Transmission assembly and photoetching machine

Abstract

The invention provides a transmission assembly and a photoetching machine, and belongs to the field of photoetching machines. According to the mask plate conveying assembly, through the novel layout of the pulley assembly and the air suction pipe, the problem that an air pipe is folded in the reciprocating motion of the mask plate is solved. Due to the design, the smoothness of an air path is ensured, so that the adsorption and transmission reliability of the mask plate is improved. The movement of the air pipe is changed from a drag chain mode to a mode guided by the pulley assembly, so that direct contact and friction between the air pipe and the drag chain are reduced, and the fixed pulley assembly further comprises a first power source which can be connected with the fixed pulley in an on-off mode. In this way, connection and disconnection of the fixed pulley and the first power source can be selectively controlled according to the transmission direction of the mask plate, and therefore the air pipe can be protected to the maximum extent.

Description

Technical Field

[0001] The present application relates to the technical field of photolithography machines, and in particular to a transmission component and a photolithography machine. Background Art

[0002] In the field of semiconductor manufacturing, photolithography machines are key equipment used to accurately transfer circuit patterns onto silicon wafers. During the photolithography process, the pattern on the mask is transferred to the silicon wafer through the exposure system of the photolithography machine to form an integrated circuit. The precise transfer of the mask is crucial to the accuracy and efficiency of the photolithography process.

[0003] The mask plate in the prior art is usually equipped with an air suction port for fixing the mask plate by vacuum adsorption. The air suction port is connected to an air suction pipe. When the mask plate moves back and forth, the air pipe also moves accordingly. In order to prevent the air pipe from affecting the reciprocating movement of the mask plate, the original conventional structure is to put the air pipe into a drag chain to allow it to participate in the movement. However, the disadvantage is that the air pipe will be creased during the reciprocating motion, affecting the smoothness of the air path; the drag chain will cause friction during operation to generate dust, noise and vibration. Summary of the invention

[0004] The embodiment of the present application provides a transmission component and a photolithography machine, which avoids the problem of creases in the air pipe during the reciprocating motion of the mask plate by using a new layout of a pulley assembly and an air suction pipe. This design ensures the smoothness of the air path, thereby improving the reliability of mask adsorption and transmission. By changing the movement of the air pipe from a drag chain to being guided by a pulley assembly, the direct contact and friction between the air pipe and the drag chain are reduced, and the fixed pulley assembly also includes a first power source that can be connected to the fixed pulley. In this way, the connection and disconnection of the fixed pulley and the first power source can be selectively controlled according to the transmission direction of the mask plate, thereby protecting the air pipe to the greatest extent. Specifically: In a first aspect, an embodiment of the present application provides a transmission component for adsorbing and transmitting a mask plate in a lithography machine, and the transmission component includes: A mask plate disk, wherein a suction port is formed on the mask plate disk for adsorbing the mask plate; A guide mechanism, the guide mechanism includes a first guide portion extending laterally, and a second guide portion located at the extension end of the first guide portion and extending downward, and the mask plate disk can be driven to reciprocate in the extension direction of the first guide portion to transfer the mask plate adsorbed on the mask plate disk to different positions; A pulley assembly, the pulley assembly includes a fixed pulley assembly whose position is fixed and a movable pulley assembly whose position can be changed, the fixed pulley assembly includes a fixed pulley rotatably arranged at the extended end of the first guide portion and located at the top position of the second guide portion, and the movable pulley assembly includes a movable pulley rotatably arranged on the second guide portion and capable of moving up and down along the second guide portion; An air suction pipe, one end of which is connected to the air suction port of the mask plate, and the other end of which is connected to the second guide portion after being wound around a set pulley and a movable pulley; The fixed pulley assembly also includes a first power source that can be connected and disconnected to the fixed pulley. When the first power source is connected to the fixed pulley, the fixed pulley can rotate under the drive of the first power source. When the first power source is disconnected from the fixed pulley, the fixed pulley can rotate under the friction when the trachea moves.

[0005] In the above technical solution, the transmission component also includes: A controller, the controller is used to control the on and off of the first power source and the fixed pulley; in When the mask plate is driven to move in a first direction toward one side of the fixed pulley, the first power source is controlled to be disconnected from the fixed pulley, so that the movable pulley can slide downward along the second guide portion under the action of its own weight; When the mask plate is driven to move in a second direction away from the fixed pulley, the first power source is controlled to be connected to the fixed pulley to rotate the fixed pulley, and the fixed pulley driven to rotate by the first power source can drive the air pipe to move in the second direction, and the air pipe driven to move in the second direction by the fixed pulley can pull the movable pulley upward, so that the movable pulley can overcome its own gravity and slide upward along the second guide part.

[0006] In the above technical solution, the transmission component also includes: A sensor, the sensor is used to detect and output a movement parameter value representing the movement of the mask plate toward the second direction; The controller is used to control the driving parameter of the first driving source according to the movement parameter value; The moving parameter value at least includes the acceleration value of the mask plate when it moves, and the driving parameter at least includes the rotation speed value when the first driving source drives the fixed pulley to rotate.

[0007] In the above technical solution, when the mask plate moves at an acceleration a, the rotation speed v must satisfy the requirement that the air pipe between the mask plate and the second guide portion is always in a straight state during the movement of the mask plate.

[0008] In the above technical solution, a slideway and an air pipe joint are provided on the second guide part, the slideway is extended from the bottom to the top of the second guide part, and the air pipe joint is provided above the slideway; The movable pulley assembly comprises a movable pulley body and a slider, wherein the movable pulley body is rotatably arranged on the slider, and the slider is slidably arranged on the slideway; One end of the air pipe away from the mask plate bypasses the fixed pulley and the movable pulley body and is connected to the air pipe joint of the second guide part.

[0009] In the above technical solution, the slider is an open slider with a receiving cavity formed inside and at least an opening on the top, and the movable pulley body is rotatably arranged in the receiving cavity of the slider; The air pipe extends into the accommodating cavity through the top opening of the slider, and is wound around the bottom of the movable pulley body and then extends out through the top opening again. The air pipe extending out through the top opening again is connected to the air pipe joint.

[0010] In the above technical solution, the fixed pulley includes a fixed pulley body and a mounting block, the mounting block is an open-type mounting block with a mounting cavity formed inside and at least a bottom and a side having openings, and the fixed pulley body is rotatably arranged in the mounting cavity; The air pipe extends into the accommodating cavity through the side opening of the mounting block, and is arranged around the top of the fixed pulley body and then extends downward through the bottom opening of the mounting block. The first power source is connected to the mounting block and can be connected to the fixed pulley body.

[0011] In the above technical solution, the first guide portion includes a first guide rail extending in a horizontal direction, and the second guide portion includes a second guide rail extending in a vertical direction; The grinding plate disc is slidably arranged on a first guide rail extending in a horizontal direction, and the fixed pulley assembly is connected to the extended end of the first guide rail through a connecting piece.

[0012] In the above technical solution, the mask plate includes a first plate surface arranged toward the bottom and a second plate surface arranged opposite to the first plate surface and toward the top, and the air inlet is arranged through the first plate surface and the second plate surface; The air inlet is opened on one side of the first disk surface to form an air inlet end for adsorbing the mask plate in the photolithography machine, and the air inlet is opened on one side of the second disk surface to form an air outlet end for connecting the air pipe.

[0013] In the above technical solution, n air intake ports are provided on the grinding plate, and each air intake port is provided with an air pipe joint connected to the air intake pipe; The fixed pulley assembly includes n fixed pulley bodies arranged in a transverse direction, and the movable pulley assembly includes n movable pulley bodies arranged in a transverse direction, and the n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged one by one in a vertical direction; The n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged in a vertically corresponding manner to form n transversely arranged pulley blocks, wherein an air pipe is wound around each pulley block, and n≥2.

[0014] In the above technical solution, the first driving source includes a motor and an electromagnetic attraction mechanism connected to the motor, and the electromagnetic attraction mechanism has a first state when it is attracted to the fixed pulley and a second state when it is separated from the fixed pulley; When the electromagnetic attraction mechanism is in the first state where it is attracted to the fixed pulley, the motor can drive the fixed pulley to rotate through the attraction mechanism.

[0015] The second aspect of the embodiment of the present application provides a lithography machine, which includes the transmission component provided by the first aspect of the embodiment of the present application. The lithography machine has a second power source, and the second power source is used to drive the mask plate to reciprocate in the extension direction of the first guide part to transfer the mask plate adsorbed on the mask plate to different positions.

[0016] After adopting the above technical solution, the present invention has the following beneficial effects compared with the prior art: In the embodiment of the present application, by using a new layout of the pulley assembly and the suction pipe, the problem of creases in the air pipe during the reciprocating motion of the mask plate is avoided. This design ensures the smoothness of the air path, thereby improving the reliability of the adsorption and transmission of the mask plate. By changing the movement of the air pipe from the drag chain to the guidance of the pulley assembly, the direct contact and friction between the air pipe and the drag chain are reduced, and the fixed pulley assembly also includes a first power source that can be connected to the fixed pulley, so that the connection and disconnection of the fixed pulley and the first power source can be selectively controlled according to the transmission direction of the mask plate, so that the air pipe can be protected to the greatest extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure of the transmission component in the embodiment of the present application is shown in FIG. Figure 1 ; Figure 2 The structure of the transmission component in the embodiment of the present application is shown in FIG. Figure 2 ; Figure 3 The structure of the transmission component in the embodiment of the present application is shown in FIG. Figure 3 ; Figure 4 Schematic diagram of the structure of the first driving source in the embodiment of the present application.

[0018] in: 1-Trachea connector; 2-Suction tube; 3- Motor; 4-Electromagnetic suction mechanism; 5- movable pulley assembly; 6- slide; 7-Mask Plate 8- Sensor; 9-fixed pulley assembly; 20-fixed bracket 21-yoke assembly; 22-rotating mechanism; 23-armature; 24-right shaft sleeve; 25-control line; 26-left shaft sleeve; 100 - first guide portion; 200 - second guide portion. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0020] Throughout the specification and claims, the following terms have at least the meanings explicitly associated herein, unless the context dictates otherwise. The meanings identified below do not necessarily limit the terms, but merely provide illustrative examples of the terms. In the description of the present invention, the phrase "in one embodiment" does not necessarily refer to the same embodiment, although it may refer to the same embodiment. Similarly, the phrase "in some embodiments" as used herein, when used multiple times, does not necessarily refer to the same embodiment, although it may refer to the same embodiment. As used herein, the term "or" is an inclusive "or" operator and is equivalent to the term "and / or", unless the context clearly dictates otherwise. The term "based on" is not exclusive and allows for additional factors not described, unless the context clearly dictates otherwise. The word "exemplary" means "used as an example, instance or illustration" in this article. Any embodiment described herein as "exemplary" is not necessarily interpreted as being superior or superior to other embodiments. The scope of the present invention is limited only by the scope of the appended claims, and any examples set forth in this specification are not intended to be limiting, but only to set forth some of the many possible embodiments of the claimed invention. The various embodiments provided by the present invention should not be interpreted as limiting the scope of protection of the present invention.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0023] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0025] Background In the field of semiconductor manufacturing, photolithography machines are key equipment used to accurately transfer circuit patterns onto silicon wafers. During the photolithography process, the pattern on the mask is transferred to the silicon wafer through the exposure system of the photolithography machine to form an integrated circuit. The precise transfer of the mask is crucial to the accuracy and efficiency of the photolithography process.

[0026] The mask plate in the prior art is usually equipped with an air suction port for fixing the mask plate by vacuum adsorption. The air suction port is connected to an air suction pipe. When the mask plate moves back and forth, the air pipe also moves accordingly. In order to prevent the air pipe from affecting the reciprocating movement of the mask plate, the original conventional structure is to put the air pipe into a drag chain to allow it to participate in the movement. However, the disadvantage is that the air pipe will be creased during the reciprocating motion, affecting the smoothness of the air path; the drag chain will cause friction during operation to generate dust, noise and vibration.

[0027] Based on this, Figure 1-Figure 4As shown, a first aspect of an embodiment of the present application provides a transmission component for adsorbing and transmitting a mask plate in a photolithography machine, characterized in that the transmission component includes: A mask plate disc 7, on which a suction port is formed for adsorbing the mask plate; A guide mechanism, the guide mechanism includes a first guide portion 100 extending laterally, and a second guide portion 200 located at the extension end of the first guide portion 100 and extending downwardly, and the mask plate plate 7 can be driven to reciprocate in the extension direction of the first guide portion 100 to transfer the mask plate adsorbed on the mask plate plate 7 to different positions; The pulley assembly includes a fixed pulley assembly 9 whose position is fixed and a movable pulley assembly 5 whose position can be changed. The fixed pulley assembly 9 includes a fixed pulley rotatably arranged at the extended end of the first guide portion 100 and located at the top position of the second guide portion 200. The movable pulley assembly 5 includes a movable pulley rotatably arranged on the second guide portion 200 and capable of moving up and down along the second guide portion 200. An air intake pipe 2, one end of which is connected to the air intake port of the mask plate 7, and the other end of which is connected to the second guide portion 200 after being wound around a set pulley and a movable pulley; The fixed pulley assembly 9 also includes a first power source that can be connected and disconnected to the fixed pulley. When the first power source is connected to the fixed pulley, the fixed pulley can rotate under the drive of the first power source. When the first power source is disconnected from the fixed pulley, the fixed pulley can rotate under the friction when the trachea moves.

[0028] In the embodiment of the present application, by using a new layout of the pulley assembly and the suction pipe 2, the problem of creases in the air pipe during the reciprocating motion of the mask plate is avoided. This design ensures the smoothness of the air path, thereby improving the reliability of the adsorption and transmission of the mask plate. By changing the movement of the air pipe from the drag chain to the guidance of the pulley assembly, the direct contact and friction between the air pipe and the drag chain are reduced, and the fixed pulley assembly 9 also includes a first power source that can be connected to the fixed pulley, so that the connection and disconnection of the fixed pulley and the first power source can be selectively controlled according to the transmission direction of the mask plate, so that the air pipe can be protected to the greatest extent.

[0029] Furthermore, in some possible implementations, the transmission component further includes: A controller, the controller is used to control the on and off of the first power source and the fixed pulley; in When the mask plate 7 is driven to move in the first direction toward one side of the fixed pulley, the first power source is controlled to be disconnected from the fixed pulley, so that the movable pulley can slide downward along the second guide portion 200 under the action of its own gravity; When the mask plate 7 is driven to move in the second direction away from the fixed pulley, the first power source is controlled to be connected to the fixed pulley to rotate the fixed pulley, and the fixed pulley driven to rotate by the first power source can drive the air pipe to move in the second direction, and the air pipe driven to move in the second direction by the fixed pulley can pull the movable pulley upward, so that the movable pulley can overcome its own gravity and slide upward along the second guide part 200.

[0030] In the embodiment of the present application, through the precise control of the controller, the connection state between the first power source and the fixed pulley can be dynamically adjusted according to the moving direction and speed of the mask plate disc 7, so as to accurately control the tension of the trachea. This helps to maintain the stability of the trachea at different operation stages and avoid the transmission of the mask plate being affected by excessive or insufficient tension. When the mask plate disc 7 moves toward the fixed pulley, the controller disconnects the first power source from the fixed pulley, allowing the movable pulley to slide downward along the second guide portion 200 under the action of gravity, which reduces the additional power demand and improves the energy efficiency of the system. On the contrary, when the mask plate disc 7 moves away from the fixed pulley, the controller connects the first power source, causing the fixed pulley to rotate and drive the trachea, thereby pulling the movable pulley to slide upward to overcome gravity.

[0031] Specifically, the movement of the mask plate 7 toward the fixed pulley is regarded as the positive direction of the mask plate 7, and the movement of the mask plate 7 away from the fixed pulley is regarded as the negative direction of the mask plate 7, that is, the movement of the mask plate 7 in the positive direction uses gravity to pull the suction pipe 2 to move; when moving in the negative direction, the suction pipe 2 is driven to move by the rotation of the fixed pulley, thereby ensuring that the suction pipe 2 will not be pulled by the gravity of the movable pulley when the mask plate 7 moves in the negative direction.

[0032] Furthermore, in some possible implementations, the transmission component further includes: A sensor 8, the sensor 8 is used to detect and output a movement parameter value representing the movement of the mask plate 7 in the second direction; The controller is used to control the driving parameter of the first driving source according to the movement parameter value; The moving parameter value at least includes the acceleration value of the mask plate 7 when it moves, and the driving parameter at least includes the rotation speed value when the first driving source drives the fixed pulley to rotate.

[0033] In the embodiment of the present application, the movement parameters of the mask plate 7, such as the acceleration value, are detected in real time by the sensor 8. The system can monitor the movement state of the mask plate 7 in real time and respond quickly to any changes, thereby improving the response speed and flexibility of the system. The controller adjusts the driving parameters of the first power source, such as the rotation speed, according to the movement parameter values ​​provided by the sensor 8, such as the acceleration. This precise control helps to optimize the rotation of the fixed pulley and ensure that the tension of the air pipe matches the movement state of the mask plate 7, thereby improving the stability and efficiency of the transmission process. By precisely controlling the driving parameters of the first power source, the system can provide appropriate power according to actual needs, avoiding energy waste caused by over-driving and improving the energy efficiency of the entire system.

[0034] Specifically, the controller controls the first power source {preferably motor 3} according to the feedback of the acceleration sensor, wherein the movement between motor 3 and the fixed pulley is connected only when a signal is given by the controller. In the positive direction of movement, the shaft of motor 3 is disengaged and has no effect on the movement.

[0035] Furthermore, in some possible implementations, when the mask plate 7 moves at the acceleration a, the rotation speed value v must satisfy the requirement that the air pipe between the mask plate and the second guide portion 200 is always in a straight state during the movement of the mask plate.

[0036] In the embodiment of the present application, by ensuring that the air tube is always straight during the movement of the mask plate 7, creases and damage caused by bending or excessive bending of the air tube can be avoided, thereby extending the service life of the air tube and maintaining its air tightness. The straightened air tube helps to maintain a stable air path connection and ensure the continuity and uniformity of the airflow, which is crucial for maintaining stable adsorption and precise positioning of the mask plate 7. Stable air tube tension helps to improve the transmission accuracy of the mask plate 7, because any fluctuation in tension may affect the movement speed and direction of the mask plate 7, thereby affecting the accuracy of the lithography process. By precisely controlling the rotation speed of the fixed pulley to keep the air tube straight, the system can operate more efficiently and reduce additional energy consumption and potential system failures caused by unstable air tube tension.

[0037] Further, in some possible implementations, a slideway 6 and an air pipe connector 1 are provided on the second guide portion 200, the slideway 6 is extended from the bottom to the top of the second guide portion 200, and the air pipe connector 1 is provided above the slideway 6; The movable pulley assembly 5 includes a movable pulley body and a slider, the movable pulley body is rotatably arranged on the slider, and the slider is slidably arranged on the slideway 6; One end of the air pipe away from the mask plate 7 bypasses the fixed pulley and the movable pulley body and is connected to the air pipe connector 1 of the second guide part 200 .

[0038] The movable pulley body in the embodiment of the present application is rotatably arranged on the slider, and the slider is slidably arranged on the slideway 6. This design allows the movable pulley assembly 5 to flexibly move up and down along the slideway 6 to meet the requirements of adjusting the tension of the trachea at different positions. In addition, by arranging the slideway 6 and the trachea connector 1 on the second guide portion 200, and arranging the trachea connector 1 above the slideway 6, the movable pulley assembly 5 can have a sufficiently long movement stroke, so that when the movable pulley assembly 5 moves on the second guide portion 200, it can always ensure that the suction pipe 2 can be in a straight state.

[0039] Further, in some possible implementations, the slider is an open slider having an accommodation cavity formed therein and at least an opening at the top, and the movable pulley body is rotatably disposed in the accommodation cavity of the slider; The air pipe extends into the accommodating cavity through the top opening of the slider, and is wound around the bottom of the movable pulley body and then extends out through the top opening again. The air pipe extending out through the top opening again is connected to the air pipe joint 1.

[0040] In the embodiment of the present application, by setting the movable pulley body in the accommodating cavity of the open-type slider, the air pipe extends in and out through the opening at the top of the slider, thereby achieving a more compact layout, reducing space occupancy, and making the entire system more compact and efficient. The air pipe is directly connected to the movable pulley body through the opening at the top of the slider, which simplifies the connection method of the air pipe, reduces additional connecting components, and reduces the complexity and potential failure points of the system. Since the air pipe is wound around the bottom of the movable pulley body inside the slider, this layout helps to maintain the stability of the air pipe and reduce the impact of the swing or vibration of the air pipe on the transmission accuracy. The design of the open-type slider makes the movable pulley body easier to access and maintain, and also facilitates the replacement and maintenance of the air pipe, improving the convenience of maintenance.

[0041] Further, in some possible implementations, the fixed pulley includes a fixed pulley body and a mounting block, the mounting block is an open-type mounting block having a mounting cavity formed therein and having openings at least at the bottom and the side, and the fixed pulley body is rotatably disposed in the mounting cavity; The air pipe extends into the accommodating cavity through the side opening of the mounting block, and is arranged around the top of the fixed pulley body and then extends downward through the bottom opening of the mounting block. The first power source is connected to the mounting block and can be connected to the fixed pulley body.

[0042] In the embodiment of the present application, the fixed pulley body is arranged in the mounting cavity of the open-type mounting block, and the air pipe extends in and out through the side opening of the mounting block, thereby achieving a more compact layout, reducing space occupancy, and making the entire system more compact and efficient. The air pipe is directly connected to the fixed pulley body through the side opening of the mounting block, which simplifies the connection method of the air pipe, reduces additional connecting components, and reduces the complexity and potential failure points of the system. Since the air pipe is wound around the top of the fixed pulley body inside the mounting block, this layout helps to maintain the stability of the air pipe and reduce the impact of the swing or vibration of the air pipe on the transmission accuracy. The design of the open-type mounting block makes the fixed pulley body easier to access and maintain, and also facilitates the replacement and maintenance of the air pipe, improving the convenience of maintenance.

[0043] Further, in some possible implementations, the first guide portion 100 includes a first guide rail extending in a horizontal direction, and the second guide portion 200 includes a second guide rail extending in a vertical direction; The grinding plate is slidably arranged on a first guide rail extending in a horizontal direction, and the fixed pulley assembly 9 is connected to the extended end of the first guide rail through a connecting member.

[0044] Further, in some possible implementations, the mask plate 7 includes a first plate surface disposed toward the bottom and a second plate surface disposed opposite to the first plate surface and toward the top, and the air inlet is disposed through the first plate surface and the second plate surface; The air inlet is opened on one side of the first disk surface to form an air inlet end for adsorbing the mask plate in the photolithography machine, and the air inlet is opened on one side of the second disk surface to form an air outlet end for connecting the air pipe.

[0045] Further, in some possible implementations, the grinding plate is provided with n air intake ports, and each air intake port is provided with an air pipe connector 1 connected to an air intake pipe 2; The fixed pulley assembly 9 includes n fixed pulley bodies arranged in a transverse direction, and the movable pulley assembly 5 includes n movable pulley bodies arranged in a transverse direction, and the n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged one by one in the vertical direction; The n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged in a vertically corresponding manner to form n transversely arranged pulley blocks, wherein an air pipe is wound around each pulley block, and n≥2.

[0046] In the embodiment of the present application, multiple air intake ports are arranged on the grinding plate, and each air intake port is connected to an air pipe, so as to enhance the adsorption capacity of the mask plate and ensure that the mask plate can be effectively fixed at different positions. Multiple fixed pulleys and movable pulley bodies are arranged horizontally and arranged one by one in the up and down directions, which helps to achieve a more uniform tension distribution on the air pipe and reduce the transmission instability caused by uneven tension. The design allows the number of air intake ports and pulley groups to be increased or decreased as needed (n≥2), providing flexibility and scalability of the system to accommodate mask plates of different sizes and shapes. An air pipe is wound around each pulley group, which optimizes the layout of the air pipe, reduces mutual interference between air pipes, and improves the efficiency of the air pipe management system. The wear of the air pipe during movement is reduced by the corresponding arrangement of the horizontally arranged fixed pulleys and movable pulley bodies, because each air pipe is guided by a fixed pulley group, which reduces the failure rate.

[0047] Preferably, the value of n is 3.

[0048] Further, in some possible implementations, the first driving source includes a motor 3 and an electromagnetic attraction mechanism 4 transmission-connected to the motor 3, and the electromagnetic attraction mechanism 4 has a first state when it is adsorbed together with the fixed pulley, and a second state when it is separated from the fixed pulley; When the electromagnetic attraction mechanism 4 is in the first state where it is attracted to the fixed pulley, the motor 3 can drive the fixed pulley to rotate through the attraction mechanism.

[0049] Specifically, Figure 4 As shown, the motor 3 is connected via the left shaft sleeve 26. The positioning of the fixed bracket 20 is mainly to ensure the fixation of the yoke assembly 22 so that it does not move with the rotation of the shaft. The yoke assembly 21 adsorbs the armature 23 under the action of the control line 25. When the yoke assembly does not move, the motor 3 drives the left shaft sleeve and the rotating mechanism to move; when the yoke assembly 21 moves, it will adsorb the armature 22, and the armature 22 drives the right shaft sleeve to move. The right shaft sleeve 24 is connected to the pulley block, and the control line 25 receives the signal from the controller.

[0050] Furthermore, the second aspect of the embodiment of the present application also provides a lithography machine, which includes the transmission component provided by the first aspect of the embodiment of the present application, and the lithography machine has a second power source, and the second power source is used to drive the mask plate 7 to reciprocate in the extension direction of the first guide part 100, so as to transfer the mask plate adsorbed on the mask plate plate 7 to different positions.

[0051] In the above-mentioned embodiments of the present application, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments. The steps shown in the relevant flow chart can be executed in a computer system such as a set of computer executable instructions, and although the logical order is shown in the flow chart, in some cases, the steps shown or described can be executed in an order different from that here. In other words, the order of steps described in the foregoing embodiments is only an example, and it is also within the scope of protection of the embodiments of the present application to reasonably adjust the order of steps based on the content of the embodiments of the present application.

[0052] The sequence of serial numbers or introduction of the embodiments of the present application is for description only and does not represent the superiority or inferiority of the embodiments.

[0053] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0054] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A transmission component for absorbing and transmitting a mask plate in a photolithography machine, characterized in that: The transmission component comprises: A mask plate disc (7), wherein an air suction port is formed on the mask plate disc (7) and is used for adsorbing the mask plate; A guide mechanism, the guide mechanism comprising a first guide portion (100) extending laterally, and a second guide portion (200) located at the extension end of the first guide portion (100) and extending downwardly, the mask plate disc (7) being driven to reciprocate in the extension direction of the first guide portion (100) so as to transfer the mask plate adsorbed on the mask plate disc (7) to different positions; A pulley assembly, the pulley assembly comprising a fixed pulley assembly (9) whose position is fixed and a movable pulley assembly (5) whose position can be changed, the fixed pulley assembly (9) comprising a fixed pulley rotatably arranged at the end of the extension of the first guide portion (100) and located at the top of the second guide portion (200), and the movable pulley assembly (5) comprising a movable pulley rotatably arranged on the second guide portion (200) and capable of moving up and down along the second guide portion (200); An air intake pipe (2), one end of the air intake pipe (2) being connected to the air intake port of the mask plate (7), and the other end of the air intake pipe (2) being connected to the second guide portion (200) after being wound around the fixed pulley and the movable pulley; The fixed pulley assembly (9) further comprises a first power source which is connectable and disconnectable to the fixed pulley; when the first power source is connected to the fixed pulley, the fixed pulley can rotate under the drive of the first power source; when the first power source is disconnected from the fixed pulley, the fixed pulley can rotate under the friction when the trachea moves.

2. The transmission component according to claim 1, characterized in that The transmission component also includes: A controller, the controller is used to control the on and off of the first power source and the fixed pulley; in When the mask plate (7) is driven to move in a first direction toward one side of the fixed pulley, the first power source is controlled to be disconnected from the fixed pulley, so that the movable pulley can slide downward along the second guide portion (200) under the action of its own weight; When the mask plate (7) is driven to move in a second direction away from the fixed pulley, the first power source is controlled to be connected to the fixed pulley to rotate the fixed pulley, and the fixed pulley driven to rotate by the first power source can drive the air pipe to move in the second direction, and the air pipe driven to move in the second direction by the fixed pulley can pull the movable pulley upward, so that the movable pulley can overcome its own weight and slide upward along the second guide portion (200).

3. The transmission component according to claim 2, characterized in that The transmission component also includes: A sensor (8), the sensor (8) being used to detect and output a movement parameter value representing the movement of the mask plate (7) in the second direction; The controller is used to control the driving parameter of the first driving source according to the movement parameter value; The movement parameter value at least includes an acceleration value of the mask plate (7) when it moves, and the drive parameter at least includes a rotation speed value when the first drive source drives the fixed pulley to rotate.

4. The transmission component according to claim 3, characterized in that When the mask plate (7) moves at an acceleration a, the rotation speed value v must satisfy the requirement that the air pipe between the mask plate and the second guide portion (200) is always in a straightened state during the movement of the mask plate.

5. The transmission component according to any one of claims 1 to 4, characterized in that: The second guide portion (200) is provided with a slideway (6) and an air pipe joint (1), wherein the slideway (6) is extended from the bottom to the top of the second guide portion (200), and the air pipe joint (1) is arranged above the slideway (6); The movable pulley assembly (5) comprises a movable pulley body and a slider, the movable pulley body is rotatably disposed on the slider, and the slider is slidably disposed on the slideway (6); One end of the air pipe away from the mask plate (7) bypasses the fixed pulley and the movable pulley body and is connected to the air pipe joint (1) of the second guide part (200).

6. The transmission component according to claim 5, characterized in that The slider is an open slider with a receiving cavity formed inside and at least an opening on the top, and the movable pulley body is rotatably arranged in the receiving cavity of the slider; The air pipe extends into the accommodating cavity through the top opening of the slider, and is wound around the bottom of the movable pulley body before extending out through the top opening again. The air pipe extending out through the top opening again is connected to the air pipe joint (1).

7. The transmission component according to any one of claims 1 to 4, characterized in that: The fixed pulley comprises a fixed pulley body and a mounting block, wherein the mounting block is an open-type mounting block having a mounting cavity formed therein and at least a bottom and a side with openings, and the fixed pulley body is rotatably disposed in the mounting cavity; The air pipe extends into the accommodating cavity through the side opening of the mounting block, is wound around the top of the fixed pulley body, and then extends downward through the bottom opening of the mounting block. The first power source is connected to the mounting block and can be connected to the fixed pulley body in an on-off manner.

8. The transmission component according to any one of claims 1 to 4, characterized in that: The first guide portion (100) comprises a first guide rail extending in a horizontal direction, and the second guide portion (200) comprises a second guide rail extending in a vertical direction; The grinding plate disc is slidably arranged on the first guide rail extending in the horizontal direction, and the fixed pulley assembly (9) is connected to the extended end of the first guide rail through a connecting piece.

9. The transmission component according to any one of claims 1 to 4, characterized in that: The mask plate (7) comprises a first plate surface arranged towards the bottom and a second plate surface arranged opposite to the first plate surface and towards the top, and the air intake is arranged through the first plate surface and the second plate surface; The air inlet is opened on one side of the first disk surface to form an air inlet end for adsorbing the mask plate in the photolithography machine, and the air inlet is opened on one side of the second disk surface to form an air outlet end for connecting the air pipe.

10. The transmission component according to any one of claims 1 to 4, characterized in that: The grinding plate is provided with n air intake ports, and each of the air intake ports is provided with an air pipe joint (1) connected to the air intake pipe (2); The fixed pulley assembly (9) comprises n fixed pulley bodies arranged in a transverse direction, and the movable pulley assembly (5) comprises n movable pulley bodies arranged in a transverse direction, and the n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged one by one in a vertical direction; The n transversely arranged fixed pulley bodies and the n transversely arranged movable pulley bodies are arranged into n transversely arranged pulley blocks in a corresponding manner, wherein each of the pulley blocks is wound with an air pipe, and n≥2.

11. The transmission component according to any one of claims 1 to 4, characterized in that: The first driving source comprises a motor (3) and an electromagnetic attraction mechanism (4) drivingly connected to the motor (3), the electromagnetic attraction mechanism (4) having a first state when it is attracted to the fixed pulley, and a second state when it is separated from the fixed pulley; When the electromagnetic attraction mechanism (4) is in a first state where it is attracted to the fixed pulley, the motor (3) can drive the fixed pulley to rotate via the attraction mechanism.

12. A photolithography machine, characterized in that: The transmission component comprises the transmission component according to any one of claims 1 to 11, wherein the lithography machine has a second power source, and the second power source is used to drive the mask plate (7) to move back and forth in the extension direction of the first guide part (100), so as to transmit the mask plate adsorbed on the mask plate plate (7) to different positions.

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