Symmetrical four-mass gyroscope

Abstract

The invention provides a symmetrical four-mass gyroscope which comprises a base, a plurality of coupling mechanisms, a plurality of reverse connecting rod mechanisms and four substructures with the same structure, the four substructures are symmetrically arranged in pairs, and every two adjacent substructures are connected through the corresponding coupling mechanism and the corresponding reverse connecting rod mechanism; each substructure comprises a sensitive mass block and a plurality of capacitor assemblies, the plurality of capacitor assemblies are symmetrically distributed in the driving direction and the detection direction of the sensitive mass block, and the plurality of capacitor assemblies are connected with the sensitive mass block through an internal decoupling mechanism. According to the invention, two adjacent substructures are connected by adopting a coupling mechanism and a reverse link mechanism, so that a driving interference mode is far away from a working mode, and the environmental adaptability of the gyroscope is improved; and meanwhile, the detection work is in a reverse mode, the interference of the detection of a same-direction mode is avoided, a common-mode error signal is also eliminated by a differential working mode, and the performance of the gyroscope is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of inertial sensors, and in particular relates to a symmetrical four-mass gyroscope. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and three-axis combinations. Accelerometers are used to detect the acceleration signals of objects in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of objects in three-dimensional space, they can accurately characterize the posture of the object and have very important application value in navigation.

[0003] In the existing four-mass gyroscope structure, the coupling method between different mass blocks is generally elastic beam connection, so that the movement between the mass blocks is linked. However, this coupling method between different mass blocks makes the same-direction interference mode appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the invention

[0004] The purpose of the present invention is to provide a symmetrical four-mass gyroscope, which can at least solve some of the defects existing in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solution:

[0006] A symmetrical four-mass gyroscope comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein the four substructures are arranged symmetrically in pairs, and two adjacent substructures are connected by coupling mechanisms and reverse link mechanisms;

[0007] The substructure includes a sensitive mass block and a plurality of capacitor components, wherein the plurality of capacitor components are symmetrically distributed in a driving direction and a detection direction of the sensitive mass block, and the plurality of capacitor components are connected to the sensitive mass block via an internal decoupling mechanism.

[0008] Furthermore, the sides of the plurality of capacitor components away from the sensitive mass block are anchored to the substrate via a first vibrating elastic member, and the sides of the plurality of capacitor components close to the sensitive mass block are anchored to the substrate via a second vibrating elastic member.

[0009] Furthermore, the first vibrating elastic members adjacent to each other on the same side are anchored at the same anchor point, and the second vibrating elastic members adjacent to each other on the same side are anchored at the same anchor point.

[0010] Furthermore, the internal decoupling mechanism includes a vibration decoupling straight beam and a connecting beam, the vibration decoupling straight beam is located between the sensitive mass block and the capacitor assembly, and both ends of the vibration decoupling straight beam are connected to the capacitor assembly, one end of the connecting beam is connected to the vibration decoupling straight beam, and the other end is connected to another connecting beam arranged oppositely, and both sides of the connecting beam are connected to the sensitive mass block.

[0011] Furthermore, the capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth arranged in the frame; the movable comb teeth and the fixed comb teeth correspond one to one, the fixed comb teeth are anchored on the base, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block through an internal decoupling mechanism.

[0012] Furthermore, the sensitive mass block is a regular quadrilateral structure, and grooves for accommodating the internal decoupling mechanism are symmetrically provided on its four sides.

[0013] Furthermore, the coupling mechanism includes a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

[0014] Furthermore, one end of the coupling oblique beam away from the coupling straight beam is connected to the capacitor component through a quadrant block.

[0015] Furthermore, both ends of the reverse linkage mechanism are connected to the corresponding substructures through linkage connecting springs.

[0016] Furthermore, when the above-mentioned symmetrical four-mass gyroscope vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite; when the above-mentioned symmetrical four-mass gyroscope vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] (1) The symmetrical four-mass gyroscope provided by the present invention adopts a design in which two adjacent substructures are connected by a coupling mechanism and a reverse connecting rod mechanism, so that in the driving direction, the driving interference mode is far away from the working mode, thereby improving the environmental adaptability of the gyroscope; at the same time, in the detection direction, the detection works in the reverse mode, avoiding the interference of the detection mode in the same direction, and at the same time, the differential working mode also eliminates the common-mode error signal, thereby improving the performance of the gyroscope.

[0019] (2) When the symmetrical four-mass gyroscope provided by the present invention vibrates in the driving direction, the vibration isolation between the sensitive mass block and the detection capacitor is achieved by the vibration of the internal decoupling mechanism in the detection direction. When the symmetrical four-mass gyroscope vibrates in the detection direction, the vibration isolation between the sensitive mass and the driving capacitor is achieved by the vibration of the internal decoupling mechanism in the driving direction, thereby improving the detection accuracy of the symmetrical four-mass gyroscope.

[0020] (3) The symmetrical four-mass gyroscope provided by the present invention adopts a regular quadrilateral structure, has a higher modal matching degree, can improve the signal-to-noise ratio of the gyroscope structure, and further improve the performance of the gyroscope.

[0021] (4) The symmetrical four-mass gyroscope provided by the present invention adopts a plurality of comb teeth to double the differential capacitance formed during its vibration, thereby increasing the capacitance detection signal and improving the capacitance signal detection sensitivity.

[0022] The present invention will be further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of the symmetrical four-mass gyroscope of the present invention;

[0024] Figure 2 is a schematic diagram of a single substructure in a symmetrical four-mass gyroscope of the present invention;

[0025] Figure 3 It is a schematic diagram of the vibration of the sensitive mass block of the symmetrical four-mass gyroscope of the present invention along the driving direction;

[0026] Figure 4 It is a schematic diagram of the vibration of the sensitive mass block of the symmetrical four-mass gyroscope of the present invention along the detection direction.

[0027] Explanation of the accompanying drawings: 1. substructure; 2. detection reverse connecting rod mechanism; 3. drive coupling mechanism; 4. detection coupling mechanism; 5. drive reverse connecting rod mechanism; 6. sensitive mass block; 7. drive frame; 8. drive connecting rod connecting spring; 9. first movable comb tooth; 10. first fixed comb tooth; 11. drive internal decoupling mechanism; 12. first drive vibration elastic member; 13. second drive vibration elastic member; 14. first detection vibration elastic member; 15. detection frame; 16. second movable comb tooth; 17. second fixed comb tooth; 18. detection connecting rod connecting spring; 19. detection internal decoupling mechanism; 20. second detection vibration elastic member; 21. drive coupling oblique beam; 22. drive coupling straight beam; 23. detection coupling oblique beam; 24. detection coupling straight beam; 25. quadrant block. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, this embodiment provides a symmetrical four-mass gyroscope, including a substrate, a plurality of coupling mechanisms, a plurality of reverse linkage mechanisms, and four substructures 1 with the same structure, wherein the four substructures are symmetrically arranged in pairs, and two adjacent substructures 1 are connected by coupling mechanisms and reverse linkage mechanisms; for a single substructure 1, the substructure 1 includes a sensitive mass block 6 and a plurality of capacitor components, wherein the plurality of capacitor components are symmetrically distributed in the driving direction and the detection direction of the sensitive mass block 6, and the plurality of capacitor components are connected to the sensitive mass block 6 by an internal decoupling mechanism. For the convenience of description and understanding, in this embodiment, the capacitor components at both ends of the sensitive mass block 6 along the driving direction are recorded as driving components, and the capacitor components at both ends of the sensitive mass block 6 along the detection direction are recorded as detection components.

[0033] When the sensitive mass block 6 moves in the driving direction, the two driving components on both sides of the sensitive mass block 6 are driven to move synchronously, so that when the sensitive mass block 6 moves in the driving direction, a differential driving capacitor can be formed; when the sensitive mass block 6 moves in the detection direction, the two detection components on both sides of the sensitive mass block 6 are driven to move synchronously, so that when the sensitive mass block 6 moves in the detection direction, a differential detection capacitor can be formed; at the same time, the detection component and the driving component are connected to the sensitive mass block 6 through an internal decoupling mechanism at the middle of one side close to the sensitive mass block 6. When the sensitive mass block 6 vibrates in the driving direction, the vibration isolation between the sensitive mass block 6 and the detection capacitor is achieved through the vibration of the internal decoupling mechanism in the detection direction; when the sensitive mass block 6 vibrates in the detection direction, the vibration isolation between the sensitive mass block 6 and the driving capacitor is achieved through the vibration of the internal decoupling mechanism in the driving direction. The detection accuracy of the symmetrical four-mass gyroscope is improved through the vibration isolation between the two directions. In this embodiment, the driving direction is the movement direction of the sensitive mass block 6 in the driving state, that is, Figure 1 The detection direction is the moving direction of the sensitive mass block 6 in the detection state, that is, Figure 1 Middle up and down direction.

[0034] In the detailed implementation mode, in this embodiment, the coupling mechanism is divided into a driving coupling mechanism 3 and a detecting coupling mechanism 4 according to different distribution positions; the reverse link mechanism is divided into a driving reverse link mechanism 5 and a detecting reverse link mechanism 2 according to different distribution positions; specifically, Figure 1 As shown, in the driving direction, the driving components on the inner sides of two adjacent substructures 1 are connected by the driving coupling mechanism 3, and the detection components on the outer sides of the two adjacent substructures 1 are connected by the detection reverse link mechanism 2; in the detection direction, the detection components on the inner sides of two adjacent substructures 1 are connected by the detection coupling mechanism 4, and the driving components on the outer sides of the two adjacent substructures 1 are connected by the driving reverse link mechanism 5. Wherein, both the driving reverse link mechanism 5 and the detection reverse link mechanism 2 can adopt the existing connecting rod reverse transmission mechanism, and its specific structure and working principle are not repeated here; the middle parts of the driving reverse link mechanism 5 and the detection reverse link mechanism 2 are anchored on the base (not shown in the figure), and the two ends of the driving reverse link mechanism 5 and the detection reverse link mechanism 2 are connected to the corresponding substructure 1.

[0035] Preferably, both ends of the driving reverse link mechanism 5 are connected to the corresponding driving assembly via a driving link connecting spring 8, and both ends of the detecting reverse link mechanism 2 are connected to the corresponding detecting assembly via a detecting link connecting spring 18. The driving link connecting spring 8 can be extended and retracted along the driving direction, and the detecting link connecting spring 18 can be extended and retracted along the detecting direction.

[0036] As a specific implementation, the coupling mechanism includes a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure 1. Specifically, the plurality of coupling oblique beams are symmetrically distributed on both sides of the axis of the coupling straight beam, and the coupling oblique beams on the same side of the coupling straight beam are symmetrically arranged about the perpendicular midline of the coupling straight beam. Specifically, for the driving coupling mechanism 3, it includes a driving coupling straight beam 22 and four driving coupling oblique beams 21, the four driving coupling oblique beams 21 are grouped in pairs and symmetrically distributed on both sides of the driving coupling straight beam 21, and each group of two driving coupling oblique beams 21 forms a V-shape, the intersection of which is connected to the driving coupling straight beam 22, and the end of the driving coupling oblique beam 21 away from the driving coupling straight beam 22 is connected to the driving assembly through a quadrant block 25. Among them, the driving coupling straight beam 22 and the driving coupling oblique beam 21 can be stretched, bent and deformed when subjected to a force; in this embodiment, two adjacent substructures 1 in the driving direction are connected to the driving coupling oblique beam 21 of the driving coupling mechanism 3. When the substructures 1 connected to the left and right ends of the driving coupling mechanism 3 move in the same direction along the driving direction, the common point where the driving coupling straight beam 22 and the driving coupling oblique beam 21 intersect is simultaneously subjected to pressure and tension from the driving coupling oblique beam 21. Since the structures at the left and right ends are symmetrical, the pressure and tension are equal in magnitude and opposite in direction, and the resultant external force at the common point is zero, and the substructure is in a static state, that is, the state of moving in the same direction is obtained. Suppression; when the substructure 1 connected at the left and right ends of the driving coupling mechanism 3 moves in the reverse direction along the driving direction, the common point where the driving coupling straight beam 22 and the driving coupling inclined beam 21 intersect is subjected to the pulling force exerted by the driving coupling inclined beam 21, and the resultant external force at the common point is not zero, and it is in a movable state, that is, the reverse movement can be carried out; therefore, it is designed that the two adjacent substructures 1 in the driving direction are connected by the driving coupling mechanism 3, so that the driving interference mode in the same direction can be effectively suppressed, and the vibration frequency of the same-direction interference is much higher than the reverse working frequency, so that the driving interference mode of the symmetrical four-mass gyroscope is far away from the working mode, thereby improving the environmental adaptability of the gyroscope.

[0037] Preferably, the driving coupling straight beam 22 is designed as a frame structure, the frame structure includes an upper horizontal section and a lower horizontal section, the ends of the four driving coupling oblique beams 21 are respectively connected to the centers of the upper and lower horizontal sections of the frame structure, and the frame structure also includes an intermediate horizontal section, the center of the intermediate horizontal section is anchored on the base through an anchor point; specifically, one end of the upper two driving coupling oblique beams 21 of the driving coupling mechanism 3 is connected to the center of the upper horizontal section of the driving coupling straight beam 22, and the other ends of the upper two driving coupling oblique beams 21 are respectively connected to the upper parts of two adjacent substructures 1, so that when the two substructures 1 move in the opposite direction along the driving direction , the center of the upper horizontal section of the driving coupling straight beam 22 is subjected to the upward pulling force of the two upper driving coupling inclined beams 21, so that the upper horizontal section of the driving coupling straight beam 22 is bent and deformed upward; and when the two substructures 1 move in the same direction along the driving direction, the center of the upper horizontal section of the driving coupling straight beam 22 is subjected to the downward pressure of one of the driving coupling inclined beams 21 and the upward pulling force of the other driving coupling inclined beam 21, the pressure and pulling force are equal in magnitude and opposite in direction, the resultant external force at the center of the upper horizontal section of the driving coupling straight beam 22 is zero, so the upper horizontal section of the driving coupling straight beam 22 is in a static state, that is, the state of moving in the same direction is suppressed. Similarly, one end of the lower two driving coupling inclined beams 21 of the driving coupling mechanism 3 is connected to the center of the lower horizontal section of the driving coupling straight beam 22, and the other ends of the lower two driving coupling inclined beams 21 are respectively connected to the lower parts of the two substructures 1, and when the two substructures 1 vibrate in the driving direction, the state of moving in the same direction of the lower horizontal section of the driving coupling straight beam 22 will be suppressed.

[0038] Similarly, the detection coupling mechanism 4 includes a detection coupling straight beam 24 and four detection coupling oblique beams 23. The four detection coupling oblique beams 23 are arranged in groups of two and are symmetrically distributed on both sides of the detection coupling straight beam 24. Each group of two detection coupling oblique beams 23 forms a V-shape, and the intersection thereof is connected to the detection coupling straight beam 24. The end of the detection coupling oblique beam 23 away from the detection coupling straight beam 24 is connected to the detection assembly through a quadrant block 25. The detection coupling straight beam 24 and the detection coupling oblique beam 23 can bend and deform when subjected to a force. The detection coupling straight beam 24 and the detection coupling oblique beam 23 are connected by the detection coupling mechanism 4 of this structural design, so that the two substructures 1 connected by them can move in the opposite direction in the detection direction. The frequency of the interference vibration in the same direction is much higher than the reverse working frequency, which effectively isolates the working mode from the interference mode, so that the detection works in the reverse mode, avoiding the interference of the detection mode in the same direction. At the same time, the differential working mode also eliminates the common mode error signal, further improving the performance of the gyroscope.

[0039] On the basis of being connected by the driving coupling mechanism 3 and the detecting coupling mechanism 4, two substructures 1 connected by the same detecting coupling mechanism 4 are further connected by a driving reverse link mechanism 5, so that when the symmetrical four-mass gyroscope vibrates along the driving direction, Figure 3 As shown, the two substructures 1 connected by the same detection coupling mechanism 4 move in opposite directions; similarly, the two substructures 1 connected by the same driving coupling mechanism 3 are also connected by a detection reverse link mechanism 2, so that when the symmetrical four-mass gyroscope vibrates along the detection direction, as shown in FIG. Figure 4 As shown, the two substructures 1 connected by the same drive coupling mechanism 3 also move in opposite directions; Figure 3 and Figure 4 The direction indicated by the middle arrow is the movement direction of the corresponding sensitive mass block 6.

[0040] In some embodiments, the internal decoupling mechanism includes a vibration decoupling straight beam and a connecting beam, the vibration decoupling straight beam is located between the sensitive mass block 6 and the capacitor assembly on the corresponding side, and both ends of the vibration decoupling straight beam are connected to the capacitor assembly, one end of the connecting beam is connected to the vibration decoupling straight beam, and the other end is connected to another connecting beam arranged oppositely, and both sides of the connecting beam are connected to the sensitive mass block 6. In this embodiment, the internal decoupling mechanism connecting the driving assembly and the sensitive mass block 6 is recorded as a driving internal decoupling mechanism 11, and the internal decoupling mechanism connecting the detection assembly and the sensitive mass block 6 is recorded as a detection internal decoupling mechanism 19; specifically, the driving internal decoupling mechanism 11 includes a driving vibration decoupling straight beam and a driving connecting beam, the driving vibration decoupling straight beam is located between the sensitive mass block 6 and the driving assembly, both ends of the driving vibration decoupling straight beam are connected to the driving assembly, the end of the driving connecting beam is connected to the driving vibration decoupling straight beam, and both sides of the driving connecting beam are connected to the sensitive mass block 6. Among them, the vibration decoupling straight beam and the driving connecting beam can both stretch, bend and deform when subjected to force; when the sensitive mass block 6 moves along the detection direction, the driving vibration decoupling straight beam and the driving connecting beam produce corresponding stretching, bending and deformation, thereby separating the motion state of the sensitive mass block 6 from that of the driving component, that is, the movement of the sensitive mass block 6 along the detection direction will not drive the driving component connected to it to move along the detection direction, thereby realizing vibration isolation between the sensitive mass block 6 and the driving capacitor.

[0041] Similarly, the detection internal decoupling mechanism 19 includes a detection vibration decoupling straight beam and a detection connecting beam. The detection vibration decoupling straight beam is located between the sensitive mass block 6 and the detection component. Both ends of the detection vibration decoupling straight beam are connected to the detection component. The ends of the detection connecting beam are connected to the detection vibration decoupling straight beam. Both sides of the detection connecting beam are connected to the sensitive mass block 6. Among them, the detection vibration decoupling straight beam and the detection connecting beam can be stretched and bent when subjected to a force. When the sensitive mass block 6 moves along the driving direction, the detection vibration decoupling straight beam and the detection connecting beam produce corresponding stretching and bending deformations, thereby separating the motion state of the sensitive mass block 6 from that of the detection component, that is, the movement of the sensitive mass block 6 along the driving direction will not drive the detection component connected thereto to move along the driving direction, thereby realizing vibration isolation between the sensitive mass block 6 and the detection capacitor.

[0042] Optimally, the sensitive mass block 6 is designed as a regular quadrilateral structure, and grooves for accommodating the internal decoupling mechanism are symmetrically arranged on its four sides; specifically, the connecting beam of the internal decoupling mechanism is placed in the groove of the sensitive mass block 6 to reduce the volume of the symmetrical four-mass gyroscope.

[0043] In an optional implementation manner, a side of the plurality of capacitor components away from the sensitive mass block 6 is anchored to the substrate via a first vibration elastic member, and a side of the plurality of capacitor components close to the sensitive mass block 6 is anchored to the substrate via a second vibration elastic member. Specifically, the first vibration elastic member connected to the driving component is recorded as the first driving vibration elastic member 12, the first vibration elastic member connected to the detection component is recorded as the first detection vibration elastic member 14, the second vibration elastic member connected to the driving component is recorded as the second driving vibration elastic member 13, and the second vibration elastic member connected to the detection component is recorded as the second detection vibration elastic member 20; wherein, the first driving vibration elastic member 12 and the second driving vibration elastic member 13 can be stretched, bent and deformed along the driving direction, and the stability of the driving component moving along the driving direction is guaranteed by the arrangement of the first driving vibration elastic member 12 and the second driving vibration elastic member 13; the first detection vibration elastic member 14 and the second detection vibration elastic member 20 can be stretched, bent and deformed along the detection direction, and the stability of the detection component moving along the detection direction is guaranteed by the arrangement of the first detection vibration elastic member 14 and the second detection vibration elastic member 20; the above-mentioned vibration elastic member can adopt but is not limited to vibration springs, retractable and bendable U-shaped beams, etc.

[0044] Preferably, the adjacent first driving vibration elastic member 12 and the first detecting vibration elastic member 14 are anchored on the same anchor point, and the adjacent second driving vibration elastic member 13 and the second detecting vibration elastic member 20 are anchored on the same anchor point, which reduces the area of ​​the structure and thus reduces the cost of the device.

[0045] In some embodiments, the capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth disposed in the frame; the movable comb teeth and the fixed comb teeth correspond one-to-one, the fixed comb teeth are anchored on the substrate, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block 6 via an internal decoupling mechanism. Specifically, for the driving assembly, the driving assembly includes a driving frame 7 and at least one group of first movable comb teeth 9 and at least one group of first fixed comb teeth 10 disposed in the driving frame 7; the first movable comb teeth 9 and the first fixed comb teeth 10 correspond one-to-one, the first fixed comb teeth 10 are anchored on the substrate, and the first movable comb teeth 9 are connected to the driving frame 7. When adjacent sensitive mass blocks 6 in the symmetrical four-mass gyroscope move in opposite directions along the driving direction, as shown in FIG. Figure 2 and Figure 3 As shown, for a substructure 1, a variable capacitor is formed between its first movable comb teeth 9 and the first fixed comb teeth 10. Since the first movable comb teeth 9 and the first fixed comb teeth 10 of the two driving components at the left and right ends of the sensitive mass block 6 are symmetrically distributed about the sensitive mass block 6, the capacitance values ​​at the left and right ends of the sensitive mass block 6 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the driving capacitance and thus increases the driving capability. The comb tooth arrays on the four sensitive mass blocks 6 further increase the driving capability and improve the subsequent capacitance detection sensitivity.

[0046] As for the detection component, the detection component includes a detection frame 15 and at least one group of second movable comb teeth 16 and at least one group of second fixed comb teeth 17 arranged in the detection frame 15; the second movable comb teeth 16 and the second fixed comb teeth 17 correspond to each other, the second fixed comb teeth 17 are anchored on the substrate, and the second movable comb teeth 16 are connected to the detection frame 15. When the adjacent sensitive mass blocks 6 in the symmetrical four-mass gyroscope move in opposite directions along the detection direction, as Figure 2 and Figure 4 As shown, for a substructure 1, a variable capacitor is formed between its second movable comb teeth 16 and the second fixed comb teeth 17. Since the second movable comb teeth 16 and the second fixed comb teeth 17 of the two detection components at the upper and lower ends of the sensitive mass block 6 are symmetrically distributed about the sensitive mass block 6, the capacitance values ​​at the upper and lower ends of the sensitive mass block 6 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the capacitance detection signal. At the same time, the common mode error signal is differentially subtracted. The comb tooth arrays on the four sensitive mass blocks 6 further increase the capacitance detection signal and improve the capacitance detection sensitivity.

[0047] It should be noted that in the present invention, Figure 3 and Figure 4 A symmetrical four-mass gyroscope vibrates along the driving direction and the detection direction respectively, and the schematic diagram of the final state of the motion of its movable parts. In order to reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0048] The above examples are merely illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. All designs that are the same or similar to the present invention fall within the protection scope of the present invention.

Claims

1. A symmetrical four-mass gyroscope, characterized in that: It comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein the four substructures are arranged symmetrically in pairs, and two adjacent substructures are connected by the coupling mechanism and the reverse link mechanism; The substructure includes a sensitive mass block and a plurality of capacitor components, wherein the plurality of capacitor components are symmetrically distributed in a driving direction and a detection direction of the sensitive mass block, and the plurality of capacitor components are connected to the sensitive mass block via an internal decoupling mechanism.

2. The symmetrical four-mass gyroscope according to claim 1, characterized in that: The sides of the plurality of capacitor components away from the sensitive mass block are anchored on the substrate through a first vibration elastic member, and the sides of the plurality of capacitor components close to the sensitive mass block are anchored on the substrate through a second vibration elastic member.

3. The symmetrical four-mass gyroscope according to claim 2, characterized in that: The first vibrating elastic members adjacent to each other on the same side are anchored at the same anchor point, and the second vibrating elastic members adjacent to each other on the same side are anchored at the same anchor point.

4. The symmetrical four-mass gyroscope according to claim 1, characterized in that: The internal decoupling mechanism includes a vibration decoupling straight beam and a connecting beam. The vibration decoupling straight beam is located between the sensitive mass block and the capacitor assembly, and both ends of the vibration decoupling straight beam are connected to the capacitor assembly. One end of the connecting beam is connected to the vibration decoupling straight beam, and the other end is connected to another connecting beam arranged oppositely. Both sides of the connecting beam are connected to the sensitive mass block.

5. The symmetrical four-mass gyroscope according to claim 1, characterized in that: The capacitor assembly includes a frame and at least one group of movable comb teeth and at least one group of fixed comb teeth arranged in the frame; the movable comb teeth and the fixed comb teeth correspond one to one, the fixed comb teeth are anchored on the base, the movable comb teeth are connected to the frame, and the frame is connected to the sensitive mass block through an internal decoupling mechanism.

6. The symmetrical four-mass gyroscope according to claim 1, characterized in that: The sensitive mass block is a regular quadrilateral structure, and grooves for accommodating the internal decoupling mechanism are symmetrically arranged on its four sides.

7. The symmetrical four-mass gyroscope according to claim 1, characterized in that: The coupling mechanism comprises a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

8. The symmetrical four-mass gyroscope according to claim 7, characterized in that: One end of the coupling oblique beam away from the coupling straight beam is connected to the capacitor component through a quadrant block.

9. The symmetrical four-mass gyroscope according to claim 1, characterized in that: Both ends of the reverse link mechanism are connected to the corresponding substructures through link connection springs.

10. The symmetrical four-mass gyroscope according to claim 1, characterized in that: When the symmetrical four-mass gyroscope vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite; when the symmetrical four-mass gyroscope vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

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