Method for producing grey mask
A technology of gray-tone mask and manufacturing method, which is applied in the photoengraving process of the pattern surface, the manufacture of semiconductor/solid-state devices, the original for opto-mechanical processing, etc. Calibrate offsets, reduce time, ensure quality results
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[0037] Hereinafter, embodiments of the present invention will be described in detail.
[0038] figure 1 This is a schematic cross-sectional view showing the first embodiment of the method for producing a gray-tone mask of the present invention, and showing the production steps in the order of the steps.
[0039] The mask blanks used in this embodiment are as figure 1 As shown in (a), a semi-transparent film 22 and a light-shielding film 23 are sequentially formed on a transparent substrate 21 such as quartz. Here, as the material of the light-shielding film 23, a thin film and a material capable of obtaining high light-shielding properties are preferable, and examples thereof include Cr, Si, W, Al, and the like. In addition, as the material of the semi-transparent film 22, a thin film is preferable and a semi-transmissive material having a transmittance of about 50% is obtained when the transmittance of the light-shielding portion is 0%. oxides, nitrides, oxynitrides, flu...
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