] In view of the above deficiencies in the prior art, the technical problem to be solved by the present invention is: to provide an infrared drying equipment for quartz furnace tubes for photovoltaics, which can realize automated production and adopt an infrared heating drying method to clean and dewater the inner wall of the quartz furnace tube with one end blocked, thereby solving the problems of low drying efficiency and difficulty in drying the inner wall, reducing the formation of scale during drying, and improving product quality.

[0006] The photovoltaic quartz furnace tube infrared drying equipment of the present invention comprises a drying furnace, a conveying device, a handling device, an inner wall secondary cleaning and water removal device, and a trolley positioning device;

[0007] The conveying device is located at the front side of the furnace door of the drying furnace, and an inner wall secondary cleaning and water removal device and a trolley positioning device are sequentially arranged on one side of the conveying device, and the handling device spans over the conveying device, the inner wall secondary cleaning and water removal device, and the trolley positioning device; the trolley positioning device is used to position the quartz furnace tube transport trolley, the handling device is used to move the quartz furnace tube between various stations, the inner wall secondary cleaning and water removal device is used to clean and remove water from the inside of the quartz furnace tube, and the conveying device is used to move the quartz furnace tube into or out of the drying furnace; wind knives are installed on both sides of the furnace inlet of the drying furnace, and the air outlets of the wind knives on both sides are arranged relatively, and high-speed airflow can be sprayed to dry most of the residual water stains on the outer wall of the quartz furnace tube; a plurality of infrared heating tubes are arranged inside the furnace body of the drying furnace to heat the quartz furnace tube;

[0008] The inner wall secondary cleaning and water removal device is provided with a cleaning and drying mechanism, a water tank and a conveying mechanism. The water tank is arranged at the front end of the cleaning and drying mechanism. The conveying mechanism surrounds the cleaning and drying mechanism. The conveying mechanism can drive the cleaning and drying mechanism to move forward and backward. The conveying mechanism includes but is not limited to linear motion mechanisms such as friction wheel transmission, gear rack transmission, and chain transmission; the cleaning and drying mechanism is used for secondary cleaning and high-pressure air water removal of the inner wall of the quartz furnace tube; a water spray nozzle and an air jet nozzle are rotatably arranged on the cleaning and drying mechanism, and water is sprayed by the water spray nozzle to clean the inner wall of the quartz furnace tube, and then high-pressure air is sprayed by the air jet nozzle to remove water.

[0009] Preferably, the drying furnace comprises a furnace body, an infrared heating tube, a dehumidifying fan, a furnace body internal track, an external sweeping fan, an air knife and a filter;

[0010] The furnace body is installed on the frame, and the furnace body includes a heat insulation layer and a furnace door. When the furnace door is closed, a closed furnace cavity can be formed. A dehumidification fan is installed on the top of the outer side of the furnace body, a filter is provided at the bottom of the outer side of the furnace body, and the inner track of the furnace body is arranged at the lower part of the inner side of the furnace body; the external sweeping air fan is fixed on the frame, and the external sweeping air fan is connected to the wind knife through a pipeline; when operating, the dehumidification fan is turned on, a negative pressure is formed in the furnace cavity, and the air enters the furnace cavity through the filter, and an airflow from bottom to top is formed in the furnace, thereby discharging the water vapor generated in the drying process out of the furnace body.

[0011] Preferably, the inner wall secondary cleaning and water removal device comprises a water tank, a water tank support frame, a lifting bracket, a cleaning and drying mechanism and a conveying mechanism;

[0012] The water tank is fixed on the water tank support frame, and two sets of lifting brackets are installed on the water tank support frame. The head ends of the lifting brackets pass through the bottom surface of the water tank. The two sets of lifting brackets are driven by two sets of linear motion mechanisms respectively and can be lifted and lowered independently. The lifting brackets are used to support the quartz furnace tube; during the cleaning and dewatering process, the inclination angle of the quartz furnace tube can be adjusted through the cooperation of the two sets of lifting brackets, thereby facilitating drainage.

[0013] Furthermore, the cleaning and drying mechanism includes an extension rod and a shaft, which are fixedly connected to the shaft; a rotating body A and a rotating body B are sleeved on the shaft, and the rotating body A and the rotating body B are both rotatably connected to the shaft and are sealed by rotating seals respectively; a plurality of air jets are evenly distributed on the circumference of the rotating body A, and a plurality of water spray nozzles are evenly distributed on the circumference of the rotating body B, the air jets rotate with the rotating body A, and the water spray nozzles rotate with the rotating body B, and the angles of the air jets and the water spray nozzles can be freely adjusted.

[0014] Furthermore, an air pipe and a water pipe are provided on the extension rod, and an air inlet and a water inlet are provided at the rear of the shaft, the air pipe is connected to the air inlet through a pipe, and the water pipe is connected to the water inlet through a pipe; an air channel and a water channel are provided inside the shaft, the air channel connects the air inlet and the rotating body A, and the water channel connects the water inlet and the rotating body B; when cleaning the inner wall of the quartz furnace tube, water enters from the water pipe, passes through the water inlet, the water channel and the rotating body B in sequence, and is finally sprayed out from the water nozzle; when drying the inner wall of the quartz furnace tube, high-pressure gas enters from the air pipe, passes through the air inlet, the air channel and the rotating body A in sequence, and is finally sprayed out from the air nozzle; by adjusting the angle of the water nozzle or the air nozzle, the direction of the water flow or air flow can be changed, so that the sprayed water or air flow generates a tangential reaction force, which drives the rotating body to rotate, thereby evenly cleaning or drying the inner wall of the tube.

[0015] Furthermore, a probe is movably arranged at the center of the shaft, an elastomer is provided at the rear of the probe, and the front end of the shaft is extended out under the action of the elastomer, a detection switch is fixed in the extension rod, the detection switch is located near the tail of the probe, and the power cord of the detection switch is led out through the wire tube on the extension rod; when the front end of the probe touches the bottom of the quartz furnace tube, the probe is pressed in, thereby triggering the detection switch at the tail of the probe, and the cleaning and drying mechanism stops moving forward, thereby preventing the mechanism from hitting the workpiece due to excessive movement.

[0016] Preferably, the conveying device includes a trolley, a power unit, a conveying track and a base; the conveying track is fixed on the base, the trolley is slidably set on the conveying track, the conveying track is docked with the track inside the furnace body, and the power unit can drive the trolley to slide on the conveying track and the track inside the furnace body; the power unit drives the trolley to operate by chain drive, belt drive, wire rope drive or ball screw drive.

[0017] Preferably, the transport device includes a gantry, a slide, upper and lower arms and clamps; a guide rail is provided on the crossbeam of the gantry, the slide is driven by a motor and is slidably arranged on the crossbeam guide rail, the upper and lower arms are slidably connected to the slide, and can move up and down in the vertical direction relative to the slide; the clamps are arranged at the bottom ends of the upper and lower arms, and the opening and closing of the clamping and releasing of the quartz furnace tube is controlled by an opening and closing motor.

[0018] Preferably, the trolley positioning device includes a symmetrically arranged guide frame and a telescopic positioning element, the telescopic positioning element is fixed on the guide frame, and the guide frame is used to roughly position the quartz furnace tube transport trolley; the telescopic positioning element includes a cylinder and a V-shaped block, and the V-shaped block is fixed to the head end of the cylinder rod; when the cylinder rod is extended, the V-shaped block can clamp the quartz furnace tube transport trolley, thereby accurately positioning it.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The present invention adopts an innovative structure for secondary cleaning and water removal of the inner wall of the quartz furnace tube, which can perform the front-end water removal operation on the inner wall of the quartz furnace tube with one end blocked, thus solving the problem of difficulty in drying the inner wall;

[0021] 2. The present invention adopts a drying method that combines internal and external air sweeping with infrared heating and drying. The cleaning and drying mechanism can sweep away a large amount of residual water droplets, reduce the formation of scale during heating and drying, ensure product quality, and improve drying efficiency;

[0022] 3. The present invention is provided with a gantry-claw type automatic handling device, which can realize the operation mode and layout of automated production;

[0023] 4. The present invention also solves the problem of large floor space occupation and low efficiency of natural drying after flame baking. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the structure of the present invention;

[0025] Figure 2 is a top view of the present invention;

[0026] Figure 3 This is the front view of the drying oven;

[0027] Figure 4 yes Figure 3 AA section view;

[0028] Figure 5 It is a structural schematic diagram of the inner wall secondary cleaning and water removal device;

[0029] Figure 6 It is a cross-sectional view of the main view of the inner wall secondary cleaning and water removal device;

[0030] Figure 7 It is a structural schematic diagram of the cleaning and drying mechanism;

[0031] Figure 8 It is a schematic diagram of the structure of the conveying device;

[0032] Fig. 9 It is a schematic diagram of the structure of the handling device;

[0033] Fig.10 It is a structural schematic diagram of the trolley positioning device;

[0034] Fig.11 It is a schematic diagram of the self-rotation principle of the cleaning and drying mechanism.

[0035] In the figure: 1. drying furnace; 11. furnace body; 111. heat insulation layer; 112. furnace door; 12. furnace internal track; 13. external sweeping fan; 14. wind knife; 15. infrared heating tube; 16. filter; 17. frame; 18. dehumidifying fan; 2. inner wall secondary cleaning and water removal device; 21. cleaning and drying mechanism; 211. water spray nozzle; 212. rotating body B; 213. airway; 214. rotating body A; 215. air inlet; 216. detection switch; 217. air pipe; 218. wire pipe; 219. extension rod; 2110. water pipe ; 2111, water inlet; 2112, shaft; 2113, air nozzle; 2114, waterway; 2115, probe; 22, water tank; 23, lifting bracket; 24, water tank support frame; 25, conveying mechanism; 3, trolley positioning device; 31, telescopic positioning element; 32, quartz furnace tube transport trolley; 33, guide frame; 4, handling device; 41, slide; 42, upper and lower arms; 43, gantry; 44, claws; 5, conveying device; 51, gantry car; 52, power unit; 53, base; 54, conveying track; 6, quartz furnace tube. DETAILED DESCRIPTION

[0036] The present invention is further described below in conjunction with specific embodiments.

[0037] like Figures 1 to 11 As shown, this embodiment is implemented by the following technical scheme: comprising a drying furnace 1, a conveying device 5, a handling device 4, an inner wall secondary cleaning and water removal device 2, and a trolley positioning device 3;

[0038] The conveying device 5 is located in front of the furnace door 112 of the drying furnace 1, and the inner wall secondary cleaning and water removal device 2 and the trolley positioning device 3 are arranged on one side of the conveying device 5 in sequence, and the handling device 4 spans over the conveying device 5, the inner wall secondary cleaning and water removal device 2, and the trolley positioning device 3; the trolley positioning device 3 is used to position the quartz furnace tube transport trolley 32, and the handling device 4 is used to move the quartz furnace tube between various stations, the inner wall secondary cleaning and water removal device 2 is used to clean and remove water from the inside of the quartz furnace tube, and the conveying device 5 is used to move the quartz furnace tube into or out of the drying furnace 1; wind knives 14 are installed on both sides of the inlet of the furnace body 11 of the drying furnace, and the air outlets of the wind knives 14 on both sides are arranged relatively, and high-speed airflow can be sprayed to dry most of the residual water stains on the outer wall of the quartz furnace tube; a plurality of infrared heating tubes 15 are arranged inside the furnace body 11 of the drying furnace to heat the quartz furnace tube;

[0039] The inner wall secondary cleaning and dewatering device 2 is provided with a cleaning and drying mechanism 21, a water tank 22 and a conveying mechanism 25. The water tank 22 is arranged at the front end of the cleaning and drying mechanism 21, and the conveying mechanism 25 surrounds the cleaning and drying mechanism 21. The conveying mechanism 25 is a friction wheel transmission mechanism, which is slidably connected with the cleaning and drying mechanism 21, and the conveying mechanism 25 can drive the cleaning and drying mechanism 21 to move forward and backward; the cleaning and drying mechanism 21 is used for secondary cleaning and high-pressure air dewatering of the inner wall of the quartz furnace tube; a water spray nozzle 211 and an air jet nozzle 2113 are rotatably arranged on the cleaning and drying mechanism 21, and the inner wall of the quartz furnace tube is cleaned by spraying water through the water spray nozzle 211, and then high-pressure air is sprayed through the air jet nozzle 2113 to remove water.

[0040] The drying furnace 1 comprises a furnace body 11, an infrared heating tube 15, a dehumidifying fan 18, a furnace inner track 12, an external sweeping air fan 13, an air knife 14 and a filter 16; the furnace body 11 is mounted on a frame 17, the furnace body 11 comprises a heat insulating layer 111 and a furnace door 112, a closed furnace cavity can be formed when the furnace door 112 is closed, a dehumidifying fan 18 is mounted on the outer top of the furnace body 11, a filter 16 is arranged on the outer bottom of the furnace body 11, and the furnace inner track 12 is arranged on the inner lower part of the furnace body 11; the external sweeping air fan 13 is fixed on the frame 17, and the external sweeping air fan 13 is connected to the air knife 14 through a pipeline; during operation, the dehumidifying fan 18 is turned on, a negative pressure is formed in the furnace cavity, air enters the furnace cavity through the filter 16, and an airflow from bottom to top is formed in the furnace, thereby discharging the water vapor generated in the drying process from the furnace body 11.

[0041] The inner wall secondary cleaning and water removal device 2 includes a water tank 22, a water tank support frame 24, a lifting bracket 23, a cleaning and drying mechanism 21 and a conveying mechanism 25; the water tank 22 is fixed on the water tank support frame 24, and two groups of lifting brackets 23 are installed on the water tank support frame 24. The head end of the lifting bracket 23 passes through the bottom surface of the water tank 22. The two groups of lifting brackets 23 are driven by two sets of linear motion mechanisms respectively and can be lifted and lowered independently. The lifting brackets 23 are used to support the quartz furnace tube; during the cleaning and water removal process, the inclination angle of the quartz furnace tube can be adjusted through the cooperation of the two groups of lifting brackets 23, so as to facilitate drainage.

[0042] The cleaning and drying mechanism 21 includes an extension rod 219 and a shaft 2112, and the extension rod 219 and the shaft 2112 are fixedly connected; a rotating body A214 and a rotating body B212 are sleeved on the shaft 2112, and the rotating body A214 and the rotating body B212 are both rotatably connected to the shaft 2112 and are sealed by rotating seals respectively; a plurality of air jets 2113 are evenly distributed on the circumference of the rotating body A214, and a plurality of water spray nozzles 211 are evenly distributed on the circumference of the rotating body B212, the air jets 2113 rotate with the rotating body A214, and the water spray nozzles 211 rotate with the rotating body B212, and the angles of the air jets 2113 and the water spray nozzles 211 can be freely adjusted.

[0043] The extension rod 219 is provided with an air pipe 217 and a water pipe 2110, and the rear part of the shaft 2112 is provided with an air inlet 215 and a water inlet 2111, the air pipe 217 is connected to the air inlet 215 through a pipeline, and the water pipe 2110 is connected to the water inlet 2111 through a pipeline; the interior of the shaft 2112 is provided with an air channel 213 and a water channel 2114, the air channel 213 connects the air inlet 215 and the rotating body A214, and the water channel 2114 connects the water inlet 2111 and the rotating body B212; when cleaning the inner wall of the quartz furnace tube, water enters from the water pipe 2110 , passes through the water inlet 2111, the water channel 2114 and the rotating body B212 in sequence, and is finally ejected from the water nozzle 211; when the inner wall of the quartz furnace tube is blown dry, the high-pressure gas enters from the air pipe 217, passes through the air inlet 215, the air channel 213 and the rotating body A214 in sequence, and is finally ejected from the air nozzle 2113; by adjusting the angle of the water nozzle 211 or the air nozzle 2113, the direction of the water flow or air flow can be changed, so that the ejected water or air flow produces a tangential reaction force, which drives the rotating body to rotate, thereby evenly cleaning or drying the inner wall of the tube.

[0044] A probe 2115 is movably arranged at the center of the shaft 2112, an elastic body is arranged at the rear of the probe 2115, and the front end of the shaft 2112 is extended out under the action of the elastic body, a detection switch 216 is fixed in the extension rod 219, the detection switch 216 is located near the tail of the probe 2115, and the power line of the detection switch 216 is led out through the wire tube 218 on the extension rod; when the front end of the probe 2115 hits the bottom of the quartz furnace tube, the probe 2115 is pressed in, thereby triggering the detection switch 216 at the tail of the probe, and the cleaning and drying mechanism 21 stops moving forward, so as to prevent the mechanism from hitting the workpiece due to excessive movement.

[0045] The conveying device 5 includes a trolley 51, a power device 52, a conveying rail 54 and a base 53; the conveying rail 54 is fixed on the base 53, the trolley 51 is slidably set on the conveying rail 54, the conveying rail 54 is docked with the furnace body inner rail 12, and the power device 52 can drive the trolley 51 to slide on the conveying rail 54 and the furnace body inner rail 12; the power device 52 adopts a belt drive method to drive the trolley 51 to operate.

[0046] The handling device 4 includes a gantry 43, a slide 41, upper and lower arms 42 and a clamp 44; a guide rail is provided on the crossbeam of the gantry 43, the slide 41 is driven by a motor and is slidably arranged on the crossbeam guide rail, the upper and lower arms 42 are slidably connected to the slide 41, and can move up and down in the vertical direction relative to the slide 41; the clamp 44 is arranged at the bottom end of the upper and lower arms 42, and the opening and closing of the clamp and release of the quartz furnace tube are controlled by an opening and closing motor.

[0047] The trolley positioning device 3 includes a symmetrically arranged guide frame 33 and a telescopic positioning element 31. The telescopic positioning element 31 is fixed on the guide frame 33, and the guide frame 33 is used to roughly position the quartz furnace tube transport trolley 32; the telescopic positioning element 31 includes a cylinder and a V-shaped block, and the V-shaped block is fixed to the head end of the cylinder rod; when the cylinder rod is extended, the V-shaped block can clamp the quartz furnace tube transport trolley 32, thereby accurately positioning it.

[0048] The working process of the present invention is:

[0049] 1. The worker pushes the quartz furnace tube transport trolley 32 equipped with the quartz furnace tube 6 between the guide frames 33 of the trolley positioning device 3, and the telescopic positioning element 31 moves to clamp the quartz furnace tube transport trolley 32 through the V-shaped block to accurately position it;

[0050] 2. The transport device 4 is activated, and the quartz furnace tube 6 is clamped by the clamping claw 44, and is transported to the water tank 22. The two sets of lifting brackets 23 are activated to adjust the quartz furnace tube 6 to a suitable tilt angle, so as to facilitate drainage in the later stage;

[0051] 3. The conveying mechanism 25 is activated to drive the cleaning and drying mechanism 21 to move back and forth in the quartz furnace tube 6. At the same time, the water spray nozzle 211 rotates inside the quartz furnace tube 6 to spray water to evenly clean the inner wall of the tube. After the cleaning is completed, the air nozzle 2113 rotates inside the quartz furnace tube 6 to spray high-pressure gas to dry most of the water remaining on the inner wall of the tube.

[0052] 4. After the spraying is completed, the transport device 4 transports the quartz furnace tube 6 to the trolley 51 of the conveying device 5, and the power device 52 drives the trolley 51 to move, and transfers the trolley 51 together with the quartz furnace tube 6 into the drying furnace 1; during the process of entering the drying furnace 1, the wind knives 14 on both sides of the inlet of the furnace body 11 spray high-speed airflow to dry most of the residual water stains on the outer wall of the quartz furnace tube 6;

[0053] 5. After the quartz furnace tube 6 enters the drying furnace 1, the furnace door 112 is closed, the infrared heating tube 15 is turned on for heating, and the dehumidifying fan 18 is turned on at the same time, a negative pressure is formed in the furnace cavity, and air enters the furnace cavity through the filter 16, and an airflow from bottom to top is formed in the furnace, thereby discharging the water vapor generated during the drying process out of the furnace body 11;

[0054] 6. After the heating is completed, the furnace door 112 is opened, the trolley 51 and the quartz furnace tube 6 are moved out of the drying furnace 1 , and the transport device 4 transports the quartz furnace tube 6 to the quartz furnace tube transport trolley 32 .

Claims

1. A photovoltaic quartz furnace tube infrared drying equipment, characterized in that: It comprises a drying furnace (1), a conveying device (5), a handling device (4), an inner wall secondary cleaning and water removal device (2), and a trolley positioning device (3); The conveying device (5) is located at the front side of the furnace door of the drying furnace (1); the inner wall secondary cleaning and water removal device (2) and the trolley positioning device (3) are arranged in sequence on one side of the conveying device (5); the handling device (4) spans over the conveying device (5), the inner wall secondary cleaning and water removal device (2) and the trolley positioning device (3); wind knives (14) are installed on both sides of the inlet of the furnace body (11) of the drying furnace, and the air outlets of the wind knives (14) on both sides are arranged oppositely; a plurality of infrared heating tubes (15) for heating are arranged inside the furnace body (11) of the drying furnace; The inner wall secondary cleaning and water removal device (2) is provided with a cleaning and drying mechanism (21), a water tank (22) and a conveying mechanism (25) for cleaning and water removal, wherein the water tank (22) is arranged at the front end of the cleaning and drying mechanism (21), the conveying mechanism (25) surrounds the cleaning and drying mechanism (21), and the conveying mechanism (25) includes but is not limited to linear motion mechanisms such as friction wheel transmission, gear rack transmission, and chain transmission; a cleaning and drying mechanism; and a water spray nozzle (211) and an air spray nozzle (2113) are rotatably arranged on the cleaning and drying mechanism (21).

2. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The drying furnace (1) comprises a furnace body (11), an infrared heating tube (15), a dehumidifying fan (18), a furnace body track (12), an external sweeping fan (13), an air knife (14) and a filter (16); The furnace body (11) is mounted on a frame (17). The furnace body (11) comprises a heat insulating layer (111) and a furnace door (112). When the furnace door (112) is closed, a closed furnace chamber can be formed. A dehumidifying fan (18) is mounted on the top of the outer side of the furnace body (11). A filter (16) is disposed on the bottom of the outer side of the furnace body (11). The furnace body inner track (12) is disposed at the lower inner side of the furnace body (11). An external sweeping fan (13) is fixed on the frame (17). The external sweeping fan (13) is connected to a wind knife (14) through a pipeline.

3. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The inner wall secondary cleaning and water removal device (2) comprises a water tank (22), a water tank support frame (24), a lifting support (23), a cleaning and drying mechanism (21) and a conveying mechanism (25); The water tank (22) is fixed on a water tank support frame (24), and two groups of lifting brackets (23) are installed on the water tank support frame (24). The head ends of the lifting brackets (23) penetrate the bottom surface of the water tank (22), and the two groups of lifting brackets (23) are driven by two sets of linear motion mechanisms respectively.

4. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The cleaning and drying mechanism (21) comprises an extension rod (219) and a shaft (2112), wherein the extension rod (219) and the shaft (2112) are fixedly connected; a rotating body A (214) and a rotating body B (212) are sleeved on the shaft (2112), wherein the rotating body A (214) and the rotating body B (212) are both rotatably connected to the shaft (2112) and are sealed respectively by means of a rotating seal; a plurality of air jets (2113) are evenly distributed on the circumference of the rotating body A (214), and a plurality of water spray nozzles (211) are evenly distributed on the circumference of the rotating body B (212); the air jets (2113) rotate together with the rotating body A (214), and the water spray nozzles (211) rotate together with the rotating body B (212), and the angles of the air jets (2113) and the water spray nozzles (211) can be freely adjusted.

5. The photovoltaic quartz furnace tube infrared drying equipment according to claim 4, characterized in that: The extension rod (219) is provided with an air pipe (217) and a water pipe (2110); the rear portion of the shaft (2112) is provided with an air inlet (215) and a water inlet (2111); the air pipe (217) is connected to the air inlet (215) through a pipeline, and the water pipe (2110) is connected to the water inlet (2111) through a pipeline; an air channel (213) and a water channel (2114) are provided inside the shaft (2112); the air channel (213) is connected to the air inlet (215) and the rotating body A (214), and the water channel (2114) is connected to the water inlet (2111) and the rotating body B (212).

6. The photovoltaic quartz furnace tube infrared drying equipment according to claim 5, characterized in that: A probe (2115) is movably arranged at the center of the shaft (2112), an elastic body is arranged at the rear of the probe (2115), and the probe (2115) extends out of the front end of the shaft (2112) under the action of the elastic body, a detection switch (216) is fixed in the extension rod (219), the detection switch (216) is located near the tail of the probe (2115), and a power line of the detection switch (216) is led out through a wire tube (218) on the extension rod.

7. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The conveying device (5) comprises a trolley (51), a power device (52), a conveying track (54) and a base (53); the conveying track (54) is fixed on the base (53), the trolley (51) is slidably arranged on the conveying track (54), and the conveying track (54) is docked with the track (12) in the furnace body; the power device (52) drives the trolley (51) to operate by chain drive, belt drive, wire rope drive or ball screw drive.

8. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The handling device (4) comprises a gantry (43), a slide (41), upper and lower arms (42) and a clamp (44); a guide rail is arranged on the crossbeam of the gantry (43); the slide (41) is driven by a motor and is slidably arranged on the crossbeam guide rail; the upper and lower arms (42) are slidably connected to the slide (41) and can move up and down in the vertical direction relative to the slide (41); the clamp (44) is arranged at the bottom end of the upper and lower arms (42) and is opened and closed by an opening and closing motor.

9. The photovoltaic quartz furnace tube infrared drying equipment according to claim 1, characterized in that: The trolley positioning device (3) comprises a symmetrically arranged guide frame (33) and a telescopic positioning element (31), wherein the telescopic positioning element (31) is fixed on the guide frame (33); the telescopic positioning element (31) comprises a cylinder and a V-shaped block, wherein the V-shaped block is fixed to the head end of the cylinder rod.

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