Liquid supply device

Abstract

The invention relates to a liquid supply device. The liquid supply device comprises a box body which is provided with an accommodating cavity and an inlet / outlet communicated with the accommodating cavity; the door opening and closing mechanism is arranged at the inlet and outlet of the box body and is constructed to controllably open or close the inlet and outlet; the conveying mechanism is arranged in the containing cavity and used for loading the stock solution barrel, and the conveying mechanism is constructed to controllably convey the stock solution barrel to enter or exit from the containing cavity through the inlet and outlet; and the liquid supply unit is arranged in the accommodating cavity and is used for extracting the stock solution in the stock solution barrel. Thus, according to the liquid supply device, the raw liquid barrel is taken out and fed in through cooperation of the door opening and closing mechanism, the conveying mechanism and the like, manual operation is not needed, the labor intensity of workers is greatly reduced, the automation degree is improved, and the requirements of intelligent factories can be better met.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a liquid supply device. Background Art

[0002] The semiconductor industry requires a variety of chemical liquids. For example, in the semiconductor wet cleaning process, a liquid supply device is required to provide chemical liquid for etching the surface of the wafer. The liquid supply device is used to extract the chemical liquid in the stock liquid barrel and transport it to a designated location. When the chemical liquid in the stock liquid barrel is used up or needs to be replaced with a different type of stock liquid, the stock liquid barrel needs to be taken out of the liquid supply device, and then the replaced stock liquid barrel is sent to the liquid supply device. In the prior art, the removal and delivery of the stock liquid barrel need to be done manually, which greatly reduces the degree of automation and cannot meet the needs of smart factories. Summary of the invention

[0003] Based on this, it is necessary to provide a liquid supply device that can improve the degree of automation and better meet the needs of smart factories in order to address the above problems.

[0004] A liquid supply device, comprising:

[0005] The box body has a receiving cavity and an inlet and outlet communicated with the receiving cavity;

[0006] A door opening and closing mechanism, arranged at the inlet and outlet of the box body and configured to controllably open or close the inlet and outlet;

[0007] A conveying mechanism, disposed in the receiving chamber, for loading a raw liquid barrel, the conveying mechanism being configured to controllably convey the raw liquid barrel into or out of the receiving chamber through the inlet and outlet; and

[0008] The liquid supply unit is arranged in the receiving cavity and is used for extracting the raw liquid in the raw liquid barrel.

[0009] In some embodiments, the liquid supply unit includes a liquid supply pipeline and a dip tube connected to the liquid supply pipeline, and the dip tube is used to be inserted into the raw liquid barrel and extract the raw liquid in the raw liquid barrel;

[0010] The liquid supply device also includes a cleaning mechanism and a plug-in mechanism. The cleaning mechanism is arranged in the receiving cavity. The plug-in mechanism is used to transfer the dip tube between the raw liquid barrel and the cleaning mechanism. The cleaning mechanism is used to clean the dip tube.

[0011] In some embodiments, the cleaning mechanism includes a first slot plate, a second slot plate and a plurality of nozzles, the first slot plate and the second slot plate are both fixedly installed in the receiving cavity, and the first slot plate and the second slot plate together enclose a cleaning space, and the nozzle is installed on a side of the first slot plate and / or the second slot plate facing the cleaning space;

[0012] The plug-in and pull-out mechanism is used to insert the dip tube into the cleaning space or pull it out from the cleaning space, and each of the nozzles is used to spray cleaning liquid onto the dip tube in the cleaning space.

[0013] In some embodiments, the first slot plate has a first collecting groove on a side facing the cleaning space, and the second slot plate has a second collecting groove on a side facing the cleaning space;

[0014] The cleaning mechanism further includes a drainage pipeline, which is connected to the first collecting groove of the first groove plate and the second collecting groove of the second groove plate, and is used for discharging the cleaning liquid in the first collecting groove and the second collecting groove.

[0015] In some embodiments, the first collecting groove extends along the longitudinal direction of the first slot plate, and the longitudinal direction of the first slot plate is inclined relative to the vertical direction, so that the cleaning liquid entering the first collecting groove flows along the first collecting groove toward the bottom end of the first slot plate;

[0016] The liquid discharge pipeline is connected to the first collecting tank at the bottom end of the first tank plate.

[0017] In some embodiments, the second collecting groove extends along the longitudinal direction of the second slot plate, and the longitudinal direction of the second slot plate is inclined relative to the vertical direction, so that the cleaning liquid entering the second collecting groove flows along the second collecting groove toward the bottom end of the second slot plate;

[0018] The liquid discharge pipeline is communicated with the second collecting tank at the bottom end of the second tank plate.

[0019] In some embodiments, the cleaning mechanism further includes a first delivery pipe mounted on the first slot plate and a second delivery pipe mounted on the second slot plate;

[0020] The first delivery pipe and the second delivery pipe are used to deliver cleaning liquid, and a plurality of the nozzles are installed on the first delivery pipe and the second delivery pipe.

[0021] In some of the embodiments, the liquid supply device includes a tube collecting mechanism, the tube collecting mechanism is connected to the liquid supply pipeline, and the tube collecting mechanism is constructed to controllably drive the liquid supply pipeline to move and / or rotate.

[0022] In some embodiments, the conveying mechanism is provided in two, and each conveying mechanism is used for independently loading and conveying the raw liquid barrel.

[0023] In some of the embodiments, the conveying mechanism is a roller conveyor.

[0024] In the actual use of the above-mentioned liquid supply device, when the raw liquid in the raw liquid barrel is used up or needs to be replaced with a different type of raw liquid, first, the door opening and closing mechanism is controlled to open the inlet and outlet of the box, and the conveying mechanism is controlled to send the raw liquid barrel out from the inlet and outlet; then, the raw liquid barrel on the conveying mechanism is replaced by an external device; then, the conveying mechanism is controlled to input the replaced raw liquid barrel into the receiving cavity of the box from the inlet and outlet; then, the door opening and closing mechanism is controlled to close the inlet and outlet of the box, and the liquid supply unit can extract the raw liquid in the raw liquid barrel. In this way, the liquid supply device in the present application realizes the removal and delivery of the raw liquid barrel by the cooperation of the door opening and closing mechanism and the conveying mechanism, etc., without manual operation, which greatly reduces the labor intensity of workers, improves the degree of automation, and can better meet the needs of smart factories. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the structure of a liquid supply device in one embodiment of the present application (a state in which the opening and closing door mechanism closes the inlet and outlet);

[0026] Figure 2 for Figure 1 The structural schematic diagram of the liquid supply device shown (the state where the switch door mechanism opens the inlet and outlet);

[0027] Figure 3 for Figure 2 A front view of the liquid supply device shown;

[0028] Figure 4 for Figure 3 A schematic structural diagram of a cleaning mechanism of a liquid supply device shown;

[0029] Figure 5 for Figure 3 The structural schematic diagram of the pipe collecting mechanism of the liquid supply device is shown. DETAILED DESCRIPTION

[0030] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0034] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0036] See also Figures 1 to 3 The present application provides a liquid supply device, including a box body 10, a door opening and closing mechanism 20, a conveying mechanism 30 and a liquid supply unit 40. The box body 10 has a receiving chamber 11 and an inlet and outlet 13 connected to the receiving chamber 11. The door opening and closing mechanism 20 is arranged at the inlet and outlet 13 of the box body 10, and is configured to controllably open or close the inlet and outlet 13. The conveying mechanism 30 is arranged in the receiving chamber 11, and is used to load a raw liquid barrel A. The conveying mechanism 30 is also configured to controllably convey the raw liquid barrel A into or out of the receiving chamber 11 through the inlet and outlet 13. The liquid supply unit 40 is arranged in the receiving chamber 11, and is used to extract the raw liquid in the raw liquid barrel A, and convey the extracted raw liquid to a designated position.

[0037] In the actual use of the above-mentioned liquid supply device, when the raw liquid in the raw liquid barrel A is used up or needs to be replaced with a different type of raw liquid, first, the door opening and closing mechanism 20 is controlled to open the inlet and outlet 13 of the box body 10, and the conveying mechanism 30 is controlled to send the raw liquid barrel A out from the inlet and outlet 13; then, the raw liquid barrel A on the conveying mechanism 30 is replaced by an external device; then, the conveying mechanism 30 is controlled to input the replaced raw liquid barrel A into the receiving cavity 11 of the box body 10 from the inlet and outlet 13; then, the door opening and closing mechanism 20 is controlled to close the inlet and outlet 13 of the box body 10, and the liquid supply unit 40 can extract the raw liquid in the raw liquid barrel A. In this way, the liquid supply device in the present application realizes the removal and delivery of the raw liquid barrel A by the cooperation of the door opening and closing mechanism 20 and the conveying mechanism 30, etc., without manual operation, which greatly reduces the labor intensity of workers, improves the degree of automation, and can better meet the needs of smart factories.

[0038] Specifically in the embodiment, the switch door mechanism 20 includes a switch door and a drive assembly. The switch door is arranged at the inlet and outlet 13 of the box body 10. The drive assembly is arranged on the box body 10 and is connected to the switch door drive. The drive assembly is used to drive the switch door to close or open the inlet and outlet 13 of the box body 10. It should be noted that under the power provided by the drive assembly, the switch door can open or close the inlet and outlet 13 of the box body 10 by moving, retracting or rewinding, etc., which is not limited here. The drive assembly can be a cylinder, an electric cylinder, a motor, etc., as long as it can provide power to drive the switch door to close or open the inlet and outlet 13, which is not limited here.

[0039] In an embodiment of the present application, the liquid supply unit 40 includes a liquid supply pipeline 41 and a suction tube 43 connected to the liquid supply pipeline 41. The suction tube 43 is used to be inserted into the raw liquid barrel A and extract the raw liquid in the raw liquid barrel A. The liquid supply device also includes a cleaning mechanism 50 and a plug-in mechanism (not shown), and the cleaning mechanism 50 is arranged in the receiving chamber 11. The plug-in mechanism is arranged outside the box body 10, and is used to transfer the suction tube 43 between the raw liquid barrel A and the cleaning mechanism 50. The cleaning mechanism 50 is used to clean the suction tube 43 when the plug-in mechanism transfers the suction tube 43 to the cleaning mechanism 50. In this way, in actual use, before the raw liquid barrel A is sent out of the box body 10, the suction tube 43 inserted in the raw liquid barrel A is pulled out by the plug-in mechanism, and the pulled-out suction tube 43 is transferred to the cleaning mechanism 50 for cleaning. After the replaced raw liquid barrel A is sent into the box body 10, the cleaned suction tube 43 is inserted into the raw liquid barrel A by using the plug-in mechanism, so as to prevent the residue on the suction tube 43 from contaminating the raw liquid in the raw liquid barrel A. It should be noted that the plug-in mechanism can be an automated mechanism such as a manipulator, as long as it can complete the actions of plugging and unplugging the suction tube 43 and transferring the suction tube 43, and is not limited here.

[0040] See also Figure 3 and Figure 4 Specifically, in the embodiment, the cleaning mechanism 50 includes a first slot plate 51, a second slot plate 52 and a plurality of nozzles 54. The first slot plate 51 and the second slot plate 52 are both fixedly mounted in the receiving cavity 11 of the box body 10, and the first slot plate 51 and the second slot plate 52 together enclose a cleaning space 53. The nozzles 54 are mounted on the side of the first slot plate 51 and / or the second slot plate 52 facing the cleaning space 53. The above-mentioned plug-in mechanism is used to insert the dip tube 43 into the cleaning space 53 or to pull it out from the cleaning space 53, and each nozzle 54 is used to spray cleaning liquid to the dip tube 43 in the cleaning space 53, so as to achieve the purpose of cleaning the dip tube 43.

[0041] Optionally, a bracket is fixedly installed in the receiving cavity 11 of the box body 10, and the first slot plate 51 and the second slot plate 52 are both fixedly installed on the bracket, so as to achieve fixed installation of the first slot plate 51 and the second slot plate 52.

[0042] Specifically in the embodiment, the first slot plate 51 has a first collecting groove (not marked in the figure) on the side facing the cleaning space 53, and the second slot plate 52 has a second collecting groove (not marked in the figure) on the side facing the cleaning space 53. The cleaning mechanism 50 also includes a drainage pipeline 57. The drainage pipeline 57 is connected to the first collecting groove of the first slot plate 51 and the second collecting groove of the second slot plate 52, and is used to discharge the cleaning liquid in the first collecting groove and the second collecting groove. In this way, when the dip tube 43 is cleaned, each nozzle 54 sprays cleaning liquid to the dip tube 43 in the cleaning space 53, and a part of the sprayed cleaning liquid enters the first collecting groove of the first slot plate 51, and the other part enters the second collecting groove of the second slot plate 52. The cleaning liquid entering the first collecting groove and the second collecting groove is discharged by the drainage pipeline 57, so as to avoid the cleaning liquid in the first collecting groove and the second collecting groove from overflowing due to being full.

[0043] It should be noted that the specific structure of the drainage pipeline 57 is not limited here, as long as it can discharge the cleaning liquid in the first collecting tank and the second collecting tank.

[0044] Furthermore, the first collecting groove extends along the longitudinal direction of the first slot plate 51, and the longitudinal direction of the first slot plate 51 is inclined relative to the vertical direction, so that the cleaning liquid entering the first collecting groove flows along the first collecting groove to the bottom end of the first slot plate 51 under the action of gravity. The drainage pipeline 57 is connected to the first collecting groove at the bottom end of the first slot plate 51, so that the drainage pipeline 57 can drain the cleaning liquid in the first collecting groove as much as possible, avoiding the phenomenon that the cleaning liquid in the first collecting groove cannot be drained.

[0045] Furthermore, the second collecting groove extends along the longitudinal direction of the second slot plate 52, and the longitudinal direction of the second slot plate 52 is inclined relative to the vertical direction, so that the cleaning liquid entering the second collecting groove flows along the second collecting groove to the bottom end of the second slot plate 52 under the action of gravity. The drainage pipeline 57 is connected to the second collecting groove at the bottom end of the second slot plate 52, so that the drainage pipeline 57 can drain the cleaning liquid in the second collecting groove as much as possible, avoiding the phenomenon that the cleaning liquid in the second collecting groove cannot be drained.

[0046] Specifically in the embodiment, the cleaning mechanism 50 also includes a first delivery pipe 55 installed on the first slot plate 51 and a second delivery pipe 56 installed on the second slot plate 52. The first delivery pipe 55 and the second delivery pipe 56 are used to communicate with an external cleaning liquid source to deliver the cleaning liquid provided by the cleaning liquid source. A plurality of nozzles 54 are installed on the first delivery pipe 55 and the second delivery pipe 56, so that the cleaning liquid in the first delivery pipe 55 is sprayed out from each nozzle 54 on the first delivery pipe 55, and the cleaning liquid in the second delivery pipe 56 is sprayed out from each nozzle 54 on the second delivery pipe 56.

[0047] It should be noted that, since the dip tube 43 is connected to the liquid supply pipeline 41, the plug-in mechanism will pull the liquid supply pipeline 41 when transferring the dip tube 43, thereby affecting the transfer of the dip tube 43. In order to avoid the liquid supply pipeline 41 interfering with the transfer of the dip tube 43, in some embodiments, see Figure 3 and Figure 5 The liquid supply device further includes a tube collecting mechanism 60, which is connected to the liquid supply pipeline 41 of the liquid supply unit 40. The tube collecting mechanism 60 is configured to controllably drive the liquid supply pipeline 41 to move and / or rotate, so as to cooperate with the plug-in mechanism to transfer the dip tube 43, and to prevent the liquid supply pipeline 41 from interfering with the transfer of the dip tube 43 due to the involvement of the dip tube 43 by the plug-in mechanism during the transfer of the dip tube 43.

[0048] Optionally, the tube collecting mechanism 60 includes a tube collecting drive 61 and a tube collecting rack 62, and the tube collecting drive 61 is fixedly installed in the receiving chamber 11 of the box body 10. The tube collecting rack 62 is installed at the driving end of the tube collecting drive 61, so that the tube collecting drive 61 can drive the tube collecting rack 62 to move and / or rotate. The liquid supply pipeline 41 is connected to the tube collecting rack 62, so that the liquid supply pipeline 41 moves and / or rotates with the tube collecting rack 62, so that the liquid supply pipeline 41 cooperates with the plug-in mechanism to transfer the suction tube 43. It should be noted that the tube collecting drive 61 can adopt a drive such as a cylinder that can provide a moving or rotating power, as long as it can drive the tube collecting rack 62 to move and / or rotate, and is not limited here.

[0049] Please see again Figure 2 and Figure 3 In the embodiment of the present application, there are two conveying mechanisms 30, and each conveying mechanism 30 is used to independently load and convey the stock liquid barrel A. That is to say, two conveying mechanisms 30 are arranged in the receiving chamber 11 of the box body 10, and each conveying mechanism 30 can be loaded with a stock liquid barrel A, so two stock liquid barrels A are arranged in the receiving chamber 11 of the box body 10. The liquid supply unit 40 can selectively extract the stock liquid in any stock liquid barrel A. In this way, in actual use, different types of stock liquids can be stored in the two stock liquid barrels A, and the liquid supply unit 40 selectively extracts the stock liquid in one of the stock liquid barrels A according to demand.

[0050] It should be noted that each conveying mechanism 30 can convey the raw liquid barrel A thereon to enter or exit the receiving chamber 11 of the box body 10 through the inlet and outlet 13, thereby ensuring that the raw liquid barrel A on each conveying mechanism 30 can be automatically replaced.

[0051] It should be noted that the conveying mechanism 30 can be a roller conveyor. Specifically, the conveying mechanism 30 includes a mounting frame, a plurality of rollers and a motor. The mounting frame is fixedly mounted in the receiving chamber 11 of the box body 10, and each roller is rotatably connected to the mounting frame around its own axis. The rollers are parallel to each other and arranged in sequence along a preset direction, and the raw liquid barrel A is supported on the roller. Each adjacent two rollers are connected by a transmission component, so that when one of the rollers rotates, it can drive the other roller to rotate together. The motor is connected to any one of the rollers to drive the roller to rotate around its own axis relative to the mounting frame. In this way, when the motor drives the roller connected to it to rotate, the roller drives the other rollers to rotate together, thereby driving the raw liquid barrel A supported on the roller to move in the preset direction, so that the raw liquid barrel A enters or exits the receiving chamber 11 of the box body 10 from the inlet and outlet 13. Further, the transmission connection between the adjacent two rollers can be achieved by means of gears or synchronous belts.

[0052] Specifically in the embodiment, the conveying mechanism 30 further includes a positioning mechanism 70 installed on the mounting frame. The positioning mechanism 70 is used to position the raw liquid barrel A on the conveying mechanism 30. In this way, after the conveying mechanism 30 inputs the raw liquid barrel A on it into the receiving cavity 11 of the box body 10 through the inlet and outlet 13, the raw liquid barrel A on the conveying mechanism 30 is positioned by the positioning mechanism 70, which ensures that the position accuracy of the raw liquid barrel A meets the process requirements on the one hand; on the other hand, it prevents the raw liquid barrel A from being displaced or shaken when the suction tube 43 is inserted or removed or the raw liquid in the raw liquid barrel A is extracted by the suction tube 43.

[0053] Furthermore, the positioning mechanism 70 includes at least two positioning components mounted on the mounting frame, and the at least two positioning components are respectively arranged on opposite sides of the raw liquid barrel A on the conveying mechanism 30. When the conveying mechanism 30 conveys the raw liquid barrel A to a position between the at least two positioning components, each positioning component abuts against the raw liquid barrel A, thereby fixing the raw liquid barrel A.

[0054] Optionally, the positioning assembly includes a positioning drive and a positioning block, wherein the positioning drive is mounted on a mounting frame, and the positioning block is mounted on a driving end of the positioning drive. The positioning drive is used to drive the positioning block to abut against or separate from the raw liquid barrel A. In this way, when the conveying mechanism 30 conveys the raw liquid barrel A between each positioning assembly, the positioning drive drives the positioning block to abut against the raw liquid barrel A, so that the raw liquid barrel A is fixed between each positioning block, that is, the positioning of the raw liquid barrel A is achieved. When it is not necessary to position the raw liquid barrel A, each positioning drive drives the positioning block to separate from the raw liquid barrel A, thereby releasing the positioning of the raw liquid barrel A. At this time, the conveying mechanism 30 can drive the raw liquid barrel A to enter and exit the accommodating chamber 11 of the box body 10 through the inlet and outlet 13. Optionally, the positioning drive can be a cylinder.

[0055] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A liquid supply device, characterized in that: include: The box body (10) has a receiving chamber (11) and an inlet and outlet (13) communicating with the receiving chamber (11); A door opening and closing mechanism (20) is arranged at the inlet and outlet (13) of the box body (10) and is configured to controllably open or close the inlet and outlet (13); a conveying mechanism (30) disposed in the receiving chamber (11) and used for loading the raw liquid barrel (A); the conveying mechanism (30) is configured to controllably convey the raw liquid barrel (A) through the inlet and outlet (13) into or out of the receiving chamber (11); and The liquid supply unit (40) is arranged in the receiving chamber (11) and is used to extract the raw liquid in the raw liquid barrel (A).

2. The liquid supply device according to claim 1, characterized in that: The liquid supply unit (40) comprises a liquid supply pipeline (41) and a dip tube (43) connected to the liquid supply pipeline (41), wherein the dip tube (43) is used to be inserted into the raw liquid barrel (A) and extract the raw liquid in the raw liquid barrel (A); The liquid supply device further comprises a cleaning mechanism (50) and a plug-in mechanism. The cleaning mechanism (50) is arranged in the receiving cavity (11). The plug-in mechanism is used to transfer the suction tube (43) between the raw liquid barrel (A) and the cleaning mechanism (50). The cleaning mechanism (50) is used to clean the suction tube (43).

3. The liquid supply device according to claim 2, characterized in that: The cleaning mechanism (50) comprises a first slot plate (51), a second slot plate (52) and a plurality of nozzles (54); the first slot plate (51) and the second slot plate (52) are both fixedly mounted in the receiving cavity (11); the first slot plate (51) and the second slot plate (52) together enclose a cleaning space (53); the nozzles (54) are mounted on a side of the first slot plate (51) and / or the second slot plate (52) facing the cleaning space (53); The plug-in and pull-out mechanism is used to insert the dip tube (43) into the cleaning space (53) or to pull it out from the cleaning space (53), and each of the spray heads (54) is used to spray cleaning liquid onto the dip tube (43) in the cleaning space (53).

4. The liquid supply device according to claim 3, characterized in that: The first slot plate (51) has a first collecting groove on one side facing the cleaning space (53), and the second slot plate (52) has a second collecting groove on one side facing the cleaning space (53); The cleaning mechanism (50) further comprises a drainage pipeline (57), wherein the drainage pipeline (57) is connected to the first collecting groove of the first groove plate (51) and the second collecting groove of the second groove plate (52), and is used for discharging the cleaning liquid in the first collecting groove and the second collecting groove.

5. The liquid supply device according to claim 4, characterized in that: The first collecting groove extends along the longitudinal direction of the first groove plate (51), and the longitudinal direction of the first groove plate (51) is inclined relative to the vertical direction, so that the cleaning liquid entering the first collecting groove flows along the first collecting groove toward the bottom end of the first groove plate (51); The liquid discharge pipeline (57) is in communication with the first collecting tank at the bottom end of the first tank plate (51).

6. The liquid supply device according to claim 4, characterized in that: The second collecting groove extends along the longitudinal direction of the second groove plate (52), and the longitudinal direction of the second groove plate (52) is inclined relative to the vertical direction, so that the cleaning liquid entering the second collecting groove flows along the second collecting groove toward the bottom end of the second groove plate (52); The liquid discharge pipeline (57) is in communication with the second collecting trough at the bottom end of the second trough plate (52).

7. The liquid supply device according to claim 4, characterized in that: The cleaning mechanism (50) further comprises a first delivery pipe (55) installed on the first slot plate (51) and a second delivery pipe (56) installed on the second slot plate (52); The first delivery pipe (55) and the second delivery pipe (56) are used to deliver cleaning liquid, and a plurality of the nozzles (54) are installed on each of the first delivery pipe (55) and the second delivery pipe (56).

8. The liquid supply device according to claim 2, characterized in that: The liquid supply device comprises a tube collecting mechanism (60), the tube collecting mechanism (60) being connected to the liquid supply pipeline (41), and the tube collecting mechanism (60) being configured to controllably drive the liquid supply pipeline (41) to move and / or rotate.

9. The liquid supply device according to claim 1, characterized in that: The conveying mechanisms (30) are provided in two numbers, and each conveying mechanism (30) is used to independently load and convey the raw liquid barrel (A).

10. The liquid supply device according to claim 1, characterized in that: The conveying mechanism (30) is a roller conveyor.

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