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65results about How to "High graphic precision" patented technology

K/Ka dual-band common-aperture antenna array

The invention discloses a K/Ka dual-band common-aperture antenna array, aiming to provide an antenna array surface capable of reducing the antenna profile, covering K and Ka bands and sharing a dual-band aperture. The invention is implemented by the following technical schemes: K-band patches are distributed on a dielectric substrate in the form of a uniform rectangular array, Ka-band patches areinterspersed in the center of the interval of adjacent K-band patches in an interpolation manner, the K-band patches are in orthogonal connection with a bonding pad located on the bottom surface of the dielectric substrate through a feeder pillar that penetrates through the dielectric substrate, the bonding pad is connected with a coaxial feeder, and the coaxial feeder penetrates through a metal base plate to connect with the bonding pad and feeds in a touch-type connection manner, wherein the K-band patches are combined with the metal base plate through the feeder pillar to form a K-band antenna array surface, the feeder pillar is connected with the coaxial feeder through the bonding pad to form a K-band channel; and the Ka-band patches are combined with the metal base plate through the feeder pillar to form a Ka-band antenna array surface, and the feeder pillar and the bonding pad conduct the coaxial feeder to form a Ka-band channel.
Owner:10TH RES INST OF CETC

Magnetic ink and preparation method for ink-jet printing flexible electromagnetic wave absorption film

The invention discloses magnetic ink, and relates to an electronic material technology. The magnetic ink comprises a solvent and a solute, wherein the solvent consists of ethanol, isopropanol and deionized water in a volume ratio of A: B: C, wherein A is more than or equal to 1 and less than or equal to 4, B is more than or equal to 1 and less than or equal to 3, and C is more than or equal to 6 and less than or equal to 12; the solute comprises nano magnetic granules, dispersant, connecting agent, surfactant, wetting agent and defoaming agent; the mass ratio of the nano magnetic granules to the dispersant is x: y, wherein x is more than or equal to 4 and less than or equal to 25, and y is more than or equal to 1 and less than or equal to 3; the ratio of the solvent: the connecting agent: the surfactant: the wetting agent: the defoaming agent is a: b: c: d: e, wherein a is more than or equal to 86.95 and less than or equal to 99.199, b is more than or equal to 0.3 and less than or equal to 5, c is more than or equal to 0.5 and less than or equal to 5, d is more than or equal to 0 and less than or equal to 3, and e is more than or equal to 0.001 and less than or equal to 0.05; and the ratio of the mass of the nano magnetic granules to the volume of the solvent is 0.002 to 0.02 gram per milliliter. The method realizes low-cost production of the large-area electromagnetic wave absorption film and preparation of flexible wave absorption films with high output graph precision, clear graph boundary, uniform distribution and various complex components and images.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA

Three-dimensional ceramic substrate comprising cavity structure and fabrication method of three-dimensional ceramic substrate

The invention discloses a three-dimensional ceramic substrate comprising a cavity structure. The three-dimensional ceramic substrate comprises a planar ceramic substrate and the cavity structure attached onto the planar ceramic substrate. The invention also discloses a fabrication method of the three-dimensional ceramic substrate. The fabrication method comprises the steps of firstly, fabricating the planar ceramic substrate with a surface comprising a metal circuit, designing and fabricating a die according to the cavity structure and the size requirement, and fabricating low-temperature cured ceramic paste; secondly, combining the die after the planar ceramic substrate and a plastic die are aligned, and uniformly filling the ceramic paste in a die cavity by modes such as mechanical vibration, pressure injection or vacuum pumping; and finally, allowing to stand for 15-60 minutes under a room temperature or a low temperature (lower than 100 DEG C), and removing the die after the paste is cured. The three-dimensional ceramic substrate has good thermal resistance, corrosion resistance and sealing performance; and the fabrication method of the three-dimensional ceramic substrate has the advantages of low material cost, simple process and high pattern accuracy, particularly, the ceramic paste can be cured under the room temperature or the temperature lower than 100 DEG C, and the hermetical package demands of white-light LED, ultraviolet-light LED and other electrical devices are satisfied.
Owner:武汉利之达科技股份有限公司

An integrated photoelectric receiving module containing a low noise amplifier and a production process thereof

The invention provides an integrated photoelectric receiving module containing a low noise amplifier and a production process thereof. The module adopts the design of a hybrid integration structure ofa high-speed photodiode die and a low noise amplifier chip; compared with a split structure, the structure has the advantages that the size is reduced, the radio frequency performance is improved andthe reliability is improved. The hybrid integration process is a common-substrate micro-assembly process and the high-speed photodiode die, the low noise amplifier chip and micro-strip lines are aligned, bonded and baked at a time through an epoxy silver glue process, and the process is simple, the process time is reduced and the process efficiency is high; a hybrid integration circuit substrateis made of AlN substrate material with good surface finish and high thermal conductivity; the hybrid integration circuit substrate adopts a thin film circuit process and a gold wire wedge welding process is utilized for welding, so that the influence of parasitic inductance is effectively reduced and the requirement of high-speed module packaging is better satisfied; the whole packaging structureis simple and practical in design, is high in process production feasibility and is suitable for batch production.
Owner:重庆霓扬科技有限责任公司

Method utilizing ultraviolet oxidation in implementing and regulating graphene film patterning

Provided in the invention is a method for utilizing ultraviolet oxidation in implementing and regulating graphene film patterning, comprising: a step 1: utilizing a xenon lamp excimer ultraviolet oxidation method and a hard mask in implementing graphene film microstructure graphic patterning; a step 2: by applying a nonuniform magnetic field in the perpendicular direction to the surface of a graphene film, controlling oxygen excitons to move in the direction of the magnetic field towards the graphene film, thus enhancing the directionality of etching the graphene film in the perpendicular direction, and increasing the quality of graphene film microstructure patterning; and a step 3: by adjusting the strength and direction of the magnetic field (such as in the horizontal direction), controlling the directionality of the movement of the oxygen excitons, and regulating the shape being etched on the graphene film graphic structure, thus achieving the goal of regulating graphene film patterning. The method of the invention implements and regulates a micrometer graphic structure array, is suitable for large-area graphene film patterning, free of photoresist contamination, and inexpensive, and provides a patterned graphene film of high quality.
Owner:SHANGHAI JIAO TONG UNIV

Method and device for realizing patterning of graphene film by magnetic field assisted ultraviolet oxidation

The invention provides a method for realizing patterning of a graphene film by magnetic field assisted ultraviolet oxidation. The method comprises the following steps of step 1, placing a magnetic field generator on a sample holder (8) of ultraviolet oxidation vacuum equipment, adjusting a magnetic field of the ultraviolet oxidation vacuum equipment to a preset magnetic field, wherein the preset magnetic field is a magnetic field in a reaction chamber, and the gradient direction of the magnetic field in the reaction chamber is perpendicular to the sample holder (8); step 2, placing a sample (13) with mask plates (14) placed on the surface on the sample holder (8), and adjusting the distance between the sample holder (8) and light sources (6) to preset distance; and step 3, discharging airin the reaction chamber (1). According to the method, by utilizing the magnetic field assisted ultraviolet light oxidation method, taking water molecules as oxidation sources, and applying a non-uniform magnetic field in the vertical direction to the surface of the sample, paramagnetic OH (X<2>II) free radicals generated by ultraviolet light are controlled do directional movement, and have an enhanced oxidation etching effect.
Owner:SHANGHAI JIAO TONG UNIV

Method for preparing grating with submicron structure

The invention discloses a method for preparing a grating with a submicron structure, which belongs to the technical field of microstructures in semiconductors, and particularly comprises the followingsteps of: spin-coating an electron beam resist on a silicon wafer, and performing electron beam exposure to obtain an electron beam resist layer; performing dry etching by taking the electron beam resist layer as a mask to prepare a nanoimprint template; transferring the submicron structure on the nanoimprint template to a thermocuring transparent soft film; spin-coating an ultraviolet curing imprinting adhesive on the substrate for preparing the grating; transferring the submicron structure on the thermocuring transparent soft film to an ultraviolet curing imprinting adhesive through a nanoimprinting method; and transferring the submicron pattern on the ultraviolet curing impressing adhesive to a substrate for preparing the grating by using a dry etching method. The nanoimprint templateprepared through electron beam exposure and dry etching is high in pattern precision and smooth in surface. The sub-micron structure grating prepared through soft film transfer printing, nanoimprint lithography and dry etching is good in uniformity, high in yield, accurate in size and low in cost.
Owner:HUAZHONG UNIV OF SCI & TECH

Semiconductor structure and forming method thereof

The invention discloses a semiconductor structure and a forming method thereof. The forming method comprises the steps of providing a substrate, and forming a to-be-etched layer on the substrate, forming a core layer and a plurality of sacrificial layers located in the core layer on the to-be-etched layer, and enabling the sacrificial layers to be arranged at intervals, removing part of the core layer between the adjacent sacrificial layers to form a first groove penetrating through the core layer, and exposing the sacrificial layers from the side wall of the first groove, carrying out first ion doping treatment on the core layer of the side wall of the first groove, wherein the first ion doping treatment is suitable for increasing the etching resistance of the core layer of the side wall of the first groove, forming a side wall on the side wall of the first groove, after first ion doping processing and side wall forming are carried out, removing the sacrificial layer, forming a second groove penetrating through the core layer, and isolating the second groove and the first groove by a side wall, and etching the to-be-etched layers at the bottoms of the first groove and the second groove by taking the core layer and the side walls as masks. According to the embodiment of the invention, the probability that the core layer on the side wall of the first groove is mistakenly etched in the step of removing the sacrificial layer is reduced.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Method for producing grey mask

PURPOSE: A manufacturing method of a gray tone mask is provided to improve preciseness with a simplified imaging process, and thus to ensure the quality of the resulted product, while reducing imaging processing time, through only single number of imaging process, thereby being suitably used in TFT-LCD. CONSTITUTION: The manufacturing method of a gray tone mask comprised of a light shield part, projection part, a transmission part and a semi-transmission part comprises: preparing a mask blank where at least a semi-transmission film(22) and a light shield part(23) are formed in this order on a transparent substrate(21); forming a resist film(24) on the mask blank; light exposing the resist film in order to expose patterns that are below the resolution limit of a light exposure device to the part forming the semi-transmission part of the resist film; developing the resist film and forming resist patterns(24a) in a way that the residual film values become different between the part forming the light shield part and the part forming the semi-transmission part; etching the light shield film(23a) and semi-transmission film with the resist patterns as a mask to form the transmission part; removing only resist patterns present on the semi-transmission part; and etching a part of the light shield film and the semi-transmission film with the residual resist patterns as a mask to form the semi-transmission part(22a).
Owner:HOYA CORP

TFT circuit substrate production process

The invention relates to the technical field of circuit substrate production, and discloses a TFT circuit substrate production process. The process comprises the following steps: selecting a base material which is made of glass or ceramic; carrying out surface treatment on the base material, and sputtering a transition metal thin layer on the surface of the base material through a vacuum sputtering method; pasting a high-resolution exposure dry film on the surface of the transition metal thin layer, and exposing a shadow line pattern on the base material through an exposure machine; electroplating a circuit pattern on the base material through pulse electroplating, removing the exposure dry film, removing the transition metal thin layer formed by vacuum sputtering, and performing gold immersion or other protection treatment on the circuit surface on the base material; and cutting the base material into a required size by a laser to obtain a finished product. The base material made of glass or ceramic materials with good dimensional stability is selected, meanwhile, the circuit pattern is manufactured through a vacuum sputtering method, pattern precision is high, glass or ceramic is used as the base material, heat generated by long-term work of a product can be effectively dissipated, and the service life of the product is prolonged.
Owner:深圳市昱安旭瓷电子科技有限公司

Etching solution for use in wet etching of bismuth-based thin films

Aiming at the technical problem that aqueous solution of HF, serving as etching solution, cannot etch a bismuth-based thin film material, nor ensure the accuracy of patterns, the invention provides etching solution for use in the wet etching of bismuth-based thin films, belongs to the technical field of materials and relates to micro machining technology, in particular to etching solution for use in a photoetching process. The etching solution is mixed solution comprising HF serving as an etching agent, NH4F serving as a complexing agent and H2O serving as a diluting agent in a molar ratio of 1: (0.5-1.5): (1.26-5.5). To enhance the etching effect of the etching solution on the bismuth-based thin film material and increase etching speed, HNO3 serving as an assistant can be added into the etching solution, wherein the ratio of the HF to the NH4F to the HNO3 to the H2O is 1: (0.5-1.5): (0.36-1.6): (1.26-5.5). The wet etching of the bismuth-based thin film material by the etching solution has the advantages of clean etched surface, clear patterns, high precision and no residual precipitate. After the HNO3 assistant is added, the speed of the wet etching of the bismuth-based thin films is increased, and the etching process and the pattern precision can be controlled effectively.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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