Simulation method and device of surface acoustic wave device, electronic equipment and storage medium

Abstract

The invention discloses a simulation method and device of a surface acoustic wave device, electronic equipment and a storage medium, the simulation method of the surface acoustic wave device can be applied to the technical field of surface acoustic wave simulation, and the method comprises the following steps: acquiring field distribution data of a total sound field in the surface acoustic wave device; determining target spatial domain displacement distribution data in the field distribution data, and selecting a target phase point in any simple harmonic period based on the amplitude of a resonance field corresponding to each phase point indicated by the target spatial domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the unselected phase point in any simple harmonic period; and performing conversion processing from a spatial domain to a wavenumber domain on corresponding data of the target phase point in the target spatial domain displacement distribution data to obtain a wavenumber domain displacement distribution result. The interference of the surface acoustic wave resonance field on the wave number domain displacement distribution result is reduced as much as possible on the premise of not influencing other components of the total sound field.

Description

Technical Field

[0001] The present application relates to the technical field of surface acoustic wave simulation, and in particular to a simulation method, device, electronic device and storage medium for a surface acoustic wave device. Background Art

[0002] like Figure 1 As shown in the figure, a surface acoustic wave resonator (SAW resonator) is usually composed of a surface electrode, a piezoelectric film and a supporting substrate. The surface electrode can be divided into a two-side reflection grid and an interdigital transducer (IDT) according to the geometric structure and function. The interdigital transducer is composed of two sets of interdigital electrode arrays, which are arranged periodically with the working wavelength of the SAW device. In addition, the interdigital transducer also includes a bus bar for providing electrical connection. It should be noted that the patterned electrodes on the surface do not necessarily strictly follow the above structure, and there may also be deformation and expansion. When the surface acoustic wave device is working, the energy of the excited surface acoustic wave is mainly concentrated on the upper surface of the film (that is, the definition of the surface acoustic wave). However, when the speed of the surface acoustic wave is higher than the speed of sound in the substrate, energy leakage will occur, resulting in a serious decline in device performance. This leakage will not only reduce the efficiency of the device, but also have an adverse effect on its frequency stability and selectivity.

[0003] In order to accurately evaluate and control the leakage phenomenon in the surface acoustic wave resonator, simulation technology can be used. The simulation technology of the surface acoustic wave leakage phenomenon is mainly realized by the joint simulation of the finite element method (FEM) and the two-dimensional discrete fast Fourier transform (2DFFT). This method can simulate the behavior of the surface acoustic wave inside the device, especially its leakage in the substrate. However, in the actual simulation process, since the leakage sound field of the resonator usually leaks to the substrate in the form of body wave radiation, when performing 2DFFT analysis on the leakage sound field, the final wave number domain displacement distribution diagram will be seriously disturbed by the constrained surface wave sound field, thereby affecting the accurate analysis and judgment of the surface acoustic wave leakage situation. Summary of the invention

[0004] In order to solve the problems of the prior art, the embodiments of the present application provide a method, device, electronic device and storage medium for simulating a surface acoustic wave device. The technical solution is as follows:

[0005] In one aspect, a method for simulating a surface acoustic wave device is provided, the method comprising:

[0006] Acquiring field distribution data of a total acoustic field inside a surface acoustic wave device; the total acoustic field is composed of a plurality of components, and the plurality of components includes a resonant field;

[0007] Determine the target spatial domain displacement distribution data in the field distribution data, and select a target phase point within any simple harmonic period based on the amplitude of the resonance field corresponding to each phase point indicated by the target spatial domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected within any simple harmonic period;

[0008] The data corresponding to the target phase point in the target spatial domain displacement distribution data is converted from the spatial domain to the wave number domain to obtain a wave number domain displacement distribution result; the wave number domain displacement distribution result is used to evaluate the leakage of the surface acoustic wave inside the surface acoustic wave device.

[0009] On the other hand, a simulation device for a surface acoustic wave device is provided, the device comprising:

[0010] A data acquisition module, used to acquire field distribution data of a total acoustic field inside a surface acoustic wave device; the total acoustic field is composed of multiple components, and the multiple components include a resonant field;

[0011] A phase point selection module, used to determine the target space domain displacement distribution data in the field distribution data, and select a target phase point within any simple harmonic period based on the amplitude of the resonance field corresponding to each phase point indicated by the target space domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected within any simple harmonic period;

[0012] The data conversion module is used to convert the data corresponding to the target phase point in the target spatial domain displacement distribution data from the spatial domain to the wave number domain to obtain the wave number domain displacement distribution result; the wave number domain displacement distribution result is used to evaluate the leakage of the surface acoustic wave inside the surface acoustic wave device.

[0013] In an exemplary embodiment, the phase point selection module includes:

[0014] A region identification module, used to identify a target region where acoustic wave energy is concentrated inside the surface acoustic wave device based on the field distribution data;

[0015] A data determination module, used to determine the target space domain displacement distribution data corresponding to the target area in the field distribution data;

[0016] An amplitude determination module, used to determine the amplitude of the resonant field corresponding to each phase point in any simple harmonic period based on the target spatial domain displacement distribution data;

[0017] The phase determination module is used to determine the target phase point based on the amplitude of the resonant field corresponding to each phase point in any simple harmonic period.

[0018] In an exemplary embodiment, the data acquisition module includes:

[0019] A model building module, used to build a slice model of the surface acoustic wave device;

[0020] The model simulation module is used to perform finite element simulation on the slice model to obtain a simulation model of the slice model of the surface acoustic wave device; the simulation model indicates field distribution data of the total acoustic field inside the surface acoustic wave device.

[0021] In an exemplary embodiment, the region identification module includes:

[0022] The resonance energy module is used to identify the target area where the acoustic wave energy is concentrated in the resonance field inside the surface acoustic wave device based on the field distribution data; the data corresponding to the resonance field in the field distribution data is manifested as resonance in the form of standing waves.

[0023] In an exemplary embodiment, the region identification module includes:

[0024] A section selection module is used to select the target section as the target area in the simulation model based on the elastic field distribution and the electric field distribution in the field distribution data; the acoustic wave energy concentration on the target section is greater than the acoustic wave energy concentration on the section that is not selected in the simulation model.

[0025] In an exemplary embodiment, the data conversion module includes:

[0026] A data preprocessing module, used for preprocessing the data corresponding to the target phase point in the target space domain displacement distribution data to remove noise interference of the data;

[0027] The Fourier transform module is used to perform two-dimensional Fourier transform processing on the preprocessed data to obtain the displacement distribution result in the wave number domain.

[0028] In an exemplary embodiment, the device further includes a leakage analysis module for evaluating the leakage of the surface acoustic wave inside the surface acoustic wave device based on the wave number domain displacement distribution result, and the leakage analysis module includes:

[0029] A spectrum analysis module, used for performing spectrum analysis on the wave number domain displacement distribution result to obtain a spectrum analysis result; the spectrum analysis result represents the distribution of the acoustic wave energy inside the surface acoustic wave device;

[0030] A parameter extraction module, used for extracting key parameters of the total sound field and key parameters of the leakage field from the wavenumber domain displacement distribution result based on the spectrum analysis result;

[0031] The performance evaluation module is used to evaluate the performance index of the internal leakage field of the surface acoustic wave device by using the key parameters of the total acoustic field and the key parameters of the leakage field.

[0032] On the other hand, an electronic device is provided, comprising a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or the at least one program is loaded and executed by the processor to implement the simulation method of the surface acoustic wave device in any of the above aspects.

[0033] On the other hand, a computer-readable storage medium is provided, in which at least one instruction or at least one program is stored, and the at least one instruction or the at least one program is loaded and executed by a processor to implement a simulation method of a surface acoustic wave device as described in any of the above aspects.

[0034] On the other hand, a computer program product or a computer program is provided, the computer program product or the computer program includes computer instructions, the computer instructions are stored in a computer-readable storage medium. A processor of an electronic device reads the computer instructions from the computer-readable storage medium, and the processor executes the computer instructions, so that the electronic device performs the simulation method of the surface acoustic wave device of any one of the above aspects.

[0035] The simulation method of the embodiment of the present application is based on the acoustic field distribution characteristics of the surface acoustic wave device. Specifically, the total acoustic field of the resonator can be divided into two parts: the resonant field and the leakage field. For the resonant field, the field distribution is a resonance in the form of standing waves. The vibration image within a simple harmonic period is as follows: Figure 2 As shown; for the leakage field, the field distribution is manifested as traveling wave propagation, and the vibration image within a simple harmonic cycle is as follows Figure 3As shown. It can be seen that the vibration amplitude of the standing wave field is affected by the phase, while the vibration amplitude of the traveling wave field is not affected by the phase. Therefore, for the total sound field including the resonant field and the leakage field, by finding the target phase point in any simple harmonic period, the amplitude of the resonant field corresponding to the target phase point is smaller than the amplitude of the resonant field corresponding to the phase point that is not selected in any simple harmonic period, and then at this moment the vibration of the total sound field is mainly composed of the leakage field, the data corresponding to the target phase point in the target spatial domain displacement distribution data is converted from the spatial domain to the wave number domain, and the displacement distribution result in the wave number domain is obtained, which reduces the interference of the surface acoustic wave resonance field on the displacement distribution result in the wave number domain as much as possible without affecting the leakage field, and then the leakage of the surface acoustic wave inside the surface wave device can be accurately analyzed and judged. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 It is a schematic structural diagram of a surface acoustic wave resonator and its surface electrode provided in an embodiment of the present application;

[0038] Figure 2 It is a schematic diagram of the vibration of the resonant field provided in an embodiment of the present application within a simple harmonic period of time;

[0039] Figure 3 It is a schematic diagram of the vibration of the leakage field provided by the embodiment of the present application within a simple harmonic period of time;

[0040] Figure 4 It is a schematic diagram of an application scenario of a simulation method for a surface acoustic wave device provided in an embodiment of the present application;

[0041] Figure 5 It is a flow chart of a simulation method of a surface acoustic wave device provided in an embodiment of the present application;

[0042] Figure 6 is a schematic diagram of spatial domain displacement distribution provided by an embodiment of the present application;

[0043] Figure 7 It is a schematic diagram of spatial domain vibration modes corresponding to different phases provided in an embodiment of the present application;

[0044] Figure 8 It is a wave number domain vibration diagram corresponding to different phases provided in an embodiment of the present application;

[0045] Fig. 9 It is a structural block diagram of a simulation device for a surface acoustic wave device provided in an embodiment of the present application;

[0046] Fig.10 It is a hardware structure block diagram of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0048] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or server that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0049] It is understandable that in the specific implementation of this application, related data such as user information is involved. When the above embodiments of this application are applied to specific products or technologies, user permission or consent is required, and the collection, use and processing of relevant data need to comply with relevant laws, regulations and standards of relevant countries and regions.

[0050] The terms involved in the embodiments of the present application are explained below.

[0051] Surface acoustic wave device: also known as surface acoustic wave resonator, the full name of which is surface acoustic wave, or SAW for short; the general structure is as follows Figure 1 As shown, it includes a supporting substrate, a piezoelectric film and a surface electrode arranged in this order from bottom to top. The surface electrode can usually be divided into a two-side reflection grid and an interdigital transducer according to the geometric structure and function. The interdigital transducer (IDT) is composed of two groups of interdigital electrodes that cross each other, an electrode array with the working wavelength of the SAW device as a period (marked as the first interdigital electrode and the second interdigital electrode respectively), and a bus bar that provides electrical connection.

[0052] Interdigital electrode: an important component of the interdigital transducer, specifically including the first interdigital electrode and the second interdigital electrode.

[0053] Longitudinal slice model: The unit model obtained by slicing the device along the direction perpendicular to the interdigital electrode is called a longitudinal slice model. It can be divided into three types of longitudinal slice models, corresponding to the width W G , W A , W B .

[0054] Transverse slicing model: A unit model obtained by slicing the device along a direction parallel to the interdigital electrodes is called a transverse slicing model. The transverse slicing model may be a unit model including a pair of interdigital electrodes or a single interdigital electrode.

[0055] The following is a specific embodiment of a simulation method for a surface acoustic wave device provided by the present application. Figure 4 , Figure 4 Schematic diagram of an application scenario of a method for simulating a surface acoustic wave device provided in an embodiment of the present application. Figure 4 As shown, it includes a server 401 and a terminal 402. Optionally, the server 401 and the terminal 402 may be connected via a wireless link or a wired link, which is not limited in the present disclosure.

[0056] Specifically, the server 401 may be an independent physical server, or a server cluster or distributed system composed of multiple physical servers, or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, CDN (Content Delivery Network), and big data and artificial intelligence platforms. Optionally, the operating system running on the server 401 may include but is not limited to IOS, Linux, Windows, Unix, and android systems.

[0057] Specifically, the terminal 402 may include, but is not limited to, electronic devices of the type of smart phones, desktop computers, tablet computers, laptop computers, smart speakers, digital assistants, augmented reality (AR) / virtual reality (VR) devices, smart wearable devices, etc. Optionally, the operating system running on the electronic device may include, but is not limited to, Android, IOS, Linux, Windows, etc.

[0058] In an optional embodiment, the server 401 can model the surface acoustic wave device to obtain a surface acoustic wave device model; the surface acoustic wave device model includes at least one core unit model; for each preset frequency of multiple preset frequencies, execute: based on the preset frequency, use the finite element algorithm to analyze the core unit model to obtain the system matrix equation of the core unit model; the system matrix equation is used to characterize the relationship between the system matrix, the degree of freedom vector on the preset side periodic boundary conditions, other degree of freedom vectors and the load vector on the preset side periodic boundary conditions, and other load vectors; classify and re-classify the various parameters in the system matrix equation of the core unit model The initial target matrix equation of the core unit model is obtained by rearrangement processing; the initial target matrix equation is used to characterize the relationship between the rearranged system matrix, the voltage on the electrical terminal, the potential on the floating potential, the other degree of freedom vectors after rearrangement and the load on the electrical terminal, the load on the floating potential, and the other load vectors after rearrangement; the target matrix equation is determined based on the initial target matrix equation of the core unit model; the admittance of the surface acoustic wave device at the preset frequency is determined based on the target matrix equation, the preset voltage on the electrical terminal and the preset frequency; based on the admittance of the surface acoustic wave device at each preset frequency in multiple preset frequencies, the frequency response finite element simulation curve of the admittance of the surface acoustic wave device is determined.

[0059] In addition, it should be noted that Figure 4 What is shown is only one application environment of the simulation method of the surface acoustic wave device provided by the present disclosure. In practical applications, other application environments may also be included, and this embodiment does not limit this.

[0060] See also Figure 5 , which shows a flow chart of a simulation method for a surface acoustic wave device provided in an embodiment of the present application. It should be noted that this specification provides method operation steps such as the embodiments or flow charts, but may include more or fewer operation steps based on conventional or non-creative labor. The order of steps listed in the embodiments is only one way of executing the steps among many orders, and does not represent the only order of execution. When the system or product is executed in practice, it can be executed in the order shown in the embodiments or the drawings or in parallel (for example, in a parallel processor or multi-threaded processing environment). Specifically, Figure 5 As shown, the method may include:

[0061] S501, obtaining field distribution data of the total acoustic field inside the surface acoustic wave device.

[0062] Among them, surface acoustic wave devices are electronic components that use mechanical waves propagating on the surface of piezoelectric materials to process electrical signals. Surface acoustic waves propagate on the surface of solids, and their amplitude decays rapidly as they penetrate deeper into the material. This type of device mainly relies on the piezoelectric effect of the material to work, that is, when an electric field is applied to the piezoelectric material, mechanical deformation will occur; conversely, mechanical deformation will also generate an electric field. Common surface acoustic wave devices include filters, delay lines, sensors, resonators, frequency converters, antenna switches, phase detectors, etc.

[0063] Among them, the total sound field is composed of multiple components, including the resonant field. Specifically, the total sound field refers to the comprehensive result of all sound wave activities in a given area. It contains all different types of sound wave components, which together constitute the sound field phenomenon we observe. The total sound field usually includes the resonant field, leakage field, reflection field, diffraction field, etc. For the resonator, the total sound field can be divided into two parts: the resonant field and the leakage field.

[0064] Specifically, the working principle of a resonator is to use its inherent resonant frequency to enable the sound waves propagating inside it to produce strong vibrations at a specific frequency. This vibration mode is the resonant field. Even in a well-designed resonator, there may be a certain degree of sound wave leakage. For example, due to the limitations of boundary conditions or the non-ideality of the material, the sound waves may gradually weaken during propagation and diffuse to the external space.

[0065] Field distribution data refers to the distribution of the intensity and direction of physical quantities (such as electric field, magnetic field, acoustic field, etc.) as they change with position in a specific area. In the simulation of surface acoustic wave devices, field distribution data is used to describe the distribution state of acoustic wave energy inside the device. Field distribution data can be obtained through experimental measurement or calculated through numerical simulation.

[0066] Specifically, for surface acoustic wave devices, field distribution data includes multiple aspects. Among them, the acoustic field distribution refers to the intensity distribution of acoustic waves in space, which is used to analyze the propagation characteristics of acoustic waves inside the device, such as reflection, refraction, diffraction and other phenomena. The displacement distribution describes the change in the position of each point inside the material relative to the initial position due to the action of the acoustic wave, reflecting the deformation of the material surface. The resonant field distribution refers to the field distribution formed when the acoustic wave resonates at a specific frequency, which is used to study the frequency response characteristics of the device. Ideally, the acoustic wave should be limited to propagation along the surface, but in practical applications, due to the inhomogeneity of the material or other factors, part of the acoustic wave energy may leak out of the device. The leakage field distribution is used to analyze this non-ideal energy leakage. For the elastic field distribution and the electric field distribution, in the surface acoustic wave device, due to the use of piezoelectric materials, the propagation of the acoustic wave will be accompanied by mechanical deformation (elastic field) and changes in charge distribution (electric field).

[0067] In an exemplary embodiment, the above step S501 may include the following steps:

[0068] Establish a slice model of surface acoustic wave devices;

[0069] Finite element simulation is performed on the slice model to obtain a simulation model of the slice model of the surface acoustic wave device; the simulation model indicates field distribution data of the total acoustic field inside the surface acoustic wave device.

[0070] Specifically, one or more planes are selected to intercept the surface acoustic wave device. These planes can pass through the interdigital transducer or other important structures. A two-dimensional model is established based on the selected planes. The model should include key components such as piezoelectric film, surface electrode, and reflection grating. The two-dimensional model can be more conveniently analyzed and visualized to simplify the three-dimensional problem so that the problem can be analyzed in a two-dimensional plane, so as to better analyze and understand the acoustic field distribution characteristics inside the surface acoustic wave device.

[0071] Specifically, the slice model is divided into a limited number of small units (grids), each of which can be approximated by a simple mathematical equation. The grid division should be fine enough to ensure the accuracy of the simulation, and the acoustic field data on each grid node is calculated to obtain the field distribution data of the total acoustic field inside the surface acoustic wave device. The simulation results are post-processed to generate a visual field distribution diagram, and the visual results can help intuitively understand the acoustic field distribution.

[0072] It can be seen from the above technical solutions of the embodiment of the present application that the embodiment of the present application can obtain the field distribution data of the total sound field inside the surface acoustic wave device by establishing a slice model of the surface acoustic wave device and performing finite element simulation on it, thereby simplifying the three-dimensional problem and improving the accuracy and efficiency of the analysis.

[0073] S503, determining target spatial domain displacement distribution data in the field distribution data, and selecting a target phase point within any simple harmonic period based on the amplitude of the resonant field corresponding to each phase point indicated by the target spatial domain displacement distribution data.

[0074] The spatial domain displacement distribution data describes how much the position of each point on the surface of the material is displaced relative to its static state when the sound wave propagates inside the device. Specifically, the spatial displacement distribution of the sound wave directly affects the amplitude of the resonant field. When designing a surface acoustic wave device, the spatial distribution of the sound wave can be controlled by adjusting parameters such as the spacing of the IDT, the properties of the piezoelectric material, and the geometric structure of the device, thereby affecting the amplitude under resonant conditions.

[0075] Among them, the target spatial domain displacement distribution data refers to a specific subset selected from the overall spatial domain displacement distribution data. The target spatial domain displacement distribution data usually focuses on key areas inside the device, such as the area near the interdigital transducer or other important structural features, so as to more accurately capture the details of the resonant field and leakage field.

[0076] The simple harmonic period refers to the length of time required for a complete cycle of simple harmonic motion. Simple harmonic motion is an idealized form of vibration in which an object reciprocates around its equilibrium position without resistance, and the relationship between its displacement and time can be described by a sine or cosine function.

[0077] The amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected in any simple harmonic period.

[0078] Specifically, a specific area is selected from the field distribution data, and the displacement distribution data in the area is extracted. The target spatial domain displacement distribution data obtained is used to analyze the propagation of sound waves in the area. Within a simple harmonic period, multiple phase points can be selected for analysis, and the phase points can be evenly distributed within a simple harmonic period. Analyze the resonant field amplitude at each phase point, and record the maximum displacement value at each phase point. The amplitude reflects the size of the sound wave energy. The larger the amplitude, the more concentrated the energy. Select the phase point with the smallest resonant field amplitude, because at this phase point, the contribution of the resonant field is the smallest and the contribution of the leakage field is the largest. At the target phase point, the energy of the sound wave is mainly contributed by the leakage field, and the situation of the leakage field can be analyzed more accurately. By analyzing the data of the target phase point, the design of the surface acoustic wave device can be better evaluated and optimized.

[0079] Specifically, the target phase point is selected to reduce the interference of the resonance field on the leakage field analysis. When the amplitude of the resonance field is the smallest, the contribution of the leakage field is relatively large. At this time, the analysis can more accurately capture the characteristics of the leakage field. The total acoustic field of the resonator can be divided into two parts: the resonance field and the leakage field. For the resonance field, the field distribution is a resonance in the form of standing waves. The vibration image within a simple harmonic period is as follows: Figure 2 As shown; for the leakage field, the field distribution is manifested as traveling wave propagation, and the vibration image within a simple harmonic cycle is as follows Figure 3 As shown. It can be seen that the vibration amplitude of the standing wave field is affected by the phase, while the vibration amplitude of the traveling wave field is not affected by the phase. Therefore, for the total sound field including the resonant field and the leakage field, within any simple harmonic period, the target phase point is found, and then the vibration of the total sound field at this moment is mainly composed of the leakage field. The displacement distribution result in the wave number domain is obtained based on the data of the target phase point in the displacement distribution data of the target space domain, so as to avoid the serious interference of the displacement distribution result in the wave number domain by the constrained surface wave acoustic field (mainly the resonant field).

[0080] Figure 6 The figure shows the displacement distribution along the upper surface of the film in the simulation results of a resonator slice model. It can be seen that the amplitude of the resonant field is different at different phases, while the amplitude of the leakage field on both sides is not affected. In particular, when the phase is 90°, the amplitude of the resonant field is almost zero. At this time, the total sound field can be regarded as a separate leakage field. Figure 7 It can be seen that the phase that makes the resonance field amplitude in the total sound field minimum is 90°. Therefore, the phase point when the phase is 90° is selected as the target phase point.

[0081] In an exemplary implementation, the above step S503 may include the following steps:

[0082] Based on the field distribution data, identify the target area where the acoustic wave energy is concentrated inside the surface acoustic wave device;

[0083] Determine the target space domain displacement distribution data corresponding to the target area in the field distribution data;

[0084] Based on the target spatial domain displacement distribution data, the amplitude of the resonant field corresponding to each phase point in any simple harmonic period is determined;

[0085] The target phase point is determined based on the amplitude of the resonant field corresponding to each phase point in any simple harmonic period.

[0086] Specifically, find out the target area where the sound wave energy is concentrated from the field distribution data. The target area is usually the part of the surface acoustic wave device with the most concentrated energy. In the determined target area, extract the displacement distribution data in the area, that is, the target space domain displacement distribution data. These data record the displacement of the sound waves in the target area. For the selected target area, analyze the amplitude of the resonant field at different phase points within a simple harmonic period. The amplitude reflects the size of the sound wave energy. After analyzing the amplitude of the resonant field corresponding to each phase point, select the phase point with the smallest amplitude of the resonant field because the contribution of the leakage field is the largest at this time.

[0087] Exemplarily, by analyzing the field distribution data, it is identified that the acoustic wave energy is most concentrated in the IDT region, the displacement distribution data is extracted in the IDT region, and the acoustic wave displacement in the region is recorded; multiple phase points are selected within a simple harmonic period, the resonant field amplitude at each phase point is analyzed, the maximum displacement value at each phase point is recorded, and a curve of the change in the resonant field amplitude is obtained; after analyzing the resonant field amplitude corresponding to each phase point, the phase point with the smallest resonant field amplitude is selected as the target phase point.

[0088] Specifically, based on the field distribution data, the target area where the acoustic wave energy is concentrated in the resonant field inside the surface acoustic wave device is identified; the data corresponding to the resonant field in the field distribution data is expressed as resonance in the form of standing waves. Figure 2As shown, the resonant field appears as a standing wave with fixed nodes and anti-nodes, and the phase remains consistent at different spatial locations. Figure 3 As shown, the leakage field is in the form of a traveling wave, with no fixed nodes and anti-nodes, and the phase changes linearly with the spatial position. Based on this, the data corresponding to the resonant field and the data corresponding to the leakage field can be distinguished from the field distribution data of the total sound field, and then the target area where the sound wave energy is concentrated in the resonant field can be identified based on the data corresponding to the resonant field in the field distribution data.

[0089] Specifically, based on the elastic field distribution and the electric field distribution in the field distribution data, a target section is selected as a target area in the simulation model; the acoustic wave energy concentration on the target section is greater than the acoustic wave energy concentration on the section not selected in the simulation model.

[0090] Among them, the elastic field reflects the mechanical vibration inside the surface acoustic wave device. Usually in the surface acoustic wave device, the elastic field is mainly concentrated near the interdigital transducer and the reflection grating.

[0091] The electric field reflects the charge distribution and electric field strength. In surface acoustic wave devices, the electric field and the elastic field are coupled to each other and jointly affect the propagation of acoustic waves.

[0092] Specifically, one or more target sections are selected in the simulation model. The target section may pass through the IDT or other important structures. The selection of the target section should take into account the symmetry and important areas of the SAW device.

[0093] Among them, the sound wave energy concentration reflects the density of sound wave energy in a specific area.

[0094] Specifically, in surface acoustic wave devices, there are some key areas, such as below the electrode and the surface wave propagation path. Selecting target sections in these areas can focus on these specific areas to study the behavior of sound waves in these areas in more detail.

[0095] It can be seen from the above technical solutions of the embodiments of the present application that the embodiments of the present application can magnify and highlight the key features inside the device by selecting the target area or target section, thereby making it easier to identify and analyze physical phenomena such as the distribution of acoustic wave energy and changes in field intensity, thereby guiding design optimization and improving device performance.

[0096] S505, performing a conversion process from the space domain to the wave number domain on the data corresponding to the target phase point in the target space domain displacement distribution data, and obtaining a wave number domain displacement distribution result.

[0097] Among them, the displacement distribution results in the wavenumber domain are used to evaluate the leakage of surface acoustic waves inside the surface acoustic wave device. Specifically, the displacement distribution results in the wavenumber domain refer to the displacement distribution results obtained in the wavenumber domain, which reflects the distribution of displacement amplitudes of different wavenumber components. By analyzing the displacement distribution in the wavenumber domain, the main wavenumber components of the leakage field and their intensity distribution can be identified.

[0098] Specifically, in the wave number domain, the characteristics of the leakage field can be more easily identified, and the displacement distribution results in the wave number domain are not disturbed by the resonant field. Therefore, the leakage situation inside the surface acoustic wave device can be more accurately evaluated and guide the subsequent design optimization.

[0099] Specifically, the data corresponding to the target phase point in the target space domain displacement distribution data is preprocessed to remove the noise interference of the data; the preprocessed data is processed by two-dimensional Fourier transform to obtain the displacement distribution result in the wave number domain. This method can reduce noise interference and improve the accuracy of data analysis, thereby providing a reliable basis for the performance evaluation and optimization of surface acoustic wave devices.

[0100] Among them, preprocessing usually includes steps such as smoothing and filtering, the purpose of which is to improve the quality of data and thus improve the accuracy of subsequent analysis. In specific implementations, smoothing algorithms, such as moving average method, Savitzky-Golay filtering, etc., can be used to reduce random noise in the data; digital filters (such as low-pass filters, high-pass filters, band-pass filters, etc.) can be applied to remove noise within a specific frequency range; if there is an obvious trend component in the data, polynomial fitting or other methods can be used to remove the trend to avoid its impact on the Fourier transform results.

[0101] In practical applications, two-dimensional discrete fast Fourier transform can be used for efficient calculation, which can significantly reduce computing time and resource consumption.

[0102] The wave number domain displacement distribution results at different phase moments are as follows: Figure 8 As shown, it can be seen that compared with the wave number domain displacement distribution result (0°) obtained by the traditional 2DFFT simulation scheme, the wave number domain displacement distribution result under the 90° phase can more clearly and obviously present the characteristics of the leakage sound field.

[0103] It can be seen from the above technical solutions of the embodiments of the present application that the embodiments of the present application select the target phase point within any simple harmonic period, and perform a spatial domain to wave number domain conversion process on the data corresponding to the target phase point in the target spatial domain displacement distribution data, so as to obtain the wave number domain displacement distribution result. When the amplitude of the resonant field is minimum, the contribution of the leakage field is relatively large. At this time, analysis can more accurately capture the characteristics of the leakage field, thereby providing a reliable basis for the performance evaluation and optimization of surface acoustic wave devices.

[0104] In an exemplary embodiment, after the above step S505, the following steps may also be included:

[0105] Perform spectrum analysis on the displacement distribution results in the wave number domain to obtain spectrum analysis results;

[0106] Based on the spectrum analysis results, the key parameters of the total sound field and the key parameters of the leakage field are extracted from the displacement distribution results in the wavenumber domain;

[0107] The key parameters of the total acoustic field and the key parameters of the leakage field are used to evaluate the performance indicators of the internal leakage field of the surface acoustic wave device.

[0108] Among them, the spectrum analysis results characterize the distribution of acoustic wave energy inside the surface acoustic wave device, and are used to help identify and quantify the various components and characteristics in the surface acoustic wave device.

[0109] Specifically, Fourier transform or other spectrum analysis methods are used to convert the displacement distribution results in the wavenumber domain into a spectrum image, i.e., a spectrum analysis result. Through the spectrum image, it can be observed which wavenumber components occupy a dominant position and whether there is a leakage field.

[0110] Among them, the key parameters of the total sound field mainly include the wave number components with higher energy (ie, main wave number components) in the spectrum image, the energy intensity of these main wave number components, the propagation direction of these main wave number components, and so on.

[0111] Specifically, the key parameters of the total sound field provide a baseline comparison, based on which the degree of deviation of the leakage field from the normal working mode can be quantified and evaluated. For example, by comparing the energy intensity of the total sound field with the energy intensity of the leakage field, the energy contribution of the leakage field can be determined, and the main wave number components of the total sound field can be used to distinguish the main propagation modes in the normal working mode, making it easier to identify abnormal modes (i.e., leakage fields).

[0112] Among them, the key parameters of the leakage field mainly include the wavenumber component with abnormally increased energy in the spectrum image (i.e., the leakage wavenumber component), the energy intensity of the leakage wavenumber component, the ratio of the leakage energy to the total sound wave energy (i.e., the leakage rate), the propagation direction of the leakage wavenumber component, and so on.

[0113] For example, the degree of leakage can be evaluated based on the energy intensity of the leakage field, the proportion of leakage to the total energy can be measured based on the leakage rate, the patterns in the leakage field can be analyzed, such as whether there are specific leakage patterns (such as surface waves), the main propagation direction of the leakage field can be analyzed, and so on.

[0114] It can be seen from the above technical solutions of the embodiments of the present application that the embodiments of the present application obtain spectrum analysis results characterizing the energy distribution of acoustic waves inside the surface acoustic wave device by performing spectrum analysis on the displacement distribution results in the wave number domain. Based on the spectrum analysis results, key parameters of the total sound field and the leakage field can be extracted, and these parameters can be used to evaluate the performance indicators of the leakage field inside the surface acoustic wave device, thereby helping to understand the leakage of surface acoustic waves inside the surface acoustic wave device and guiding design optimization.

[0115] Corresponding to the simulation methods of the surface acoustic wave device provided in the above-mentioned embodiments, the embodiment of the present application also provides a simulation device of the surface acoustic wave device. Since the simulation device of the surface acoustic wave device provided in the embodiment of the present application corresponds to the simulation methods of the surface acoustic wave device provided in the above-mentioned embodiments, the implementation methods of the simulation methods of the aforementioned surface acoustic wave devices are also applicable to the simulation device of the surface acoustic wave device provided in this embodiment, and will not be described in detail in this embodiment.

[0116] See also Fig. 9 , which is a schematic diagram of the structure of a simulation device for a surface acoustic wave device provided in an embodiment of the present application, the device has the function of implementing the simulation method for the surface acoustic wave device in the above method embodiment, and the function can be implemented by hardware, or by hardware executing corresponding software. Fig. 9 As shown, the device may include:

[0117] The data acquisition module 910 is used to acquire field distribution data of the total acoustic field inside the surface acoustic wave device; the total acoustic field is composed of multiple components, and the multiple components include a resonant field;

[0118] The phase point selection module 920 is used to determine the target spatial domain displacement distribution data in the field distribution data, and select the target phase point within any simple harmonic period based on the amplitude of the resonance field corresponding to each phase point indicated by the target spatial domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected within any simple harmonic period;

[0119] The data conversion module 930 is used to convert the data corresponding to the target phase point in the target spatial domain displacement distribution data from the spatial domain to the wave number domain to obtain the wave number domain displacement distribution result; the wave number domain displacement distribution result is used to evaluate the leakage of the surface acoustic wave inside the surface acoustic wave device.

[0120] In an exemplary embodiment, the phase point selection module includes:

[0121] A region identification module, for identifying a target region where acoustic wave energy is concentrated inside a surface acoustic wave device based on field distribution data;

[0122] A data determination module, used to determine the target space domain displacement distribution data corresponding to the target area in the field distribution data;

[0123] An amplitude determination module, used to determine the amplitude of the resonant field corresponding to each phase point in any simple harmonic period based on the target spatial domain displacement distribution data;

[0124] The phase determination module is used to determine the target phase point based on the amplitude of the resonant field corresponding to each phase point in any simple harmonic period.

[0125] In an exemplary embodiment, the data acquisition module includes:

[0126] A model building module, used to build a slice model of a surface acoustic wave device;

[0127] The model simulation module is used to perform finite element simulation on the slice model to obtain a simulation model of the slice model of the surface acoustic wave device; the simulation model indicates field distribution data of the total acoustic field inside the surface acoustic wave device.

[0128] In an exemplary embodiment, the region identification module includes:

[0129] The resonance energy module is used to identify the target area where the acoustic wave energy is concentrated in the resonance field inside the surface acoustic wave device based on the field distribution data; the data corresponding to the resonance field in the field distribution data is manifested as resonance in the form of standing waves.

[0130] In an exemplary embodiment, the region identification module includes:

[0131] The section selection module is used to select a target section as a target area in the simulation model based on the elastic field distribution and the electric field distribution in the field distribution data; the acoustic wave energy concentration on the target section is greater than the acoustic wave energy concentration on the unselected section in the simulation model.

[0132] In an exemplary embodiment, the data conversion module includes:

[0133] A data preprocessing module is used to preprocess the data corresponding to the target phase point in the target space domain displacement distribution data to remove noise interference of the data;

[0134] The Fourier transform module is used to perform two-dimensional Fourier transform processing on the preprocessed data to obtain the displacement distribution results in the wavenumber domain.

[0135] In an exemplary embodiment, the device further includes a leakage analysis module for evaluating the leakage of the surface acoustic wave inside the surface acoustic wave device based on the wave number domain displacement distribution result, and the leakage analysis module includes:

[0136] The spectrum analysis module is used to perform spectrum analysis on the displacement distribution results in the wave number domain to obtain spectrum analysis results; the spectrum analysis results represent the distribution of acoustic wave energy inside the surface acoustic wave device;

[0137] A parameter extraction module is used to extract key parameters of the total sound field and key parameters of the leakage field from the displacement distribution results in the wave number domain based on the spectrum analysis results;

[0138] The performance evaluation module is used to evaluate the performance index of the internal leakage field of the surface acoustic wave device by using the key parameters of the total acoustic field and the key parameters of the leakage field.

[0139] It should be noted that the device provided in the above embodiment, when implementing its functions, is only illustrated by the division of the above functional modules. In actual applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above. In addition, the device and method embodiments provided in the above embodiment belong to the same concept, and the specific implementation process is detailed in the method embodiment, which will not be repeated here.

[0140] An embodiment of the present application provides an electronic device, which includes a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or the at least one program is loaded and executed by the processor to implement any one of the surface acoustic wave device simulation methods provided in the above method embodiments.

[0141] The memory can be used to store software programs and modules. The processor executes various functional applications and data processing by running the software programs and modules stored in the memory. The memory can mainly include a program storage area and a data storage area, wherein the program storage area can store an operating system, application programs required for functions, etc.; the data storage area can store data created according to the use of the device, etc. In addition, the memory can include a high-speed random access memory and can also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other volatile solid-state storage devices. Accordingly, the memory can also include a memory controller to provide the processor with access to the memory.

[0142] The method embodiments provided in the embodiments of the present application may be executed in a computer terminal, a server or a similar computing device, that is, the above-mentioned electronic device may include a computer terminal, a server or a similar computing device. Fig.10 is a hardware structure block diagram of a computer device for running a method for simulating a surface acoustic wave device provided by an embodiment of the present invention, such as Fig.10As shown, the internal structure of the computer device may include but is not limited to: a processor, a network interface and a memory. The processor, network interface and memory in the computer device may be connected via a bus or other means. Fig.10 The example of connecting through bus is taken in the following.

[0143] Among them, the processor (or CPU (Central Processing Unit)) is the computing core and control core of the computer device. The network interface may optionally include a standard wired interface, a wireless interface (such as WI-FI, a mobile communication interface, etc.). Memory is a memory device in a computer device for storing programs and data. It is understandable that the memory here can be a high-speed RAM storage device or a non-volatile memory device (non-volatile memory), such as at least one disk storage device; optionally, it can also be at least one storage device located away from the aforementioned processor. The memory provides a storage space, which stores the operating system of the electronic device, which may include but is not limited to: Windows system (an operating system), Linux (an operating system), Android (Android, a mobile operating system) system, IOS (a mobile operating system) system, etc., and the present invention does not limit this; and, in the storage space, one or more instructions suitable for being loaded and executed by the processor are also stored, and these instructions may be one or more computer programs (including program codes). In the embodiment of this specification, the processor loads and executes one or more instructions stored in the memory to implement the simulation method of the surface acoustic wave device provided in the above method embodiment.

[0144] An embodiment of the present application also provides a computer-readable storage medium, which can be set in an electronic device to store at least one instruction or at least one program related to a simulation method for a surface acoustic wave device. The at least one instruction or the at least one program is loaded and executed by the processor to implement any one of the surface acoustic wave device simulation methods provided in the above method embodiments.

[0145] Optionally, in this embodiment, the above-mentioned storage medium may include but is not limited to: a USB flash drive, a read-only memory (ROM), a random access memory (RAM), a mobile hard disk, a magnetic disk or an optical disk, and other media that can store program codes.

[0146] It should be noted that the above-mentioned sequence of the embodiments of the present application is for description only and does not represent the advantages and disadvantages of the embodiments. The above-mentioned specific embodiments of this specification are described. Other embodiments are within the scope of the attached claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0147] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0148] A person skilled in the art will understand that all or part of the steps to implement the above embodiments may be accomplished by hardware or by instructing related hardware through a program, and the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a disk or an optical disk, etc.

[0149] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A method for simulating a surface acoustic wave device, characterized in that: The method comprises: Acquiring field distribution data of a total acoustic field inside a surface acoustic wave device; the total acoustic field is composed of a plurality of components, and the plurality of components includes a resonant field; Determine the target spatial domain displacement distribution data in the field distribution data, and select a target phase point within any simple harmonic period based on the amplitude of the resonance field corresponding to each phase point indicated by the target spatial domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected within any simple harmonic period; The data corresponding to the target phase point in the target spatial domain displacement distribution data is converted from the spatial domain to the wave number domain to obtain a wave number domain displacement distribution result; the wave number domain displacement distribution result is used to evaluate the leakage of the surface acoustic wave inside the surface acoustic wave device.

2. The method for simulating a surface acoustic wave device according to claim 1, characterized in that: The determining of the target spatial domain displacement distribution data in the field distribution data, and selecting a target phase point within any simple harmonic period based on the amplitude of the resonant field corresponding to each phase point indicated by the target spatial domain displacement distribution data, comprises: Based on the field distribution data, identifying a target area where acoustic wave energy is concentrated inside the surface acoustic wave device; Determine the target space domain displacement distribution data corresponding to the target area in the field distribution data; Determining the amplitude of the resonant field corresponding to each phase point within any simple harmonic period based on the target spatial domain displacement distribution data; The target phase point is determined based on the amplitude of the resonant field corresponding to each phase point in any simple harmonic period.

3. The method for simulating a surface acoustic wave device according to claim 2, characterized in that: The method of obtaining field distribution data of the total acoustic field inside the surface acoustic wave device includes: Establishing a slice model of the surface acoustic wave device; Finite element simulation is performed on the slice model to obtain a simulation model of the slice model of the surface acoustic wave device; the simulation model indicates field distribution data of the total acoustic field inside the surface acoustic wave device.

4. The method for simulating a surface acoustic wave device according to claim 3, characterized in that: The step of identifying a target area where acoustic wave energy is concentrated inside the surface acoustic wave device based on the field distribution data comprises: Based on the field distribution data, the target area where the acoustic wave energy is concentrated in the internal resonance field of the surface acoustic wave device is identified; the data corresponding to the resonance field in the field distribution data is manifested as resonance in the form of standing waves.

5. The method for simulating a surface acoustic wave device according to claim 3, characterized in that: The step of identifying a target area where acoustic wave energy is concentrated inside the surface acoustic wave device based on the field distribution data comprises: Based on the elastic field distribution and the electric field distribution in the field distribution data, the target section is selected as the target area in the simulation model; the acoustic wave energy concentration on the target section is greater than the acoustic wave energy concentration on the section that is not selected in the simulation model.

6. The method for simulating a surface acoustic wave device according to claim 1, characterized in that: The step of converting the data corresponding to the target phase point in the target spatial domain displacement distribution data from the spatial domain to the wave number domain to obtain the wave number domain displacement distribution result includes: Preprocessing the data corresponding to the target phase point in the target space domain displacement distribution data to remove noise interference from the data; The preprocessed data is subjected to two-dimensional Fourier transform processing to obtain the displacement distribution result in the wavenumber domain.

7. The method for simulating a surface acoustic wave device according to any one of claims 1 to 6, characterized in that: The plurality of components also include a leakage field, the method further comprising: Performing spectrum analysis on the wave number domain displacement distribution result to obtain a spectrum analysis result; the spectrum analysis result represents the distribution of acoustic wave energy inside the surface acoustic wave device; Based on the spectrum analysis result, extracting key parameters of the total sound field and key parameters of the leakage field from the wavenumber domain displacement distribution result; The performance index of the internal leakage field of the surface acoustic wave device is evaluated by using the key parameters of the total acoustic field and the key parameters of the leakage field.

8. A simulation device for a surface acoustic wave device, characterized in that: The device comprises: A data acquisition module, used to acquire field distribution data of a total acoustic field inside a surface acoustic wave device; the total acoustic field is composed of multiple components, and the multiple components include a resonant field; A phase point selection module, used to determine the target space domain displacement distribution data in the field distribution data, and select a target phase point within any simple harmonic period based on the amplitude of the resonance field corresponding to each phase point indicated by the target space domain displacement distribution data; wherein the amplitude of the resonance field corresponding to the target phase point is smaller than the amplitude of the resonance field corresponding to the phase point not selected within any simple harmonic period; The data conversion module is used to convert the data corresponding to the target phase point in the target spatial domain displacement distribution data from the spatial domain to the wave number domain to obtain the wave number domain displacement distribution result; the wave number domain displacement distribution result is used to evaluate the leakage of the surface acoustic wave inside the surface acoustic wave device.

9. An electronic device, characterized in that: The method comprises a processor and a memory, wherein the memory stores at least one instruction or at least one program, and the at least one instruction or at least one program is loaded and executed by the processor to implement the simulation method of the surface acoustic wave device according to any one of claims 1 to 7.

10. A computer-readable storage medium, wherein at least one instruction or at least one program is stored in the storage medium, and the at least one instruction or the at least one program is loaded and executed by a processor to implement the simulation method of a surface acoustic wave device according to any one of claims 1 to 7.

11. A computer program, characterized in that When the computer program is executed by a processor, the simulation method of the surface acoustic wave device according to any one of claims 1 to 7 is realized.

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