Adjusting device and method for optical lens

Abstract

The invention discloses an adjusting device and method of an optical lens, mainly through a plane adjusting assembly for adjusting the position in a plane and a leveling assembly for adjusting the pitching angle, multi-directional flexible adjustment of the optical lens connected with a mounting assembly is realized, and the device is high in integration level, compact in structure, space-saving and convenient to use. According to the main technical scheme, the adjusting device of the optical lens comprises a fixed supporting piece, a mounting assembly, a plane adjusting assembly and a leveling assembly; the mounting assembly is connected with the plane adjusting assembly through the leveling assembly, the plane adjusting assembly is connected with the fixed supporting piece, and the mounting assembly is used for being connected with an optical lens; the plane adjusting assembly is used for adjusting the positions of the mounting assembly in the first direction and the second direction, and the leveling assembly is used for adjusting the pitching angle of the mounting assembly relative to the reference plane; the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the reference plane. The invention is mainly used for adjusting the position of the optical lens.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and in particular to an adjustment device and method for an optical mirror. Background Art

[0002] Semiconductor technology is the cornerstone of the modern electronics industry and is widely used in lighting, communications, computing, medical, military systems and other fields. Semiconductor testing equipment plays a vital role in the semiconductor manufacturing process. They ensure the quality and performance of every link from design verification to final product testing. The optical system in semiconductor testing equipment provides the required light for the detection process and has a direct impact on the accuracy of the detection results. As an important part of the optical system, the optical element adjustment device is crucial to improving system performance by accurately controlling the light path and element position.

[0003] The principle of optical component adjustment equipment is based on optical and mechanical principles. It controls the light path by adjusting the position and angle of the components. In the semiconductor manufacturing process, optical component adjustment equipment can assist non-image wafer inspection equipment to achieve higher-precision inspection. For example, by adjusting the optical lighting components, the lighting conditions can be optimized and the uniformity of the illumination on the wafer surface can be enhanced, thereby improving the sensitivity and resolution of the inspection system. This is crucial for discovering and classifying nano-level defects such as broken wires and bridges, especially in the manufacturing of sub-10 nanometer integrated circuit chips.

[0004] In the adjustment of optical lighting elements, there is only a one-way adjustment device for adjusting the optical lens. Usually, multiple one-way adjustment devices are used in combination to make the adjustment of the optical lens flexible and to make the light projection accurate. Each one-way adjustment device occupies a large space, is inconvenient to install and use, has redundant structure, and is not highly integrated. Summary of the invention

[0005] In view of this, an embodiment of the present application provides an adjustment device and method for an optical lens, which are mainly used to solve the problem that the optical lens adjustment device in the prior art has a single adjustment direction for the optical lens.

[0006] In order to achieve the above objectives, this application mainly provides the following technical solutions:

[0007] In one aspect, the present application provides an adjustment device for an optical mirror, comprising:

[0008] A fixed support member (100), a mounting assembly (200), a plane adjustment assembly (300) and a leveling assembly (400);

[0009] The mounting assembly (200) is connected to the plane adjustment assembly (300) via the leveling assembly (400), the plane adjustment assembly (300) is connected to the fixed support member (100), and the mounting assembly (200) is used to connect the optical mirror;

[0010] The plane adjustment component (300) is used to adjust the position of the installation component (200) in a first direction and a second direction, and the leveling component (400) is used to adjust the pitch angle of the installation component (200) relative to the reference plane;

[0011] The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the reference plane.

[0012] On the other hand, the present application also provides a method for adjusting an optical mirror, which is used in the adjustment device of the optical mirror as described above, comprising:

[0013] Mounting the optical mirror on the mounting assembly and projecting the detection light onto the optical mirror;

[0014] Adjusting the position of the mounting assembly in the first direction and the second direction by means of the plane adjustment assembly;

[0015] The pitch angle of the mounting assembly relative to the reference plane is adjusted by the leveling assembly;

[0016] Until the reflected light from the optical mirror is projected vertically onto the center area of ​​the part to be inspected.

[0017] The present application proposes an adjustment device and method for an optical lens, which mainly adjusts the position in the plane through a plane adjustment component, and adjusts the pitch angle through a leveling component, so as to realize the multi-directional flexible adjustment of the optical lens connected by the mounting component, and the device has high integration, compact structure, space saving and convenient use. In the prior art, there is only a one-way adjustment device for adjusting the optical lens, and a plurality of one-way adjustment devices are usually used in combination to make the adjustment of the optical lens flexible to meet the needs of various lighting conditions. Each one-way adjustment device occupies a large space, is inconvenient to install and use, has redundant structure and low integration. Compared with the prior art, in the present application document, the pitch adjustment and the adjustment in the plane are integrated into the same device, the device has high integration, compact structure and small volume, can reduce the error caused by the increase of torque due to the dispersion of the device, and can reduce the production cost, reduce the difficulty of adjustment, and avoid the difficulty of combining multiple one-way adjustment devices, and avoid the unforeseen errors when combining. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of an adjustment device for an optical mirror provided in an embodiment of the present application at a first viewing angle;

[0019] Figure 2A schematic structural diagram of an adjustment device for an optical mirror provided in an embodiment of the present application at a second viewing angle;

[0020] Figure 3 A schematic diagram of an adjustment direction of an optical mirror by an adjustment device for an optical mirror provided in an embodiment of the present application;

[0021] Figure 4 A schematic structural diagram of a fixed support member in an adjustment device for an optical mirror provided in an embodiment of the present application;

[0022] Figure 5 A schematic structural diagram of a fixed support member, a first adjustment plate, and a first adjustment assembly in an adjustment device for an optical lens provided in an embodiment of the present application at a first viewing angle;

[0023] Figure 6 A schematic structural diagram of a fixed support member, a first adjustment plate and a first adjustment assembly in an adjustment device for an optical mirror provided in an embodiment of the present application at a second viewing angle;

[0024] Figure 7 A schematic structural diagram of a second adjustment plate in an adjustment device for an optical mirror provided in an embodiment of the present application at a first viewing angle;

[0025] Figure 8 A schematic structural diagram of a second adjustment plate in an adjustment device for an optical mirror provided in an embodiment of the present application at a second viewing angle;

[0026] Fig. 9 for Figure 6 A schematic cross-sectional view of the adjustment device of the optical mirror at position AA;

[0027] Fig.10 for Figure 2 A schematic cross-sectional view of the adjustment device of the optical mirror at the BB position;

[0028] Fig.11 for Fig.10 A schematic diagram of a partially enlarged structure of the adjustment device of the optical mirror shown in the C position;

[0029] Fig.12 A schematic structural diagram of a second adjustment plate and a mounting assembly in an adjustment device for an optical mirror provided in an embodiment of the present application;

[0030] Fig.13 A schematic diagram of the structure of a lens chamber pressure ring in an adjustment device for an optical mirror provided in an embodiment of the present application;

[0031] Fig.14 A flow chart of a first method for adjusting an optical mirror provided in an embodiment of the present application. DETAILED DESCRIPTION

[0032] In order to further explain the technical means and effects adopted by the present application to achieve the predetermined invention purpose, the specific implementation method, structure, characteristics and effects of the adjustment device of the optical mirror proposed in the present application are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0033] like Figure 1-2 As shown, an embodiment of the present application provides an adjustment device for an optical mirror, a fixed support member (100), a mounting assembly (200), a plane adjustment assembly (300) and a leveling assembly (400);

[0034] The mounting assembly (200) is connected to the plane adjustment assembly (300) via the leveling assembly (400), the plane adjustment assembly (300) is connected to the fixed support member (100), and the mounting assembly (200) is used to connect the optical mirror;

[0035] The plane adjustment component (300) is used to adjust the position of the installation component (200) in a first direction and a second direction, and the leveling component (400) is used to adjust the pitch angle of the installation component (200) relative to the reference plane;

[0036] The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the reference plane.

[0037] The fixed support member (100) is the main support structure of the adjustment device of the optical mirror, which can be installed on a general support platform, such as a frame of a detection device. The structure of the fixed support member (100) can be various. In one embodiment, Figure 4 As shown, the fixed support member (100) is a flat plate structure. The mounting assembly (200) is used for mounting an optical mirror, which can be a large-aperture optical lighting composite mirror, including a prism and a lens, wherein the lens is a nearly flat lens, and the prism is glued to the center of the lens.

[0038] In the following embodiments, Figure 1 As shown, the first direction refers to the X-axis direction, the second direction refers to the Y-axis direction, the third direction refers to the Z-axis direction, and the reference plane refers to the plane parallel to the X-axis direction and the Y-axis direction. It can be understood that the X-axis, Y-axis, Z-axis and reference plane are not entities, but are virtual references defined for the description of structure and function. For the convenience of explanation, the following implementation method takes the horizontal fixation of the fixed support member (100) as an example. The Z-axis direction is the vertical direction, the X-axis direction and the Y-axis direction are two perpendicular directions in the horizontal plane, and the reference plane is the horizontal plane. It can be understood that the fixed support member (100) may not be horizontally fixed, and the Z-axis direction may be inclined relative to the vertical direction. During adjustment, the position of the fixed support member (100) remains unchanged, such as Figure 3As shown, the plane adjustment component (300) is used to drive the installation component (200) to move in the X-axis direction and in the Y-axis direction, thereby realizing the adjustment of movement in the horizontal plane and the movement of the light spot reflected by the optical mirror in the plane. The leveling component (400) is used to adjust the flip angle of the installation component (200) around the X-axis and around the Y-axis, thereby realizing the adjustment of the pitch angle relative to the horizontal plane. Or it can be said that the installation component (200) includes an axis, and the leveling component (400) is used to adjust the direction and angle of deviation of the axis of the installation component (200) from the Z-axis. The leveling component (400) can realize the adjustment of the angle of light reflected by the optical mirror, such as adjusting it to vertical. In the following text of this application, an example of a solution that can be rotated around the Z-axis will be given, that is, the device of this application, which can realize adjustment of up to five degrees of freedom, a large adjustable range, and high precision of the adjustment result.

[0039] The connection between the plane adjustment component (300) and the fixed support member (100) can be a fixed connection, and the position of the mounting component (200) in the first direction and the second direction can be adjusted by the composition structure of the plane adjustment component (300) itself. Alternatively, the plane adjustment component (300) and the fixed support member (100) can be movably connected. In this solution, the fixed support member (100) needs to be provided with a side plane in contact with the plane adjustment component (300) so as to guide the plane adjustment component (300) to slide in the plane. This will be described in conjunction with more specific embodiments below.

[0040] There may be multiple leveling assemblies (400), and the leveling assemblies (400) can adjust the pitch angle of the mounting assembly (200) by adjusting the height positions of different sides of the mounting assembly (200) and the plane adjustment assembly (300) or the fixed support member (100).

[0041] The fixed support member (100), the plane adjustment assembly (300), the leveling assembly (400) and the installation assembly (200) are connected in sequence, and the structural integration is high. More specifically, in one embodiment, Figure 4-5In the invention, a coaxial first mounting opening (102) and a second mounting opening (301) are provided on the fixed support member (100) and the plane adjustment component (300), the mounting component (200) is generally in a cylindrical structure, the bottom end of the mounting component (200) is used to reflect light, the top end of the mounting component (200) includes a flange extending outward, the first mounting opening (102) and the second mounting opening (301) are both circular openings adapted to the shape of the mounting component (200), and the opening is larger than the outer diameter of the mounting component (200). The mounting component (200) is plugged into the first mounting opening (102) and the second mounting opening (301), and is connected to the leveling component (400) through the flange, thereby realizing that the device as a whole presents a nested structure, has a higher degree of integration, and a more compact structure.

[0042] The embodiments of the present application propose an adjustment device and method for an optical mirror, which mainly adjusts the position in the plane through a plane adjustment component and adjusts the pitch angle through a leveling component, so as to realize multi-directional flexible adjustment of the optical mirror connected to the mounting component. The device has high integration, compact structure, space saving and easy use. In the prior art, there are only one-way adjustment devices for adjusting optical lenses. Usually, a plurality of one-way adjustment devices are superimposed and used in combination to make the adjustment of the optical lens flexible to meet the needs of various lighting conditions. Each one-way adjustment device occupies a large space, is inconvenient to install and use, has redundant structure and low integration. Compared with the prior art, in the present application document, the pitch adjustment and the adjustment in the plane are integrated into the same device. The device has high integration, compact structure and small volume, which can reduce the error caused by the increase of torque due to the dispersion of the device, and at the same time can reduce the production cost and reduce the difficulty of adjustment.

[0043] The plane adjustment component (300) may have various structures. The following is an example of a specific implementation of the plane adjustment component (300). It can be understood that the plane adjustment component (300) is not limited to the following structure:

[0044] In one embodiment, if Figure 1As shown, the plane adjustment assembly (300) includes a first adjustment plate (310), a first adjustment assembly (320), a second adjustment plate (330) and a second adjustment assembly (340). The first adjustment plate (310) is movably connected to the fixed support member (100) in a first direction, and the first adjustment assembly (320) is connected to the first adjustment plate (310) and the fixed support member (100) to adjust the relative position of the first adjustment plate (310) and the fixed support member (100) in the first direction. The second adjustment plate (330) is movably connected to the first adjustment plate (310) in a second direction, and the second adjustment assembly (340) is connected to the second adjustment plate (330) and the first adjustment plate (310) to adjust the relative position of the second adjustment plate (330) and the fixed support member (100) in the second direction.

[0045] The fixed support member (100), the first adjustment plate (310) and the second adjustment plate (330) are all plate-shaped structures, which are in contact with each other and connected in a sliding manner, thereby achieving the function of guiding and stabilizing the movement of the first adjustment plate (310) and the second adjustment plate (330). The first adjustment component (320) is used to adjust the relative position of the first adjustment plate (310) and the fixed support member (100) on the X axis. The adjustment of the relative position can be a single adjustment in the positive direction of the X axis, or it can be an adjustment in two opposite directions, the positive direction and the reverse direction of the X axis. The second adjustment component (340) is used to adjust the relative position of the second adjustment plate (330) and the fixed support member (100) on the Y axis. The adjustment of the relative position can be a single adjustment in the positive direction of the Y axis, or it can be an adjustment in two opposite directions, the positive direction and the reverse direction of the Y axis. Compared with the non-directional free-moving adjustment in the entire plane, the adjustment on the X axis and the Y axis is performed respectively by the first adjustment component (320) and the second adjustment component (340), so that the adjustment is more controllable and more accurate. The first adjustment plate (310) and the second adjustment plate (330) are both provided with a second installation opening (301).

[0046] The first adjustment plate (310) and the fixed support member (100) are movably connected in the first direction by the cooperation of the guide groove and the guide platform. A first guide groove (101) is provided on one of the first adjustment plate (310) and the fixed support member (100), and a first guide platform (311) is provided on the other of the first adjustment plate (310) and the fixed support member (100). The first adjustment plate (310) and the fixed support member (100) are in surface contact, and the first guide platform (311) is slidably embedded in the first guide groove (101), and the first guide platform (311) and the first guide groove (101) both extend in the first direction.

[0047] like Figure 4As shown, the fixed support member (100) may be provided with first guide grooves (101) in two opposite directions passing through the center of the first mounting opening (102) in the X-axis direction, and as shown Figure 5 As shown, a first guide platform (311) corresponding to the first guide groove (101) is processed on the first adjustment plate (310). The accuracy of the guide element is particularly critical. In the processing of the first guide platform (311) and the first guide groove (101), the first guide platform (311) of the first adjustment plate (310) and the first guide groove (101) of the fixed support member (100) can be processed using the same tool and in the same clamping state to ensure high-quality shape tolerance (straightness and flatness) of the first guide platform (311) and the first guide groove (101), as well as high-quality position tolerance (verticality) of the side wall of the first guide platform and the inner wall (1011) of the first guide groove.

[0048] Furthermore, a second guide groove (312) is provided on one of the second adjustment plate (330) and the first adjustment plate (310), and a second guide platform (331) is provided on the other of the second adjustment plate (330) and the first adjustment plate (310), the second adjustment plate (330) and the first adjustment plate (310) are surface-contacted, and the second guide platform (331) is slidably embedded in the second guide groove (312), and the second guide platform (331) and the second guide groove (312) both extend in the second direction.

[0049] like Figure 5-6 As shown, the first adjustment plate (310) may be provided with second guide grooves (312) in two opposite directions passing through the center of the second mounting opening (301) in the Y-axis direction, and as shown Figure 7-8 As shown, a second guide platform (331) corresponding to the second guide groove (312) is processed on the second adjustment plate (330). The precision of the guide element is particularly critical. In the processing of the second guide platform (331) and the second guide groove (312), the second guide groove (312) of the first adjustment plate (310) and the second guide platform (331) of the second adjustment plate (330) can be processed with the same tool and in the same clamping state to ensure high-quality shape tolerance (straightness and flatness) of the second guide platform (331) and the second guide groove (312), as well as high-quality position tolerance (verticality) of the inner wall of the second guide groove and the side wall (3311) of the second guide platform.

[0050] At the same time, since the fixed support member (100) and the plane adjustment assembly (300) are provided with a first installation opening (102) and a second installation opening (301), the contact area between the first guide platform (311) and the first guide groove (101), and between the second guide platform (331) and the second guide groove (312) is reduced, thereby reducing the influence of the flatness of the contact surface on the displacement accuracy.

[0051] In one embodiment, the surfaces of the first guide platform (311), the first guide groove (101), the second guide platform (331) and the second guide groove (312) are finely machined surfaces, which can improve the geometric tolerance. For example, in one embodiment, the tolerance of the surfaces of the first guide platform (311), the first guide groove (101), the second guide platform (331) and the second guide groove (312) can be greater than or equal to 0.005 and less than or equal to 0.015, such as the tolerances are all 0.01 mm. The roughness Ra of the surfaces of the first guide platform (311), the first guide groove (101), the second guide platform (331) and the second guide groove (312) can be greater than or equal to 3 and less than or equal to 4, such as the roughness Ra reaches 3.2.

[0052] The surfaces opposite to each other of the first adjustment plate (310) and the fixed support member (100), and the surfaces opposite to each other of the second adjustment plate (330) and the first adjustment plate (310) are finely machined surfaces, which can improve the geometric tolerance. The tolerance of the surfaces opposite to each other of the first adjustment plate (310) and the fixed support member (100), and the surfaces opposite to each other of the second adjustment plate (330) and the first adjustment plate (310) can be greater than or equal to 0.005, and less than or equal to 0.015, such as the tolerances are both 0.01 mm. The roughness Ra of the surfaces opposite to each other of the first adjustment plate (310) and the fixed support member (100), and the surfaces opposite to each other of the second adjustment plate (330) and the first adjustment plate (310) can be greater than or equal to 3, and less than or equal to 4, such as the roughness Ra reaches 3.2.

[0053] The first adjustment component (320) and the second adjustment component (340) can be adjusted in a variety of ways. The following examples illustrate specific implementations of the first adjustment component (320) and the second adjustment component (340), wherein the first adjustment component (320) and the second adjustment component (340) have the same structure. Due to different adjustment objects, connection objects and functions, the following implementations describe the structure of the first adjustment component (320) in detail. It can be understood that the second adjustment component (340) has the same principle as the first adjustment component (320).

[0054] In one embodiment, if Fig. 9As shown, the first adjustment assembly (320) includes a first bolt seat (321), two first adjustment bolts (322) and a second bolt seat (323), and the first bolt seat (321) can be a T-shaped plate structure, including a horizontal connecting plate and a vertical connecting plate connected to the middle position of the horizontal connecting plate and perpendicular to the horizontal connecting plate. The horizontal connecting plate of the first bolt seat (321) is fixed to one side of the fixed support member (100) in the first direction, and the vertical connecting plate of the first bolt seat (321) extends to be opposite to one side of the first adjustment plate (310) in the first direction, but not in direct contact. The second bolt seat (323) is an approximately L-shaped structure, and a hollow opening is provided on it for the first adjustment bolt (322) to give way. The first end of the second bolt seat (323) is fixed to the first adjustment plate (310), and the second end of the second bolt seat (323) extends to correspond to the horizontal connecting plate of the first bolt seat (321). One of the two first adjusting bolts (322) is threadedly connected to the vertical connecting plate of the first bolt seat (321) for abutting and pushing the first adjusting plate (310), and the other of the two first adjusting bolts (322) is threadedly connected to the second bolt seat (323) near the second end for abutting the horizontal connecting plate of the first bolt seat (321) to fix the first adjusting plate (310).

[0055] During adjustment, first reversely screw the first adjustment bolt (322) on the second bolt seat (323) so that the first adjustment bolt (322) on the second bolt seat (323) is away from the horizontal connecting plate of the first bolt seat (321). Then, screw the first adjustment bolt (322) on the first bolt seat (321) forwardly so that the first adjustment plate (310) moves in the positive direction of the X-axis until the light spot is located at a suitable position in the first direction. Then, screw the first adjustment bolt (322) on the second bolt seat (323) forwardly until the first adjustment bolt (322) on the second bolt seat (323) squeezes the horizontal connecting plate of the first bolt seat (321), thereby locking the position of the first adjustment plate (310) in the X-axis direction, that is, fixing the position of the mounting assembly (200) in the X-axis direction. If adjustment is required again, repeat the above steps.

[0056] In addition, reverse adjustment can also be performed. First, the first adjustment bolt (322) on the first bolt seat (321) is screwed in the reverse direction, so that the first adjustment bolt (322) on the first bolt seat (321) is away from the first adjustment plate (310). Then, the first adjustment bolt (322) on the second bolt seat (323) is screwed in the forward direction, so that the first adjustment plate (310) moves in the reverse direction of the X-axis until the light spot is located at a suitable position in the first direction. Then, the first adjustment bolt (322) on the first bolt seat (321) is screwed in the forward direction until the first adjustment bolt (322) on the first bolt seat (321) squeezes the first adjustment plate (310), thereby locking the position of the first adjustment plate (310) in the X-axis direction, that is, fixing the position of the mounting assembly (200) in the X-axis direction. If adjustment is required again, the above steps can be repeated.

[0057] In one embodiment, the first adjusting bolt (322) includes a first bolt body and a first bushing (3221), and the first bushing (3221) is sleeved on the outer circumference of the first bolt body.

[0058] The first bushing (3221) may be a cylindrical structure made of metal, such as copper. The first bushing (3221) is installed into the mounting holes of the first bolt seat (321) and the second bolt seat (323) by means of an over-fitting method. The first bushing (3221) has an internal thread, and the two first bolt bodies are threadedly connected to the first bolt seat (321) and the second bolt seat (323) through their respective first bushings (3221). The first bushing (3221) can be processed with the internal thread alone, and its accuracy is easier to control, and more precise processing can be achieved, and more precise adjustment of the position in the X-axis direction can be achieved.

[0059] In one embodiment, the first adjusting bolt (322) includes a first bolt body, the first bolt body includes a first threaded member (3222) and a first ball head (3223), the first ball head (3223) is located at the end of the first threaded member (3222), the first ball head (3223) of one of the two first adjusting bolts (322) is used to abut against the first adjusting plate (310), and the first ball head (3223) of the other of the two first adjusting bolts (322) is used to abut against the first bolt seat (321).

[0060] The adjustments involved in the entire structure are all driven by bolts and manually adjusted. Since there is a gap when the bolt is rotated into the threaded hole, in a precision optical system, the gap affects the accuracy and stability of installation and adjustment. In order to reduce the impact of the gap on the position accuracy and stability of the optical mirror, all bolts use fine threads with a smaller lead, such as the first threaded member (3222) is a fine threaded member, and other threaded members involved in the following text are also fine threaded members, which will not be repeated. The first threaded member (3222) is used to be threaded with the first bushing (3221) of the aforementioned embodiment. Taking the first adjustment bolt (322) connected to the first bolt seat (321) as an example, the first threaded member (3222) is provided with a mounting recess on one side close to the first adjustment plate (310), and the mounting recess can be a spherical surface or a polygonal irregular recess. The first ball head (3223) is spherical and is located between the mounting recess and the first adjustment plate (310). The first threaded member (3222) squeezes the first adjustment plate (310) through the first ball head (3223); when the first threaded member (3222) is screwed, no direct friction damage is caused to the side wall of the first adjustment plate (310), thereby improving the adjustment accuracy and the wear resistance for long-term use.

[0061] In one embodiment, the second adjustment assembly (340) includes a third bolt seat, two second adjustment bolts and a fourth bolt seat, wherein the third bolt seat is fixed to one side of the first adjustment plate (310) in the second direction and extends to be opposite to one side of the second adjustment plate (330) in the second direction, and the fourth bolt seat is fixed to the second adjustment plate (330) and extends to correspond to the third bolt seat. One of the two second adjustment bolts is threadedly connected to the third bolt seat for abutting and pushing the second adjustment plate (330), and the other of the two second adjustment bolts is threadedly connected to the fourth bolt seat for abutting the third bolt seat to fix the second adjustment plate (330).

[0062] In one embodiment, the second adjusting bolt includes a second bolt body and a second bushing, and the second bushing is sleeved on the outer circumference of the second bolt body.

[0063] In one embodiment, the second adjusting bolt includes a second bolt body, the second bolt body includes a second threaded member and a second ball head, the second ball head is located at the end of the second threaded member, the second ball head of one of the two second adjusting bolts is used to abut against the second adjusting plate (330), and the second ball head of the other of the two second adjusting bolts is used to abut against the third bolt seat.

[0064] The structure of the second adjustment component (340) can refer to the explanation of the first adjustment component (320), which will not be repeated here.

[0065] In one embodiment, the plane adjustment assembly (300) further comprises a first fixing member and a second fixing member, wherein the first fixing member is used to fix the relative position of the first adjustment plate (310) and the fixed support member (100), and the second fixing member is used to fix the relative position of the second adjustment plate (330) and the first adjustment plate (310).

[0066] Then, the first adjustment plate (310) and the second adjustment plate (330) are further fixed to avoid displacement during operation. The specific implementation method may be, for example, Figure 5-7 As shown, the first adjustment plate (310) is provided with a first strip waist hole (313) extending in a first direction, and the first fixing member is a first fastening bolt. After the first fastening bolt is passed through the first strip waist hole (313), it is screwed to the fixing support member (100). The second adjustment plate (330) is provided with a second strip waist hole (332) extending in a second direction, and the second fixing member is a second fastening bolt. After the second fastening bolt is passed through the second strip waist hole (332), it is screwed to the first adjustment plate (310).

[0067] Taking the first adjustment plate (310) as an example, the first fastening screw is loosened. During the movement of the first adjustment plate (310), the first fastening bolt will move in the first strip waist hole (313), and will not affect the position adjustment of the first adjustment plate (310). After the adjustment of the first adjustment plate (310) is completed, the first fastening screw is screwed to fix the first adjustment plate (310). The second fastening bolt has the same principle as the second adjustment plate (330), which will not be repeated here.

[0068] The leveling assembly (400) is used to adjust the pitch angle of the mounting assembly (200). The following is an example of an implementation of the setting position and structure of the leveling assembly (400). It can be understood that the leveling assembly (400) is not limited to the following settings:

[0069] In one embodiment, there are multiple leveling assemblies (400), the mounting assembly (200) includes a mounting inner cavity, the mounting inner cavity is used to accommodate the optical mirror, and the multiple leveling assemblies (400) are located on different sides of the mounting inner cavity. The leveling assemblies (400) are used to adjust the relative position of the mounting assembly (200) on different sides of the mounting inner cavity and the fixed support member (100) in a third direction to adjust the pitch angle of the mounting assembly (200) relative to the reference plane, and the third direction is perpendicular to the first direction and the second direction.

[0070] like Figure 1 As shown, the mounting assembly (200) includes an illumination lens chamber seat (210), the illumination lens chamber seat (210) is connected to the plane adjustment assembly (300) via a leveling assembly (400), and the illumination lens chamber seat (210) is provided with an installation inner cavity and a bottom opening connected to the installation inner cavity.

[0071] like Fig.10 As shown, the lighting lens chamber seat (210) is approximately cylindrical in structure, the bottom end of the lighting lens chamber seat (210) includes an opening for the optical mirror to receive and reflect light, the top end of the lighting lens chamber seat (210) includes a flange (212) extending outward, the lighting lens chamber seat (210) is plugged into the first mounting port (102) and the second mounting port (301), and is opposite to the top surface of the second adjustment plate (330) through the flange (212), and is connected to the leveling assembly (400). The number of the leveling assemblies (400) can be three, such as Figure 1-2 As shown, the top circular opening of the mounting inner cavity around the illumination lens chamber seat (210) is evenly distributed around its periphery.

[0072] In one embodiment, if Fig.11 As shown, the installation component (200) is provided with a leveling screw hole on the outer periphery of the installation inner cavity, such as a leveling screw hole is provided on the flange (212), and the leveling component (400) includes a leveling bolt (410), the leveling bolt (410) is screwed into the leveling screw hole, and the end of the leveling bolt (410) abuts against the plane adjustment component (300).

[0073] The structure of the leveling bolt (410) can be consistent with the aforementioned first adjustment bolt (322), and the principles and advantages are not repeated here. The leveling bolt (410) includes a third bolt body and a third bushing (411), and the third bushing (411) is sleeved on the outer periphery of the third bolt body. The leveling bolt (410) includes a third bolt body, and the third bolt body includes a third threaded member (412) and a third ball head (413), and the third ball head (413) is located at the end of the third threaded member (412), and the third ball head (413) is used to abut against the plane adjustment assembly (300).

[0074] During adjustment, one of the three leveling components (400) is used as the current leveling component, and the third threaded member (412) of the current leveling component is screwed. As the third threaded member (412) is screwed into the third bushing (411), the third ball head (413) is pushed to squeeze the plane adjustment component (300). Since the position of the plane adjustment component (300) is fixed, the thread force will be applied in the opposite direction to the third bushing (411), thereby driving the side of the lighting lens chamber seat (210) provided with the current leveling component to move upward in the Z-axis direction relative to the fixed support member (100). By adjusting the feed amount of the three leveling components (400), a small angle pitch fine adjustment can be achieved on the XY plane, or in other words, on the horizontal plane, so that the light reflected by the optical mirror can be projected vertically, thereby reducing the influence of the installation error on the vertical light path.

[0075] In one embodiment, a dovetail groove is provided on the plane adjustment assembly (300), and the end of the leveling bolt (410) is embedded in the dovetail groove.

[0076] For example, a mounting groove may be provided on the second adjustment plate (330), and a dovetail groove block may be fixedly arranged in the mounting groove to facilitate processing. The kinematic pair formed by the dovetail groove and the third ball head (413) has two constraints. The three sets of leveling bolts (410) may constrain six degrees of freedom, and the illumination lens chamber seat (210) may be completely constrained after the adjustment is completed.

[0077] In one embodiment, if Figure 2 As shown, the leveling assembly (400) further includes a plurality of leveling fixing members (420), and the leveling fixing members are used to fix the relative positions of the mounting assembly (200) and the plane adjustment assembly (300).

[0078] The leveling fixing member (420) may be a bolt, and the flange (212) has an opening. After the leveling bolt (410) has completed the pitch adjustment, the leveling fixing member (420) passes through the opening and is screwed to the second adjustment plate (330) to fix the pitch angle. There may be multiple leveling fixing members (420).

[0079] The mounting assembly (200) is used to mount a fixed optical mirror, and the mounting can be achieved in a variety of ways. The present application provides an embodiment of the mounting assembly (200) which is intended to be versatile and more convenient to adjust:

[0080] In one embodiment, the mounting assembly (200) includes, in addition to the aforementioned lighting lens chamber seat (210), a lens chamber pressing ring (220) and a lighting lens chamber (230); the lighting lens chamber seat (210) is connected to the plane adjustment assembly (300) via a leveling assembly (400); the lighting lens chamber seat (210) is provided with a mounting inner cavity and a bottom opening connected to the mounting inner cavity; the lighting lens chamber (230) is used to connect an optical mirror; the lighting lens chamber (230) is located in the mounting inner cavity; the lens chamber pressing ring (220) is located on a side of the lighting lens chamber (230) away from the bottom opening; the lens chamber pressing ring (220) cooperates with the edge of the bottom opening to fix the lighting lens chamber (230); and the lighting lens chamber (230) is used to rotate relative to the lighting lens chamber seat (210) about a third direction.

[0081] The lens chamber pressing ring (220) is an annular structure, and can be threadedly connected to the inner wall of the lighting lens chamber seat (210), and then the connection with the lighting lens chamber seat (210) and the fixing of the lighting lens chamber (230) can be achieved by screwing the lens chamber pressing ring (220). By squeezing and fixing the lighting lens chamber (230) on both sides with the lens chamber pressing ring (220) and the bottom opening edge, it is possible to fix a variety of lighting lens chambers (230) or optical mirrors of different specifications, so that the installation component (200) has universality and is easy to disassemble and assemble. The lighting lens chamber (230) can be rotated in the lighting lens chamber seat (210) to adjust the direction of the reflective surface of the optical mirror. After the adjustment is completed, the lens chamber pressing ring (220) can be fixed. The connection between the lighting lens chamber seat (210) and the optical mirror can be a gluing connection.

[0082] In one embodiment, if Figure 12-13 As shown, a plurality of rotation adjustment holes (221) are provided on the lens chamber pressing ring (220), and the plurality of rotation adjustment holes (221) are distributed around the outer circumference of the lens chamber pressing ring (220). An adjustment hollow (211) penetrating the installation inner cavity and the outside of the illumination lens chamber seat (210) is provided on the lighting lens chamber seat (210), the lens chamber pressing ring (220) is threadedly connected to the inner wall of the installation inner cavity, and the rotation adjustment hole (221) is opposite to the adjustment hollow (211).

[0083] Since the depth of the illumination lens chamber (230) in the installation inner cavity is relatively deep in the Z-axis direction, it is not easy to tighten the lens chamber pressing ring (220). Therefore, by providing a rotation adjustment hole (221), tightening can be achieved through the side wall. The rotation adjustment holes (221) can be evenly distributed around the periphery of the lens chamber pressing ring (220), and the adjustment hollowing (211) is a plurality of strip hollowings distributed at intervals. A tool can be passed through the hollowing to fix the rotation adjustment hole (221) and move the lens chamber pressing ring (220) to achieve tightening and loosening.

[0084] In order to facilitate the adjustment of the optical mirror around the Z axis and ensure the adjustment accuracy, in one embodiment, Fig.12 As shown, a rotation adjustment assembly is provided on the lighting lens chamber seat (210), and a passive component (240) is provided on the lighting lens chamber (230). The rotation adjustment assembly is used to apply force to the passive component (240) to adjust and fix the position of the lighting lens chamber seat (210).

[0085] An adjustment port is provided on the lighting lens chamber seat (210), and the passive component (240) extends out of the installation inner cavity through the adjustment port, and then the lighting lens chamber (230) can be moved left and right by applying force to the passive component (240), and then the optical mirror connected to the lighting lens chamber (230) can be adjusted in the direction around the Z axis. In one embodiment, the rotation adjustment component includes an adjustment outer frame (250) and two rotation adjustment bolts (260), the adjustment outer frame (250) is connected to the lighting lens chamber seat (210), and the two rotation adjustment bolts (260) are screwed to the adjustment outer frame (250) and abut against opposite sides of the passive component (240).

[0086] During adjustment, by adjusting the screw-in depth of the rotating adjustment bolt (260), the passive component (240) is pushed to move in the forward and reverse directions, so that the lighting lens chamber (230) can rotate around the Z axis, and the lighting lens chamber (230) can be adjusted around the Z direction. The structure of the rotating adjustment bolt (260) can be consistent with the aforementioned first adjustment bolt (322), and the principles and advantages are not repeated here. For example, the rotating adjustment bolt (260) includes a fourth bolt body and a fourth bushing, and the fourth bushing is sleeved on the outer periphery of the fourth bolt body. The fourth bolt body includes a fourth threaded member and a fourth ball head, and the fourth ball head is located at the end of the fourth threaded member, and the fourth ball head is used to abut against the passive component (240).

[0087] On the other hand, Fig.14 As shown, the present application also provides a method for adjusting an optical mirror, which is used for an adjustment device for an optical mirror as described above, comprising:

[0088] S1. Install the optical mirror on the installation assembly (200) and project detection light onto the optical mirror.

[0089] The optical mirror may be a lens having a prism glued in the middle, wherein the prism has an inclined mirror surface located on a side away from the lens for reflecting light. In the embodiment in which the aforementioned mounting assembly (200) includes an illumination lens chamber seat (210), a lens chamber pressing ring (220) and an illumination lens chamber (230), the lens is glued in the illumination lens chamber (230), and then the illumination lens chamber (230) is placed in the installation inner cavity of the illumination lens chamber seat (210), and the lens chamber pressing ring (220) is placed in the installation inner cavity. At this time, the illumination lens chamber (230) is rotatable, and the illumination lens chamber (230) can be rotated to adjust the position of the illumination lens chamber (230) so that the light from the light source can be projected onto the inclined mirror surface of the prism and generate downward reflected light. Then, the lens chamber pressing ring (220) is screwed through the rotation adjustment hole (221) of the lens chamber pressing ring (220) until the lens chamber pressing ring (220) is fastened to the illumination lens chamber seat (210). The rotation adjustment of the lighting lens chamber (230) can be adjusted by the two rotation adjustment bolts (260) of the aforementioned embodiment. Then, the plane adjustment assembly (300) is installed on the fixed support member (100), and the installation assembly (200) is installed in the first installation opening (102) and the second installation opening (301) of the plane adjustment assembly (300) and the fixed support member (100).

[0090] S2. The position of the mounting assembly (200) in the first direction and the second direction is adjusted by the plane adjustment assembly (300), and the pitch angle of the mounting assembly (200) relative to the reference plane is adjusted by the leveling assembly (400) until the reflected light of the optical mirror is vertically projected onto the central area of ​​the part to be inspected.

[0091] The part to be inspected may be a wafer. The central area of ​​the part to be inspected may be the center of the wafer. The wafer may be placed on the inspection table. The position and shape of the transmission spot of the reflected light may be manually observed by an operator or automatically identified by an identification device of the inspection table.

[0092] The above step S2 may specifically include S2.1, performing adjustment in the first direction, i.e., the X-axis direction. For example, in an embodiment where the plane adjustment assembly (300) includes a first adjustment plate (310), a first adjustment assembly (320), a second adjustment plate (330), and a second adjustment assembly (340), the position of the first adjustment plate (310) in the first direction is adjusted by the first adjustment assembly (320). For example, one of the two first adjustment bolts of the first adjustment assembly (320), i.e., the first adjustment bolt (322) connected to the first bolt seat (321) is screwed, and then the first adjustment plate (310) is pushed to move in the first direction under the guidance of the first guide platform (311) and the first guide groove (101), and then the optical mirror is moved in the first direction, so that the projection point of the reflected light of the prism moves toward the center of the wafer until it is located at the center of the wafer in the X-axis direction of the wafer, or the projection point is located on the axis of the Y-direction of the wafer, and the adjustment is stopped. Then, the first adjusting bolt (322) connected to the second bolt seat (323) is screwed to squeeze the first bolt seat (321), thereby fixing the first adjusting plate (310).

[0093] S2.2, perform adjustment in the second direction, i.e., the Y-axis direction. The position of the second adjustment plate (330) in the second direction is adjusted by the first adjustment assembly (320). For example, by screwing one of the two second adjustment bolts of the second adjustment assembly (340), i.e., screwing the second adjustment bolt connected to the third bolt seat, the second adjustment plate (330) is pushed to move in the second direction under the guidance of the second guide groove (312) and the second guide platform (331), and then the optical mirror is moved in the second direction, so that the projection point of the reflected light of the prism moves toward the center of the wafer until it is located at the center of the wafer in the Y-axis direction of the wafer, or the projection point is located on the axis of the X-direction of the wafer, and the adjustment is stopped. Then, the second adjustment bolt connected to the fourth bolt seat is screwed to squeeze the third bolt seat to fix the second adjustment plate (330).

[0094] At this point, the position adjustment of the light spot in the horizontal plane is achieved, and then S2.3, the pitch angle adjustment can be performed. Specifically, the leveling bolts (410) of each leveling assembly (400) are screwed in sequence, and only a small amount of screwing is performed each time, such as only 5 degrees, until the reflected light is vertically projected onto the object to be inspected.

[0095] During the adjustment process of the leveling component (400), the position of the inclined mirror surface will change slightly, resulting in a deviation in the direction of the reflected light. Therefore, step S2 also includes S2.4, adjusting the rotation angle of the optical mirror around the third direction through the mounting component (200). Specifically, the lens chamber pressure ring (220) is adjusted to release the lighting lens chamber (230), and the rotation adjustment component on the lighting lens chamber seat (210) is adjusted, such as screwing the adjustment bolt (260), which acts on the passive component (240) on the lighting lens chamber (230), drives the lighting lens chamber (230) to rotate around the third direction, and then makes the optical mirror rotate around the third direction to achieve the adjustment of the position of the inclined mirror surface.

[0096] After the above adjustment, the position of the optical mirror or the light spot in the first direction and the second direction will change, then repeat steps S2.1 to S2.4 to adjust repeatedly. It can be understood that there is no fixed order between the four steps S2.1 to S2.4, and any step can be adjusted based on experience, so as to achieve that the reflected light of the optical mirror is projected vertically to the central area of ​​the part to be inspected.

[0097] In an embodiment where the plane adjustment assembly (300) further includes a first fixing member and a second fixing member, after the reflected light of the optical mirror is vertically projected to the central area of ​​the part to be detected, step S2 also includes S2.5, using the first fixing member to fix the relative position of the first adjustment plate (310) and the fixed support member (100) to achieve the fastening of the first adjustment plate (310). Using the second fixing member to fix the relative position of the second adjustment plate (330) and the first adjustment plate (310) to achieve the fastening of the second adjustment plate (330). The relative position of the illumination lens chamber seat (210) of the mounting assembly (200) and the second adjustment plate (330) of the plane adjustment assembly (300) is fixed by the leveling fixing member (420) to achieve the fastening of the pitch angle. Then the lens chamber pressure ring (220) is adjusted to fix the illumination lens chamber (230). At this point, the position of the optical mirror is fixed and subsequent work can be performed.

[0098] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. An adjustment device for an optical mirror, characterized in that: include: A fixed support member (100), a mounting assembly (200), a plane adjustment assembly (300) and a leveling assembly (400); The mounting assembly (200) is connected to the plane adjustment assembly (300) via the leveling assembly (400), the plane adjustment assembly (300) is connected to the fixed support member (100), and the mounting assembly (200) is used to connect an optical mirror; The plane adjustment component (300) is used to adjust the position of the installation component (200) in a first direction and a second direction, and the leveling component (400) is used to adjust the pitch angle of the installation component (200) relative to a reference plane; The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the reference plane.

2. The adjustment device for an optical mirror according to claim 1, characterized in that: The plane adjustment component (300) comprises a first adjustment plate (310), a first adjustment component (320), a second adjustment plate (330) and a second adjustment component (340); The first adjustment plate (310) is movably connected to the fixed support member (100) in the first direction, and the first adjustment assembly (320) is connected to the first adjustment plate (310) and the fixed support member (100) for adjusting the relative position of the first adjustment plate (310) and the fixed support member (100) in the first direction; The second adjustment plate (330) is movably connected to the first adjustment plate (310) in the second direction, and the second adjustment assembly (340) is connected to the second adjustment plate (330) and the first adjustment plate (310) for adjusting the relative position of the second adjustment plate (330) and the fixed support member (100) in the second direction.

3. The adjustment device for an optical mirror according to claim 2, characterized in that: A first guide groove (101) is provided on one of the first adjustment plate (310) and the fixed support member (100), and a first guide platform (311) is provided on the other of the first adjustment plate (310) and the fixed support member (100), the first adjustment plate (310) and the fixed support member (100) are in surface contact with each other, and the first guide platform (311) is slidably embedded in the first guide groove (101), and the first guide platform (311) and the first guide groove (101) both extend in the first direction; A second guide groove (312) is provided on one of the second adjustment plate (330) and the first adjustment plate (310), and a second guide platform (331) is provided on the other of the second adjustment plate (330) and the first adjustment plate (310). The second adjustment plate (330) and the first adjustment plate (310) are in surface contact with each other, and the second guide platform (331) is slidably embedded in the second guide groove (312), and the second guide platform (331) and the second guide groove (312) both extend in the second direction.

4. The adjustment device for an optical mirror according to claim 3, characterized in that: The surfaces of the first guide platform (311), the first guide groove (101), the second guide platform (331) and the second guide groove (312) are precision-machined surfaces; The surfaces opposite to each other of the first adjustment plate (310) and the fixed support member (100), and the surfaces opposite to each other of the second adjustment plate (330) and the first adjustment plate (310) are precision-machined surfaces.

5. The adjustment device for an optical mirror according to claim 3, characterized in that: The first adjustment assembly (320) comprises a first bolt seat (321), two first adjustment bolts (322) and a second bolt seat (323), wherein the first bolt seat (321) is fixed to one side of the fixing support member (100) in the first direction and extends to be opposite to one side of the first adjustment plate (310) in the first direction, and the second bolt seat (323) is fixed to the first adjustment plate (310) and extends to correspond to the first bolt seat (321); One of the two first adjusting bolts (322) is threadedly connected to the first bolt seat (321) for abutting against and pushing the first adjusting plate (310), and the other of the two first adjusting bolts (322) is threadedly connected to the second bolt seat (323) for abutting against the first bolt seat (321) to fix the first adjusting plate (310).

6. The adjustment device for an optical mirror according to claim 5, characterized in that: The first adjusting bolt (322) comprises a first bolt body and a first bushing (3221), and the first bushing (3221) is sleeved on the outer circumference of the first bolt body.

7. The adjustment device for an optical mirror according to claim 5, characterized in that: The first adjusting bolt (322) includes a first bolt body, and the first bolt body includes a first threaded member (3222) and a first ball head (3223), wherein the first ball head (3223) is located at the end of the first threaded member (3222), and the first ball head (3223) of one of the two first adjusting bolts (322) is used to abut against the first adjusting plate (310), and the first ball head (3223) of the other one of the two first adjusting bolts (322) is used to abut against the first bolt seat (321).

8. The adjustment device for an optical mirror according to claim 3, characterized in that: The second adjustment assembly (340) comprises a third bolt seat, two second adjustment bolts and a fourth bolt seat, wherein the third bolt seat is fixed to one side of the first adjustment plate (310) in the second direction and extends to be opposite to one side of the second adjustment plate (330) in the second direction, and the fourth bolt seat is fixed to the second adjustment plate (330) and extends to correspond to the third bolt seat; One of the two second adjusting bolts is threadedly connected to the third bolt seat for abutting and pushing the second adjusting plate (330), and the other of the two second adjusting bolts is threadedly connected to the fourth bolt seat for abutting the third bolt seat to fix the second adjusting plate (330).

9. The adjustment device for an optical mirror according to claim 8, characterized in that: The second adjusting bolt includes a second bolt body and a second bushing, and the second bushing is sleeved on the outer circumference of the second bolt body.

10. A method for adjusting an optical mirror, characterized in that: An adjustment device for an optical mirror as claimed in any one of claims 1 to 9, comprising: Mounting the optical mirror on the mounting assembly and projecting the detection light onto the optical mirror; The position of the mounting assembly in the first direction and the second direction is adjusted by a plane adjustment assembly, and the pitch angle of the mounting assembly relative to the reference plane is adjusted by a leveling assembly until the reflected light of the optical mirror is vertically projected to the central area of ​​the part to be detected.

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