Temperature adjusting device

Abstract

Provided is a temperature control device which is particularly suitable for use of a circulating liquid at a high temperature when a load is controlled to a high temperature. The temperature adjustment device (1) is provided with a control unit that controls the rotational speeds of the circulation pump (24a) and the cooling pump (23a) on the basis of the measurement results of the discharge-side temperature sensor (33) and the temperature set by the temperature setting unit (7a). The control unit maintains the rotational speed of the circulation pump at a low rotational speed when the temperature of the circulation liquid set by the temperature setting unit is lower than a predetermined threshold temperature, and maintains the rotational speed of the circulation pump at a high rotational speed when the temperature of the circulation liquid set by the temperature setting unit is higher than the predetermined threshold temperature. Furthermore, when the set temperature is increased by the temperature setting unit, the control unit gradually increases the rotational speed of the cooling pump after temporarily decreasing the rotational speed of the cooling pump, and when the set temperature is decreased, the control unit gradually decreases the rotational speed of the cooling pump after temporarily increasing the rotational speed of the cooling pump, and when the temperature of the circulation liquid measured by the discharge-side temperature sensor coincides with the set temperature, the control unit controls the discharge-side temperature sensor to discharge the circulation liquid. And the rotating speed is maintained.

Description

[0001] This invention application is a divisional application of the invention patent application with application date of March 31, 2020, application number 202010240431.0, and invention name “Temperature Control Device”. Technical Field

[0002] The present invention relates to a temperature control device for controlling the temperature of a load to a desired temperature by supplying a temperature-controlled circulating fluid to the load, and more particularly to a temperature control device suitable for controlling the temperature of the load to a high temperature. Background Art

[0003] Temperature control devices that control the temperature of a load to a desired temperature by supplying a temperature-controlled circulating fluid to the load are widely known, for example, as disclosed in Patent Documents 1 and 2. In the temperature control devices disclosed in these patent documents, a circulating fluid circuit that circulates the circulating fluid between the load and a cooling circuit that cools the circulating fluid are provided in parallel, and the circulating fluid circuit and the cooling circuit are connected to each other via a tank and a valve.

[0004] In addition, in semiconductor manufacturing equipment, for example, as shown in Patent Document 2, it is sometimes necessary to control the load to a temperature that greatly exceeds the boiling point (100° C.) of water under atmospheric pressure. Moreover, in such a temperature control device, when the temperature of the circulating fluid is adjusted, the temperature variation range of the circulating fluid becomes very large, or the temperature difference between the circulating fluid and the coolant becomes very large, so the design considering the use of the circulating fluid at high temperature should be performed.

[0005] However, conventional devices have not always taken adequate measures to deal with such high-temperature circulating fluid use. Therefore, when the load is controlled to a high temperature, there is a strong demand for the development of a temperature control device particularly suitable for the use of a circulating fluid at a high temperature.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2004-251486

[0009] Patent Document 2: Japanese Patent Application Publication No. 2015-148399 Summary of the invention

[0010] Problems to be solved by the invention

[0011] An object of the present invention is to provide a temperature control device that is particularly suitable for using a circulating fluid at a high temperature when a load is controlled to be at a high temperature.

[0012] Technical solutions to solve problems

[0013] In order to solve the above technical problems, the temperature control device of the present invention is a temperature control device for adjusting the circulating fluid having a boiling point higher than 100° C. to a temperature higher than 100° C. and supplying the circulating fluid to an external load, thereby controlling the load to a predetermined high temperature. The temperature control device is characterized in that the temperature control device comprises: a tank portion storing the circulating fluid and having a heater for heating the circulating fluid; a discharge flow path connecting the tank portion and a circulating fluid discharge port for delivering the circulating fluid to the load; a circulating pump for delivering the circulating fluid from the tank portion to the discharge flow path; and a return flow path for receiving the circulating fluid returned from the load. The circulating liquid return port is connected to the tank portion; the heat exchanger has a first heat exchange flow path for the circulating liquid to flow and a second heat exchange flow path for the cooling liquid to cool the circulating liquid in the first heat exchange flow path; a cooling circulation outward path supplies circulating liquid from the tank portion to the first heat exchange flow path of the heat exchanger; a cooling circulation return path allows the circulating liquid cooled by the heat exchanger to return from the first heat exchange flow path to the tank portion again; a cooling pump sends circulating liquid from the tank portion to the cooling circulation outward path; a cooling liquid supply path supplies circulating liquid to the second heat exchange flow path of the heat exchanger; The heat exchanger comprises a first heat exchange flow path for introducing cooling liquid; and a cooling liquid discharge path for extracting the cooling liquid after heat exchange from the second heat exchange flow path. In the heat exchanger, the first heat exchange flow path is formed by a spiral flow path portion extending spirally along an axis, an inlet side flow path portion connected to one end of the spiral flow path portion and having a circulating liquid inlet, and an outlet side flow path portion connected to the other end of the spiral flow path portion and having a circulating liquid outlet. The second heat exchange flow path is composed of a flow path space formed in a hollow shell, and the spiral flow path portion of the first heat exchange flow path is accommodated in the second heat exchange flow path in the shell. The heat exchange flow path is connected to the heat exchange flow path of the second heat exchanger, and the inlet side flow path portion and the outlet side flow path portion are led out of the shell, the cooling circulation outflow path is connected to the circulating liquid inlet, the cooling circulation return path is connected to the circulating liquid outlet, the cooling liquid supply path is connected to the second heat exchange flow path through the cooling liquid inlet opened in the shell, and the cooling liquid discharge path is similarly connected to the second heat exchange flow path through the cooling liquid outlet opened in the shell, and the temperature control device has: a discharge side temperature sensor, which is arranged in the discharge flow path, and measures the temperature of the circulating liquid sent to the load;and a control unit including a temperature setting unit for setting the temperature of the circulating fluid delivered to the load, and controlling the rotation speeds of the circulating pump and the cooling pump based on the measurement result of the discharge side temperature sensor and the temperature set by the temperature setting unit, wherein the circulating pump is immersed in the circulating fluid in the tank unit, and the control unit is configured to maintain the rotation speed of the circulating pump at a low rotation speed when the temperature of the circulating fluid set by the temperature setting unit is lower than a predetermined threshold temperature, and to maintain the rotation speed of the circulating pump at a high rotation speed when the temperature of the circulating fluid set by the temperature setting unit is higher than the predetermined threshold temperature, and the control unit is further configured to temporarily reduce the rotation speed of the cooling pump and then gradually increase it when the set temperature is increased by the temperature setting unit, and to temporarily increase the rotation speed of the cooling pump and then gradually reduce it when the set temperature is decreased by the temperature setting unit, and to maintain the rotation speed at that time when the temperature of the circulating fluid measured by the discharge side temperature sensor matches the set temperature. ;

[0014] At this time, it is preferred that a metal cylindrical member is externally embedded in the inlet side flow path section and the outlet side flow path section of the first heat exchange flow path formed by the metal pipe, respectively, and a pair of installation openings are opened on the metal shell, and the pair of installation openings lead the inlet side flow path section and the outlet side flow path section out of the shell, and the cylindrical member externally embedded in these flow paths is installed relative to the shell in a state of being inserted into the pair of installation openings from the outside, and in these installation openings, the outer periphery of each of the cylindrical members is fixed to the shell by welding. It is more preferred that the cylindrical member externally embedded in the inlet side flow path section and the outlet side flow path section has a metal cylindrical body and a metal annular sealing member arranged on the inner periphery of the cylindrical body and sealing the outer periphery of these flow paths, and the outer periphery of the cylindrical body is welded to the shell in an annular shape.

[0015] In addition, it is further preferred that the cylindrical body is formed by a fixed cylindrical portion fixed to the shell by the welding and a sealing cylindrical portion on the inner periphery of which the annular sealing member is arranged, the sealing cylindrical portion is fastened to the fixed cylindrical portion by screwing, and the annular sealing member is constructed so that the front end edge on the side of the fixed cylindrical portion forms an acute angle, and when the sealing cylindrical portion is screwed relative to the fixed cylindrical portion, the front end edge of the annular sealing member is crimped and bitten into the outer periphery of the inlet side flow path portion and the outlet side flow path portion due to the pressing based on the sealing cylindrical portion.

[0016] Furthermore, in the temperature control device of the present invention, it is preferred that, in the shell, a coolant outflow port connected to the coolant discharge path is opened at one end of the inlet side flow path portion axially arranged, and a coolant inflow port connected to the coolant supply path is opened at the other end of the outlet side flow path portion axially arranged.

[0017] In the temperature control device of the present invention, it is further preferred that when the control unit increases the set temperature, the higher the set temperature, the further the slope of the speed change of the cooling pump when the speed is temporarily reduced and then gradually increased is reduced; when the control unit decreases the set temperature, the lower the set temperature, the further the slope of the speed change of the cooling pump when the speed is temporarily increased and then gradually decreased is reduced.

[0018] Furthermore, a pressure regulating unit for regulating the pressure of the coolant flowing through the coolant flow path may be connected to the coolant flow path.

[0019] Effects of the Invention

[0020] In the present invention, as a heat exchanger for cooling the circulating fluid, a heat exchanger is used, which has a spiral flow path portion in which a first heat exchange flow path for circulating fluid is accommodated in a second heat exchange flow path for cooling water, which is formed by a flow path space in a hollow shell. A circulating pump is immersed in the circulating fluid in the tank portion. When the set temperature of the circulating fluid is higher than a specified threshold temperature, the rotation speed of the above-mentioned circulating pump is maintained at a high speed. Therefore, the heat generated by the circulating pump can also be used to efficiently raise the temperature of the circulating fluid to the set temperature and maintain it.

[0021] Furthermore, in the present invention, when the set temperature of the circulating fluid is set from a temperature higher than the above-mentioned threshold temperature to a lower temperature, the speed of the cooling pump is increased while the speed of the circulating pump is reduced to a low speed and maintained. Therefore, while the heat generated by the circulating pump can be suppressed, the cooling of the circulating fluid based on the heat exchanger is promoted, thereby enabling the temperature of the circulating fluid to be efficiently reduced to the set temperature.

[0022] In addition, in this preferred embodiment, cylindrical members are respectively embedded in the inlet side flow path portion and the outlet side flow path portion connected to both ends of the spiral flow path portion in the first heat exchange flow path, and the cylindrical members are fixed to the shell of the heat exchanger by welding. Therefore, the structure of the heat exchanger can be simplified and the welding part can be kept to a minimum, and the occurrence of cracks and other undesirable conditions in the welding part due to the temperature difference between the circulating fluid and the coolant can be suppressed as much as possible. As a result, the durability of the temperature control device with respect to the use of high-temperature circulating fluid can be improved.

[0023] Moreover, in other preferred embodiments of the present invention, since the pressure regulating unit is connected to the flow path of the coolant, as a result of heat exchange between the coolant and the high-temperature circulating fluid, even if the coolant expands due to boiling, etc., the pressure of the coolant can be adjusted by the pressure regulating unit, thereby preventing adverse conditions such as damage in the flow path.

[0024] As described above, according to the present invention and the preferred embodiments of the present invention, it is possible to provide a temperature control device that is particularly suitable for using a high-temperature circulating fluid when a load is controlled to be high temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic circuit diagram of the temperature control device of the present invention.

[0026] Figure 2 The schematic cross-sectional structure of the heat exchanger used in the temperature control device of the present invention is shown.

[0027] Figure 3 Yes Figure 2 An enlarged partial sectional view of a main portion surrounded by a single-dot chain line.

[0028] Figure 4 This is a graph showing the correlation between the set temperature and measured temperature of the circulating fluid and the operating states of the circulating pump and the cooling pump controlled by these temperatures.

[0029] Description of Reference Numerals

[0030] 1 Temperature control device; 2 Tank; 4 Heat exchanger; 7 Control unit; 7a Temperature setting unit; 11 Circulating liquid discharge port; 12 Circulating liquid return port; 13 Cooling liquid supply port; 14 Cooling liquid discharge port; 22a Heater; 23a Cooling pump; 24a Circulating pump; 30 Discharge flow path; 31 Return flow path; 33 First temperature sensor (discharge side temperature sensor); 40 First heat exchange flow path; 41 Spiral flow path portion; 42 Inflow side flow path portion; 42a Circulating liquid inflow port; 43 Outflow side flow path portion; 43a Circulating liquid outflow port; 44 Shell; 45 Second heat exchange flow path (flow path space); 46 First installation opening portion; 47 Second installation opening portion; 50 Cooling circulation outflow path; 51 Cooling circulation return path; 60 Cooling liquid supply path; 61 Cooling liquid discharge path; 64 Pressure adjustment portion; 70 Cylindrical member; 71 Cylindrical body; 72 sealing member; 72a first wedge-shaped sealing piece; 72b second wedge-shaped sealing piece; 73 fixing cylindrical portion; 74 sealing cylindrical portion; 75 external thread portion; 76 inclined surface; 77 internal thread portion; 78 step portion; L shaft; W weld (welding portion). DETAILED DESCRIPTION

[0031] Figures 1 to 4The temperature control device 1 is particularly suitable for controlling the load to a predetermined high temperature, for example, higher than 100°C, by regulating a circulating fluid having a boiling point higher than 100°C to a temperature higher than 100°C and supplying the circulating fluid to an external load (not shown).

[0032] The temperature control device 1 comprises: a frame 10 covering the outside of the device 1; a tank portion 2 for accommodating and storing a circulating liquid; a circulating liquid discharge circuit 3 for delivering the circulating liquid from the tank portion 2 to an external load (not shown) and returning the circulating liquid received by the load from the load to the tank portion 2; a circulating liquid cooling circuit 5 for cooling the circulating liquid delivered from the tank portion 2 in a heat exchanger 4 and returning the circulating liquid to the tank portion 2; a cooling liquid supply circuit 6 for introducing a cooling liquid into the heat exchanger 4 and deriving the cooling liquid after heat exchange with the circulating liquid from the heat exchanger 4; and a control portion 7 for controlling the temperature, flow rate, etc. of the circulating liquid flowing in the circulating liquid discharge circuit 3 and the circulating liquid cooling circuit 5.

[0033] Furthermore, the tank 2, the circulating liquid discharge circuit 3, the heat exchanger 4, the circulating liquid cooling circuit 5, the coolant supply circuit 6, and the control unit 7 are accommodated in the above-mentioned frame 10. Moreover, as will be described in detail later, the circulating liquid discharge port 11 and the circulating liquid return port 12 of the above-mentioned circulating liquid discharge circuit 3, and the coolant supply port 13 and the coolant discharge port 14 of the above-mentioned coolant supply circuit 6 are opened on the side surface of the outer periphery of the frame 10. Thus, the pipes of the temperature control target device (load) on the user side, the cooling device of the coolant, etc. can be connected to these openings (ports) 11, 12, 13, 14.

[0034] In addition, a drain pan 15 for receiving leaked circulating fluid or cooling fluid is provided at the bottom of the frame 10. The drain pan 15 is provided with a float-type water leakage sensor 16 electrically connected to the control unit 7, and a drain port 17 which is always open to the outside and discharges the liquid accumulated in the drain pan 15 to the outside. Thus, for example, when a large amount of circulating fluid or cooling fluid leaks in the device 1 and the water leakage sensor 16 detects this, the control unit 7 can issue a notification or cut off the power supply of the device 1.

[0035] As the above-mentioned circulating liquid, for example, a fluorinated liquid having a boiling point of about 200°C or higher under atmospheric pressure is preferably used. In addition, as the above-mentioned coolant, for example, industrial water having a boiling point of 100°C under atmospheric pressure is preferably used. In the present embodiment, the 160°C circulating liquid in the tank section 2 is sent to the external load through the circulating liquid discharge circuit 3, and the 170°C circulating liquid after the temperature of the load is controlled (cooled) is returned to the tank section 2 again through the circulating liquid discharge circuit 3. In addition, the 160°C circulating liquid in the tank section 2 is sent to the circulating liquid cooling circuit 5, and is returned to the tank section 2 again after being cooled to 100°C by the heat exchanger 4. Moreover, regarding the coolant, the 25°C coolant is supplied to the above-mentioned heat exchanger 4 through the coolant supply circuit 6, is heated to 30°C by heat exchange with the above-mentioned circulating liquid, and is discharged from the heat exchanger 4.

[0036] Thus, in the temperature control device 1, the circulating liquid discharge circuit 3 and the circulating liquid cooling circuit 5 are connected in parallel with respect to one tank portion 2. That is, the circulating liquid discharge circuit 3, which sends the circulating liquid to the load as the temperature control object, receives the circulating liquid heated by heat exchange with the load and returns it to the tank portion 2 again, and the circulating liquid cooling circuit 5, which guides the circulating liquid in the tank portion 2 to the above-mentioned heat exchanger 4 in order to adjust the temperature of the circulating liquid sent from the circulating liquid discharge circuit 3 to the load to the set temperature, and returns the circulating liquid cooled by heat exchange with the coolant of the above-mentioned coolant supply circuit 6 in the heat exchanger 4 to the tank portion 2 again, are formed independently of each other with the tank portion 2 as the center.

[0037] To explain more specifically, the above-mentioned tank portion 2 includes a main tank 20 divided by a bottom surface, a side surface and an upper surface, and storing circulating fluid of a specified depth inside, and a sub-tank 25 which is similarly divided by a bottom surface, a side surface and an upper surface, has a volume larger than the above-mentioned main tank 20, accommodates the main tank 20 as a whole inside and stores reserved circulating fluid.

[0038] Inside the main tank 20, a first partition wall 21a having a height lower than the height of the water surface of the circulating fluid accumulated to a predetermined depth is erected from the bottom surface of the main tank 20, and a second partition wall 21b having a height lower than the height of the side surface from the bottom surface of the tank 20 is suspended from the upper surface of the main tank 20. Thus, the interior of the main tank 20 is divided into three chambers: a first chamber 20a partitioned by one side surface and the first partition wall 21a, a second chamber 20b partitioned by the first partition wall 21a and the second partition wall 21b, and a third chamber 20c partitioned by the second partition wall 21b and the other side wall.

[0039] At this time, in the main tank 20, the first chamber 20a and the second chamber 20b are connected to each other through a gap formed between the upper end of the first partition wall 21a and the upper surface of the main tank 20, and the second chamber 20b and the third chamber 20c are connected to each other through a gap formed between the lower end of the second partition wall 21b and the bottom surface of the main tank 20. In addition, a part of the upper end of the side surface of the main tank 20 is open to the sub-tank 25, and the circulating liquid exceeding the maximum capacity of the main tank 20 can be discharged into the sub-tank 25. In addition, a communication port (not shown) is opened at the lower end of the first partition wall 21a, thereby, as described later, the circulating liquid in the main tank 20 can be discharged to the outside from the drain plug 53a through the cooling circulation return path 51 connected to the bottom surface of the main tank 20.

[0040] In the first chamber 20a of the main tank 20, a heater 22a is provided in a range from the vicinity of the upper end of the first partition wall 21a to the vicinity of the bottom surface of the tank 20, which is controlled by the control unit 7 to heat the circulating fluid. In addition, in the chamber 20a, a thermostat 22b is provided in a range from the upper end of the first partition wall 21a to the liquid level of the circulating fluid when the main tank 20 contains the maximum volume of the circulating fluid (i.e., the highest liquid level of the circulating fluid). Thus, for example, when the temperature of the circulating fluid exceeds a predetermined temperature, the heater 22a can be turned off. Furthermore, in the chamber 20a, a temperature fuse 22c is provided between the highest liquid level of the circulating fluid and the upper surface of the main tank 20, which is also electrically connected to the control unit 7. Thus, for example, when the temperature of the air (air temperature) in the main tank 20 becomes higher than a predetermined temperature, it can be determined that the circulating fluid is in an overheated state and the power supply of the temperature control device 1 can be turned off.

[0041] The second chamber 20b of the main tank 20 is provided with an immersion type cooling pump 23a for delivering the circulating liquid at the bottom thereof to the circulating liquid cooling circuit 5. Furthermore, the third chamber 20c of the main tank 20 is provided with an immersion type circulating pump 24a for delivering the circulating liquid at the bottom thereof to the circulating liquid ejection circuit 3. Moreover, these pumps are also controlled by the control unit 7. In addition, in the present embodiment, as these cooling pumps 23a and circulating pumps 24a, pumps of an inverted control method are used. In addition, two upper and lower liquid level switches 24b and 24c are provided at a position above the center in the depth direction of the third chamber, and these switches are also electrically connected to the control unit 7. Moreover, by detecting the liquid level (liquid surface) of the circulating liquid in the main tank 20 using these switches 24b and 24c, the operating state of the internal pump 26 described later and the like is controlled.

[0042] The sub-tank 25 is provided with the above-mentioned internal pump 26 of the immersion type for drawing the circulating liquid at the bottom thereof into the above-mentioned main tank 20, and three liquid level switches 27a, 27b, and 27c are provided at a position higher than the center in the depth direction of the sub-tank 25, and two are provided at the lower position. Moreover, these switches are also electrically connected to the control unit 7. In addition, the outer periphery of the sub-tank 25 is provided with a liquid level gauge 28 that can visually check the amount of circulating liquid in the sub-tank 25 from the outside of the frame 10, and a circulating liquid injection port 25a for replenishing the circulating liquid to the sub-tank 25 from the outside of the frame 10. In addition, the sub-tank 25 is connected to a drain pipe 29, and its front end is led out of the frame 10. A drain plug 29a is provided at the front end of the drain pipe 29, and the circulating liquid in the sub-tank 25 can be discharged to the outside by opening the drain plug 29a. Furthermore, by detecting the liquid level (liquid surface) of the circulating fluid in the sub-tank 25 using the three liquid level switches 27a, 27b, and 27c, the drain plug 29a is opened to lower the liquid level, or replenishment of circulating fluid from the circulating fluid inlet 25a to the sub-tank 25 is promoted.

[0043] The circulating liquid discharge circuit 3 includes a discharge flow path 30 connecting the third chamber 20c of the main tank 20 in the tank unit 2 and the circulating liquid discharge port 11 opened outside the frame 10 and sending the circulating liquid to the load, and a return flow path 31 connecting the circulating liquid return port 12 opened outside the frame 10 and receiving the circulating liquid returned from the load and the main tank 20 of the tank unit 2. The circulating liquid in the main tank 20 is sent to the load through the discharge flow path 30 and the circulating liquid discharge port 11 by the circulating pump 24a provided in the third chamber 20c of the main tank 20, and the circulating liquid whose temperature of the load is controlled returns to the main tank 20 again through the circulating liquid return port 12 and the return flow path 31.

[0044] At this time, if Figure 1 As shown, the return flow path 31 is preferably connected to the first chamber 20a, which is located at the most upstream side in the main tank 20 and is provided with a heater 22a. Therefore, even if the temperature of the circulating fluid returned from the return flow path 31 to the main tank 20 changes, the circulating fluid returned to the first chamber 20a is sent to the discharge flow path 30 after the temperature is adjusted in the heater 22a and the circulating fluid cooling circuit 5, so that the circulating fluid adjusted to a more accurate temperature can be supplied to the load.

[0045] The discharge flow path 30 is provided with a first pressure sensor 32 and a first temperature sensor (discharge side temperature sensor) 33, and the return flow path 31 is provided with a second pressure sensor 34 and a second temperature sensor 35. In addition, the discharge flow path 30 and the return flow path 31 are always connected through a bypass flow path 37. Thus, even if the flow of the circulating fluid on the load side connected to the temperature control device 1 is stopped, the circulating fluid can be returned to the main tank 20 through the bypass flow path 37, thereby maintaining the circulation state. In addition, the pressure sensors 32, 34 and the temperature sensors 33, 35 are all electrically connected to the control unit 7. Thus, for example, the heater, the cooling pump, and the circulation pump can be appropriately controlled based on the measured values ​​from these sensors.

[0046] The circulating liquid cooling circuit 5 includes: a second chamber 20b of the main tank 20 in the tank unit 2 and a circulating liquid inlet 42a ( Figure 2 ) between the cooling circulation outflow path 50; and the heat exchanger 4 of the circulating liquid outlet 43a ( Figure 2 ) is connected to the main tank 20 of the tank section 2 through the cooling circulation return path 51. Furthermore, the circulating fluid in the main tank 20 flows into the heat exchanger 4 through the cooling circulation outward path 50 by the cooling pump 23a provided in the second chamber 20b of the main tank 20, and the circulating fluid cooled in the heat exchanger 4 and flowing out of the heat exchanger 4 returns to the main tank 20 again through the cooling circulation return path 51.

[0047] At this time, if Figure 1 As shown, the cooling circulation return path 51 is preferably connected to the first chamber 20a, which is located at the most upstream side in the main tank 20 and is provided with a heater 22a, similarly to the return flow path 31. Thus, the circulating fluid returned from the cooling circulation return path 51 to the main tank 20 is temperature-adjusted together with the circulating fluid returned from the return flow path 31, and then sent from the first chamber located at the most downstream side to the discharge flow path 30, so that the circulating fluid adjusted to a more accurate temperature can be supplied to the load.

[0048] A drain pipe 52 for the circulating liquid cooling circuit 5 is connected to the cooling circulation outward path 50, and the front end thereof is led out to the outside of the frame 10. A drain plug 52a is provided at the front end of the drain pipe 52, and the circulating liquid in the circulating liquid cooling circuit 5 can be discharged to the outside by opening the drain plug 52a. On the other hand, a drain pipe 53 for the main tank 20 is connected to the cooling circulation return path 51, and the front end thereof is led out to the outside of the frame 10. A drain plug 53a is also provided at the front end of the drain pipe 53, and the circulating liquid in the main tank 20 can be discharged to the outside by opening the drain plug 53a. In addition, a third temperature sensor 54 is provided in the cooling circulation return path 51, and the temperature sensor 54 is also electrically connected to the control unit 7. Thus, for example, the rotation speed of the cooling pump 23a can be controlled by the control unit 7 based on the temperature of the circulating liquid based on the third temperature sensor 54.

[0049] The cooling liquid supply circuit 6 includes a cooling liquid supply port 13 opened outside the frame 10 and receiving the cooling liquid and a cooling liquid inlet 48 ( Figure 2 ) between the coolant supply path 60 connected; and the coolant outlet 49 (4 of the heat exchanger Figure 2 ) and a coolant discharge port 14 opened outside the frame 10 and discharging the coolant. Thus, the coolant supplied from the coolant supply port 13 is introduced into the heat exchanger 4 through the coolant supply path 60, the circulating liquid is cooled in the heat exchanger 4, and the coolant led out from the heat exchanger 4 is discharged from the coolant discharge port 14 to the outside through the coolant discharge path 61.

[0050] The coolant supply path 60 is provided with a fourth temperature sensor 62 and a flow meter 63, which are also electrically connected to the control unit 7. Thus, for example, abnormalities in the temperature and flow rate of the coolant supplied to the heat exchanger 4 can be detected and notified by an alarm or the like.

[0051] In addition, in the present embodiment, a pressure regulating unit 64 for regulating the pressure of the coolant is connected to the coolant supply path 60. Therefore, as a result of the coolant exchanging heat with the high-temperature circulating fluid in the heat exchanger 4, even if the coolant expands due to boiling or the like, the pressure of the coolant is regulated by the pressure regulating unit 64, thereby preventing the flow path from being damaged or other undesirable conditions. In addition, the pressure regulating unit 64 may be provided on the coolant discharge path 61 side.

[0052] Furthermore, the coolant discharge passage 61 is also provided with a fifth temperature sensor 69 electrically connected to the control unit 7 , so that the temperature of the coolant discharged from the heat exchanger 4 can be displayed on the control unit 7 or the like through the control unit 7 .

[0053] Specifically, the pressure regulating unit 64 includes an accumulator body 65 for pressure regulation, an on-off valve 66 (two-way valve) provided between the accumulator body 65 and the coolant supply path 60, and a pressure gauge 67 and a pressure release valve (two-way valve) 68 provided between the accumulator body 65 and the on-off valve 66. The on-off valve 66 is always in an open state at least during the operation of the temperature regulating device 1, and the pressure of the coolant can be monitored by the pressure gauge 67. In addition, the pressure release valve 68 is always in a closed state during the operation of the temperature regulating device 1. Moreover, when the temperature regulating device 1 is maintained, the pressure in the accumulator body 65 can be released to the atmosphere by opening the pressure release valve 68 after closing the on-off valve 66. In addition, the on-off valve 66 and the pressure release valve 68 can be opened and closed manually as in the present embodiment, or can be electrically connected to the control unit 7 and opened and closed by the control unit 7.

[0054] like Figure 2 As shown, the heat exchanger 4 is formed as a whole of a metal material such as stainless steel and extends in a manner along an axis L in the length direction. The heat exchanger 4 includes a first heat exchange flow path 40 for the circulation of the circulating fluid of the circulating fluid cooling circuit 5 and a second heat exchange flow path 45 for the circulation of the coolant for cooling the circulating fluid of the first heat exchange flow path 40.

[0055] The above-mentioned first heat exchange flow path 40 is formed by bending a metal pipe, and is seamlessly integrated with a spiral flow path portion 41 extending spirally around an axis L in the direction of the axis L, an inlet side flow path portion 42 connected to one end of the spiral flow path portion 41 in the direction of the axis L and extending linearly along the axis L, and an outlet side flow path portion 43 connected to the other end on the opposite side of the one end and extending linearly along the axis L.

[0056] Furthermore, in the first heat exchange flow path 40, at each end on the opposite side of the inlet side flow path portion 42 and the outlet side flow path portion 43 connected to the spiral flow path portion 41 (i.e., at both ends of the first heat exchange flow path 40 in the axial L direction), a circulating liquid inlet 42a for allowing the circulating liquid to flow into the heat exchanger 4, and a circulating liquid outlet 43a for allowing the circulating liquid after cooling based on heat exchange to flow out of the heat exchanger 4 are provided.

[0057] On the other hand, the second heat exchange flow path 45 is composed of a flow path space formed in a hollow metal shell 44, and the spiral flow path portion 41 of the first heat exchange flow path 40 is accommodated in the second heat exchange flow path 45. The shell 44 is integrally formed by a hollow cylindrical side wall 44a extending in the direction of the axis L, a hollow dome-shaped first end wall 44b closing one end of the cylindrical side wall 44a in the direction of the axis L, and a hollow dome-shaped second end wall 44c similarly closing the other end. That is, the axis of the first heat exchange flow path 40 is also aligned with the axis of the cylindrical side wall 44a of the shell 44.

[0058] The first end wall 44b and the second end wall 44c of the housing 44 are provided with a first mounting opening 46 and a second mounting opening 47 for fixing the housing 44 in a state where the inlet side flow path portion 42 and the outlet side flow path portion 43 of the first heat exchange flow path 40 are led out of the second heat exchange flow path 45. At this time, as described above, the inlet side flow path portion 42 and the outlet side flow path portion 43 are seamlessly formed integrally by a metal pipe. In addition, the housing 44 is provided with a coolant inlet 48 for introducing the coolant into the second heat exchange flow path 45 and a coolant outlet 49 for leading the coolant after heat exchange with the circulating liquid in the first heat exchange flow path 40 from the second heat exchange flow path 45. Moreover, the coolant supply path 60 and the coolant discharge path 61 are connected to the second heat exchange flow path 45 through these coolant inlet 48 and coolant outlet 49.

[0059] In the present embodiment, the coolant inlet 48 is opened in a direction perpendicular to the axis L at one end in the axis L direction of the outflow side flow path portion 43 of the housing 44 where the first heat exchange flow path 40 is arranged (specifically, the end on the second end side of the cylindrical side wall 44a). On the other hand, the coolant outlet 49 is opened in the axis L direction at the other end in the axis L direction of the inflow side flow path portion 42 of the housing 44 where the first heat exchange flow path 40 is arranged (specifically, the central portion of the first end side wall 44b).

[0060] Furthermore, the end of the metal pipe forming the cooling circulation outward path 50 is connected to the circulation liquid inlet 42a of the inflow side flow path portion 42 by welding or other connecting means, and the end of the metal pipe forming the cooling circulation return path 51 is connected to the circulation liquid outlet of the outflow side flow path portion 43 by welding or other connecting means. On the other hand, the ends of the pipes forming the cooling liquid supply path 60 and the cooling liquid discharge path 61 are connected to the cooling liquid inlet 48 and the cooling liquid outlet 49 by joints, screwing or other connecting means.

[0061] In addition, the inner diameters of the first installation opening 46 and the second installation opening 47 are formed to be larger than the outer diameters of the inlet side flow path section 42 and the outlet side flow path section 43 of the first heat exchange flow path 40. In addition, hollow cylindrical members 70, 70 made of a metal material such as stainless steel are externally fitted and fixed to the outer periphery of these inlet side flow path sections 42 and the outlet side flow path sections 43 in a liquid-tight manner. And, in a state where the cylindrical members 70, 70 are inserted into the first installation opening 46 and the second installation opening 47, the outer peripheries of the cylindrical members 70, 70 are welded W, W to the housing 44. That is, the above-mentioned flow path sections 42, 43 are fixed to the housing 44 in a state where the above-mentioned cylindrical members 70, 70 are sandwiched.

[0062] Thus, as the heat exchanger 4, a heat exchanger is used in which the spiral flow path portion 41 of the first heat exchange flow path 40 is accommodated in the second heat exchange flow path (flow path space) 45 formed in the hollow shell 44, so that the structure of the heat exchanger 4 can be simplified and the welded portion can be minimized. In addition, the metal pipe forming the first heat exchange flow path for the high-temperature circulating fluid to flow is not directly fixed to the shell 44 forming the second heat exchange flow path for the low-temperature coolant to flow by welding. Therefore, even when cooling the high-temperature circulating fluid, it is possible to suppress as much as possible the occurrence of defects such as cracks in the welded portion of the heat exchanger 4 due to the temperature difference between the circulating fluid and the coolant, and as a result, the durability of the temperature control device 1 with respect to the use of the high-temperature circulating fluid can be improved.

[0063] Next, based on Figure 3 The cylindrical member 70 is described in more detail. The cylindrical member 70 includes: a hollow metal cylindrical body 71 with both ends opened; and a metal sealing member 72 that seals the outer periphery of the metal pipe forming the inflow side flow path portion 42 and the outflow side flow path portion 43 and the inner peripheral surface of the body 71 in a liquid-tight manner, and fixes the body 71 to these flow paths 42 and 43. In addition, in a state where a part of the body 71 fixed to each of the flow paths 42 and 43 is inserted into the housing 44 from the outside of the housing 44 through the first installation opening 46 and the second installation opening 47, the outer periphery of the body is annularly and continuously welded W, W to the housing 44 at the openings 46 and 47.

[0064] The main body 71 is formed by combining a fixing cylindrical portion 73 fixed to the housing 44 by the welding W and a sealing cylindrical portion 74 provided with the sealing member 72 on the inner circumference. The fixing cylindrical portion 73 integrally includes an external thread portion 75 at the end portion disposed outside the housing 44. In addition, an inclined surface 76 is formed on the inner circumference of the front end portion of the external thread portion 75 so that the inner diameter is linearly expanded toward the front end of the external thread portion 75. On the other hand, the sealing cylindrical portion 74 includes an internal thread portion 77 on the inner circumference of the end portion on the fixing cylindrical portion 73 side. In addition, a step portion 78 is formed on the inner circumference of the sealing cylindrical portion 74 at a position closer to the inner side than the internal thread portion 77, and the step portion 78 expands the inner diameter in a step-like manner toward the internal thread portion 77 side.

[0065] Moreover, the annular sealing member 72 is formed into a wedge shape with an acute angle formed at the front end edge on the side of the fixed cylindrical portion 73 in its cross section. In addition, the sealing member 72 is mounted on the step portion 78 of the sealing cylindrical portion 74 in a state where the annular front end edge is tilted toward the central axis L1 side. Therefore, when the two cylindrical portions 73 and 74 are mutually fastened by screwing the internal thread portion 77 of the sealing cylindrical portion 74 relative to the external thread portion 75 of the fixed cylindrical portion 73, the sealing member 72 is pressed along the front end edge direction by the step portion 78 of the sealing cylindrical portion 74. Thus, the front end edge of the sealing member 72 is pressed and bitten into the outer periphery of each flow path portion 42 and 43. As a result, while each flow path portion 42 and 43 is sealed liquid-tightly with the main body 71 of the cylindrical member 70, the main body 71 is fixed relative to each flow path portion 42 and 43.

[0066] In this embodiment, if Figure 3 As shown, the sealing member 72 includes two annular first and second wedge-shaped sealing pieces 72 a and 72 b , and these wedge-shaped sealing pieces 72 a and 72 b are attached to each of two steps of the step portions 78 of the sealing cylindrical portion 74 .

[0067] At this time, the front end including the front end edge of the first sealing piece 72a is inserted between the inclined surface 76 of the external thread portion 75 and the outer peripheries of the inlet side flow path portion 42 and the outlet side flow path portion 43. As a result, the front end of the first sealing piece 72a is pressed against the inclined surface 76, and the front end edge of the sealing piece 72a is pressed against and bitten into the outer peripheries of the flow paths 42 and 43.

[0068] On the other hand, the second sealing piece 72b is arranged at the rear end portion of the first sealing piece 72a on the opposite side to the front end edge. And the front end portion including the front end edge of the second sealing piece 72b is inserted between the rear end portion of the first sealing piece 72a and the outer periphery of each flow path portion 42, 43. Thus, while the rear end portion of the first sealing piece 72a is expanded, the front end edge of the second sealing piece 72b is pressed against the outer periphery of each flow path portion 42, 43. In addition, as the cylindrical member 70, for example, a bite joint having two annular hoops as the wedge-shaped sealing pieces 72a, 72b can be used instead.

[0069] like Figure 1 As shown, the control unit 7 includes a temperature setting unit 7a for appropriately setting the temperature of the circulating fluid delivered to the load through the discharge flow path 30. Figure 4 The graph of FIG. 1 illustrates a control method of the cooling pump 23a and the circulating pump 24a by the control unit 7 corresponding to the set temperature of the circulating fluid. In addition, in the present embodiment, a predetermined threshold temperature (75° C.) is set for the delivery temperature of the circulating fluid relative to the load in the control unit 7. When the delivery temperature of the circulating fluid is higher than the threshold temperature, it means that the temperature control device 1 is in operation, and when it is lower than the threshold temperature, it means that the temperature control device 1 is in an idling state (resting state).

[0070] First, as the first stage, in a state where the set temperature of the circulating fluid is set to a temperature (40° C.) lower than the above-mentioned threshold temperature (75° C.), and the discharge temperature of the circulating fluid measured by the first temperature sensor 33 of the discharge flow path 30 (hereinafter referred to as “measured temperature”) also drops to the set temperature, that is, in an idling state of the temperature control device 1, the cooling pump and the circulating pump of the inverter control method are maintained at a predetermined low rotation speed (low frequency) by the control unit 7.

[0071] Here, as the second stage, when the set temperature of the circulating fluid is set to a temperature higher than the threshold temperature, the circulating pump 24 a is simultaneously switched to a predetermined high rotation speed (high frequency) and the high rotation speed is maintained.

[0072] On the other hand, the cooling pump 23a is temporarily further reduced in rotation speed at the same time, and then gradually increased in rotation speed at a predetermined time before the measured temperature of the circulating fluid reaches the set temperature by the temperature sensor 33. Then, the increase in rotation speed is stopped at the time when the measured temperature of the circulating fluid reaches the set temperature, and the rotation speed is maintained (lower than the rotation speed in the first stage) in a state where the measured temperature matches the set temperature.

[0073] Next, as the third stage, when the set temperature of the circulating fluid is set to a higher temperature, the circulation pump 24a is maintained at the above-mentioned predetermined high rotation speed following the above-mentioned second stage.

[0074] On the other hand, for the cooling pump 23a, at the same time, the rotation speed is temporarily reduced to the same rotation speed as in the second stage, and then the rotation speed is gradually increased again at a predetermined time before the measured temperature of the circulating fluid reaches the set temperature. At this time, the slope of the rotation speed change is smaller than the slope of the rotation speed change in the second stage. Then, similarly to the second stage, the increase in the rotation speed is stopped at the time when the measured temperature of the circulating fluid reaches the set temperature, and the rotation speed is maintained (lower than the rotation speed in the first stage and the second stage) in a state where the measured temperature is consistent with the set temperature.

[0075] Next, as the fourth stage, when the set temperature of the circulating fluid is lowered to the set temperature of the second stage, the circulation pump 24a is maintained at the above-mentioned predetermined high rotation speed following the above-mentioned third stage.

[0076] On the other hand, the cooling pump 23a is temporarily increased in speed to a speed higher than the idling speed in the first stage at the same time, and then the speed is gradually decreased at a predetermined time before the measured temperature of the circulating fluid reaches the set temperature. Then, the decrease in speed is stopped at the time when the measured temperature of the circulating fluid reaches the set temperature, and the speed is maintained (the same speed as in the second stage) in a state where the measured temperature and the set temperature are consistent.

[0077] Next, as the fifth stage, when the set temperature of the circulating fluid is further lowered to the set temperature of the first stage (40° C.), the circulating pump 24 a is simultaneously switched to the same predetermined low rotation speed as in the first stage and maintained at the low rotation speed.

[0078] On the other hand, for the cooling pump 23a, at the same time, the rotation speed is temporarily increased to the same rotation speed as in the fourth stage, and then the rotation speed is gradually decreased again at a predetermined time before the measured temperature of the circulating fluid reaches the set temperature. At this time, the slope of the rotation speed change is smaller than the slope of the rotation speed change in the fourth stage. Then, the decrease in the rotation speed is stopped at the time when the measured temperature of the circulating fluid reaches the set temperature, and the rotation speed is maintained (the same rotation speed as in the first stage) in a state where the measured temperature coincides with the set temperature.

[0079] That is, in this embodiment, when the temperature of the circulating fluid set by the above-mentioned temperature setting unit 7a is lower than the specified threshold temperature, the rotation speed of the above-mentioned circulating pump 24a is maintained at a low speed, and when it is higher than the above-mentioned specified threshold temperature, the rotation speed of the above-mentioned circulating pump 24a is maintained at a high speed.

[0080] In addition, when the set temperature is increased by the above-mentioned temperature setting unit 7a, the rotation speed of the above-mentioned cooling pump 23a is temporarily reduced and then gradually increased. When the set temperature is reduced, the rotation speed of the above-mentioned cooling pump 23a is temporarily increased and then gradually decreased. When the temperature of the circulating fluid measured by the first temperature sensor 33 of the above-mentioned ejection flow path 30 (i.e., the measured temperature of the circulating fluid) is consistent with the above-mentioned set temperature, the rotation speed at this time is maintained.

[0081] Moreover, in the case of increasing the set temperature, the higher the set temperature, the further the slope of the speed change of the cooling pump 23a when the speed gradually increases after a temporary decrease is reduced, and in the case of decreasing the set temperature, the lower the set temperature, the further the slope of the speed change of the cooling pump 23a when the speed gradually decreases after a temporary increase is reduced.

[0082] Thus, in this embodiment, the circulation pump 24a is immersed in the circulation fluid in the main tank 20, and when the set temperature of the circulation fluid is higher than the specified threshold temperature, the rotation speed of the circulation pump 24a is maintained at a high speed. Therefore, in addition to the heater 22a, the heat generated by the circulation pump 24a is also utilized to efficiently increase the temperature of the circulation pump 24a to the set temperature and maintain it at this temperature.

[0083] In addition, when the set temperature of the circulating fluid is set from a temperature higher than the above-mentioned threshold temperature to a lower temperature, the speed of the cooling pump 23a is increased while the rotational speed of the circulating pump 24a is reduced to a low speed and maintained. Therefore, while the heat generated by the circulating pump 24a can be suppressed, the cooling of the circulating fluid based on the heat exchanger 4 is promoted, thereby enabling the temperature of the circulating fluid to be efficiently reduced to the set temperature.

Claims

1. A temperature control device for controlling a circulating fluid having a boiling point higher than 100°C to a temperature higher than 100°C and supplying the circulating fluid to an external load, wherein the load is controlled to a predetermined high temperature, wherein: The temperature control device comprises: a tank portion storing the circulating fluid and having a heater for heating the circulating fluid; a discharge flow path connecting the tank portion and a circulating fluid discharge port for delivering the circulating fluid to the load; and a circulating pump for delivering the circulating fluid from the tank portion to the discharge flow path. a return flow path connecting a circulating liquid return port for receiving the circulating liquid returned from the load to the tank portion; a heat exchanger having a first heat exchange flow path for the circulating liquid to flow and a second heat exchange flow path for the cooling liquid to cool the circulating liquid in the first heat exchange flow path; a cooling circulation outward path for supplying circulating liquid from the tank portion to the first heat exchange flow path of the heat exchanger; a cooling circulation return path for returning the circulating liquid cooled by the heat exchanger from the first heat exchange flow path to the tank portion again; a cooling pump for delivering circulating liquid from the tank portion to the cooling circulation outward path; a cooling liquid supply path for introducing cooling liquid into the second heat exchange flow path of the heat exchanger; and a cooling liquid discharge path for leading the cooling liquid after heat exchange from the second heat exchange flow path, In the heat exchanger, the first heat exchange flow path is formed by a spiral flow path portion extending in a spiral shape along an axis, an inlet side flow path portion connected to one end of the spiral flow path portion and having a circulating liquid inlet, and an outlet side flow path portion connected to the other end of the spiral flow path portion and having a circulating liquid outlet, and the second heat exchange flow path is formed by a flow path space formed in a hollow shell. The spiral flow path portion of the first heat exchange flow path is accommodated in the second heat exchange flow path in the shell, and the inlet side flow path portion and the outlet side flow path portion are led out of the shell, the cooling circulation outflow path is connected to the circulating liquid inlet, and the cooling circulation return path is connected to the circulating liquid outlet. The coolant supply path is connected to the second heat exchange path through a coolant inlet opened in the shell, and the coolant discharge path is similarly connected to the second heat exchange path through a coolant outlet opened in the shell. The temperature control device comprises: a discharge side temperature sensor disposed in the discharge flow path for measuring the temperature of the circulating fluid delivered to the load; and a control unit having a temperature setting unit for setting the temperature of the circulating fluid delivered to the load, and controlling the rotation speeds of the circulating pump and the cooling pump based on the measurement result of the discharge side temperature sensor and the temperature set by the temperature setting unit. The circulating pump is immersed in the circulating fluid in the tank portion. The control unit is configured to maintain the rotation speed of the circulation pump at a low rotation speed when the temperature of the circulation fluid set by the temperature setting unit is lower than a predetermined threshold temperature, and to maintain the rotation speed of the circulation pump at a high rotation speed when the temperature of the circulation fluid set by the temperature setting unit is higher than the predetermined threshold temperature. The control unit is further configured to temporarily reduce the rotation speed of the cooling pump and then gradually increase it when the set temperature is increased by the temperature setting unit, and to temporarily increase the rotation speed of the cooling pump and then gradually reduce it when the set temperature is lowered by the temperature setting unit, and to maintain the rotation speed at this time in a state where the temperature of the circulating fluid measured by the discharge side temperature sensor is consistent with the set temperature.

2. The temperature control device according to claim 1, characterized in that: A metal cylindrical member is fitted on the inlet side flow path portion and the outlet side flow path portion of the first heat exchange flow path formed of a metal pipe, respectively. A pair of installation openings are provided on the metal housing, the pair of installation openings guide the inlet side flow path portion and the outlet side flow path portion out of the housing, and the cylindrical member externally fitted to these flow paths is installed relative to the housing in a state of being inserted into the pair of installation openings from the outside. In these mounting openings, the outer periphery of each of the cylindrical members is fixed to the housing by welding.

3. The temperature control device according to claim 2, characterized in that: The cylindrical component embedded in the inlet side flow path portion and the outlet side flow path portion has a metal cylindrical body and a metal annular sealing component arranged on the inner periphery of the cylindrical body and sealing the outer periphery of these flow path portions. The outer periphery of the cylindrical body is welded into a ring shape relative to the shell.

4. The temperature control device according to claim 3, characterized in that: The cylindrical body is formed by a fixing cylindrical portion fixed to the housing by welding and a sealing cylindrical portion having the annular sealing member disposed on the inner periphery, the sealing cylindrical portion being fastened to the fixing cylindrical portion by screwing. The annular sealing member is constructed such that the front end edge on the side of the fixed cylindrical portion forms an acute angle, and when the sealing cylindrical portion is screwed relative to the fixed cylindrical portion, the front end edge of the annular sealing member is pressed and bitten into the outer periphery of the inlet side flow path portion and the outlet side flow path portion due to the pressure based on the sealing cylindrical portion.

5. The temperature control device according to claim 1, characterized in that: In the housing, a coolant outlet connected to the coolant discharge path is opened at one end of the inlet flow path portion in the axial direction, and a coolant inlet connected to the coolant supply path is opened at the other end of the outlet flow path portion in the axial direction.

6. The temperature control device according to claim 1, characterized in that: When the control unit increases the set temperature, the higher the set temperature, the further the slope of the speed change of the cooling pump when the speed is temporarily reduced and then gradually increased is reduced. When the control unit decreases the set temperature, the lower the set temperature, the further the slope of the speed change of the cooling pump when the speed is temporarily increased and then gradually decreased is reduced.

7. The temperature control device according to claim 1, characterized in that: The coolant flow path is connected to a pressure regulating unit for regulating the pressure of the coolant flowing therethrough.

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